JP3398626B2 - Hard tool - Google Patents
Hard toolInfo
- Publication number
- JP3398626B2 JP3398626B2 JP23880599A JP23880599A JP3398626B2 JP 3398626 B2 JP3398626 B2 JP 3398626B2 JP 23880599 A JP23880599 A JP 23880599A JP 23880599 A JP23880599 A JP 23880599A JP 3398626 B2 JP3398626 B2 JP 3398626B2
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- metal
- hard tool
- brazing material
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Turning (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【発明の属する技術分野】本発明はダイヤモンド砥粒、
ＣＢＮ砥粒などの超砥粒とろう材とからなる砥材層を基
材上に形成した硬質工具に関する。TECHNICAL FIELD The present invention relates to a diamond abrasive grain,
The present invention relates to a hard tool in which an abrasive layer composed of superabrasive grains such as CBN abrasive grains and a brazing material is formed on a base material.
【０００２】[0002]
【従来の技術】ワークセンタやセンタレスブレードなど
の研磨、研削用の工具類として、ダイヤモンド砥粒やＣ
ＢＮ砥粒などの超砥粒とマトリックスボンドからなる砥
材層を基材上に形成した硬質工具が用いられている。こ
のような硬質工具に形成される砥材層としては、工具類
の寿命、強度、精度を確保するために、砥粒の保持力、
耐摩耗性、緻密性、表面の平滑性、耐熱性などの特性が
要求され、とくに表面の平滑性、耐摩耗性を維持する点
から砥粒の保持力が重要視される。2. Description of the Related Art Diamond abrasive grains and C are used as tools for polishing and grinding work centers and centerless blades.
A hard tool is used in which an abrasive material layer composed of super abrasive particles such as BN abrasive particles and a matrix bond is formed on a base material. As the abrasive layer formed on such a hard tool, the holding force of the abrasive grains in order to secure the service life, strength, and accuracy of the tools,
Properties such as wear resistance, compactness, surface smoothness, and heat resistance are required, and the holding force of the abrasive grains is particularly important from the viewpoint of maintaining the surface smoothness and wear resistance.
【０００３】以下、ワークセンタを例にとって説明す
る。研削や孔開けなど様々な加工が可能な旋盤や円筒研
削盤においては、被加工物を正確に芯出しすることが重
要であり、芯出しのためのワークセンタが用いられてい
る。ワークセンタの先端部は切削または研削時に強い力
が集中的に加わるため磨耗しやすく、この摩耗を軽減す
る対策として、シャンク先端部に円錐状に形成したダイ
ヤモンド焼結体のチップを嵌め込んだワークセンタが実
用化されている。本出願人もダイヤモンド焼結体のチッ
プを用いたワークセンタとして、特開平９−２０１７０
３号公報、特開平９−２０１７０４号公報、特開平９−
２０１７０５号公報に記載のワークセンタを提案してい
る。A work center will be described below as an example. In a lathe and a cylindrical grinder capable of various processing such as grinding and drilling, it is important to accurately center a workpiece, and a work center for centering is used. At the tip of the work center, strong force is concentrated at the time of cutting or grinding, so it is easily worn. The center has been put to practical use. The applicant of the present invention also discloses, as a work center using chips of a diamond sintered body, JP-A-9-20170.
No. 3, JP-A-9-201704, JP-A 9-
A work center described in Japanese Patent Publication No. 2011705 is proposed.
【０００４】[0004]
【発明が解決しようとする課題】ところで、上記したよ
うなダイヤモンド焼結体は、超高圧、高温下で焼結する
ことにより製作されるものであり、その製作に大がかり
な設備を必要とし、製作コストも高いという難点があ
る。また、焼結体の形状は円筒状や平板上のものに限ら
れ、円錐状などの立体的な形状の焼結体を得ることが難
しいので、円錐状に整形するために後加工が必要であ
る。さらに、寸法の面でも制約があり、砥粒層の厚さが
５ｍｍを超える大きさのものは製作が困難である。By the way, the above-mentioned diamond sintered body is manufactured by sintering under ultrahigh pressure and high temperature, and requires large-scale equipment for its manufacture. There is a drawback that the cost is high. In addition, the shape of the sintered body is limited to that of a cylinder or a flat plate, and it is difficult to obtain a sintered body having a three-dimensional shape such as a conical shape, so post-processing is required to shape it into a conical shape. is there. Further, there are restrictions in terms of size, and it is difficult to manufacture an abrasive grain layer having a thickness of more than 5 mm.
