CN1011441B - 气体浓度测量仪 - Google Patents
气体浓度测量仪Info
- Publication number
- CN1011441B CN1011441B CN 85105865 CN85105865A CN1011441B CN 1011441 B CN1011441 B CN 1011441B CN 85105865 CN85105865 CN 85105865 CN 85105865 A CN85105865 A CN 85105865A CN 1011441 B CN1011441 B CN 1011441B
- Authority
- CN
- China
- Prior art keywords
- film
- ultrasonic sensor
- ultrasonic
- gas concentration
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60109420A JPH0617897B2 (ja) | 1985-05-23 | 1985-05-23 | ガス濃度測定装置 |
JP109420/85 | 1985-05-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN85105865A CN85105865A (zh) | 1986-11-19 |
CN1011441B true CN1011441B (zh) | 1991-01-30 |
Family
ID=14509790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 85105865 Expired CN1011441B (zh) | 1985-05-23 | 1985-08-02 | 气体浓度测量仪 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH0617897B2 (ja) |
CN (1) | CN1011441B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100465613C (zh) * | 2005-06-28 | 2009-03-04 | 上海理工大学 | 一种在线检测大气颗粒物浓度的方法及其装置 |
CN1910452B (zh) * | 2003-12-30 | 2010-12-08 | 3M创新有限公司 | 用声表面波传感器检测化学或生物介质的量的方法和系统 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2411799B1 (en) * | 2009-03-23 | 2020-05-06 | Koninklijke Philips N.V. | Gas sensing using ultrasound |
US9217663B2 (en) | 2011-11-22 | 2015-12-22 | Inficon, Inc. | Multi-chambered acoustic sensor for determination gas composition |
CN103425099B (zh) * | 2013-07-16 | 2014-08-06 | 广东工业大学 | 一种硫化过程嵌入式碳排放监控与检测系统 |
US10302595B2 (en) * | 2015-11-06 | 2019-05-28 | Qorvo Us, Inc. | Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
CN107246923A (zh) * | 2017-08-07 | 2017-10-13 | 李昕虎 | 一种基于TPoS谐振器的温度计及温度测量方法 |
CN110957178B (zh) * | 2019-12-13 | 2022-03-22 | 四川新能电力有限公司 | 一种真空开关在线检测方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS554528A (en) * | 1978-06-27 | 1980-01-14 | Sumitomo Bakelite Co Ltd | Method and apparatus for measuring gas concentration |
JPS58136734U (ja) * | 1982-03-11 | 1983-09-14 | 日本電子機器株式会社 | ノツキングセンサ− |
JPS6166126A (ja) * | 1984-09-10 | 1986-04-04 | Sumitomo Bakelite Co Ltd | 耐湿型超音波センサ− |
-
1985
- 1985-05-23 JP JP60109420A patent/JPH0617897B2/ja not_active Expired - Lifetime
- 1985-08-02 CN CN 85105865 patent/CN1011441B/zh not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1910452B (zh) * | 2003-12-30 | 2010-12-08 | 3M创新有限公司 | 用声表面波传感器检测化学或生物介质的量的方法和系统 |
CN100465613C (zh) * | 2005-06-28 | 2009-03-04 | 上海理工大学 | 一种在线检测大气颗粒物浓度的方法及其装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS61269061A (ja) | 1986-11-28 |
CN85105865A (zh) | 1986-11-19 |
JPH0617897B2 (ja) | 1994-03-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C13 | Decision | ||
GR02 | Examined patent application | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |