JP5271762B2 - Discharge lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a discharge lamp with a large light output while surely preventing surface discharge. <P>SOLUTION: An excimer lamp is structured of three tubular discharge tubes 20, 40, 60, and the tubes are arranged in parallel to adjoin with each other to pinch the discharge tube 40 between the discharge tubes 20, 60. Among the three tubular discharge tubes 20, 40, 60, band-shaped electrodes 32, 34 and electrodes 72, 74 are arranged in opposition in walls of the discharge tubes 20, 60. On the other hand, no electrodes are provided in the discharge tube 40. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a discharge lamp in which electrodes are not disposed in a discharge space, such as an excimer lamp that emits light by dielectric barrier discharge or capacitively coupled high-frequency discharge, or an external electrode type fluorescent lamp (non-electrode). , Regarding placement.

  In the double cylindrical tube type excimer lamp, the light emitting portion is constituted by two coaxial cylindrical tubes that are long in the axial direction, and high-pressure gas is enclosed in the light emitting tube, and the inner tube inner surface and the outer tube outer surface along the axial direction. A pair of electrodes are arranged to face each other. Then, by applying a high-frequency voltage of several kW between the electrodes, excimer is generated in the discharge space, and discharge light is emitted (see, for example, Patent Document 1).

  Alternatively, a fluorescent lamp in which a plurality of discharge containers are arranged adjacent to each other and the discharge containers are collectively accommodated inside a large outer tube is also known, and the emission intensity of the entire lamp can be increased (see Patent Document 2). ). In this case, a plurality of discharge tubes are arranged in a grid or ring shape, and electrodes are arranged around the discharge tubes.

  In the electrodeless discharge lamp, a high voltage is applied between the electrodes extending along the discharge vessel, so that creeping discharge is likely to occur. As a method for preventing creeping discharge, a configuration in which an insulating layer is applied and coated is generally known. For example, a glass bulb coating layer is stacked on a strip-shaped external electrode disposed on the outer surface of the discharge vessel (see Patent Document 3). Alternatively, an auxiliary valve is mounted on the valve on which the strip electrode is disposed (see Patent Document 4).

Japanese Patent No. 3170952 JP 2006-24562 A Japanese Utility Model Publication No. 5-90803 Japanese Patent Laid-Open No. 7-272691

  In a double-tube excimer lamp, when a plurality of discharge tubes are arranged, the size of the entire lamp becomes large and complicated, and the installation space is limited. Even when a plurality of discharge vessels are accommodated inside one outer tube, the size cannot be increased, and the distance between the electrodes arranged on the outer peripheral surface of the discharge vessel is shortened, resulting in dielectric breakdown inside the outer tube. There is a fear.

  On the other hand, when adopting a single tube structure like a conventional external electrode type fluorescent lamp, the applied voltage and the pressure of the sealed gas are high, so that it is possible to sufficiently prevent creeping discharge by simply covering the electrode with an insulating material. However, dielectric breakdown occurs through the gap between the electrode and the insulating layer. For this reason, if a discharge lamp in which a plurality of discharge vessels are arranged in parallel is formed, creeping discharge occurs in each discharge vessel, causing dielectric breakdown, resulting in unstable discharge emission and reduced light output.

  The discharge lamp of the present invention is a discharge lamp that can sufficiently prevent creeping discharge and reliably emit light with high output, and includes a plurality of tubular discharge containers filled with a discharge gas, and an axial direction of the discharge container. And a plurality of discharge vessels arranged in parallel in the axial direction and adjacent to each other. Here, “adjacent to each other” means that each discharge vessel is in contact with any other discharge vessel without leaving a gap with the adjacent discharge vessel.

  The discharge containers can be arranged in various arrangements. When light is emitted in a predetermined direction, a plurality of discharge containers may be arranged adjacent to each other in parallel when viewed from the axial direction. Alternatively, when light is emitted in all directions outside the lamp, or when irradiation objects such as piping are irradiated with light from all directions, a plurality of discharge containers may be arranged adjacent to each other in an annular shape. The discharge containers of the same size may be arranged, or discharge containers having different diameters and sizes may be arranged. As a gas to be sealed in the discharge vessel, a rare gas, a halogen gas, or a mixed gas of a rare gas and a halogen gas may be sealed.

  In the present invention, at least one of the electrode pairs determined to have different potentials among the plurality of electrodes is embedded in the wall of the discharge vessel. Here, “being embedded in the wall” means that the electrode is embedded so as to be embedded in the discharge vessel wall. For example, two electrodes may be embedded in one discharge vessel wall (particularly, so that the electrodes face each other). Alternatively, one electrode may be embedded in the discharge vessel wall, and electrode pairs having different polarities may be formed between adjacent discharge vessels.

  When the electrodes are embedded in the discharge vessel wall, a dielectric layer from the pair of electrodes embedded in different discharge vessels to the discharge space sandwiched between the electrodes can be formed only by the discharge vessel wall. . That is, a solid dielectric layer can be formed without providing a space between the electrode pair and the discharge space. For example, an electrode pair embedded in different discharge vessels forms a discharge vessel wall layer through the contact points of the two discharge vessels. Thereby, creeping discharge is prevented.

