CN101093263B - Optical waveguide, method of manufacturing the same and optical communication module - Google Patents
Optical waveguide, method of manufacturing the same and optical communication module Download PDFInfo
- Publication number
- CN101093263B CN101093263B CN 200710084794 CN200710084794A CN101093263B CN 101093263 B CN101093263 B CN 101093263B CN 200710084794 CN200710084794 CN 200710084794 CN 200710084794 A CN200710084794 A CN 200710084794A CN 101093263 B CN101093263 B CN 101093263B
- Authority
- CN
- China
- Prior art keywords
- involucrum
- optical waveguide
- film
- waveguide core
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
An optical waveguide includes: a lower substrate; a waveguide core that is formed on the lower substrate; a clad that is formed to surround a periphery of the waveguide core; and an upper substrate that is opposed to the lower substrate, wherein the waveguide cores, the lower substrate and the upper substrate surround a cavity extended along the waveguide core.
Description
Technical field
The present invention relates to a kind of optical waveguide and manufacture method thereof and optical communications module, more particularly, relate to such optical waveguide and manufacture method thereof and optical communications module, it can guarantee flexibility under the situation that does not change material, realized the alleviating of weight, cheap price and improved manufacturing efficient by simple method.
Background technology
Example as the method for manufacturing polymer optical wave guide of the prior art has proposed such as following multiple manufacture method and other manufacture methods:
(1) use monomer that film is flooded, optionally core segment is exposed with the change refractive index, and the method that a plurality of films are glued together (selective polymerisation method),
(2) coating sandwich layer and involucrum layer, then by utilizing reactive ion etching to form the method (RIE method) of involucrum part,
(3) method of ultraviolet solidifiable resin being exposed/developing (directly exposure method) by photoetching, this ultraviolet solidifiable resin obtains by photosensitive material is added in the polymeric material,
(4) utilize the method for injection molding,
(5) coating sandwich layer and involucrum layer, and core segment exposed with the method (photobleaching method) of the refractive index of change core segment.
Yet the selective polymerisation method in (1) has the problem relevant with the gummed of film.(2) the direct exposure method in the RIE method in and (3) needs expensive, because these methods have adopted photoetching.(4) injection molding method in has the problem relevant with the precision of resulting core diameter.Photobleaching method among the figure (5) has such problem, wherein can not guarantee the refringence between sandwich layer and the involucrum layer fully.(2) RIE method in and the direct exposure method in (3) can be classified actual manufacture method as, but these methods have the problem of aforesaid production cost.(1) ownership system making method in (5) all needs the zone of broad, and is not suitable for forming on flexible plastic substrates polymer optical wave guide in practice.
Simultaneously, as with the example of the method for the diverse manufacturing polymer optical wave guide of manufacture method of the prior art, for example exist the mould that utilizes that is called as little molded (micromolding) method to make the method for polymer optical wave guide (for example referring to JP-A-2004-29507 (term used herein " JP-A " is meant " the disclosed not Japanese patent application of examining "), JP-A-2004-86144 and JP-A-2004-109927).Method according to the manufacturing polymer optical wave guide of setting forth among JP-A-2004-29507, JP-A-2004-86144 and the JP-A-2004-109927, to have core and form the mould of recess and be used for the film substrate of involucrum bonding separably, the curable resin that will be used for core by capillarity is filled into the recess of mould and makes its curing then.Thereby on the film substrate, formed waveguide core.Carry out the demoulding then, form at the whole core of film substrate and form the involucrum layer on the surface.As a result, can produce optical waveguide extremely simply in batches with lower cost, even and adopted simple manufacturing method, the little optical waveguide of photoconduction loss also can stably be made.In addition, can make optical waveguide on flexible plastic substrates, this is difficult to make in the prior art.In this case, the application's applicant had proposed in the past the method for the manufacturing polymer optical wave guide of setting forth in JP-A-2004-29507, JP-A-2004-86144 and JP-A-2004-109927.
Yet, the optical waveguide of the classic method manufacturing by the manufacturing polymer optical wave guide of setting forth in JP-A-2004-29507, JP-A-2004-86144 and JP-A-2004-109927 is to be merely able to the direct light signal, and do not have can transmission of electric signals or the optical waveguide of the lead of electric power is provided.Therefore, if between printed panel or module except transmitting optical signal, also carry out the transmission and the electric power supply of electric signal, then should provide electric wire and light to interconnect, just have problems from the angle of opticator like this with cost, installing space and the weight etc. of electricity part with big linear diameter.
Simultaneously, have so a kind of method of making polymer optical wave guide, it can carry out the electrical wiring composition on the reverse side of waveguide sheet and in the back side at least one, and in the waveguide sheet in conjunction with light interconnection and electrical wiring (referring to JP-A-2001-311846).
When forming light interconnection and electrical wiring on the waveguide sheet that the classic method of the manufacturing polymer optical wave guide of setting forth is made in by JP-A-2004-29507, JP-A-2004-86144 and JP-A-2004-109927, at first, have the patterns of openings that constitutes core and the exposed mask of electrical wiring pattern carries out sub-image, exposure and development to the laminating film on the substrate by utilization, on this substrate, form a plurality of recesses then.Then, in formed recess, form thick copper film, and forming the concaveconvex structure that is formed with this thick copper film on it on the substrate by separating dry film by electro-plating method.Then, cladding materials is injected in the recess of this concaveconvex structure by method for printing screen, and with dry film lamination to the upper surface of tundish shell and thick copper film.Then, by exposure and the removal remove the upside that is arranged on thick copper film of developing the dry film of pre-position of thick copper film.Then, by being immersed in the thick copper film that removes in the etching solution through exposure.After etching, separate dry film.Then, core material is injected in the part of having removed thick copper film, and forms core by thermal treatment.Then, the polymer optical wave guide material is applied on each upper surface of thick copper film, core and tundish shell, and forms the involucrum layer by thermal treatment.Then, separating base plate, and, form down the involucrum layer by thermal treatment in addition having removed the part place coated polymeric optical waveguide material of substrate, or the like.According to above step, formed and comprised involucrum, middle involucrum, core, the flexible optical waveguide sheet of involucrum and the electrical wiring that forms by thick copper film down.
Incidentally, in for example crossing over the optical waveguide that can be provided with, must adopt the flexible optical waveguide that enough flexibilities are arranged around the rotating shaft of the hinge in the mobile device of hinge opened/closed, the information equipment etc.Optical waveguide according to the technology of the manufacturing optical waveguide of passing through prior art is made can not provide enough flexibilities by the material that shows less flexibility.Therefore, must provide under the big flexible situation, often make optical waveguide by showing big flexible material to optical waveguide.
Yet, need make under the situation with flexible optical waveguide by changing material, it is important that the flex capability of optical waveguide is considered to the thermal characteristics, light-transfer characteristic than optical waveguide etc.Therefore, there is variety of issue, makes that changing material causes thermotolerance decline, photoconduction loss etc. easily, is difficult to accurately the micro mirror surface working be become flat surfaces in by the step on 45 ° of micro mirror surfaces of manufacturings such as scribing machine.For this reason, need under the situation of the material that does not change optical waveguide, to provide to simple and inexpensive the optical waveguide manufacture method of flexibility.
