CN101086481A - Automatic optical inspection system teaching method and inspection method using same - Google Patents

Automatic optical inspection system teaching method and inspection method using same Download PDF

Info

Publication number
CN101086481A
CN101086481A CNA2007101099457A CN200710109945A CN101086481A CN 101086481 A CN101086481 A CN 101086481A CN A2007101099457 A CNA2007101099457 A CN A2007101099457A CN 200710109945 A CN200710109945 A CN 200710109945A CN 101086481 A CN101086481 A CN 101086481A
Authority
CN
China
Prior art keywords
mentioned
inspection
detail
zone
automatic visual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2007101099457A
Other languages
Chinese (zh)
Other versions
CN101086481B (en
Inventor
崔铉镐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AJU HIGH TECH CORP
Original Assignee
AJU HIGH TECH CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AJU HIGH TECH CORP filed Critical AJU HIGH TECH CORP
Publication of CN101086481A publication Critical patent/CN101086481A/en
Application granted granted Critical
Publication of CN101086481B publication Critical patent/CN101086481B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/10Segmentation; Edge detection
    • G06T7/11Region-based segmentation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N2021/95638Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biochemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)

Abstract

The invention relates to a teaching method of automatic optical inspection system for optically inspecting the printed circuit board and checking method thereof. The automatic optical inspection system is for optically inspecting to perform teaching work in advance. The teaching work sets working of inspecting enviroment information before optically inspecting and shows a variety of working for setting the required enviroment information of checking region of object or checking specification. The said teaching work divides the main data into even size to check in multi detail inspection areas. Then, identifying information for identifying each detail inspection area and baseline data for distinguishing the pattern and space component of detail inspection area are registered. Thus, the multi detail inspection areas are divided up at a preset size independent of the size of the printed circuit board unit, the image data is obtained at a maximum range of camera shot of the image device, and the eligibility is distinguished using the divided detail inspection area, and the use od the memory of the automatic optical inspection system is minimized and the teaching and inspecting speed is increased.