  When a voltage is applied to the electrode pair for lighting the lamp, discharge light is emitted in a discharge space sandwiched between the electrode pair, and light is irradiated to the outside of the lamp. Since the discharge containers are adjacent to each other, it is possible to arbitrarily define an electrode pair having a potential difference and cause discharge light emission in a discharge space existing therebetween. Therefore, by arranging the discharge vessel based on the required light output of the entire lamp and setting the electrode pair having a potential difference, high output light can be emitted from the lamp.

  As the discharge vessel, for example, a discharge vessel embedded so that two electrodes face each other (hereinafter, referred to as a “both electrode discharge vessel”) may be configured. However, if the number of electrodes is large, the amount of heat generated is increased by that amount, and if a large number of discharge vessels having two electrodes embedded therein are arranged, heat dissipation treatment becomes a problem. In order to suppress the heat generation as much as possible, it is desirable to reduce the number of electrodes without reducing the light output.

  Therefore, it is preferable to interpose a non-electrode discharge vessel between a plurality of both electrode discharge vessels, including a discharge vessel in which electrodes are not embedded (hereinafter referred to as an electrodeless discharge vessel). By defining two electrode pairs of two electrode discharge vessels different from each other and opposing electrode pairs with the electrodeless discharge vessel interposed therebetween, different discharge potentials can be emitted in the electrodeless discharge vessel.

  Further, in order to reduce the number of electrodes while preventing variations in distance between the electrode pairs, it is preferable to provide a single electrode discharge vessel in which only one electrode is embedded in the wall as the discharge vessel. For example, a plurality of single electrode discharge vessels may be adjacent to each other so that a discharge space is sandwiched between electrode pairs embedded in different discharge vessels. That is, the adjacent single electrode discharge vessels are arranged so as not to contact each other in the vicinity of the wall surface where the electrodes exist.

  Alternatively, an external electrode may be provided so that the single electrode discharge vessel is in contact with the external electrode. In this case, it is possible to cause discharge light emission in the discharge vessel at the end of the continuous single electrode discharge vessel. Even in this case, creeping discharge can be prevented because one of the electrodes is embedded in the container wall.

  As described above, in a series of discharge containers, a dielectric layer on the container wall is formed through the contact points. Therefore, it is possible to change the discharge container that emits light by changing the electrode pair to which the voltage is applied. Accordingly, in order to adjust the number of discharge containers that emit light, it is desirable that the combination of electrode pairs can be changed. For example, at the start of lighting, two electrodes sandwiching a discharge vessel filled with a gas that easily emits light is defined as an electrode pair.

  When the same discharge gas is sealed in the discharge vessel, it is desirable to make the inter-electrode dielectric constants of the electrode pairs substantially equal to prevent variation in the light output from the discharge vessel.

  A discharge lamp according to another aspect of the present invention includes a plurality of electrode discharge tubes in which a pair of electrodes are embedded in a wall along the tube axis direction, and at least one electrodeless discharge tube in which no electrodes are embedded, A plurality of electrode discharge tubes and electrodeless discharge tubes are arranged in parallel and adjacent to each other, and the electrodeless discharge tubes are interposed between the plurality of electrode discharge tubes.

  For example, both electrode discharge tubes and electrodeless discharge tubes are alternately arranged and arranged in parallel or in an annular shape when viewed from the axial direction. When discharge light is emitted in the electrodeless discharge tube, two electrodes close to the electrodeless discharge tube in the two electrode discharge tubes adjacent to the electrodeless discharge tube may be determined as different potentials.

  In order to shorten the distance between the electrodes of the electrode pair to easily cause dielectric breakdown, it is desirable that the wall shape in the vicinity of the electrodes of both electrode discharge tubes be formed flat.

  A discharge lamp according to another aspect of the present invention includes a plurality of single electrode discharge tubes in which one electrode is embedded in the wall along the tube axis direction and a pair of electrodes embedded in the wall along the tube axis direction. At least one double-electrode discharge tube, and the multiple single-electrode discharge tubes and the double-electrode discharge tubes are arranged in parallel and alternately adjacent to each other so that a discharge space is sandwiched between the electrodes. Both electrode discharge tubes are each positioned around an axis. Here, “positioned around the axis” means that the position (angle) in the rotation direction of the discharge vessel is such that the buried electrode is located at a predetermined position relative to the electrode of another discharge vessel. It means to be determined.

  A discharge lamp according to another aspect of the present invention includes a plurality of single electrode discharge tubes embedded in a wall along one electrode tube axis direction, and the plurality of single electrode discharge tubes are adjacent to each other in parallel. A plurality of single electrode discharge tubes are each positioned around an axis so as to sandwich a discharge space between the electrodes.