On the contrary, providing to the overall optical waveguide under the situation of high flexibility by changing material, get by choosing in the encapsulation step, joint etc. when optical waveguide applies external force, cause the distortion of optical waveguide itself easily.As a result, there is such problem:, can not stably keep the distance between these elements and the waveguide core, thereby be difficult to encapsulate optical waveguide according to required precision optical waveguide and light-emitting component and light receiving element being carried out optics when being connected.In addition, because cladding materials is filled between the waveguide core densely and is positioned at the adjacent domain of waveguide core, so the problem that exists the weight of optical waveguide to increase.All component parts of being installed in mobile device etc. all need weight reduction, and also extremely need weight reduction as the optical waveguide of component part.
In the method for the manufacturing polymer optical wave guide of in JP-A-2004-29507, JP-A-2004-86144 and JP-A-2004-109927, setting forth, do not mention at all and under the situation of the material that does not change optical waveguide, improve the flexibility of polymer optical wave guide, and should alleviate the weight of polymer optical wave guide.
In addition, when making electrical wiring pattern and light interconnection pattern (core), make, so need many complex steps, for example composition, exposure and development and etching etc. owing to form technology by various films.Therefore, there be qualification rate reduction and the high problem of production cost easily made.
Summary of the invention
The object of the present invention is to provide a kind of manufacturing to have the method for the optical waveguide of electric wire, this method can make with low cost, and can improve by simple method and make efficient.
(1) according to a first aspect of the invention, a kind of optical waveguide comprises: infrabasal plate; Be formed on a plurality of waveguide core on the described infrabasal plate; Be formed the involucrum of the periphery that surrounds each waveguide core; Upper substrate, this upper substrate is relative with described infrabasal plate; And a plurality of cavitys that are formed between the relative involucrum and extend along described a plurality of waveguide core, wherein said waveguide core, described infrabasal plate and described upper substrate surround described cavity.
According to this structure, when described Optical Waveguide Bending, can absorb and reduce because the distortion that distortion, bending etc. cause, thereby how the material of tube optical waveguide can both not improve the flexibility of optical waveguide by described cavity.Can greatly improve the utilization factor of material, but also alleviate the weight of optical waveguide.
(2) as the described optical waveguide of project (1), wherein, described waveguide core and described cavity extend mutually and form array structure.Except the advantage of project (1), can also realize high-density packages to optical circuit.
(3), wherein, differ from one another perpendicular to the cross-sectional width of a plurality of cavitys in the described array structure of optical propagation direction intercepting as the described optical waveguide of project (2).Except the advantage of project (2), can also obtain to introduce light signal effectively and the shape that can not fail, and not reduce the packaging density of described optical waveguide array.
(4) as any described optical waveguide in the project (1) to (3), wherein, described cavity is formed along described waveguide core and leads to the other end from an end face on optical propagation direction.Any one advantage in project (1) to (3), can also reasonably absorb/reduce the excessive external force that causes owing to bending, distortion etc.
(5) as the described optical waveguide of project (4), this optical waveguide comprises: containment member (closingmember), the sealing member comprises curable resin, and fills and be solidificated at least one open end of described cavity.Except the advantage of project (4), can also be only provide flexible to the required part of optical waveguide.Can strengthen the rigidity of the end of described optical waveguide, and be used for that incident light is directed to the luminous component of waveguide core and the light receiving part that is used to receive from the emergent light of waveguide core can easily be assembled to described optical waveguide.
(6) as the described optical waveguide of project (4), the pre-position in the open end of both sides of described cavity is filled and be solidificated in to wherein said containment member, and the filling starting position of described containment member and the distance between the end-of-fill position differ from one another.Except the advantage of project (4), because can be, so, also can prevent the problem in the light-transfer characteristic etc. even under the environmental baseline of high temperature, high humility with the isolation of described cavity and extraneous air.In addition, because can be arranged to different sizes respectively, thereby can regulate the flexibility of described optical waveguide with being filled in the filling starting position of the curable resin in the described cavity and the distance between the end-of-fill position.
(7) as a described optical waveguide in project (5) and (6), wherein, described containment member comprises the material different with described involucrum.One the advantage in project (5) and (6), can also obtain excellent flexible optical waveguide such as mechanical property, light-transfer characteristic.
(8) as any described optical waveguide in the project (5) to (7), wherein, described containment member comprises polymeric material.Any one advantage in project (5) to (7), can also improve the flexible of described optical waveguide and to the bounding force of described involucrum biglyyer, or the like.
(9) as the described optical waveguide of project (1), wherein, described infrabasal plate and described upper substrate comprise having flexibility and refractive index to equal the refractive index of described involucrum or refringence be 0.02 or littler membrane material.Except the advantage of project (1), can also obtain the flexible optical waveguide of the high reliability of light-transfer characteristic excellence.
(10) as a described optical waveguide in project (1) and (9), wherein, described infrabasal plate and described upper substrate comprise polymeric film material.One the advantage in project (1) and (9), can also improve thermal characteristics, light-transfer characteristic, flexibility etc. greatly.
(11) as a described optical waveguide in project (1) and (9), wherein, described involucrum comprises the curable polymer material.One the advantage in project (1) and (9),, uncured film involucrum is flow on the side of waveguide core by utilizing the migration of resin.Can make the cavity that extends along waveguide core by simple steps.
(12) comprise as the described optical waveguide of project (1): involucrum layer, this involucrum layer comprise described infrabasal plate and described upper substrate relative to inner wall surface at least one surface.Except the advantage of project (1), also increased the degree of freedom of the material of selecting described infrabasal plate and described upper substrate.
(13) according to a second aspect of the invention, a kind of method of making optical waveguide may further comprise the steps: forming waveguide core on the involucrum film down; On last involucrum film, form uncured film involucrum; The film involucrum of last involucrum film is formed the surface to be arranged on the described waveguide core; By described uncured film involucrum being flowed and cover the side of described waveguide core, thereby form cavity at described involucrum film down, on described between involucrum film and the film involucrum along described waveguide core; And solidify described film involucrum.
According to this structure, can eliminate complex steps such as composition, exposure/development, etching etc., thus can be by simple steps large-scale production waveguide core stably and the cavity that extends along described waveguide core.Because simplification that can performing step, and can boost productivity, thereby easily and guarantee to realize the reduction of cost.
(14) according to a third aspect of the invention we, a kind of method of making optical waveguide may further comprise the steps: forming waveguide core on the involucrum film down; On last involucrum film, form uncured film involucrum; The film involucrum of last involucrum film is formed the surface to be arranged on the described waveguide core; By described uncured film involucrum being flowed and cover the side of described waveguide core, thereby form cavity at described involucrum film down, on described between involucrum film and the film involucrum along described waveguide core; Solidify described film involucrum; And in described cavity, fill and the curing containment member.
According to this structure, except the advantage of project (13), can also make the flexible optical waveguide that flexibility etc. can be provided to required part simply.
(15) as the method for the described manufacturing optical waveguide of project (14), wherein, the filling and the curing of described containment member comprise: fill described containment member by at least a mode in capillarity and the vacuum draw in the pre-position of described cavity.Except the advantage of project (14), can also easily described curable resin be incorporated in the described cavity.
(16) as the method for the described manufacturing optical waveguide of project (14), this method comprises: described down involucrum film and described in the involucrum film one with the corresponding part of described cavity in form through hole, described through hole is used at least a mode of capillarity and vacuum draw, the filling and the curing of wherein said containment member comprise: an open end at described cavity is filled into predetermined depth with described containment member, and solidifies described containment member by a kind of mode in the light and heat; And described containment member is filled into predetermined depth, and solidify described containment member by a kind of mode in the light and heat at another open end of described cavity.Except the advantage of project (14), can also guarantee described curable resin is incorporated in the described cavity, and not produce the gap or do not comprise bubble.
