CN1997928A - Device for homogenizing light and arrangement for illuminating or focussing with said device - Google Patents

Device for homogenizing light and arrangement for illuminating or focussing with said device Download PDF

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Publication number
CN1997928A
CN1997928A CN 200480042335 CN200480042335A CN1997928A CN 1997928 A CN1997928 A CN 1997928A CN 200480042335 CN200480042335 CN 200480042335 CN 200480042335 A CN200480042335 A CN 200480042335A CN 1997928 A CN1997928 A CN 1997928A
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plane
laser
incidence
lens
exit facet
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CN 200480042335
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CN100427995C (en
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托马斯·米特拉
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Hands - Leigh Sozzi Che C Patent Management & Co KG GmbH
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Hands - Leigh Sozzi Che C Patent Management & Co KG GmbH
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • G02B27/0961Lens arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar

Abstract

A device for homogenizing light, comprising at least one homogenizer (5, 6) having an input surface (7) and an output surface (8) for the light that is to be homogenized, in addition to, respectively, an array of cylinder lenses (9) on the input surface (7) and an array of cylinder lenses (9) on the output surface (8) of the at least one homogenizer (5, 6). The cylinder axes of the cylinder lenses (9) of the at least one homogenizer (5, 6) are oriented in a parallel manner in relation to each other. The invention also relates to an arrangement for illuminating a surface and to an arrangement for focussing the light from a laser light source into a linear focussing area.