Description

The teaching method of automatic visual inspection system and utilize its inspection method
Technical field
The present invention relates to the automatic visual inspection system, more specifically, relate to the teaching method of automatic visual inspection system and utilize its inspection method.
Background technology
Along with semiconductor devices miniaturization, lightweight, use the flexible print wiring board of more film (film), band (tape) type.Flexible print wiring board for example has TAB (Tape AutomaticBonding, that is, carrier band welds automatically), COF (Chip On Film) etc., as the printed circuit board (PCB) of the drive integrated circult of liquid crystal indicator, storer etc.
Such flexible print wiring board 10 is made the film, the belt shape that are formed with the unit 12 with circuit pattern continuously as shown in Figure 1.When checking, flexible print wiring board 10 is in order to transmit when checking, has index hole 14 at two ends up and down with a determining deviation.Index hole 14 forms by being called (Index perforation hole) (hereinafter referred to as the IP hole) the phase interlock of PF (Perforation hole) hole or IP hole.Adjacent IP hole 14 separately and the interval 16 between the IP hole 14 are 4.75mm, are the common specifications of this area, and adjacent IP hole and the interval between the IP hole are defined as 1 pitch (pitch).
Therefore, when manufacturing a product in the art, decide pitch size, and determine the size of a unit (product) according to application target.For example, if 6 pitches are made a unit, the size of per 6 pitches in IP hole forms a unit on film, forms various circuit patterns in this big or small unit.Then, be benchmark with such IP hole, arrive and make till the finished product, utilize the device of the zigzag fashion that rotates with this IP hole engagement to transmit film, or 6 pitches with the IP hole are that a unit is checked when checking, judge the whether qualified of corresponding units.
Generally, utilize the automatic visual inspection system to check the outward appearance of flexible print wiring board 10.For the manufacturing enterprise of semiconductor devices manufacturing with flexible print wiring board, the checking process of the acceptance or rejection of inspection printed circuit board (PCB) is extremely important.For example, in the pattern of printed circuit board (PCB), produce the various defectives of short circuit, projection, depression etc., and printed circuit board (PCB) can not be used, therefore, effectively check the main cause that becomes productivity and qualitative control.
When utilizing the optics automatic inspection system that continuous flexible print wiring board is carried out optical check, before inspection, carry out teaching (teaching) operation of set environment information.The teaching operation is represented to set the inspection area of checking object or is set the various operations that environment is checked in settings such as checking specification.For example, the inspection area in the space comprise the pattern that will check etc. is set in the teaching operation, perhaps sets to comprise that the whether qualified reference data that is used to differentiate printed board unit etc. checks specification.Therefore, the automatic visual inspection system checks by the inspection area unit that sets when checking, according to compared with design specification great data difference differentiate whether qualified.
With reference to Fig. 2 and Fig. 3, existing automatic visual inspection system 2 is that the product size unit is carried out optical check with a unit 12, the size of product than the big situation in the visual field of video camera 6 under, the partitioning products size is checked.For example, the camera lens visual field of video camera 6 is under the situation of 25mm, and once maximum image pickup scope can be checked through 5 pitches.But when checking that object is when having the unit 12 of the product size more than 6 pitches, control part 4 carries out the teaching operation to be handled, so that obtain each image data 16,18 by checking at twice.At this moment, (that is, check, therefore produces the existing picture that 2 pitches are repeated to check, thereby have the problem of decrease in efficiency by size 8 3IP) by one time 3 pitch for video camera 6.
Other examples, taking with maximum field of view under the situation of a unit 12, take for the first time 5 pitches, take for the second time next 5 pitch, then secondary first segment is apart from effective, but with remaining 4 pitch corresponding image data are image datas of next unit, owing to when the shooting of next unit, begin to take from the first segment distance again, so do not need it.
And, as shown in Figure 3, when teaching, a product area set at twice and respectively checks environment, thus need storage administration respectively be divided into twice, first half 16 and latter half of 18 data.Its result, use amount increase, the actual teaching time of the storer of control part 4 increase when teaching and inspection, and teaching and inspection speed reduce in addition.
Summary of the invention
The objective of the invention is to, a kind of teaching method of automatic visual inspection system of the visual examination that is used for handling effectively flexible print wiring board is provided.
Another object of the present invention is to, a kind of inspection method of using the teaching method of automatic visual inspection system is provided, the teaching method of this automatic visual inspection system is handled the visual examination of flexible print wiring board effectively.
A further object of the present invention is, following method is provided: in the automatic visual inspection system of the visual examination of carrying out flexible print wiring board, irrespectively be divided into uniform size with the size of printed circuit board (PCB) and kind and carry out teaching and inspection.
The teaching method of automatic visual inspection of the present invention system to achieve these goals, one of its feature be, the master data of printed board unit is divided into uniform size registers a plurality of detail inspections zone.Such teaching method can the irrespectively rapid teaching with the size of printed circuit board (PCB).
According to this teaching method, provide a kind of teaching method that the printed board unit of identical patterns is carried out continuously the automatic visual inspection system of optical check.This teaching method is as follows: the master data of preparing above-mentioned printed circuit board (PCB).Above-mentioned master data is divided into a plurality of detail inspections zone to be registered.Then, registration is used to differentiate the reference data of the pattern composition in above-mentioned detail inspection zone.
It is in one embodiment, above-mentioned that to be divided into that the detail inspection zone registers be above-mentioned master data to be divided into uniform size register.
In another embodiment, above-mentioned teaching method also comprises: registration is used to discern the identifying information in above-mentioned each detail inspection zone.
And, in another embodiment, register that above-mentioned identifying information is following to carry out:, set and be stored as a certain identification marking in mutually different literal, mark and the figure corresponding to above-mentioned detail inspection zone.
And in another embodiment, above-mentioned identification marking is separately positioned on the mutually different position of above-mentioned detail inspection intra-zone.
And in another embodiment, above-mentioned identifying information is that the positional information of further setting above-mentioned identification marking is stored.