(17) according to a forth aspect of the invention, a kind of method of making optical waveguide may further comprise the steps: forming waveguide core on the involucrum film down; On last involucrum film, form uncured film involucrum; The film involucrum of last involucrum film is formed the surface to be arranged on the described waveguide core; By described uncured film involucrum being flowed and cover the side of described waveguide core, thereby form cavity at described involucrum film down, on described between involucrum film and the film involucrum along described waveguide core; Solidify described film involucrum; The filled conductive material; And described conductive material is hardened.
According to this structure, can eliminate complex steps, thereby can stably produce the waveguide core that constitutes the light interconnection by simple steps, the cavity that extends along described waveguide core and the conductive material that constitutes the electrical wiring pattern in the described cavity such as composition, exposure and development, etching etc.Because simplification that can performing step, and can boost productivity, thus can be easily and guarantee to realize the reduction of cost.
(18) as the method for the described manufacturing optical waveguide of project (17), the filling of wherein said conductive material comprises by at least a mode in capillarity and the vacuum draw described containment member is filled in the described cavity.Except the advantage of project (17), can also easily conductive material be incorporated in the cavity.Therefore, can be easily and accurately form the electrical wiring pattern.
(19) as the method for a described manufacturing optical waveguide in project (17) and (18), the formation of wherein said waveguide core comprises: form the waveguide core of extending with identical array spacings, and described conductive material is formed and has and the corresponding array-width of the array spacings of described waveguide core.One the advantage in project (17) and (18), can also realize optical circuit and circuit thick and fast.
(20) as the method for a described manufacturing optical waveguide in project (17) and (18), the formation of wherein said waveguide core comprises: form the waveguide core of extending with different array spacings, and described conductive material is formed and has and the corresponding cross section of the array spacings of described waveguide core.One the advantage in project (17) and (18), can also provide various electric assemblies required electric power.
(21) as the method for the described manufacturing optical waveguide of project (17), wherein said upward involucrum film and described involucrum film down comprise polymeric film material.Except the advantage of project (17), can also obtain the highly reliable optical waveguide of thermal characteristics and light-transfer characteristic excellence.
(22) as the method for the described manufacturing optical waveguide of project (17), this method comprises: before forming described waveguide core, and involucrum film and describedly be pre-formed the involucrum thin layer on the involucrum film down on described.Except the advantage of project (17), also expanded and selected the dirigibility of involucrum film, and improved manufacturing efficient.
(23) as the method for the described manufacturing optical waveguide of project (17), wherein said film involucrum comprises the curable polymer material.Except the advantage of project (17), uncured film involucrum can flow to the side.Can be used to fill and solidify the cavity of the conductive material that constitutes the electrical wiring pattern by simple steps manufacturing.
(24) as the method for the described manufacturing optical waveguide of project (17), wherein said conductive material comprises such material, and this material comprises the polymeric material with curable characteristic.Except the advantage of project (17), can also improve described involucrum film down, described uncured film involucrum and the described bounding force of going up the involucrum film, and can realize flexibility.
(25) as the method for the described manufacturing optical waveguide of project (17), the formation of wherein said waveguide core comprises: the preparation mould, and this mould comprises the protruding corresponding recess with described waveguide core; Described mould is pasted on the described involucrum film down; By the filling mouth instillation core material of described recess, and fill the core material that is instiled by at least a mode in capillarity and the vacuum draw; By a kind of mode in the light and heat core material of being filled is solidified; And separate described mould from described down involucrum film.
Except the advantage of project (17), can on flexible plastic substrates, form optical waveguide easily and directly.
(26) according to a fifth aspect of the invention, a kind of optical communications module comprises: luminous component, this luminous component are directed to incident light in the described waveguide core of the optical waveguide described in the project (1); And light receiving part, this light receiving part receives the emergent light from described waveguide core.
According to this structure, can improve the flexibility of described cavity part.Therefore, can be easily and accurately the electric module or the optics that connect in for example electric equipment of optics connect a plurality of electric equipment, and without limits to assembling.
According to the present invention, because adopted the optical waveguide that has along the cavity of waveguide core, thereby can under the situation that does not change material, improve flexibility, and realize reducing of weight.In addition, can also encapsulate optical waveguide and while accurately with low cost manufacturing optical waveguide.In addition, manufacturing step can be simplified, thereby optical waveguide can be stably produced in batches.
Description of drawings
To describe exemplary embodiment of the present invention in detail according to the following drawings, in the accompanying drawings:
Fig. 1 is the sectional view that schematically shows according to the structure example of the optical waveguide of first embodiment of the invention;
Fig. 2 A to Fig. 2 L is that concept nature is represented the artwork according to the step of the manufacturing optical waveguide of first embodiment of the invention;
Fig. 3 A and Fig. 3 B sectional view for amplifying is illustrated respectively in filling/cure curable state of resin in the open end of cavity of optical waveguide of the present invention;
Fig. 4 is the concept map of expression according to the structure of the optical communications module of second embodiment of the invention;
Fig. 5 is the sectional view that schematically shows according to the structure example of the optical waveguide of third embodiment of the invention;
Fig. 6 A to Fig. 6 L is that concept nature is represented the artwork according to the step of the manufacturing optical waveguide of third embodiment of the invention; And
Fig. 7 is the concept map of expression according to the structure of the optical communications module of second embodiment of the invention.
Embodiment
Specify exemplary embodiment of the present invention hereinafter with reference to accompanying drawing.
(first embodiment)
(structure of optical waveguide)
Fig. 1 is the sectional view that schematically shows according to the structure example of the optical waveguide of first embodiment of the invention.
In Fig. 1, the structure example of Reference numeral 10 expression optical waveguides.As shown in Figure 1, the essential structure of optical waveguide 10 comprises as the infrabasal plate 11 of involucrum layer, is formed on a plurality of waveguide core 12 on the infrabasal plate 11, relative with infrabasal plate 11 with the film involucrum 14 on the side that waveguide core 12 is arranged on the upper substrate 13 that also is used as the involucrum layer between them, is respectively formed at waveguide core 12 and be formed on cavity 15 between the relative involucrum 14.Infrabasal plate 11 and upper substrate 13 are for example formed by film structural component, sheet element etc. has rectangular shape.Waveguide core 12 and cavity 15 are formed has array structure, and wherein waveguide core 12 and cavity 15 are arranged with predetermined array spacings mutually.Waveguide core 12 in this array structure is extended along optical propagation direction with the array spacings that differs from one another.In addition, be formed in optical propagation direction upper edge waveguide core 12 as the cavity 15 of the feature structure of first embodiment and lead to another end face from an end face.The cross sectional shape perpendicular to the optical propagation direction intercepting of the cavity 15 in this array structure is shaped as the essentially rectangular shape, and the width of this cross sectional shape is set to different width dimensions respectively.The height of cavity 15 is substantially equal to the height of waveguide core 12.
In this optical waveguide 10, can form such structure, in this structure, the containment member (label 16 among Fig. 3) that is formed by curable resin is filled at least one open end of cavity 15.To the refractive index of this curable resin without limits.Therefore, the openend of cavity 15 is filled/is solidificated in the curable resin sealing in the open end of cavity 15, thereby the inside of cavity 15 can isolate with extraneous air.Can obtain the flexible optical waveguide 10 of high reliability, even this optical waveguide 10 also has excellent mechanical property, light-transfer characteristic under the environmental baseline of high temperature, high humility.In addition, filling starting position and the distance between the end-of-fill position that is filled into the curable resin of cavity 15 inside can be arranged to different size mutually.As a result, can regulate the position of the sweep of optical waveguide 10.
