CN101090803A - Resin-bonded superabrasive wheel and process for producing the same - Google Patents

Resin-bonded superabrasive wheel and process for producing the same Download PDF

Info

Publication number
CN101090803A
CN101090803A CN 200680001534 CN200680001534A CN101090803A CN 101090803 A CN101090803 A CN 101090803A CN 200680001534 CN200680001534 CN 200680001534 CN 200680001534 A CN200680001534 A CN 200680001534A CN 101090803 A CN101090803 A CN 101090803A
Authority
CN
China
Prior art keywords
resin
superabrasive wheel
metallic film
parent metal
bonded superabrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 200680001534
Other languages
Chinese (zh)
Inventor
中村畅秀
山崎繁一
吉本昭典
福西利夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALMT Corp
Original Assignee
ALMT Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALMT Corp filed Critical ALMT Corp
Publication of CN101090803A publication Critical patent/CN101090803A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/02—Wheels in one piece
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

A resin-bonded superabrasive wheel which has high bonding strength between the core and the superabrasive layer. The resin-bonded superabrasive wheel comprises a core (3) and a superabrasive layer (1) bonded thereto, wherein the core (3) has been bonded to the superabrasive layer (1) through a copper layer at the interface between these, the copper layer being one formed by thermal spraying.

Description

Resin-bonded superabrasive wheel and manufacture method thereof
Technical field
The present invention relates to a kind of resin-bonded superabrasive wheel and manufacture method thereof that between parent metal and abrasive grain layer, has firm engagement power.
Background technology
In resin-bonded superabrasive wheel,, adopted in the past material powder and copper parent metal to be connected airtight and in the method for metal pattern internal compression shaping a kind of gimmick as manufacture method as the joint method of matrix and abrasive grain layer always.
As the reason that adopts this method, think that the bond strength of resin and copper is also higher than the stability of higher and adhesive strength in this manufacture method.Particularly the bond strength of polyimide resin and copper is obviously high, is mainly used in the manufacturing of semiconductor substrate.
The engaging mechanism of polyimide resin and copper is to utilize cementation effect and molecular separating force according to general saying, and but, particularly as the reason of polyimide resin and copper firm engagement, recent findings is based on the chemical reaction between metal and polyimide resin.In addition, in general, the metal surface is difficult to keep clean surface completely, only otherwise wait in the special environment in a vacuum and handle, will form hydroxyl etc. in the metal surface.Compare with ferrous material etc., although the copper oxidation rate is slow, it is same existing aspect the hydroxyl on the surface.
And in the polyimide resin that uses as the bond material of resin-bonded superabrasive wheel, also on market, selling of some aminating reaction that is through with fully, but, majority is not carry out the state of aminating reaction fully and contain presoma.Think to have carboxyl in the presoma, thereby it combines with the hydroxyl of metal surface and produces engaging force.So, think and use parent metal made of copper, in metal pattern, will connect airtight mutually as the material powder of the abrasive grain layer of bond material and heat compression molding with polyimide resin, then can reach very firm joint.
But, because the yield point of copper is low, thereby occur in the problem that parent metal made of copper is out of shape in the compression molding operation.If parent metal deforms, the shape fine finishining of back operation will be difficult so, thereby, limited the shape that can make inevitably.In addition, though the distortion return to very little, but since copper be ductile material, thereby remove processing also be very the difficulty, be not a kind of manufacture method efficiently.And the thermal coefficient of expansion of copper is 16 * 10 -6/ K～18 * 10 -6/ K is higher than 10 * 10 of iron and steel -6/ K～12 * 10 -6/ K, the thermal coefficient of expansion of abrasive grain layer are 10 * 10 -6Below/the K, be lower than iron and steel.Thereby, when heating is shaped laggard row cooling, producing tensile stress as residual stress at adhesive linkage, residual stress was than high under the situation that adopts iron and steel when particularly parent metal was copper.Residual stress uprises can become one of essential factor that causes adhesive strength decline.
On the other hand, proposed on the parent metal of the high ferrous material of rigidity, to implement copper coating at present.According to this method, same with the parent metal that adopts copper, can between copper and abrasive grain layer resin, obtain high engaging force.
(for example, opening flat 5-293763 communique (patent documentation 1)) with reference to the spy
In addition, because the yield point height of parent metal, thereby neither can produce distortion, it is also easy to eliminate processing.Thereby the parent metal shape of emery wheel and the restriction of emery wheel size are compared considerably less with the situation of copper parent metal.
As the method that can in parent metal, use the high yield strength material, except above-mentioned, a kind of method also proposed be on the parent metal of metal thickly soft metals such as spraying plating copper, form the stress relaxation layer of porous matter, make metal bonded wheel.In order to utilize spraying plating to obtain porous layer, each raw material particle that must keep injection is the state that melt surface, inside do not have fusion.What can satisfy above-mentioned requirements is the powder flame-spray processes.
(for example, opening flat 2-256466 communique (patent documentation 2)) with reference to the spy
