CN101131450A - Built-in coupling optical ring cavity device - Google Patents
Built-in coupling optical ring cavity device Download PDFInfo
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- CN101131450A CN101131450A CNA2007100712877A CN200710071287A CN101131450A CN 101131450 A CN101131450 A CN 101131450A CN A2007100712877 A CNA2007100712877 A CN A2007100712877A CN 200710071287 A CN200710071287 A CN 200710071287A CN 101131450 A CN101131450 A CN 101131450A
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- coupling optical
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Abstract
The invention is the embedded coupling optics ring cavity apparatus including the underlay isolating layer, the ring cavity optical waveguide and the coupling optical waveguide. The coupling optical waveguide uses the same underlay isolating layer with the ring cavity optical waveguide. In the coupling region, the ring cavity waveguide is embedded into the coupling optical waveguide. Because of sharing the underlay isolating layer, it can simplify the film structure in height direction and only needs the underlay isolating layer, the ring cavity optical guide core and coupling optical waveguide core. The process is more simplifier than the traditional 'vertical coupling'. It can reach the ring cavity with small bending diameter; also it can improve the coupling efficient with the optical fiber to save energy cost. By changing the coupling optical waveguide and the ring cavity optical waveguide, it can adjust the coupling efficient in a large range to meet the different characters of apparatus.
Description
Technical field
The present invention relates to planar optical waveguide integrated device field, particularly relate to a kind of built-in coupling optical ring cavity device.
Background technology
Optical ring cavity device is a kind of photonic device that extremely important status and meaning are arranged in the photonic signal processing field.Optical ring cavity device generally includes a ring cavity (as micro-resonance loop or little dish) and one or two coupling optical waveguides.In order to make it to have bigger free spectral range, must reduce the full annular cavity perimeter.Therefore, should adopt strong limitation optical waveguide to form ring cavity with small-bend radius, for example, based on SOI (Silicon-on-insulator, silicon on the insulator) nano optical wave guide ring cavity (Little et.al. " Ultra-compact Si/SiO.sub.2 micro-ring resonator channel dropping filter ", IEEEPhoton.Tech.Lett., vol.10, pp.549-551,1998).In traditional optical ring cavity device structure, two kinds of coupling scheme are arranged.
The first " lateral ", as shown in Figure 1.The concrete structure of this coupling scheme is: coupling optical waveguide 1 is positioned on the substrate isolation layer 3 with annular cavity optical waveguide 2, on same plane, in this structure, very narrow slit 4 is arranged usually between ring cavity and the coupled waveguide.And the ring cavity device performance therewith gap size be closely related, therefore in manufacturing process, must carry out point-device control to this, this has increased the difficulty that technology is made undoubtedly.In addition, in " lateral " mode, what ring cavity and coupling optical waveguide adopted is identical materials and same cross-sectional shape.For example, in order to obtain small-bend radius, annular cavity optical waveguide 2 can be adopted the silicon nano optical wave guide.At this moment, coupling optical waveguide also is a silicon nanowires, and is then excessive with the coupling loss of optical fiber.
It two is " vertical coupled ", as shown in Figure 2.This mode is to form coupling optical waveguide 1, annular cavity optical waveguide 2 on the short transverse in the different thin layers respectively, and annular cavity optical waveguide 2 is on the separation layer 5 of low-refraction, and coupling optical waveguide 1 is between the separation layer 5 and substrate isolation layer 3 of low-refraction." vertical coupled " mode of employing has solved the problem that " lateral " exists basically.For example, avoid making the difficulty of narrow gap, can adopt varying cross-section shape and material to design ring cavity and coupled waveguide respectively.But maximum problem is its technology more complicated, needs repeatedly thin film deposition, photoetching, etching and surfacingization.
Summary of the invention
The built-in coupling optical ring cavity device that the purpose of this invention is to provide a kind of low coupling loss.
Built-in coupling optical ring cavity device of the present invention, comprise substrate isolation layer, annular cavity optical waveguide and coupling optical waveguide, it is characterized in that coupling optical waveguide and annular cavity optical waveguide common substrate separation layer, the annular cavity optical waveguide is embedded among the coupling optical waveguide in the coupling regime of annular cavity optical waveguide and coupling optical waveguide.
Above-mentioned coupling optical waveguide can be to be arranged in parallel, and also can be not parallel layout.
In order to obtain to be coupled with the high-level efficiency of optical fiber, realize very circlet shape chamber optical waveguide of bending radius simultaneously, further feature of the present invention is, the xsect of coupling optical waveguide is greater than the xsect of annular cavity optical waveguide, and the refractive index of coupling optical waveguide is less than the refractive index of annular cavity optical waveguide.
The invention has the beneficial effects as follows:
Embedded coupling optical ring cavity device because coupling optical waveguide and annular cavity optical waveguide common substrate separation layer have been simplified the film layer structure of device in short transverse, only needs substrate isolation layer, annular cavity optical waveguide core layer and coupling optical waveguide sandwich layer.Its manufacture craft is more easier than traditional " vertical coupled " ring cavity device.Can realize very circlet shape chamber of bending radius, the while can be improved the coupling efficiency with optical fiber, can realize low-loss.Can realize the adjusting on a large scale of coupling coefficient by change coupling optical waveguide, annular cavity optical waveguide parameter, thereby realize that the different components performance is to satisfy different demands.
