CN101101842A - Plasma display plate barrier large area imprinting moulding method - Google Patents
Plasma display plate barrier large area imprinting moulding method Download PDFInfo
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- CN101101842A CN101101842A CNA2007100181844A CN200710018184A CN101101842A CN 101101842 A CN101101842 A CN 101101842A CN A2007100181844 A CNA2007100181844 A CN A2007100181844A CN 200710018184 A CN200710018184 A CN 200710018184A CN 101101842 A CN101101842 A CN 101101842A
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Abstract
The invention is concerned with a kind of large surface press and molding method of plasm display flat barrier. This method uses rolling mould and matching UV Stereolithography technology to get large surface flat barrier on the base plate back of PDP display and the material of barrier is low dilatability glass. Spread luminescent material on the prepared flat barrier and baking with high temperature and get the display tiny cavity of flat plate. It takes places of the existing technology, such as pasting, exposal, development, spouting of sand and peel of solid photoresist and dose not need pasting machine, exposal machine, developing machine, machine of spouting to sand and glue peeling machine. It can produce display tiny cavity of large surface field launch flat with Carbon nanotubes launch pole.
Description
Technical field
The invention belongs to microelectronics, micromechanics manufacturing technology field, be specifically related to a kind of energy large area imprinting moulding plasma scope (PDP) plate barrier---the manufacture method of three-dimensional microcavity volume array structure, the plasma scope barrier of this method preparation can directly be coated with the shop fluorescent material, carry out high-temperature roasting again, finish the microcavity system of PDP display and make.This method is with existing manufacturing process, as: solid-state photoresist film mount (is called for short and pastes dry film, be used for photoetching barrier structure figure), exposure, development, sandblast, stripping glue (cleaning cull) etc., be reduced to one technology of imprinting moulding, with one the cover Embosser replace original 5 the cover relevant devices (as, laminator, exposure machine, developing machine, sand-blasting machine, stripping glue cleaning machine).Simultaneously, also to be suitable for the carbon nano-tube be the manufacturing of the demonstration microcavity body that shows of the large tracts of land field emission plane of emitter to this method.
Background technology
Along with the development of large-area flat-plate display, the PDP display has the flat-panel monitor of development prospect as a class, and the paces of development are accelerated.In the manufacture craft flow process of PDP flat-panel monitor, the manufacture craft of barrier is one of four big key technologies of PDP flat-panel monitor manufacturing, has greatly influenced the performance and the cost of PDP display device.The method of traditional fabrication PDP barrier has two classes: thick film screen printing method and sand-blast.Thick film screen printing method cost is low, simple and feasible, but being limited to, it makes the wide rough figure of hundreds of microns, be difficult to make wide tens microns fine pattern, homogeneity is poor, when the stripping pattern size is big, easily produces bending and torsional deformation, and be not suitable for high definition and special shape barrier (as waffle and meander type barrier) manufacturing; Sand-blast can be produced the very little barrier structure of discretization error, can guarantee pattern precision, but most of glass paste is cut (about about 70%) in manufacturing process, contain a large amount of lead oxide in its discarded object, easily contaminated environment is necessary through certain processing, and, too much employing photoetching technique during the PDP barrier is made, operation is many, and cost is very high.At present PDP barrier manufacture craft, each research and development company is just in the barrier manufacture method of Development of New Generation, as introducing micro-fabrication technology such as lift-off method.
