CN101126905A - 具有对焦机构的直写光刻装置 - Google Patents
具有对焦机构的直写光刻装置 Download PDFInfo
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- CN101126905A CN101126905A CNA2007101325301A CN200710132530A CN101126905A CN 101126905 A CN101126905 A CN 101126905A CN A2007101325301 A CNA2007101325301 A CN A2007101325301A CN 200710132530 A CN200710132530 A CN 200710132530A CN 101126905 A CN101126905 A CN 101126905A
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CN2007101325301A CN101126905B (zh) | 2007-09-19 | 2007-09-19 | 具有对焦机构的直写光刻装置 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102207689A (zh) * | 2011-05-20 | 2011-10-05 | 合肥芯硕半导体有限公司 | 一种直写式光刻机的对准系统及对位标记精度提取方法 |
CN102314097A (zh) * | 2011-09-19 | 2012-01-11 | 合肥芯硕半导体有限公司 | 一种空间光调制器中心与相机中心空间位置的标定方法 |
CN102445861A (zh) * | 2011-12-09 | 2012-05-09 | 合肥芯硕半导体有限公司 | 一种位置触发扫描方式的光刻机系统及方法 |
CN102841507A (zh) * | 2011-06-23 | 2012-12-26 | 虎尾科技大学 | 激光直写式纳米周期性结构图案制造设备 |
CN103245418A (zh) * | 2013-04-19 | 2013-08-14 | 昆明物理研究所 | 非制冷焦平面热像仪盘式斩波器逐列推扫调制方法 |
CN104965395A (zh) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | 一种用于光刻直写系统的混合调焦装置 |
CN105549346A (zh) * | 2014-10-29 | 2016-05-04 | 合肥芯硕半导体有限公司 | 获取激光直接成像设备的最佳焦面距离的方法 |
CN105593984A (zh) * | 2013-08-20 | 2016-05-18 | 科磊股份有限公司 | 检定用于显微光刻的图案的合格性 |
CN106030412A (zh) * | 2014-02-19 | 2016-10-12 | 卡尔蔡司Smt有限责任公司 | 微光刻投影曝光设备的照明系统和用于操作该系统的方法 |
CN111381456A (zh) * | 2020-04-29 | 2020-07-07 | 中山新诺科技股份有限公司 | 一种无掩模光刻系统及一种像面焦点实时检测方法 |
CN113391527A (zh) * | 2021-07-02 | 2021-09-14 | 中国科学院光电技术研究所 | 一种基于ccd成像检焦对准的微结构加工方法和装置 |
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- 2007-09-19 CN CN2007101325301A patent/CN101126905B/zh not_active Expired - Fee Related
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102207689B (zh) * | 2011-05-20 | 2013-03-13 | 合肥芯硕半导体有限公司 | 一种直写式光刻机的对准系统及对位标记精度提取方法 |
CN102207689A (zh) * | 2011-05-20 | 2011-10-05 | 合肥芯硕半导体有限公司 | 一种直写式光刻机的对准系统及对位标记精度提取方法 |
CN102841507B (zh) * | 2011-06-23 | 2014-06-25 | 虎尾科技大学 | 激光直写式纳米周期性结构图案制造设备 |
CN102841507A (zh) * | 2011-06-23 | 2012-12-26 | 虎尾科技大学 | 激光直写式纳米周期性结构图案制造设备 |
CN102314097A (zh) * | 2011-09-19 | 2012-01-11 | 合肥芯硕半导体有限公司 | 一种空间光调制器中心与相机中心空间位置的标定方法 |
CN102445861A (zh) * | 2011-12-09 | 2012-05-09 | 合肥芯硕半导体有限公司 | 一种位置触发扫描方式的光刻机系统及方法 |
CN103245418A (zh) * | 2013-04-19 | 2013-08-14 | 昆明物理研究所 | 非制冷焦平面热像仪盘式斩波器逐列推扫调制方法 |
CN105593984A (zh) * | 2013-08-20 | 2016-05-18 | 科磊股份有限公司 | 检定用于显微光刻的图案的合格性 |
CN106030412A (zh) * | 2014-02-19 | 2016-10-12 | 卡尔蔡司Smt有限责任公司 | 微光刻投影曝光设备的照明系统和用于操作该系统的方法 |
CN105549346A (zh) * | 2014-10-29 | 2016-05-04 | 合肥芯硕半导体有限公司 | 获取激光直接成像设备的最佳焦面距离的方法 |
CN104965395A (zh) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | 一种用于光刻直写系统的混合调焦装置 |
CN111381456A (zh) * | 2020-04-29 | 2020-07-07 | 中山新诺科技股份有限公司 | 一种无掩模光刻系统及一种像面焦点实时检测方法 |
CN113391527A (zh) * | 2021-07-02 | 2021-09-14 | 中国科学院光电技术研究所 | 一种基于ccd成像检焦对准的微结构加工方法和装置 |
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CN101126905B (zh) | 2011-12-07 |
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