CN102183305B - Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system - Google Patents

Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system Download PDF

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CN102183305B
CN102183305B CN201010617933A CN201010617933A CN102183305B CN 102183305 B CN102183305 B CN 102183305B CN 201010617933 A CN201010617933 A CN 201010617933A CN 201010617933 A CN201010617933 A CN 201010617933A CN 102183305 B CN102183305 B CN 102183305B
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scaling
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高美静
张磊
金伟其
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Yanshan University
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Abstract

The present invention relates to a micro-scanning calibrating method of an optical micro-scanning thermal microscope imaging system and belongs to the field of imaging. The micro-scanning method improves the shortages of a zero calibrating method and an application in optical micro-scanning thermal microscope imaging system put forth in the invention with an application No. 200810183262. 0, while borrowing the strengths of the invention. Compared with the invention titled as a zero calibrating method and an application in optical micro-scanning thermal microscope imaging system, the micro-scanning calibrating method in the present invention realizes the accurate calibration of a first micro-scanning point while completing the calibration of the other three imaging points with a same method, and thus is capable of obtaining four images on ideal positions directly and obtaining a clear picture of an original object through composition, thereby providing a more accurate zero calibrating method and accordingly further improving the spatial resolution of the imaging system.

Description

The micro scanning calibrating method of optical micro-scanning micro-thermal imaging system
Technical field
The invention belongs to the photoelectronic imaging technical field, relate to a kind of 2 * 2 micro scanning each point calibrating methods of optical micro-scanning micro-thermal imaging system.
Background technology
In optical flat rotation micro-scanning micro-thermal imaging system; The optical flat bearing guarantees that optical flat and imaging system optical axis keep certain inclination angle theta; When flat board carries out position angle when rotation around optical axis; Assemble beams focusing and name a person for a particular job on imaging surface that to form with former picture point be the center, Δ is the circumference of radius.If the rectangular coordinate system with detector array is a benchmark; The rotary optical flat board makes it carry out image sampling in 4 positions such as 45 °, 135 °, 225 ° and 315 ° respectively; And refractive index n according to optical flat; Design slab-thickness d and tilt angle theta; Make
Figure BSA00000405382000011
(wherein L is the centre distance of detector cells), 4 width of cloth low resolutions that then obtain thus under standard 2 * 2 micro scanning patterns are owed sampled images.The define system micro scanning is to gather the position that first width of cloth is owed sampled images under standard 2 * 2 micro scanning patterns zero point.
No matter but be after system installs or detects, because that each time installation belongs to the position angle of image-forming assembly of detachable pattern is not quite identical, all there is certain deviation in the zero-point positioning of detector direction and automatically controlled rotation platform after each the installation.If still carry out 2 * 2 micro scannings by the position of rotation of confirming in the past; Then because the deviation of micro scanning null position; Cause the deviation of all micro scanning positions, be difficult under the micro scanning pattern of the standard that obtains 2 * 24 width of cloth low resolution images of level and vertical dislocation 1/2 detector pitch each other, directly influence the reconstruct of follow-up high resolution image; Can't improve the system space resolving power, sometimes resolving power even can reduce.Therefore; Need carry out new demarcation to 2 * 2 micro scanning zero point (angle) positions; Otherwise the upright square of 4 width of cloth image micrometric displacement position deviation standards, 2 * 2 micro scannings of being gathered; The picture quality of over-sampling reconstruct is more of poor quality than the bilinearity amplification, and the design of optical flat micro scanning system is fallen short of success for lack of final effort, and the spatial resolution of system can not get improving.