As mentioned above, in resin-bonded superabrasive wheel, make the method for its firm engagement as in the interface of yield points such as ferrous material, being mingled with the copper layer than higher metal system parent metal and abrasive grain layer, consideration be the method that forms the copper layer by plating.But, adopt the method for plating, do not having to obtain uniform copper layer on the concavo-convex burnishing surface, and when the grinding tool face that is used to process be when having the shape of protuberance and recess, uneven possibility height takes place in plating thickness, thickness is difficult to control.On the other hand, in metal bonded wheel, consideration be the method for utilizing the powder flame-spray processes to form, but, spraying plating is applicable to the invention of resin bond wheel also do not have till settled the present.And, the powder flame-spray processes, when obtaining thick porous layer, have superiority, but, critically control nozzle location and angle even if adopt mechanical hand, also be difficult to obtain thin layer with uniform thickness, thereby, can't realize improving the purpose of the bond strength of parent metal and abrasive grain layer in the resin bond wheel.
Patent documentation 1: the spy opens flat 5-293763 communique
Patent documentation 2: the spy opens flat 2-256466 communique
For the copper layer,, cause bond strength to descend if the intensity at blocked up then junction surface depends on the breakdown strength of copper.Must control thickness for this reason, not exceed necessary position so that can not produce thickness., if generation is inhomogeneous on the thickness of the copper layer that forms, so,, then not only produce the extremely thin position of thickness, but also have the danger that produces the position that does not form the copper layer as if being the formation condition that benchmark is set the copper layer with the maximum ga(u)ge.
Summary of the invention
The problem that the present invention will solve is, makes as the copper layer thickness of the key of the bond strength of parent metal and abrasive grain layer identically, improves the bond strength of parent metal and abrasive grain layer.
First of resin-bonded superabrasive wheel of the present invention is characterised in that, the metallic film that utilizes spraying plating to handle formation is set on the surface of parent metal, at the surface engagement superhard abrasive granulosa of metallic film, this resin-bonded superabrasive wheel, metallic film are copper.So the surface roughness of the copper layer that forms does not rely on the surface roughness of parent metal, and surface roughness reaches more than the 1 μ mRa.And, by suitably imposing a condition, can form the film of uniform thickness and similar face roughness.The present invention is utilizing the method that proposes with patent documentation 1 on the spraying plating formation copper layer this point different.In addition, this case is the invention about resin bond wheel, and the function of copper layer is all different fully about the technology of metallic bond with patent documentation 2 with engaging mechanism.
The 2nd is characterised in that, adopt arc spraying, the rotating speed of setting parent metal is more than the 20/min, in the 600/min, the feed speed of nozzle is more than the 300mm/min, in the 1000mm/min, the spraying plating distance is more than the 80mm, below the 150mm, and the wire feed speed is more than the 0.8m/min, in the 2.4mm, and wire diameter is more than the 1.0mm, below the 1.6mm, voltage between wire is more than the 30V, below the 50V, and electric current is more than the 40A, below the 80A.The tissue of copper layer is fine and close in well than porous matter.For this reason, as the method for spraying plating, do not adopt the powder flame-spray processes, and should adopt the arc spraying method.The arc spraying method is the method for also using in the application of metal covering, owing to all be in fusion up to the raw material particle inside of spraying, therefore, can obtain the membrane tissue densification, can not thicken thickness, copper layer uniformly.The rotating speed of parent metal is that 20/min is above, 550/min is with interior better, preferably more than the 50/min, in the 550/min.The feed speed of nozzle is that 350mm/min is above, 1000mm/min is with interior better, preferably more than the 350mm/min, in the 950mm/min.The spraying plating distance is that 90mm is above, 150mm is following better, preferably more than the 90mm, below the 140mm.The wire feed speed is that 0.9m/min is above, 2.4m/min is following better, preferably more than the 0.9m/min, below the 2.2r/min.Wire diameter is that 1.1mm is above, 1.6mm is following better, preferably more than the 1.1mm, below the 1.5mm.Voltage between wire is that 35V is above, 50V is following better.Electric current is that 40A is above, 70A is following better.
The 3rd is characterised in that, the thickness of metallic film is more than the 5 μ m, in the 1mm.This is in order to obtain the condition as the intensity at junction surface.If the thickness of copper layer surpasses 1mm, then because the strength of materials of copper is low, thereby not only exist the junction surface that the danger that plastic deformation reduces emery wheel periphery precision takes place, but also have the danger that the copper layer destroys, abrasive grain layer is peeled off.On the other hand, if below 5 μ m, then because there is the danger that produces the position that does not have spraying plating in the membrane thickness unevenness that can't thoroughly suppress in the spraying plating condition.Be preferably 5 μ m～550 μ m, more preferably 10 μ m～100 μ m.
The 4th is characterised in that, the bond material of superhard abrasive granulosa is a polyimide resin.If use the polyimide resin contain presoma, then the copper layer need not be non-oxide surface, not as utilizing copper layer that spraying plating forms the state of oxidation for well.When not containing presoma, in reducing atmosphere, handle getting final product.
The 5th is characterised in that, the material of parent metal is ferrous material, titanium alloy, duralumin.Ferrous material and titanium alloy, duralumin yield point height, abrasive grain layer can under high pressure be shaped.From the yield point of material and the viewpoint of Young's modulus, preferably adopt ferrous material, titanium alloy.In addition, the viewpoint from the zygosity of the material of spraying plating and parent metal adopts ferrous material better.But, when titanium alloy is carried out spraying plating, should in base metal surface nickel dam be set in advance, on nickel surface, carry out the spraying plating of copper.
