CN101080609A - Sequential multi-probe method for measurement of the straightness of a straightedge - Google Patents
Sequential multi-probe method for measurement of the straightness of a straightedge Download PDFInfo
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- CN101080609A CN101080609A CNA200580043016XA CN200580043016A CN101080609A CN 101080609 A CN101080609 A CN 101080609A CN A200580043016X A CNA200580043016X A CN A200580043016XA CN 200580043016 A CN200580043016 A CN 200580043016A CN 101080609 A CN101080609 A CN 101080609A
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- ruler
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
- G01B5/207—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
Abstract
A system and method for measurement of the straightness of a straightedge, said measurement system comprising a multi-probe (4a, 4b, 4c) device (4) for sequentially measuring along the straightedge (3) using a carriage (4) moving along a guide way (G(x)) . The carriage (4) is moved along one surface (S (x) ) of the straightedge (3) to take measurements, is then transferred to an opposite surface (S ' (x) ) of the straightedge (3) and moved along the opposite surface of the straightedge (3) to take measurements. By adding and subtracting of the measurement points taken at the opposing surfaces of the straightedge, a systematic error due to the probe can be identified, whereby the measurement of the straightness of the straightedge is improved. Errors in manufacturing and measurements of work pieces and other parts may thereby be reduced. The method and apparatus can also be used for on-line calibrations of straightness.
Description
The present invention relates to be used for the sequential multi-probe method of ruler flatness measurement, this method adopts utilizes the balladeur train that moves along the guide rail many probe apparatus along the ruler proceeding measurement.
The present invention also relates to be used for measuring the device of site error of the machine with movable part and ruler and the measuring system that is used for the ruler flatness measurement, described measuring system comprises balladeur train (carriage) that utilization moves according to the guide rail many probe apparatus along the ruler proceeding measurement.
The present invention also relates to be used for the measuring system of ruler flatness measurement, described system comprises balladeur train that utilization moves according to the guide rail many probe apparatus along the ruler proceeding measurement.
The corresponding to high standard precision of the development of lathe and multi-spindle machining equipment requirements and high-accuracy engineering.When having only the error when accurate measurements and calculations machine tool component, the high precision in could obtaining to make.
Coordinate measuring machine is used to check such as 1,2 or 3 dimensions of workpiece such as machine part.Workpiece is fixed on the fixed station usually, and adopt can be one, two or the measuring sonde that moves of three-dimensional.In order to measure the position of on workpiece, putting, probe is contacted with this point, or measure with alternate manners such as for example capacitive characters, on the surveyors' staff on the machine or other sensor, read measurement result.Probe can be an any kind, and the contact sonde that probe can contact with ruler can be an optic probe, maybe can be based on the non-contact probe of eddy current or electric capacity.The position of point is expressed as X, Y and the Z coordinate in the working volume of machine usually.In order to measure the distance of point-to-point transmission, one after the other measure these points, read coordinate a little, draw distance by coordinate Calculation.The coordinate measuring machine of prior art has usually such as high precision measuring system, electrical contact probe, motor driven, computer-controlled driving and features such as collection of data computing machine and processing.
A kind of known coordinate measuring machine is mobile bridge-type machine.Crane span structure moves on the Y direction at platform upper edge guide rail.Balladeur train moves on directions X at crane span structure upper edge guide rail.The scale related with each movable part indication movable part is three positions on axially.
The degree of accuracy of coordinate measuring machine is subject to error and the guide rail of restriction machine movement or the error of other parts of scale or other measurement mechanism.A kind of method that improves degree of accuracy is the tolerance of improving building technology simply and reducing system, makes error be reduced.Yet along with required degree of accuracy increases and the size of workpiece increases, the cost that the reduces error utmost point that becomes is more and more expensive.Precision straight edge is used to conduct along linearity Calibration Method on the ruler direction.
The current solution that is used for ruler calibration is that (often) measured each machine " each machine error " with laser measurement tools and stored.Then, make great efforts the identical condition of maintenance, make " each machine error " remain unchanged.This requires such as conditions such as temperature and humidities extraordinary control being arranged, and uses usually material such as devitrified glass (Zerodur) of (very) costliness and departing from of invar fixed to reduce as far as possible " each machine errors " such as (invar).Even then, any may influence the service activity of configuration after, the duplicate measurements process regularly of having to.
