CN100561357C - 具有对焦机构的直写光刻装置 - Google Patents
具有对焦机构的直写光刻装置 Download PDFInfo
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- CN100561357C CN100561357C CNB2007101337972A CN200710133797A CN100561357C CN 100561357 C CN100561357 C CN 100561357C CN B2007101337972 A CNB2007101337972 A CN B2007101337972A CN 200710133797 A CN200710133797 A CN 200710133797A CN 100561357 C CN100561357 C CN 100561357C
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Application Number | Priority Date | Filing Date | Title |
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CNB2007101337972A CN100561357C (zh) | 2007-09-30 | 2007-09-30 | 具有对焦机构的直写光刻装置 |
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CNB2007101337972A CN100561357C (zh) | 2007-09-30 | 2007-09-30 | 具有对焦机构的直写光刻装置 |
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CN101158817A CN101158817A (zh) | 2008-04-09 |
CN100561357C true CN100561357C (zh) | 2009-11-18 |
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CNB2007101337972A Expired - Fee Related CN100561357C (zh) | 2007-09-30 | 2007-09-30 | 具有对焦机构的直写光刻装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101807012A (zh) * | 2010-04-07 | 2010-08-18 | 芯硕半导体(中国)有限公司 | 一种直写光刻机的自动聚焦光路结构 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109901364B (zh) * | 2019-03-14 | 2021-08-20 | 大族激光科技产业集团股份有限公司 | 一种数字光刻的调焦系统及方法 |
CN112355467B (zh) * | 2020-10-21 | 2022-06-21 | 深圳市杰普特光电股份有限公司 | 辅助对焦装置、激光清洗设备和校准方法 |
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2007
- 2007-09-30 CN CNB2007101337972A patent/CN100561357C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101807012A (zh) * | 2010-04-07 | 2010-08-18 | 芯硕半导体(中国)有限公司 | 一种直写光刻机的自动聚焦光路结构 |
CN101807012B (zh) * | 2010-04-07 | 2011-12-21 | 芯硕半导体(中国)有限公司 | 一种直写光刻机的自动聚焦光路结构 |
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Publication number | Publication date |
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CN101158817A (zh) | 2008-04-09 |
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