For addressing the above problem; Application number is 200810183262.0, based on geometrical principle and digital image processing method, the micrometric displacement of research and utilization two two field pictures is confirmed the method for micro scanning zero point and over-sampling reconstruct to disclose the application that day is on July 22nd, 2009 " Zero point calibration method and the application in optical micro-scanning micro-thermal imaging system ".The method of this application has been accomplished the calibration of a certain fixedly ideal position point, promptly behind 2 * 2 scan start points, directly seeks the contact between these 2, and then controls the optical flat rotation and regulate, and other three points are realized through optical flat difference half-twist.Its deficiency is that having only first point is that zero point has been accomplished calibration in micro scanning, and three micro scanning points of back are not accomplished demarcation, so there is error in its excess-three point, also needs can use by later image processed means.And no matter error where, if correction angle is spent greatly, owing to the uncertainty of external environmental condition, and the mechanical reason of universal stage micromanipulator or High Precision Automatic rotation platform etc., all can be caused in target point undetermined institute position.
Summary of the invention
The present invention is directed to application number and be the weak point of 200810183262.0 application " Zero point calibration method and the application in optical micro-scanning micro-thermal imaging system "; On the basis of its advantage of succession, improve; Purpose provides the calibrating method of a kind of more precise zero points and other three micro scanning points, thereby further improves the system space resolving power.
1) selected reference A, A are the picture point that imaging system captures when just having started, or optical flat stops the picture point to capture when arbitrarily angled in the imaging system work, is that initial point is set up coordinate system XAY with A;
2) optical flat is turned clockwise 180 °, the picture point of this moment is for treating scaling point B 1, calculate this and treat scaling point B 1Coordinate;
3) with line segment AB 1Mid point be the center of circle, with line segment AB 1Being diameter, setting up circle O, is initial point with O, sets up coordinate system ZOW;
4) calculate the coordinate (x of center of circle O at coordinate system XAY 0, y 0);
5) to the current scaling point B that treats 1, according to the anglec of rotation and the sense of rotation of predetermined calibration rule 1 definite optical flat, utilize the determined anglec of rotation and sense of rotation, optical flat is rotated treating that scaling point moves to ideal point, gather first width of cloth image;
6) optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 2, calculate this and treat the coordinate of scaling point at coordinate system XAY;
7) to the current scaling point of treating, calibrate and optical flat is rotated according to predetermined demarcation rule 2 and make it arrive second image space of 2 * 2 micro scannings, gather second width of cloth image;
8) continue optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 3, calculate this and treat the coordinate of scaling point at coordinate system XAY;
9) the current scaling point of treating is obtained current micro scanning image space according to predetermined demarcation rule 2, gather the 3rd width of cloth image;
10) continue optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 4, calculate this and treat the coordinate of scaling point at coordinate system XAY;
11) the current scaling point of treating is obtained current micro scanning image space according to predetermined demarcation rule 2, gather the 4th width of cloth image;
Described predetermined calibration rule 1, specifically:
1) being among the coordinate system XAY of initial point with an A, utilizes image registration algorithm, draw the current coordinate (x that treats scaling point 1, y 1), calculate it and the angle theta that line segment that the O point is linked to be is become with the Z axle, calculate the correction angle [alpha] that will rotate be 45 °-θ;
2) calculate the current coordinate (X of scaling point in coordinate system ZOW that treat 0, Y 0);
3) as the coordinate (X that treats scaling point 0, Y 0) when in coordinate system ZOW, being positioned at first quartile or third quadrant:
When α＞0, optical flat is rotated counterclockwise, the anglec of rotation does | α |;
When α＜0, optical flat is turned clockwise, the anglec of rotation does | α |;
As the coordinate (X that treats scaling point 0, Y 0) when in coordinate system ZOW, being positioned at second quadrant or four-quadrant:
When α＞0, optical flat is turned clockwise, the anglec of rotation does | α |
When α＜0, optical flat is rotated counterclockwise, the anglec of rotation does | α |.