【０００５】これに対し、口径の大きいセンタ穴用のワ
ークセンタの場合にダイヤモンド焼結体の使用量を節減
するための方策として、尖端周辺部を金属質またはサー
メット系高剛性材で構成し、基体の尖端を除く傾斜周面
に焼結超砥粒層を接合したワークセンタが、特開平８−
５２６０２号公報に開示されている。このように、先端
部の一部のみにダイヤモンド焼結体を用いるようにする
ことによって、大型のワークセンタについてもダイヤモ
ンド焼結体の適用が可能となる。On the other hand, in the case of a work center for a center hole having a large diameter, as a measure for reducing the amount of diamond sintered body used, the tip peripheral portion is made of a metallic or cermet high rigidity material, A work center in which a sintered superabrasive grain layer is bonded to the inclined peripheral surface of the base body excluding the tip is disclosed in JP-A-8-
It is disclosed in Japanese Patent No. 52602. In this way, by using the diamond sintered body only for a part of the tip, the diamond sintered body can be applied to a large work center.
【０００６】しかしながら、ダイヤモンド焼結体自体の
問題として、砥粒の集中度が１５０程度以上の高集中度
の場合、砥粒とマトリックスの間の結合力が不十分なた
め、砥粒の脱落が生じやすく、耐摩耗性に欠けるという
という問題がある。また高集中度の場合、砥材層と基材
との熱膨張差により、界面からの剥離を生じやすいとい
う問題がある。これらの問題は上記のワークセンタに限
らず、他の工具類についても言えることである。However, as a problem of the diamond sintered body itself, when the concentration of the abrasive grains is as high as about 150 or more, the bonding force between the abrasive grains and the matrix is insufficient, and the abrasive grains fall off. There is a problem that it easily occurs and lacks wear resistance. Further, when the concentration is high, there is a problem that peeling from the interface is likely to occur due to the difference in thermal expansion between the abrasive layer and the base material. These problems apply not only to the above work center but also to other tools.
【０００７】本発明が解決すべき課題は、工具類の耐摩
耗性が要求される部分に形成される砥材層として、砥粒
とマトリックス、基材との間の結合力を高めるととも
に、砥材層と基材との熱膨張差による残留応力を緩和し
て、砥粒の脱落および砥材層の剥離を防止することにあ
る。The problem to be solved by the present invention is to increase the bonding force between the abrasive grains, the matrix and the base material as an abrasive layer formed on a portion of the tools that is required to have wear resistance, and The purpose is to reduce residual stress due to the difference in thermal expansion between the material layer and the base material and prevent the abrasive grains from falling off and the abrasive material layer from peeling off.
【０００８】[0008]
【課題を解決するための手段】本発明の硬質工具は、ダ
イヤモンド，ＣＢＮなどの超砥粒を炭化物形成元素で被
覆した砥粒と、Ｃｕ−Ｓｎ系、Ａｇ−Ｃｕ系、Ｎｉ系な
どのろう材に１〜１５質量％の活性金属を含有する活性
金属含有ろう材とからなる砥材層を、線膨張係数が４×
１０-6〜８×１０-6Ｋ-1の金属である基材上に形成した
ことを特徴とする。The hard tool of the present invention comprises an abrasive grain obtained by coating superabrasive grains such as diamond and CBN with a carbide-forming element, and Cu-Sn system, Ag-Cu system, Ni system, etc. The material has an abrasive layer made of an active metal-containing brazing material containing 1 to 15% by mass of active metal, and has a linear expansion coefficient of 4 ×.