And, in another embodiment, possess at above-mentioned printed board unit under the situation of index hole, state the detail inspection zone and cut apart according to the gap size between the adjacent index hole.
And in another embodiment, registration said reference data are following carrying out: show the identification pattern of wishing to carry out optical check in the above-mentioned divided master data corresponding with above-mentioned each detail inspection zone; Utilize above-mentioned identification pattern to differentiate the pattern composition and the space composition in above-mentioned detail inspection zone; Measure the above-mentioned width that is judged to other pattern composition and space composition; And, set and storage is used to differentiate the whether qualified said reference data of above-mentioned measured pattern composition.
And in another embodiment, the said reference data are set to the two-value data based on the brightness illuminometer of above-mentioned identification pattern.
According to another characteristic of the invention, provide a kind of inspection method of utilizing the automatic visual inspection system of the teaching method of registering a plurality of detail inspections zone.Inspection method of the present invention like this can be obtained image data with the once maximum image pickup scope of image camera head, the whether qualified of printed board unit differentiated in the detail inspection zone that utilization is divided, the storer use of automatic visual inspection system is minimized, and can improve inspection speed.
According to this feature, inspection method provides a kind of inspection method of continuously each printed board unit of identical patterns being carried out the automatic visual inspection system of optical check.This inspection method is carried out teaching with the master data of above-mentioned printed circuit board (PCB) by a plurality of detail inspection area units.Obtain the image data of above-mentioned printed board unit with the once maximum image pickup scope of image camera head.Differentiate above-mentioned detail inspection zone according to the above-mentioned image data that obtains.Differentiate respectively that above-mentioned whether qualified be judged to other detail inspection zone.When in the above-mentioned detail inspection zone at least one is defective, to comprise above-mentioned differentiated for the printed board unit in underproof detail inspection zone differentiate.Then, will comprise that the above-mentioned above-mentioned printed board unit differentiation of being differentiated for underproof detail inspection zone is defective.
In one embodiment, above-mentioned teaching comprises: prepare above-mentioned master data; Above-mentioned master data is divided into above-mentioned a plurality of detail inspections zone to be registered; And registration is used to differentiate the reference data of the pattern composition in above-mentioned each detail inspection zone.
In another embodiment, above-mentioned each detail inspection zone is divided into uniform size with above-mentioned printed board unit and forms.
And in another embodiment, go up above-mentioned teaching and also comprise: registration is used to discern the identifying information in above-mentioned detail inspection zone.
And, in another embodiment,, above-mentioned identifying information set and is stored as a certain identification marking in mutually different literal, mark and the figure corresponding to above-mentioned detail inspection zone.
And in another embodiment, above-mentioned identifying information is separately positioned on the mutually different position of above-mentioned detail inspection intra-zone.
And in another embodiment, above-mentioned identifying information also comprises the positional information of above-mentioned identification marking and above-mentioned identification marking.
And, in another embodiment, following the carrying out of registration said reference data: in the above-mentioned master data of being divided corresponding, show the identification pattern of wishing to carry out optical check with above-mentioned each detail inspection zone; Utilize above-mentioned identification pattern to differentiate the pattern composition and the space composition in above-mentioned detail inspection zone; Measure the above-mentioned width that is judged to other pattern composition and space composition; And storage is used to differentiate the whether qualified said reference data of above-mentioned measured pattern composition.
And, in another embodiment, state reference data and be arranged to two-value data based on the brightness illuminometer of above-mentioned identification pattern.
A kind of inspection method of the automatic visual inspection system that continuously printed circuit board (PCB) that is formed with identical patterns is checked is provided according to another characteristic of the invention.According to this method, the master data that will become the benchmark of above-mentioned printed circuit board (PCB) is divided into a plurality of zones; Make a video recording continuously to above-mentioned each printed circuit board (PCB) is following: make each regional number of distributing to above-mentioned each printed circuit board (PCB) of once taking by video camera corresponding with each zone of in master data, dividing, and different with the number in the zone of distributing to a printed circuit board (PCB); From the image data of above-mentioned each printed circuit board (PCB) of obtaining by above-mentioned shooting, differentiate with comparing corresponding to the zone of the above-mentioned master data in above-mentioned each zone that is divided; And, according to the above-mentioned image data that is taken, all to be differentiated under the situation of certified products in the zone of distributing to an above-mentioned printed circuit board (PCB), it is certified products that an above-mentioned printed circuit board (PCB) is differentiated.
In one embodiment, the zone of above-mentioned printed circuit board (PCB) is divided along the length direction of above-mentioned printed circuit board (PCB).
In this embodiment, the number of the above-mentioned zone of once being taken by above-mentioned video camera is the integral multiple corresponding to each regional number of an above-mentioned printed circuit board (PCB).
And in another embodiment, the length of above-mentioned zone is identical.
And in another embodiment, above-mentioned video camera makes above-mentioned zone repeatedly not take above-mentioned printed circuit board (PCB) continuously.
And, in another embodiment, provide identifying information to each zone of the image data of the above-mentioned printed circuit board (PCB) that is taken and each zone of above-mentioned master data, each zone to the image data of a printed circuit board (PCB) provides mutually different identifying information, provides identical identifying information to above-mentioned master data with the corresponding zone of above-mentioned printed circuit board (PCB).
Embodiments of the invention can be deformed into variform, and scope of the present invention shall not be construed as by embodiment as described below and limits.Present embodiment illustrates more completely that for the technician who has average knowledge in this area the present invention provides.Therefore, exaggerated the shape etc. of the inscape on the accompanying drawing in order to emphasize clear and definite explanation.
Description of drawings
Fig. 1 is the figure of the structure of the general flexible print wiring board of expression;
Fig. 2 is the figure of the schematic configuration of the general automatic visual inspection system of expression;