Description

Be used to make the device of light uniformization and the structure of throwing light on or focusing on this device
The present invention relates to device and the structure of a face of illumination as described in the preamble as claimed in claim 9 and the structure that focuses on a wire focal region as the light with a lasing light emitter as described in the preamble of claim 13 that is used for making light uniformization as described in the preamble as claimed in claim 1.
A kind of device of the above-mentioned type is open by United States Patent (USP) 4733944.The wherein described device of light uniformization that makes comprises two uniformization elements that spacing is arranged mutually, and each uniformization element comprises two optical function boundary surfaces, homogenized light pass these boundary surfaces.On these four each face, arranging a column lens array respectively to the contributive boundary surface of homogenising.In these two even elements that spacing arranged mutually each all has two cross one another column lens array.For example the column lens array on the plane of incidence has cylinder axis on the vertical direction in a uniformization element, and the lens pillar on the exit facet has the cylinder axis on the horizontal direction.
Can make laser beam by means of this device of light uniformization that makes, for example ray that sends by excimer laser or the laser beam that penetrates by laser diode bar, not only on first direction, and all homogenized on the vertical second direction of direction therewith.For example under the situation of laser diode bar, can be not only on so-called fast axle by this device that makes light uniformization, and on so-called slow axis, realize homogenising.Be configured to so-called two-stage uniforming device by above-mentioned prior art known devices in addition, because want homogenized ray in each uniformization element, to experience one time homogenising.By the two-stage equipment of this device, realized the homogeneity of obviously improving than single-stage uniforming device.
As the shortcoming of this two-stage uniforming device well known in the prior art, two uniformization elements are difficult to regulate.These uniformization elements must be mutually location very strictly, wherein each uniformization element must accurately be regulated six axles altogether.The focal length of the lens pillar of array can not freely be selected in addition, because for two separate homogenising directions, for example each in slow axis and the fast axle provides the lens pillar mutual spacing an of the best.Especially the two-stage uniforming device of working on two separate directions, they are very responsive to the focus error of lens pillar, because this both direction is not separate usually.
Based on the problems referred to above, the objective of the invention is to provide this instructions and begin the device that type is stated in the place, it can be conditioned simply.In addition in the structure that has provided the face that throws light on with the structure of light focusing to the wire focal region of lasing light emitter.
The present invention about the task of device by have the described distinguishing characteristics of claim 1, finish as the device of type as described in beginning, about the task of the structure of the face that throws light on by have the described distinguishing characteristics of claim 9, finish as the structure of type as described in beginning, and about with the task of the structure of light focusing to the wire focal region of lasing light emitter by have the described distinguishing characteristics of claim 13, finish as the structure of type as described in beginning.Dependent claims provides advantageous modification of the present invention.
According to claim 1, the cylinder axis of the lens pillar of at least one uniformization element is parallel to each other.Described at least one uniformization element that for example is configured to substrate is finished the function of a two-stage uniforming device.For example when the laser that one of homogenising is penetrated by laser diode bar, uniformization element acts on an axle or the direction, for example only acts on slow axis or only acts on the fast axle.
Have following possibility according to claim 2: described device comprises one first uniformization element and one second uniformization element, and they are for wanting homogenized light to have a plane of incidence and an exit facet respectively.According to claim 3, first uniformization element have respectively one on the plane of incidence or near the column lens array the plane of incidence and one near the column lens array on the exit facet or exit facet, their cylinder axis is parallel to each other.
According to claim 4, second uniformization element has one near the column lens array on the plane of incidence or the plane of incidence, perhaps has one near the column lens array on the exit facet or exit facet.As an alternative, according to claim 5, second uniformization element also can have one respectively near the column lens array on the plane of incidence or the plane of incidence, and has one near the column lens array on the exit facet or exit facet, and their cylinder axis is parallel to each other.
Especially according to claim 6, the cylinder axis of the lens pillar of first uniformization element is perpendicular to the cylinder axis of the lens pillar of second uniformization element.In this way, the both direction of laser or two axles be separated from each other homogenized in two uniformization elements that spacing arranged mutually.These two uniformization elements needn't be conditioned each other again, realize by the reproduced production that is in the uniformization element in the franchise now because for example act on the adjusting of the lens pillar on one of two axles.In this way, the ray performance is always in the scope of the above-mentioned manufacturing franchise of regulation.This two axles in addition, for example slow axis under a semiconductor laser bar situation and fast axle are not subjected to the influence of the focal length franchise of another beam axis respectively.Also have following possibility: being used for the focal length of the lens pillar of each on two axles during to the laser homogenising can be freely and irrespectively selected with another axle.