It is characterized in that it is formed on a base material which is a metal of 10 −6 to 8 × 10 −6 K −1 .
【０００９】本発明の硬質工具においては、超砥粒を炭
化物形成元素で被覆した砥粒を用いたことによって、砥
材層を焼結する工程において砥粒被覆金属がろう材中に
拡散して、砥粒がろう材に強固に固着される。また、砥
材層を焼結する工程は従来のダイヤモンド焼結体の製作
時のような高温、高圧力を必要としないので、製造コス
トは安価であり、大型、立体的形状の砥材層を形成する
ことも容易である。In the hard tool of the present invention, since the abrasive grains in which the superabrasive grains are coated with the carbide forming element are used, the abrasive grain coating metal diffuses into the brazing material in the step of sintering the abrasive layer. , The abrasive grains are firmly fixed to the brazing material. In addition, since the process of sintering the abrasive layer does not require high temperature and high pressure as in the case of manufacturing a conventional diamond sintered body, the manufacturing cost is low, and a large, three-dimensional abrasive layer can be formed. It is also easy to form.
【００１０】砥粒に被覆する炭化物形成元素として好ま
しいのは、ＴｉまたはＣｒである。炭化物形成元素とし
てはＴｉ、Ｃｒ以外にＶ、Ｆｅ、Ｗ、Ｓｉ、などがある
が、砥粒への被覆のしやすさ、被覆層の結合力、耐熱性
などの点から、とくにＴｉまたはＣｒが望ましい。The preferred carbide-forming element for coating the abrasive grains is Ti or Cr. As the carbide-forming element, there are V, Fe, W, Si, etc. in addition to Ti and Cr, but Ti or Cr is particularly preferable in view of ease of coating the abrasive grains, bonding force of the coating layer, heat resistance and the like. Is desirable.
【００１１】また本発明の硬質工具においては、１〜１
５質量％の活性金属を含有したろう材を用いたことによ
って、砥材層を焼結する工程において、ろう材中の活性
金属が砥粒のＣと反応して化学的に結合するので、砥粒
がより強固に基材に固着される。Further, in the hard tool of the present invention, 1 to 1
By using the brazing material containing 5% by mass of the active metal, in the step of sintering the abrasive layer, the active metal in the brazing material reacts with C of the abrasive grains and is chemically bonded. The particles are more firmly fixed to the base material.
【００１２】活性金属の含有量が１質量％より少ない
と、砥粒と反応する量が少なく、化学的結合が不十分と
なり、１５質量％を超えると、焼結が困難となり、ろう
材の強度が低下するので、活性金属の含有量は上記の範
囲内とする。If the content of the active metal is less than 1% by mass, the amount that reacts with the abrasive grains is small and the chemical bond is insufficient, and if it exceeds 15% by mass, the sintering becomes difficult and the strength of the brazing filler metal is increased. Therefore, the content of the active metal is set within the above range.
【００１３】活性金属としては、Ｔｉ、Ｖ、Ｃｒ、Ｆ
ｅ、Ｍｏ、Ｗ、Ｓｉ、Ｚｒのいずれか１つ以上を用いる
ことができる。このような活性金属を用いることによ
り、耐摩耗性、耐熱性、強度に優れた砥材層を得ること
ができる。とくに活性金属としてＴｉやＣｒなどの炭化
物形成元素を含むろう材を用いると、焼結工程におい
て、ろう材中の活性金属が砥粒のＣと反応しやすくな
り、化学的結合が充分に起こるため、砥粒保持力が高
く、砥粒の脱落が起こりにくくなる。ろう材の基本成分
系はＣｕ−Ｓｎ系、Ａｇ−Ｃｕ系、Ｎｉ系などとし、こ
れに必要に応じてＴｉ、Ｃｒ、Ｖなどを添加することが
できる。As the active metal, Ti, V, Cr, F
Any one or more of e, Mo, W, Si, and Zr can be used. By using such an active metal, an abrasive layer having excellent wear resistance, heat resistance, and strength can be obtained. In particular, when a brazing material containing a carbide-forming element such as Ti or Cr is used as the active metal, the active metal in the brazing material easily reacts with C of the abrasive grains during the sintering process, and chemical bonding occurs sufficiently. Since the abrasive grain holding power is high, the abrasive grains are less likely to fall off. The basic component system of the brazing material is Cu-Sn system, Ag-Cu system, Ni system, and the like, and Ti, Cr, V, etc. can be added thereto if necessary.
