CN1924382A - Method for manufacturing dynamic pressure bearing - Google Patents
Method for manufacturing dynamic pressure bearing Download PDFInfo
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- CN1924382A CN1924382A CN 200510099113 CN200510099113A CN1924382A CN 1924382 A CN1924382 A CN 1924382A CN 200510099113 CN200510099113 CN 200510099113 CN 200510099113 A CN200510099113 A CN 200510099113A CN 1924382 A CN1924382 A CN 1924382A
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- bearing
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- pressure bearing
- dynamical pressure
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Abstract
This invention relates to dynamic bearing process method, which comprises the following steps: coating light resistance agent on metal bearing inner hole wall surface with transparent dynamic groove pattern to generate ultraviolet line lamp into the bearing hole for space exposition to generate light sensor on dynamic groove pattern; placing tube and using develop agent to clear light resistance agent; using etching the unprotected inner hole wall then using remaining film removal agent to remove remaining light resistance agent.
Description
Technical field
The invention relates to a kind of method for fabricating dynamical pressure bearing, particularly about a kind of method for fabricating dynamical pressure bearing that utilizes little shadow technology to form the dynamic pressure groove.
Background technique
Hydraulic bearing is meant that hole wall has fine groove within a bearing, and has lubricant oil in this groove; When the rotating shaft of motor was rotated, the lubricant oil in the groove can be drawn and is covered with this rotating shaft, and sets up a dynamic pressure, and this rotating shaft is supported on middle position, avoided this rotating shaft and bearing inner wall to produce friction, and can reduce noise.
Yet, the processing of dynamic pressure groove is quite because of difficulty in the brearing bore, reason is that the width of its groove and the degree of depth are very little, the grasp of its precision is difficult for, though the proposition of existing several processing modes, processing mode etc. behind cutter processing mode, rolling processing mode, plastic cement shoot mode, forms of corrosion, compound mode, the coating for example, but last finished product all belongs to expensive kenel; Partly reason is that promptly these processing modes need utilize special process tool and skill, and all relates to the trade secret of each tame manufacturer.In addition, the dynamic pressure groove regular meeting that tradition utilizes cutter to process has the groove turning point discontinuous, and groove depth and width are inconsistent; Jia Gong machinery equipment costliness in addition, machining tool is fragile, can't produce fast in a large number, and the environment of processing can not produce vibration, needs through the special training personnel etc., all is traditional fabrication hydraulic bearing where the shoe pinches.
Summary of the invention
The present invention provides a kind of method for fabricating dynamical pressure bearing that utilizes little shadow technology for addressing the above problem, be can improve within the small-sized hydraulic bearing in the hole wall, trickle groove processing because of difficulty.
The disclosed method for fabricating dynamical pressure bearing according to the present invention is earlier with metal turning or required bearing shape and the endoporus thereof of powder sintered one-tenth; Then the bore wall with this bearing is covered with photoresist; The master slice that simultaneously the surface of the light tube attaching one that contains ultraviolet light sources that can pass this brearing bore is contained the dynamic pressure channel patterns; This fluorescent tube is inserted this brearing bore carry out the solid exposure, make in this photoresist should partly producing photosensitization by the master slice light-permeable; This fluorescent tube is shifted out, utilize developer that this photoresist photographic department branch is washed; Utilize etching solution will not be subjected to the hole wall of photoresist protection be etched to desire the degree of depth; The photoresist that utilizes film removal agent will remain in inner hole wall is again removed; Utilize clear water to clean this bearing at last, promptly finish canaliculate hydraulic bearing.
According to above-mentioned conception, the metal material of this bearing is preferably copper.
According to above-mentioned conception, be coated with this photoresist and be preferably spraying, immersion or centrifugal coating in the method for this inner hole wall.
According to above-mentioned conception, behind the coating photoresist, be preferably through a baking program, to solidify this photoresist.
According to above-mentioned conception, this fluorescent tube that contains ultraviolet light sources is preferably CCFL (CCFL) or optical fiber luminous body.
According to above-mentioned conception, having the channel patterns part in this master slice is light-permeable, and remaining part is light-permeable not.
According to above-mentioned conception, this master slice not only has channel patterns, also can design to have the oil storage tank pattern, so can form groove and oil storage tank at the brearing bore wall simultaneously.
Utilize the present invention to make the technology of hydraulic bearing, not only the board equipment cost lower, can produce in a large number with the time, can import automation or semi-automatic operation, and formed groove dimensions unanimity, the groove of Any shape all can form easily, and general job person gets final product the easy operation manufacturing; Owing to can significantly reduce cost, the hydraulic bearing of producing according to the present invention can be used to replace middle-size and small-size ball bearing and self-lubricating bearing etc.
For further specifying above-mentioned purpose of the present invention, structural feature and effect, the present invention is described in detail below with reference to accompanying drawing.