Resin-bonded superabrasive wheel according to this invention possesses: parent metal; Utilize spraying plating to handle the metallic film that forms on the surface of parent metal; Be arranged on the metallic film surface, contain the superhard abrasive granulosa of resinoid bond and super-hard abrasive, metallic film contains copper and cupric oxide.
So in the resin-bonded superabrasive wheel that constitutes, owing to utilize spraying plating to handle to form metallic film, thereby, also can form the metallic film of surface smoothing even exist concavo-convexly at matrix surface.
The preferred resin bond contains polyimide resin.
The preferred substrate metal contains superhard alloy.
The preferred polyimide resin that constitutes resinoid bond, for example can carry out complex bound oxygen like that with ehter bond is inscape.
The X-ray diffraction intensity Cu of (111) face of preferred cupric oxide 2The ratio Cu of the X-ray diffraction intensity of (111) face of O (111) and copper 2O (111)/{ Cu (111)+Cu 2O (111) } be more than 0.15, below 0.25.
According to this manufacture method of inventing the resin-bonded superabrasive wheel of an aspect, comprising: utilize spraying plating to handle the operation that forms metallic film on the surface of parent metal with surface; Form the operation of the superhard abrasive granulosa that contains resinoid bond and super-hard abrasive on the metallic film surface.
Be preferably formed the operation of metallic film, be included in and utilize spraying plating to handle the situation that forms metallic film in the inert gas.The manufacture method of resin-bonded superabrasive wheel preferably also is included in and forms after the metallic film, forms before the superhard abrasive granulosa, and metallic film is implemented heat treated operation.
The preferred substrate metal contains superhard alloy.
The thickness of preferred substrate metal is below the 1mm.
Invent the manufacture method of the resin-bonded superabrasive wheel of another aspect according to this, comprise: cover disc-shape and have the upper surface and the lower surface of the parent metal of upper surface, lower surface and outer peripheral face with anchor clamps, expose outer peripheral face and on this outer peripheral face that exposes, utilize spraying plating to handle the operation that forms the metallic film that contains copper and cupric oxide; Form the operation of the superhard abrasive granulosa that contains resinoid bond and super-hard abrasive contiguously with metallic film.
Description of drawings
Fig. 1 is the stereogram that contains partial cross section according to the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 2 is the figure of expression according to the cross section, junction surface of the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 3 is in order to the stereogram of explanation according to the 1st operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 4 is the stereogram of expression according to the 2nd operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 5 is the stereogram of expression according to the 3rd operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 6 is the stereogram of representing according to the 4th operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 1 in order to explanation that contains partial cross section.
Fig. 7 is the stereogram of expression according to the 5th operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 1.
Fig. 8 is the stereogram of expression according to the 1st operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 2.
Fig. 9 is the stereogram of expression according to the 2nd operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 2.
Figure 10 is the stereogram of expression according to the 3rd operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 2.
Figure 11 is the stereogram of expression according to the 4th operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 2.
Figure 12 is the stereogram of expression according to the 5th operation of the manufacture method of the resin-bonded superabrasive wheel of this working of an invention mode 2.
Figure 13 is the stereogram of the internal structure among expression Figure 12.
Figure 14 is the stereogram of expression according to the 1st operation of the manufacture method of the resin-bonded superabrasive wheel of comparative example.
Figure 15 is the stereogram of expression according to the 2nd operation of the manufacture method of the resin-bonded superabrasive wheel of comparative example.
Figure 16 is the stereogram of expression according to the 3rd operation of the manufacture method of the resin-bonded superabrasive wheel of comparative example.
Figure 17 is the curve of the X-ray diffraction figure of expression part of the present invention and comparison part.
Figure 18 is the curve of expression according to the concentration of the cupric oxide in the metallic film of this invention.
Figure 19 is the cutaway view of the formation of expression superhard abrasive granulosa.
Among the figure, 1-superhard abrasive granulosa, 2-metallic film, 3-parent metal, 31-upper surface, 32-lower surface, 33-outer peripheral face, 38-through hole, 100-resin-bonded superabrasive wheel.
The specific embodiment
More than, with reference to accompanying drawing, describe about this working of an invention mode.Also have, attached about same section or suitable part in the following embodiments with identical reference marks, do not do repetition about its explanation.In addition, each embodiment can also be made up.
(embodiment 1)
Fig. 1 is the stereogram that contains partial cross section according to the resin-bonded superabrasive wheel of this working of an invention mode 1.With reference to Fig. 1, the resin-bonded superabrasive wheel 100 of disc-shape comprises the metallic film 2 that disc-shape and central part form the parent metal 3 of through hole 38, form at the outer peripheral face 33 of the many metals 3 of matrix, the superhard abrasive granulosa 1 that forms on the surface of metallic film 2.Parent metal can be made of the alloy that for example contains iron.Have, parent metal 3 also can be made of superhard alloy that with the tungsten carbide is principal component etc. again.When adopting superhard alloy, the resin-bonded superabrasive wheel 100 after using can be utilized again.