Description of drawings
Fig. 1 is " lateral " optical ring cavity device;
Fig. 2 is " vertical coupled " optical ring cavity device;
Fig. 3 is the 3-D view of built-in coupling optical ring cavity device of the present invention;
Fig. 4 is the vertical view of Fig. 3 built-in coupling optical ring cavity device;
Fig. 5 is the A-A cross section of Fig. 4;
Fig. 6 is the B-B cross section of Fig. 5;
Embodiment
Further specify the present invention below in conjunction with accompanying drawing.
With reference to Fig. 3～Fig. 6, built-in coupling optical ring cavity device of the present invention comprises coupling optical waveguide 1, annular cavity optical waveguide 2 and substrate isolation layer 3.Coupling optical waveguide 1 and annular cavity optical waveguide 2 common substrate separation layers 3, annular cavity optical waveguide 2 is embedded among the coupling optical waveguide 1 in the coupling regime of annular cavity optical waveguide 2 and coupling optical waveguide 1.
By changing center distance 4 (see figure 6)s of coupling optical waveguide 1 and annular cavity optical waveguide 2, can obtain different annular cavity optical waveguides 2 and the coupling coefficient between the coupling optical waveguide 1.
By changing bending radius 5 (see figure 6)s of annular cavity optical waveguide 2, can obtain different annular cavity optical waveguides 2 and the coupling coefficient between the coupling optical waveguide 1.
Optical waveguide parameters such as xsect by changing coupling optical waveguide 1 and annular cavity optical waveguide 2 and refractive index can obtain different annular cavity optical waveguides 2 and the coupling coefficient between the coupling optical waveguide 1.
Because the present invention do not need special process, thereby can be used for multiple material, different cross-sectional structure, have good practical prospect.
Provide a preparation embodiment below.Ring cavity adopts the silicon nanowires optical waveguide, and its xsect is 500nm * 250nm, and bending radius is 3 μ m.Can directly adopt SOI (Silicon-on-insulator, the silicon on the insulator) substrate, then only need a photoetching and dry etching can obtain silicon nanowires annular cavity optical waveguide on the substrate isolation layer, its refractive index is about 3.455.And coupling optical waveguide can adopt SU-8 glue (refractive index is 1.572).The spin coating of SU-8 glue is covered on the silicon nanowires annular cavity optical waveguide of having made, adopts a photoetching can obtain afterwards silicon nanowires annular cavity optical waveguide embedding coupling optical waveguide wherein again, its xsect is 1.5 μ m * 1.5 μ m.
Claims (3)
1. built-in coupling optical ring cavity device, comprise substrate isolation layer (3), annular cavity optical waveguide (2) and coupling optical waveguide (1), it is characterized in that coupling optical waveguide (1) and annular cavity optical waveguide (2) common substrate separation layer (3), annular cavity optical waveguide (2) is embedded among the coupling optical waveguide (1) in the coupling regime of annular cavity optical waveguide (2) and coupling optical waveguide (1).
2. built-in coupling optical ring cavity device according to claim 1 is characterized in that coupling optical waveguide (1) is to be arranged in parallel or the optical waveguide of not parallel layout.
3. built-in coupling optical ring cavity device according to claim 1 is characterized in that the xsect of the xsect of coupling optical waveguide (1) greater than annular cavity optical waveguide (2), and the refractive index of coupling optical waveguide (1) is less than the refractive index of annular cavity optical waveguide (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100712877A CN101131450A (en) | 2007-09-11 | 2007-09-11 | Built-in coupling optical ring cavity device |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2007100712877A CN101131450A (en) | 2007-09-11 | 2007-09-11 | Built-in coupling optical ring cavity device |
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| CN101131450A true CN101131450A (en) | 2008-02-27 |
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| CNA2007100712877A Pending CN101131450A (en) | 2007-09-11 | 2007-09-11 | Built-in coupling optical ring cavity device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105051580A (en) * | 2013-03-15 | 2015-11-11 | 德累斯顿协会莱布尼茨固体材料研究所 | Waveguide resonator component and method for the production thereof |
| CN110716327A (en) * | 2019-10-21 | 2020-01-21 | 浙江大学 | Silicon electro-optical modulator based on ITO directional coupler |
| CN112368556A (en) * | 2018-04-16 | 2021-02-12 | ams国际有限公司 | Photonic device, photonic device operating method, and photonic device manufacturing method |
-
2007
- 2007-09-11 CN CNA2007100712877A patent/CN101131450A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105051580A (en) * | 2013-03-15 | 2015-11-11 | 德累斯顿协会莱布尼茨固体材料研究所 | Waveguide resonator component and method for the production thereof |
| CN105051580B (en) * | 2013-03-15 | 2018-11-20 | 德累斯顿协会莱布尼茨固体材料研究所 | waveguide resonator component and its manufacturing method |
| CN112368556A (en) * | 2018-04-16 | 2021-02-12 | ams国际有限公司 | Photonic device, photonic device operating method, and photonic device manufacturing method |
| US11906385B2 (en) | 2018-04-16 | 2024-02-20 | Ams International Ag | Photonic device, method for operating a photonic device and method for manufacturing a photonic device |
| CN110716327A (en) * | 2019-10-21 | 2020-01-21 | 浙江大学 | Silicon electro-optical modulator based on ITO directional coupler |
| CN110716327B (en) * | 2019-10-21 | 2020-09-15 | 浙江大学 | Silicon electro-optical modulator based on ITO directional coupler |
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