Certainly, the example shown in as above the structure of the optical waveguide 10 of structure, shape and composition member are not limited to.According to this first embodiment, form waveguide core 12 with the array spacings that differs from one another, and the width of the cross sectional shape of cavity 15 width dimensions that is configured to differ from one another.But the example shown in the invention is not restricted to.For example, in the present invention, the waveguide core 12 in the array structure can be extended along optical propagation direction with identical array spacings, and the width of the cavity in this array structure 15 also can be configured to this identical distance.The shape of the optical element that can connect according to optical waveguide institute optics suitably is provided with the shape of waveguide core 12.
In optical waveguide 10 as first embodiment, cavity 15 be formed on the side that its inboard side face is not configured to waveguide core 12.In addition, not have as refractive index be the function of 1.0 involucrum to cavity 15.Be to absorb/reduce the function of the excessive deformation that causes owing to crooked, reverse etc. of optical waveguide 10 as the principal character of the cavity 15 of the optical waveguide 10 of first embodiment.Can be according to the requirement of the flexibility of optical waveguide 10 and width of cavity 15 etc. is set arbitrarily.
(making the method for optical waveguide)
By make the as above optical waveguide 10 of structure effectively as following manufacture method of the present invention shown in figure 2 according to first embodiment.In following manufacturing example, the optical waveguide 10 of the polymeric film material of high flexibility is wherein adopted in explanation in infrabasal plate 11 and upper substrate 13, but the invention is not restricted to polymeric film material.In addition, in this makes example, explanation wherein with the situation of the waveguide core 12 of identical array spacings manufacturing array structure, but is also comprised wherein situation with the waveguide core 12 of different mutually array spacings manufacturing array structures.
Fig. 2 A to Fig. 2 L concept nature represents to make the step of optical waveguide 10.Fig. 2 A and Fig. 2 B make the concept map of the step of the mould 1 be used to make waveguide core for expression, Fig. 2 C to Fig. 2 F makes the concept map of the step of waveguide core 12 for expression, Fig. 2 G and Fig. 2 H make the concept map of the step of film involucrum 14a for expression, Fig. 2 I to Fig. 2 K is the concept map of expression manufacturing along the step of the cavity 15 of waveguide core 12 extensions, and Fig. 2 L is the concept map that is illustrated in the step of filling/cure curable resin 16 in the cavity 15.Fig. 3 A and Fig. 3 B represent that curable resin is filled/is solidificated in the state in the open end of cavity 15 of optical waveguide 10.Fig. 3 A and Fig. 3 B are the sectional view that the line III-III from Fig. 2 L observes.
(step of mfg. moulding die)
Similar to the previously presented JP-A-2004-29507 of the application's applicant, JP-A-2004-86144 with the technology of the mfg. moulding die described in the JP-A-2004-109927, can utilize base plate 20 to come the mould 21 shown in the shop drawings 2C, on this base plate 20, be formed with and the corresponding protruding 20a of the shape of waveguide core.In addition, can make this base plate 20 by the manufacture method identical with the substrate fabrication techniques described in JP-A-2004-29507, JP-A-2004-86144 and the JP-A-2004-109927.
In the manufacturing of mould 21, shown in Fig. 2 A and Fig. 2 B, at first will be used to form the curable resin-coating of mould or be expelled on the surface that is formed with on it with the base plate 20 of the corresponding protruding 20a of shape of waveguide core.Then, curable resin is solidified.Then, separate the curable resin that has solidified from base plate 20.Like this, shown in Fig. 2 C, can produce the mould structure that has with the corresponding recess 21a of the convex shape of waveguide core.
For example can adopt and solidify the back is used to form mould for elastomeric liquid silastic conduct curable resin.From aspects such as clinging power, separability, dimensional stability, intensity, hardness, particularly preferably be, for example should adopt liquid dimethyl siloxane rubber as liquid silastic.In the mould 21 that uses this liquid silastic, can prevent the distortion of concave inward structure etc.The shape of duplicating the waveguide core on the base plate 20 can be stablized accurately, and the mixing of bubble can be reduced.In addition, even the cross sectional shape of the recess 21a of mould 21 is very little, for example about 10 * 10 μ m, the curable resin that also can utilize the capillarity of curable resin will be used to form waveguide core immediately is filled among the recess 21a of mould 21.
(step of the waveguide core under making on the involucrum film substrate)
In the step of the waveguide core 12 on making the following involucrum film substrate 11 (infrabasal plate 11) that forms by polymeric film material, shown in Fig. 2 C to Fig. 2 F, at first will descend involucrum film substrate 11 to adhere on the mould 21, the curable resin that will be used to form waveguide core then is filled among the recess 21a of the mould 21 that closely contacts with following involucrum film substrate 11.Then, by heat, light etc. the curable resin that is used to form waveguide core of being filled is solidified.Then, from being used to form the curable resin peel of mould 21 of waveguide core.In this step, preferably, for example the curable resin that will be used to form waveguide core by capillarity is filled among the recess 21a of mould 21.In addition, in order to quicken by utilizing capillarity curable resin to be filled among the recess 21a of mould 21, it is desirable to, for example should whole suction system be reduced to about 0.1 to 200Pa by the pump orifice (not shown) being set in the pre-position that is communicated with the recess 21a of mould 21 respectively.
Certainly, can by with the previously presented JP-A-2004-29507 of the application's applicant, JP-A-2004-86144 and JP-A-2004-109927 in the essentially identical manufacture method of manufacturing technology make down waveguide core 12 on the involucrum film substrate 11.But the invention is not restricted to this method.For example, can adopt the method for the manufacturing waveguide core 12 of utilizing direct exposure method, engraving method etc.In the present invention, from the quantity that can reduce manufacturing step, can reduce production costs and can be directly the flexible polymeric film substrate form waveguide core 12 projection aspect, preferably, by utilizing the manufacturing technology among JP-A-2004-29507, JP-A-2004-86144 and the JP-A-2004-109927 making waveguide core 12 on the involucrum film substrate 11 down.
As the curable resin that is used to form waveguide core, the resin that for example has radiation-hardenable, electron ray curing, heat curing characteristic etc. is preferred.Particularly preferably be, but should adopt ultraviolet curable resin, heat reactive resin etc.But but the potpourri etc. that for example can adopt ultraviolet curing or thermoset monomer, oligomer, this monomer and this oligomer is as ultraviolet curable resin or heat reactive resin.But but for example can preferably adopt epoxy resin, polyimide, acrylic acid ultraviolet curable resin etc. as being somebody's turn to do ultraviolet curable resin.
(step of the uncured film involucrum in the manufacturing on the involucrum film substrate)
Make form by polymeric film material in the step of uncured involucrum thin layer 14a (film involucrum 14a) on the involucrum film substrate 13 (upper substrate 13), shown in Fig. 2 G and Fig. 2 H, at first, an amount of uncured resin that is used for involucrum makes uncured involucrum thin layer 14a on the involucrum film substrate 13 by being instilled into.For example, can form uncured involucrum thin layer 14a by spin coating method.