Metallic film 2 utilizes spraying plating to handle and is arranged on the outer peripheral face 33 of parent metal 3.Metallic film 2 contains copper as principal component, also contains the oxidized cupric oxide of a part of this copper.Also have, metallic film 2 also can not contain cupric oxide, and is fine copper.In addition, because metallic film 2 is members of the superhard abrasive granulosa 1 of the parent metal 3 of all sides in engaging and outer circumferential side, thereby so long as superhard abrasive granulosa 1 and the good material of parent metal 3 connecting airtight property, any materials all can be included in the copper that constitutes metallic film 2.
Superhard abrasive granulosa 1 has constituting by resinoid bond maintenance super-hard abrasive.As super-hard abrasive, can adopt diamond or cubic boron nitride (cBN).Outer peripheral face 21 at metallic film 2 is provided with superhard abrasive granulosa 1.The thickness of parent metal 3 (32 the distance from upper surface 31 to lower surface) t1 is not particularly limited, also can be for below the 1mm.
Next, the manufacture method about the resin-bonded superabrasive wheel of Figure 1 and Figure 2 describes.Fig. 3～Fig. 7 is in order to the figure of explanation according to the manufacture method of the superabrasive wheel of this working of an invention mode 1.With reference to Fig. 3, at first prepare parent metal 3.Parent metal 3 is a disc-shape, is formed on the shape that its central part is provided with through hole 38.
With reference to Fig. 4, at the upper surface and the lower surface sectional fixture 51,52 of parent metal 3.Utilize anchor clamps 51,52 to cover upper surface and lower surface.The area of anchor clamps 51,52 equals the area of upper surface and lower surface.Outer peripheral face as the side exposes.
With reference to Fig. 5, in through hole 38, insert axle 53, axle 53 is rotated to direction shown in the arrow R.Thereby parent metal 3 that engages with axle 53 and anchor clamps 51,52 also rotate to direction shown in the arrow R.At this moment, from nozzle 54 to outer peripheral face 33 jet copper.Handle at outer peripheral face 33 formation metallic films via this spraying plating.
With reference to Fig. 6, behind the formation metallic film 2, with metal pattern 61,62,63,64 fixing base metals 3.Under this state, dispose super-hard abrasive and resinoid bond contiguously with the outer peripheral face 21 of metallic film 2, form superhard abrasive granulosa 1 thereby it is exerted pressure with metal pattern 65.
With reference to Fig. 7, the metal pattern 61～65 of dismantling, thus finish the resin-bonded superabrasive wheel 100 that peripheral part is provided with superhard abrasive granulosa 1.
(embodiment 2)
Utilize Fig. 8～Figure 13, describe about resin-bonded superabrasive wheel according to this working of an invention mode 2.With reference to Fig. 8, has flange portion 35 according to the parent metal 3 of embodiment 2.Flange portion 35 is external diameter parts bigger than other parts, at the outer peripheral face 33 formation metallic films of flange portion 35.
With reference to Fig. 9, that parent metal 3 is chimeric mutually with anchor clamps 51,52 and axle 53.Make the outer peripheral face 33 of the flange portion 35 of parent metal 3 be exposed to the outside.This state on one side rotary substrate metal 3 on one side from nozzle 54 to outer peripheral face 33 metallings.
With reference to Figure 10, the result that spraying plating is handled forms metallic film 2 on outer peripheral face 33 surfaces.
With reference to Figure 11, the parent metal 3 that has formed metallic film 2 is fixed in the metal pattern 61,62,64,65.
With reference to Figure 12 and Figure 13,, thereby their cementations are formed superhard abrasive granulosa 1 at inner super-hard abrasive and the resinoid bond of filling of metal pattern.That is,, comprise parent metal 3 with outer peripheral face 33 according to the resin-bonded superabrasive wheel 100 of embodiment 1 and 2; Outer peripheral face 33 at parent metal 3 utilizes spraying plating to handle the metallic film with outer peripheral face 21 2 that forms; Be arranged on metallic film 2 outer peripheral face 21, contain the superhard abrasive granulosa 1 of resinoid bond and super-hard abrasive.Metallic film 2 contains copper and cupric oxide.
Resinoid bond can contain polyimide resin.Cupric oxide can exist in the near interface deflection of metallic film 2 and superhard abrasive granulosa 1.Parent metal 3 can contain superhard alloy.The molecule that constitutes resinoid bond can contain aerobic as inscape.
According to the manufacture method of the resin-bonded superabrasive wheel 100 of this invention, the outer peripheral face 33 that is included in parent metal 3 utilizes spraying plating to handle the operation that forms the metallic film 2 with outer peripheral face 21; Form the operation of the superhard abrasive granulosa 1 that contains resinoid bond and super-hard abrasive at the outer peripheral face 21 of metallic film 2.Form the operation of metallic film 2, can be included in and utilize spraying plating to handle the situation that forms metallic film 2 in the inert gases such as nitrogen and argon, the manufacture method of described resin-bonded superabrasive wheel can also be included in and form after the metallic film 2, forms before the superhard abrasive granulosa 1, and metallic film 2 is implemented the operation on heat treatments, oxidized metal film 2 surfaces.The thickness of preferred substrate metal 3 is below the 1mm.
The manufacture method of resin-bonded superabrasive wheel, comprise: cover disc-shapes and have the upper surface 31 and the lower surface 32 of the parent metal 3 of upper surface 31, lower surface 32 and outer peripheral face 33 with anchor clamps 51,52, expose outer peripheral face 33 and on this outer peripheral face that exposes 33, utilize spraying plating to handle the operation that forms the metallic film 2 that contains copper and cupric oxide; Form the operation of the superhard abrasive granulosa 1 that contains resinoid bond and super-hard abrasive contiguously with metallic film 2.
Owing to utilize spraying plating to form metallic film 2, can only form metallic film 2 at the position of necessity.Thereby, can after using parent metal 3, clean outer peripheral face 33 and re-use, thus the life-span that can improve parent metal.
