CN101131178A - Hydrodynamic bearing and manufacturing method thereof - Google Patents
Hydrodynamic bearing and manufacturing method thereof Download PDFInfo
- Publication number
- CN101131178A CN101131178A CNA2006101218682A CN200610121868A CN101131178A CN 101131178 A CN101131178 A CN 101131178A CN A2006101218682 A CNA2006101218682 A CN A2006101218682A CN 200610121868 A CN200610121868 A CN 200610121868A CN 101131178 A CN101131178 A CN 101131178A
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- China
- Prior art keywords
- photoresist
- fabricating
- bearing according
- dynamical pressure
- pressure bearing
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/14—Special methods of manufacture; Running-in
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/107—Grooves for generating pressure
Abstract
The process of making dynamical pressure bearing includes the following steps: forming the material into bearing body with inner hole, painting photoresist to the inner hole in the bearing body, setting one lamp tube with one mask possessing dynamical pressure channel patterns in the surface into the inner hole for stereo exposure; taking out the lamp tube and eliminating the photosensed parts of the photoresist with developer, forming deposited layer on the hole wall without protecting photoresist, and eliminating the residual photoresist in the hole wall with stripping agent to form the dynamical pressure bearing with dynamical pressure channels.
Description
Technical field
The present invention is about a kind of hydraulic bearing and preparation method thereof, particularly about a kind of hydraulic bearing that utilizes light shield technology formation dynamic pressure groove and preparation method thereof.
Background technique
Hydraulic bearing is meant that the inner hole wall at a bearing has minute groove, and has lubricant oil in this groove; When the rotating shaft of motor was rotated, the lubricant oil in the groove can be drawn and is covered with this rotating shaft, and sets up a dynamic pressure, and this rotating shaft is supported on middle position, avoided this rotating shaft and bearing inner wall to produce friction, and can reduce noise.
Yet, the processing of dynamic pressure groove is quite because of difficulty in the brearing bore, reason is that the width of its groove and the degree of depth are very little, the grasp of its precision is difficult for, though existing several processing modes propose, processing mode etc. behind cutter processing mode, rolling processing mode, plastics shoot mode, forms of corrosion, compound mode, the coating for example, but last finished product all belongs to expensive kenel; Partly reason is that promptly these processing modes need utilize special process tool and skill, and all relates to the trade secret of each tame manufacturer.In addition, the dynamic pressure groove regular meeting that tradition utilizes cutter to process has the groove turning point discontinuous, and groove depth and width are inconsistent; Jia Gong machinery equipment costliness in addition, machining tool is fragile, can't produce fast in a large number, and the environment of processing can not produce vibration, needs the personnel through special training ... etc., all be the where the shoe pinches of traditional fabrication hydraulic bearing.
Summary of the invention
The present invention provides a kind of hydraulic bearing that utilizes the light shield technology and preparation method thereof for addressing the above problem, and can improve the degree of difficulty of trickle groove processing in the inner hole wall of small-sized hydraulic bearing, and can reach better wear resistance requirement.
Method for fabricating dynamical pressure bearing disclosed in this invention is needed bearing body and endoporus thereof with forming materials earlier; Then the bore wall with this bearing body is covered with photoresist; Prepare one simultaneously and can pass this endoporus and have the fluorescent tube that can make the exposure of this photoresist, its surface has a light shield that contains the dynamic pressure channel patterns; This fluorescent tube is inserted this endoporus carry out the solid exposure, make in this photoresist should partly producing photosensitization by the light shield light-permeable; This fluorescent tube is shifted out, utilize developer that this photoresist photographic department branch is washed; On the hole wall that is not subjected to the photoresist protection, form sedimentary deposit; The photoresist that utilizes film removal agent will remain in inner hole wall is again removed, and promptly forms the dynamic pressure groove between sedimentary deposit and sedimentary deposit; Utilize clear water to clean this bearing at last, promptly finish needed hydraulic bearing.
According to above-mentioned conception, this sedimentary deposit is an abrasion resistance material, can be different with the material of this bearing body.
According to above-mentioned conception, this photoresist is with methods such as spraying, immersion or centrifugal coatings this photoresist to be covered with on this inner hole wall.
