CN101051025A - Biochemical sensitive detector for surface plasma - Google Patents

Abstract

A biochemical sensing-detection device of surface plasma is composed of test bed, metal nanostructure substrate, semi-transmission semi-reflection mirror, polarizer, collimator, illumination optical fiber, light collection mirror, xenon-lamp light source, focusing mirror, monochromator, photoelectric multiplier tube, signal-treatment digital converter, biochemical sample to be detected, XY scanning bed, scan driving controller and computer. Its detecting method is also disclosed.

Description

Biochemical sensitive detector for surface plasma

Technical field

The present invention is a kind of biochemical sensitive detector for surface plasma, belongs to biochemical sensitive detection technique field.

Background technology

Continuous progress along with optical technology and nanostructured process technology, the traditional optical technology has developed and has extended to the surface plasma bulk optics, metal Nano structure surface plasma volume property obtains further investigation and discloses, discover that electromagnetic field can excite the free electron on metal Nano structure surface to produce resonance, for certain incident light frequency range, light and surperficial free electron coupled resonance strong near field localization occurs and spectrum is selected to absorb, this resonance mode is very responsive to the variation of metal construction peripheral region medium refraction index, because this specific character makes it can be applied to the biochemical sensitive detection range.Existing at present a lot of work are all in the Extinction Characteristic of studying metal nanoparticle, it is along with the shape of particle, size, the variation of array type and surrounding environment and changing, and with this localization surface plasma body resonant vibration by particle being absorbed or the analysis of scattering spectrum characteristic, being applied to biochemical sensitive detects, nanosphere is wherein arranged, square and square column, rectangle and rectangle post, cylinder, positive tetrahedron, triangle and triangular column, prismatic and prismatic column or the like types of metals nano particle structure array is best with triangle and prismatic array particle structure in these structures.But, even triangle and prismatic structure, such resonance curve full width at half maximum value very big (60-100nm), refractive index sensitivity is also less, has only 10-30nm/RIU, makes quality factor only reach 0.2-1, even littler, so sensing sensitivity is lower.

Summary of the invention

Technology of the present invention is dealt with problems and is: overcome above-mentioned the deficiencies in the prior art, a kind of high-sensitivity surface plasma biochemical sensitive detector of simple and practical two-sided gaussian-shape section metal nano optical grating construction is provided.

Technical solution of the present invention is: biochemical sensitive detector for surface plasma, and its characteristics are: comprise sample test board, metal Nano structure substrate, semi-transparent semi-reflecting prism square or semi-transparent semi-reflecting lens or catoptron, polaroid, optical filter, collimating mirror, lighting fiber, collecting lens, xenon source, condenser, monochromator, photomultiplier, signal Processing digital converter, computing machine part, tested biological sample, XY scan table and turntable driving controller; Xenon source, collecting lens and lighting fiber are formed the illuminator to tested biological sample illumination; Collimating mirror, optical filter, polaroid and semi-transparent semi-reflecting prism square or semi-transparent semi-reflecting lens or catoptron are placed successively, the illumination light that illuminator is sent becomes the tested biological sample of the TM of certain wavelength coverage polarization parallel rayed, and the metal Nano structure substrate that scribbles tested biological sample is placed on the sample test board on the XY scan table; Condenser, monochromator and photomultiplier are formed detection optical system, be placed in a side of semi-transparent semi-reflecting prism square or semi-transparent semi-reflecting lens or catoptron, inject in tested biological sample and the metal Nano structure substrate after having collimated partially by the light that illuminator penetrates, produce the localization surface plasma body resonant vibration, the detection light that penetrates passes through detection optical system, received electric signal and be converted to by photomultiplier, send into the computing machine part by signal Processing and digital conversion again, detect the kind of biological sample, after having detected the tested biological sample at this place, move to the another location by computing machine part and turntable driving controller gated sweep platform again and detect, all tested biological samples that need detect have all detected on the metal Nano structure substrate.

