CN101159367A - Semiconductor laser linear array luminous correct device - Google Patents
Semiconductor laser linear array luminous correct device Download PDFInfo
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- CN101159367A CN101159367A CNA2007100563020A CN200710056302A CN101159367A CN 101159367 A CN101159367 A CN 101159367A CN A2007100563020 A CNA2007100563020 A CN A2007100563020A CN 200710056302 A CN200710056302 A CN 200710056302A CN 101159367 A CN101159367 A CN 101159367A
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- semiconductor laser
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- linear array
- luminescence unit
- optical axis
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Abstract
The invention provides a semiconductor laser line array strip luminescence correction device which solves the beam quality decrease caused by the bent arrangement of each luminescence unit of the semiconductor laser line array strip. The invention is of a lens array adhesive by a plurality of lens units, front end faces thereof are cylindrical face or cylindrical face-like with same curvature and rear end faces are the inclination faces lens units in different angles; wherein, each lens unit is respectively corresponding with one or more adjacent luminescence unit(s) on the semiconductor laser line so that the luminescence units at optical axis (z-axis) and off-axis give off parallel light parallel with the optical axis. The device of the invention only adopts a lens array to carry out fast axis collimation and at the same time each luminescence unit outputs parallel light parallel with the optical axis. Each lens unit of the lens array is only needed to be adjusted to regulate the optical path. The optical path regulation relatively features simplification; the structure is compact; the package is easy.
Description
Technical field
The invention belongs to field of semiconductor lasers, is a kind of the improvement because each luminescence unit bent arrangement of semiconductor laser linear array bar (promptly arranging not exclusively point-blank) causes the semiconductor laser linear array luminous correct device that output beam quality reduces.
Background technology
Semiconductor laser array is widely used at aspects such as laser processing, material processed, pumped solid-state laser because compact conformation, power is big, efficient is high, the life-span is long.And the semiconductor laser linear array bar is the core parts of semiconductor laser array.The semiconductor laser linear array bar generally is about 10mm, 19-60 luminescence unit arranged, the wide about 1 μ m of luminescence unit, be about 50-200 μ m, the semiconductor laser linear array bar is in the arrangement (as shown in Figure 1) that is in line of x direction under the perfect condition, but there is thermal stress in the process of semiconductor laser linear array bar and heat sink bonding, cause that each luminescence unit is offset in the y direction in the linear array bar, be generally 0.1 μ m～5 μ m (as shown in Figure 2), usually through behind the fast axis collimation mirror, the directional light that luminescence unit sends on the optical axis is parallel to optical axis (z axle), the collimated light beam that sends from the axle luminescence unit departs from optical axis (as shown in Figure 3), this has increased the off-axis aberration that the fast axis collimation mirror causes, common 5 μ m " smile " causes the reduction of 2 times of beam qualities, therefore has a strong impact on the result of use [Optics﹠amp of semiconductor laser linear array; LaserTechnology, 33 (3), 2001].
U.S.Pat.No.6,166,759 for correcting the device of semiconductor laser linear array bending, and its principle is the bending of correcting semiconductor laser linear array by crooked fast axis collimation looking glass optical fiber, and the shortcoming of this device is that the device of curved glass optical fiber is very complicated.As shown in Figure 4, U.S.Pat.No.7,075,739 make up the bending of correcting the semiconductor laser linear array bar by cylindrical mirror (or class cylindrical mirror) and prism array, and semiconductor laser linear array output light at first carries out fast axis collimation through cylindrical mirror, and then carries out detorsion by the prism array, make each luminescence unit output light be the directional light that is parallel to optical axis, the shortcoming of this device is to use cylindrical mirror and two optical units of prism array, and optical element is many, and light path is regulated more complicated.
Summary of the invention
The object of the present invention is to provide the simple and direct semiconductor laser linear array luminous correct device of a kind of structure, to overcome the shortcoming that device is complicated or adjusting is complicated of this technical field at present.
The present invention is arranged on the semiconductor laser linear array luminous correct device at semiconductor laser linear array bar rear, be to be that the cylinder of same curvature or class cylinder, rear end face are the lens array that the lens unit gummed on the inclined plane of different angles forms by several front end faces, each described lens unit is corresponding with the luminescence unit on or several adjacent semiconductor laser linear array bars respectively, makes to be in (z axle) on the optical axis and all to become the directional light that is parallel to optical axis from the light that the luminescence unit of axle sends.
Superiority of the present invention is, only carry out fast axis collimation, make each luminescence unit output light be the directional light that is parallel to optical axis simultaneously, only need regulate each lens unit of lens array when light path is regulated with a lens array, light path is reconciled simple relatively and compact conformation, is convenient to encapsulation.