  A discharge lamp according to another aspect of the present invention includes a plurality of single-electrode discharge tubes in which one electrode is embedded in the wall along the tube axis direction, one of the electrode pairs is embedded in the wall, and the other is an outer peripheral surface. A plurality of single-electrode discharge tubes, the plurality of single-electrode discharge tubes and the two-electrode discharge tubes being adjacent to each other in parallel and sandwiching a discharge space between the electrodes. The tubes are each positioned around an axis.

  A discharge lamp according to another aspect of the present invention includes a plurality of single electrode discharge tubes in which one electrode (hereinafter referred to as a strip electrode) is embedded in a wall along the tube axis direction, and a plurality of single electrode discharge tubes, respectively. Each of the plurality of single electrode discharge tubes are arranged in parallel so that the discharge spaces are sandwiched between the strip electrode and the electrode body. It is characterized by being positioned around.

  For example, the electrode body is configured in a flat shape or the like, is in contact with each of the plurality of single electrode discharge tubes, and functions as one electrode of an electrode pair for all the discharge vessels. In this case, the strip electrode may be directed in a direction inclined in the vertical direction of the electrode body, or may be directed in the vertical direction of the electrode body.

  Alternatively, the electrode body may be formed in a cylindrical shape, and a plurality of single electrode discharge tubes are arranged so as to be in contact with the inner peripheral surface of the electrode body, and an irradiation symmetry object such as a pipe or a cooling part is provided at the center of the electrode body. Deploy. Or you may arrange | position so that the outer peripheral surface of an electrode body may be touched, and may radiate light radially in all directions. In this case, the electrode body may be formed in a cylindrical shape.

  According to the present invention, it is possible to realize a discharge lamp having a large light output while reliably preventing creeping discharge.

It is a schematic plan view of the excimer lamp which is 1st Embodiment. It is a schematic sectional drawing of the radial direction along II-II of FIG. FIG. 3 is a schematic cross-sectional view in the axial direction along III-III in FIG. 2. It is the block diagram which showed the power supply part of the excimer lamp. It is radial direction sectional drawing of the excimer lamp which is 2nd Embodiment. It is a side view of the excimer lamp which is 3rd Embodiment. It is radial direction sectional drawing of the excimer lamp along IIV-IIV of FIG. It is radial direction sectional drawing of the excimer lamp which is 4th Embodiment. It is an axial sectional view along IX-IX in FIG. It is radial direction sectional drawing of the excimer lamp which is 5th Embodiment. It is radial direction sectional drawing of the excimer lamp which is 6th Embodiment. It is an axial sectional view along XII-XII of FIG. It is a top view of the excimer lamp which is 7th Embodiment. It is radial direction sectional drawing along XIV-XIV of FIG. It is radial direction sectional drawing of the excimer lamp which is 8th Embodiment. It is radial direction sectional drawing of the excimer lamp which is 9th Embodiment. It is radial direction sectional drawing of the excimer lamp which is 10th Embodiment. It is radial direction sectional drawing of the excimer lamp which is 11th Embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic plan view of an excimer lamp according to the first embodiment. 2 is a schematic cross-sectional view in the radial direction along II-II in FIG. FIG. 3 is a schematic cross-sectional view in the axial direction along III-III in FIG. 2.

  The excimer lamp 10 is a discharge lamp composed of three single tubular discharge tubes 20, 40, 60 made of a dielectric material such as quartz glass, and is arranged in parallel along the tube axis direction. Both ends of the discharge tubes 20, 40, 60 are sealed in a hemispherical shape, and are fitted and fixed to square holding containers 12, 14.

  The discharge tube (both electrode discharge tubes) 20 is a discharge tube in which a cylindrical inner tube 22 and a cylindrical coaxial outer tube 24 covering the inner tube 22 are welded and integrally formed (see FIG. 2). In the wall, strip electrodes 32 and 34 extending in the tube axis direction are embedded so as to face each other. The electrodes 32 and 34 are constituted by a strip-shaped metal foil made of molybdenum or the like. 2 and 3, the hatching of the outer tube 22 and the inner tube 24 is illustrated separately for convenience of explanation.

  Feeding lines 36 and 38 extending to the outside are connected to opposite ends in the axial direction at the ends of the electrodes 32 and 34. The feed lines 36 and 38 are connected to a power supply unit (not shown here) installed outside the excimer lamp 10, and power is supplied to the discharge tube 20 via the feed lines 36 and 38.

  The discharge tube 60 is a discharge tube having the same shape as the discharge tube 20 and is a discharge tube formed by welding an inner tube 62 and an outer tube 64 arranged coaxially, so that the strip electrodes 72 and 74 face each other. Embedded in the tube wall in a sealed state and connected to the feeder lines 76 and 78. On the other hand, in the discharge tube (electrodeless discharge tube) 40, no electrode is embedded in the tube wall.