The described illuminator of being made up of xenon source, collecting lens and lighting fiber is placed in the top, and the below is placed collimating mirror, optical filter, polaroid, semi-transparent semi-reflecting prism square or semi-transparent semi-reflecting lens or catoptron successively.

The described illuminator of being made up of xenon source, collecting lens and lighting fiber is placed in below, and the top is placed collimating mirror, optical filter, polaroid, semi-transparent semi-reflecting prism square or semi-transparent semi-reflecting lens or catoptron successively.

Described this device metal nanostructured substrate is made up of substrate and metal Nano structure diaphragm, substrate is that a height that is compressed on the metal Nano structure diaphragm reflects the transmission substance layer, its relative index of refraction is 1.55-1.85, the metal Nano structure diaphragm is a diaphragm that is made of gold copper-base alloy, the thickness of this diaphragm is 35-135nm, cycle gaussian-shape section nanometer grating structure such as all be carved with in its upper and lower surface, O is a true origin with the wherein some gaussian-shape channel bottoms of upper surface, and the surface structure contour representation is:

$y\left(x\right)=-H\underset{m=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]$

The lower surface configuration contour representation is:

$y\left(x\right)=-(H+t)+H\underset{M=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]$

Λ is the grating cycle in the formula, and H is a groove depth, and ω is Gauss's groove width, t for the degree of depth of not carving (t 〉=5nm), m is the grating number, grating periods lambda=250-650nm, groove depth H=15-55nm does not carve degree of depth t=5-25nm, Gauss's groove width ω=12-80nm.

The present invention compared with prior art has the following advantages:

(1) resonance curve that obtains of sensor of the present invention peak value height not only, and peak of curve full width at half maximum value is very little, and refractive index sensitivity is big, make the quality factor that reaches very high, so sensing sensitivity also reaches very high.

(2) sensing adopts two-sided gaussian-shape cross-section structure with metal nano optical grating construction substrate, owing to be the metal grating structure of gaussian-shape section, photoetching of available electron bundle or ion beam lithography method are convenient makes.

(3) whole sensing testing apparatus structure is simple, practical, easy to adjust, and is low to environmental requirement, and the precision of sensing measurement is very high.

(4) can be coated with on the metal Nano structure substrate and put a lot of tested biological sample arrays, computerized control to move respectively and detect, thereby detection efficiency and speed height be easy to apply.

Description of drawings

Fig. 1 is the embodiment of the invention 1 a biochemical sensitive detector for surface plasma scantling plan;

Fig. 2 is the embodiment of the invention 2 biochemical sensitive detector for surface plasma scantling plans;

Fig. 3 is the embodiment of the invention 3 biochemical sensitive detector for surface plasma scantling plans;

Fig. 4 is the local amplification profile in embodiment of the invention biochemical sensitive metal Nano structure substrate zoy plane;

Fig. 5 is that embodiment of the invention biochemical sensitive metal Nano structure substrate A is to partial enlarged drawing;

Fig. 6 is the resonant reflection spectrum main peak sensing combined light spectrogram of the biochemical sensitive metal Nano structure substrate of the embodiment of the invention 1 and embodiment;

Fig. 7 is the resonance transmission spectrum main peak sensing combined light spectrogram of the embodiment of the invention 3 biochemical sensitive metal Nano structure substrates;

Fig. 8 is computing machine part of the present invention and turntable driving controller architecture figure;

Fig. 9 is a software control processing flow chart of the present invention.

