CN101059459A - Microscopic thermal imaging method and device thereof - Google Patents
Microscopic thermal imaging method and device thereof Download PDFInfo
- Publication number
- CN101059459A CN101059459A CNA2007101001656A CN200710100165A CN101059459A CN 101059459 A CN101059459 A CN 101059459A CN A2007101001656 A CNA2007101001656 A CN A2007101001656A CN 200710100165 A CN200710100165 A CN 200710100165A CN 101059459 A CN101059459 A CN 101059459A
- Authority
- CN
- China
- Prior art keywords
- image
- micro
- thermal imaging
- refrigeration
- object lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
A microscope image method based on non-refrigeration focus plane detector array comprises that (1), using an infrared microscope object lens to image a radiation image of an object on the non-refrigeration focus plane detector array, (2), the non-refrigeration focus plane detector array converts the radiation image into an electric image, to be output via standard video, (3), an image pickup card converts the standard video thermal image into a digit image to be stored, (4), using a self-adaptive non-uniform correct method based on scene to process non-uniformity correction on the digit image, to reduce the image fixed image noise caused by the sensitivity bias of detector, (5), processing microscope thermal image display, analysis, storage or the like on the corrected image. Since the non-refrigeration focus plane detector array has high property/value ratio, without refrigeration, but with low power consumption, small volume, low weight or the like, the cost of the microscope thermal image system can be reduced to obtain wide application.
Description
Technical field
The present invention relates to a kind of method and apparatus of micro-thermal imaging, relate in particular to a kind of method and apparatus of the micro-thermal imaging based on uncooled fpa detector.
Background technology
Thermal imaging has obtained to use widely in industrial detection, medical diagnosis and scientific research field at present, becomes effective thermal diagnosis instrument.But present most of thermal imaging system is the mode of operation of looking in the distance, and is not suitable for needing microscopic analysis and the application that detects occasion at some, is difficult to work effectively, has influenced understanding and faults analysis to things.For example, in design, fail-safe analysis and the defects detection of microelectronics integrated chip and circuit thereof, can utilize the micro-thermal imaging technology to carry out the non-cpntact measurement diagnosis; In biomedical diagnostic, the micro-thermal imaging technology can provide means to the diagnosis and the growth analysis of cancer cell.
In order to satisfy the demand in above-mentioned field, begin to release micro-thermal imaging system the external nineties, because heatable stage microscope belongs to amplification imaging, requires detector to have higher heat sensitivity, and therefore, its core component is all based on refrigeration type infrared detector.Because refrigeration type infrared detector costs an arm and a leg, and makes the micro-thermal imaging The Application of Technology be subjected to very big restriction.
The research of domestic adjust the telescope to one's eyes thermal imaging and application thereof at present is also very weak, does not still have thermal imaging microscope product and occurs, and has only the microscopical use report of import refrigeration mode thermal imaging.For example, the infrared microscopy thermal imaging system InfraScope of the EDO/BARNES company of 5 introduction U.S. in 1996 of electronics adopts the InSb focus planardetector of liquid nitrogen refrigerating, configuration 10
*, 5
*, 1
*, 1/5
*Infrared objective, high spatial resolution can reach 5 μ m.Because adopt Refrigeration Technique, system is the cost costliness not only, and volume weight is big, make this technology applying at home be subjected to great restriction.
Since uncooled fpa detector have than high performance-price ratio, need not refrigeration, low in energy consumption, volume is little, characteristic such as in light weight, particularly in recent years along with the development of thermal imaging, the uncooled fpa detector cost reduces greatly, has promoted the application in various fields.But have not yet to see special report or product based on the uncooled fpa detector micro-thermal imaging.
Summary of the invention
Lower at present refrigeration mode detector valency height, non-refrigeration detector sensitivity, practical application lacks the situation of micro-hot analysis means, the invention provides a kind of new microscopic thermal imaging method, can be used for microelectronic chip and circuit design thereof and fault detect, biomedical micro-thermal imaging analysis etc., analyze and the detection technique means for industrial detection, biomedical diagnostic and the scientific research of integrated chip provides fine heat.This invention is compared with external microscopic thermal imaging method, owing to adopted the uncooled fpa detector assembly as thermal imaging device, so its volume is little, in light weight, price reduces greatly, helps applying of heatable stage microscope.At the imaging of uncooled fpa detector assembly, this invention has proposed the self-adaptation nonuniformity correction technology based on scene, obviously reduced of the influence of the heterogeneity fixed pattern noise of uncooled fpa detector, improved the micro-thermal imaging quality the system imaging quality.