  The discharge tubes 20, 40, 60 are arranged adjacent to each other so that the electrodes 32, 34, 72, 74 are arranged in one direction. That is, each discharge tube is in contact with the adjacent discharge tube. The inter-electrode distance d1 of the electrodes 32 and 34, the inter-electrode distance d2 of the electrodes 34 and 72, and the inter-electrode distance d3 of the electrodes 72 and 74 are determined so that the dielectric constants at the inter-electrode distances are substantially equal. Here, the thickness of the discharge space 40 and the size of the diameter are determined according to the dielectric constant between the electrodes 32 and 34 and the electrodes 72 and 74. Furthermore, the distance between the electrodes of each discharge tube may be different depending on the type of discharge gas to be sealed. For example, the distance between the electrodes of the discharge tube filled with a gas that is difficult to light may be set shorter than the distance between the electrodes of the discharge tube filled with a gas that is easy to light.

  The discharge spaces 30, 50 and 70 of the discharge tubes 20, 40 and 60 are filled with a discharge gas which generates excimer molecules during discharge. Here, argon gas is sealed in the discharge space 50, and xenon gas is sealed in the discharge spaces 30 and 70.

  FIG. 4 is a block diagram showing a power supply unit of the excimer lamp.

  The power supply unit of the excimer lamp 10 includes a power control circuit 110 that controls power from an AC power supply, a switching circuit 120, and a transformer circuit 130. The excimer lamp 10 is connected to the transformer circuit 130. The switching circuit 120 converts the low frequency AC voltage into a high frequency DC voltage. The transformer 130 boosts the voltage sent from the switching circuit 120.

  The power control circuit 110 can control power supply so as to change the polarities of the electrodes 32 and 34 of the discharge tube 20 and the electrodes 72 and 74 of the discharge tube 60. Referring to FIG. 3, when discharge light is emitted in all the discharge tubes 20, 40, 60, the electrode polarity is determined so that the electrodes 32, 34, the electrodes 34, 72, and the electrodes 72, 74 have different potentials. . For example, the polarities of the electrodes 32, 34, 72, and 74 are determined in the order of +, −, +, and −, respectively.

  On the other hand, when discharge light is emitted from the discharge tubes 20 and 60 except for the discharge tube 40, the electrode polarity is determined so that the electrodes 34 and 72 have the same potential and the electrodes 32 and 34 and the electrodes 72 and 74 have different potentials. For example, the polarities of the electrodes 32, 34, 72, and 74 are determined in the order of +, −, −, and +, respectively. In addition, when only the discharge tube 40 emits light, the electrode polarity is determined so that the electrodes 32, 34, 72, and 74 have the same potential and the electrodes 34 and 72 have different potentials.

  Here, the discharge light is emitted in the discharge space 40 filled with argon gas as a gas that is easily lit from the dark state at the start of discharge, and then the discharge light is emitted in the discharge tubes 30 and 70 filled with xenon gas that is difficult to turn on. ing.

  Therefore, at the start of lighting, the electrodes 34 and 72 are set to opposite electrode polarities, and a high voltage of several kV is applied to the electrodes 34 and 72. The electrodes 32 and 74 have the same polarity as the electrodes 34 and 72, respectively, and have the same potential. A dielectric barrier discharge is generated in the discharge space 50, and excimer light (ultraviolet light) passes through the discharge tube 40 and is emitted to the outside.

  After the elapse of a predetermined time from the start of lighting, the electrodes 32 and 74 become different polarities of the electrodes 34 and 72, respectively, and a voltage is applied between the electrodes 32 and 34 and the electrodes 72 and 74. As a result, dielectric barrier discharge occurs in the discharge space 30 and the discharge space 70 in addition to the discharge space 50, and excimer light is emitted from the discharge tubes 20, 40, and 60 to the outside.

  As described above, according to the present embodiment, the excimer lamp 10 includes the three tubular discharge tubes 20, 40, 60, and is arranged adjacent to each other so as to be sandwiched between the discharge tubes 20, 60. ing. In the walls of the discharge tubes 20, 60, strip-shaped electrodes 32, 34 and electrodes 72, 74 are arranged to face each other. On the other hand, the discharge tube 40 is not provided with electrodes.

  The discharge tubes 20, 40, 60 are arranged in a line when viewed from the axial direction, and the facing direction of the electrodes 32, 34 and the electrodes 72, 74 is along the arrangement direction of the discharge tubes 20, 40, 60. That is, the electrodes 32, 34, 72, 74 are arranged along a predetermined direction.

  Since the electrodes 32, 34, 72, 74 are embedded in the discharge tubes 20, 60 in a sealed state, the electrodes 32, 34, 72, 74 are external to the lamp even when a high voltage of several kV is applied between the electrodes. Since it is insulated from (for example, the housing of the lamp), the occurrence of creeping discharge can be reliably prevented.

  The discharge tubes 20, 40, 60 are adjacent to each other so as to sandwich the discharge tube 40, that is, the tube wall of the discharge tube is connected through the contact from the discharge tube 20 to the discharge tube 60, so that there is no electrode. Also in the discharge tube 40, discharge light emission can be performed without creeping discharge.