Embodiment

As shown in Figure 1, be the biochemical sensitive detector for surface plasma scantling plan of the embodiment of the invention 1.It is made up of sample test board 1, metal Nano structure substrate 2, semi-transparent semi-reflecting prism square 4, polaroid 6, optical filter 7, collimating mirror 8, lighting fiber 9, collecting lens 10, xenon source 11, condenser 13, monochromator 14, photomultiplier 16, signal Processing digital converter 17, computing machine part 18, tested biological sample 19, XY scan table 20 and turntable driving controller 21.Xenon source 11, collecting lens 10 and lighting fiber 9 are formed the illuminator to tested biological sample 19 illuminations, and are placed in collimating mirror 8 tops.Collimating mirror 8, optical filter 7, polaroid 6 and the semi-transparent semi-reflecting prism square 4 that place successively the below becomes illumination light to have the TM polarization parallel light of certain wavelength coverage, and scribbles tested biological sample 19 and metal Nano structure substrate 2 by the many places that semi-transparent semi-reflecting prism square 4 is vertically injected the below.The metal Nano structure substrate 2 of tested biological sample 19 is placed on the sample test board 1, and sample test board 1 is placed on the XY scan table 20, and XY scan table 20 positions are controlled by turntable driving controller 21 by computing machine part 18.Semi-transparent semi-reflecting prism square 4, condenser 13, monochromator 14 and photomultiplier 16 are formed detection optical system, are placed in a side of semi-transparent semi-reflecting prism square 4 successively.The continuous spectrum that xenon source 11 sends gathers light by collecting lens 10 the incident end 902 of lighting fiber 9, light imports lighting fiber 9 into by incident end face, after lighting fiber 9 transmission, penetrate from the exit facet of the exit end 901 of lighting fiber 9, the diverging light that optical fiber penetrates is through collimating mirror 8 collimations, after collimated light passes through optical filter 7 optical filterings and polaroid 6 polarizings, becoming wavelength coverage is the TM polarization parallel light 5 of 450nm-950nm, vertically inject two right-angle prisms forming semi-transparent semi-reflecting prism square 4 then, vertically inject many places from the TM polarization parallel light 3 of prism square ejaculation and scribble tested biological sample 19 and metal Nano structure substrate 2, owing to make to have nanostructured on the metallic film top and bottom of metal Nano structure substrate 2, produce the localization surface plasma body resonant vibration, its reflected light 12 former roads are returned and are injected semi-transparent semi-reflecting prism square 4, and the semi-reflective surface of passing through wherein 403 reflects, penetrate from 90 ° of angular direction, inject monochromator 14 by condenser 13 optically focused, after monochromator 14 beam split, inject photomultiplier 16, photomultiplier 16 is converted to electric signal with the light signal that is detected, amplify simultaneously, handle and be converted to digital signal by signal Processing digital converter 17 again, send into computing machine part 18, relatively detect certain position sample reflectance spectrum curve on the metal Nano structure substrate 2 by computing machine, determine the kind of biological sample, after having detected the tested biological sample at this place, move to the another location by computing machine part 18 and turntable driving controller 21 control XY scan tables 20 again and detect, all tested biological samples 19 that need detect have all detected on metal Nano structure substrate 2.

As shown in Figure 1, semi-transparent semi-reflecting prism square 4 is that the inclined-plane by 2 right- angle prisms 402 and 401 glues together mutually and forms, and wherein inclined-plane 403 is coated with the semi-transflective reflective film.Half sees through the polarized light vertically injected from the top 5 from the below straight line and penetrates, and tested biological sample 19 and metal Nano structure substrate 2 throw light on.The detection of reflected light 12 that returns from the below is by the below right-angle prism 401 of semi-transparent semi-reflecting prism square 4, and 403 semi-reflective surface reflect through the inclined-plane, and half light is with 90 ° of angle horizontal sheaf condensers 13.