According to above-mentioned conception, behind the coating photoresist, be through a drying step, can adopt baking or natural drying at room temperature.
According to above-mentioned conception, this fluorescent tube is preferably CCFL (CCFL) or optical fiber luminous body, and it can send ultraviolet light sources.
According to above-mentioned conception, this photoresist is preferably and is positive photoresist, has not light-permeable of channel patterns part in this light shield.
According to above-mentioned conception, this light shield can be that a master slice or that is attached to this fluorescent tube directly is formed on the metal pattern on this tube wall.
According to above-mentioned conception, utilize plating, sputter, chemical reaction or any deposition process to form sedimentary deposit on this hole wall that not protected by photoresist.
Utilize the present invention to make the technology of hydraulic bearing, not only the board equipment cost lower, can produce in a large number with the time, can import automation or semi-automatic operation, and formed groove dimensions unanimity, the groove of Any shape all can form easily, and general job person gets final product the easy operation manufacturing; Owing to can significantly reduce cost, the hydraulic bearing of producing according to the present invention can be used to replace middle-size and small-size ball bearing and self-lubricating bearing etc.
For above and other objects of the present invention, feature and advantage can be become apparent, a preferred embodiment cited below particularly, and conjunction with figs. are described in detail below:
Description of drawings
The 1st figure is the bearing body generalized section after the moulding.
The 2nd figure is the schematic representation of coating photoresist on the bearing body inner hole wall of the 1st figure.
The 3rd figure is an exposure used in the present invention fluorescent tube schematic representation.
The 4th figure is a step of exposure schematic representation of the present invention.
The 5th figure is that the present invention is through the bearing schematic representation after the development step.
6a figure is that first embodiment of the invention is through the bearing body schematic representation after the plating step.
6b figure is the local enlarged diagram of 6a figure different visual angles.
7a figure is respectively 6a figure with 7b figure and finishes schematic representation with the bearing of 6b figure after the striping step.
The 8th figure is respectively to adjust the sedimentary deposit schematic representation that obtains behind the different electroplating parameters with the 9th figure.
10a figure is the bearing body schematic representation after second embodiment process sputter step.
10b figure is the local enlarged diagram of 10a figure different visual angles.
11a figure is respectively 10a figure with 11b figure and finishes schematic representation with the bearing of 10b figure after the striping step.
12a figure is the bearing body schematic representation after the 3rd embodiment's after chemical reaction step.
12b figure is the local enlarged diagram of 12a figure different visual angles.
13a figure is respectively 12a figure with 13b figure and finishes schematic representation with the bearing of 12b figure after the striping step.
The primary clustering symbol description
1: bearing body 10: inner hole wall
12: groove 20: photoresist
30: fluorescent tube 40: light shield
401: channel patterns 50,60,70: sedimentary deposit
Embodiment
First embodiment
See also the 1st figure, the method for fabricating dynamical pressure bearing of first embodiment of the invention at first is to be needed bearing body and endoporus (for example metal turning) thereof with forming materials, and the 1st figure is bearing body (1) generalized section after the moulding; Wherein the material of this bearing body (1) is a metal, and this enforcement is done explanation with copper, can be fine copper, brass or bronze.
Then be covered with photoresist (20), shown in the 2nd figure on inner hole wall (10) surface of this bearing body (1); Being coated with this photoresist (20) can be to utilize spraying, immersion or centrifugal coating in the method for this inner hole wall (10), mainly is that this photoresist (20) can be covered with equably in this inner hole wall (10) surface.In addition, the kind of photoresist (20) is not particularly limited, can be photoresist or sulfonamide chlorine photoresist etc. for rotation-sensitivity ion polyimide type photoresist, diazo salt, this example uses the product " AZP-4620 " of Clariant (Clariant) company, it is a positive photoresist, and main component is diazo compound derivative (Naphthoquinonediazide derivative) and many cresols polymer (Novolakresin derivative).
In order to make this photoresist (20) can close attachment with this inner hole wall (10), this photoresist (20) is toasted, make the surface of contact of itself and this inner hole wall (10) can be dried fully solid.Certainly, also can utilize the method for natural drying at room temperature to solidify this photoresist (20).