In traditional micro-fabrication technology, for the making of micron order (promptly less than 100 μ m) characteristic size device, manufacture craft (being cloth glue, exposure, development, cleaning, chemical/physical etching etc.) in the integrated circuit (IC) etching of main at present employing routine.Its making characteristics are limited as and make area limited (maximum tens inches), depth-to-width ratio is less and need continuous multiple tracks technology to cooperate finishes.Making for small size (inch level), high-aspect-ratio dimensional structure device, LIGA technology is to be expected most at present and most widely used technology, be characterized in forming the Zhi Bi exposure area of the big degree of depth by the exposure of the degree of depth on SU8 type photoresist (adopting the X ray exposure), by manufacture crafts such as development, electroforming, produce the components and parts of the big depth-to-width ratio of micron order (can reach more than 20: 1) again.If in conjunction with lift-off technology, also can realize the making of the device (as cantilever beam structure) that the bottom is unsettled.Above-mentioned two its common characteristic of class technology be need expensive exposure electron gun, special photoresist material, accurate etching (wet method, dry method) control, fabrication cycle is long, cost is higher, does not also possess the ability of making large tracts of land (more than the meter level) fine structure.
The micro-embossing photoetching process is a kind of advanced technologies technology for micro/nano level pattern structure or structure manufacture that proposes in recent years.According to disclosed document in the world, the pattern replication capacity minimum of micro-embossing can reach 6nm, and technology is simple, and cost is extremely cheap, therefore is subjected to the attention of industrial quarters.It is generally acknowledged: the micro-embossing photoetching is as a kind of high efficiency, micro-nano structure manufacturing technology cheaply, replenishing or partly substituting of optical projection lithography technology of future generation might be in some commercial Application, become, the cost that various micro-nano devices are made can be reduced greatly.But all adopt flat mould in the disclosed imprint process, carry out the subregion impression, area is limited, and efficient is lower, and does not have precedent or patent record that large tracts of land (more than the meter level) three-dimensional microstructures impression is attempted.
To sum up, the PDP display has caused the concern of each major company as the large-area flat-plate display that a class has development potentiality, but barrier manufacture craft as one of its key technology, at present more employing the correlation technique in the photoetching, but exist cost too high, and be difficult to realize the homogenization manufacturing of large tracts of land (meter level and more than), limited further developing of PDP display greatly.How to reduce the cost that barrier is made, improve the fineness and the large-area homogeneity of barrier, become the hot issue of correlative study unit.
Summary of the invention
Defective or deficiency at above-mentioned prior art existence, in order to reduce the cost that the PDP display plate barrier is made, and realize that the homogenization of large tracts of land (more than the meter level), the barrier of meticulous (size 0.05mm is following) make, the objective of the invention is to, provide a kind of large area imprinting moulding method of plasma display plate barrier, the PDP display barrier structure that this method can be made large tracts of land, be become more meticulous.
In order to realize above-mentioned task, the present invention takes following technical solution:
A kind of large area imprinting moulding method of plasma display plate barrier, this method adopt the technology of ultra-violet curing roll-in seal replica, realize the replica of large tracts of land barrier structure, and concrete technical process comprises the following steps:
1) have the preparation of the rolling die of PDP display barrier shape micro-structural:
Rolling die is a drum-type structure, the diamond like carbon transition zone that mould metal level and nanometer grade thickness are arranged on the cylinder successively, be formed with PDP display plate barrier shape three-dimensional microstructures on the diamond like carbon transition zone, the plate barrier three-dimensional microstructures cross section of this PDP display is of a size of: barrier height 100 μ m～150 μ m, width is 40 μ m～70 μ m, pitch is 200 μ m～300 μ m, or the desired meticulousr little feature structure of PDP display plate barrier; To adapt to the current market demand to the PDP panel size.