Technical matters solved by the invention is to adopt the uncooled fpa detector assembly to finish the micro-amplification imaging of object infrared radiation image and owing to the detector sensitivity deviation is brought the image non-uniform problem.Heterogeneity is defined as the infrared focal plane detector array when receiving same even irradiance, because response is inconsistent between each probe unit, fixed pattern noise such as in output image, form grid, curve speckle, brightness is unbalance, claim fixed pattern noise again, it can be observed image to the observer and produce strong vision interference.
In order to address the above problem, the present invention designs and has realized distinctive micro-thermal imaging system and based on the self-adaptation nonuniformity correction technology of scene, obtained the micro-heat picture of object effectively, and obviously reduced of the influence of heterogeneity fixed pattern noise to the system imaging quality, make heatable stage microscope reach the practicability level, can satisfy microelectronic integrated circuit chip and circuit design thereof, medical diagnosis and scientific research field micro-thermoanalytical application demand based on the uncooled fpa detector assembly.
According to above-mentioned purpose, microscopic thermal imaging method provided by the invention comprises step:
(1) is imaged on the uncooled fpa detector assembly by the radiation image of infrared microscopy object lens object;
(2) the uncooled fpa detector assembly is converted to electronic image with radiation image, and presses normal video output;
(3) by image pick-up card the normal video heat picture is converted into digital picture, and is stored in the computing machine;
(4) utilization is carried out nonuniformity correction based on the self-adaptation nonuniformity correction method of scene to digital picture, reduces because the image fixed pattern noise that the detector sensitivity deviation causes; Specifically being to carry out horizontal and vertical processing respectively, is that the processing procedure of example is as follows with the lateral processes:
(a) obtain the average and the variance of the pixel of every row, its adjacent mean value of surveying unit is then got by the detection unit at alignment two ends;
(b) define neighborhood average and the neighborhood variance that each passage is used to proofread and correct;
(c) constantly repeat the channel-equalization algorithm, circulation is proofreaied and correct, until producing optimum output.
(5) image after proofreading and correct being carried out micro-heat picture shows, analyzes, stores and other processing.
The present invention also provides a kind of and the corresponding micro-thermal imaging device of said method, comprises infrared microscopy object lens, uncooled fpa detector assembly, image pick-up card, micro-heat picture disposal system, heatable stage microscope support and power supply, wherein:
The infrared microscopy object lens are used for object infrared radiation image amplification imaging at uncooled fpa detector;
The uncooled fpa detector assembly is used for the radiation image that the infrared microscopy object lens become is converted to electronic image, and presses normal video output;
Image pick-up card is used for the heat picture vision signal of non-refrigeration detector assembly output is converted into digital picture;
The nonuniformity correction processing module realizes self-adaptation nonuniformity correction algorithm based on scene on computers by software, realizes the elimination of micro-heat picture fixed pattern noise;
Micro-heat picture disposal system is finished demonstration, analysis, storage and other processing of heat picture;
Heatable stage microscope support and power supply are used for integrated micro-thermal imaging device, and working power is provided.
As shown in Figure 2, the image acquisition and the processing procedure of this system are: the infrared radiation image that object sends images on the uncooled fpa detector assembly by the infrared microscopy object lens, by detector assembly radiation image is converted to electronic image, and presses normal video output; Via image pick-up card the normal video thermal image signal is collected in the computing machine, form digital picture; By the nonuniformity correction processing module image digitization is carried out nonuniformity correction and handle, and can further carry out follow-up demonstration, analysis, storage and processing by micro-heat picture disposal system.