On the other hand, prepare one and can pass this bearing body (1) endoporus and can produce the fluorescent tube (30) of ultraviolet light sources, its surface has a light shield (40) that contains dynamic pressure channel patterns (401), shown in the 3rd figure.In more detail, this light shield (40) can be one to be attached to this fluorescent tube (30) surface and to contain the master slice of this dynamic pressure channel patterns (401), or one directly be formed on this fluorescent tube (30) surface and contain the metal pattern of this dynamic pressure channel patterns (401), and wherein this metal pattern preferably forms with crome metal.This fluorescent tube (30) can produce the light source that makes this photoresist (20) sensitization, and with present embodiment, it can produce the ultraviolet of wavelength 350～450 nanometers; In addition, this fluorescent tube (30) that can produce ultraviolet light sources is preferably CCFL (CCFL) or optical fiber luminous body.Because this enforcement is to adopt positive photoresist, has not light-permeable of dynamic pressure channel patterns (401) part in this light shield (40).The channel patterns of this enforcement (401) is shaped as the V font, and groove shape and unrestricted also can be man type, fishbone or twill shape etc. certainly.
This fluorescent tube (30) is inserted this in the brearing bore of overbaking operation, and the logical power supply generation ultraviolet of going up makes in this photoresist (20) to should light shield (40) light-permeable part producing photosensitization, shown in the 4th figure to carry out the solid exposure.
Exposure is shifted out this fluorescent tube (30) after finishing, and utilizes developer that this photoresist (20) photographic department branch is washed and exposes inner hole wall (10), shown in the 5th figure; Wherein the composition of this developer and concentration are decided according to employed photoresist, be not particularly limited, present embodiment uses the product " AZ-300 " of Clariant (Clariant) company, and its main component is tetramethyl-ammonium water (Tetramethyl Amonium Hydroxide).
Then utilize plating mode; be not subjected to inner hole wall (10) surface of photoresist (20) protection to plate abrasion resistance material at this; for example: nickel cobalt (NiCo) alloy, nickel phosphorus (NiP) alloy, nickel cobalt phosphorus (NiCoP) alloy etc., to form sedimentary deposit (50), shown in 6a, 6b figure.
The photoresist (20) that utilizes film removal agent will remain in this inner hole wall (10) is at last again removed, and then forms needed dynamic pressure groove (12) between sedimentary deposit (50) and sedimentary deposit (50); Utilize clear water to remove all soup clean again and finish hydraulic bearing of the present invention, shown in 7a, 7b figure.The film removal agent of present embodiment is an acetone.
Adopt the mode of electroplating not to be subjected to the degree of depth of dynamic pressure groove and the restriction of width ratio; In addition, by adjusting electroplating parameter, for example: the impulsive current that electroplating time, rate of deposition, plating are used, the methods such as additive of electroplate liquid, can change the growth form of sedimentary deposit, shown in the 8th figure, the thickness of this sedimentary deposit (50) surpasses the thickness of this curing photoresist (12) and forms the circular arc nose, and this circular arc nose can reduce with the area of contact of a rotating shaft and reduces friction.In addition, also can impose different current densities, and change the thickness of each sedimentary deposit (50), shown in the 9th figure, make the design of dynamic pressure groove freer in each plating place.
Second embodiment
The method that the method for fabricating dynamical pressure bearing of second embodiment of the invention and above-mentioned first embodiment's difference are to form sedimentary deposit is different, so steps such as the moulding before forming sedimentary deposit, exposure, development are identical with first embodiment, can consult the 1st to the 5th figure and its related description, repeat no more.It should be noted that just when utilizing this method, the material of bearing body (1) can be a metal, as brass, can also be nonmetal, as aluminium oxide ceramics.
See also 10a and 10b figure; present embodiment is after development step; utilize sputtering way with abrasion resistance material; for example: nickel cobalt (NiCo) alloy, silicon carbide, Tungsten carbite etc.; be deposited on inner hole wall (10) surface that this is subjected to photoresist or is not subjected to photoresist (20) protection simultaneously, and form sedimentary deposit (60).Utilize lift-off method (Lift-off) to peel off this photoresist (10) and deposition abrasion resistance material thereon at last again, then form required dynamic pressure groove (12) between unstripped sedimentary deposit (60) and the sedimentary deposit (60) and finish hydraulic bearing of the present invention, shown in 11a and 11b figure.