Description of drawings
Fig. 1 is the schematic diagram of semiconductor laser linear array bar under the perfect condition;
Fig. 2 is the schematic diagram of a kind of semiconductor laser linear array bar bending;
Fig. 3 is on the semiconductor laser linear array bar optical axis and from the schematic diagram of axle luminescence unit outgoing beam through the fast axis collimation mirror.
Fig. 4 is a kind of U.S.Pat.No.7, the schematic diagram of 075,739 scheme;
Fig. 5 is the structural upright schematic diagram of semiconductor laser linear array luminous correct device of the present invention;
Fig. 6 is the structure side view of Fig. 5 device;
Fig. 7 is the structure vertical view of Fig. 5 device;
Fig. 8 (a) is a kind of structural representation of lens unit shown in Fig. 5 (4);
Fig. 8 (b) is the another kind of structural representation of lens unit shown in Fig. 5 (4).
Among the figure: 1 is the semiconductor laser linear array bar, 3 is lens array, 4 is lens unit, 30 is the fast axis collimation mirror, 4 ' is cylindrical mirror or class cylindrical mirror, 8 ' is the prism array, and a is for being in the light beam that the luminescence unit on the optical axis (z axle) sends, and b is the light beam that the luminescence unit (departing from z axle certain angle) that departs from the optical axis place sends.
Embodiment
Below in conjunction with accompanying drawing and the embodiment that provides the present invention is described in further detail.
With reference to Fig. 5 to 7, a kind of semiconductor laser linear array luminous correct device that is arranged on semiconductor laser linear array bar 1 rear, be to be that the cylinder of same curvature or class cylinder, rear end face are the lens array 3 that lens unit 4 gummeds on the inclined plane of different angles form by several front end faces, each described lens unit 4 is corresponding with the luminescence unit 2 on or several adjacent semiconductor laser linear array bars 1 respectively, makes to be in (z axle) on the optical axis and all to become the directional light that is parallel to optical axis from the light that the luminescence unit 2 of axle sends.
As shown in Figure 6, described lens unit 4 front end faces are cylinder or class cylinder, and the curvature of the front end face of each lens unit 4 is identical, and rear end face is the inclined plane of different angles; Lens unit 4 or make an overall lens (shown in Fig. 8 a), or form (shown in Fig. 8 b) by a preceding collimating mirror 5 and prism 6 gummeds.
Operation principle of the present invention is:
Semiconductor laser linear array bar 1 is made up of n (2≤n≤60) luminescence unit 2, and luminescence unit 2 is arranged in x direction wire, in the y direction skew is arranged.The corresponding lens unit 4 in one or more luminescence units 2 backs, lens unit 4 front end faces are cylinder or class cylinder, the light that luminescence unit 2 is sent is directional light, and rear end face is the inclined plane, and making the light that departs from optical axis (z axle) is the light that is parallel to optical axis through refraction back, inclined plane; Regulate the distance of luminescence unit 2 and lens unit 4, the light that luminescence unit 2 is sent is directional light through lens unit 4 backs, the situation that departs from the z axle according to luminescence unit 2 is selected the lens unit 4 of different angied posterior end faces, luminescence unit 2 departs from the z wheelbase from big more, the rear end face angle of inclination of the lens unit of selecting 4 is big more, the light beam b that sends from the axle luminescence unit like this, become the light beam parallel (as shown in Figure 6) through behind the lens unit 4 with the z axle, promptly parallel with the collimated light of center cell 2 outgoing on the optical axis, adjust each luminescence unit output light of back and be the directional light that is parallel to optical axis, each lens unit 4 that will adjust at last composes a lens array 3.
The degree that departs from mutually according to luminescence unit 2 and the accuracy of rectification, can select one or more luminescence unit 2 corresponding corresponding lens units 4, during the corresponding corresponding lens unit 4 of but a plurality of luminescence unit 2, the approximate optical axis that is parallel to of the directional light of each luminescence unit output.
Fig. 5 is the structural upright schematic diagram of one embodiment of the present of invention.As seen from the figure, semiconductor laser linear array bar 1, it is arranged in x direction wire by 7 luminescence units 2, and center luminescence unit 2 is positioned on the optical axis, and other luminescence unit 2 is directed downwards skew at y; Lens array 3 of the present invention is set behind semiconductor laser linear array bar 1, and described lens array 3 is formed by lens unit 4 gummeds, luminescence unit 2 corresponding corresponding lens units 4;
Described lens unit 4 front end faces are cylinder, and the front end face curvature of each lens unit 4 is identical, and rear end face is the inclined plane of different angles, and lens unit 4 is overall lenses;
Its working condition is: 7 luminescence units 2 of semiconductor laser linear array bar 1, a lens unit 4 is placed in each luminescence unit 2 back, described lens unit 4 is an overall lens, its front end face is a cylinder, the light that luminescence unit 2 is sent is directional light, rear end face is the inclined plane, and making the light that departs from optical axis (z axle) is the light that is parallel to optical axis through refraction back, inclined plane; The hypsokinesis inclined-plane that departs from the situation selection differing tilt angles of z axle according to luminescence unit 2, make the collimation back become the light beam b of differing tilt angles with the z axle, through becoming the light beam parallel (as Fig. 6) behind the inclined plane with the z axle, promptly parallel with the collimated light of center cell 2 outgoing on the optical axis, adjust these 7 luminescence unit output light of back and be the directional light that is parallel to optical axis, 7 lens units 4 will adjusting at last compose a lens array 3.
