CN101086614A - Micrometer-class three-dimensional rolling die and its production method - Google Patents
Micrometer-class three-dimensional rolling die and its production method Download PDFInfo
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- CN101086614A CN101086614A CN 200710018185 CN200710018185A CN101086614A CN 101086614 A CN101086614 A CN 101086614A CN 200710018185 CN200710018185 CN 200710018185 CN 200710018185 A CN200710018185 A CN 200710018185A CN 101086614 A CN101086614 A CN 101086614A
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Abstract
The rolling mold metal roller structure with the inner radius and the outside radius embedded with electric resistance heater, outside radius of the roller formed into micrometer or submillimeter three dimensional rolling figure with the cross section dimension combination as follows: min width of the cross section: L<50 mu m, depth: 0<H<500 mu m, oblique angle: 90 DEG< alpha <120 DEG, with the rolling figure coated by a thin film. Through adjusting the laser output energy and mechanical shutter action, it directly sinters millimeter and submiliter three dimensional figures on the metal mold, using the plating film machine depositing the carbon atom to millimeter or submilimeter to form the analog diamond transitional thin film in nanometer level.
Description
Technical field
The invention belongs to fine manufacturing technology field, be particularly related to three-dimensional rolling die structure of a kind of large tracts of land micrometer-class and preparation method thereof, this micron order three-dimensional rolling die is mainly used in the electrode, the three-dimensional flow passage structure of large tracts of land micro-fluidic device (as fuel cell yin, yang pole plate), array microelectronic mechanical sensor of the three-dimensional barrier structure of large area plasma flat-panel monitor, various flat-panel display device upper and lower base plates the hot padding of three-dimensional structure in three-dimensional structure, the array micro-actuator spare etc. and makes.
Background technology
In traditional micro-fabrication technology, for the making of micron order (promptly less than 100 μ m) characteristic dimension device, manufacture craft (being cloth glue+exposure+development+cleaning+chemical/physical etching etc.) in the integrated circuit (IC) etching of main at present employing routine.Its making characteristics are limited as and make area limited (maximum tens inches), depth-to-width ratio is less and need continuous multiple tracks technology to cooperate finishes.Making for small size (inch level), high-aspect-ratio dimensional structure device, LIGA technology is to be expected most at present and most widely used technology, be characterized in forming the Zhi Bi exposure area of the big degree of depth by the exposure of the degree of depth on SU8 type photoresist (adopting the X ray exposure), by manufacture crafts such as development, electroforming, produce the components and parts of the big depth-to-width ratio of micron order (can reach more than 20: 1) again.If in conjunction with lift-off technology, also can realize the making of the device (as cantilever beam structure) that the bottom is unsettled.Above-mentioned two its common characteristic of class technology be need expensive exposure electron gun, special photoresist material, accurate etching (wet method, dry method) control, fabrication cycle is long, cost is higher, does not also possess the ability of making large tracts of land (length reaches more than the meter level) microtexture.
Development along with large area plasma flat-panel monitor, various flat-panel display device, large tracts of land micro-fluidic device, array microelectronic mechanical sensor, array micro-actuator spare etc., its inner structural features not only requires more and more littler (little of micron order) on yardstick, and the coherence request that its feature structure is made in the large tracts of land scope is also more and more higher.Above-mentioned common process is not strong to the adaptability of these requirements, especially to large tracts of land micron order Three Dimensions Structure, except that the cost problem, has difficulty greatly on technology realizes yet.
The imprint process of Chu Xianing in recent years, the I of the characteristic dimension of its impression replica reaches 6nm.But all adopt flat mould in the disclosed imprint process, carry out the subregion impression, area is limited, and efficient is lower, and does not have precedent or patent record that large tracts of land (more than the meter level) three-dimensional microstructures impression is attempted.