Fig. 3 is the figure of a printed board unit of the expression teaching method that is used to illustrate automatic visual inspection system shown in Figure 2;
Fig. 4 is the figure of expression according to the schematic configuration of automatic visual inspection of the present invention system;
Fig. 5 is the figure of a printed board unit of the expression teaching method that is used to illustrate automatic visual inspection system shown in Figure 4;
Fig. 6 is the figure of the partial structurtes of expression printed board unit shown in Figure 5;
Fig. 7 is the figure of expression identification pattern shown in Figure 6;
Fig. 8 is the process flow diagram of expression according to the teaching step of automatic visual inspection of the present invention system;
Fig. 9 is that expression utilizes the process flow diagram according to the inspection step of the teaching method of automatic visual inspection of the present invention system.
Embodiment
Below 4 to Fig. 9 describe embodiments of the invention in detail with reference to the accompanying drawings.
Fig. 4 is the figure of expression according to the schematic configuration of automatic visual inspection of the present invention system.
With reference to Fig. 4, for a plurality of flexible print wiring boards 100 that form with identical patterns are carried out visual examination continuously, automatic visual inspection system 100 comprises an image camera head 104 and control part 102 at least, this control part 102 receives and handles the image data that is obtained by image unit 104, and the exercises of automatic visual inspection system 100 are controlled.The typical inscape (for example, unloading portion, lighting device, labelling apparatus and loading part etc.) that also comprises general automatic visual inspection system.
Therefore, automatic visual inspection of the present invention system 100 obtains image data with the once maximum image pickup scope of camera head 104 and carries out self-verifying.Therefore, automatic visual inspection system 100 sets and registration is divided into a plurality of detail inspections zone of uniform size with printed board unit 110, and handles the teaching operation, so that can carry out optical check by the detail inspection area unit.
Image camera head 104 for example is provided with video camera, image sensor etc., is the image data that maximum image pickup scope 112a~112f obtains flexible print wiring board 110 by a maximum field of view.At this moment, image camera head 104 is taken printed circuit board (PCB) continuously in the unduplicated mode in detail inspection zone.And, 104 pairs of printed board units of image camera head are taken continuously, with the number in the zone of distributing to each printed board unit that once is taken, corresponding with divided detail inspection zone in master data and to distribute to the number in zone of a printed circuit board (PCB) different.
And control part 102 for example comprises: image processor, the image data that obtains from the image camera head is handled; Storer, storage is used for the data of teaching and inspection and the image data that obtains; Typical computer is differentiated the detail inspection zone of being divided, and is comprised controller etc.; And programmable logic controller (PLC).
Here, the specification of lens (not shown) is depended in the visual field of image camera head 104.For example, the visual field is meant the maximum magnitude that utilizes 25 millimeters lens once can take for 25 millimeters.
Therefore, control part 102 is when the teaching operation that is used for automatic visual inspection, and preparation becomes the master data of the printed board unit 110 of checking object registers, and master data is divided into uniform size, and sets and store a plurality of detail inspections zone.Master data for example comprises the design surface file of side circuit pattern (that is cad data) or is equivalent to image data that is taken of actual product size etc.And control part 102 registration is used to discern the identifying information in each detail inspection zone, and storage is used to differentiate the reference data of the pattern composition and the space composition in each detail inspection zone.And control part 102 obtains image data according to the once maximum image pickup scope of image camera head 104, according to a plurality of detail inspection area units printed board unit 110 is carried out optical check.
Because automatic visual inspection of the present invention system 100 carries out teaching with the detail inspection zone that the master data of printed board unit is divided into a plurality of even sizes, so when optical check, image camera head 104 can obtain image data with the maximum magnitude that once can take, do not have and repeat to obtain image data with taking, and, owing to utilize the detail inspection zone of being divided to carry out teaching and inspection, thereby the use of the storer of control part 102 minimized, realize optical check rapidly.
Particularly, as shown in Figure 5, master data is divided into a plurality of detail inspections zone 116a~116f.Each detail inspection zone 116a~116f to being divided registers the mutually different identification marking 118a that is used to discern~118f.At this moment, under the situation that IP hole 114 is arranged, be divided into detail inspection zone 116a~116f, under the situation that does not have the IP hole, be set at certain size and cut apart equably with the pitch unit in IP hole.
At present, printed board unit is in the trend of miniaturization gradually because the miniaturization of product and manufacturing cost reduction etc.For example form 6 pitch size~5.5 pitch size.In this case, 5 pitches of printed board unit part is divided into the detail inspection zone by 1 pitch unit, and rest parts also is assigned as a detail inspection zone.Certainly, at this moment, under the situation that the detail inspection zone is cut apart by 2 pitch units, remaining 1.5 pitches are distributed to a detail inspection zone.Therefore, when the printed circuit board (PCB) of multiple size is divided into a plurality of detail inspections zone, continuous printed circuit board (PCB) is divided into the detail inspection zone with uniform size, last rest parts can be carried out numerous variations corresponding to divided size.
And detail inspection zone 116a~116f will be different from the shape (for example the pattern of literal, mark, figure etc. etc.) in each other detail inspection zone in inside and register and store as identification marking 118a~118f.For example to utilize identification marking 118a~118f to define respectively be which detail inspection zone of a printed board unit to each detail inspection zone 116a~116f.And, position configuration identification marking 118a~118f that detail inspection zone 116a~116f is having nothing in common with each other, the positional information of identification marking 118a~118f of being disposed is registered with identification marking 118a~118f, when differentiating the detail inspection zone, utilize the positional information of the identification marking 118a~118f that is registered, differentiate each detail inspection zone 116a~116f easily.And, each detail inspection zone 116a~116f, when all the detail inspection zones in being included in a printed board unit all were taken, the inspection of corresponding printed board unit was just finished.