The characteristics of this method and system are: because uncooled fpa detector has high cost performance, need not refrigeration, low in energy consumption, volume is little, characteristic such as in light weight, the micro-thermal imaging system cost is reduced greatly, adopt nonuniformity correction method simultaneously based on scene, obviously reduce because the low micro-heat picture fixed pattern noise that causes of detector sensitivity, micro-thermal imaging based on the non-refrigeration focal surface assembly is become a reality, can promote of the application of micro-thermal imaging technology in various fields, improve design, the technical merit of experimental analysis and research improves the efficient and the reliability of diagnosis.
Description of drawings
Fig. 1 is the imaging optical path figure of infrared microscopy object lens;
Fig. 2 is based on the micro-thermal imaging system block diagram of uncooled fpa detector assembly;
Fig. 3 is through the micro-heat picture of Renminbi dime before and after the nonuniformity correction;
Fig. 4 is the picture of led circuit plate and the micro-thermal map of led circuit plate.
Embodiment
Core of the present invention is: finish the conversion of object infrared radiation image to electronic image and digital picture by the uncooled fpa detector assembly, and realized a kind of adaptive nonuniformity correction based on scene.
Below further specify technical scheme of the present invention by specific embodiment.
High performance infrared microscopy object lens make infrared radiation image imaging that object sends to the uncooled fpa detector assembly.According to imaging requirements, adopt 2 of material developments such as Ge and ZnS
*Infrared microscopy object lens, Fig. 1 are infrared objective imaging optical path figure.For the index with uncooled fpa detector is complementary, the infrared microscopy object lens should be proofreaied and correct various aberrations effectively, improve optical transfer function MTF, obtain the imaging of high resolution, have higher transmittance in the service band scope simultaneously.
According to the performance of micro-imaging characteristics, thermal radiation law and detector, analyze the signal to noise ratio (S/N ratio) of micro-thermal imaging, thereby determine the microscopical general technical index of thermal imaging.The noise equivalent temperature difference (NETD) and noise equivalent radiation rate variance (NEED) model of micro-thermal imaging system have been set up.The general expression formula of the noise equivalent temperature difference of micro-thermal imaging system is:
The noise equivalent radiation rate variance expression formula of micro-thermal imaging system is:
Because along with the increase of microcobjective multiplying power, NA ' progressively reduces, thus the NETD of micro-thermal imaging system and NEED all along with the increase of multiplying power, promptly the temperature resolving power of micro-thermal imaging system will descend under multiplying power condition greatly.For the uncooled fpa detector assembly, when the micro-thermal imaging of big multiplying power, can come part to improve the temperature resolving power of system by the mode of frame stack.
As shown in Figure 2, the infrared radiation that object sends is imaged onto on the uncooled fpa detector by infrared objective, uncooled fpa detector is the infrared radiation image transitions electronic image, and press the output of standard analog vision signal or digital video frequency flow, image pick-up card collects the normal video thermal image signal in the computing machine, forms digital picture.
Though adopt uncooled fpa detector to reduce the volume and weight that cost has alleviated system, but because uncooled fpa detector sensitivity is lower, and micro-thermal imaging belongs to amplification imaging, form apparent in view " curtain " formula heterogeneity fixed pattern noise easily, make image quality decrease, influence further Treatment Analysis.The bearing calibration of adopting general catch to hide imaging viewing field also is difficult to effective elimination.For this reason, patent of the present invention has been designed and Implemented a kind of self-adaptation nonuniformity correction technology based on scene, can obviously eliminate of the influence of heterogeneity fixed pattern noise to the system imaging quality, improve the quality of micro-thermal imaging, thereby solved the problem that adopts the non-refrigeration focal surface technology to be brought.Nonuniformity correction algorithm principle and process are as follows:
The basic foundation of Processing Algorithm is to make each output of surveying unit and adjacent to survey first output close, has similar single order and second-order statistic.Processing procedure need be done lateral processes respectively and vertically handle.To eliminate travers is example, is the image of M*N for size, at first obtains the pixel average μ of every row
k(i) and variances sigma
k(i), wherein subscript k represents frame number, ij be image the ranks index (i=1,2 ..., M, j=1,2 ..., N).