As shown in Figure 2, be another biochemical sensitive detector for surface plasma scantling plan of the embodiment of the invention 2.It by sample test board 1, metal Nano structure substrate 2, semi-transparent semi-reflecting lens 4 ', polaroid 6, optical filter 7, collimating mirror 8, lighting fiber 9, collecting lens 10, xenon source 11, condenser 13, monochromator 14, photomultiplier 16, signal Processing digital converter 17, computing machine 18, tested biological sample 19, XY scan table 20 and turntable driving controller 21 form.Xenon source 11, collecting lens 10 and lighting fiber 9 are formed the illuminator to tested biological sample 19 illuminations, are placed in collimating mirror 8 tops.Collimating mirror 8, optical filter 7, polaroid 6 and the semi-transparent semi-reflecting lens 4 that place successively the below ' make illumination light become the TM polarization parallel light that wavelength coverage is 450nm-950nm, semi-transparent semi-reflecting lens 4 ' lower surface be a semi-transparent semi-reflective surface, place with surface level angle at 45.The metal Nano structure substrate 2 that many places scribble tested biological sample 19 is placed on the sample test board 1, and sample test board 1 is placed on the XY scan table 20, and XY scan table 20 positions are controlled by turntable driving controller 21 by computing machine 18.Semi-transparent semi-reflecting lens 4 ', condenser 13, monochromator 14 and photomultiplier 16 form detection optical system, be placed in successively semi-transparent semi-reflecting lens 4 ' a side.Illuminator is by collimating mirror 8, the TM polarization parallel light 5 that sends behind optical filter 7 and the polaroid 6, through semi-transparent semi-reflecting lens 4 ' half sees through tested biological sample 19 of vertical illumination and metal Nano structure substrate 2, because the nanostructured on metal Nano structure substrate 2 top and bottom, produce the localization surface plasma body resonant vibration, launch reflected light 12 former roads return directive semi-transparent semi-reflecting lens 4 ', through following semi-reflective surface reflection, half light is with 90 ° of angular direction directive condensers 13, inject monochromator 14 by condenser 13 optically focused, by injecting photomultiplier 16 after monochromator 14 beam split, photomultiplier 16 is converted to electric signal with the light signal that is detected, amplify simultaneously, handle and be converted to digital signal by signal Processing digital converter 17 again, send into computing machine part 18, relatively detect certain position sample reflectance spectrum curve on the metal Nano structure substrate 2, determine the kind of biological sample, after having detected the tested biological sample at this place, move to the another location by computing machine part 18 and turntable driving controller 21 control XY scan tables 20 again and detect, the tested biological sample 19 that needs to detect on metal Nano structure substrate 2 has all detected.

As shown in Figure 3, be the embodiment of the invention 3 biochemical sensitive detector for surface plasma scantling plans.It is by sample test board 1, metal Nano structure substrate 2, catoptron 4 ", polaroid 6, optical filter 7, collimating mirror 8, lighting fiber 9, collecting lens 10, xenon source 11, condenser 13, monochromator 14, photomultiplier 16, signal Processing digital converter 17, computing machine 18, tested biological sample 19, XY scan table 20 and turntable driving controller 21 form.Xenon source 11, collecting lens 10 and lighting fiber 9 are formed the illuminator to tested biological sample 19 illuminations, are placed in collimating mirror 8 belows.Collimating mirror 8, optical filter 7 and the polaroid 6 that place successively the top make illumination light become the TM polarization parallel light 3 that wavelength coverage is 450nm-950nm, from the below vertical illumination." be positioned at metal Nano structure substrate 2 tops, its lower surface is a reflecting surface to catoptron 4, places with surface level angle at 45.Many places scribble the metal Nano structure substrate 2 sample placed face down of tested biological sample 19 on sample test board 1, sample test board 1 is placed on the XY scan table 20 of hollow, and XY scan table 20 is controlled by turntable driving controller 21 by computing machine part 18.One side of catoptron 4 ", condenser 13, monochromator 14 and photomultiplier 16 form detection optical system, be placed in catoptron 4 successively ".Illuminator is by collimating mirror 8, the TM polarization parallel light 3 that sends behind optical filter 7 and the polaroid 6, from tested biological sample 19 of below vertical illumination and metal Nano structure substrate 2, owing on the metal nano substrate 2 film top and bottom nanostructured is arranged, produce the localization surface plasma body resonant vibration, produce transmitted light toward mirror 4 "; " reflection through catoptron 4, transmitted light 12 is with 90 ° of angular direction horizontal sheaf condensers 13, optically focused is also injected monochromator 14, after monochromator 14 beam split, inject photomultiplier 16, photomultiplier 16 will detect light signal and be converted to electric signal, amplify simultaneously, handle and be converted to digital signal by signal Processing digital converter 17 again, send into computing machine part 18, relatively detect certain position sample transmission spectrum curve on the metal Nano structure substrate 2, determine the kind of biological sample, after having detected the tested biological sample of this position, move to another position that need detect by computing machine 18 parts and scan table controller 21 control XY scan tables 20 and detect, all tested biological samples 19 have all detected on metal Nano structure substrate 2.