The 3rd embodiment
The method that the method for fabricating dynamical pressure bearing of third embodiment of the invention and above-mentioned first embodiment's difference are to form sedimentary deposit is different, so steps such as the moulding before forming sedimentary deposit, exposure, development are identical with first embodiment, can consult the 1st to the 5th figure and its related description, repeat no more.Just the bearing body material of present embodiment is to explain with aluminum or aluminum alloy.
After development step, make the inner hole wall and the extraneous reactant that are not subjected to the photoresist protection produce chemical reaction, and form compound.For example present embodiment is to be that the bearing body (1) of aluminum or aluminum alloy is put into oxalic acid solution with material, imposes anodizing again, can make the inner hole wall (10) that is not subjected to photoresist (20) form wear-resisting alumina sedimentary deposit (70), shown in 12a and 12b figure.Utilize the film removal agent acetone soln that photoresist (20) is removed at last again, and clean and dry, then form needed dynamic pressure groove between sedimentary deposit (70) and sedimentary deposit (70) and finish hydraulic bearing of the present invention, shown in 13a and 13b figure with clear water.Just be noted that, though present embodiment is to utilize liquid to produce chemical reaction, as long as the reactant that can produce chemical reaction with inner hole wall all can, no matter it is liquid or gas.
Take a broad view of the foregoing description, because sedimentary deposit of the present invention is a high-abrasive material, and can be different with the bearing body material, so more traditional hydraulic bearing has better wear resistance; In addition, the size design of dynamic pressure groove is also more flexible.
The above only is the preferred embodiments of the present invention, and the foregoing description only is used for illustrating but not in order to limit claim of the present invention, category of the present invention is defined by following claim.All equalizations of being done according to the present patent application claim change and modify, and all should belong to covering scope of the present invention.
Claims (19)
1. method for fabricating dynamical pressure bearing, its step comprises:
The bearing body of one orate is provided;
This bore wall at this bearing body is covered with a photoresist;
Can make the fluorescent tube of this photoresist exposure put into this endoporus of this bearing body with one, expose, wherein this surface of the light tube has the light shield of dynamic pressure channel patterns;
To this photoresist is developed, expose this inner hole wall to remove the part photoresist;
On the inner hole wall that is not subjected to this photoresist protection, form sedimentary deposit; And
Residue photoresist on this inner hole wall is removed, and on this inner hole wall, formed the dynamic pressure groove.
2. method for fabricating dynamical pressure bearing according to claim 1 can be spraying, immersion or centrifugal coating in the mode that this bore wall of this bearing body is covered with this photoresist wherein.
3. method for fabricating dynamical pressure bearing according to claim 1, wherein this photoresist is that positive photoresist, rotation-sensitivity ion polyimide type photoresist, diazo salt are photoresist, sulfonamide chlorine photoresist or the photoresist that contains diazo compound derivative (Naphthoquinone diazide derivative) and many cresols polymer (Novolakresinderivative), has not light-permeable of this dynamic pressure channel patterns part in this light shield.
4. method for fabricating dynamical pressure bearing according to claim 3 wherein utilizes one to comprise that the developer of tetramethyl-ammonium water (Tetramethyl Amonium Hydroxide) carries out development step.
5. method for fabricating dynamical pressure bearing according to claim 3, wherein this fluorescent tube is the CCFL or the optical fiber luminous body that can produce wavelength 350～450 nano-ultraviolet lights.
6. method for fabricating dynamical pressure bearing according to claim 1 wherein carries out drying step after this bore wall of this bearing body is covered with this photoresist, be to adopt baking or natural drying at room temperature.
7. method for fabricating dynamical pressure bearing according to claim 1, wherein this light shield is one to be attached to the master slice of this surface of the light tube, it has this dynamic pressure channel patterns, or a metal pattern that directly is formed on this tube wall.
8. method for fabricating dynamical pressure bearing according to claim 7, wherein this metal pattern is formed by crome metal.