In a word, what little manufacturing was adopted usually is ic manufacturing process (deep-submicron feature, about 1: 1 of depth-to-width ratio), LIGA or accurate LIGA (micron order above feature, depth-to-width ratio 20: the 1 or more) technology of microelectron-mechanical in making, mainly be that the characteristic dimension according to the making device decides.Its common feature be the micro element of made (be the bottom surface, end face, sidewall etc. of feature structure are straight plane) simple in structure, area little, have clear and definite restriction (as exposing material, base material) and manufacturing process to cooperate to the material category of being made by multiple tracks technology.For present large tracts of land and the requirement on devices that comprises complicate three dimension microstructure (for example, large area plasma flat-panel monitor, various flat-panel display device, large tracts of land micro-fluidic device, array microelectronic mechanical sensor, array micro-actuator spare etc.), still there are difficulties such as cost of manufacture height, complex process in existing technology.
Summary of the invention
Because the photoetching process of existing lithographic method, material cutting process and said integrated circuit etc. can't directly generate micron-sized graphic structure at cylindrical surface, more can not form the graph outline of three-dimensional microstructure.The objective of the invention is to, three-dimensional rolling die of a kind of micron order microstructure and preparation method thereof is provided, this method can solve present large tracts of land and comprise the complicate three dimension microstructure device (as the large area plasma flat-panel monitor, various flat-panel display devices, the large tracts of land micro-fluidic device, the array microelectronic mechanical sensor, array micro-actuator spare etc.) making difficult point, adopt the three-dimensional rolling die of micrometer-class structure of the present invention, realize the roll-in replica of large-area three-dimensional micro structural component in the mode of continuous rotation roll-in, manufacture efficient thereby increase substantially.
In order to realize above-mentioned task, the present invention takes following technical solution:
A kind of three-dimensional rolling die of micrometer-class, rolling die is a roller frame, be inlaid with resistance type heater between the internal diameter of cylinder and the external diameter, it is characterized in that, be formed with the roll-in figure of micron order on the external diameter surface of above-mentioned cylinder to the submillimeter level three-dimensional structure, diamond like carbon transition thin layer is arranged on the roll-in figure, the size combinations of the structural section of this roll-in figure three-dimensional feature is: cross section minimum widith: L＜50 μ m, the degree of depth: 0＜H＜500 μ m, angle of inclination: 90 °＜α＜120 °, the roll-in figure is covered by one deck diamond like carbon transition film.
The method for making of above-mentioned micron order three-dimensional feature rolling die is characterized in that, comprises the following steps:
At first build the Mold Making platform, the Mold Making platform comprises:
A direction motion platform, this motion platform can realize that the rectilinear direction translation reaches the rotation around rectilinear direction, and this motion platform is controlled by computing machine;
Described motion platform is provided with guide rail and leading screw and drives guide rail and carries out straight-line slide block, be equipped with web joint on the slide block, the web joint two ends have motor to support and bearings respectively, motor has electric rotating machine on supporting, and electric rotating machine and bearings one are used from installs drum die to be processed;
Dispose the laser instrument fixed support on the next door of motion platform, the laser instrument fixed support is provided with laser instrument, this laser instrument is also controlled by computing machine, be equipped with the laser instrument focusing system on the light path of laser instrument, mechanical shutter, vacuum deslagging conduit and gas protection tube road are arranged respectively from the laser beam both sides that the laser instrument focusing system comes out;
Drum die is mounted on electric rotating machine and the bearings, regulates the focalizer of laser instrument, make that the hot spot that focuses on drum die surface to be processed is the micron order size, after laser output power is stable, begin to process;
Laser instrument sends enters the laser instrument focusing system; Under the blanket gas that the laser beam of coming out from the laser instrument focusing system feeds in the gas shield pipeline by mechanical shutter, directly sintering forms microstructure graph on the surface of drum die; This microstructure graph is the three-dimensional structure of micrometer-class size, the residue that the laser beam sintering process forms, take away by vacuum deslagging conduit, by the output power of real time computer control laser instrument and the movement velocity of Mold Making platform, control laser is to the working depth of drum die, to realize the processing of die surface arbitrary characteristics curve shape;
To not needing the processed mould surface, close mechanical shutter, this moment, laser beam was for out-of-focus appearance, can not cause damage to drum die material to be processed, after machined surface to be scheduled to moves to Working position, mechanical shutter is opened, proceed Laser Processing, generate the laser sintered area of space on three-dimension curved surface border until sintering on the drum die external diameter surface, laser sintered area of space finally forms the roll-in figure of micron order to the submillimeter level three-dimensional structure, and the size combinations of the structural section of this roll-in figure three-dimensional feature is: cross section minimum widith: L＜50 μ m, the degree of depth: 0＜H＜500 μ m, angle of inclination: 90 °＜α＜120 °;
At last with coating machine with the roll-in patterned surface of charcoal atomic deposition to micron order to the submillimeter level three-dimensional structure, forming thickness is nano level diamond like carbon transition layer film, and between the interior external diameter of drum die embedded resistor formula well heater.