As shown in Figure 4, be the local amplification profile in zoy plane of the metal Nano structure substrate 2 among the embodiment of the invention 1, embodiment 2 and the embodiment 3.It is made up of substrate 201 and metal Nano structure diaphragm 202.Substrate 201 is one to be compressed on the high index of refraction transmission substance layer on the metal Nano structure diaphragm 202, its refractive index is 1.55-1.85, it is the glassy layer of SF series, metal Nano structure diaphragm 202 is diaphragms that are made of gold copper-base alloy, the thickness of this diaphragm is 35-135nm, cycle gaussian-shape 22 section nanometer grating structures such as all being carved with in its upper and lower surface, is true origin with the wherein some gaussian-shape channel bottoms of upper surface O, and its upper surface comprises the gaussian-shape structure outline and is expressed as:

$y\left(x\right)=-H\underset{M=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]---\left(1\right)$

Lower surface comprises the gaussian-shape structure outline and is expressed as:

$y\left(x\right)=-(H+t)+H\underset{m=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]---\left(2\right)$

In two formulas, Λ is the grating cycle, and H is a groove depth, and ω is Gauss's groove width (width when groove depth 1/e height), and t is that (t 〉=5nm), m is the grating number to the degree of depth of not carving.In the present invention, grating periods lambda=250-650nm, groove depth H=15-55nm does not carve degree of depth t=5-25nm, Gauss's groove width ω=12-80nm.

As shown in Figure 5, be that the A of embodiment of the invention biochemical sensitive metal Nano structure substrate 2 is to partial enlarged drawing.On metal Nano structure diaphragm 202 pros and cons, symmetry is carved with the gaussian-shape section grating nano structure 22 of a plurality of one-tenth arrays, coats tested biological sample 19 at each above the gaussian-shape section grating nano structural area.

As shown in Figure 6, be the resonant reflection spectrum main peak sensing combined light spectrogram of the biochemical sensitive metal Nano structure substrate 2 that measures of the embodiment of the invention 1 and embodiment 2.There is shown the tested biological sample 19 of different refractivity, resonant reflection spectrum main peak curve during the different refractivity that obtains after testing, resonant reflection spectrum main peak 26 as refractive index n=1.2 o'clock, the resonant reflection spectrum main peak 25 of refractive index n=1.3 o'clock, the resonant reflection spectrum main peak 24 of refractive index n=1.4 o'clock, the resonant reflection spectrum main peak 23 of refractive index n=1.5 o'clock.

As shown in Figure 7, be the resonance transmission spectrum main peak sensing combined light spectrogram of the biochemical sensitive metal Nano structure substrate 2 that measures of the embodiment of the invention 3.There is shown the tested biological sample 19 of different refractivity, resonance transmission spectrum main peak curve during the different refractivity that obtains after testing, resonance transmission spectrum main peak 27 as refractive index n=1.2 o'clock, the resonance transmission spectrum main peak 28 of refractive index n=1.3 o'clock, the resonance transmission spectrum main peak 29 of refractive index n=1.4 o'clock, the resonance transmission spectrum main peak 30 of refractive index n=1.5 o'clock.