Ultrafast laser Carving Machining or wet etching processing are adopted in the processing of rolling die, align requirement for ease of the location in the roll-in replidcation process, and the rolling die surface is manufactured with first alignment marker;
2) preparation of PDP display metacoxal plate:
PDP display metacoxal plate is selected glass substrate, at first makes site selection electrodes, evenly plates white dielectric layer on site selection electrodes, and planarizing process is carried out on the dielectric layer surface; Make second alignment marker on smooth dielectric layer surface, first alignment marker on this second alignment marker and the rolling die constitutes the Mk system that the roll-in of PDP display plate barrier is made together, is used for next step the plate barrier structure produced and the accurate location between the site selection electrodes;
3) align position fixing process: the PDP display metacoxal plate that will contain alignment marker places vacuum adsorbed the fixing of going forward side by side on the roll-in workbench, adopt the mode of ccd image collection that the alignment marker of both sides on the metacoxal plate is carried out vision measurement, obtain the location parameter of metacoxal plate, little driving by the roll-in platform, carry out position correction, make the rolling die axis parallel with the line of the alignment marker of metacoxal plate; By the vision collecting of the alignment marker on the roll-in workbench, and with metacoxal plate on the image of mark compare, adjust the corner and the horizontal level of mould, initial replica position is set; To positive justification, can realize the accurate location of barrier roll-in replica by above-mentioned.
4) roll-in replidcation process: adopt curtain type (curtain coating) to be coated with the shop mode, intensity and door curtain made of cloth thickness by the control negative-pressure adsorption, accurately control the flow of barrier size, and in conjunction with control mould velocity of rotation, realize barrier material on rolling die evenly, controllable film thickness be coated with the shop, and, wipe the barrier size on the rolling die projection off by flexible scraper, only stay the barrier size in the rolling die groove; Barrier size is coated with in the process of shop, start the roller compaction roller compaction system, rolling die carries out horizontal movement with curtain type shop colloid system when rotating, control guarantees that the linear velocity of rolling die rotation is consistent with horizontal movement speed, avoids the slide relative between mould and the metacoxal plate; The contact position of rolling die and metacoxal plate, barrier size be through ultraviolet irradiation, and photosensitive partly solidified in the barrier size attached on the metacoxal plate, realized the pattern transfer together with barrier material, and promptly the barrier micro-structural replica on the rolling die is on metacoxal plate.
5) reprocessing of barrier structure: to above-mentioned after the plate barrier structure that the roll-in replica goes out is carried out ultra-violet curing, make the barrier material full solidification; The barrier structure of making do not stay film owing to should not exist, so can directly enter next link that the PDP display is made against impression roll-in replica.
The PDP display barrier structure of method preparation of the present invention has the advantage of become more meticulous (by microstructure size decision on the mould), large tracts of land (stroke of roll-in and the length of mould), low-cost (replacing original 5 cover relevant devices with a cover Embosser: laminator, exposure machine, developing machine, sand-blasting machine, stripping glue cleaning machine), production efficiency height (technological process is simple), be suitable for the current barrier of PDP and make demand, be easy to expand to more become more meticulous, more large-area PDP barrier structure (only need producing more, the rolling die of fine microstructure gets final product).
Description of drawings
Fig. 1～Fig. 5 is the roll-in manufacture craft flow chart of PDP barrier.Wherein:
Fig. 1 is the structure chart of rolling die, can adopt ultrafast laser on metal, directly to process the predetermined PDP display plate barrier structure and the first alignment marker structure, again in micro-structure surface deposit layer of even low-surface-energy material (as the charcoal atom), to reduce the surface energy of rolling die, avoid in the roll-in process mould to the adhesion of the material of barrier.
Fig. 2 makes preceding metacoxal plate preparation for the PDP barrier.At first choose the glass substrate of evenly smooth and the requirement of size conforms large area display; Deposit site selection electrodes thereon again, the distribution of site selection electrodes meets the requirements; Deposit one deck white dielectric layer, and the dielectric layer surface carried out planarizing process; Make second alignment marker at smooth dielectric layer laminar surface.
Fig. 3 a is that the alignment system before the roll-in makes up, and guarantees that the replica position of PDP barrier matches with the position of site selection electrodes; Fig. 3 b represents to lay respectively at the setting of first, second alignment marker on mould and the metacoxal plate.