9. method for fabricating dynamical pressure bearing according to claim 1, wherein this dynamic pressure channel patterns is shaped as V font, fishbone, man type, twill shape.
10. method for fabricating dynamical pressure bearing according to claim 1, wherein this sedimentary deposit is to utilize the mode of plating or sputter to form.
11. method for fabricating dynamical pressure bearing according to claim 10, wherein the material of this bearing body is fine copper, brass, bronze, aluminium, aluminum alloy, metal, nonmetal or aluminium oxide ceramics, and this sedimentary deposit is nickel cobalt (NiCo) alloy, nickel phosphorus (NiP) alloy, nickel cobalt phosphorus (NiCoP) alloy, silicon carbide, Tungsten carbite or high-abrasive material.
12. method for fabricating dynamical pressure bearing according to claim 10, wherein the thickness of this sedimentary deposit surpasses the thickness of this photoresist and forms the circular arc nose, and perhaps the thickness of each sedimentary deposit is not quite identical.
13. method for fabricating dynamical pressure bearing according to claim 10 wherein is to utilize lift-off method to remove with the residue photoresist on this inner hole wall.
14. method for fabricating dynamical pressure bearing according to claim 1, wherein this is not subjected to the inner hole wall system of photoresist protection to produce chemical reaction with extraneous reactant, and forms this sedimentary deposit.
15. method for fabricating dynamical pressure bearing according to claim 14, wherein the material of bearing body is an aluminum or aluminum alloy, is immersed in the oxalic acid solution, imposes anodizing again, and forms the alumina deposit layer.。
16., utilize a film removal agent that contains acetone soln should remain photoresist at last again and remove according to claim 10 or 14 described method for fabricating dynamical pressure bearing.
17. hydraulic bearing of producing with claim the 1st described method.
18. hydraulic bearing according to claim 17, wherein this bearing body and sedimentary deposit are unlike material, the material of this bearing body is fine copper, brass, bronze, aluminium, aluminum alloy, metal, nonmetal or aluminium oxide ceramics, and this sedimentary deposit is nickel cobalt (NiCo) alloy, nickel phosphorus (NiP) alloy, nickel cobalt phosphorus (NiCoP) alloy, nickel cobalt (NiCo) alloy, silicon carbide, Tungsten carbite, aluminium oxide or high-abrasive material.
19. hydraulic bearing according to claim 17, wherein an end of this sedimentary deposit is the circular arc nose, and perhaps the thickness of each sedimentary deposit is not quite identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101218682A CN101131178A (en) | 2006-08-25 | 2006-08-25 | Hydrodynamic bearing and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101218682A CN101131178A (en) | 2006-08-25 | 2006-08-25 | Hydrodynamic bearing and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101131178A true CN101131178A (en) | 2008-02-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101218682A Pending CN101131178A (en) | 2006-08-25 | 2006-08-25 | Hydrodynamic bearing and manufacturing method thereof |
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| CN (1) | CN101131178A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011160867A1 (en) * | 2010-06-23 | 2011-12-29 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| CN104389000A (en) * | 2014-11-05 | 2015-03-04 | 芜湖金龙模具锻造有限责任公司 | Anodic oxidation protection method for bearing surface |
-
2006
- 2006-08-25 CN CNA2006101218682A patent/CN101131178A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011160867A1 (en) * | 2010-06-23 | 2011-12-29 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| CN102947088A (en) * | 2010-06-23 | 2013-02-27 | Asml控股股份有限公司 | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| CN102947088B (en) * | 2010-06-23 | 2017-06-13 | Asml控股股份有限公司 | Pneumatic bearing and its manufacture method with the thin polymer film wear surface for combining |
| US10267360B2 (en) | 2010-06-23 | 2019-04-23 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| CN104389000A (en) * | 2014-11-05 | 2015-03-04 | 芜湖金龙模具锻造有限责任公司 | Anodic oxidation protection method for bearing surface |
| CN104389000B (en) * | 2014-11-05 | 2018-05-08 | 芜湖金龙模具锻造有限责任公司 | A kind of anodic oxidation guard method of bearing surface |
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Open date: 20080227 |