The main peak 23-30 size that spectrum is penetrated in resonance anti-(thoroughly) is with the structure of grating and different change of refractive index of tested biological sample with the position, wherein main peak size and grating cycle, groove depth are relevant with Gauss's groove width, the position of main peak is with grating cycle, groove depth, Gauss's groove width, and the increase of sample refractive index is moved to the long wave direction, the size of moving speed and peak value directly has influence on sensing sensitivity, when peak value moves big more dark more when narrow more with the sample variations in refractive index, quality factor are high more, sensing sensitivity is also high more, and the quality factor of sensor are represented with following formula:

$\mathrm{FOM}=\frac{q(\mathrm{nm}/\mathrm{RIU})}{\mathrm{FWHM}\left(\mathrm{nm}\right)}---\left(3\right)$

In the formula, q is refractive index sensitivity, and FWHM is the full width at half maximum that grating anti-(thoroughly) is penetrated spectrum, full width at half maximum value of the present invention reaches 6-8nm, refractive index sensitivity reaches 300-370nm/RIU, makes the sensing quality factor reach 35-60, is better than other sensor or pick-up unit greatly.

As shown in Figure 8, computing machine part 18 of the present invention comprises Heng Guangqiangdengyuan control 1801, xenon lamp 1805, bus interface 1802, A/D conversion 1803, digital spectrum image buffer storage 1806, photomultiplier power supply 1804, photomultiplier 1807 and computing machine 1808; Turntable driving controller 21 comprises x step motor drive 2101 and y step motor drive 2102.Xenon lamp 1805 issues out light intensity constant light as of the present invention illumination light by bus 1802 by Heng Guangqiangdengyuan control 1801 controls in the instruction of computing machine 1808, tested biological sample 19 on the illumination metal nanostructured substrate 2, computing machine 1808 is by bus 1802 controls, the tested biological sample spectrum picture curve of sending here from photomultiplier 1807 is carried out A/D be converted to the digital spectrum image curve, and deposit digital spectrum image buffer storage 1806 in, wait for and compare, detect the substance classes of tested biological sample 19, after the substance classes of the tested biological sample that has detected a position, computing machine 1808 is by bus 1802 instruction scan driving governors 21, controlling and driving x stepper motor and y stepper motor, make scan table make the x direction, the y direction moves, and the other also not detected tested biological sample 19 on the metal Nano structure substrate 2 is delivered to detecting position detect.

Be illustrated in figure 9 as software control processing flow chart of the present invention.Its principle is: testing begins, each power supply such as elder generation's turn-on lamp, preset parameter, tested biological sample 19 as metal Nano structure substrate 2 is counted and the position, accuracy of detection etc., the scan table auto zero, the metal Nano structure substrate 2 of then on sample test board 1, packing into, Xy turntable driving controller 21 moves to detecting position with tested biological sample 19 automatically, computing machine 1808 instruction acquisitions are sent here by photomultiplier 1807 and are converted the digital spectrum image to through A/D then, deposit digital spectrum image buffer storage 1806 in, and extract anti-(thoroughly) and penetrate the spectrum peak wavelength, half-breadth high and anti-(thoroughly) penetrate rate etc. for information about, automatically compare for information about by the known species that has had in advance in computing machine 1808 and the machine, relatively whether more identical under certain accuracy requirement, as come to the same thing, 1808 kinds of exporting and showing the tested biological sample 19 in this position of computing machine, inequality as the result, 1808 in computing machine shows the spectrum picture curve and the original close known image of sample 19, species or newfound species by the tested biological sample 19 of operating personnel's interpretation, extract peak wavelength simultaneously, half-breadth is high penetrates information such as rate with anti-(thoroughly), deposit computing machine in, increase the known species that has had, the tested biological sample 19 of on metal Nano structure substrate 2 all is all detected intact like this, take off tested metal Nano structure substrate 2, detection of end.