The various technology that are used for these errors of measurements and calculations are well-known.In these technology, often adopt ruler to be used to measure the error of machine tool assembly or lathe moving-member as scale.In order to make measurement accurate, the flatness of precision straight edge itself is necessary by precision and accurately measurement, that is, and and necessary accurately measurement ruler surface error.
At SPIE vol.2101 measuring technique and intelligence instrument (Measurement technologyand intelligent Instruments) (1993), 483 pages, Li etc. have described a kind of order three point methods that are used for the flatness measurement of precision straight edge.In notion of the present invention, " many probes " measurement means uses three probes at least.In this was measured, the balladeur train that disposes three probes moved and sequentially measures several groups of points (at least three) along guide rail on ruler.Utilize several groups of measured points, Li etc. say, the yaw error that can not rely on the error of guide rail or balladeur train is calculated the flatness of ruler.
Yet though author Li etc. declare to calculate the flatness of ruler, the inventor recognizes that systematic error still exists.Systematic error in the measurement increases accumulation with ruler length.This systematic error can not or be difficult for and the true deviation of ruler is distinguished.It also is difficult to the measurement result that provides real-time.
In fact, all relative complex and costliness of the known previous system that is used to calibrate coordinate measuring machine.In addition, calibration process length consuming time, complexity, costliness and be easy to produce error.
The object of the present invention is to provide as the illustrated degree of accuracy of " invention field " part with raising with and/or relatively simply with and/or be more suitable for the methods, devices and systems measured in real time.
For this purpose, these methods, devices and systems are characterised in that balladeur train moves along a surface of ruler obtaining measurement result, and move to obtain measurement result along the opposed surface of ruler then.
The present invention is based on following understanding:
Ideally, the sequential multi-probe measurement result should not have the systematic error of guide rail or balladeur train, yet the inventor recognizes that systematic error still exists.
Move balladeur train by opposed surface, produce identical systematic error on the two sides of ruler along ruler.The measurement result that obtains on a surface of ruler can not be distinguished the true deviation and the systematic error of ruler.Yet when the opposed surface of ruler was also measured, any deviation of itself changed positive and negative (projection becomes depression, and vice versa) in the ruler, can not change positive and negative and measure the systematic error that produces.Sum up by measured point on the opposed surface to ruler and to subtract, can obtain the ruler true deviation of the straight line of systematic error and relative ideal.In notion of the present invention, balladeur train is any apparatus or device, in this (a bit) equipment or device, three or more probes are set relative to each other, it need not is an integral body, " guide rail " is that balladeur train is complied with any apparatus or the device that it moves along guide rail, and " rotation balladeur train " comprises the method that the position that can make three or more probes changes, and this makes that the mutual alignment between probe changes along with the rotation along one or more described axles.For this method of the present invention, the guide rail on the ruler two sides needs not to be identical, and as explained below, although based on the reason of making, they are preferably similar.
By on the opposed surface of ruler, measuring, because the deviation of ruler thickness has been introduced extra error.Yet, the better Be Controlled of the thickness of ruler, and compare with the flatness of ruler, less dependence condition element, the positive-effect that error reduces (point 2) surpasses fully because the error that thickness causes increases (point 3).
In addition, method provided by the invention allows the ruler flatness is carried out continuous coverage, reduces any error that is produced by the condition changing between the measurement of ruler flatness, makes real-time measurement become possibility.
Below with reference to drawings and Examples more specific description is carried out in these and other aspects of the present invention, accompanying drawing comprises:
Fig. 1 is the synoptic diagram that x-y moves machine.
Fig. 2 is the example schematic of the accurate scale ruler on as shown in Figure 1 the machine.
Fig. 3 and Fig. 4 are the synoptic diagram of three probe sequential grammars.
Fig. 5 is the synoptic diagram of systematic error.
Fig. 6 is the synoptic diagram that probe is surveyed on the apparent surface of ruler.
Fig. 7 is the synoptic diagram of two kinds of different configurations of the probe on the ruler opposed surface with Fig. 8.
Fig. 9 is the synoptic diagram of measuring to Figure 12.