Described predetermined calibration rule 2, specifically:
(1) be starting point to have demarcated micro scanning B at zero point point; Optical flat is turned clockwise 90 °; Arrive a some C and images acquired this moment, and MNPQ is for connecing square in the circle O, and N, M, P, Q are respectively at first, second, third and fourth quadrant of coordinate system ZOW; R was the Z axle parallel lines done of C point and the intersection point of straight line NR, if with the interior square C point that connects below the P point; According to the algorithm of image registration, obtain the C coordinate of ordering this moment (x y), calculates the size of ∠ SOC according to Q, C two point coordinate values, and computing method are following:
(x y), can calculate the coordinate of ordering according to the relative Q of C point
∠ QCR = arctg y x
∠PQC＝∠QCR
And ∠ OQP=45 °
Know by figure:
Figure BSA00000405382000032
So:
Figure BSA00000405382000033
Then optical flat is turned clockwise
Figure BSA00000405382000041
and then forward the P point to, obtain current micro scanning image space from the C point.
If the C point then has above the P point:
Figure BSA00000405382000042
Figure BSA00000405382000044
Figure BSA00000405382000045
Be rotated counterclockwise optical flat
Figure BSA00000405382000046
and promptly forward the P point to from the C point this moment, obtains current micro scanning image space.
Beneficial effect
With respect to application number is 200810183262.0 patent " Zero point calibration method and the application in optical micro-scanning micro-thermal imaging system ", method of the present invention, and not only first point is accurately; And; Its excess-three point has been accomplished calibration with another kind of method, so just can directly obtain the image on four width of cloth ideal positions, through synthetic; Just can obtain the original clearly as, improve the resolving power of system.This also is maximum innovative point of the method and advantage place.In addition, method of the present invention is to set up the relation of treating scaling point and near the ideal scan location point it, and wherein involved correction angle is all less than 45 °, and is less relatively, so precision is higher.
And the formula that the present invention calculates anglec of rotation size is consistent, with regard to the memory aspect, and regular following, memory easily; With regard to operating aspect, make it sequencing easily, reduce workload.
Description of drawings
Fig. 1 is that detector array lists the picture point track;
Fig. 2 is monolithic optical flat rotation 2 * 2 micro scanning synoptic diagram;
Fig. 3 is standard 2 * 2 micro scanning mode imaging positions;
Fig. 4 is the image space under the micro scanning zero deviation;
Fig. 5 is the scanning position pattern of setting up behind the coordinate system;
Fig. 6 is X of the present invention 0＞0, Y 0＜0 and the C point be positioned at the calibration synoptic diagram of second point of 2 * 2 micro scannings P of P point below;
Fig. 7 is X of the present invention 0＞0, Y 0＜0 and the C point be positioned at the calibration synoptic diagram of second point of 2 * 2 micro scannings P of P point top;
Fig. 8 is X of the present invention 0＞0, Y 0Definite synoptic diagram at＞0 micro scanning zero point;
Fig. 9 is X 0＞0, Y 0Definite synoptic diagram at＜0 micro scanning zero point;
Figure 10 is X of the present invention 0＜0, Y 0Definite synoptic diagram at＜0 micro scanning zero point;
Figure 11 is the micrometric displacement locations drawing of actual optical flat rotation micro scanning micro imaging system micro scanning Zero point calibration front and back by standard 2 * 2 micro scanning type collections 4 width of cloth images; Wherein: (a) being the preceding micrometric displacement location drawing of Zero point calibration, (b) is the micrometric displacement location drawing behind the Zero point calibration;
Figure 12 is that first point of micro scanning of the present invention is the particular flow sheet that calculates the sense of rotation and the corresponding anglec of rotation of optical flat in the Zero point calibration;
Embodiment
Fig. 1 is that detector array lists the picture point track; Fig. 2 is monolithic optical flat rotation 2 * 2 micro scanning synoptic diagram; Fig. 3 is standard 2 * 2 micro scanning mode imaging positions; Fig. 4 is the image space under the micro scanning zero deviation; Fig. 5 is the scanning position pattern of setting up behind the coordinate system.
Suppose what A point was wherein captured for system just starts, or the picture point at any angle after optical flat stops in the work.If putting with this is scan start point, then can not realize 2 * 2 micro scanning patterns of standard.Therefore, need demarcate the A point, move it on the scanning position point of standard, way is following.