The three-dimensional rolling die of micrometer-class of the present invention relies on hot stamping technology, and its making yardstick to the micro element structure comprises micron order and submillimeter level, adopts the ultrafast laser of power controlled, and forming value on the direct metal roller is x, θ
xThe z of function of position is to exposure depth, evaporation diamond like carbon transition bed, the final metal rolling die that is shaped and has the micrometer-class three-dimensional structure.The cross section profile complexity of die surface microstructure can be set arbitrarily, and non-other common process can reach economically.
Among the present invention, after forming the three-dimensional feature structure on the metal die body, the diamond like carbon transition bed of die surface evaporation, extremely important to the physics and the chemical characteristic change of metal die micro-structure surface.This transition bed will be attached to the surface of metal die, give the skin hardness of mould with self lubricity, corrosion resistance, wearing quality and appropriateness.Self lubricity has the effect of release agent to the disengaging of rolling die in the production run and thermoplasticity or thermosetting machined material.The diamond like carbon transition bed is as the real surface in producing, and its corrosion resistance plays protective seam in the cleaning (acid ﹠ alkali liquid) of metal die; Wearing quality and surperficial high rigidity can reduce wearing and tearing, the distortion of micron order three-dimensional structure in the roll-in process, thereby improve the serviceable life of rolling die.
Description of drawings
Fig. 1 makes the structure synoptic diagram of platform for the micrometer-class three-dimensional rolling die;
Fig. 2 is the duty of gas shield and dreg removing system in the processing mold process;
When Fig. 3 (a) is processing mold, be the processing lines splicing synoptic diagram of realizing that predetermined processing live width adopts; The processing lines splicing synoptic diagram of Fig. 3 (b) for realizing that predetermined working depth adopts;
Fig. 4 is processing route and the corresponding machining feature synoptic diagram of Laser Processing on the rolling die surface;
Fig. 5 is the mould structure synoptic diagram after rolling die surface evaporation diamond like carbon transition bed is finished;
Fig. 6 carries out the technological process synoptic diagram of roll-in making large tracts of land microstructure features for mould degumming tech and rolling die.
Label among the figure is represented respectively: 1, laser instrument fixed support; 2, laser instrument; 3, laser power control fabrication; 4, computing machine; 5, master control fabrication; 6, mould motion platform control card; 7, x direction motion platform; 8, guide rail and leading screw; 9, motor; 10, drum die; 11, microstructure graph on the mould; 12, motor supports; 13, web joint; 14, slide block; 15, laser instrument focusing system; 16, laser beam; 17, bearings; 18, control card line; 19, gas shield pipeline; 20, vacuum deslagging conduit; 21, mechanical shutter; 22, blanket gas; 23, waste residue; 24, the microstructure that goes out of Laser Processing; 25, machine direction; 26, the processing pattern of depth of microstructure direction; 27, resistance type heater; 28, dies cavity; 29, diamond like carbon film; 30, thermosetting resistance erosion glue; 31, base material.