The present invention will be described in detail below with reference to accompanying drawing, illustrated the preferred embodiments of the present invention in the accompanying drawings.Yet this invention can be implemented with multiple different form, should not be construed as the example embodiment that is subject to hereinafter; But these embodiment that provided make the disclosure thoroughly with complete, and make the professional and technical personnel understand scope of the present invention.Identical symbol refers to components identical.
Fig. 1 is the synoptic diagram that x-y moves machine 1.Machine has and is used on two vertical direction x and y the moving-member 2 of mobile part A on platform B.This machine can be a precision machine tool arbitrarily.The corresponding to high standard precision of the development of lathe and multi-spindle machining equipment requirements and high-accuracy engineering.When having only the error when accurate measurements and calculations machine tool component, the high precision in could obtaining to make.
The current solution that is used for ruler calibration is that (often) measured each machine " each machine error " with laser measurement tools and stored.Then, make great efforts the identical condition of maintenance, make " each machine error " remain unchanged.This requires to use departing from of fixed to reduce as far as possible " each machine errors " such as common (very) expensive material such as devitrified glass and invar to such as conditions such as temperature and humidities extraordinary control being arranged.Even then, any may influence the service activity of configuration after, this measuring process of having to regularly to repeat at interval as every two years.
In order can accurately to measure, scale must be available.Yet this scale also must be measured.Therefore, the degree of accuracy of the degree of accuracy of final scale decision manufacturing.
Ruler commonly used carries out straightness calibration.Fig. 2 has illustrated the position of ruler 3.
The method of the flatness of known various measurement rulers, wherein a kind of is so-called three probe methods, as shown in Figure 3.Use measurement mechanism 4, three probe 4a, 4b and 4c are provided in this device.Measurement mechanism moves according to guide rail G (x) and measuring position S (x) in succession at regular intervals.Therefore, obtain the measurement result that adopts three probe orders, this is the reason that this method is called as order three probe methods.Comprise a large amount of relatively unknown parameters.At first, the surperficial S (x) that measure is at first unknown, the second, and guide rail G (x) is unknown, the 3rd, the crab angle γ of device 4 is positions.
At each some n, n+1, n+2, n+m etc., between the guide rail G (x) at probe n place, 4a measuring position and surperficial S (x) apart from a (n).
a(n)＝G(n)-S(n)
Equally, the distance b (n) between probe 4b measuring position n+1 place guide rail and surface, and probe 4c measuring distance c (n).
B (n)=G (n)-S (n+1)+L γ (n), wherein γ (n) is the yaw error at n place, position.
c(n)＝G(n)-S(n+2)+2Lγ(n)
Add and subtract and provide:
a(n)-2b(n)+c(n)＝-S(n)+2S(n+1)-S(n+2)
a(n+1)-2b(n+1)+c(n+1)＝-S(n+1)+2S(n+2)-S(n+3)
a(n+2)-2b(n+2)+c(n+2)＝-S(n+2)+2S(n+3)-S(n+4)
Deng.
(for example starting point (S (1) and S (2)) can setting-out, so these S (1) and S (2) can be set to 0 by 2 points.Can use above-mentioned equation to determine whole some S (n) like this.Obviously above-mentioned equation does not rely on guide rail G (x) and yaw error γ (x).
Therefore, by measuring at n point place, can determine not rely on the value of the S (x) of guide rail G (x) and yaw error γ (x) with three probes.
Order three probe measurement method are based on such calculating.
If G (x) and γ (x) be unknown quantity just, order three (or more) probe methods will allow cancellation unknown quantity G (x) and γ, with determine S (x) and thereby the flatness of measurement ruler, this can be used to other for example calibration of the flatness measurement of workpiece subsequently.
Yet the inventor recognizes that little systematic error still can take place, as shown in Figure 5.
a(n)＝G(n)-S(n)
b(n)＝G(n)-S(n+1)-δ+Lγ(n)
c(n)＝G(n)-S(n+2)+2Lγ(n)
Add and subtract and provide:
a(n)-2b(n)+c(n)＝-S(n)+2S(n+1)+δ-S(n+2)
a(n+1)-2b(n+1)+c(n+1)＝-S(n+1)+2S(n+2)+δ-S(n+3)
a(n+2)-2b(n+2)+c(n+2)＝-S(n+2)+2S(n+3)+δ-S(n+4)
Deng.