(comparative example)
With reference to Figure 14～16, describe about manufacture method according to the superabrasive wheel of comparative example.In the comparative example,, form mask 112 at upper surface 31 and lower surface 32 as Figure 14 and shown in Figure 15.
With reference to Figure 16, the parent metal 3 that has formed mask 112 is immersed in the plating solution 113, utilize axle 114 rotary substrate metals 3.Thereby, on parent metal 3, form metallic film.
In the formation of this metallic film that has used plating, there is the formation problem consuming time of mask 112.
Embodiment 1
Adopt the parent metal of the carbon steels for machine structural purposes of diameter 140mm, utilize arc spraying to form the copper layer of thick 20～30 μ m at its outer peripheral face.The surface roughness of the copper layer of this moment, the result who measures with the accurate surface roughness meter surfcom1400 that makes in Tokyo is 4.3 μ mRa～4.7 μ mRa.Use the powder stock of polyimide resin as bond material, produced resin-bonded superabrasive wheel.The spraying plating condition is as shown in table 1.Parent metal is packed on the base plate of metal pattern, on parent metal, puts the core with the roughly the same diameter of parent metal, in the gap of housing and core, fill the material powder of abrasive grain layer, put drift from it face pressurize with low pressure.Thereafter, on one side apply from drift top regulation pressure, keep its pressure, in about 30 minutes, be heated to 400 ℃ on one side from room temperature, thereafter, slowly cooling.
Embodiment 2
Utilize the method identical to make resin-bonded superabrasive wheel with embodiment 1.
Wherein, the result of the surface roughness of mensuration parent metal is 6 μ mRa～7 μ mRa.
Embodiment 3
Utilize the method identical to make resin-bonded superabrasive wheel with embodiment 1.
Wherein, the result of the surface roughness of mensuration parent metal is 1.3 μ mRa～1.6 μ mRa.
[table 1]
The parent metal rotating speed 200/min
The nozzle feed speed 900mm/min
The spraying plating distance 120mm
Voltage 45V
Electric current 50A
The wire feed speed 1.5m/min
Wire diameter 1.2mm
Comparative example 1
Adopt the copper parent metal, utilize the method identical to make resin-bonded superabrasive wheel with embodiment 1.
Wherein, do not form copper layer, but on parent metal, directly engaged abrasive grain layer based on arc spraying.
Comparative example 2
The parent metal of carbon steels for machine structural purposes is implemented the copper facing of thickness 10 μ m, utilize the method identical to make resin-bonded superabrasive wheel with embodiment 1.
Comparative example 3
In the preparation method of the resin bond wheel of embodiment 1, parent metal is not packed in the metal pattern, and the annular abrasive grain layer that only is shaped adopts the epoxide resin adhesive of all the time using to engage with the aluminum parent metal that other approach are made.
As the abrasive grain layer portion of the resin-bonded superabrasive wheel of above making, be provided with 16 place's groovings circumference in equal parts, formed 16 segments.For bond strength, be from the pressure head of the side butt universal testing machine of each segment, carried out the compression shear test.The value of bond strength, each emery wheel have been calculated the mean value at 16 places.
The result is as shown in table 2.Embodiment 1 compares with comparative example 1 and 3, has obtained high strength.In addition, embodiment 2 and embodiment 3 are that the surface roughness of copper layer has some asynchronous results, but, have all obtained to have the result of sufficient intensity.On the other hand, comparative example 2 is to replace spraying plating and utilize plating to form the situation of copper layer, obtains the low result of strength ratio embodiment 1～3.
[table 2]
Bond strength kgf/mm 2
Embodiment 1 4.0
Embodiment 2 3.9
Embodiment 3 3.5
Comparative example 1 2.7
Comparative example 2 2.7
Comparative example 3 2.5
(the sample checking of embodiment 1 and comparative example 2)
Adopt X-ray diffraction to investigate the copper in the metallic film of in embodiment 1 and comparative example 2, making and the distribution proportion of cupric oxide.Its result as shown in figure 17.
As can be seen from Figure 17, in the sample of the embodiment 1 that utilizes the spraying plating processing to form, there are Cu and Cu 2O contains cupric oxide.
Relative with it, in plating spare (comparative example 2), do not contain cupric oxide as can be known.
Next, carried out probe about the concentration of the cupric oxide in the metallic film of making among the embodiment 1.Figure 18 is the curve of the distribution of the cupric oxide in the expression metallic film 2.With reference to Figure 18 as can be known, rise in the concentration of the interface oxidation copper of metallic film 2 and superhard abrasive granulosa 1, the cupric oxide deflection is present in the interface.
Again the formation in the superhard abrasive granulosa 1 is investigated.Its result as shown in figure 19.Can confirm that as shown in figure 19 super-hard abrasive 1001 is by resinoid bond 1002 combinations.
In resinoid bond 1002, except abrasive particles such as diamond, CBN, can also contain the hard particles of metal dust, carbide or nitride and kollag particle etc. as filler.
As metal dust, can enumerate Cu, Ag, Sn, Ni, Au etc.From viewpoints such as cost and effects, particularly preferably be Cu, Ag or their alloy.Perhaps also the metal dust more than 2 kinds can be mixed and add.
As the hard particles of carbide or nitride, can in resinoid bond, contain from SiC, Si 3N 4, Cr 2O 3, Al 2O 3, SiO 2Deng in the hard particles more than a kind or 2 kinds selected as other fillers.By containing such hard particles, the mar proof of resinoid bond improves, and obtains to prolong the effect in superabrasive wheel life-span.
As other fillers, can in resinoid bond, contain the kollag particle.As this kollag, can enumerate fluororesin, hBN, calcirm-fluoride, graphite, MoS such as polytetrafluoroethylene (PTFE) 2Deng.By adding kollag particle such more than a kind or 2 kinds, can obtain to reduce abrasive grain layer and be ground the friction of material, the effect that reduces to grind resistance.