Average and the variance of i capable (i passage) are as follows:
Capable for i, judge σ
k(i) whether less than 5, if less than would make σ
k(i)=5;
The average and the variance of the adjacent lines that i capable (i passage) is corresponding
μm
k(i)＝[μ
k(i-1)+μ
k(i+1)]/2
σm
k(i)＝[σ
k(i-1)+σ
k(i+1)]/2 (4)
Following processing is done by detection unit for the alignment two ends:
μm
k(1)＝(μm
k(1)+μm
k(2)·2+μm
k(3))/4，μm
k(M)＝(μm
k(M-2)+μm
k(M-1)·2+μm
k(M))/4 (5)
σm
k(1)＝(σm
k(1)+σm
k(2)·2+σm
k(3))/4，σm
k(M)＝(σm
k(M-2)+σm
k(M-1)·2+σm
k(M))/4
Define the neighborhood average μ that each passage is used to proofread and correct then
k(i) and the neighborhood variances sigma
k(i).Too big for fear of the single frames noise drift, add forgetting factor λ, when 0＜λ＜0.5, the data that obtain recently occupy bigger weight in statistical restraint, algorithm for system the time to become tracking power stronger, just can reflect the situation of change of systematic parameter quickly.But this moment, the smoothing capability of algorithm was poor, easily vibrated.When 0.5＜λ＜1, statistical restraint tends to the mean value in early stage, and smoothing capability is stronger, the difficult vibration, but the characteristic that becomes when following the tracks of dies down.In the practical application, algorithm got λ=0.5.
For proofreading and correct for the first time, do not proofread and correct,
Begin second-order correction then
μ
k(i)＝(1-λ)· μ
k-1(i)+λ·μm
k(i)
σ
k(i)＝(1-λ)· σ
k-1(i)+λ·σm
k(i) (6)
In delegation up to a hundred values are arranged because each surveys unit, its quantity is enough carried out the statistic computing.Survey unit and have identical single order and second-order statistics value (μ in order to guarantee each with its adjacent element
kAnd σ
k), produce correction value output x by following formula
k(i, j)
If b
k(i)＞2. item make b[i]=1; C[i]=0; , promptly replace present value with initial value, do not proofread and correct.
Test as can be known by simulation and real image: once proofread and correct and effectively to eliminate interchannel difference, because above-mentioned channel-equalization strategy only relates to the consistency problem of adjacent two pixels, so the preceding x as a result that once proofreaies and correct
k(i is j) as proofread and correct y next time
K+1(i, input data j) constantly repeat the channel-equalization algorithm, and circulation is proofreaied and correct, until producing optimum output, promptly
y
k+1(i，j)＝x
k(i，j) (9)
So (8), (9) substitution (7) can obtain the correction output of each probe unit of uncooled fpa detector
Suppose that the n time correction result is with respect to original date y
1((i, gain j) and be biased to B
k, C
k, promptly
(9), (10) substitution (11) that constantly circulates can obtain
B
k(i)=B
K-1(i) b
k(i), C
k(i)=b
k(i) C
K-1(i)+c
k(i) (12) k=0,1 ..., num represents the number of times proofreaied and correct, initialization condition is B
0=[1,1 ..., 1]
T, C
0=[0,0 ..., 0]
T, matrix size all is to be M * 1.
Contrast Fig. 2, the complete micro-thermal imaging process based on the uncooled fpa detector assembly is as follows: the infrared radiation that object sends is imaged onto on the uncooled fpa detector assembly by the infrared microscopy object lens, finishes the conversion of radiation image to electronic image; Utilize image pick-up card that image is gathered, realize the conversion of electronic image, and be stored in the computing machine to digital picture; The digital picture nonuniformity correction of micro-thermal imaging is finished in utilization in real time based on the adaptive nonuniformity correction module of scene; Utilize micro-thermal imaging collection and process software system to finish the Treatment Analysis of heat picture, disposal system comprises several sections such as the collection/demonstration/storage, graphical analysis, data analysis of image/image/video stream.Handling image can show on display, also can print from printer output.All operations are undertaken by operation keyboard and mouse, and the heatable stage microscope output image can be transferred on the video monitor and show simultaneously.
