CN101121239A - 一种化学机械研磨机台化学液供给装置 - Google Patents
一种化学机械研磨机台化学液供给装置 Download PDFInfo
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- CN101121239A CN101121239A CNA2006100297757A CN200610029775A CN101121239A CN 101121239 A CN101121239 A CN 101121239A CN A2006100297757 A CNA2006100297757 A CN A2006100297757A CN 200610029775 A CN200610029775 A CN 200610029775A CN 101121239 A CN101121239 A CN 101121239A
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
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CNB2006100297757A CN100551621C (zh) | 2006-08-07 | 2006-08-07 | 一种化学机械研磨机台化学液供给装置 |
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CNB2006100297757A CN100551621C (zh) | 2006-08-07 | 2006-08-07 | 一种化学机械研磨机台化学液供给装置 |
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CN101121239A true CN101121239A (zh) | 2008-02-13 |
CN100551621C CN100551621C (zh) | 2009-10-21 |
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CNB2006100297757A Expired - Fee Related CN100551621C (zh) | 2006-08-07 | 2006-08-07 | 一种化学机械研磨机台化学液供给装置 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101920476B (zh) * | 2009-06-11 | 2011-12-14 | 上海华虹Nec电子有限公司 | 化学机械抛光设备及其研磨液输送方法 |
CN103286693A (zh) * | 2013-05-31 | 2013-09-11 | 上海集成电路研发中心有限公司 | 研磨液分配臂 |
CN104827404A (zh) * | 2015-04-29 | 2015-08-12 | 上海华力微电子有限公司 | 一种化学机械研磨设备 |
CN106607765A (zh) * | 2017-01-19 | 2017-05-03 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 一种紧凑型可调节的抛光液输送臂及其工作工程 |
CN112677033A (zh) * | 2020-12-03 | 2021-04-20 | 上海新昇半导体科技有限公司 | 一种抛光头、化学机械抛光装置和方法 |
-
2006
- 2006-08-07 CN CNB2006100297757A patent/CN100551621C/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101920476B (zh) * | 2009-06-11 | 2011-12-14 | 上海华虹Nec电子有限公司 | 化学机械抛光设备及其研磨液输送方法 |
CN103286693A (zh) * | 2013-05-31 | 2013-09-11 | 上海集成电路研发中心有限公司 | 研磨液分配臂 |
CN104827404A (zh) * | 2015-04-29 | 2015-08-12 | 上海华力微电子有限公司 | 一种化学机械研磨设备 |
CN106607765A (zh) * | 2017-01-19 | 2017-05-03 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 一种紧凑型可调节的抛光液输送臂及其工作工程 |
CN112677033A (zh) * | 2020-12-03 | 2021-04-20 | 上海新昇半导体科技有限公司 | 一种抛光头、化学机械抛光装置和方法 |
CN112677033B (zh) * | 2020-12-03 | 2021-12-17 | 上海新昇半导体科技有限公司 | 一种抛光头、化学机械抛光装置和方法 |
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Publication number | Publication date |
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CN100551621C (zh) | 2009-10-21 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20091021 Termination date: 20180807 |