CN101138060B - 具有电磁控制的微系统 - Google Patents

具有电磁控制的微系统 Download PDF

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Publication number
CN101138060B
CN101138060B CN2006800076856A CN200680007685A CN101138060B CN 101138060 B CN101138060 B CN 101138060B CN 2006800076856 A CN2006800076856 A CN 2006800076856A CN 200680007685 A CN200680007685 A CN 200680007685A CN 101138060 B CN101138060 B CN 101138060B
Authority
CN
China
Prior art keywords
magnetic
magnetic field
substrate
microsystem according
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2006800076856A
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English (en)
Chinese (zh)
Other versions
CN101138060A (zh
Inventor
西尔万·佩纽
卡罗琳·库蒂尔
阿玛莉亚·加尼尔
贝努瓦·格雷普
劳伦特·奇西
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Schneider Electric SE
Original Assignee
Schneider Electric SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schneider Electric SE filed Critical Schneider Electric SE
Publication of CN101138060A publication Critical patent/CN101138060A/zh
Application granted granted Critical
Publication of CN101138060B publication Critical patent/CN101138060B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Electromagnets (AREA)
  • Linear Motors (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Magnetic Treatment Devices (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN2006800076856A 2005-01-10 2006-01-06 具有电磁控制的微系统 Expired - Fee Related CN101138060B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0550085 2005-01-10
FR0550085A FR2880729B1 (fr) 2005-01-10 2005-01-10 Microsysteme a commande electromagnetique
PCT/EP2006/050074 WO2006072627A1 (fr) 2005-01-10 2006-01-06 Microsysteme a commande electromagnetique

Publications (2)

Publication Number Publication Date
CN101138060A CN101138060A (zh) 2008-03-05
CN101138060B true CN101138060B (zh) 2010-12-15

Family

ID=34952790

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006800076856A Expired - Fee Related CN101138060B (zh) 2005-01-10 2006-01-06 具有电磁控制的微系统

Country Status (9)

Country Link
US (1) US7724111B2 (https=)
EP (1) EP1836714B1 (https=)
JP (1) JP4519921B2 (https=)
KR (1) KR101023581B1 (https=)
CN (1) CN101138060B (https=)
AT (1) ATE459974T1 (https=)
DE (1) DE602006012620D1 (https=)
FR (1) FR2880729B1 (https=)
WO (1) WO2006072627A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2911675B1 (fr) * 2007-01-19 2009-08-21 Schneider Electric Ind Sas Initiateur electro-pyrotechnique a commande magnetique
FR2911719B1 (fr) * 2007-01-19 2009-02-27 Schneider Electric Ind Sas Dispositif d'interruption/enclenchement d'un circuit electrique
US8624137B2 (en) * 2008-09-23 2014-01-07 Nxp, B.V. Device with a micro electromechanical structure
DE102008042346A1 (de) * 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
IT201700088417A1 (it) * 2017-08-01 2019-02-01 Hike S R L Dispositivo elettromeccanico integrato.
CN110739808B (zh) * 2019-10-23 2021-07-20 西安工程大学 一种便于集成的微型电磁致动器及其驱动方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410360B1 (en) * 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
CN1498412A (zh) * 2001-01-18 2004-05-19 ����ɣ��������ѧ 具有永久磁铁松弛对准要求的微磁闩锁开关
US6750745B1 (en) * 2001-08-29 2004-06-15 Magfusion Inc. Micro magnetic switching apparatus and method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137427U (https=) * 1979-03-23 1980-09-30
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
CA2211830C (en) * 1997-08-22 2002-08-13 Cindy Xing Qiu Miniature electromagnetic microwave switches and switch arrays
US6320145B1 (en) * 1998-03-31 2001-11-20 California Institute Of Technology Fabricating and using a micromachined magnetostatic relay or switch
JP2001076605A (ja) * 1999-07-01 2001-03-23 Advantest Corp 集積型マイクロスイッチおよびその製造方法
US6310526B1 (en) * 1999-09-21 2001-10-30 Lap-Sum Yip Double-throw miniature electromagnetic microwave (MEM) switches
US6469602B2 (en) * 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
AU2002318143A1 (en) * 2001-05-18 2002-12-03 Microlab, Inc. Apparatus utilizing latching micromagnetic switches
US6593834B2 (en) * 2001-07-30 2003-07-15 Cindy Xing Qiu Double-throw miniature electromagnetic microwave switches with latching mechanism
US7266867B2 (en) * 2002-09-18 2007-09-11 Schneider Electric Industries Sas Method for laminating electro-mechanical structures

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410360B1 (en) * 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
CN1498412A (zh) * 2001-01-18 2004-05-19 ����ɣ��������ѧ 具有永久磁铁松弛对准要求的微磁闩锁开关
US6750745B1 (en) * 2001-08-29 2004-06-15 Magfusion Inc. Micro magnetic switching apparatus and method

Also Published As

Publication number Publication date
EP1836714B1 (fr) 2010-03-03
CN101138060A (zh) 2008-03-05
WO2006072627A1 (fr) 2006-07-13
US20080106360A1 (en) 2008-05-08
ATE459974T1 (de) 2010-03-15
KR20070117546A (ko) 2007-12-12
JP2008527642A (ja) 2008-07-24
DE602006012620D1 (https=) 2010-04-15
FR2880729A1 (fr) 2006-07-14
JP4519921B2 (ja) 2010-08-04
FR2880729B1 (fr) 2009-02-27
US7724111B2 (en) 2010-05-25
KR101023581B1 (ko) 2011-03-21
EP1836714A1 (fr) 2007-09-26

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Granted publication date: 20101215

Termination date: 20160106

CF01 Termination of patent right due to non-payment of annual fee