In order to finish nonuniformity correction and image acquisition and real time processing system, the operability of raising system, the present invention is based on the Windows operating platform, utilize VC++ to develop adaptive nonuniformity correction module, finish the nonuniformity correction of micro-heat picture based on scene; Developed the Treatment Analysis that micro-thermal imaging collection and process software system finish heat picture simultaneously, disposal system comprises several sections such as the collection/demonstration/storage, graphical analysis, data analysis of image/image/video stream.
The Renminbi dime thermal map of gathering by the present invention and as shown in Figure 3 through the heat picture behind the nonuniformity correction.As seen from Figure 3, proofread and correct preceding image and have significantly perpendicular value striped, influenced the system imaging quality, brought difficulty to successive image processing and analysis.And eliminated the noise streak that brings owing to intrinsic heterogeneity through nonuniformity correction, picture quality is improved significantly.
By the present invention gather and through the micro-heat picture of led circuit plate of nonuniformity correction c as Fig. 4) shown in the figure.Wherein a) figure is the picture of led circuit plate, and in order to contrast the size of led circuit plate, b) figure has provided the contrast figure of led circuit plate and Renminbi dime.By c) to scheme as seen, two s shape patterns of the central part that can't see in visible images but can be clear that in micro-heat picture, and image has been eliminated the noise streak that intrinsic heterogeneity is brought.This shows the validity of patent of the present invention, can further be applied to the field that needs micro-heat picture to analyze.
In sum, the invention provides a kind of microscopic thermal imaging method and device based on the uncooled fpa detector assembly.Be applied to microelectronics and optoelectronic device and application thereof, can improve integrated circuit (IC) chip and reliability design level thereof, guarantee the performance and the quality of microelectronics and optoelectronic device and products thereof; Be applied to medical domain, can be medical diagnosis, cancer detection etc. new technological means is provided; Be applied to the scientific research field, can be scientific and technical personnel new analysis tool is provided; Be applied to the police criminal detection field, can be the technological means of you can well imagine for new of detecing of suspicious material evidence, vestige.
Claims (8)
1, a kind of microscopic thermal imaging method comprises step:
(1) is imaged on the uncooled fpa detector assembly by the radiation image of infrared microscopy object lens object;
(2) the uncooled fpa detector assembly is converted to electronic image with radiation image, and presses normal video output;
(3) by image pick-up card the normal video heat picture is converted into digital picture, and is stored in the computing machine;
(4) utilization is carried out nonuniformity correction based on the self-adaptation nonuniformity correction method of scene to digital picture, reduces because the image fixed pattern noise that the detector sensitivity deviation causes;
(5) image after proofreading and correct being carried out micro-heat picture shows, analyzes, stores and other processing.
2, the method for claim 1 is characterized in that, the mode that adopts frame to superpose in described step (1) improves the temperature resolving power of image transitions.
3, the method for claim 1 is characterized in that, described step (2) specifically comprises the process of image being carried out horizontal and vertical processing respectively, is that the processing procedure of example is as follows with the lateral processes:
(a) obtain the average and the variance of the pixel of every row, its adjacent mean value of surveying unit is then got by the detection unit at array two ends;
(b) define neighborhood average and the neighborhood variance that each passage is used to proofread and correct;
(c) constantly repeat the channel-equalization algorithm, circulation is proofreaied and correct, until producing optimum output.
4, a kind of micro-thermal imaging device comprises infrared microscopy object lens, image pick-up card and micro-heat picture disposal system, it is characterized in that, also comprises:
Uncooled fpa detector, the image transitions that is used for the radiation of described infrared microscopy object lens is that electronic image is exported to image pick-up card;
The nonuniformity correction processing module realizes self-adaptation nonuniformity correction algorithm based on scene on computers by software, realizes the elimination of micro-heat picture fixed pattern noise.
5, device as claimed in claim 4 is characterized in that, described infrared microscopy object lens adopt the infrared microscopy object lens of 2 * infrared microscopy object lens and other same-interface.
6, device as claimed in claim 4 is characterized in that, also comprises heatable stage microscope support and power supply, is used for integrated micro-thermal imaging device, and working power is provided.
7, device as claimed in claim 4 is characterized in that, also comprises video monitor, is used for showing synchronously the micro-heat picture of described uncooled fpa detector output.