Embodiment 4
According to the manufacture method of embodiment 1, made sample 1～8 with arc spraying.About sample 1～8, utilize following determinator and condition determination, adopt X-ray diffraction to investigate the Cu in the sample 2The ratio of (111) face of (111) face of O and Cu.
Determinator
Rint-1500 (リ ガ Network system)
Condition determination
Use X ray: Cu-K α (lift-launch monochromator)
Shooting condition: 50kV, 200mA
Optical system: concentric method
Slit system: DS1 °
RS 0.15mm
SS 1°
Sweep speed: 6 °/min
Stride: 0.02 °
Mode determination: θ-2 θ method
Its result is as shown in table 3.
[table 3]
Sample No. Cu 2O (111) (integrated intensity) Cu (111) (integrated intensity) Cu 2O(111)/ {Cu 2O (111)+Cu (111) } ratio
1 281102 1149225 0.197
2 244213 953971 0.204
3 248183 1042261 0.192
4 221693 845997 0.208
5 199101 928923 0.177
6 229214 986069 0.189
7 242764 1026982 0.191
8 220236 937613 0.190
Mean value - - 0.194
Standard deviation (1 σ) - - 0.01
As shown in Table 3, if Cu 2O (111)/{ Cu (111)+Cu 2O (111) } ratio be more than 0.15 below 0.25, then can obtain excellent characteristic.
(utilizability on the industry)
As mentioned above, resin-bonded superabrasive wheel of the present invention, the excellent effect of realization is compared with the existing method of utilizing plating to form the copper layer, obtains stable high bond strength, therefore, obtain long-life and high performance resin-bonded superabrasive wheel. Particularly in the resin-bonded superabrasive wheel that uses polyimide resin, owing to realize remarkable high-performance, long-life, therefore, can expect to make huge contribution in the integral industrial circle of attrition process.
Claims (according to the modification of the 19th of treaty)
1. a resin-bonded superabrasive wheel (100), its surface in parent metal (3) (33) is provided with and utilizes spraying plating to handle the metallic film (2) that forms, surface (21) in described metallic film (2) has engaged superhard abrasive granulosa (1), this resin-bonded superabrasive wheel is characterised in that
Described metallic film (2) is a copper.
2. (after the revisal) resin-bonded superabrasive wheel according to claim 1 is characterized in that,
Described spraying plating is treated to arc spraying,
The rotating speed of parent metal is more than the 20/min, in the 600/min,
The feed speed of nozzle is more than the 300mm/min, in the 1000mm/min,
The spraying plating distance is more than the 80mm, below the 150mm,
Wire diameter is more than the 1.0mm, below the 1.6mm,
Voltage between wire is more than the 30V, below the 50V,
Electric current is more than the 40A, below the 80A.
3. resin-bonded superabrasive wheel according to claim 1 is characterized in that,
The thickness of described metallic film (2) is more than the 5 μ m, in the 1mm.
4. resin-bonded superabrasive wheel according to claim 1 is characterized in that,
The bond material of described superhard abrasive granulosa (1) is a polyimide resin.
5. (after the revisal) resin-bonded superabrasive wheel according to claim 1 is characterized in that,
The material of described parent metal (3) is any of ferrous material, titanium alloy or duralumin.
6. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Preparation has the operation of the parent metal (3) of surface (33); With
Utilize on the surface (33) of parent metal (3) that spraying plating handle to form that thickness is more than the 5 μ m, 1mm is with the operation of interior copper film (2).
7. (deletion)
8. resin-bonded superabrasive wheel is characterized in that possessing:
Parent metal (3) with surface (33);
Utilize spraying plating to handle the metallic film with surface (21) (2) that forms on the surface (33) of described parent metal (3); With
Be arranged on described metallic film (2) surface (21), contain the superhard abrasive granulosa (1) of resinoid bond (1002) and super-hard abrasive (1001), and,
Metallic film (2) contains copper and cupric oxide.
9. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Described resinoid bond (1002) contains polyimide resin.
10. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Described parent metal (3) contains superhard alloy.
11. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Constitute the polyimide resin of described resinoid bond (1002), contain aerobic as inscape.
12. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
The X-ray diffraction intensity Cu of (111) face of described cupric oxide 2The ratio Cu of the X-ray diffraction intensity of (111) face of O (111) and described copper 2O (111)/{ Cu (111)+Cu 2O (111) } be more than 0.15, below 0.25.
13. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Utilize spraying plating to handle the operation that forms metallic film (2) with surface (21) on the surface (33) of parent metal (3); With
Form the operation of the superhard abrasive granulosa (1) that contains resinoid bond (1002) and super-hard abrasive (1001) on the surface (21) of described metallic film (2).
14. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
Form the operation of described metallic film (2), be included in and utilize spraying plating to handle the situation that forms described metallic film (2) in the inert gas, the manufacture method of resin-bonded superabrasive wheel also be included in form described metallic film (2) afterwards, form described superhard abrasive granulosa (1) before, described metallic film (2) is implemented heat treated operation.
15. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
Described parent metal (3) contains superhard alloy.
16. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
The thickness of described parent metal (3) is below the 1mm.
17. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Cover disc-shape and have the upper surface (31) and the lower surface (32) of the parent metal (3) of upper surface (31), lower surface (32) and outer peripheral face (33) with anchor clamps (51,52), expose outer peripheral face (33) and on this outer peripheral face that exposes (33), utilize spraying plating to handle the operation that forms the metallic film (2) that contains copper and cupric oxide; With
Form the operation of the superhard abrasive granulosa (1) that contains resinoid bond (1002) and super-hard abrasive (1001) contiguously with described metallic film (2).