But for example can adopt the resin that is used to form involucrum such as the various resin materials conducts of radiation curable resins electron ray curing resin, heat reactive resin etc.But ultraviolet curable resin, heat reactive resin etc. are particularly preferred.But but the potpourri etc. that for example can adopt ultraviolet curing or thermoset monomer, oligomer, this monomer and this oligomer is as ultraviolet curable resin or heat reactive resin.But but for example can preferably adopt epoxy resin, polyimide, acrylic acid ultraviolet curable resin etc. as ultraviolet curable resin.But can adopt uviol lamp, ultraviolet LED, UV irradiation system to wait and solidify ultraviolet curable resin.In addition, can adopt in baking box heating to wait heat of solidification cured resin.
Preferably, adopt involucrum film substrate 11 and last involucrum film substrate 13 under the membrane material conduct with flexibility.But when adopting the ultraviolet curable resin conduct to be used to form the resin of waveguide core and film involucrum, importantly should select the material high to the ultraviolet ray range transparency.Preferably, should involucrum film substrate 11,13 and film involucrum 14 between refringence be set to 0.02 or littler.More preferably, should select identical refractive index or refringence to be arranged within 0.005.On the contrary, the involucrum base portion that is coated with the film involucrum on adopting it can improve the flatness of base portion, and can adopt the lower and base portion that hard-core material forms aspect refractive index by transparency during as base portion.
(the film involucrum on the side of manufacturing waveguide core and the step of cavity)
Make on the side of waveguide core 12 involucrum 14 and along waveguide core 12 involucrum film substrate 11 down, in the step of the cavity 15 that extends between involucrum film substrate 13 and the involucrum 14, shown in Fig. 2 I to Fig. 2 K, at first will go up uncured involucrum thin layer 14a on the involucrum film substrate 13 and be glued to down on the waveguide core 12 on the involucrum film substrate 11.By the migration that utilizes resin uncured involucrum thin layer 14a is flow on the side of waveguide core 12, under this state, this structure is kept intact a few minutes simultaneously.Through after a few minutes, this uncured involucrum thin layer 14a is solidified by ultraviolet ray, heat etc.Like this, can form involucrum 14 and cavity 15 on the side of waveguide core 12.In addition, when supplying to cavity, can adopt kapillary as cavity by the resin that utilizes capillary attraction will be used to form involucrum.
(step of filling/cure curable resin in cavity)
In the step of filling/curing as the curable resin of the containment member 16 in the cavity 15, uncured curable resin is instilled in the cavity 15, by capillarity and/or vacuum draw this curable resin is filled into desired locations in the cavity 15 then, is filled in curable resin in the cavity 15 by curing such as heat, light then.Fig. 3 A is illustrated in filling/cure curable state of resin in the open end of a side of cavity 15, and Fig. 3 B is illustrated in filling/cure curable state of resin in the open end of both sides of cavity 15.In addition, can utilize capillarity that uncured curable resin is spread naturally towards pumping slot side.In addition, can force uncured curable resin to spread by apply pull of vacuum from pumping slot side towards pumping slot side.Can select the material different as this curable resin with involucrum 14.From being connected to the angle of other device easily, the material that rigidity strengthens after preferably should selecting to solidify is to strengthen the end.In addition, without limits for the refractive index of curable resin.
When in the open end in the both sides of cavity 15 during filling/cure curable resin, preferably, shown in Fig. 3 B, involucrum film substrate 11 down or on forming through hole 17 with cavity 15 corresponding positions by laser beam processing etc. in the involucrum film substrate 13.This through hole 17 is used as pore and pump orifice in capillarity and/or vacuum draw.Preferably, this through hole 17 should be filled/be solidificated in behind the open end of cavity 15 sealed at curable resin.Because through hole 17 is filled/solidifies the back at curable resin sealed, thus can prevent to reduce as the flexibility of the optical waveguide of expecting the end, and can prevent that the peripheral part of through hole 17 from breakage, distortion etc. taking place when repeating the bending operation of optical waveguide 10.Preferably, through hole 17 should be formed in the various piece of separating with the part of often carrying out bending operation of optical waveguide 10.
(step of the end of cutting optical waveguide)
Form flexible polymer optical waveguide 10 by two end faces that vertically or obliquely cut optical waveguide 10 with scribing machine etc. along the longitudinal direction.Certainly, the method for two end faces of cutting optical waveguide is not limited to use the cutting method of scribing machine.
(advantage of first embodiment)
According to first embodiment, can realize following advantage.
(a) how the material of tube optical waveguide 10 all can not increase the flexibility of optical waveguide 10, and can absorb/reduce the distortion that cavity 15 causes owing to distortion, folding etc.
(b) material of optical waveguide 10 can be saved, and weight can be reduced.
(c) can be only provide flexible, and can strengthen the rigidity of the end of optical waveguide 10 to the required part of optical waveguide 10.Therefore, be used for that incident light is directed to the luminous component of waveguide core 12 and the light receiving part that is used to receive from the emergent light of waveguide core 12 can easily be assembled to optical waveguide.
(d) utilization factor of material can be improved, and the cost of material can be reduced.
(e) can obtain to guarantee effective receiving optical signals and the shape that do not reduce the packaging density of optical waveguide array.
(f) can provide simple manufacturing method, thereby can reduce manufacturing step, improve qualification rate, and can stably produce optical waveguide in batches.
(g) can guarantee easily to realize the reduction of cost and the simplification of manufacturing step.
(second embodiment)
(structure of optical communications module)
Fig. 4 represents the structure example according to the optical communications module of second embodiment of the invention.Fig. 4 is the concept map of the structure of this optical communications module of expression.In Fig. 4, be endowed identical component Name and identical Reference numeral with the essentially identical assembly of the assembly among first embodiment.Therefore, will omit detailed description here to these assemblies.
In Fig. 4, Reference numeral 30 expressions are equipped with the optical communications module of the flexible polymer optical waveguide 10 of first embodiment.This optical communications module 30 has array structure, and the waveguide core 12 and the cavity 15 that wherein constitute the light wiring pattern extend mutually.Curable resin shown in Fig. 3 B is filled/is solidificated in the open end of cavity 15.An end side at polymer optical wave guide 10 is provided with the luminous component that comprises single light-emitting component 31 (surface light emitting laser array 31), is provided with the light receiving part that comprises single light receiving element 32 (photodiode array 32) in the other end side.Two end faces of polymer optical wave guide 10 all are shaped as tilting mirrors, and these tilting mirrorss become roughly 45 inclinations that interlock with spending pitch angle with optical propagation direction.
(operation of optical communications module)
As shown in Figure 4, the light signal that sends from surface light emitting laser array 31 passes down involucrum film substrate 11 and incides on the polymer optical wave guide 10.The direct reflection that incident optical signal is tilted, and along the internal communication of polymer optical wave guide 10.This light signal is reflected by another tilting mirrors once more, thereby changes the direction of propagation, and passes down involucrum film substrate 11 and incide on the photodiode array 32.This light signal is converted into electric signal, sends to the outside by electric assembly (not shown) then.Like this, surface light emitting laser array 31 and photodiode array 32 can be connected to each other optically.
(advantage of second embodiment)
According to second embodiment, except the above-mentioned advantage of first embodiment, can also realize following advantage.
(a) because cavity 15 can be crooked, thus can relax between the electric module in electric installation or between the electric installation to the assembling restriction of each device etc.
(b) because can strengthen the rigidity of the end of optical waveguide 10, so surface light emitting laser array 31 and photodiode array 32 can be easily with high precision optics connections each other.