8, device as claimed in claim 4 is characterized in that, also comprises computer system input and output and display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101001656A CN101059459A (en) | 2007-06-05 | 2007-06-05 | Microscopic thermal imaging method and device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101001656A CN101059459A (en) | 2007-06-05 | 2007-06-05 | Microscopic thermal imaging method and device thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101059459A true CN101059459A (en) | 2007-10-24 |
Family
ID=38865676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101001656A Pending CN101059459A (en) | 2007-06-05 | 2007-06-05 | Microscopic thermal imaging method and device thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101059459A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103017A (en) * | 2010-11-05 | 2011-06-22 | 北京理工大学 | Novel un-cooled infrared focal plane imaging system |
| CN102183305A (en) * | 2010-12-31 | 2011-09-14 | 燕山大学 | Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system |
| CN102252760A (en) * | 2011-06-20 | 2011-11-23 | 北京理工大学 | Telescopic U-shaped border blackbody field stop capable of controlling temperature |
| CN102279053A (en) * | 2011-04-11 | 2011-12-14 | 北京理工大学 | Uncooled infrared focal plane array imaging system containing time modulation device |
| CN103733055A (en) * | 2011-08-31 | 2014-04-16 | 夏普株式会社 | Wiring fault detection method, wiring fault detection device, and method for manufacturing semiconductor substrate |
| CN103720457A (en) * | 2012-10-10 | 2014-04-16 | 美国科视数字系统公司 | Catheter discrimination and guidance system |
| CN104083149A (en) * | 2014-07-24 | 2014-10-08 | 成都市晶林科技有限公司 | High-precision human body canceration diagnosis system and method |
| CN104240206A (en) * | 2014-09-30 | 2014-12-24 | 成都市晶林科技有限公司 | Uncooled infrared focal plane detector image processing system and method |
| CN104793072A (en) * | 2015-03-28 | 2015-07-22 | 合肥天海电气技术有限公司 | Electrical equipment fault diagnosis system based on thermal pattern analysis method |
| CN104864966A (en) * | 2015-04-03 | 2015-08-26 | 燕山大学 | Microscopic thermal imaging method |
| CN105869125A (en) * | 2016-03-28 | 2016-08-17 | 安徽云森物联网科技有限公司 | Infrared image enhancement algorithm based on optical readout infrared chip |
| CN107198510A (en) * | 2017-04-06 | 2017-09-26 | 北京贝亿医疗器械有限公司 | Hot tomographic apparatus |
| CN109489832A (en) * | 2018-11-21 | 2019-03-19 | 燕山大学 | A kind of refrigeration mode micro-thermal imaging device and method with optical flat micro scanner |
| CN117974662A (en) * | 2024-03-29 | 2024-05-03 | 东莞市昌盛电子制品有限公司 | Chip detection method, electronic equipment and storage medium |
-
2007
- 2007-06-05 CN CNA2007101001656A patent/CN101059459A/en active Pending
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103017A (en) * | 2010-11-05 | 2011-06-22 | 北京理工大学 | Novel un-cooled infrared focal plane imaging system |
| CN102183305A (en) * | 2010-12-31 | 2011-09-14 | 燕山大学 | Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system |
| CN102183305B (en) * | 2010-12-31 | 2012-08-29 | 燕山大学 | Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system |
| CN102279053A (en) * | 2011-04-11 | 2011-12-14 | 北京理工大学 | Uncooled infrared focal plane array imaging system containing time modulation device |
| CN102252760A (en) * | 2011-06-20 | 2011-11-23 | 北京理工大学 | Telescopic U-shaped border blackbody field stop capable of controlling temperature |
| CN102252760B (en) * | 2011-06-20 | 2012-07-25 | 北京理工大学 | Telescopic U-shaped border blackbody field aperture capable of controlling temperature |
| CN103733055B (en) * | 2011-08-31 | 2015-11-25 | 夏普株式会社 | The manufacture method of distribution defect inspection method and distribution defect detecting device and semiconductor substrate |