Description of drawings
Fig. 1 is the bearing generalized section after the metal forming.
Fig. 2 is the schematic representation of coating photoresist on the brearing bore wall of Fig. 1.
Fig. 3 is an exposure used in the present invention fluorescent tube schematic representation.
Fig. 4 is an exposure operation schematic representation of the present invention.
Fig. 5 for the present invention through the bearing schematic representation after the development operation.
Fig. 6 finishes schematic representation for the present invention through the bearing after the etching, striping operation.
Embodiment
Method for fabricating dynamical pressure bearing of the present invention at first is with metal turning or required bearing shape and the endoporus thereof of powder sintered one-tenth, and Fig. 1 is the bearing generalized section after the metal forming; Wherein the metal material than the Chang Zuowei bearing is a copper, and this enforcement is also done explanation with copper.
Then be covered with photoresist 20, as shown in Figure 2 on inner hole wall 10 surfaces of this bearing; Being coated with this photoresist 20 can be to utilize spraying, immersion or centrifugal coating in the method for this brearing bore wall 10, mainly is that this photoresist 20 can be covered with equably in this inner hole wall 10 surfaces.In addition, the kind of photoresist 20 is not particularly limited, and can be photoresist or sulphur vinegar amine chlorine photoresist etc. for photosensitivity ion polyimide type photoresist, diazo salt, and this example is to use the positive photoresist of " the easily high PRP-200 of power " to explain.
In order to make the photoresist 20 can close attachment with this brearing bore wall 10, this photoresist 20 is toasted, make the surface of contact of itself and this inner hole wall 10 can be dried fully solid.
On the other hand, prepare one and can pass the fluorescent tube 30 that this brearing bore also can produce ultraviolet light sources, attach a master slice 40 that contains dynamic pressure channel patterns 401 and oil storage tank pattern 402 at this surface of the light tube, as shown in Figure 3, and this fluorescent tube can produce the how ultraviolet of rice of wavelength 350 ~ 450.Because this enforcement is to adopt positive photoresist, be transparent light-permeable so have channel patterns 401 in this master slice 40 with oil storage tank pattern 402 parts, remaining part is a not light-permeable of black.In addition, this fluorescent tube 30 that can produce ultraviolet light sources is preferably CCFL CCFL or optical fiber luminous body.Master slice 40 groove shapes of this enforcement are the V font.
The fluorescent tube 30 of this attaching master slice 40 is inserted this in the brearing bore of overbaking operation, and the logical power supply generation ultraviolet of going up makes in this photoresist 20 to should master slice 40 light-permeable parts producing photosensitization, as shown in Figure 4 to carry out the solid exposure.
Exposure is shifted out this fluorescent tube 30 after finishing, and utilizes developer that these photoresist 20 photographic department branches are washed and exposes the metallic copper of inner hole wall 10, as shown in Figure 5; Wherein the composition of this developer and concentration are to decide according to employed photoresist, are not particularly limited, and present embodiment is to use sodium hydroxide solution.
Utilize etching solution will not to be subjected to the inner hole wall 10 of photoresist 20 protections to be etched with the groove 12 and oil storage tank 13 that forms the desired size and the degree of depth after then using clear water to clean.And this etching solution can be any copper etching liquor that does not destroy photoresist, for example ferric chloride solution, copper chloride solution or sulfuration Ya Moniya solution etc.
The photoresist 20 that utilizes film removal agent will remain in this inner hole wall 10 after then using clear water to clean is removed, and present embodiment is to utilize the not photoresist removal of sensitization of ethanol.
It is clean to utilize clear water that all soups are removed at last, and finishes the making of hydraulic bearing, as Fig. 6 institute not.
It should be noted, of the present inventionly focus on utilizing three-dimensional little shadow technology to process the dynamic pressure groove on the brearing bore wall, be not particularly limited in order to implement any medicament of the present invention, existing little shadow medicament also can be used in the present invention; Certainly the groove shape of brearing bore wall need not limit yet, except the V font, can be fishbone, man type, twill or vertical bar line etc. yet.
Claims (19)
1. method for fabricating dynamical pressure bearing is characterized in that may further comprise the steps:
One bearing with endoporus is provided;
This bore wall at this bearing is covered with a photoresist;
One ultraviolet light sources fluorescent tube is inserted in this endoporus of this bearing, carry out the solid exposure, wherein this surface of the light tube has channel patterns;
Utilize developer that this photoresist photographic department branch is washed and expose this inner hole wall; And
Utilize etching solution will not to be subjected to this inner hole wall of photoresist protection to be etched with the formation groove.
2. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: this channel patterns of this surface of the light tube is to be formed at one to be attached on the master slice of this surface of the light tube.
3. method for fabricating dynamical pressure bearing as claimed in claim 2 is characterized in that: this master slice has more an oil storage tank pattern.
4. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: this channel patterns is shaped as V font, fishbone, man type, twill or vertical bar line.
5. described method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: toast operation after this bore wall of this bearing is covered with photoresist.
6. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: this bearing and this endoporus are formed or powder sintered formation by turning.
7. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: the mode that is covered with this photoresist in this bore wall of this bearing can be spraying, immersion or centrifugal coating.
8. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: this fluorescent tube is CCFL or optical fiber luminous body.
9. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: this photoresist photographic department branch is washed and after exposing this inner hole wall, utilize clear water to clean this inner hole wall of this bearing at this developer.
10. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: after this etching solution will not be subjected to this inner hole wall of photoresist protection to carry out etching, utilize clear water to clean this inner hole wall of this bearing.
11. method for fabricating dynamical pressure bearing as claimed in claim 10 is characterized in that: clean this inner hole wall of this bearing at clear water after, the photoresist that utilizes film removal agent will remain in this inner hole wall is removed.
12. method for fabricating dynamical pressure bearing as claimed in claim 1 is characterized in that: the material of this metal bearing is copper or metal.
13. method for fabricating dynamical pressure bearing as claimed in claim 12 is characterized in that: this photoresist is that photosensitivity ion polyimide type photoresist, diazo salt are photoresist or sulphur vinegar amine chlorine photoresist.
14. method for fabricating dynamical pressure bearing as claimed in claim 13 is characterized in that: this channel patterns is transparent light-permeable, and remaining part is light-permeable not.
15. method for fabricating dynamical pressure bearing as claimed in claim 14 is characterized in that: this fluorescent tube is to produce the how ultraviolet of rice of wavelength 350 ~ 450.
16. method for fabricating dynamical pressure bearing as claimed in claim 15 is characterized in that: this developer is a sodium hydroxide solution.
17. method for fabricating dynamical pressure bearing as claimed in claim 16 is characterized in that: this etching solution is to be ferric chloride solution, copper chloride solution or sulfuration Ya Moniya solution.
18. method for fabricating dynamical pressure bearing as claimed in claim 17 is characterized in that: after this etching solution will not be subjected to this inner hole wall of photoresist protection to carry out etching, be that the photoresist that utilizes ethanol will remain in this inner hole wall is removed.
19. a method for fabricating dynamical pressure bearing is characterized in that comprising the following steps:
Preparation one has the bearing of endoporus;
This bore wall at this bearing is covered with a photoresist;
Prepare one and can pass the fluorescent tube that this brearing bore also can produce ultraviolet light sources;
The master slice that contains dynamic pressure channel patterns and oil storage tank pattern in this surface of the light tube attaching one;
This fluorescent tube that attaches this master slice is inserted in this endoporus of this bearing, and produce ultraviolet, make in this photoresist this dynamic pressure channel patterns and oil storage tank pattern part generation photosensitization that should master slice to carry out solid exposure;
This fluorescent tube is shifted out this endoporus, and utilize developer that the part that this photoresist produces photosensitization is washed;
Utilize etching solution not be etched with by the inner hole wall of photoresist protection and form groove and oil storage tank; And
The photoresist that utilizes film removal agent will remain in this inner hole wall is removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510099113 CN1924382A (en) | 2005-08-31 | 2005-08-31 | Method for manufacturing dynamic pressure bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510099113 CN1924382A (en) | 2005-08-31 | 2005-08-31 | Method for manufacturing dynamic pressure bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1924382A true CN1924382A (en) | 2007-03-07 |
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ID=37817139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510099113 Pending CN1924382A (en) | 2005-08-31 | 2005-08-31 | Method for manufacturing dynamic pressure bearing |
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| Country | Link |
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| CN (1) | CN1924382A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102023478A (en) * | 2009-09-16 | 2011-04-20 | 东莞市伟峰印刷有限公司 | Etching method for three-dimensional workpiece |
| CN107620768A (en) * | 2016-07-14 | 2018-01-23 | Ntn株式会社 | Fluid dynamic-pressure bearing device and the motor for possessing the fluid dynamic-pressure bearing device |
| CN110710339A (en) * | 2017-06-28 | 2020-01-17 | 国际商业机器公司 | Forming conductive vias with light guides |
-
2005
- 2005-08-31 CN CN 200510099113 patent/CN1924382A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102023478A (en) * | 2009-09-16 | 2011-04-20 | 东莞市伟峰印刷有限公司 | Etching method for three-dimensional workpiece |
| CN107620768A (en) * | 2016-07-14 | 2018-01-23 | Ntn株式会社 | Fluid dynamic-pressure bearing device and the motor for possessing the fluid dynamic-pressure bearing device |
| CN110710339A (en) * | 2017-06-28 | 2020-01-17 | 国际商业机器公司 | Forming conductive vias with light guides |
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