According to claim 7 exist following may: be arranged on the exit facet or exit facet near the focusing surface of lens pillar be positioned near the plane of incidence or the plane of incidence.In this way, homogenized ray homogenization to be optimized.
According to claim 8, lens pillar is configured to concavees lens and/or convex lens, perhaps is configured to grin lens (gradient index lens).
According to claim 9, the device that is used in this structure is the device that is used for homogenising according to of the present invention.
According to claim 13, also be the device that is used for homogenising according to of the present invention at the employed device of the structure that is used for focusing on.
Especially according to claim 14, the device that is used for homogenising is so constructed, and makes it only make the laser homogenising on slow-axis direction.
Further specify other features and advantages of the present invention below with reference to preferred embodiment shown in the accompanying drawing.In the accompanying drawing:
Fig. 1 a is the top view of the structure that is used to throw light on of the present invention;
Fig. 1 b is the side view of structure shown in Fig. 1 a;
Fig. 2 a is the top view of the structure that is used to focus on of the present invention;
Fig. 2 b is the side view of structure shown in Fig. 2 a;
Fig. 3 is the skeleton view of device of the present invention.
In some figure,, show rectangular coordinate system for more clearly expression.
Shown in Fig. 1 a and Fig. 1 b, a kind of structure according to the present invention comprises a semiconductor laser bar 1, and it has a plurality of adjacent and be arranged in transmitter on the directions X spaced reciprocally.Semiconductor laser bar 1 is just schematically represented by a rectangular block in Fig. 1 a, Fig. 1 b, Fig. 2 a and Fig. 2 b.Under the situation of semiconductor laser bar, in the fast axle of what is called, promptly the Y direction or perpendicular to the divergence on the direction of the adjacent arrangement of transmitter obviously than in so-called slow axis, be that divergence on the directions X is bigger.
By Fig. 1 a and Fig. 1 b as seen, fast axis collimation instrument 2 is connected on the semiconductor laser bar 1 on the direction of propagation Z of the laser that each transmitter from semiconductor laser bar 1 penetrates.Fast axis collimation instrument 2 is configured to for example plano-convex lens pillar, and its cylinder axis extends on directions X.By this lens pillar, the laser that is penetrated by each laser instrument is limited its deflection ground collimation on Y direction or fast axle.In order to finish collimation, the lens pillar that is used as fast axis collimation instrument 2 can have an aspheric surface.Replacement only has a convex curvature at its exit facet lens pillar also can adopt a lens pillar with plane of incidence of convex bending.As an alternative, being not only the plane of incidence and exit facet can be protruding and/or recessed bending.
On the Z of the direction of propagation, ray inverting element 3 is connected on the fast axis collimation instrument 2.The angle of the light of incident half-twist in ray inverting element 3, promptly the divergence of the divergence of fast axle (Y direction) and slow axis (directions X) is exchanged, thereby bigger than the divergence on directions X in the divergence on the Y direction after 3 outgoing of ray inverting element.
Ray inverting element 3 can be one basically rectangular hexahedral shape, by the piece that transparent material constitutes, not only be arranged with a plurality of lens pillar sections as the ray converter unit thereon in parallel to each other at the plane of incidence but also on exit facet.The axle of ray converter unit can be connected with the basal plane that advances along directions X of the rectangular hexahedron shape ray inverting element 3 angle α with 45 ° here.
On laser propagation direction Z, another collimator 4 is connected ray inverting element 3 back, thereby can obtain for example ray of 10mm * 10mm, its have an appointment on Y direction divergence of 11mrad (milliradian), the divergence of the 3mrad that has an appointment on directions X.The numerical value of divergence is relevant with the beamwidth of half maximum intensity (FWHM) with the ray diameter.Collimator 4 is configured to have the plano-convex lens pillar of the cylinder axis that extends on directions X.Because the deflection of laser in ray inverting element 3, collimator 4 has the orientation identical with fast axis collimation instrument 2.The same with fast axis collimation instrument 2, collimator 4 also can have other structure.Especially not only the plane of incidence but also exit facet can have protruding and/or recessed curvature.
On the Z of the direction of propagation, first uniformization element 5 is connected collimator 4 back, and first uniformization element, 5 back are connected with second uniformization element 6.Uniformization element 5 has the array of lens pillar 9 on its plane of incidence 7, the cylinder axis of these lens extends (referring to Fig. 3) on directions X.First uniformization element 5 has the array of lens pillar 9 on its exit facet 8 in addition, and the cylinder axis of these lens extends on directions X.By the plane of incidence of first uniformization element and the lens pillar on the reflecting surface 7,8, the laser that passes first uniformization element 5 is mutual superposition on the Y direction very effectively.By this effective stack, can realize the homogenising of laser on the Y direction as can be seen by focal region shown in first uniformization element, 5 back among Fig. 1 b.