Below in conjunction with accompanying drawing method for making of the present invention is done further to describe in detail.
Embodiment
Referring to accompanying drawing.Fig. 1～Fig. 5 has represented the manufacture craft schematic flow sheet of micron order to submillimeter level three-dimensional structure rolling die respectively.
A kind of three-dimensional rolling die of micrometer-class, rolling die is a roller frame, be inlaid with resistance type heater 27 between the internal diameter of cylinder and the external diameter, be formed with the roll-in figure of micron order on the external diameter surface of cylinder to the submillimeter level three-dimensional structure, the size combinations of the structural section of this roll-in figure three-dimensional feature is: cross section minimum widith: L＜50 μ m, the degree of depth: 0＜H＜500 μ m, angle of inclination: 90 °＜α＜120 °, the roll-in figure is covered by one deck diamond like carbon transition film.
The three-dimensional rolling die of above-mentioned micrometer-class is made according to following steps:
(1) at first builds the Mold Making platform.This Mold Making platform comprises:
A motion platform 7, this motion platform 7 can realize that the x direction translational reaches the rotation θ around the x direction
x, motion platform 7 connects mould motion platform control card 6 by control card line 18, and mould motion platform control card 6 links to each other with master control fabrication 5 by control card line 18, and master control fabrication 5 is connected with computing machine 4 by control card line 18;
Guide rail and leading screw 8 are arranged on the described motion platform 7, on guide rail and the leading screw 8 slide block 14 is housed, be used to support the web joint 13 of translation and rotation, web joint 13 two ends of translation and rotation have motor support 12 and bearings 17 respectively, motor supports on 12 electric rotating machine 9, and electric rotating machine 9 and bearings 17 are used to install drum die 10 to be processed;
Dispose laser instrument fixed support 1 on the next door of motion platform 7, laser instrument fixed support 1 is provided with laser instrument 2, one end of laser instrument 2 links to each other with master control fabrication 5 by laser power control fabrication 3 and control card line 18 thereof, and master control fabrication 5 is connected with computer control system 4 by control card line 18; The other end of laser instrument 2 has laser instrument focusing system 15, from laser beam 16 both sides that laser instrument focusing system 15 comes out mechanical shutter 21, vacuum deslagging conduit 20 and gas protection tube road 19 is arranged respectively.
Laser instrument 2 sends enters laser instrument focusing system 15; The blanket gas that the laser beam 16 of coming out from laser instrument focusing system 15 feeds gas shield pipeline 19 in by mechanical shutter 21 22 times, direct on the surface of drum die to be processed 10 sintering formation microstructure graph; This microstructure graph is the three-dimensional structure of micrometer-class size, and the residue that laser beam 16 sintering processes form is taken away by vacuum deslagging conduit 20.
Laser instrument 2 adopts high-power ultrafast laser, and laser instrument focusing system and mould motion control platform make that by computer control the output power of laser instrument focusing system is controlled, and mould motion control platform can realize that mould x direction translational reaches the rotation θ around the x direction
x
(2) debugging of laser instrument 2.Regulate the focalizer of laser instrument 2, the feasible hot spot as far as possible little (micron order) that focuses on the drum die 10 is to realize small size, the smooth little processing in cross section.