Fig. 4 is the roll-in system schematic.Metacoxal plate aligns detection after vacuum suction is fixing, and by the fine setting workbench, realizes positive justification; Mold system (comprise mould, drip glue groove, scraper, ultra-violet curing device) presses down then, applies suitable roller pressure, begins to enter the roll-in replica
Fig. 5 is the roll-in replidcation process.Curtain type shop colloid system and scraper make and be full of the PDP barrier material in the rolling die groove, rolling die with the material in the groove through certain roller pressure replica to metacoxal plate, and solidify to form the plate barrier structure of PDP display.
Label among the figure is represented respectively: 1, the mould metal level, 2, bossing on the rolling die (the pitch part in the barrier structure), 3, the diamond like carbon transition zone, 4, make the glass substrate of PDP rear board, 5, site selection electrodes, 6, the white dielectric layer, 7, second alignment marker on the dielectric layer, 8, semi-transparent semi-reflecting lens, 9, the CCD camera, 10, total reflective mirror, 11, first alignment marker on the rolling die, 12, the ultraviolet light path, 13, curtain type shop adhesive dispenser, 14, the barrier material of PDP display, 15, flexible scraper, 16, the roll-in workbench, 17, vacuum air-channel, 18, vacuum orifice, 19, the mould rotation direction, 20, the die horizontal direction of motion.
Below in conjunction with the drawings and specific embodiments method of the present invention is described in further detail.
Embodiment
The large tracts of land of method preparation of the present invention, the PDP barrier structure that becomes more meticulous belong to the new method that the PDP barrier is made, and replace 5 of former technological process with a cover Embosser and overlap relevant devices, can enhance productivity greatly; Because the improvement of rolling die manufacture method as long as produce meticulousr mould, is adopted method of the present invention, just can be made into more meticulous large tracts of land barrier structure.
Its basic functional principle is: rotate the roll-in mode continuously and apply certain pressure by rolling die, the glued coating method that closes flexible scraper in curtain type shop makes and is full of the PDP barrier material in the groove of rolling die, transfer on the metacoxal plate by the PDP barrier material in the rolling die roll extrusion rotary die groove, and ultra-violet curing is shaped.Its characteristics are: the micro-structural shape can be three-dimensional structure, and transfer efficiency and precision height, feature structure range scale are wide, with low cost.
The main technique key element of the PDP display barrier structure that roll-in replica large tracts of land is meticulous comprises: the process that aligns, PDP barrier material that surface preparation has a rolling die and metacoxal plate before the rolling die, roll-in replica of the barrier structure that becomes more meticulous is coated with the coupling of the speed of roller pressure in shop, the roll-in process and mould velocity of rotation and horizontal movement, the ultra-violet curing performance of barrier material to the filling of mould groove.Wherein, the setting that is coated with roller pressure in shop and the roll-in process of barrier size and the coupling of speed are the critical process key elements of PDP barrier roll-in replica.The setting that is coated with shop thickness and roller pressure of barrier material is relevant with the barrier height of want replica, must guarantee that enough materials are full of barrier micro-structural on the mould and transfer on the metacoxal plate; Rolling die rotates the sidewall pattern that speeds match with horizontal movement directly influences barrier structure after the replica in the roll-in process.
The alignment system of mould of the present invention and metacoxal plate (shown in Fig. 3 a) is very big to the roll-in replica quality influence of PDP display barrier.Owing to prepared on the roll-in replica front-back baseboard site selection electrodes is arranged, so, must be that positioning reference prepares the PDP barrier with the position of site selection electrodes.This location comprises three parts: the first, the first alignment marker axis of rolling die should parallel with the line of centres of the second positive mark on the metacoxal plate, promptly the axis of rolling die must with metacoxal plate on the preparation site selection electrodes place straight line parallel; The second, rolling die must rotate to the precalculated position earlier before the roll-in replica, meets the requirements with the barrier structure that guarantees the beginning replica; The 3rd, before the roll-in replica, mould wants horizontal movement to the precalculated position, begins the replica barrier structure to guarantee the precalculated position on metacoxal plate.This three steps locating accuracy guarantees all that in 1um the method that generally can adopt optics to align realizes.