  Furthermore, by providing a discharge tube without electrodes, it is possible to increase the light output of the entire lamp while suppressing the number of electrodes. Since there is no fear of creeping discharge, there is no need to provide a storage container that electrically shuts off the discharge tubes 20, 40, 60 from the outside, and the lamp can be made compact. Furthermore, by providing a discharge tube without an electrode, it is possible to suppress the amount of electrode heat generated during lighting.

  Further, by appropriately setting the polarities of the electrodes, it is possible to discharge only the discharge spaces 20 and 40 and to discharge all the discharge spaces 20, 40 and 60. As described above, by changing the combination of the electrode pair to which a voltage is applied by changing the polarity of the electrode, the discharge tube for discharge light emission can be selected, so that the light output of the entire lamp can be adjusted. Alternatively, by disposing discharge tubes having different discharge gases, it is possible to radiate while selecting illumination light having a specific wavelength.

  On the other hand, since the discharge tubes 20, 60 are positioned with respect to the axis so that the electrodes 32, 34, 72, 74 are arranged along a straight line, the inter-electrode distance between the electrodes 32, 34 or the electrodes 72, 74, The distance between the electrodes 34 and 72 is approximately equal. Thereby, the dielectric constant between each electrode becomes the same, and the load between electrodes becomes equal. Therefore, when the same discharge gas is enclosed in the discharge tubes 20, 40, 60, variations in emission intensity can be suppressed.

  As a discharge gas, in addition to a rare gas (Xe, Kr, Ar, etc.), a gas that generates excimer light, such as a halogen gas (F, Cl, Br, etc.), or a mixture of a plurality of kinds of gases is enclosed. That's fine.

  The number of discharge tubes is arbitrary. Prepare two or more discharge tubes in which no electrode is embedded, place a discharge tube in which a pair of electrodes are embedded adjacent to each other, and connect a discharge tube with electrodes and a discharge tube without electrodes. You may arrange alternately.

  Next, the excimer lamp which is 2nd Embodiment is demonstrated using FIG. In the second embodiment, the electrode arrangement portion of the discharge tube is formed flat. About another structure, it is the same as 1st Embodiment.

  FIG. 5 is a radial cross-sectional view of an excimer lamp according to the second embodiment.

  As shown in FIG. 5, the excimer lamp 200 includes discharge tubes 220, 240, and 260. The discharge tube 220 has a pair of electrodes facing each other, while the discharge tube 240 has electrodes disposed thereon. It has not been. And the electrode arrangement | positioning part of the discharge tubes 220 and 260 is formed flat. Here, an inner tube 222 and an outer tube 224, which are formed in advance with opposing planar portions, are welded.

  With such a configuration, the distance between the electrodes can be shortened, the dielectric constant can be suppressed, and the discharge start due to dielectric breakdown, that is, the lighting start can be improved.

  Next, the excimer lamp which is 3rd Embodiment is demonstrated using FIG. In the third embodiment, a plurality of discharge tubes are annularly arranged. About another structure, it is the same as 1st Embodiment.

  FIG. 6 is a side view of an excimer lamp according to the third embodiment. FIG. 7 is a radial cross-sectional view of the excimer lamp along IIV-IIV in FIG. 6.

  The discharge tube 300 has a structure in which eight discharge tubes 310 to 380 are arranged in an annular shape when viewed from the axial direction, and is held by a housing portion 390. As shown in FIG. 7, the discharge tubes 320, 340, 360, 380 in which a pair of electrodes are arranged and the discharge tubes 310, 330, 350, 370 in which no electrodes are arranged are arranged alternately.

  By arranging a plurality of discharge tubes in this manner, a combination of different potential electrodes of the discharge tubes 320, 340, 360, and 380 can be selected, and only a predetermined discharge tube can emit light and emit light in a certain direction. it can. Alternatively, by emitting excimer light from all the discharge tubes, light can be emitted radially in all directions outside the lamp.

  For example, when used as a lamp that illuminates in the outer peripheral direction, it is possible to put a discharge tube in the reflector like an incandescent bulb. In addition, when used as a lamp that illuminates in the inner peripheral direction, a tube through which liquid or the like flows may be installed at the center.

  Next, the excimer lamp which is 4th Embodiment is demonstrated using FIG. In the fourth embodiment, a discharge tube in which one electrode is embedded is provided. About another structure, it is the same as 1st Embodiment.

  FIG. 8 is a radial sectional view of an excimer lamp according to the fourth embodiment. FIG. 9 is an axial sectional view taken along the line IX-IX in FIG.

  The excimer lamp 400 includes three discharge tubes 420, 440, and 460, which are arranged in parallel while being adjacent to each other. The discharge tube 440 includes a pair of band-like electrodes 442 and 444 arranged to face each other. On the other hand, the discharge tubes (single electrode discharge tubes) 420 and 460 include one electrode 422 and 462, respectively. The electrodes 422 and 462 are opposed to the electrodes 442 and 444, respectively, with the discharge space interposed therebetween.