【００１４】さらに本発明の硬質工具は、基材として線
膨張係数が４×１０-6〜８×１０-6Ｋ-1の金属を用いた
ことによって、砥材層と基材との熱膨張差による残留応
力が小さくなり、基材からの砥材層の剥離が生じにくく
なる。上記した砥粒とろう材の混合物の線膨張係数は８
×１０-6〜１０×１０-6Ｋ-1の範囲であるから、これに
近い線膨張係数の金属を基材として用いることにより、
熱膨張差による残留応力を小さくすることができる。こ
のような金属としては、Ｆｅ−Ｎｉ−Ｃｏ系、ＷＣ−Ｃ
ｏ系などの金属を用いることができるが、とくに砥材層
の線膨張係数に近いＦｅ−Ｎｉ−Ｃｏ系金属（コバー
ル）を用いることが望ましい。Furthermore, the hard tool of the present invention uses a metal having a linear expansion coefficient of 4 × 10 -6 to 8 × 10 -6 K -1 as the base material, so that the thermal expansion of the abrasive layer and the base material. The residual stress due to the difference becomes small, and peeling of the abrasive layer from the substrate hardly occurs. The coefficient of linear expansion of the above-mentioned mixture of abrasive grains and brazing material is 8
Since it is in the range of x10 -6 to 10x10 -6 K -1 , by using a metal having a linear expansion coefficient close to this as the base material,
The residual stress due to the difference in thermal expansion can be reduced. Examples of such a metal include Fe-Ni-Co type and WC-C.
Although a metal such as o-based metal can be used, it is particularly preferable to use a Fe—Ni—Co-based metal (kovar) having a linear expansion coefficient close to that of the abrasive layer.
【００１５】本発明にかかる硬質工具は、概略次のよう
な手順により製作することができる。
ダイヤモンド砥粒（２０〜３０μｍ）にＴｉ（または
Ｃｒ）を被覆した砥粒を準備する。
ろう材として、Ｃｕ６０〜８０質量％、Ｓｎ１６〜２
０質量％、Ｔｉ２〜１５質量％、Ｚｒ２〜５質量％の活
性金属ろう材（金属粉）を準備する。
ろう材に砥粒を２５〜６０体積％混合する。
上記混合物をカーボン製の型に充填し、非酸化性雰囲
気中で９００〜１０００℃、３０〜６０分間、加圧しな
がら焼結する。The hard tool according to the present invention can be manufactured by the following procedure. The diamond abrasive grains (20 to 30 μm) coated with Ti (or Cr) are prepared. As a brazing material, Cu 60 to 80 mass%, Sn 16 to 2
An active metal brazing material (metal powder) of 0 mass%, Ti 2 to 15 mass% and Zr 2 to 5 mass% is prepared. Abrasive grains are mixed with the brazing material in an amount of 25 to 60% by volume. The mixture is filled in a carbon mold and sintered in a non-oxidizing atmosphere at 900 to 1000 ° C. for 30 to 60 minutes while applying pressure.
【００１６】[0016]
【発明の実施の形態】以下、本発明をワークセンタに適
用した実施形態について説明する。図１は実施形態にお
けるセンタ先端部を示す図で、（ａ）は砥材層形成前の
正面図、（ｂ）は砥材層形成後の正面（一部断面）図で
ある。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments in which the present invention is applied to a work center will be described below. 1A and 1B are diagrams showing a center tip end portion in an embodiment, FIG. 1A is a front view before formation of an abrasive layer, and FIG. 1B is a front view (partial cross section) after formation of an abrasive layer.