Unknown parameter δ influences the result of equation.In fact, the error that produces in the measurement is accumulated, that is, wherein first error of locating is little (δ), and n some place error is approximately n (n-1) δ.Even systematic error delta is perhaps very little, but because the factor of accumulation, the error in the measurement is perhaps very big.Device size is tending towards increasing, and the number of measurement point also is so, makes systematic error become remarkable.
Fig. 6 is the synoptic diagram of method and apparatus provided by the invention.Device 4 with probe 4a, 4b and 4c is mobile along a surperficial S (x) of ruler 3, and obtains measurement result.Then device is placed the opposed surface of ruler 3, the opposed surface S ' that is used to measure ruler 3 (x).
Fig. 7 and Fig. 8 have illustrated two different configurations.Device 4 can be directed in the opposed surface of ruler, makes probe 4a towards 4a or towards 4c, that is, identical probe forward surface is right.In Fig. 7, identical probe forward surface is right, and in Fig. 8, different probe forward surfaces is right, that is, the order of probe is opposite." forward surface to " meaning is that the coordinate that the coordinate identical (Fig. 7) of 4a probe or 4a and 4c pop one's head in is identical when middle probe is positioned at identical coordinate place along ruler.
Fig. 9 illustrated by common order three probe methods determine as the measured value (Δ+S (x)) of the arbitrary unit (a.u.) of the function of the x of unit (a.u.) arbitrarily.By the measured value shown in the big triangle (Δ+S (x)) the actual two parts that comprise: actual value S (x), shown in blockage, that is, and the bending of ruler 3 that should be straight; And systematic error delta, shown in little rhombus, systematic error delta more or less changes as the quadratic function of measurement point n.Perhaps the someone infers, the known system error increases by ad hoc fashion as the function of measurement point number n, therefore along with along the increasing apart from the x function of ruler, can isolate systematic error delta.Yet quafric curve is also more or less deferred in the bending of ruler 3 usually, makes two parts Δ (systematic error) and S (x) (true deviation of straight line) not to be separated, or is not easy at least separately.
Figure 10 illustrated identical measurement result, but ruler 3 opposed surface obtained.The actual two parts that comprise of measured value (Δ+S ' (x)): actual value S ' (x), i.e. the bending of opposed surface; And systematic error delta.Systematic error is to be produced by the error delta that does not have to change.S ' value (x) and the value opposite in sign of S (x), because be protruding in the one side of ruler, then the another side at ruler caves in, vice versa.And, only use these measurement results, two parts can not be separated.Yet, utilize this two measurement results, can separate this two-part contribution, that is, the true curvature of systematic error and ruler is to the contribution of measurement result, as Figure 11 and shown in Figure 12.Add and subtract the value that these measurement results provide systematic error delta on the one hand, provide the value S (x) of flexibility on the other hand.As long as the thickness t h (Fig. 7 and Fig. 8) of ruler compares better control with the flexibility (bending) of ruler, this mechanism just can the generation effect.Yet the latter is problem always.The thickness of ruler can be controlled very accurately, and also relies on such as other parameters such as temperature and humidities hardly, and these parameters have remarkable influence to the flatness of ruler.It is also noted that perhaps the someone thinks to have only as two guide rail G (x) to the opposed surface of ruler when being identical with yaw error γ (x), this mechanism just can work.If genuine, this will have serious restriction to this method, because this situation almost is impossible.Yet this is not a problem, G (x) and γ (x) cancellation from the equation on the both sides of ruler 3, and do not interdepend.Though importantly use identical probe in the opposed surface of ruler, the relative position of popping one's head in remains unchanged, and makes error delta remain unchanged.Use two kinds of different probes simultaneously not within the scope of the invention in opposite surfaces, on identical surface but on the different directions with twice of identical probe not within the scope of the invention yet.