  With such a configuration, it is possible to emit light from the three discharge tubes 420, 40, and 460 by appropriately determining the polarity of the electrodes, and to realize an excimer lamp that maintains the light output while suppressing the number of electrodes. be able to. Further, since the number of electrodes is small, the amount of electrode heat generated during lighting can be suppressed as a whole.

  Next, the excimer lamp which is 5th Embodiment is demonstrated using FIG. In the fifth embodiment, the discharge tubes are annularly arranged. About another structure, it is the same as 4th Embodiment.

  FIG. 10 is a radial cross-sectional view of an excimer lamp according to the fifth embodiment.

  As shown in FIG. 10, the excimer lamp 500 includes eight discharge tubes 510 to 580 in which one electrode is embedded in the wall, and is arranged in an annular shape so that the distance between adjacent electrodes is equal. The direction is fixed. With such a configuration, a high-power excimer lamp can be realized while reducing the number of electrodes.

  Next, the excimer lamp which is 6th Embodiment is demonstrated using FIG. In the sixth embodiment, some electrodes are provided outside the discharge tube. About another structure, it is the same as 4th Embodiment.

  FIG. 11 is a radial cross-sectional view of an excimer lamp according to the sixth embodiment. 12 is an axial cross-sectional view taken along the line XII-XII in FIG.

  Excimer lamp 600 has a configuration in which discharge tubes 620, 640, and 660 are arranged in parallel, and electrodes 622, 642, and 662 are embedded therein, respectively. A ground electrode 664 is attached to the outer peripheral surface of the discharge tube 660 so as to face the electrode 662.

  With such a configuration, the degree of freedom of combination of electrode pairs having different potentials is increased, and the degree of freedom of arrangement of the discharge tubes is also increased. Since the ground electrode exists outside the discharge tube, an outer tube that accommodates the discharge tubes 620, 640, and 660 may be provided.

  Next, an excimer lamp according to the seventh embodiment will be described with reference to FIGS. In the seventh embodiment, ground electrodes for a plurality of discharge tubes are provided outside. About another structure, it is the same as 6th Embodiment.

  FIG. 13 is a plan view of an excimer lamp according to the seventh embodiment. FIG. 14 is a radial cross-sectional view along XIV-XIV in FIG. 13.

  Excimer lamp 700 includes discharge tubes 720, 740, 760, and 780 that are adjacent to each other and flat ground electrode portion 710, and discharge tubes 720, 740, 760, and 780 are in contact with inner surface 710 </ b> S of ground electrode 710. The ground electrode part 710 includes a flat Mo (molybdenum) foil 712 that is a ground electrode, an insulator 714 such as quartz, and a cooling part 716, and the Mo foil 712 is connected to the discharge tubes 720, 740, 760 via the insulator 714. Is in contact with. The Mo foil 712 is grounded via the ground connection portion 710A. FIG. 14 does not show the ground electrode portion.

  In the discharge tubes 720, 740, 760, and 780, electrodes 722, 742, 762, and 782 are embedded in the tube wall, respectively. The electrodes 722, 742, 762, and 782 are positioned around the axis so as to sandwich the discharge spaces 730, 750, 770, and 790 with the ground electrode 710. Here, the electrodes 722, 742, 762, and 782 are oriented in a direction inclined about 45 degrees instead of being oriented in the direction perpendicular to the surface of the ground electrode 710.

  The Mo foil 712 covered with the insulating portion 714 has a different potential between the electrodes 722, 742, 762, and 782, and constitutes an electrode pair together with the electrodes in the discharge tube. The dielectric layer between the electrode pair is constituted by the insulator 714 and the tube wall of each discharge tube. Cooling water circulates in the cooling part 716 of the ground electrode part 710. Excimer light generated by discharge light emission is emitted toward the side opposite to the ground electrode portion 710.

  In this way, since one of the electrode pairs is arranged outside as a ground electrode, it is not necessary to provide a plurality of electrodes in the tube wall of the discharge tube, the circuit configuration can be simplified, and the electrode heat generation is suppressed. Can do. In particular, since the ground electrode is provided outside, cooling can be easily performed with cooling water or the like. Since one electrode is embedded in the discharge tube, creeping discharge can be sufficiently suppressed.

  In addition, the electrodes 722, 742, 762, and 782 are oriented obliquely with respect to the ground electrode portion 710. Therefore, the ratio of the light radiated toward the ground electrode portion 710 can be reduced as much as possible.

  Next, the excimer lamp which is 8th Embodiment is demonstrated using FIG. In the eighth embodiment, a net-like ground electrode is attached to the opposite side of the insulator. About another structure, it is the same as 7th Embodiment.

  FIG. 15 is a radial sectional view of an excimer lamp according to the eighth embodiment.

  Excimer lamp 800 includes discharge tubes 820, 840, 860, and 880 in which electrodes 822, 842, 862, and 882 are embedded in walls, respectively, and is in contact with conductive reticulated earth electrode 810. The electrodes 822, 842, 862, and 882 are opposed to the ground electrode 810 across the discharge spaces 830, 850, 870, and 890, respectively. The flat insulator 814 contacts the discharge tubes 820, 840, 860, and 880 from the opposite side of the ground electrode 810, and a cooling unit 816 in which cooling water circulates is installed on the insulator 814.