(3) begin processing.After laser instrument 2 output powers are stable, begin to process.Control the output power of laser instrument 2 and the movement velocity of mould motion platform in real time by computing machine 4, can control the degree of depth of Laser Processing; By computing machine 4 translation of control mould motion platform in real time and the velocity of rotation of motor 9, can realize the feature pattern processing of the lip-deep arbitrary curve shape of drum die; To the drum die surface that need not process, can close mechanical shutter 21 (laser beam can not cause damage to the drum die material for out-of-focus appearance at this moment), after machined surface to be scheduled to moved to Working position, shutter was opened, and proceeds Laser Processing;
(4) in the process, because the hot spot of laser beam can be focused to 1 micron, when the processing live width is feature more than tens microns, the splicing that need process lines, this need calculate the width and the required number of scanning lines of each feature of splicing.When the different feature of die surface processing live width, need be to the real-time control of splicing width and number of scanning lines;
(5) certainly lead to the heat of increasing owing in the laser processing procedure at die surface, thus must carry out gas shield to mould, in order to avoid by airborne oxygen corrosion; For common high power laser, in process, must carry out deslagging and handle in order to avoid waste residue is deposited in little feature pattern of having processed by vacuum deslagging conduit 20, influence further Laser Processing;
(6) machine after, carry out the surface treatment of drum die 10.At first the washing barrel mould 10, remove the waste residue 23 that sticks to microstructure features pattern side wall and edge; Again coating film treatment is carried out on the drum die surface: with the surface of charcoal atomic deposition to the three-dimensional microstructures figure 11 with micrometer-class, forming thickness is nano level diamond like carbon transition layer film 29 with coating machine.The material of drum die should have good heat conductance, and resistance type heater 27 is equipped with, the heating in the time of can realizing roll-in process (being production run) in inside.
The size combinations of the structural section of the roll-in figure three-dimensional feature that said method is shaped is: the 90 °＜α of range of tilt angles in roll-in graphic structure cross section＜120 °, lateral dimension range L＜50 μ m, vertically depth range 0＜H＜500 μ m.
The three-dimensional rolling die basic functional principle of micrometer-class of the present invention is: by continuous rotation roll-in mode with apply certain pressure, and by the interior resistance type heater heating of rolling die, the thermosetting that support base material 31 (the so eurypalynous macromolecular material) surface of any thermoplasticity or heat cured machined material is arrived in the three-dimensional microstructures figure hot stamping of die surface by rolling die roll-in rotation hinders on the erosion glue 30.Its characteristics are: the microstructure shape of figure can be the three-dimensional feature structure, and hot stamping efficient and precision height, feature structure range scale are wide, with low cost.
Referring to accompanying drawing 2～4, adopt the controlled ultrafast laser of output power on the metal roller workpiece, to press x, θ
xIt is the key of micron order three-dimensional structure that the arbitrary function of position (as y=kx, k is a constant, as long as the mathematical analysis formula can be expressed) forms the working depth that changes.
Fig. 3 a, b have provided the synoptic diagram of the microstructure 24 that Laser Processing goes out; Laser beam is pressed machine direction 25 motions, can obtain the processing pattern 26 of depth of microstructure direction under the control of computing machine 4;
The size combinations of processing attainable three-dimensional microstructures is: the cross section minimum widith L of structure＜50 μ m, depth range 0＜H＜500 μ m, 90 °＜α of range of tilt angles＜120 °.Compare with the minute manufacturing technology of routine, the present invention can realize the little extremely structure formation of the large scale scope of micron, and the cross section profile of structure is the arbitrary shape of non-straight.
The diamond like carbon transition bed 29 of nanometer grade thickness of the present invention, extremely important to the physics and the chemical characteristic change of cylinder (metal) mould 10 micro-structure surfaces.Diamond like carbon transition bed 29 will be attached to the metal die surface, give the skin hardness of mould with self lubricity, corrosion resistance, wearing quality and appropriateness.Self lubricity has the effect of release agent to the disengaging of rolling die in the production run and thermoplasticity or thermosetting machined material.Diamond like carbon transition bed 29 is as the real surface in producing, and its corrosion resistance plays protective seam in the cleaning (acid ﹠ alkali liquid) of metal die; Wearing quality and surperficial high rigidity can reduce wearing and tearing, the distortion of deep submicron 3-D structure in the roll-in process, thereby improve the serviceable life of rolling die.
The sputtering technology of diamond like carbon transition bed (accompanying drawing 5), mould degumming tech and rolling die manufacture craft (accompanying drawing 6).