Be that (O O) sets up rectangular coordinate system to initial point, and with optical flat Rotate 180 °, purpose is will search out and the maximum B point of A point distance, just makes with A
Figure BSA00000405382000051
Reach peaked (x 1, y 1), then the line of 2 of A, B is a round diameter, and the mid point of line segment AB is exactly center of circle O.M, N, P, four points of Q be 2 * 2 micro scannings of completion standard the position of four picture points will asking for; They are distributed in second quadrant, first quartile, four-quadrant, third quadrant respectively; It then is to connect square in one that justifies that these four dot sequencies are coupled together, and its four limit is distinguished parallel with horizontal, axis of ordinates.S bears a bit on the semiaxis for the X axle, and Z is a bit of X axle positive axis, and W is a bit on the Y axle positive axis.Being among the coordinate system XAY of initial point with an A, utilize image registration algorithm, draw the coordinate (x that B is ordered 1, y 1), because line segment AB is a diameter of a circle, (O is O) with (x according to 2 coordinate figures 1, y 1), and then can obtain the coordinate (x of center of circle O 0, y 0).The coordinate combined calculation of being ordered by O point and B again the size of ∠ BOZ,
∠ BOZ = arctan | y 1 - y 0 | | x 1 - x 0 |
Below will be with B point coordinate (X in coordinate system ZOW 0, Y 0) different situations X wherein is discussed 0=x 1/ 2, Y 0=y 1/ 2.
I .X 0＞0, Y 0Confirming of＜0 micro scanning zero point
As shown in Figure 5.Because the singularity of square MNPQ can get ∠ QOZ=45 ° by geometrical principle.∠ BOZ that calculates and ∠ QOZ are compared, if ∠ BOZ＜45 °, then the B point differs from 45 °-∠ BOZ with these two jiaos works above the Q point, then obtains the size of ∠ BOQ.This moment, as long as B point and Q point can overlap, and reach the purpose of calibration with the optical flat ∠ BOQ that turns clockwise; If ∠ BOZ＞45 °, then B point Q order below, need only this moment optical flat be rotated counterclockwise ∠ BOQ arrival Q point, can accomplish calibration.Object sees through optical flat and has just dropped on the position that Q orders at imaging point on the detector like this, has so far also accomplished the calibration work of first point, can gather first width of cloth image at this moment.
After the calibration of Q point is accomplished, again optical flat is turned clockwise 90 °.Because the existence of factors such as the out-of-flatness property of optical flat, the unevenness of rotation or vibrations; Cause institute's imaging point can accurately not drop on the position that P orders; If at this moment images acquired must cause error, influence the quality of successive image reconstruct work; Limited the raising of system resolution, final image does not reach the purpose of very reproducing object clearly., need calibrate once more for this reason, make institute's imaging point adjust to the position that P is ordered.
As shown in Figure 6, though this moment, the institute imaging point did not overlap with the P point, near the also C point the P point is if the C point is below the P point.According to the algorithm of image registration, obtain the C coordinate of ordering this moment (x y), calculates the size of ∠ SOC according to Q, C two point coordinate values, and computing method are following:
(x y), can calculate the coordinate of ordering according to the relative Q of C point
∠ QCR = arctg y x
∠PQC＝∠QCR
And ∠ OQP=45 °
Know by figure:
Figure BSA00000405382000062
So:
Figure BSA00000405382000063
Then optical flat is turned clockwise
Figure BSA00000405382000064
and then forward the P point to, obtain second micro scanning image space from the C point.
If the C point is as shown in Figure 7 above the P point.Then have:
Figure BSA00000405382000071
Figure BSA00000405382000072
Figure BSA00000405382000073
Figure BSA00000405382000074
Be rotated counterclockwise optical flat
Figure BSA00000405382000075
and promptly forward the P point to from the C point this moment, obtains second micro scanning image space.