  With such a configuration, more light obtained by discharge light emission can be emitted through the mesh of the ground electrode 810. Note that the ground electrode is not limited to a mesh structure, and a material having an excellent balance between translucency and conductivity may be selected as appropriate.

  Next, an excimer lamp according to a ninth embodiment will be described with reference to FIG. In the ninth embodiment, the discharge tubes are annularly arranged. Other configurations are the same as those in the eighth embodiment.

  FIG. 16 is a radial cross-sectional view of an excimer lamp according to the ninth embodiment.

  The excimer lamp 900 includes eight discharge tubes 910 to 980 and a net-like ground electrode 990 having a circular cross section. The discharge tubes 910 to 980 are adjacent to each other while being in contact with the inner peripheral surface 990 </ b> S of the ground electrode 990. The electrode 912 of the discharge tube 910 is close to the center portion of the ground electrode 890, and the direction in which the ground electrode 990 and the electrode 912 face each other is along the radiation direction from the center portion C. The other electrodes 922 to 982 are similarly arranged. A cylindrical insulator 905 and a columnar cooling unit 915 are inserted between the discharge tubes 910 to 980 and the center portion C of the ground electrode 810, and the cylindrical insulator 905 is in contact with the discharge tubes 910 to 980. Yes.

  With such a configuration, light obtained by discharge light emission can be emitted in all directions outside the lamp.

  Next, the excimer lamp which is 10th Embodiment is demonstrated using FIG. In the tenth embodiment, the ground electrode is disposed at the center. About another structure, it is the same as 9th Embodiment.

  FIG. 17 is a radial sectional view of an excimer lamp according to the tenth embodiment.

  The excimer lamp 1000 includes eight discharge tubes 1010 to 1080 and a cylindrical earth electrode 1090, and the eight discharge tubes 1010 to 1080 are adjacent to each other while being in contact with the surface 1090S of the earth electrode 1090. The electrode 1012 of the discharge tube 1010 is inclined with respect to the radial direction of the ground electrode 1090, and the other electrodes 1022 to 1082 are similarly inclined.

  Thus, since the inner peripheral portion of the annularly arranged discharge tubes is filled with the ground electrode, creeping discharge at the inner peripheral portion of the discharge tube can be prevented.

  Next, an excimer lamp according to the eleventh embodiment will be described with reference to FIG. In the eleventh embodiment, the irradiated object is arranged in the center. About another structure, it is the same as 10th Embodiment.

  FIG. 18 is a radial sectional view of an excimer lamp according to the eleventh embodiment.

  The excimer lamp 1100 includes eight discharge tubes 1110 to 1180 and a cylindrical earth electrode 1190. The discharge tubes 1110 to 1180 are adjacent to each other while being in contact with the outer peripheral surface 1190S of the cylindrical earth electrode 1190. A cylindrical cooling unit 1105 is mounted inside the ground electrode 1190.

  The electrode 1112 faces the radial direction of the ground electrode 1190 across the discharge space, and the other electrodes 1122 to 1182 also face the radial direction. In the ground electrode 1190, an irradiation object such as a pipe is arranged along the axial direction instead of the columnar cooling unit 1105, so that the light obtained by the discharge light emission is irradiated to the irradiation object to the maximum extent. Can do.

  The discharge tube arrangement may be arranged in parallel in the axial direction while being in contact with the adjacent discharge tubes, and may be an arrangement other than the above-described parallel arrangement or annular arrangement (for example, a lattice arrangement). Moreover, you may comprise the lamp | ramp which combined all the discharge tubes which embed | buried a pair of electrode, the discharge tube which embed | buried only one electrode, and the discharge tube which does not embed an electrode. The number of each discharge tube is arbitrary.

  As a discharge method, instead of the dielectric barrier discharge excimer lamp that can stably generate a uniform discharge along the axis of the discharge space, for example, an external electrode type fluorescent lamp used in a scanner light source or the like is used. Therefore, it may be applied as a relatively low voltage capacitively coupled (capacitance type) high frequency discharge type lamp. In the case of the capacitively coupled high-frequency discharge method, a high voltage can be easily applied by making the final part of the power supply unit an LC resonance circuit.

  The gas to be enclosed in the discharge space is arbitrary, and a rare gas alone, a halogen alone such as chlorine, or a mixed gas of halogen and rare gas may be enclosed. Further, a protective film such as an alumina film, a titania film, or a magnesia film may be formed on the inner surface of the discharge tube in order to protect the glass of the discharge tube from embrittlement and prevent a reaction between the glass and the enclosed gas. When halogen is included in the sealing gas, a magnesium fluoride film is preferably formed. Alternatively, as the discharge gas, mercury and argon gas or the like may be enclosed in order to emit mercury-specific ultraviolet rays.