On the Z of the direction of propagation, described structure comprises second uniformization element 6 in first uniformization element, 5 back.This second uniformization element 6 has a column lens array of being made up of lens pillar 9 respectively on its plane of incidence 7 and its exit facet 8, lens pillar 9 extends (referring to Fig. 3) on the Y direction.By the plane of incidence of second uniformization element 6 and the column lens array on the exit facet 7,8, the laser that passes second uniformization element 6 is mutual superposition on directions X very effectively.By this effective stack, can realize the homogenising of laser on directions X as can be seen by focal region shown in second uniformization element, 6 back among Fig. 1 a.
Here the device that is used for homogenising comprises first and second uniformization elements 5,6.Thereby laser is homogenized on both direction or axle on the whole in device of the present invention, and wherein only work on directions X in the second level, and the first order only works on the Y direction.
The lens pillar 9 of uniformization element 5,6 can be configured to protruding (for example referring to Fig. 3) and/or recessed lens pillar.As an alternative, lens pillar also can be configured to grin lens (gradient index lens).In this case, lens pillar is not to be placed on the plane of incidence or the exit facet, but is formed on the substrate inside that forms uniformization element 5,6 respectively by the substrate refractive index of a variation, is positioned near the plane of incidence or the exit facet.
Laser continues to penetrate from second uniformization element 6 equably, and can be used for the illumination away from a face of this device.
Embodiment according to structure of the present invention shown in Fig. 2 a and Fig. 2 b comprises a semiconductor laser bar 1 with a plurality of transmitters equally.
This structure also comprises fast axis collimation instrument 2, and it can image pattern 1a and the fast axis collimation instrument 2 the same designs of 1b.Here the distance between semiconductor laser and the fast axis collimation instrument 2 can be selected greatlyyer, makes laser have relatively large extension pass fast axis collimation instrument 2 on the Y direction after.
Structure of the present invention is comprising slow axis collimator 10 after fast axis collimation instrument 2 on the directions of rays, it is configured to the plane of incidence of slow axis collimator 10 and the lens pillar on the exit facet in the embodiment shown.The cylinder axis of the lens pillar of slow axis collimator 10 extends on the Y direction here.Especially the slow axis collimator can so be set up, and makes the lasertron ray that penetrates respectively from each transmitter be injected on the plane of incidence each corresponding lens pillar.Each sub-ray is being collimated on the slow axis or on directions X by corresponding lens pillar.
The embodiment of slow axis collimator 10 shown in Fig. 2 a and the 2b is telescope configurations.Yet also have following possibility: slow axis collimator 10 be configured to one only be arranged on the face, the column lens array on for example plane of incidence or the exit facet.Can utilize in addition more than two optical function, particularly the face of crooked similar lens pillar is as slow axis collimator 10.
The embodiment of structure of the present invention shown in Fig. 2 a and the 2b also is included in and is positioned at slow axis collimator 10 uniformization element 6 afterwards on the direction of propagation.This uniformization element 6 on its structure with structure shown in Fig. 1 a and Fig. 1 b in second uniformization element 6 in full accord.The axle of the lens pillar 9 on the plane of incidence 7 and exit facet 8 extends on the Y direction here, thereby makes laser beam 3 influenced by lens pillar 9.
By the lens pillar 9 that passes uniformization element 6, each of laser beam ray is very effectively in mutual superposition on the slow-axis direction or on directions X.The laser that penetrates from uniformization element 6 can be set at concentrating element 11 focusing that direction of propagation Z goes up uniformization element 6 back.Concentrating element 11 is configured to rotational symmetric plano-convex lens in the embodiment shown.Concentrating element 11 also can have other structure, for example is a biconvex lens or a plurality of lens that concur.These lens can be with laser beam 10 on fast axle or focus on the Y direction, and only is used on the slow axis or the uniformization element 6 that works on directions X as field lens simultaneously.Here in fact the focus that is used as the lens of concentrating element 11 can be positioned on the plane, and the field of laser is used as the lens homogenising of field lens on slow-axis direction on this plane.
The laser beam that passes uniformization element 10 among Fig. 2 a and Fig. 2 b just schematically is illustrated.Yet by each lens pillar 9, the light that passes it is interrupted on a plurality of different directions.By plano-convex spherical lens as concentrating element 11 or field lens, the sub-ray that in a linearity focal region each is mapped to equal angular on the field lens is deflected on the identical position, thus make in the focal region from the laser beam part of each sub-ray of original laser ray on the directions X or be evenly distributed on the slow-axis direction on its width.
In the focal region of concentrating element 11 with laser focusing to a linearity, extend on directions X this focal region, and have very little extension on the Y direction.For example have following possibility: the extension of focal region on the Y direction or on quick shaft direction is less than 1mm or less than 0.5mm.Have following possibility in addition: the linearity focal region at the width on the directions X or on slow-axis direction greater than 5mm or greater than 20mm.Between the exit facet of concentrating element 11 and the linearity focal region can be quite big apart from d, for example greater than 50mm, especially greater than 200mm.