(the 3rd embodiment)
(structure of optical communications module)
Fig. 5 represents the structure example according to the optical communications module of second embodiment of the invention.Fig. 5 is the concept map of the structure of this optical communications module of expression.In Fig. 5, be endowed identical component Name and identical Reference numeral with the essentially identical assembly of the assembly among first embodiment.Therefore, will omit detailed description here to these assemblies and structure.
In Fig. 5, Reference numeral 10 expressions have the structure example of the optical waveguide of electric wire.As shown in Figure 5, the essential structure of optical waveguide 10 comprise as the infrabasal plate 11 of involucrum layer, be formed on waveguide core 12 on the infrabasal plate 11, relative with this infrabasal plate 11 with the film involucrum 14 on the side that waveguide core 12 is arranged on the upper substrate 13 that also is used as the involucrum layer between them, is respectively formed at waveguide core 12, be formed in the cavity 15 that passes through between the relative involucrum 14 and be formed on conductive layer 17 in the cavity 15.Infrabasal plate 11 and upper substrate 13 are for example formed by film structural component, sheet element etc. has rectangular shape.Waveguide core 12 and cavity 15 are formed has array structure, and wherein, waveguide core 12 and cavity 15 are arranged with predetermined array spacings mutually.Waveguide core 12 in this array structure is extended along optical propagation direction with the array spacings that differs from one another.
(making the method for optical waveguide)
By following shown in Fig. 6 A to Fig. 6 L with the essentially identical manufacture method of the present invention make effectively according to the 3rd embodiment as above the structure optical waveguide 10.Only explanation has the processing of the work different with first embodiment of the invention.
(step of filling/curing conductive material in cavity)
In cavity 15 in the step of filling/curing as the conductive material of conductive layer 17, uncured conductive material is instilled in the cavity 15, by capillarity and/or vacuum draw this conductive material is filled into desired locations in the cavity 15 then, is filled in conductive material in the cavity 15 by curing such as heat, light then.Can utilize capillarity that uncured curable resin is spread naturally towards pumping slot side.In addition, can force uncured curable resin to spread by apply pull of vacuum from pumping slot side towards pumping slot side.Fig. 3 A is illustrated in the state of a side filling/curing conductive material of cavity 15.If need thermal treatment in the step of filling/curing conductive material, then preferably, the condition of cure of this conductive material is 200 ℃ or lower.More preferably, condition of cure is 150 ℃ or lower, and also more preferably, condition of cure is 100 ℃ or lower.For fear of the separation that produces owing to the coefficient of thermal expansion differences between following involucrum film substrate 11, waveguide core 12, last involucrum film substrate 13 and the involucrum 14, it is desirable to reduce the solidification temperature of conductive material.In addition, preferably, make set time shorter.Can adopt such as aluminium, silver, gold and nickel etc., their slurry of metal of alloy and transparent resin with electric conductivity as conductive layer 17.Particularly preferably be, the material that comprises polymkeric substance is preferred.Because adopt the material comprise polymkeric substance, institute so that down involucrum film substrate 11, go up the flexibility that involucrum film substrate 13 and involucrum 14 have good cohesive and excellence.
(advantage of the 3rd embodiment)
According to the 3rd embodiment, can realize following advantage.
(a) by cancellation such as the complicated technology of composition, exposure and development and etching etc., thereby easily and guaranteed to realize to produce cheaply and the simplification of technology.
(b) effectively and under very fine and close state, formed the conductive layer 17 that constitutes waveguide core 12, cavity 15 and the forming circuit of optical circuit.
(c) can be easily and directly on flexible plastic substrates, form optical waveguide.
(the 4th embodiment)
(structure of optical communications module)
Fig. 7 represents the structure example according to the optical communications module of second embodiment of the invention.Fig. 7 is the concept map of the structure of this optical communications module of expression.In Fig. 7, the assembly substantially the same with the assembly among the 3rd embodiment is endowed identical component Name and identical Reference numeral.Therefore, will omit detailed description here to these assemblies and structure.
In Fig. 7, Reference numeral 30 expressions are equipped with the optical communications module of the flexible polymer optical waveguide 10 of the 3rd embodiment.This optical communications module 30 has array structure, wherein constitutes the waveguide core 12 of light wiring pattern and the conductive layer 17 of formation conductive pattern and extends mutually.Optical communications module 30 is connected to electronic equipment, and can carry out: the communication by utilizing conductive layer 17 to transmit and receive data as transmission path, to the power supply and the communication by utilizing waveguide core 12 to transmit and receive data of light transmitting device.Described electronic equipment for example comprises LCDs, liquid crystal projection apparatus, plasma display panel and printer etc.
(advantage of the 4th embodiment)
According to the 4th embodiment, can realize following advantage.
(a), thereby form mixed architecture by various types of optical elements (surface light emitting laser array 31 and photodiode array 32 etc.) and electronic component (IC etc.) are connected to polymer optical wave guide 10.
Example
Hereinafter with reference to Fig. 2 A to Fig. 2 L concrete example of the present invention is described.
(example 1)
By spin coating method thick film resist (Microchemical Co., the SU-8 that Ltd. makes) is applied on the surface of silicon substrate, under 80 ℃, carries out prebake then.Then, the thick film resist on the silicon substrate is exposed/develops, thereby on silicon substrate, form the corresponding projection of shape with waveguide core by photomask.Then, make the base plate (referring to Fig. 2 A) that is used for making waveguide core by under 120 ℃, the projection on the silicon substrate being carried out the back roasting.
Then, on this base plate, be coated with release agent, inject heat curing dimethyl siloxane resin (SYLGARD 184 that Dow Corning Asia Ltd. makes) subsequently, and its former state is kept the schedule time.Then, carry out about 10 minutes vacuum suction, made resin solidification (referring to Fig. 2 B) in about 30 minutes by under 120 ℃, this structure being heated subsequently.Then, produce the mould (mold thickness 5mm) that has with the corresponding recess of shape of waveguide core by separating base plate.Then, form filling mouth and pump orifice, made mould (referring to Fig. 2 C) thus by the hole that in two ends that are communicated with the recess of mould, forms diameter 3mm respectively.In this mould, form four waveguide core (recess) in parallel to each other, the section of waveguide core is of a size of 50 * 50 μ m, and the spacing between the waveguide core is set to 250 μ m.
Then, with resulting mould and as involucrum film and thickness are the following film substrate (refractive index is 1.51 for JSR Co., the Arton film that Ltd. makes) (referring to Fig. 2 D) glued together of 100 μ m down.Then, but ultraviolet curable resin (refractive index after the curing is 1.56 for JSR Co., Ltd. manufacturing) fully is filled in the filling mouth of mould, should ultraviolet curable resin but suck via pump orifice by suction pump then.Like this, but ultraviolet curable resin be filled in the recess of mould (referring to Fig. 2 E).Then, pass mould irradiation 50mW/cm
2Ultraviolet ray 5 minutes, thereby but the ultraviolet curable resin in the recess that is filled in mould is solidified.Then, producing waveguide core (referring to Fig. 2 F) on the film substrate down by peel of mould.