And each detail inspection zone 116a~116f registration and storage are used for inner inspection object pattern composition and the required reference data of space composition.As shown in Figure 6, when the pattern composition 120 of differentiating detail inspection zone 116a and space composition 122, need reference data.That is, a detail inspection zone will be used for the identification pattern 124 that the pattern composition that becomes the inspection object is differentiated is presented at and the regional corresponding master data of detail inspection, utilize identification pattern 124 to differentiate pattern composition 120 and space compositions 122.For example, identification pattern is with teaching line (teaching line) 124 expression, and the brightness illuminometer of teaching line 124 is set at reference data.And as shown in Figure 7, identification pattern 124 is in order to differentiate the pattern composition that is judged to other each detail inspection zone, and differentiates the difference of pattern composition and reference data, divides the border of pattern composition and space composition.For example, the reference data in a detail inspection zone is set under the situation of two-value data of brightness illuminometer, if composition identical with reference data (or less than two-value data) arbitrarily, then differentiate and be the pattern composition, different with reference data if (or more than two-value datas), then differentiating is the space composition.
Then,, then the image data that obtained and the master data of respective fine portion inspection area are compared, differentiate the whether qualified of detail inspection zone if determine the pattern composition of respective fine portion inspection area.Then, when the inspection in all detail inspection zones that are through with, differentiate the whether qualified of a printed board unit.
If general automatic visual inspection system takes with the 25mm video camera, in a visual field, obtain the image data of maximum 5 pitch size.Because 1 pitch is the size of 4.75mm, a visual field is 5 pitches * 4.75mm=23.75mm, satisfies a condition that the visual field is captured of 25mm video camera.If the size of a printed board unit is under the situation of product of 6 pitches, can not be by once taking the image data that obtains a printed board unit integral body.Therefore, be a printed board unit is cut apart by 3 pitches and to be carried out twice shooting and obtain image data now, the whether qualified of this printed board unit differentiated by image data phase Calais separately.
But a visual field maximum of 25 millimeters video cameras can be taken 5 pitches.But the actual part of using is only checked 3 pitches, and therefore the part that image data repeats and generation is not checked of 2 pitches is respectively arranged, and the result descends inspection speed.
Therefore, the maximum difference of the present invention and existing mode is, when the size of a printed board unit is under the situation of 6 pitch products, existing mode is to take 2 images to check 6 pitches, but, mode of the present invention is irrespectively to take 2 images with maximum field of view each 5 pitches ground with the size of a printed board unit, just can check 10 pitches.For example,, 5 pitches of first module are taken check,, the image of 4 pitches of remaining 1 pitch of first module and Unit second taken check in second time during filming image in first time during filming image.
Therefore, the size of automatic visual inspection system of the present invention and printed board unit irrespectively continues to obtain the image data of a certain size visual field to be checked, so than existing, inspection speed improves in every identical time.
And Fig. 8 and Fig. 9 are the process flow diagrams that the teaching of automatic visual inspection of the present invention system is shown and checks step.
As shown in Figure 8, in the teaching step, prepare master data at step S200 and register and store.For example, master data comprises the design data (that is cad data) of the side circuit pattern of printed board unit or image data that actual cell is taken etc.
At step S202, master data is divided into a plurality of detail inspections zone, register and store each detail inspection zone.At this moment, each detail inspection zone is divided into identical size.For example, under the situation of the printed circuit board (PCB) of 6 pitch size, be that benchmark is divided into 6 by identical size with the IP hole, perhaps, do not have to cut apart the detail inspection zone by certain size under the situation of printed circuit board (PCB) in IP hole.And, be the printed circuit board (PCB) of 5.5 pitches for size, cut apart the detail inspection zone by 1 pitch size, rest parts also is assigned to a detail inspection zone.Therefore, numerous variations can be carried out accordingly with the maximum field of view of filming image, the size of printed circuit board (PCB) and/or the circuit pattern that is formed on the printed circuit board (PCB) in the detail inspection zone.
Set and store the identifying information separately in each detail inspection zone at step S204.At this moment, corresponding with each detail inspection zone identifying information comprises: utilize mutually different literal, mark or figure to wait the identification marking of discerning each detail inspection zone; And represent that each identification marking is configured in the positional information on the ad-hoc location of detail inspection intra-zone.And each identification marking is arranged on the mutually different position of each detail inspection intra-zone, so that easy recognizing site.For example, as shown in Figure 5, a printed board unit is divided under the situation in 6 detail inspection zones, and identification marking is set with different figures in the 1st to the 6th detail inspection zone, and each identification marking is configured in the different position in each detail inspection zone.Therefore, repeat in the continuous printed board unit and each detail inspection of the 1st to the 6th regional corresponding identification marking and positional information, if differentiate the position of printed board unit in view of the above, then the differentiation in detail inspection zone is easier to.
Then, register and store the reference data separately that is used for the detail inspection zone is carried out whether qualified differentiation in step 206.At this moment, reference data is in order to differentiate pattern composition and space composition corresponding to each detail inspection zone, and the brightness illuminometer of data as reference data, is differentiated the pattern composition and the space composition in detail inspection zone.
And as shown in Figure 9, inspection method is to carry out under step S210 finishes the state of teaching operation of Fig. 8.Come printed board unit is taken with the promptly once maximum image pickup scope of the maximum field of view of image camera head at step S212, obtain image data.At this moment the image data that obtains comprises a plurality of detail inspections zone, can not be by once taking the image data that obtains a printed board unit, therefore, in conjunction with by take the part of the image data that obtains next time, obtain the image data of a printed board unit.
The image data that obtains at step S214, the identification marking of the ad-hoc location of utilize the positional information that is included in the identifying information, registering during according to teaching are differentiated and are each detail inspection zone.Identifying information (that is, identification marking and positional information) is provided for each each zone regional and master data of the image data of the printed board unit that is taken.At this moment, provide mutually different identifying information, provide identical identifying information for zone with the corresponding master data of each printed circuit board (PCB) to each zone of the image data of a printed board unit.