The become more meticulous hot-rolling of PDP display barrier structure of large tracts of land of the present invention presses replica to comprise the combination of following technical factor: preparation technology's (accompanying drawing 2), mould and the metacoxal plate of the manufacture craft of rolling die (accompanying drawing 1), metacoxal plate align technology (accompanying drawing 3a, 3b), roll-in replica technology (accompanying drawing 4, Fig. 5).Compare with other PDP barrier manufacturing process, the present invention presses replica technology to be more suitable for making the barrier structure that more becomes more meticulous about the hot-rolling of PDP display barrier structure and (depends primarily on the accessible minimum dimension of micro-structural on the rolling die, can reach micron at present to submicron order), and adopt the revolving-rolling mode, can realize the barrier making of large tracts of land (can reach more than the meter level), greater advantage all be arranged at aspects such as make efficiency and costs.
Common barrier cellular construction has magnificent husband (Waffle) structure of traditional strip barrier, Pioneer Electronic Corp., the Del TA structure of Hitachi, Ltd of Fujitsu, the not wide cellular construction of PANASONIC etc. at present.With at present just in 42 inches plates of volume production the barrier height be 100 μ m～150 μ m, width is 40 μ m～70 μ m, pitch is that the PDP barrier structure about 200 μ m～300 μ m is an example, its hot-rolling presses replica manufacture craft to comprise following several stages:
(1) have the preparation of the rolling die of PDP barrier shape micro-structural:
Rolling die is a drum-type structure, comprise mould metal level 1, bossing 2 on the rolling die (the pitch part in the barrier structure), diamond like carbon transition zone 3, on rolling die, form micro-structural with the barrier shape that requires (as strip barrier, Waffle structure, Del TA structure, wide cellular construction etc. not), live width is 40 μ m, and the degree of depth is 100 μ m.The processing mode of rolling die can adopt ultrafast laser processing or wet etching processing; The optional common stainless steel material of rolling die material (as OCr19Ni9); Align requirement for ease of the location in the roll-in replidcation process, on rolling die, produce corresponding first alignment marker; Form after the microstructure features, surface (having contained micron order three-dimensional structure cavity) after with commercially available coating machine the charcoal atomic deposition being developed to electric lithography glue, forming thickness is nano level diamond like carbon transition layer film, to strengthen the rolling die case hardness, improve the demoulding ability of rolling die in the roll-in process, as shown in Figure 1.
(2) preparation of PDP display metacoxal plate: as shown in Figure 2, PDP display metacoxal plate comprises glass substrate 4, and site selection electrodes 5 is arranged on the glass substrate 4, and site selection electrodes 5 is carried out by white dielectric layer 6 bags, and second alignment marker 7 is arranged on white dielectric layer 6.
(3) align position fixing process (Fig. 3 a, 3b, Fig. 4): the PDP metacoxal plate that will contain second alignment marker 7 places roll-in workbench 16 enterprising vacuum adsorbed fixing, vacuum air-channel 17 is arranged, vacuum orifice 18 on the roll-in workbench 16; The ccd image acquisition system that adopts CCD camera 9, semi-transparent semi-reflecting lens 8, total reflective mirror 10 to form is carried out vision measurement to second alignment marker 7 of both sides on the metacoxal plate and first alignment marker 11 on the rolling die, obtain both location parameters, little driving by the roll-in platform, carry out position correction, make the rolling die axis parallel with the line of metacoxal plate two alignment marker; By vision collecting to alignment marker on the rolling die, and with metacoxal plate on the image of mark compare, adjust the corner and the horizontal level of mould, initial replica position is set; Whole by above-mentioned three steps, the accurate location that can realize barrier roll-in replica.
