CN1011441B - 气体浓度测量仪 - Google Patents

气体浓度测量仪

Info

Publication number
CN1011441B
CN1011441B CN 85105865 CN85105865A CN1011441B CN 1011441 B CN1011441 B CN 1011441B CN 85105865 CN85105865 CN 85105865 CN 85105865 A CN85105865 A CN 85105865A CN 1011441 B CN1011441 B CN 1011441B
Authority
CN
China
Prior art keywords
film
ultrasonic sensor
ultrasonic
gas concentration
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CN 85105865
Other languages
English (en)
Chinese (zh)
Other versions
CN85105865A (zh
Inventor
野口康夫
出本守人
松永文昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Publication of CN85105865A publication Critical patent/CN85105865A/zh
Publication of CN1011441B publication Critical patent/CN1011441B/zh
Expired legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN 85105865 1985-05-23 1985-08-02 气体浓度测量仪 Expired CN1011441B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60109420A JPH0617897B2 (ja) 1985-05-23 1985-05-23 ガス濃度測定装置
JP109420/85 1985-05-23

Publications (2)

Publication Number Publication Date
CN85105865A CN85105865A (zh) 1986-11-19
CN1011441B true CN1011441B (zh) 1991-01-30

Family

ID=14509790

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 85105865 Expired CN1011441B (zh) 1985-05-23 1985-08-02 气体浓度测量仪

Country Status (2)

Country Link
JP (1) JPH0617897B2 (ja)
CN (1) CN1011441B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100465613C (zh) * 2005-06-28 2009-03-04 上海理工大学 一种在线检测大气颗粒物浓度的方法及其装置
CN1910452B (zh) * 2003-12-30 2010-12-08 3M创新有限公司 用声表面波传感器检测化学或生物介质的量的方法和系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2411799B1 (en) * 2009-03-23 2020-05-06 Koninklijke Philips N.V. Gas sensing using ultrasound
US9217663B2 (en) 2011-11-22 2015-12-22 Inficon, Inc. Multi-chambered acoustic sensor for determination gas composition
CN103425099B (zh) * 2013-07-16 2014-08-06 广东工业大学 一种硫化过程嵌入式碳排放监控与检测系统
US10302595B2 (en) * 2015-11-06 2019-05-28 Qorvo Us, Inc. Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization
CN107246923A (zh) * 2017-08-07 2017-10-13 李昕虎 一种基于TPoS谐振器的温度计及温度测量方法
CN110957178B (zh) * 2019-12-13 2022-03-22 四川新能电力有限公司 一种真空开关在线检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554528A (en) * 1978-06-27 1980-01-14 Sumitomo Bakelite Co Ltd Method and apparatus for measuring gas concentration
JPS58136734U (ja) * 1982-03-11 1983-09-14 日本電子機器株式会社 ノツキングセンサ−
JPS6166126A (ja) * 1984-09-10 1986-04-04 Sumitomo Bakelite Co Ltd 耐湿型超音波センサ−

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1910452B (zh) * 2003-12-30 2010-12-08 3M创新有限公司 用声表面波传感器检测化学或生物介质的量的方法和系统
CN100465613C (zh) * 2005-06-28 2009-03-04 上海理工大学 一种在线检测大气颗粒物浓度的方法及其装置

Also Published As

Publication number Publication date
JPS61269061A (ja) 1986-11-28
CN85105865A (zh) 1986-11-19
JPH0617897B2 (ja) 1994-03-09

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