Then, but being instilled into an amount of ultraviolet curable resin (refractive index after the curing is 1.51 for JSR Co., Ltd. manufacturing) as last involucrum film and thickness is last film substrate (the JSR Co. of 100 μ m, Ltd. the Arton film of Zhi Zaoing, refractive index is 1.51) go up (referring to Fig. 2 G).Then, forming thickness by spin coating method is the uncured film involucrum layer (referring to Fig. 2 H) of 40 μ m.Then, paste down on the waveguide core on the film substrate (referring to Fig. 2 I) being coated on uncured film involucrum layer on the film substrate.Then, resulting structure former state is kept a few minutes, up to uncured film involucrum layer move to down the lateral parts of the waveguide core on the film substrate and remainder remain cavity till (referring to Fig. 2 J).Then, pass film substrate irradiation 50mW/cm
2Ultraviolet ray 15 minutes, make uncured film involucrum layer solidify (referring to Fig. 2 K).At last, optical waveguide is cut by scribing machine, thus the end of formation waveguide core, and the length of waveguide is set to 60mm.By above-mentioned steps between waveguide core, form highly be 50 μ m, width be 200 μ m, along the cavity that waveguide core is extended, obtain the flexible polymer optical waveguide thus.
The core of the polymer optical wave guide of manufacturing is pasted on the cylindrical fixture that radius is 5mm, and when using this core, make crooked 90 degree of polymer optical wave guide, lose measurement then as fulcrum.As a result, confirm to insert loss and be 1.0dB, this is in realistic scale.
(example 2)
According to example 1 in the similar process of process made mould, this mould can be made four waveguide core, the sectional dimension of each waveguide core all is 50 * 50 μ m, and the interval between them is set to 250 μ m, 500 μ m and 750 μ m respectively, and forms the cavity that passes mould along waveguide core.As a result, obtain to have the flexible polymer optical waveguide of three cavitys, the height of these cavitys is 50 μ m, and width is approximately 200 μ m, 450 μ m and 700 μ m respectively.
(example 3)
According to example 1 in the similar process of process made flexible polymer optical waveguide and three cavitys, this flexible polymer optical waveguide has four waveguide core, the sectional dimension of each waveguide core is 50 * 50 μ m, these waveguide core be spaced apart 250 μ m, and its length is 60mm.Then, but, reach the degree of depth of 10mm, shine 50mW/cm then immediately by utilizing capillarity to fill ultraviolet curable resin from an open end of cavity
2Ultraviolet ray make resin solidification.Subsequently, by laser beam processing with the corresponding various piece of the cavity of polymer optical wave guide in to form diameter be the through hole of 100 μ m, thereby form pore.Then, but, reach the degree of depth of 20mm, immediately shine 50mW/cm by utilizing capillarity to fill ultraviolet curable resin from another open end of cavity
2Ultraviolet ray make resin solidification.At last, use scribing machine that optical waveguide is cut, thereby form the end of waveguide core.Obtain polymer optical wave guide by above-mentioned steps, this polymer optical wave guide has cavity between waveguide core, and makes it have different length in the open end of the both sides by curable resin being filled into cavity and partly have flexibility.
(example 4)
According to example 1 in the similar process of process, between waveguide core, infrabasal plate and upper substrate, form cavity (referring to Fig. 6 A to 6K).Then, by providing silver paste in the open end that silver paste is instilled into cavity, and utilize capillarity that silver paste is filled in the cavity by bleed as another open end of inlet (600mPa) produced.Then, made the silver paste sclerosis in one hour by in electric oven, under 150 ℃, heating.At last, use scribing machine that optical waveguide is cut, thereby form the end of waveguide core, and the length of waveguide is set to 60mm.Obtained the flexible polymer optical waveguide by above-mentioned steps, it highly is that 50 μ m, width are the conductive layer of about 200 μ m that this flexible polymer optical waveguide has, and this conductive layer forms along between the waveguide core.After the transmission loss (TL) of measuring this flexible polymer optical waveguide, the transmission loss (TL) of this flexible polymer optical waveguide is 0.1dB/cm.Then, confirm that by these electrical characteristics conductive layer is in conduction state.
(example 5)
According to example 1 in the similar process of process made mould, this mould can be made four waveguide core, the sectional dimension of each waveguide core all is 50 * 50 μ m, and the interval between them is set to 250 μ m, 500 μ m and 750 μ m respectively, and forms the conductive layer that passes mould along waveguide core.As a result, obtained to have the flexible polymer optical waveguide of three conductive layers, the height of these conductive layers is 50 μ m, and its width is respectively about 200 μ m, 450 μ m and 700 μ m.
In this case, be not limited to the foregoing description and example according to optical waveguide of the present invention and manufacture method thereof and optical communications module.In the scope that does not break away from purport of the present invention, can carry out the variation of various designs.
The present invention can use in optical circuit, optical branching filter and photo-coupler, the photoswitch etc. of propagating optical signal, for example the joints of optical fibre, optical splitter etc.
Claims (26)
1. optical waveguide, this optical waveguide comprises:
Infrabasal plate;
Be formed on a plurality of waveguide core on the described infrabasal plate;
Be formed the involucrum of the periphery that surrounds each waveguide core;
Upper substrate, this upper substrate is relative with described infrabasal plate; And
The a plurality of cavitys that are formed between the relative involucrum and extend along described a plurality of waveguide core,
Wherein
Described waveguide core, described infrabasal plate and described upper substrate surround described cavity.
2. optical waveguide according to claim 1, wherein, described waveguide core and described cavity extend mutually and form array structure.
3. optical waveguide according to claim 2, wherein, the cross-sectional width perpendicular to the optical propagation direction intercepting of a plurality of cavitys in the described array structure differs from one another.
4. optical waveguide according to claim 1, wherein, described cavity is formed along described waveguide core and leads to the other end from an end face on optical propagation direction.
5. optical waveguide according to claim 4, this optical waveguide also comprises:
Containment member, the sealing member comprises curable resin, and is filled and is solidificated at least one open end of described cavity.
6. optical waveguide according to claim 5, wherein
Pre-position in the open end of the both sides of described cavity is filled and is solidified described containment member, and
The filling starting position of described containment member and the distance between the end-of-fill position differ from one another.
7. optical waveguide according to claim 5, wherein, described containment member comprises the material different with described involucrum.
8. optical waveguide according to claim 5, wherein, described containment member comprises polymeric material.
9. optical waveguide according to claim 1, wherein
Described infrabasal plate and described upper substrate comprise having the membrane material that flexibility and refractive index equal the refractive index of described involucrum, and the refringence that perhaps comprises refractive index and described involucrum is 0.02 or littler membrane material.
10. optical waveguide according to claim 1, wherein, described infrabasal plate and described upper substrate comprise polymeric film material.
11. optical waveguide according to claim 1, wherein, described involucrum comprises the curable polymer material.
12. optical waveguide according to claim 1 wherein, is coated with the involucrum layer on described infrabasal plate and upper substrate.
13. a method of making optical waveguide, this method may further comprise the steps:
Forming waveguide core on the involucrum film down;
On last involucrum film, form uncured film involucrum;
The described film involucrum of going up the involucrum film is formed the surface to be arranged on the described waveguide core;
By described uncured film involucrum being flowed and cover the side of described waveguide core, thereby form cavity at described involucrum film down, on described between involucrum film and the film involucrum along described waveguide core; And
Solidify described film involucrum.
14. the method for manufacturing optical waveguide according to claim 13 is characterized in that, this method is further comprising the steps of:
Filling and curing comprise the containment member of curable resin in described cavity.
15. the method for manufacturing optical waveguide according to claim 14, wherein,
The filling of described containment member and curing comprise by at least a mode in capillarity and the vacuum draw fills described containment member in the pre-position of described cavity.