Afterwards, continue the optical flat half-twist, operation steps is the same, determines M, 2 of N and images acquired successively.Like this, four width of cloth IMAQs finish, and promptly are four required width of cloth images of standard 2 * 2 micro scannings.Through the processing in later stage, improve the resolving power of system.
Afterwards, continue the optical flat half-twist, operation steps is the same, determines M, 2 of N and images acquired successively.Like this, four width of cloth IMAQs finish, and promptly are four required width of cloth images of standard 2 * 2 micro scannings.Through the processing in later stage, improve the resolving power of system.
II .X 0＜0, Y 0Confirming of＜0 micro scanning zero point
Show like Fig. 8, set out Rotate 180 ° to the B point by the A point, be easy to draw the B point coordinate with image registration algorithm, half of getting its coordinate figure is the O point coordinate.Calculate the size of ∠ SOB then, and with 45 ° make comparisons, if ∠ SOB＞45 °, then with the optical flat ∠ POB (∠ SOB-45 °) that turns clockwise; If ∠ SOB＜45 ° then are rotated counterclockwise ∠ POB (45 °-∠ SOB) with optical flat.After the calibration that B is ordered is accomplished, continue a scaler excess-three point, obtain four width of cloth standards, 2 * 2 micro scanning required images respectively according to preceding method.
III .X 0＜0, Y 0Confirming of＞0 micro scanning zero point
If the A point is fallen on the four-quadrant at random, behind the Rotate 180 °, the B point is just in second quadrant of A coordinate system so.Method such as preceding, obtain O, B two point coordinate after, calculate ∠ BOS, if ∠ BOS＞45 °, then with optical flat by being rotated counterclockwise ∠ BOM; If ∠ BOS＜45 °, then need the optical flat ∠ BOM that turns clockwise.Continue scaler excess-three point respectively then.
IV .X 0＞0, Y 0Confirming of＞0 micro scanning zero point
If starting point A is positioned on the first quartile, behind image registration algorithm acquisition B point coordinate, that is knows the O point coordinate, and then calculate the size of ∠ BOZ.If ∠ BOZ＜45 ° then are rotated counterclockwise ∠ NOB with optical flat; If ∠ BOZ＞45 °, then with the optical flat ∠ NOB that turns clockwise.Afterwards, the optical flat half-twist is copied this method, continues to calibrate out its excess-three point.
Can know by above-described four kinds of situation; When work; Because the uncertainty of initial reference point, promptly to drop on first, second, third and fourth quadrant all possible for A point, and desire is done further definite; Need behind optical flat Rotate 180 °, to calculate the coordinate (x of B point in coordinate system XAY according to image registration algorithm 1, y 1), and then derive the coordinate (x of O point in coordinate system XAY 0, y 0).In conjunction with O, B two point coordinate values, calculate the angle of OB and coordinate transverse axis,
∠ BOZ ( s ) = arctan | y 1 - y 0 | | x 1 - x 0 |
Horizontal stroke, ordinate value (x according to B 1, y 1) positive and negative situation, quadrant under the judging point B after 45 ° of comparisons, can be confirmed the sense of rotation of optical flat, can accomplish the calibration task as long as rotate respective angles.
Core of the present invention is to solve 4 some calibrations of 2 * 2 micro scannings problem of developing optical flat rotation micro-scanning micro-thermal imaging system, and gathers 4 width of cloth images at these four points and accomplish over-sampling reconstruct, thereby improves the spatial resolution of micro-thermal imaging system.