Claims (17)

1. a resin-bonded superabrasive wheel (100), its surface in parent metal (3) (33) is provided with and utilizes spraying plating to handle the metallic film (2) that forms, surface (21) in described metallic film (2) has engaged superhard abrasive granulosa (1), this resin-bonded superabrasive wheel is characterised in that
Described metallic film (2) is a copper.
2. resin-bonded superabrasive wheel according to claim 1 is characterized in that,
Described spraying plating is treated to arc spraying,
The rotating speed of parent metal is more than the 20/min, in the 600/min,
The feed speed of nozzle is more than the 300mm/min, in the 1000mm/min,
The spraying plating distance is more than the 80mm, below the 150mm,
The wire feed speed is more than the 0.8m/min, in the 2.4mm,
Wire diameter is more than the 1.0mm, below the 1.6mm,
Voltage between wire is more than the 30V, below the 50V,
Electric current is more than the 40A, below the 80A.
3. resin-bonded superabrasive wheel according to claim 1 is characterized in that,
The thickness of described metallic film (2) is more than the 5 μ m, in the 1mm.
4. resin-bonded superabrasive wheel according to claim 1 is characterized in that,
The bond material of described superhard abrasive granulosa (1) is a polyimide resin.
5. resin-bonded superabrasive wheel according to claim 1 is characterized in that, the material of described parent metal (3) is ferrous material, titanium alloy, duralumin.
6. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Preparation has the operation of the parent metal (3) of surface (33); With
Utilize on the surface (33) of parent metal (3) that spraying plating handle to form that thickness is more than the 5 μ m, 1mm is with the operation of interior copper film (2).
7. the manufacture method of resin-bonded superabrasive wheel according to claim 6 is characterized in that,
Adopt the described spraying plating of claim 2 to handle.
8. resin-bonded superabrasive wheel is characterized in that possessing:
Parent metal (3) with surface (33);
Utilize spraying plating to handle the metallic film with surface (21) (2) that forms on the surface (33) of described parent metal (3); With
Be arranged on described metallic film (2) surface (21), contain the superhard abrasive granulosa (1) of resinoid bond (1002) and super-hard abrasive (1001), and,
Metallic film (2) contains copper and cupric oxide.
9. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Described resinoid bond (1002) contains polyimide resin.
10. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Described parent metal (3) contains superhard alloy.
11. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
Constitute the polyimide resin of described resinoid bond (1002), contain aerobic as inscape.
12. resin-bonded superabrasive wheel according to claim 8 is characterized in that,
The X-ray diffraction intensity Cu of (111) face of described cupric oxide 2The ratio Cu of the X-ray diffraction intensity of (111) face of O (111) and described copper 2O (111)/{ Cu (111)+Cu 2O (111) } be more than 0.15, below 0.25.
13. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Utilize spraying plating to handle the operation that forms metallic film (2) with surface (21) on the surface (33) of parent metal (3); With
Form the operation of the superhard abrasive granulosa (1) that contains resinoid bond (1002) and super-hard abrasive (1001) on the surface (21) of described metallic film (2).
14. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
Form the operation of described metallic film (2), be included in and utilize spraying plating to handle the situation that forms described metallic film (2) in the inert gas, the manufacture method of resin-bonded superabrasive wheel also be included in form described metallic film (2) afterwards, form described superhard abrasive granulosa (1) before, described metallic film (2) is implemented heat treated operation.
15. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
Described parent metal (3) contains superhard alloy.
16. the manufacture method of resin-bonded superabrasive wheel according to claim 13 is characterized in that,
The thickness of described parent metal (3) is below the 1mm.
17. the manufacture method of a resin-bonded superabrasive wheel is characterized in that, comprising:
Cover disc-shape and have the upper surface (31) and the lower surface (32) of the parent metal (3) of upper surface (31), lower surface (32) and outer peripheral face (33) with anchor clamps (51,52), expose outer peripheral face (33) and on this outer peripheral face that exposes (33), utilize spraying plating to handle the operation that forms the metallic film (2) that contains copper and cupric oxide; With
Form the operation of the superhard abrasive granulosa (1) that contains resinoid bond (1002) and super-hard abrasive (1001) contiguously with described metallic film (2).
CN 200680001534 2005-11-28 2006-11-22 Resin-bonded superabrasive wheel and process for producing the same Pending CN101090803A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP341872/2005 2005-11-28
JP2005341872 2005-11-28