(4) roll-in replidcation process: as Fig. 4, Fig. 5, align finish after, mould part (barrier size 14, scraper 15, the ultraviolet light path 12 that comprise rolling die 1, curtain type apparatus for coating 13, PDP display) presses down, rolling die 1 is contacted with the white dielectric layer 6 of metacoxal plate, and apply certain roller pressure, start curtain type shop adhesive dispenser 13, beginning roll-in replidcation process.Rolling die 1 carries out the motion of horizontal direction when rotating, control guarantees that the linear velocity of mould rotation is consistent with horizontal movement speed, avoids the slide relative between mould and the metacoxal plate; The contact position of the white dielectric layer 6 of rolling die 1 and metacoxal plate, the barrier size of staying white dielectric layer 6 is through UV-irradiation, light-sensitive material in the barrier size is cured, together with barrier material, on the white dielectric layer 6 attached to metacoxal plate, realized the pattern transfer, promptly the barrier micro-structural replica on the rolling die 1 is on metacoxal plate.
The barrier size 14 of PDP display can adopt low-expansion glass, adds an amount of light-sensitive material therein and makes.
(5) after replica is finished, barrier structure is carried out the back solidify, make its full solidification, form the plate barrier structure of PDP display.
Claims (2)
1, a kind of large area imprinting moulding method of plasma display plate barrier, it is characterized in that, this method adopts the rolling die of PDP display barrier shape micro-structural and the roll-in seal replica technology of ultra-violet curing impression replica combination, on PDP display metacoxal plate, realize the replica of large-area flat-plate barrier structure, specifically comprise the following steps:
Step 1 has the preparation of the rolling die of PDP display barrier structure:
Rolling die is a drum-type structure, the diamond like carbon transition zone that mould metal level and nanometer grade thickness are arranged on the cylinder successively, be formed with PDP display plate barrier shape three-dimensional microstructures on the diamond like carbon transition zone, the plate barrier three-dimensional microstructures cross section of this PDP display is of a size of: barrier height 100 μ m～150 μ m, width is 40 μ m～70 μ m, pitch is 200 μ m～300 μ m, or the PDP display plate hinders desired little feature structure;
Laser engraving processing or wet etching processing are adopted in the processing of rolling die, and the rolling die surface is manufactured with first alignment marker;
Step 2, the preparation of PDP display metacoxal plate:
PDP display metacoxal plate is selected the high float glass of bending, and at first makes site selection electrodes with print process, evenly plates white dielectric layer on site selection electrodes, and planarizing process is carried out on the dielectric layer surface; Make second alignment marker on smooth dielectric layer surface, first alignment marker on this second alignment marker and the rolling die constitutes the Mk system that the roll-in of PDP display plate barrier is made together, is used for next step the plate barrier structure produced and the accurate location between the site selection electrodes;
Step 3, roll-in are made the location that aligns of PDP barrier structure:
The PDP display metacoxal plate that will contain second alignment marker places vacuum adsorbed the fixing of going forward side by side on the roll-in platform, the mode that adopts ccd image to gather, the relative position parameter of acquisition metacoxal plate and mould;
By little driving of roll-in workbench, carry out position correction, make the rolling die axis parallel with site selection electrodes place straight line on the metacoxal plate;
By vision collecting, and compare, adjust the corner and the horizontal level of rolling die, initial replica position is set with the image of second alignment marker on the metacoxal plate to first alignment marker on the rolling die;
Step 4, align finish after, beginning roll-in replica, shop glue, roll-in, ultra-violet curing replidcation process that the PDP display plate barrier is made in roll-in are as follows:
Rolling die is applied suitable pressure, adopt curtain type shop glue, and,, wipe the slurry on the rolling die projection off, only stay the barrier size in the rolling die groove by flexible scraper in conjunction with flexible scraper; Adopt contrary impression replica technique to shift pattern;
Rolling die carries out horizontal movement when rotating, the linear velocity that the control rolling die rotates is consistent with horizontal movement speed, avoids the slide relative between rolling die and the metacoxal plate;
The contact position of the white dielectric layer of rolling die and metacoxal plate, the barrier size of staying white dielectric layer is through UV-irradiation, photosensitive partly solidified in the barrier size, together with barrier material attached on the metacoxal plate, the realization pattern shifts, and soon the barrier micro-structural replica on the rolling die is on metacoxal plate;
Step 5, the reprocessing of barrier structure:
To after the plate barrier structure that the roll-in replica goes out is carried out, solidifying on the metacoxal plate, make the barrier structure full solidification, form the plate barrier structure of PDP display.