At step S216, utilize the reference data in each detail inspection zone, differentiate the whether qualified of each detail inspection zone.If discrimination result inconsistent or more than it with each reference data, then differentiated and is the space composition, if consistent with reference data, then differentiate and is the pattern composition.At this moment, be judged to other pattern composition and space composition by two-value data decision boundaries part, the live width of measured pattern and the size of space width.
Then, if at step S212, determine whether qualified to a plurality of detail inspections zone of a printed board unit, then differentiate the whether qualified of a printed board unit in view of the above.
Then, the size of utilizing a printed board unit is the situation of the product of 6 pitches, and teaching action of the present invention is described.
To be equivalent to check that object (promptly, printed board unit) the image that is taken or the design drawing of actual inspection object are (promptly, cad data etc.) be registered as master data, master data be divided into a plurality of detail inspections zone set the river and register each detail inspection zone.For example, 6 pitch products are divided into 6 detail inspection zones by each pitch.At this moment, to 6 detail inspection zones, utilize the pattern forms such as literal, mark or figure that show mutually different feature to set identification marking respectively, and set and store the identifying information of the positional information that comprises identification marking.For example, first detail inspection zone is set at literal A, second detail inspection zone is set at literal B, and, the 3rd detail inspection zone is set at literal C, thereby sets identification marking with literal inequality, and the positional information in the zone of each identification marking is sought in setting.Therefore, even in position filmed image data arbitrarily, as long as each identification marking of registration and seek in the detail inspection zone of position in zone of this identification marking and search the zone that whether has oneself to seek formerly.If the identification marking of searching literal B then shows second detail inspection zone certainly.
And by certain unit that is spaced, so the number between can confirmation unit, therefore, control part can be differentiated the numbering of each printed board unit to printed board unit between video camera and video camera.And other method is as follows: between video camera and video camera by certain unit that is spaced, so control part can be differentiated the numbering of each printed board unit and the position in detail inspection zone when obtaining image data.
Therefore, the identification marking in the detail inspection zone is check corresponding detail inspection zone necessary.
Image data for registration actual product in master data, all detail inspection zones of a printed board unit are taken twice by maximum field of view, then obtain the image data in all detail inspection zones of a printed board unit, thereby two image datas are registered as master data, register the fox message in all detail inspection zones of printed board unit thus.
Then, even obtain shape and other the different image data of two image datas that obtains previously, registered each detail inspection zone is mated with independent data and the current image data that obtains respectively and is checked.
And reference data can be provided with multiple according to manufacturer and product.For example, in an embodiment of the present invention, reference data is the ad-hoc location at the pattern that will check of printed board unit, mark teaching line 124 as shown in Figure 6 and form identification pattern, the two-value data based on the brightness illuminometer with the teaching line is a benchmark, differentiates the border of the pattern composition and the space composition in each detail inspection zone.And, the space width of the live width of measured pattern composition and space composition.At this moment, import the two-value data on the border of seeking pattern composition and space composition as numerical value, or whether qualified benchmark is judged in registration.For example, register following benchmark, that is, if the live width of two-value data reduces then it to be judged as depression more than 30% than certified products.Certainly, do not wish not mark teaching line of the detail inspection zone checked, thereby ignore.
At first, when self-verifying, formerly the image of Zhi Hanging obtains or cad file is prepared and setting the pattern that maybe will check the inspection area on this image or the cad file and checking under the state that the teaching operation of specification etc. finishes and store, in order to be that benchmark obtains image continuously and carries out automatic visual inspection with the teaching information (image data, identifying information, reference data etc.) to the detail inspection zone.
At this moment, when self-verifying, with registered teaching information when the teaching is that benchmark obtains image data, by each detail inspection zone, the current image data that obtains and registered teaching information compared whether qualifiedly judge, derive the check result of printed board unit unit and every batch check result.
This also be registration and the storage two-value data that is used for discerning identification marking according to the identification marking of initial registration (promptly, the brightness illuminometer), and obtain current image, when in the zone of seeking identification marking, similarly carrying out binaryzation, if there is the similar identification marking of two-value data, then be judged as identical detail inspection zone, the area of the pattern that at this moment carries out teaching and the width of area of space are measured inspection.
More than, according to describing in detail and accompanying drawing, utilize continuous printed board unit, illustration the structure and the effect of automatic visual inspection of the present invention system, but this just enumerates embodiment and is illustrated, and also can be applied to check the printed board unit of multiple size or single printed circuit board (PCB) is carried out optical check etc.; And, in the scope that does not break away from technological thought of the present invention, can carry out multiple variation and change.
As mentioned above, the size of automatic visual inspection system of the present invention and printed board unit is irrelevant, cut apart a plurality of detail inspections zone by a certain size, the identifying information and the reference data that are provided with and register each detail inspection zone of being divided are carried out teaching, thereby can shorten the teaching time of automatic visual inspection system.
And automatic visual inspection of the present invention system is used to discern the identifying information and the reference data in detail inspection zone when being registered in teaching, thereby can differentiate the detail inspection zone of taking by maximum image pickup scope when optical check easily.
And, carry out optical check by utilizing teaching method of the present invention, can carry out the continuous inspection of printed board unit by the once maximum image pickup scope of image camera head, thereby improve inspection speed.
And, automatic visual inspection of the present invention system during to teaching and when inspection the data that are included in the detail inspection area unit in the maximum image pickup scope of image camera head manage, therefore, the use amount of storer is minimized.