Publications (1)

Publication Number Publication Date
CN101090803A true CN101090803A (en) 2007-12-19

Family

ID=38067209

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200680001534 Pending CN101090803A (en) 2005-11-28 2006-11-22 Resin-bonded superabrasive wheel and process for producing the same

Country Status (4)

Country Link
JP (1) JPWO2007060984A1 (en)
CN (1) CN101090803A (en)
TW (1) TW200730303A (en)
WO (1) WO2007060984A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109195747A (en) * 2016-05-27 2019-01-11 联合材料公司 Super-abrasive grinding wheel
TWI661903B (en) * 2018-06-27 2019-06-11 National Taipei University Of Technology Abrasive wheel and method and system for forming the same
CN112677060A (en) * 2020-12-15 2021-04-20 珠海市巨海科技有限公司 Resin binder superhard grinding wheel and manufacturing method thereof
CN113696109A (en) * 2021-09-15 2021-11-26 郑州磨料磨具磨削研究所有限公司 Grinding wheel for grinding insulated bearing and forming method thereof

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5360595B2 (en) * 2007-07-31 2013-12-04 日立金属株式会社 Cu-based wiring film
JP7431105B2 (en) * 2020-05-28 2024-02-14 株式会社日立産機システム compressor
TW202330452A (en) 2021-10-05 2023-08-01 日商旭化成股份有限公司 Method of manufacturing high-purity diaryl carbonate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63300870A (en) * 1987-05-28 1988-12-08 Disco Abrasive Syst Ltd Manufacture of blade
JPH04210380A (en) * 1990-10-13 1992-07-31 Nippon Alum Co Ltd Diamond grinding wheel and manufacture thereof
JP3029466B2 (en) * 1990-12-25 2000-04-04 株式会社日本アルミ Diamond whetstone and method of manufacturing the same
JP3135086B2 (en) * 1992-04-17 2001-02-13 ノリタケダイヤ株式会社 Resin bond wheel manufacturing method
JP2565622B2 (en) * 1992-06-24 1996-12-18 株式会社ニートレックス本社 Grinding stone manufacturing method
JP3075515B2 (en) * 1996-11-25 2000-08-14 大阪ダイヤモンド工業株式会社 Superabrasive grindstone and method of manufacturing the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109195747A (en) * 2016-05-27 2019-01-11 联合材料公司 Super-abrasive grinding wheel
CN109195747B (en) * 2016-05-27 2020-09-22 联合材料公司 Super-hard abrasive grinding wheel
US11123841B2 (en) 2016-05-27 2021-09-21 A.L.M.T. Corp. Super-abrasive grinding wheel
TWI661903B (en) * 2018-06-27 2019-06-11 National Taipei University Of Technology Abrasive wheel and method and system for forming the same
CN112677060A (en) * 2020-12-15 2021-04-20 珠海市巨海科技有限公司 Resin binder superhard grinding wheel and manufacturing method thereof
CN113696109A (en) * 2021-09-15 2021-11-26 郑州磨料磨具磨削研究所有限公司 Grinding wheel for grinding insulated bearing and forming method thereof
CN113696109B (en) * 2021-09-15 2022-11-01 郑州磨料磨具磨削研究所有限公司 Grinding wheel for grinding insulated bearing and forming method thereof

Also Published As

Publication number Publication date
WO2007060984A1 (en) 2007-05-31
TW200730303A (en) 2007-08-16
JPWO2007060984A1 (en) 2009-05-07

Similar Documents

Publication Publication Date Title
CN101090803A (en) Resin-bonded superabrasive wheel and process for producing the same
US5641921A (en) Low temperature, low pressure, ductile, bonded cermet for enhanced abrasion and erosion performance
US7435276B2 (en) Abrasive particles having coatings with tortuous surface topography
KR100328108B1 (en) Semiconductor substrate polishing pad dresser, method of manufacturing the same, and chemicomechanical polishing method using the same dresser
EP0480878B1 (en) Cubic boron nitride (CBN) abrasive tool
KR20130086214A (en) Bonded abrasive article and method of forming
CN109023342B (en) Gradient ceramic coating micro-texture self-lubricating cutter and preparation method thereof
KR20140072088A (en) Abrasive article and method of forming
JP6420272B2 (en) Sliding member
US10946499B2 (en) Bonded abrasive article and method of grinding
KR20130062998A (en) Bonded abrasive articles, method of forming such articles, and grinding performance of such articles
US9266219B2 (en) Bonded abrasive article and method of grinding
WO2014106198A1 (en) Abrasive article having a core of an organic material and a bonded abrasive body comprising a bond material
CN109015422A (en) A kind of resinoid bond abrasive cut-off wheel of high intensity
JP2002205272A (en) Super abrasive grain tool and its manufacturing method
CN109016196B (en) Electroplated diamond wire saw
CN106493635A (en) A kind of surface has the diadust grinding block of trench structure and processing method
JP5143607B2 (en) Vacuum adsorption device
JP3398626B2 (en) Hard tool
US6203417B1 (en) Chemical mechanical polishing tool components with improved corrosion resistance
JPH0730363B2 (en) Hard sintered body cutting tool
CN103057206B (en) A kind of super wear-resistant ceramic alloy coat scraper and manufacture method thereof
JP5150931B2 (en) Thin blade and method for manufacturing the same
JP2009190155A (en) Polishing tool
CN206550880U (en) A kind of diadust grinding block

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20071219