【００１７】本実施形態のワークセンタは、先端部外径
１０ｍｍ、先端角度６０度のワークセンタであり、前記
の製作手順にしたがって製作したものである。砥材層は
粒径３０μｍのダイヤモンド砥粒にＴｉを厚さ１μｍ被
覆した砥粒を用い、ろう材はＣｕ７７質量％、Ｓｎ１８
質量％にＴｉとＺｒをそれぞれ２．５質量％添加した金
属粉末を用いた。ダイヤモンド砥粒の混合比率は５０体
積％（集中度２００）とし、基材はＣｏ１７質量％、Ｎ
ｉ２９質量％、Ｆｅ５４質量％の組成で線膨張係数が５
×１０-6Ｋ-1のコバールを用いた。The work center of this embodiment is a work center having a tip outer diameter of 10 mm and a tip angle of 60 degrees, and is manufactured according to the above-described manufacturing procedure. The abrasive layer is made of diamond grains having a grain size of 30 μm and Ti coated with a thickness of 1 μm. The brazing material is Cu 77 mass%, Sn 18
A metal powder containing 2.5% by mass of Ti and Zr added to the mass% was used. The mixing ratio of diamond abrasive grains was 50% by volume (concentration degree 200), the base material was Co 17% by mass, and N was N.
The coefficient of linear expansion is 5 with a composition of i 29 mass% and Fe 54 mass%.
Kovar of × 10 -6 K -1 was used.
【００１８】基材であるシャンク１０の先端部１１は、
図１（ａ）に示すように、角度６０度の傾斜面を階段状
にして複数段の平面１２を形成している。このように階
段状にすることによって、同図（ｂ）に示すように、砥
材層２０との接合面積を大きくして接合強度を大きくす
ることができる。また図示していないが、階段状とする
のに代えて傾斜面に複数条の溝を形成しても、同様に接
合面積を大きくすることができる。The tip portion 11 of the shank 10 which is the base material is
As shown in FIG. 1A, the inclined surface having an angle of 60 degrees is stepped to form a plurality of flat surfaces 12. By forming the steps in this manner, the bonding area with the abrasive layer 20 can be increased and the bonding strength can be increased, as shown in FIG. Although not shown, the joining area can be similarly increased by forming a plurality of grooves on the inclined surface instead of forming the steps.
【００１９】本発明の効果を確認するために、上記実施
形態のワークセンタ（発明品）と、比較例として特開平
８−５２６０２号公報記載のダイヤモンド焼結体を材料
とするワークセンタを作成した（比較品）。これらのワ
ークセンタを旋盤に取り付けて耐用試験を行った。図２
に試験結果を示す。In order to confirm the effect of the present invention, a work center (invention product) of the above-mentioned embodiment and a work center made of a diamond sintered body described in JP-A-8-52602 as a comparative example were prepared. (Comparative product). These work centers were attached to a lathe for a durability test. Figure 2
The test results are shown in.
【００２０】〔試験条件〕 使用機械 ：両センター円筒研削盤 ワークセンタ：φ１０、先端角度６０度 被研削材 ：炭素鋼（Ｓ２５Ｃ）[Test conditions] Machine used: Double center cylindrical grinder Work center: φ10, tip angle 60 degrees Grinding material: Carbon steel (S25C)
【００２１】〔試験結果〕図２は比較品のワークセンタ
の耐用度指数を１００としたときの発明品のワークセン
タの耐用度指数を示す図である。ここで耐用度とは、素
材表面の形状が崩れ、工具交換に至るまでの使用時間を
もって表したものである。発明品のワークセンタは、砥
材層の剥離や割れが発生せず、比較品のワークセンタに
比して耐用度が２０％向上している。また、比較品に比
べて発明品は、製造装置、材料、製造方法の面で著しく
低コストで製造することができた。[Test Results] FIG. 2 is a diagram showing the durability index of the work center of the invention product when the durability index of the work center of the comparative product is 100. Here, the durability is represented by the usage time until the tool surface is deformed and the tool is replaced. The work center of the invention product did not cause peeling or cracking of the abrasive layer, and the durability was improved by 20% as compared with the work center of the comparative product. In addition, the invention product could be manufactured at a significantly lower cost than the comparative product in terms of manufacturing equipment, materials, and manufacturing method.