  The material and shape of the discharge tube and the outer tube can be arbitrarily configured, and may be configured in a shape other than a cylindrical shape such as an elliptical shape or a square shape, and a material that transmits predetermined excimer light to the outside. What is necessary is just to comprise.

10 Excimer lamp (discharge lamp)
20 Discharge tube (discharge vessel, both electrodes discharge vessel)
22, 24 Electrode 40 Discharge tube (discharge vessel, electrodeless discharge vessel)
60 discharge tube (discharge vessel, double electrode discharge vessel)
420, 460 discharge tube (discharge vessel, single electrode discharge vessel)
660 discharge tube (discharge vessel, double electrode discharge vessel)
664 electrode (external electrode)
712 Earth electrode (external electrode, electrode body)
716 Cooling unit 1090 Ground electrode (external electrode, electrode body)

Claims (14)

A plurality of tubular discharge containers filled with discharge gas;
A plurality of electrodes arranged along the axial direction of the discharge vessel,
The plurality of discharge containers include a plurality of both electrode discharge containers in which two electrodes are embedded in a wall, and an electrodeless discharge container in which no electrodes are embedded,
The electrodeless discharge vessel is interposed between the plurality of electrode discharge vessels,
The plurality of discharge vessels are arranged next to each other in parallel;
Of the electrode pairs defined as different potentials among the plurality of electrodes, at least one electrode is embedded in the wall of the discharge vessel,
Discharge lamp, characterized in that the discharge light emission in the discharge space between the electrode pairs. 2. The discharge lamp according to claim 1, wherein the two electrode discharge vessels are discharge vessels in which an inner tube and an outer tube are coaxially arranged and welded together . The discharge lamp according to claim 1 , wherein the plurality of discharge containers are cylindrical . The discharge lamp according to claim 1, wherein a wall shape in the vicinity of the electrode arrangement of both the electrode discharge containers is formed flat . A plurality of tubular discharge containers filled with discharge gas;
A plurality of electrodes arranged along the axial direction of the discharge vessel,
The plurality of discharge vessels are arranged next to each other in parallel;
Of the electrode pairs defined as different potentials among the plurality of electrodes, at least one electrode is embedded in the wall of the discharge vessel,
In the discharge space sandwiched between the electrode pair, discharge light emission ,
Wherein the plurality of discharge vessel, viewed contains a plurality of single electrodes discharge vessel is embedded in the wall only one electrode,
It said plurality of single electrodes discharge vessel, so as to sandwich a discharge space between the electrode pairs are embedded in different discharge vessel each other, discharge electric lamps you characterized in that adjacent to each other. The plurality of electrodes includes an external electrode external to the discharge vessel;
6. The discharge lamp according to claim 5 , wherein one single electrode discharge vessel is in contact with the external electrode.   7. The discharge lamp according to claim 1, wherein the combination of electrode pairs having opposite polarities can be set and changed.   The discharge lamp according to any one of claims 1 to 6, wherein the plurality of discharge vessels are arranged so that the inter-electrode dielectric constants of the electrode pairs are substantially equal.   The discharge lamp according to any one of claims 1 to 8, wherein the plurality of discharge containers are adjacently arranged in parallel or annularly when viewed from the axial direction.   The discharge lamp according to any one of claims 1 to 9, wherein each of the plurality of discharge vessels is filled with a rare gas, a halogen gas, or a mixed gas of a rare gas and a halogen gas. A plurality of both electrode discharge tubes in which a pair of electrodes are embedded in the wall along the tube axis direction;
Comprising at least one electrodeless discharge tube in which no electrode is embedded,
The discharge lamp, wherein the plurality of electrode discharge tubes and the electrodeless discharge tube are arranged in parallel and adjacent to each other, and the electrodeless discharge tube is interposed between the plurality of electrode discharge tubes. At least one single-electrode discharge tube in which one electrode is embedded in the wall along the tube axis direction;
A pair of electrodes comprising at least one both-electrode discharge tube embedded in the wall along the tube axis direction;
The single electrode discharge tube and the two electrode discharge tubes are arranged next to each other in parallel,
The discharge lamp, wherein the single electrode discharge tube and the both electrode discharge tubes are positioned around an axis so as to sandwich a discharge space between the electrodes. Comprising a plurality of single electrode discharge tubes embedded in the wall along one electrode tube axial direction;
The plurality of single electrode discharge tubes are arranged next to each other in parallel;
The discharge lamp, wherein each of the plurality of single electrode discharge tubes is positioned around an axis so as to sandwich a discharge space between the electrodes. A plurality of single-electrode discharge tubes in which one electrode is embedded in the wall along the tube axis direction;
One electrode pair is embedded in the wall, and the other includes at least one electrode discharge tube disposed on the outer peripheral surface,
The plurality of single electrode discharge tubes and the two electrode discharge tubes are arranged next to each other in parallel,
The discharge lamp, wherein each of the plurality of single electrode discharge tubes is positioned around an axis so as to sandwich a discharge space between the electrodes.

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