Claims (4)

1, biochemical sensitive detector for surface plasma is characterized in that: comprise sample test board (1), metal Nano structure substrate (2), semi-transparent semi-reflecting prism square (4) or semi-transparent semi-reflecting lens (4 ') or catoptron (4 "); polaroid (6); optical filter (7); collimating mirror (8); lighting fiber (9); collecting lens (10), xenon source (11), condenser (13), monochromator (14), photomultiplier (16), signal Processing digital converter (17), computing machine part (18), tested biological sample (19), XY scan table (20) and turntable driving controller (21); Xenon source (11), collecting lens (10) and lighting fiber (9) are formed the illuminator to tested biological sample (19) illumination; Collimating mirror (8), optical filter (7), polaroid (6) and semi-transparent semi-reflecting prism square (4) or semi-transparent semi-reflecting lens (4 ') or catoptron (4 ") are placed successively; the illumination light that illuminator is sent becomes the tested biological sample of the TM of certain wavelength coverage polarization parallel rayed (19), and the metal Nano structure substrate (2) that scribbles tested biological sample (19) is placed on the sample test board (1) on the XY scan table (20); Condenser (13), monochromator (14) and photomultiplier (16) are formed detection optical system, be placed in semi-transparent semi-reflecting prism square (4) or semi-transparent semi-reflecting lens (4 ') or catoptron (side of 4 "); inject in tested biological sample (19) and the metal Nano structure substrate (2) after having collimated partially by the light that illuminator penetrates; produce the localization surface plasma body resonant vibration; the detection light of ejaculation passes through detection optical system; received and be converted to electric signal by photomultiplier (16); send into computing machine part (18) by signal Processing and digital conversion again, detect the kind of biological sample, after having detected the tested biological sample at this place, move to the another location by computing machine part (18) and turntable driving controller (21) control XY scan table 20 again and detect, go up all tested biological samples 19 that need detect up to metal Nano structure substrate (2) and all detected.

2, biochemical sensitive detector for surface plasma according to claim 1, it is characterized in that: the described illuminator of being made up of xenon source (11), collecting lens (10) and lighting fiber (9) is placed in the top, and the below is placed collimating mirror (8), optical filter (7), polaroid (6), semi-transparent semi-reflecting prism square (4) or semi-transparent semi-reflecting lens (4 ') or catoptron (4 ") successively.

3, biochemical sensitive detector for surface plasma according to claim 1, it is characterized in that: the described illuminator of being made up of xenon source (11), collecting lens (10) and lighting fiber (9) is placed in below, and the top is placed collimating mirror (8), optical filter (7), polaroid (6), semi-transparent semi-reflecting prism square (4) or semi-transparent semi-reflecting lens (4 ') or catoptron (4 ") successively.

4, biochemical sensitive detector for surface plasma according to claim 1, it is characterized in that: described metal Nano structure substrate (2) is made up of substrate (201) and metal Nano structure diaphragm (202), substrate (201) is that a height that is compressed on the metal Nano structure diaphragm (202) reflects the transmission substance layer, its relative index of refraction is 1.55-1.85, metal Nano structure diaphragm (202) is a diaphragm that is made of gold copper-base alloy, the thickness of this diaphragm is 35-135nm, cycle gaussian-shape section (22) nanometer grating structure such as all be carved with in its upper and lower surface, with the wherein some gaussian-shape channel bottoms 0 of upper surface is true origin, and the surface structure contour representation is:

$y\left(x\right)=-H\underset{m=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]$

The lower surface configuration contour representation is:

$y\left(x\right)=-(H+t)+H\underset{m=-\∞}{\overset{\∞}{\mathrm{\Σ}}}\exp [-{\left(\frac{x-\mathrm{m\Λ}}{\mathrm{\ω}}\right)}^2]$

Λ is the grating cycle in the formula, and H is a groove depth, and ω is Gauss's groove width, t for the degree of depth of not carving (t 〉=5nm), m is the grating number, grating periods lambda=250-650nm, groove depth H=15-55nm does not carve degree of depth t=5-25nm, Gauss's groove width ω=12-80nm.

Images