Claims (18)

1. the teaching method of an automatic visual inspection system carries out optical check continuously to the printed board unit of identical patterns, it is characterized in that,
Prepare the master data of relevant above-mentioned printed board unit;
Above-mentioned master data is divided into a plurality of detail inspections zone to be registered; And
Registration is used to differentiate the reference data of the pattern composition in above-mentioned detail inspection zone.
2. the teaching method of automatic visual inspection as claimed in claim 1 system is characterized in that,
It is above-mentioned that to be divided into that the detail inspection zone registers be above-mentioned master data to be divided into uniform size register.
3. the teaching method of automatic visual inspection as claimed in claim 1 or 2 system is characterized in that,
Above-mentioned teaching method also comprises: registration is used to discern the identifying information in above-mentioned each detail inspection zone.
4. the teaching method of automatic visual inspection as claimed in claim 3 system is characterized in that,
Register that above-mentioned identifying information is following to carry out:, set and be stored as a certain identification marking in mutually different literal, mark and the figure corresponding to above-mentioned detail inspection zone.
5. the teaching method of automatic visual inspection as claimed in claim 4 system is characterized in that,
Above-mentioned identification marking is separately positioned on the mutually different position of above-mentioned detail inspection intra-zone.
6. the teaching method of automatic visual inspection as claimed in claim 5 system is characterized in that,
Above-mentioned identifying information is that the positional information of further setting above-mentioned identification marking is stored.
7. the teaching method of automatic visual inspection as claimed in claim 1 or 2 system is characterized in that,
Above-mentioned printed board unit possesses index hole, and above-mentioned detail inspection zone is cut apart according to the gap size between the adjacent index hole.
8. the teaching method of automatic visual inspection as claimed in claim 1 system is characterized in that,
Registration said reference data are following carrying out:
In the above-mentioned divided master data corresponding, show the identification pattern of wishing to carry out optical check with above-mentioned detail inspection zone;
Utilize above-mentioned identification pattern to differentiate the pattern composition and the space composition in above-mentioned detail inspection zone;
Measure the above-mentioned width that is judged to other pattern composition and space composition; And,
Set and storage is used to differentiate the whether qualified said reference data of above-mentioned measured pattern composition.
9. the teaching method of automatic visual inspection as claimed in claim 8 system is characterized in that,
The said reference data are set to the two-value data based on the brightness illuminometer of above-mentioned identification pattern.
10. the inspection method of an automatic visual inspection system is carried out optical check continuously to the printed board unit of identical patterns, it is characterized in that,
The master data of above-mentioned printed board unit is carried out teaching by a plurality of detail inspection area units;
Obtain the image data of above-mentioned printed board unit with the once maximum image pickup scope of image camera head;
Differentiate above-mentioned detail inspection zone according to the above-mentioned image data that obtains;
Whether qualified differentiate above-mentioned other each detail inspection zone of being judged to respectively;
When in the above-mentioned detail inspection zone at least one is defective, to comprise above-mentioned differentiated for the printed board unit in underproof detail inspection zone differentiate; And
To comprise that the above-mentioned above-mentioned printed board unit differentiation of being differentiated for underproof detail inspection zone is defective.
11. the inspection method of automatic visual inspection as claimed in claim 10 system is characterized in that,
Above-mentioned teaching comprises:
Prepare above-mentioned master data;
Above-mentioned master data is divided into above-mentioned a plurality of detail inspections zone to be registered; And
Registration is used to differentiate the reference data of the pattern composition in above-mentioned detail inspection zone.
12. the inspection method of automatic visual inspection as claimed in claim 11 system is characterized in that,
Above-mentioned detail inspection zone is divided into uniform size with above-mentioned printed board unit and forms.
13. the inspection method as claim 11 or 12 described automatic visual inspection systems is characterized in that,
Above-mentioned teaching also comprises: registration is used to discern the identifying information in above-mentioned detail inspection zone.
14. the inspection method of automatic visual inspection as claimed in claim 13 system is characterized in that,
Corresponding to above-mentioned detail inspection zone, above-mentioned identifying information set and is stored as a certain identification marking in mutually different literal, mark and the figure.
15. the inspection method of automatic visual inspection as claimed in claim 14 system is characterized in that,
Above-mentioned identifying information is separately positioned on the mutually different position of above-mentioned detail inspection intra-zone.
16. the inspection method of automatic visual inspection as claimed in claim 15 system is characterized in that,
Above-mentioned identifying information also comprises the positional information of above-mentioned identification marking and above-mentioned identification marking.
17. the inspection method of automatic visual inspection as claimed in claim 11 system is characterized in that,
Following the carrying out of registration said reference data:
In the above-mentioned master data of being divided corresponding, show the identification pattern of wishing to carry out optical check with above-mentioned detail inspection zone;
Utilize above-mentioned identification pattern to differentiate the pattern composition and the space composition in above-mentioned detail inspection zone;
Measure the above-mentioned width that is judged to other pattern composition and space composition; And
Storage is used to differentiate the whether qualified said reference data of above-mentioned measured pattern composition.
18. the inspection method of automatic visual inspection as claimed in claim 17 system is characterized in that,
The said reference data are arranged to the two-value data based on the brightness illuminometer of above-mentioned identification pattern.
CN2007101099457A 2006-06-09 2007-06-06 Automatic optical inspection system teaching method and inspection method using same Expired - Fee Related CN101086481B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020060051850A KR100772607B1 (en) 2006-06-09 2006-06-09 Teaching method of automatic inspection system and inspecting method for using the same
KR10-2006-0051850 2006-06-09
KR1020060051850 2006-06-09