| CN103733055A (en) * | 2011-08-31 | 2014-04-16 | 夏普株式会社 | Wiring fault detection method, wiring fault detection device, and method for manufacturing semiconductor substrate |
| CN103720457A (en) * | 2012-10-10 | 2014-04-16 | 美国科视数字系统公司 | Catheter discrimination and guidance system |
| CN104083149A (en) * | 2014-07-24 | 2014-10-08 | 成都市晶林科技有限公司 | High-precision human body canceration diagnosis system and method |
| CN104083149B (en) * | 2014-07-24 | 2016-06-15 | 成都市晶林科技有限公司 | A kind of High-precision human canceration diagnostic system and method |
| CN104240206B (en) * | 2014-09-30 | 2017-09-19 | 成都市晶林科技有限公司 | Non-refrigerated infrared focal plane probe image processing method |
| CN104240206A (en) * | 2014-09-30 | 2014-12-24 | 成都市晶林科技有限公司 | Uncooled infrared focal plane detector image processing system and method |
| CN104793072A (en) * | 2015-03-28 | 2015-07-22 | 合肥天海电气技术有限公司 | Electrical equipment fault diagnosis system based on thermal pattern analysis method |
| CN104864966A (en) * | 2015-04-03 | 2015-08-26 | 燕山大学 | Microscopic thermal imaging method |
| CN105869125A (en) * | 2016-03-28 | 2016-08-17 | 安徽云森物联网科技有限公司 | Infrared image enhancement algorithm based on optical readout infrared chip |
| CN107198510A (en) * | 2017-04-06 | 2017-09-26 | 北京贝亿医疗器械有限公司 | Hot tomographic apparatus |
| CN109489832A (en) * | 2018-11-21 | 2019-03-19 | 燕山大学 | A kind of refrigeration mode micro-thermal imaging device and method with optical flat micro scanner |
| CN117974662A (en) * | 2024-03-29 | 2024-05-03 | 东莞市昌盛电子制品有限公司 | Chip detection method, electronic equipment and storage medium |
| CN117974662B (en) * | 2024-03-29 | 2024-06-11 | 东莞市昌盛电子制品有限公司 | Chip detection method, electronic equipment and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101059459A (en) | Microscopic thermal imaging method and device thereof | |
| CN101424645B (en) | Soldered ball surface defect detection device and method based on machine vision | |
| Zhao et al. | Ultrahigh-speed color imaging with single-pixel detectors at low light level | |
| CN104181686B (en) | Light field microscopic method based on FPM | |
| US20080107328A1 (en) | Non-uniform Image Defect Inspection Method | |
| US20130250144A1 (en) | Imaging apparatus and method of controlling same | |
| CN1784624A (en) | Scanning laser microscope with wave-front sensor | |
| CN107966801A (en) | A kind of high speed Fourier lamination imaging device and reconstructing method based on ring illumination | |
| CN101063659A (en) | System for detecting paper flaw of paper sheet | |
| CN1495659A (en) | Camera | |
| KR102009740B1 (en) | Apparatus for inspecting of display panel and method thereof | |
| CN1261687A (en) | Camera shooting device | |
| US20100188739A1 (en) | Tomographic Light Field Microscope | |
| CN112710670B (en) | Solar cell coating detection device and control method | |
| Çelik et al. | A real-time defective pixel detection system for LCDs using deep learning based object detectors | |
| CN104168430A (en) | TDI CCD focal plane coding super-resolution imaging device and method | |
| CN104992446A (en) | Nonlinear illumination adaptive image splicing method and implementing system thereof | |
| CN1573532A (en) | Image processing method and apparatus and x-ray imaging apparatus | |
| US9436866B2 (en) | High sensitivity flat panel microbiology detection and enumeration system | |
| CN104807447B (en) | A kind of novel intelligent machine vision Digital Media System | |
| JP2004279296A (en) | Film thickness acquiring method | |
| WO2014088605A1 (en) | Sub-pixel imaging for enhanced pixel resolution | |
| CN108551541B (en) | A kind of imaging system and its imaging method that low cost is highly sensitive | |
| CN103698917A (en) | Isolation pad detecting device and method | |
| CN110161667A (en) | One kind being based on compressed sensing super-resolution micro imaging method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20071024 |