【００２２】[0022]
【発明の効果】本発明によって以下の効果を奏すること
ができる。According to the present invention, the following effects can be obtained.
【００２３】（１）超砥粒をＴｉ、Ｃｒなどの炭化物形
成元素で被覆した砥粒を用いたことによって、砥材層を
焼結する工程において砥粒被覆金属がろう材中に拡散し
て、砥粒がろう材に強固に固着される。また、砥材層を
焼結する工程は従来のダイヤモンド焼結体の製作時のよ
うな高温、高圧力を必要としないので、製造コストは安
価であり、大型、立体的形状の砥材層を形成することも
容易である。(1) By using the abrasive grains in which the superabrasive grains are coated with a carbide forming element such as Ti or Cr, the abrasive grain coating metal diffuses in the brazing material in the step of sintering the abrasive layer. , The abrasive grains are firmly fixed to the brazing material. In addition, since the process of sintering the abrasive layer does not require high temperature and high pressure as in the case of manufacturing a conventional diamond sintered body, the manufacturing cost is low, and a large, three-dimensional abrasive layer can be formed. It is also easy to form.
【００２４】（２）ろう材としてＴｉ、Ｖ、Ｃｒ、Ｆ
ｅ、Ｍｏ、Ｗ、Ｓｉ、Ｚｒなどの活性金属を特定量含有
させた活性金属含有ろう材を用いることにより、耐摩耗
性、耐熱性、強度に優れた砥材層を得ることができる。(2) Ti, V, Cr, F as a brazing material
By using an active metal-containing brazing material containing a specific amount of an active metal such as e, Mo, W, Si and Zr, an abrasive layer having excellent wear resistance, heat resistance and strength can be obtained.
【００２５】（３）基材として線膨張係数が４×１０-6
〜８×１０-6Ｋ-1の金属を用いることにより、砥材層と
基材との熱膨張差による残留応力を小さくすることがで
き、基材からの砥材層の剥離を防止することができる。(3) The base material has a linear expansion coefficient of 4 × 10 -6
By using a metal of up to 8 × 10 -6 K -1, the residual stress due to the difference in thermal expansion between the abrasive layer and the base material can be reduced, and peeling of the abrasive layer from the base material can be prevented. You can
【図１】 本発明の実施形態におけるセンタ先端部を示
す図で、（ａ）は砥材層形成前の正面図、（ｂ）は砥材
層形成後の正面（一部断面）図である。FIG. 1 is a diagram showing a center tip portion according to an embodiment of the present invention, in which (a) is a front view before formation of an abrasive layer and (b) is a front view (partial cross section) after formation of an abrasive layer. .
【図２】 耐用試験結果を示すグラフである。FIG. 2 is a graph showing durability test results.