Publications (2)

Publication Number Publication Date
CN101086481A true CN101086481A (en) 2007-12-12
CN101086481B CN101086481B (en) 2012-04-18

Family

ID=38928508

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101099457A Expired - Fee Related CN101086481B (en) 2006-06-09 2007-06-06 Automatic optical inspection system teaching method and inspection method using same

Country Status (3)

Country Link
JP (1) JP2007327957A (en)
KR (1) KR100772607B1 (en)
CN (1) CN101086481B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104020175A (en) * 2013-02-28 2014-09-03 发那科株式会社 Device and method for appearance inspection of object having line pattern
CN111077155A (en) * 2018-10-18 2020-04-28 三星显示有限公司 Display panel inspection system and display panel inspection method
CN111474180A (en) * 2019-01-24 2020-07-31 联策科技股份有限公司 Detection data concatenation system and method
CN113777113A (en) * 2021-08-02 2021-12-10 景旺电子科技(珠海)有限公司 Optical detection method of lamp panel and lamp panel manufacturing method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100940301B1 (en) 2008-03-26 2010-02-05 호서대학교 산학협력단 Inspecting method by using mark partitioning
KR101132792B1 (en) * 2010-03-16 2012-04-02 주식회사 고영테크놀러지 Method of inspecting substrate
DE102010029319B4 (en) 2009-05-27 2015-07-02 Koh Young Technology Inc. Apparatus for measuring a three-dimensional shape and method thereto
KR101464174B1 (en) 2013-03-25 2014-11-21 주식회사 미르기술 Teaching data auto-generation method of automated inspection machine
KR101559941B1 (en) 2015-05-06 2015-10-14 (주) 엠브이텍 A system for detecting fault of print pattern
TW202209159A (en) * 2020-08-19 2022-03-01 萬潤科技股份有限公司 Circuit board inspection equipment and its layer editing and teaching method wherein the user selects and adjusts a single specified image feature in the design unit displayed by the display interface, and edits the original data information of the single specified image feature into new data information

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100286041B1 (en) * 1998-06-30 2001-04-16 윤종용 Method and device for setting teaching data of automatic PCB inspection device
KR20000056739A (en) * 1999-02-25 2000-09-15 윤종용 Inspecting apparatus for pcb and teaching method and library modifying method thereof
KR100573698B1 (en) * 1999-02-26 2006-04-26 삼성전자주식회사 Automatic teaching apparatus for chip mounting and soldering inspection and method thereof
JP2003209400A (en) 2002-01-11 2003-07-25 Mitsubishi Electric Engineering Co Ltd Circuit board inspection apparatus and method of inspecting circuit board
US7203355B2 (en) * 2002-12-24 2007-04-10 Orbotech Ltd. Automatic optical inspection system and method
KR100737758B1 (en) * 2004-06-30 2007-07-10 아주하이텍(주) Automated optical inspection system including lighting device and method for inspecting of the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104020175A (en) * 2013-02-28 2014-09-03 发那科株式会社 Device and method for appearance inspection of object having line pattern
CN104020175B (en) * 2013-02-28 2016-06-29 发那科株式会社 Comprise appearance inspection device and the appearance inspection method of the object of linear pattern
US10113975B2 (en) 2013-02-28 2018-10-30 Fanuc Corporation Appearance inspection device and method for object having line pattern
CN111077155A (en) * 2018-10-18 2020-04-28 三星显示有限公司 Display panel inspection system and display panel inspection method
CN111474180A (en) * 2019-01-24 2020-07-31 联策科技股份有限公司 Detection data concatenation system and method
CN113777113A (en) * 2021-08-02 2021-12-10 景旺电子科技(珠海)有限公司 Optical detection method of lamp panel and lamp panel manufacturing method

Also Published As

Publication number Publication date
CN101086481B (en) 2012-04-18
JP2007327957A (en) 2007-12-20
KR100772607B1 (en) 2007-11-02

Similar Documents

Publication Publication Date Title
CN101086481B (en) Automatic optical inspection system teaching method and inspection method using same
US7353954B1 (en) Tray flipper and method for parts inspection
CN101943571B (en) Board inspection apparatus and method
US20020014577A1 (en) Circuit for machine-vision system
US20130278723A1 (en) Three-dimensional measurement system and three-dimensional measurement method
JP5411913B2 (en) Pin tip position setting method
CN106855677A (en) Dynamic automatic focus tracking system
JP2010151666A (en) Pattern inspection device and inspection method
CN102629562B (en) Base plate processing device and base plate processing system
CN103827626A (en) Three-dimensional measurement device
US10986761B2 (en) Board inspecting apparatus and board inspecting method using the same
JP6276809B2 (en) Substrate position detector
CN205333535U (en) Metal strainometer defect automatic check out system
EP3525566B1 (en) Substrate inspection device and substrate distortion compensating method using same
CN100470239C (en) Projection test device and method
CN109509165A (en) Framing region choosing method and device
CN101609054A (en) The Integrated Check out System of flexible PCB and method thereof
CN104833681B (en) A kind of device and method of quick measurement MCM substrate circuits dimension of picture error
JP4462037B2 (en) Method for distinguishing common defects between semiconductor wafers
JP2012220439A (en) Pattern inspection method and pattern inspection apparatus
CN101340810B (en) Method for placing at least one component provided with connection points on a substrate, as well as such a device
KR102177329B1 (en) Method for sensing of fiducial Mark
KR101132781B1 (en) Board inspecting method and board manufacturing method having the board inspecting method
US7274471B2 (en) Systems and methods for measuring distance of semiconductor patterns
Cao et al. Statistical Analysis for Component Shift in pick and place process of Surface Mount Technology

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120418

Termination date: 20130606