Claims (17)

1. be used to make the device of light uniformization, it comprises:
-at least one has the uniformization element (5,6) of a plane of incidence (7) and an exit facet (8), and the described plane of incidence and exit facet are used for wanting homogenized light;
-at described at least one uniformization element (5,6) the plane of incidence (7) last or near the array of the lens pillar (9) that the plane of incidence (7) is and the array of or near exit facet (8) a lens pillar (9) last at the exit facet (8) of uniformization element (5,6);
It is characterized in that the cylinder axis of the lens pillar (9) of described at least one uniformization element (5,6) is parallel to each other.
2. device as claimed in claim 1, it is characterized in that, described device comprises one first uniformization element (5) and one second uniformization element (6), and they have a plane of incidence (7) and an exit facet (8) that is used for light that will be homogenized respectively.
3. device as claimed in claim 1 or 2, it is characterized in that, first uniformization element (5) have respectively one the plane of incidence (7) go up or the plane of incidence (7) near the array of lens pillar (9) and one on the exit facet (8) or near the array of the lens pillar (9) the exit facet (8), the cylinder axis of lens pillar is parallel to each other.
4. as each described device in the claim 1 to 3, it is characterized in that, second uniformization element (6) have one the plane of incidence (7) go up or the plane of incidence (7) near the array of lens pillar (9) or one on the exit facet (8) or near the array of the lens pillar (9) the exit facet (8).
5. as each described device in the claim 1 to 3, it is characterized in that, second uniformization element (6) have respectively one the plane of incidence (7) go up or the plane of incidence (7) near the array of lens pillar (9) and one on the exit facet (8) or near the array of the lens pillar (9) the exit facet (8), the cylinder axis of lens pillar is parallel to each other.
6. as claim 4 or 5 described devices, it is characterized in that the cylinder axis of the lens pillar (9) of first uniformization element (5) is perpendicular to the cylinder axis of the lens pillar (9) of the second even element (6).
7. as each described device in the claim 1 to 6, it is characterized in that, be arranged on that exit facet (8) is gone up or exit facet (8) near the focal plane of lens pillar (9) be set in the plane of incidence (7) or near the plane of incidence (7).
8. as each described device in the claim 1 to 7, it is characterized in that lens pillar is configured to recessed and/or convex lens, perhaps be configured to grin lens (gradient index lens).
9. be used to the to throw light on structure of a face, it comprises:
-at least one has the semiconductor laser bar (1) of a plurality of transmitters, these transmitters are gone up adjacent and are had spacing ground to arrange mutually in first direction (X), wherein the laser that penetrates by each transmitter in the divergence on first direction (X) less than the divergence of this laser (9) on second direction (Y) vertical with first direction (X);
-be used for collimating at least in part the collimator (2,4) of the laser that penetrates by transmitter;
-be used for the ray inverting element (3) of the laser that conversion penetrated by transmitter, it is so constructed and is arranged in the raypath of the laser beam that is penetrated by transmitter, makes laser can exchange with the divergence on second direction in the divergence on first direction (X);
-be used to make the device of the laser beam homogenising that penetrates by transmitter;
It is characterized in that being used for making the device of the laser beam homogenising that is penetrated by transmitter is as each described device of claim 1 to 8.
10. the structure of the face that is used to throw light on as claimed in claim 9 is characterized in that the device that is used for homogenising is configured to multistage.
11. the structure as claim 9 or the 10 described faces that are used to throw light on is characterized in that collimator (2,4) comprises fast axis collimation instrument (2), it is used for the collimation of laser on second direction (Y) that penetrated by transmitter.
12. the structure as each described face that is used to throw light in the claim 9 to 11 is characterized in that, collimator (2,4) comprises be used for collimator (4) that the laser beam that transmitter penetrates is collimated on first direction (X).
13. be used for the structure with light focusing to a linearity focal region of a lasing light emitter, it comprises:
-at least one has the semiconductor laser bar (1) of at least one radiating portion, and the laser that penetrates of at least one radiating portion is bigger than the divergence on the perpendicular slow-axis direction (X) in the divergence on the quick shaft direction (Y) thus;
-be used for fast axis collimation instrument (2) that the laser that is penetrated by described at least one radiating portion is collimated on quick shaft direction (Y);
-be used to make device by fast axis collimation instrument (2) collimated laser light equalizing light rays;
-be used for the concentrating element (11) of laser focusing to the linearity focal region that will penetrate from the device that is used for homogenising;
It is characterized in that the device that is used for homogenising is as each described device of claim 1 to 8.
14. the structure that is used to focus on as claimed in claim 13 is characterized in that, the device that is used for homogenising is so designed, and makes it only make the laser homogenising on slow-axis direction (X).
15. as claim 13 or the 14 described structures that are used to focus on, it is characterized in that this structure has slow axis collimator (4), it is set at fast axis collimation instrument (2) and is used between the device of homogenising.
16. the structure that is used to focus on as claimed in claim 15 is characterized in that, slow axis collimator (4) is configured to slow axis collimator array or slow axis telescope array.
17. as each described structure that is used to focus in the claim 13 to 16, it is characterized in that, concentrating element (11) comprises at least one rotational symmetric basically lens, and wherein these lens especially can be used as field lens is used for carrying out homogenising on slow-axis direction (X) device.
CNB2004800423354A 2004-03-06 2004-08-20 Device for homogenizing light and arrangement for illuminating or focussing with said device Expired - Fee Related CN100427995C (en)

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DE102004011074 2004-03-06
DE102004011074.3 2004-03-06
DE102004034253.9 2004-07-14
EPPCT/EP2004/008944 2004-08-10

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