Method of the present invention is compared with other minute manufacturing technology, the micrometer-class three-dimensional rolling die of the present invention's preparation is more suitable for making the ability of micron order to the three-dimensional structure product of submillimeter level yardstick, and adopt rotation roll-in mode, greater advantage is all arranged at aspects such as make efficiency and costs.
With the example that is made as of certain metal (as stainless steel OCrl9Ni9) rolling die, specific implementation process is as follows:
(1) the Laser Processing motion platform builds.With commercially available stepping motor and driver (segmentation drives resolution can reach micron dimension), guide rail leading screw, 2 axis motion control cards, ultrafast laser and deflection focusing system (as the Cyber-Laser of Japan's product) etc., build micron order Laser Processing motion platform as Fig. 1;
(2) micron order three-dimensional laser sintering space drape forming.Adopt the controlled ultrafast laser of output power, set different output powers when laser beam spots scans the different surfaces position, obtain the different sintering degree of depth.The sintering depth H can be taken as desirable x, θ
xFunction H=f (x, the θ of position
x), thereby generate three-dimensional exposure area of space.The I of laser beam spot focuses on 1 μ m, and thus, machinable minimum feature can reach 1 sun on the mould, and the sintering degree of depth is determined by laser beam power, can reach 500 μ m; In laser sintered process, airborne oxygen adopts nitrogen protection to the corrosion in sintering zone when avoiding high temperature sintering, and residue is deposited in the sintering zone in the laser Fast Sintering process in order to avoid, and adopts 20 (as shown in Figure 2) of vacuum deslagging conduit; For improving the laser sintered degree of depth, laser beam spot is focused on minimum, can adopt the mode (as Fig. 3 a, shown in the b) of scanning area overlap joint to realize the predetermined working width and the degree of depth; For realizing continuous Laser Processing, adopt scan mode as Fig. 4;
(3) depositing diamond-like transition bed.With commercially available coating machine with the charcoal atomic deposition to the rolling die surface (the three-dimensional structure cavity that has contained the micron order yardstick), forming thickness is nano level diamond like carbon transition layer film 29, as shown in Figure 5;
(4) the micron order yardstick three-dimensional structure rolling die that adopts the present invention to make, utilize the resistance type heater of cylinder inside that stable the continuing of stainless steel mould heated, in the continuous rolling mode, the micron order three-dimensional structure hot stamping of die surface is arrived on the plane thermoplasticity or thermosets (as organic glass), realize the productivity processing of the micrometer-class three-dimensional structure on this class material, as shown in Figure 6.
Claims (3)
1. the three-dimensional rolling die of a micrometer-class, rolling die is the metal roller structure, be inlaid with resistance type heater between the internal diameter of cylinder and the external diameter, it is characterized in that, be formed with the roll-in figure of micron order on the external diameter surface of above-mentioned cylinder to the submillimeter level three-dimensional structure, the size combinations of the structural section of this roll-in figure three-dimensional feature is: cross section minimum widith: L＜50 μ m, the degree of depth: 0＜H＜500 μ m, angle of inclination: 90 °＜α＜120 °, the roll-in figure is covered by one deck diamond like carbon transition film.