In short the invention can be described as follows:
At the device of the site error that is used for measuring machine be used for measuring the system of the flatness of ruler with movable part (2) and ruler (3), described measuring system comprises many probes (4a, 4b, 4c) devices (4), is used to utilize balladeur train (4) to move in order to proceeding measurement according to guide rail (G (x)) along ruler (3).Balladeur train (4) moves to obtain measurement result along the surface (S (x)) of ruler (3), transfers to the opposed surface (S ' (x)) of ruler (3) then and moves to obtain measurement result along the opposed surface of ruler (3) (S ' (x)).By adding and subtracting measurement point obtained on the opposed surface of ruler, can differentiate the systematic error that produces by probe, thereby the measurement of ruler flatness is improved.Thereby in can reducing to make and the measuring error of workpiece and other part.This method and apparatus also can be used for real-time flatness and corrects.
Will be clear that and in framework of the present invention, can make many variations.Those skilled in the art it is to be understood that, shown in the present invention is not limited to hereinbefore and illustrated example.The present invention includes each new feature and each combination of features.Label in the claim does not limit their protection domain.Other not existence of described element is not in the claims got rid of in the use that " comprises " speech." one " does not get rid of the existence of plural situation.
For example, in a preferred embodiment, adopted three probe methods, but also can use more than three probes.On the other hand, extra error will be introduced into, yet extra information also is available.In a preferred embodiment, three probe methods have been adopted.
Ruler can be configured on a direction or the two or more direction.
The method of invention works, because the deviation of thickness is compared better control with the deviation of flatness.It is long that the size of ruler for example is generally the thick 2-3 rice of 5mm.The thickness of ruler can be controlled in the micrometer range during manufacture.
One type of systematic error is the variation in thickness that ruler is gone up along its length.When the variation in thickness of this system, known length direction along ruler can or be placed in the device before being placed on it in the device, by accurately measuring the variation in thickness of ruler along ruler, and when with the opposed surface of ruler on the measurement result comparison time handle this variation.A kind of comprise as simple lookup table along the system deviation of the function of position of ruler just much of that.
The deviation that is produced by of short duration influence such as the temperature variation to the thickness of ruler will can not be considered, but these errors are compared with departing from of flatness and wanted little several magnitude.
Ruler can comprise bar shaped or plate shaped, or any suitable shape or form.
Probe does not need all the one side at ruler.
For example, n (n 〉=1) probe can be surveyed the first surface of ruler, and the opposite surfaces of while m the individual probe detection ruler in (m 〉=1) (wherein n+m 〉=3).This method comprises subsequently along a direction and obtains measurement result, and subsequently, balladeur train is rotated, and makes m probe detection first surface, and n probe detection opposite surfaces, measurement is repeated.
In principle, in notion the most widely of the present invention, balladeur train can be transferred to the opposing face of ruler and ruler is remained on original position, and perhaps balladeur train remains on original position and ruler is turn-taked and made opposite surfaces and balladeur train face.
Because it is raised or sunken (that is, having the shape that departs from real ruler) that following situation causes ruler:
The bending of inherence in the-ruler
-because the bending of the ruler that the installation of ruler (as folder or stubborn) causes.
Ruler turn-taked can not change inherent crooked (therefore balladeur train is that projection becomes depression relatively, and vice versa) of ruler, yet because the running of ruler, the installation of ruler can change, and this can introduce the variation on the flexibility, and this variation can cause error.Therefore, preferably ruler remains unchanged, and balladeur train is transferred to the opposed surface of ruler.
This method, device and system are applicable to real-time measurement.Described device moves along ruler regularly, and in these seesawed, balladeur train (when it arrives last position) changed on the position, thereby made that the probe at a probing surface is surveyed opposite surfaces before this variation.During the seesawing of ruler, as long as can not change too much such as of short duration influences such as temperature and humidities, this method just allows the real-time accurate calibration of flatness.Be stressed that, the change of probe positions, as from a surface of ruler to opposite surfaces, make it possible to carry out this accurately real-time measurement.
Claims (8)
1, the sequential multi-probe method that is used for ruler (3) flatness measurement, described method adopts utilizes the balladeur train (4) that moves along guide rail (G (x)) many probes (4a, 4b, the 4c) devices (4) along described ruler (3) proceeding measurement, wherein, described balladeur train (4) moves along the surface (S (x)) of described ruler 3 to obtain measurement result, moves to obtain measurement result along the opposed surface of described ruler (S ' (x)) then.
2, sequential multi-probe method as claimed in claim 1, wherein, the opposed surface (S (x), S ' are (x)) in described ruler (3), described balladeur train (4) is made that by orientation like this described identical probe (4a, 4b, 4c) forward surface is right.