Claims (1)

1. the micro scanning calibrating method of an optical micro-scanning micro imaging system is characterized in that, the implementation procedure of this method is:
1) selected reference A, A are the picture point that imaging system captures when just having started, or optical flat stops the picture point to capture when arbitrarily angled in the imaging system work, is that initial point is set up coordinate system XAY with A;
2) optical flat is turned clockwise 180 °, the picture point of this moment is for treating scaling point B 1, calculate this and treat scaling point B 1Coordinate;
3) with line segment AB 1Mid point be the center of circle, with line segment AB 1Being diameter, setting up circle O, is initial point with O, sets up coordinate system ZOW;
4) calculate the coordinate (x of center of circle O at coordinate system XAY 0, y 0);
5) to the current scaling point B that treats 1, according to the anglec of rotation and the sense of rotation of predetermined calibration rule 1 definite optical flat, utilize the determined anglec of rotation and sense of rotation, optical flat is rotated treating that scaling point moves to ideal point, gather first width of cloth image;
6) optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 2, calculate this and treat the coordinate of scaling point at coordinate system XAY;
7) to the current scaling point of treating, obtain current micro scanning image space according to predetermined calibration rule 2, accomplish calibration to second point, gather second width of cloth image;
8) continue optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 3, calculate this and treat the coordinate of scaling point at coordinate system XAY;
9) the current scaling point of treating is obtained current micro scanning image space according to predetermined calibration rule 2, accomplish calibration, gather the 3rd width of cloth image the 3rd point;
10) continue optical flat is turned clockwise 90 °, the picture point of this moment is for treating scaling point B 4, calculate this and treat the coordinate of scaling point at coordinate system XAY;
11) the current scaling point of treating is obtained current micro scanning image space according to predetermined calibration rule 2, accomplish calibration, gather the 4th width of cloth image the 4th point;
Described predetermined calibration rule 1, specifically:
1) being among the coordinate system XAY of initial point with an A, utilizes image registration algorithm, draw the current coordinate (x that treats scaling point 1, y 1), calculate it and the angle theta that line segment that the O point is linked to be is become with the Z axle, calculate the correction angle [alpha] that will rotate be 45 °-θ;
2) calculate the current coordinate (X of scaling point in coordinate system ZOW that treat 0, Y 0);
3) as the coordinate (X that treats scaling point 0, Y 0) when in coordinate system ZOW, being positioned at first quartile or third quadrant:
When α＞0, optical flat is rotated counterclockwise, the anglec of rotation does | α |;
When α＜0, optical flat is turned clockwise, the anglec of rotation does | α |;
As the coordinate (X that treats scaling point 0, Y 0) when in coordinate system ZOW, being positioned at second quadrant or four-quadrant:
When α＞0, optical flat is turned clockwise, the anglec of rotation does | α |
When α＜0, optical flat is rotated counterclockwise, the anglec of rotation does | α |;
Described predetermined calibration rule 2, specifically:
To have demarcated micro scanning B at zero point point is starting point; Optical flat is turned clockwise 90 °; Arrive a some C and images acquired this moment, and MNPQ is for connecing square in the circle O, and N, M, P, Q are respectively at first, second, third and fourth quadrant of coordinate system ZOW; R was the Z axle parallel lines done of C point and the intersection point of straight line NR, if the C point is below the P point; According to the algorithm of image registration, obtain the C coordinate of ordering this moment (x y), calculates the size of ∠ SOC according to Q, C two point coordinate values, and computing method are following:
(x y), calculates the coordinate of ordering according to the relative Q of C point
∠ QCR = arctg y x
∠PQC＝∠QCR
And ∠ OQP=45 °
Again because:
Figure FDA0000140937930000022
So:
Figure FDA0000140937930000023
Then optical flat is turned clockwise and then forward the P point to from the C point; Obtain current micro scanning image space, accomplish the calibration of second micro scanning imaging point;
If the C point then has above the P point:
Figure FDA0000140937930000025
Figure FDA0000140937930000026
Figure FDA0000140937930000027
Figure FDA0000140937930000028
Be rotated counterclockwise optical flat
Figure FDA0000140937930000029
and promptly forward the P point to from the C point this moment; Obtain current micro scanning image space, accomplish the calibration of second micro scanning imaging point.
CN201010617933A 2010-12-31 2010-12-31 Micro-scanning calibrating method of optical micro-scanning thermal microscope imaging system Expired - Fee Related CN102183305B (en)

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