This embodiment also comprises the situation of a plurality of luminescence unit 2 corresponding corresponding lens units 4, but during the corresponding corresponding lens unit 4 of a plurality of luminescence unit 2, the approximate optical axis that is parallel to of the directional light of each luminescence unit output.
Claims (2)
1. semiconductor laser linear array luminous correct device that is arranged on semiconductor laser linear array bar (1) rear, it is characterized in that being is that the cylinder of same curvature or class cylinder, rear end face are the lens array (3) that lens unit (4) gummed on the inclined plane of different angles forms by several front end faces, each described lens unit (4) is corresponding with the luminescence unit (2) on or several adjacent semiconductor laser linear array bars (1) respectively, makes to be in (z axle) on the optical axis and all to become the directional light that is parallel to optical axis from the light that the luminescence unit (2) of axle sends.
2. semiconductor laser linear array luminous correct device according to claim 1 is characterized in that described lens unit (4) is an overall lens, or is formed with a prism (6) gummed by the collimating mirror (5) that a front end face is cylinder or class cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100563020A CN101159367A (en) | 2007-11-12 | 2007-11-12 | Semiconductor laser linear array luminous correct device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100563020A CN101159367A (en) | 2007-11-12 | 2007-11-12 | Semiconductor laser linear array luminous correct device |
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| CN101159367A true CN101159367A (en) | 2008-04-09 |
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| CNA2007100563020A Pending CN101159367A (en) | 2007-11-12 | 2007-11-12 | Semiconductor laser linear array luminous correct device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102591019A (en) * | 2012-03-02 | 2012-07-18 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN104407446A (en) * | 2014-11-17 | 2015-03-11 | 西安炬光科技有限公司 | Optical correction device of high-power semiconductor laser and system thereof |
| CN105098598A (en) * | 2014-05-16 | 2015-11-25 | 深圳市绎立锐光科技开发有限公司 | Laser spot rectification system and projection display device |
| CN106707503A (en) * | 2016-12-08 | 2017-05-24 | 中国人民解放军国防科学技术大学 | High-power semiconductor stack smile face correcting and line width narrowing device and method |
| CN107255868A (en) * | 2017-08-14 | 2017-10-17 | 温州泛波激光有限公司 | A kind of sharp combiner method and apparatus |
| CN111029906A (en) * | 2014-05-16 | 2020-04-17 | 深圳光峰科技股份有限公司 | Correcting system of laser, light source system and projection device |
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2007
- 2007-11-12 CN CNA2007100563020A patent/CN101159367A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102591019A (en) * | 2012-03-02 | 2012-07-18 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN102591019B (en) * | 2012-03-02 | 2014-08-20 | 李德龙 | Focusing type light beam compression method for semiconductor laser and device for realizing focusing type light beam compression method |
| CN105098598A (en) * | 2014-05-16 | 2015-11-25 | 深圳市绎立锐光科技开发有限公司 | Laser spot rectification system and projection display device |
| CN111029906A (en) * | 2014-05-16 | 2020-04-17 | 深圳光峰科技股份有限公司 | Correcting system of laser, light source system and projection device |
| CN111029906B (en) * | 2014-05-16 | 2021-03-30 | 深圳光峰科技股份有限公司 | Correcting system of laser, light source system and projection device |
| CN105098598B (en) * | 2014-05-16 | 2023-04-07 | 深圳光峰科技股份有限公司 | Laser facula correction system and projection display device |
| CN104407446A (en) * | 2014-11-17 | 2015-03-11 | 西安炬光科技有限公司 | Optical correction device of high-power semiconductor laser and system thereof |
| CN106707503A (en) * | 2016-12-08 | 2017-05-24 | 中国人民解放军国防科学技术大学 | High-power semiconductor stack smile face correcting and line width narrowing device and method |
| CN107255868A (en) * | 2017-08-14 | 2017-10-17 | 温州泛波激光有限公司 | A kind of sharp combiner method and apparatus |
| CN107255868B (en) * | 2017-08-14 | 2020-06-23 | 温州泛波激光有限公司 | Laser beam combining method and device |
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