3, sequential multi-probe method as claimed in claim 1, wherein, the opposed surface (S (x), S ' are (x)) in described ruler (3), described balladeur train (4) is made the order of described probe (4a, 4b, 4c) be reversed by orientation like this.
4, sequential multi-probe method as claimed in claim 1 wherein, has used three probes (4a, 4b, 4c).
5, the measurement result that the method for claim 1, wherein relatively the opposed surface (S (x), S ' are (x)) of described ruler (3) is obtained is used to provide the measurement result of the flatness of described ruler.
6, method as claimed in claim 5 wherein, in described comparison, has been considered the systematic error of the thickness (th) of described ruler (3).
7, be used for measuring the device of the machine with movable part (2) and ruler (3) and the site error of the system of the flatness that is used to measure described ruler, described measuring system comprises many probe (4a, 4b, 4c) device (4), be used for utilizing the balladeur train (4) that moves along guide rail (G (x)) along ruler (3) proceeding measurement, wherein, described device comprises and is used for described balladeur train (4) is moved along the surface (S (x)) of described ruler (3) to obtain measurement result, shift described balladeur train (4) and move described balladeur train to obtain the device of measurement result to the opposed surface of described ruler (3) (S ' (x)) and along the described opposed surface of described ruler (3).
8, the measuring system that is used for ruler (3) flatness measurement, described system comprises many probe (4a, 4b, 4c) device (4), be used for utilizing the balladeur train (4) that moves along guide rail (G (x)) along ruler (3) proceeding measurement, wherein, described measuring system comprises and is used for described balladeur train (4) is moved along the surface (S (x)) of described ruler (3) to obtain measurement result, shift described balladeur train (4) and move described balladeur train (4) to obtain the device of measurement result to the opposed surface of described ruler (3) (S ' (x)) and along the described opposed surface of described ruler (3) (S ' (x)).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP04106644.0 | 2004-12-16 | ||
| EP04106644 | 2004-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101080609A true CN101080609A (en) | 2007-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA200580043016XA Pending CN101080609A (en) | 2004-12-16 | 2005-12-12 | Sequential multi-probe method for measurement of the straightness of a straightedge |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1828715A1 (en) |
| JP (1) | JP2008524576A (en) |
| CN (1) | CN101080609A (en) |
| WO (1) | WO2006064445A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103673844A (en) * | 2013-12-03 | 2014-03-26 | 高玉树 | Pipe or bar straightness detecting ruler |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4980817B2 (en) * | 2007-08-07 | 2012-07-18 | 株式会社ナガセインテグレックス | Multipoint probe zero error related value recording device |
| JP4980818B2 (en) * | 2007-08-07 | 2012-07-18 | 株式会社ナガセインテグレックス | Variation detection method of zero error of multi-point probe |
| JP5210911B2 (en) * | 2009-02-03 | 2013-06-12 | 株式会社ナガセインテグレックス | Shape measuring device |
| CN102519408B (en) * | 2011-12-12 | 2013-09-11 | 陕西宝成航空仪表有限责任公司 | Method for measuring a plurality of parts at one time by three-coordinate measuring machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112154A (en) * | 1974-07-22 | 1976-01-30 | Nippon Kokan Kk | Hyomenheitandosokuteihoho |
| US4084324A (en) * | 1975-04-23 | 1978-04-18 | The Rank Organisation Limited | Measuring instrument |
| US5205046A (en) * | 1991-06-05 | 1993-04-27 | Ford Motor Company | Method for measuring surface waviness |
-
2005
- 2005-12-12 CN CNA200580043016XA patent/CN101080609A/en active Pending
- 2005-12-12 JP JP2007546258A patent/JP2008524576A/en active Pending
- 2005-12-12 EP EP05824115A patent/EP1828715A1/en not_active Withdrawn
- 2005-12-12 WO PCT/IB2005/054175 patent/WO2006064445A1/en active Application Filing
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103673844A (en) * | 2013-12-03 | 2014-03-26 | 高玉树 | Pipe or bar straightness detecting ruler |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008524576A (en) | 2008-07-10 |
| EP1828715A1 (en) | 2007-09-05 |
| WO2006064445A1 (en) | 2006-06-22 |
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