2. the method for claim 1 is characterized in that, described rolling die is that metal material is made.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100181844A CN100561638C (en) | 2007-07-03 | 2007-07-03 | The large area imprinting moulding method of plasma display plate barrier |
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| CNB2007100181844A CN100561638C (en) | 2007-07-03 | 2007-07-03 | The large area imprinting moulding method of plasma display plate barrier |
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| CN100561638C CN100561638C (en) | 2009-11-18 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102139856A (en) * | 2010-02-01 | 2011-08-03 | 鸿富锦精密工业（深圳）有限公司 | Roller jig |
| CN102169289A (en) * | 2011-05-17 | 2011-08-31 | 西安交通大学 | Reverse-roll imprint-moulding method of over-long grating ruler for machine tool |
| CN103274609A (en) * | 2013-05-07 | 2013-09-04 | 苏州威仕科贸有限公司 | Production method of filmed glass |
| CN104391614A (en) * | 2013-12-02 | 2015-03-04 | 深圳市联合瑞泰科技有限公司 | Method for producing touch screen sensor in gravure micro transfer printing way |
| CN105068324A (en) * | 2015-08-28 | 2015-11-18 | 武汉华星光电技术有限公司 | Liquid crystal display panel manufacturing method and rubber frame solidification membrane masking panel and manufacturing method thereof |
| CN111403112A (en) * | 2020-03-26 | 2020-07-10 | 青岛科技大学 | Preparation method for forming conductive or functional structure on surface of high polymer film/plate |
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2007
- 2007-07-03 CN CNB2007100181844A patent/CN100561638C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102139856A (en) * | 2010-02-01 | 2011-08-03 | 鸿富锦精密工业（深圳）有限公司 | Roller jig |
| CN102169289A (en) * | 2011-05-17 | 2011-08-31 | 西安交通大学 | Reverse-roll imprint-moulding method of over-long grating ruler for machine tool |
| CN102169289B (en) * | 2011-05-17 | 2012-07-04 | 西安交通大学 | Reverse-roll imprint-moulding method of over-long grating ruler for machine tool |
| CN103274609A (en) * | 2013-05-07 | 2013-09-04 | 苏州威仕科贸有限公司 | Production method of filmed glass |
| CN104391614A (en) * | 2013-12-02 | 2015-03-04 | 深圳市联合瑞泰科技有限公司 | Method for producing touch screen sensor in gravure micro transfer printing way |
| CN104391614B (en) * | 2013-12-02 | 2017-09-22 | 深圳市联合瑞泰科技有限公司 | Intaglio plate micro-shifting prints the method for making touch panel sensor |
| CN105068324A (en) * | 2015-08-28 | 2015-11-18 | 武汉华星光电技术有限公司 | Liquid crystal display panel manufacturing method and rubber frame solidification membrane masking panel and manufacturing method thereof |
| CN105068324B (en) * | 2015-08-28 | 2019-02-22 | 武汉华星光电技术有限公司 | The manufacturing method and glue frame of liquid crystal display panel solidify the manufacturing method of mask plate |
| CN111403112A (en) * | 2020-03-26 | 2020-07-10 | 青岛科技大学 | Preparation method for forming conductive or functional structure on surface of high polymer film/plate |
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|---|---|
| CN100561638C (en) | 2009-11-18 |
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