１０ シャンク １１ シャンク先端部 １２ 平面 ２０ 砥材層 10 shank 11 shank tip 12 planes 20 Abrasive layer
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｂ２４Ｄ 3/06 Ｂ２４Ｄ 3/06 Ａ Ｃ (56)参考文献 特開 平９−85505（ＪＰ，Ａ) 特開 平９−201703（ＪＰ，Ａ) 特開 平９−201704（ＪＰ，Ａ) 特開 平９−201705（ＪＰ，Ａ) 特開 平５−245759（ＪＰ，Ａ) 特開 平６−32655（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B23B 23/00 B24D 3/00 B24D 3/02 B24D 3/06 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI B24D 3/06 B24D 3/06 AC (56) Reference JP-A-9-85505 (JP, A) JP-A-9-201703 (JP, A) JP 9-201704 (JP, A) JP 9-201705 (JP, A) JP 5-245759 (JP, A) JP 6-32655 (JP, A) (JP 58) Fields investigated (Int.Cl. 7 , DB name) B23B 23/00 B24D 3/00 B24D 3/02 B24D 3/06
Claims (4)
化物形成元素で被覆した砥粒と、Ｃｕ−Ｓｎ系、Ａｇ−
Ｃｕ系、Ｎｉ系などのろう材に１〜１５質量％の活性金
属を含有する活性金属含有ろう材とからなる砥材層を、
線膨張係数が４×１０-6〜８×１０-6Ｋ-1の金属である
基材上に一体焼結により形成した硬質工具。1. Abrasive grains in which superabrasive grains such as diamond and CBN are coated with a carbide-forming element, Cu--Sn system, Ag--
An abrasive layer composed of an active metal-containing brazing material containing 1 to 15% by mass of an active metal in a Cu-based or Ni-based brazing material,
A hard tool formed by integral sintering on a base material that is a metal having a linear expansion coefficient of 4 × 10 −6 to 8 × 10 −6 K −1 .
ある請求項１記載の硬質工具。2. The hard tool according to claim 1, wherein the carbide forming element is Ti or Cr.
Ｍｏ、Ｗ、Ｓｉ、Ｚｒのいずれか１つ以上である請求項
１または２記載の硬質工具。3. The active metal is Ti, V, Cr, Fe,
The hard tool according to claim 1, which is one or more of Mo, W, Si, and Zr.
る請求項１〜３のいずれかに記載の硬質工具。4. The hard tool according to claim 1, wherein the base material is a Fe—Ni—Co type metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23880599A JP3398626B2 (en) | 1999-08-25 | 1999-08-25 | Hard tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23880599A JP3398626B2 (en) | 1999-08-25 | 1999-08-25 | Hard tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001062601A JP2001062601A (en) | 2001-03-13 |
| JP3398626B2 true JP3398626B2 (en) | 2003-04-21 |
Family
ID=17035563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23880599A Expired - Fee Related JP3398626B2 (en) | 1999-08-25 | 1999-08-25 | Hard tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3398626B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4538716B2 (en) * | 2003-12-02 | 2010-09-08 | 義博 谷川 | Metal bond grindstone and its manufacturing method |
| JP4773069B2 (en) * | 2004-07-16 | 2011-09-14 | 旭ダイヤモンド工業株式会社 | Super abrasive tool for cutting |
| JP2012532767A (en) * | 2009-07-16 | 2012-12-20 | サンーゴバン アブレイシブズ，インコーポレイティド | Polishing tool with flat and consistent surface topography for conditioning of CMP pads and method of manufacturing the same |
| TWI613285B (en) | 2010-09-03 | 2018-02-01 | 聖高拜磨料有限公司 | Bonded abrasive article and method of forming |
| JP2016501735A (en) | 2012-12-31 | 2016-01-21 | サンーゴバン アブレイシブズ，インコーポレイティド | Bonded abrasive article and grinding method |
| JP6064058B2 (en) | 2012-12-31 | 2017-01-18 | サンーゴバン アブレイシブズ，インコーポレイティド | Bonded abrasive article and grinding method |
| WO2014106159A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| WO2014165447A1 (en) | 2013-03-31 | 2014-10-09 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| CN105880650B (en) * | 2015-09-09 | 2018-09-18 | 广东技术师范学院 | A kind of hot machining device reducing residual stress |
| CN111267010B (en) * | 2020-03-11 | 2021-07-23 | 上海橄榄精密工具有限公司 | Diamond grinding wheel for precise grinding of semiconductor substrate chamfer |
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1999
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|---|---|
| JP2001062601A (en) | 2001-03-13 |
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