2. the method for making of the three-dimensional rolling die of the described micrometer-class of claim 1 is characterized in that comprising the following steps:
At first build the Mold Making platform, the Mold Making platform comprises:
A direction motion platform, this motion platform can realize that the rectilinear direction translation reaches the rotation around rectilinear direction, and this motion platform is controlled by computing machine;
Described motion platform is provided with guide rail and leading screw and drives guide rail and carries out straight-line slide block, be equipped with web joint on the slide block, the web joint two ends have motor to support and bearings respectively, motor has electric rotating machine on supporting, and electric rotating machine and bearings one are used from installs drum die to be processed;
Dispose the laser instrument fixed support on the next door of motion platform, the laser instrument fixed support is provided with laser instrument, this laser instrument is also controlled by computing machine, be equipped with the laser instrument focusing system on the light path of laser instrument, mechanical shutter, vacuum deslagging conduit and gas protection tube road are arranged respectively from the laser beam both sides that the laser instrument focusing system comes out;
The drum die that resistance type heater is housed is mounted on electric rotating machine and the bearings, regulate the focalizer of laser instrument, make that the hot spot that focuses on drum die surface to be processed is the micron order size, after laser output power is stable, begin to process;
Laser instrument sends enters the laser instrument focusing system; Under the blanket gas that the laser beam of coming out from the laser instrument focusing system feeds in the gas shield pipeline by mechanical shutter, directly sintering forms microstructure graph on the surface of drum die; This microstructure graph is the three-dimensional structure of micrometer-class size, the residue that the laser beam sintering process forms, take away by vacuum deslagging conduit, by the output power of real time computer control laser instrument and the movement velocity of Mold Making platform, control laser is to the working depth of drum die, to realize the processing of die surface arbitrary characteristics curve shape;
To not needing the processed mould surface, close mechanical shutter, this moment, laser beam was for out-of-focus appearance, can not cause damage to drum die material to be processed, after machined surface to be scheduled to moves to Working position, mechanical shutter is opened, proceed Laser Processing, generate the laser sintered area of space on three-dimension curved surface border until sintering on the drum die external diameter surface, laser sintered area of space finally forms the roll-in figure of micron order to the submillimeter level three-dimensional structure, and the size combinations of the structural section of this roll-in figure three-dimensional feature is: cross section minimum widith: L＜50 μ m, the degree of depth: 0＜H＜500 μ m, angle of inclination: 90 °＜α＜120 °;
At last with coating machine with the roll-in patterned surface of charcoal atomic deposition to micron order to the submillimeter level three-dimensional structure, forming thickness is nano level diamond like carbon transition layer film.
3. method as claimed in claim 2 is characterized in that, described laser instrument is the ultrafast laser of power controlled.
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| CN102866579A (en) * | 2012-09-26 | 2013-01-09 | 中国科学院苏州纳米技术与纳米仿生研究所 | Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology |
| CN106462054A (en) * | 2014-03-31 | 2017-02-22 | 皇家飞利浦有限公司 | Imprinting method, computer program product and apparatus for the same |
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| CN102560564A (en) * | 2012-02-22 | 2012-07-11 | 合肥工业大学 | Method for preparing all-metal microstructure by combining deep ion reaction etching and rolling |
| CN102560564B (en) * | 2012-02-22 | 2015-03-25 | 合肥工业大学 | Method for preparing all-metal microstructure by combining deep ion reaction etching and rolling |
| CN102866579A (en) * | 2012-09-26 | 2013-01-09 | 中国科学院苏州纳米技术与纳米仿生研究所 | Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology |
| CN102866579B (en) * | 2012-09-26 | 2014-06-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Method for manufacturing rotary drum pressing die based on dynamic nano engraving technology |
| CN106462054A (en) * | 2014-03-31 | 2017-02-22 | 皇家飞利浦有限公司 | Imprinting method, computer program product and apparatus for the same |
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| CN107908077A (en) * | 2017-10-30 | 2018-04-13 | 中国科学技术大学 | Rotary exposure system and method based on Digital Micromirror Device mask-free photolithography |
| CN109702442A (en) * | 2019-03-11 | 2019-05-03 | 精利模塑科技（无锡）有限公司 | A kind of production method of precision rapid shaping auto electronics mold |
| CN109702442B (en) * | 2019-03-11 | 2022-04-22 | 精利模塑科技（无锡）有限公司 | Manufacturing method of precise and rapid forming automobile electronic die |
| CN116813350A (en) * | 2023-05-11 | 2023-09-29 | 清华大学 | Preparation device and method for laser-shock high-pressure coal-made diamond film |
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