16. the method for manufacturing optical waveguide according to claim 14, this method comprises:
Described down involucrum film and described on one of involucrum film form through hole with the corresponding part of described cavity place, described through hole is used at least a mode of capillarity and vacuum draw,
Wherein, the filling of described containment member and curing comprise:
In an open end of described cavity, described containment member is filled into predetermined depth, and solidifies described containment member by a kind of mode in the light and heat; And
In another open end of described cavity, described containment member is filled into predetermined depth, and solidifies described containment member by a kind of mode in the light and heat.
17. the method for manufacturing optical waveguide according to claim 13 is characterized in that, this method also comprises:
The filled conductive material; And
Make described conductive material sclerosis.
18. the method for manufacturing optical waveguide according to claim 17, wherein
The filling of described conductive material comprises: by at least a mode in capillarity and the vacuum draw described conductive material is filled in the described cavity.
19. the method for manufacturing optical waveguide according to claim 17, wherein
The formation of described waveguide core comprises: form the waveguide core of extending with identical array spacings, and
Described conductive material is formed to have and the corresponding array-width of the array spacings of described waveguide core.
20. the method for manufacturing optical waveguide according to claim 17, wherein
The formation of described waveguide core comprises: form the waveguide core of extending with different array spacings, and
Described conductive material is formed to have and the corresponding xsect of the array spacings of described waveguide core.
21. the method for manufacturing optical waveguide according to claim 17, wherein, described upward involucrum film and described involucrum film down comprise polymeric film material.
22. the method for manufacturing optical waveguide according to claim 17, this method comprises:
Before forming described waveguide core on described involucrum film and describedly be pre-formed the involucrum thin layer on the involucrum film down.
23. the method for manufacturing optical waveguide according to claim 17, wherein, described film involucrum comprises the curable polymer material.
24. the method for manufacturing optical waveguide according to claim 17, wherein, described conductive material comprises such material, and this material comprises the polymeric material with curable characteristic.
25. the method for manufacturing optical waveguide according to claim 17, wherein
The formation of described waveguide core comprises:
The preparation mould, this mould comprises the protruding corresponding recess with described waveguide core;
Described mould is pasted on the described involucrum film down;
By the filling mouth instillation core material of described recess, and fill the core material that is instiled by at least a mode in capillarity and the vacuum draw;
By a kind of mode in the light and heat core material of being filled is solidified; And
Separate described mould from described involucrum film down.
26. an optical communications module, this optical communications module comprises:
Luminous component, this luminous component are directed to incident light in the waveguide core of the described optical waveguide of claim 1; And
Light receiving part, this light receiving part receives the emergent light from described waveguide core.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006168984A JP4692405B2 (en) | 2006-06-19 | 2006-06-19 | Optical waveguide, method for manufacturing the same, and optical communication module |
| JP2006168983A JP2007334235A (en) | 2006-06-19 | 2006-06-19 | Manufacturing method of optical waveguide |
| JP2006168984 | 2006-06-19 | ||
| JP2006168983 | 2006-06-19 | ||
| JP2006-168984 | 2006-06-19 | ||
| JP2006-168983 | 2006-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101093263A CN101093263A (en) | 2007-12-26 |
| CN101093263B true CN101093263B (en) | 2011-04-20 |
Family
ID=38933742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710084794 Expired - Fee Related CN101093263B (en) | 2006-06-19 | 2007-02-28 | Optical waveguide, method of manufacturing the same and optical communication module |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2007334235A (en) |
| CN (1) | CN101093263B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009272614A (en) * | 2008-04-30 | 2009-11-19 | Sharp Corp | Erbium-doped silicon nanocrystalline-embedded silicon oxide waveguide and method of manufacturing the same, and integrated circuit including the same |
| JP5160346B2 (en) * | 2008-08-26 | 2013-03-13 | 日本メクトロン株式会社 | Photoelectric composite flexible wiring board and manufacturing method thereof |
| JP5423042B2 (en) * | 2009-02-25 | 2014-02-19 | ソニー株式会社 | Method for manufacturing solid-state imaging device |
| CN106160856B (en) * | 2015-04-07 | 2019-06-18 | 北京智谷睿拓技术服务有限公司 | Visible light signal reception control method and control device, visible light signal receiving device |
| US10181925B2 (en) * | 2015-09-22 | 2019-01-15 | Pascal Chretien | Fault tolerant optical apparatus |
| CN107942435B (en) * | 2017-11-22 | 2019-08-30 | 华进半导体封装先导技术研发中心有限公司 | A kind of structure and its manufacturing method applied to multi-channel and high capacity optical module |
-
2006
- 2006-06-19 JP JP2006168983A patent/JP2007334235A/en active Pending
-
2007
- 2007-02-28 CN CN 200710084794 patent/CN101093263B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101093263A (en) | 2007-12-26 |
| JP2007334235A (en) | 2007-12-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20070292091A1 (en) | Optical waveguide, method of manufacturing the same and optical communication module | |
| CN101093263B (en) | Optical waveguide, method of manufacturing the same and optical communication module | |
| US7646948B2 (en) | Flexible optical waveguide film, optical transceiver module, multi-channel optical transceiver module, and method of manufacturing flexible optical waveguide film | |
| JP3570882B2 (en) | Optical element mounting board, optical module using the mounting board, and manufacturing method thereof | |
| US7350982B2 (en) | Sub-mount for mounting optical component and light transmission and reception module | |
| US7627210B2 (en) | Manufacturing method of optical-electrical substrate and optical-electrical substrate | |
| JP2006017885A (en) | Waveguide film type optical module, optical waveguide film and its manufacturing method | |
| JP2011033876A (en) | Method of manufacturing optical sensor module and optical sensor module obtained thereby | |
| KR20090052286A (en) | Optical waveguide, manufacturing method thereof, and connecting structure therefor | |
| JP5693986B2 (en) | Optical sensor module | |
| JP2011095295A (en) | Optical fiber block of optical module and method of manufacturing the same | |
| JP4845333B2 (en) | Photoelectric conversion element package, manufacturing method thereof, and optical connector | |
| WO2007105419A1 (en) | Photo/electrical mixed mounting substrate and method for producing the same | |
| CN101034186A (en) | Three-dimensional multilayer vertical coupling optical interconnected structure and manufacturing method of soft lithography thereof | |
| US7653280B2 (en) | Polymer optical waveguide and method for manufacturing the same | |
| JP5278644B2 (en) | Photoelectric board and manufacturing method thereof, optical integrated circuit, optical interconnector, optical multiplexer / demultiplexer | |
| JP2007233303A (en) | Method of manufacturing polymer optical waveguide module | |
| JP2007086330A (en) | Method for manufacturing polymer optical waveguide device | |
| JP2006208794A (en) | Waveguide type optical module, optical waveguide film, and its manufacturing method | |
| JP2004037776A (en) | Optical waveguide and optical waveguide device | |
| KR100935866B1 (en) | Optical waveguide using epoxy resin and the fabricating methods thereof | |
| JP2008164943A (en) | Multichannel optical path conversion element and its manufacturing method | |
| JP2004020656A (en) | Optical waveguide apparatus and method for manufacturing optical waveguide apparatus | |
| JP4692405B2 (en) | Optical waveguide, method for manufacturing the same, and optical communication module | |
| JP2004354947A (en) | Planar optical circuit component and its manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110420 Termination date: 20170228 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |