CN101022257A - Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor - Google Patents

Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor Download PDF

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Publication number
CN101022257A
CN101022257A CN 200710071909 CN200710071909A CN101022257A CN 101022257 A CN101022257 A CN 101022257A CN 200710071909 CN200710071909 CN 200710071909 CN 200710071909 A CN200710071909 A CN 200710071909A CN 101022257 A CN101022257 A CN 101022257A
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China
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piezoelectric ceramic
vibration
sheet
longitudinal
ceramic sheet
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CN 200710071909
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Chinese (zh)
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石胜君
刘军考
陈维山
谢涛
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哈尔滨工业大学
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Priority to CN 200710071909 priority Critical patent/CN101022257A/en
Publication of CN101022257A publication Critical patent/CN101022257A/en

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Abstract

A linear ultrasonic motor of sandwich transducer type with double driving- foot is prepared as firm-connecting longitudinal-flexural vibration piezoelectric ceramic wafer and thin copper plate with big end of end cover and FM variable amplitude rod, arranging two flexural piezoelectric ceramic wafers at vibration wave loop of flexural vibration for setting polarization directions of flexural and longitudinal vibration piezoelectric ceramic wafers, setting length of FM variable-amplitude rod to be 1/2 of longitudinal vibration wavelength and setting said driving foot at flexural vibration wave loop most near to FM variable-amplitude rod.

Description

双驱动足夹心换能器式纵弯直线超声电机 The dual drive foot sandwich transducer Longitudinal Bending linear ultrasonic motor

技术领域 FIELD

本发明涉及一种直线超声电机,属于压电超声电机技术领域。 The present invention relates to a linear ultrasonic motor, the ultrasonic motor is in the field of piezoelectric technology.

背景技术 Background technique

超声电机是一种利用超声振动能量,并通过摩擦作用来产生驱动力的电机。 An ultrasonic motor using ultrasonic vibration energy and the motor generates a driving force by friction. 它具有低速大转矩(推力)、无需变速机构、无电磁干扰、响应速度快和断电自锁等优点,作为一种压电驱动器有着十分广泛的应用。 It has a low speed and high torque (force), without the transmission mechanism, no electromagnetic interference, fast response and power self-locking, etc., as a piezoelectric actuator has a very wide range of applications. 2001年日本“应用物理”杂志(Jpn.J.Appl.Phys)第40期p3773~3776页、名称为“A High Power Ultrasonic Motor Using a Longitudinal and BendingHybrid Bolt-Clamped Langevin Type Transducer”(一种使用螺栓紧固夹心式纵弯复合换能器的大功率超声电机)提出一种直线超声电机,由于两组弯振陶瓷片位于二阶弯振的两个波腹处,因此在该波腹处无法安装驱动足,只能将驱动足安装在远离波腹的端盖端部,这样将造成两驱动足的弯振位移分量与平台面的夹角为互补的两个倾角,使两个驱动足一个产生驱动力,一个产生制动力,从而导致直线超声电机效率低下(最高效率为22%)、噪声大、磨损严重;其次,简并纵弯谐振频率只能通过调整换能器的截面半径尺寸来实现,因此该类型直线超声电机只能在特定半径的换能器中实现,不能形成产品系列化。 Japan in 2001, "Applied Physics" magazine (Jpn.J.Appl.Phys) on 40 p3773 ~ 3776 pages, named "A High Power Ultrasonic Motor Using a Longitudinal and BendingHybrid Bolt-Clamped Langevin Type Transducer" (using bolts longitudinal bending the fastening sandwich composite ultrasonic motor power transducer) to provide a linear ultrasonic motor, since the two ceramic sheets positioned flexural vibration antinode second-order flexural vibration of the two waves can not be installed in the antinode drive foot, the foot can only be mounted in the end cap drive portion remote from the end of the antinodes, this would result in vibration displacement component and the bending angle of the platform surface of the two feet of the two tilt drives complementary, the two generating a drive foot driving force, a braking force is generated, resulting in poor linear ultrasonic motor efficiency (maximum efficiency 22%), large noise serious wear; secondly, buckling degenerate resonant frequency can only be achieved by adjusting the cross-sectional dimensions of the radius of the transducer , so that the linear type ultrasonic motor can only achieve a certain radius of the transducer, a series of products can not be formed.

发明内容 SUMMARY

本发明的目的是提供一种双驱动足夹心换能器式纵弯直线超声电机,它可解决现有的夹心式纵弯复合直线超声电机存在电机效率低下、噪声大、磨损严重、不能形成产品系列化的问题。 Object of the present invention is to provide a dual drive foot sandwich transducer Longitudinal Bending linear ultrasonic motor, which can solve the presence of a conventional vertical sandwich complex curved linear ultrasonic motor is low motor efficiency, a large noise serious wear, the product can not be formed series of problems.

本发明包括夹心换能器和驱动足;所述夹心换能器由调频变幅杆、端盖、螺柱、法兰、压电陶瓷片组、薄铜片组成;所述螺柱上的中间位置设有法兰,法兰左侧的螺柱上和法兰右侧的螺柱上分别装有压电陶瓷片组,压电陶瓷片组的各压电陶瓷片之间及压电陶瓷片组与端盖之间分别装有作为电极的薄铜片,压电陶瓷片组和薄铜片通过螺柱与端盖紧固成一体,端盖与调频变幅杆的大端固接,所述压电陶瓷片组由两片纵振压电陶瓷片和两片弯振压电陶瓷片组成;两片弯振压电陶瓷片位于弯振振型波腹处,两片纵振压电陶瓷片与法兰相邻,每片弯振压电陶瓷片对称切分成上半片弯振压电陶瓷片和下半片弯振压电陶瓷片,每片弯振压电陶瓷片的上半片弯振压电陶瓷片和下半片弯振压电陶瓷片的极化方向相反,相邻两片上半片弯振压电陶瓷片的极化方向相反, The present invention comprises a sandwich transducer and drive foot; sandwich transducer is comprised of the FM horn cover, studs, flanges, piezoelectric ceramics group consisting of thin copper; intermediate on said stud position is provided with a flange, the stud flanges of the left and right of the studs are provided with a flange between the piezoelectric ceramic sheet set, each of the piezoelectric ceramics and piezoelectric ceramics of piezoelectric ceramic group between the group and the end cap are respectively provided with a thin copper sheet as an electrode, and the piezoelectric ceramic thin copper sheet group by a fastening stud integral with the end cap, the end cap and big-endian FM fixed horn, the the group consisting of said piezoelectric ceramic vibrator two longitudinal and two piezoelectric ceramic plates flexural vibration of the piezoelectric ceramic composition sheet; two flexural vibration of the piezoelectric ceramic plate positioned flexural vibration antinode modes, two longitudinal vibration piezoelectric ceramic sheet adjacent to the flange, each of the flexural vibration of piezoelectric ceramics sheet cut into symmetrical halves of the flexural vibration of the piezoelectric ceramic plate and the lower halves flexural vibration of the piezoelectric ceramic plate, the upper half tablets each flexural vibration of the bending vibration of the piezoelectric ceramic sheet pressure opposite to the polarization direction of the dielectric ceramic and lower halves sheet flexural vibration of the piezoelectric ceramic sheet, opposite to the polarization direction of the two halves of flexural vibration of the piezoelectric ceramic sheet adjacent, 邻两片下半片弯振压电陶瓷片的极化方向相反,相邻两片纵振压电陶瓷片的极化方向相反,所述调频变幅杆的长度L为1/2纵振波长,所述驱动足设置在离调频变幅杆小端最近的弯振振型波腹处。 O two polarization directions of the flexural vibration of the piezoelectric ceramic halves opposite sheet, two opposite longitudinal vibration of the piezoelectric ceramic plate adjacent to the polarization direction, the horn length L FM 1/2 wavelength of longitudinal vibration, the driving foot disposed nearest flexural vibration antinode FM modes from the small end of the horn.

本发明具有以下有益效果:本发明利用压电陶瓷片组的纵向振动在夹心换能器中激出纵向振动和弯曲振动,二者叠加在驱动足部位产生椭圆振动轨迹和推力,实现电机的往复直线运动。 The present invention has the following advantages: the present invention uses longitudinal vibration of a piezoelectric ceramic sheet set in a sandwich transducer excited longitudinal vibration and the bending vibration, both generating elliptical vibration locus superposed thrust and driving the foot portion, to achieve the reciprocating motor linear motion. 夹心换能器两端的调频变幅杆的纵振谐振频率与现有纵弯换能器未加调频变幅杆时的纵振谐振频率相同,加上调频变幅杆后,直线超声电机的纵振谐振频率不变,通过调整调频变幅杆的变幅比(长度与截面积之比),在不改变直线超声电机纵振谐振频率的同时调整电机弯振谐振频率,实现纵弯频率简并。 The same longitudinal vibration resonance frequency of the transducer sandwich both ends of the FM horn conventional longitudinal vibration resonance frequency of the longitudinal bending transducer horn not added FM, FM plus the horn, a longitudinal linear ultrasonic motor vibration resonant frequency constant by adjusting the amplitude of the horn frequency modulation ratio (ratio of length to cross-sectional area), linear ultrasonic motor without changing the resonance frequency of the longitudinal vibration simultaneously adjust the resonance frequency flexural vibration motor, the frequency of degenerate achieve buckling . 同时,调频变幅杆还可减小振动能量在端盖中的损耗,聚集振动能量,从而大大提高了驱动足部位的振幅和振速,使直线超声电机效率最高可达38%。 Meanwhile, FM horn may reduce the loss of vibration energy in the end cap, aggregation vibration energy, thus greatly improving driving footer amplitude and velocity, the linear ultrasonic motor efficiency up to 38%. 因此本发明具有效率高、噪声小、磨损轻、可系列化生产的优点。 Therefore, the present invention has high efficiency, low noise, wear light, series production may be an advantage.

附图说明 BRIEF DESCRIPTION

图1是本发明整体结构外形图,图2是图1的纵剖图,图3是纵振压电陶瓷片8和弯振压电陶瓷片9的极化方向示意图,图4是本发明的直线超声电机在一个完整振动周期内的振型变化及驱动原理示意图,图5是本发明的直线超声电机应用到实验平台上的结构示意图。 FIG 1 is an overall outline configuration of the present invention, FIG, 2 is a longitudinal sectional view of FIG. 1, FIG. 3 is a longitudinal schematic Piezoelectric ceramic sheet 8 and the polarization direction of the flexural vibration of the piezoelectric ceramic sheet 9, FIG. 4 of the present invention is vibration type linear ultrasonic motor and the driving principle of a change in a complete cycle of oscillation schematic, FIG. 5 is a schematic structural diagram of the experimental platform linear ultrasonic motor according to the present invention is applied to.

具体实施方式 Detailed ways

具体实施方式一:结合图1~图3说明本实施方式,本实施方式由夹心换能器和驱动足7组成;所述夹心换能器由调频变幅杆1、端盖2、螺柱3、法兰4、压电陶瓷片组5、薄铜片6组成;所述螺柱3上的中间位置设有与螺柱3制成一体的法兰4,法兰4左侧的螺柱3上和法兰4右侧的螺柱3上分别装有压电陶瓷片组5,压电陶瓷片组5的各压电陶瓷片之间及压电陶瓷片组5与端盖2之间分别装有作为电极的薄铜片6,压电陶瓷片组5和薄铜片6通过螺柱3与端盖2紧固成一体,端盖2与调频变幅杆1的大端固接,所述压电陶瓷片组5由两片纵振压电陶瓷片8和两片弯振压电陶瓷片9组成;两片弯振压电陶瓷片9位于弯振振型波腹处,两片纵振压电陶瓷片8与法兰4相邻,每片弯振压电陶瓷片9对称切分成上半片弯振压电陶瓷片10和下半片弯振压电陶瓷片11,每片弯振压电陶瓷片9的上半片弯振压 A particular embodiment: in conjunction with FIGS. 1 to 3 according to the present embodiment described embodiment, the present embodiment and the sandwich transducer driving foot 7 composition; sandwich transducer is comprised of the FM horn 1, cover 2, stud 3 flange 4, the piezoelectric ceramic sheet group 5, 6 composed of thin copper; an intermediate position of the stud 3 and the stud 3 is provided with integrally formed flange 4, the flange 4 on the left side of the stud 3 studs and are respectively provided with the flange 4 and the right group of piezoelectric ceramic plates 5 and the end cap between the piezoelectric ceramic plates 5 groups, each group of piezoelectric ceramic plates 5 between the piezoelectric ceramic plates 2 respectively 3 a thin copper sheet with an electrode 6, the piezoelectric ceramic sheet group 5 and a thin copper sheet 6 and the end cap 3 by fastening studs integrally with the large end cap 2 FM horn 1 is fixed, the said piezoelectric ceramic sheet group 5 consisting of two longitudinal vibration piezoelectric ceramic plates 8 and two flexural vibration of the piezoelectric ceramic composition sheet 9; two flexural vibration of the piezoelectric ceramic sheet 9 is located flexural vibration antinode modes, two longitudinal piezoelectric ceramic sheet 4 adjacent to the flange 8, each piezoelectric ceramic sheet 9 flexural vibration cut into symmetrical halves of the flexural vibration of the piezoelectric ceramic sheet 10 and a lower half piece flexural vibration of the piezoelectric ceramic sheets 11, each sheet bending vibration pressure upper half piece flexural vibration of the piezoelectric ceramic sheet 9 陶瓷片10和下半片弯振压电陶瓷片11的极化方向相反,相邻两片上半片弯振压电陶瓷片10的极化方向相反,相邻两片下半片弯振压电陶瓷片11的极化方向相反,相邻两片纵振压电陶瓷片8的极化方向相反,压电陶瓷片组5的各压电陶瓷片沿厚度方向极化,用“+”“-”表示电畴即极化方向,所述调频变幅杆1的长度L为1/2纵振波长,所述驱动足7设置在离调频变幅杆1小端最近的弯振振型波腹处,所述调频变幅杆1的横截面为矩形,螺柱3和法兰4采用一整块金属材料加工而成,调频变幅杆1、端盖2和驱动足7采用一整块金属材料切割加工而成,可简化加工装配工艺,减少能量损耗。 Opposite to the polarization direction of the ceramic sheet 10 and a lower half piece flexural vibration of the piezoelectric ceramic sheet 11 are polarized in opposite directions on the two halves of flexural vibration of the piezoelectric ceramic sheet 10 adjacent the two halves flexural vibration of the piezoelectric ceramic sheet 11 adjacent opposite to the direction of polarization opposite to the polarization direction of two adjacent longitudinal vibration of the piezoelectric ceramic sheet 8, each group of piezoelectric ceramic sheets in the thickness direction of the piezoelectric ceramic 5 is polarized, with "+", "-" indicates an electrical i.e. the direction of polarization domain, the FM horn length of L 1 1/2 wavelength of longitudinal vibration, the drive foot 7 is provided in the recent flexural vibration antinode from a small end of the horn vibration frequency modulation type, the said cross-section FM horn 1 has a rectangular stud 3 and the flange 4 using a piece of metal materials processing, FM horn 1, 2 and the drive foot cover 7 using a piece of metal cutting material is made, the processing can be simplified assembly process, reducing energy loss. 其它组成及连接关系与具体实施方式一相同。 Other connection relationships composition and a specific embodiment of the same.

工作原理:在A电极(参见图2)施加纵向谐振频率电压,每对反向极化的纵振压电陶瓷片同步膨胀或收缩,激发纵向振动;在B电极施加弯曲谐振频率电压,上侧一对弯振压电陶瓷片膨胀时,下侧一对弯振压电陶瓷片收缩,反之亦然,激发弯曲振动。 Working principle: A is applied to the electrodes (see FIG. 2) the longitudinal resonance frequency voltages each longitudinal vibration polarization inversion of the piezoelectric ceramic to expand or contract synchronization, longitudinal vibration is excited; resonance frequency voltage is applied to the curved electrode B, the upper side when one pair of sheets flexural vibration of the piezoelectric ceramic expands, the flexural vibration of the pair of piezoelectric ceramic sheet shrinkage, and vice versa, bending vibration excitation. 夹心换能器两端的调频变幅杆的纵振谐振频率与现有的纵弯换能器未加调频变幅杆时的纵振谐振频率相同,加上调频变幅杆后直线超声电机的纵振谐振频率不变,通过调整调频变幅杆的变幅比(长度与截面积之比),在不改变直线超声电机的纵振谐振频率的同时调整直线超声电机的弯振谐振频率,实现纵弯频率简并。 Longitudinal vibration resonance frequency is the same, when the transducer is not added conventional FM buckling sandwich transducer horn across FM horn vertical longitudinal vibration resonance frequency of the linear ultrasonic motor plus FM horn linear ultrasonic vibrator motor to adjust the resonant frequency constant by adjusting the amplitude of the horn frequency modulation ratio (ratio of length to cross-sectional area), without changing the longitudinal vibration resonance frequency of the linear ultrasonic motor, while the resonance frequency of flexural vibration, to achieve the vertical bending frequency degenerate. 调频变幅杆可减小振动能量在端盖中的损耗,起到聚集振动能量的作用,提高驱动足部位的振幅和振速,使直线超声电机的性能大幅度提高。 FM horn can reduce the loss of vibration energy in the end cap, aggregate functions vibrational energy, increasing the driving amplitude and footer velocity, the performance of the linear ultrasonic motor is greatly improved. 驱动足的驱动端的弯振位移分量垂直于导轨,与纵振叠加为两个均产生驱动力的椭圆驱动轨迹,且在该处的纵振速度是所有弯振振型波腹处最大的。 Driving foot flexural vibration displacement component perpendicular to the driving end of the rails, the longitudinal vibration superposed into two tracks are driven elliptical generates a driving force, and all the flexural vibration modes at the maximum antinode of the longitudinal vibration velocity thereat. 在一个振动周期内,纵弯两路电压激振信号的相位差为+90°,I和III为驱动阶段(参见图4),位于调频变幅杆上的驱动足推动轨道使直线超声电机移动,此时,纵振振速和弯振位移达到最大值;II和IV为悬浮阶段,直线超声电机由于惯性悬浮在轨道上,此时,弯振振速和纵振位移达到最大值。 In a vibration cycle, buckling two phase excitation signal voltage is + 90 °, I and III for the driving phase (see FIG. 4), located at the driving frequency modulation amplitude sufficient push rod track the linear movement of the ultrasonic motor in this case, the longitudinal vibration and flexural vibration velocity maximum displacement; II and IV of suspension phase, the linear ultrasonic motor suspended on the rail due to inertia, at this time, the vertical flexural vibration velocity and vibration displacement reaches a maximum. 如调整两路激励信号相位差为-90°,可实现直线超声电机的反向运动。 The adjustment of two excitation signals phase shifted -90 °, the linear ultrasonic motor may be implemented in reverse movement.

具体实施方式二:结合图1和图2说明本实施方式,本实施方式的法兰4的外圆柱面的纵弯振节点重合处钻有两个小圆锥孔12,作为直线超声电机预紧力机构的夹持点,用来施加预紧力产生驱动摩擦力。 DETAILED Embodiment 2: FIG. 1 and FIG. 2 illustrates the present embodiment, the vertical flexural vibration node coincides embodiment according to the present embodiment of the flange of the outer cylindrical surface 4 of the drilled two small conical holes 12, as a linear ultrasonic motor preload nip means for generating a driving frictional preload force. 选择在此位置处钻两个小圆锥孔12,防止谐振频率漂移和振动形态畸变,可减少能量损耗。 In this position selected drilling two small conical holes 12, to prevent vibrations and resonance frequency shift shape distortion, energy loss can be reduced. 其它组成及连接关系与具体实施方式一相同。 Other connection relationships composition and a specific embodiment of the same.

具体实施方式三:结合图1和图2说明本实施方式,本实施方式与具体实施方式一的不同点是:本实施方式还增加有硬质陶瓷摩擦片13;所述硬质陶瓷摩擦片13与驱动足7的下端面粘接。 DETAILED Embodiment 3: FIG. 1 and FIG. 2 of the present embodiment described embodiment, the present embodiment and the exemplary embodiment is a difference: the present embodiment also adds a hard ceramic friction plate 13; the friction plate 13 of hard ceramic and driving the foot 7 of the lower end face of the adhesive. 如此设置,可防止驱动足7磨损,延长驱动足7的使用寿命。 So arranged to prevent the drive 7 foot wear and extend the life of the drive foot 7.

具体实施方式四:结合图1和图2说明本实施方式,本实施方式与具体实施方式三的不同点是:本实施方式的硬质陶瓷摩擦片13的材料是ZrO2、Si3N4、SiC或Al2O3。 DETAILED DESCRIPTION IV: in conjunction with FIGS. 1 and 2, according to the present embodiment, the present embodiment and the exemplary embodiment is different from III is: a material hard ceramic friction plate of the present embodiment 13 is ZrO2, Si3N4, SiC or Al2O3. 采用上述材料的摩擦系数稳定性顺序是:ZrO2>Si3N4>SiC>Al2O3;耐磨损性:ZrO2的耐磨损性最强,其次是Si3N4和SiC,最差是Al2O3;价格:ZrO2最高,其次是Si3N4和SiC,Al2O3最便宜,在直线超声电机性能要求不高的前提下,选择Al2O3性价比较高。 Stability of the above-described sequence of coefficient of friction materials are: ZrO2> Si3N4> SiC> Al2O3; abrasion resistance: abrasion resistance of ZrO2 strongest, followed Si3N4 and SiC, is the worst of Al2O3; Price: the highest of ZrO2, followed by is the SiC and Si3N4, Al2O3 the most expensive, the premise of the linear ultrasonic motor performance requirements and choose Al2O3 higher cost.

具体实施方式五:结合图2说明本实施方式,本实施方式与具体实施方式一的不同点是:本实施方式还增加有薄壁绝缘套14;所述薄壁绝缘套14分别装在法兰4左侧的螺柱3与压电陶瓷片组5和薄铜片6之间及法兰4右侧的螺柱3与压电陶瓷片组5和薄铜片6之间。 DETAILED DESCRIPTION five: the present embodiment described in conjunction with FIG. 2 embodiment, the present embodiment and the exemplary embodiment is a difference: the present embodiment also has a thin-walled insulating sleeve 14 increases; the thin insulation sleeve 14 are mounted on the flange 4 between the left side of the stud 3 and the piezoelectric ceramic thin copper sheet group 5 and 6 between the flange 4 and the right side of the stud 3 and the piezoelectric ceramic thin copper sheet group 5 and 6. 如此设置,可防止压电陶瓷片组5、薄铜片6与螺柱3连电。 Thus arranged, the piezoelectric ceramic group 5 can be prevented, and a thin copper sheet 6 is electrically connected studs 3.

具体实施方式六:结合图5说明本实施方式,本实施方式是一个将本发明的直线超声电机应用到实验平台上的一个实施例,所述实验平台的导轨底座106经由两个支板107支撑导轨102,两个夹持块103上的锥形顶尖顶在法兰4的小圆锥孔12内,这样可以最小程度影响直线超声电机101的固有谐振频率;轮轴108沿导轨102的下平面滚动,轮轴108上的两端装有轴承座109和滚动轴承110,螺栓111固连于轴承座109上并穿过夹持块103上的圆孔,螺栓111通过螺母112和预紧弹簧113压紧直线超声电机101于导轨102上,并可调节预紧力的大小;机械载荷通过滑轮加载机构104的细线114吊加砝码实现,光电码盘支架115固定在轴承座109上,轮轴108和光电码盘105通过联轴器116联接,直线超声电机101工作时带动导轨102下方的轮轴108滚动,通过光电码盘105测量轮轴108的转速,进而可推算出直线超声电 DETAILED DESCRIPTION six: the present embodiment described in conjunction with FIG. 5 embodiment, the present embodiment is applied to a linear ultrasonic motor according to the present invention on a testbed embodiment, the experiment rail mount platform 106 via two support struts 107 rail 102, on top of a conical clamping block 103 in two small conical hole 12 of the flange 4, which can affect the minimum natural resonance frequency of the linear ultrasonic motor 101; lower plane 108 along the guide shaft 102 rolling, both ends of the shaft 108 and the roller bearing 109 with bearing housing 110, a bolt 111 and retaining nut 112 compression biasing spring 113 is connected to the ultrasonic linear bearing block 109 and through a circular hole in the holding block 103 by bolts 111 motor 101 on the rail 102, and can adjust the size of preload; mechanical load loading mechanism 104 via a pulley 114 suspended fine lines add weight to achieve, the optical encoder bracket 115 fixed to the bearing housing 109, shaft 108, and photoelectric encoder 116 is coupled through the coupling plate 105, the lower rail 102 when driven by the ultrasonic linear motor 101 shaft 108 rolling work, by measuring the speed of the axle 105 of the photoelectric encoder 108, in turn, can calculate the linear ultrasonic electrical 机101的直线速度。 The linear speed of the machine 101. 实验中测得直线超声电机101的最高速度能够达到800mm/s以上,能够产生50N以上的输出推力,具有很好的速度稳定性。 Experiment measured linear ultrasonic motor 101 can reach a maximum speed of 800mm / s or more, it is possible to generate more output thrust 50N, has good speed stability.

Claims (7)

1.一种双驱动足夹心换能器式纵弯直线超声电机,它包括夹心换能器和驱动足(7);其特征在于所述夹心换能器由调频变幅杆(1)、端盖(2)、螺柱(3)、法兰(4)、压电陶瓷片组(5)、薄铜片(6)组成;所述螺柱(3)上的中间位置设有法兰(4),法兰(4)左侧的螺柱(3)上和法兰(4)右侧的螺柱(3)上分别装有压电陶瓷片组(5),压电陶瓷片组(5)的各压电陶瓷片之间及压电陶瓷片组(5)与端盖(2)之间分别装有作为电极的薄铜片(6),压电陶瓷片组(5)和薄铜片(6)通过螺柱(3)与端盖(2)紧固成一体,端盖(2)与调频变幅杆(1)的大端固接,所述压电陶瓷片组(5)由两片纵振压电陶瓷片(8)和两片弯振压电陶瓷片(9)组成;两片弯振压电陶瓷片(9)位于弯振振型波腹处,两片纵振压电陶瓷片(8)与法兰(4)相邻,每片弯振压电陶瓷片(9)对称切分成上半片弯振压电陶瓷片(10)和下半片弯振压电陶瓷片(11),每片弯 A dual drive foot sandwich Longitudinal Bending transducer ultrasonic linear motor, comprising a sandwich transducer and drive foot (7); characterized in that said frequency modulated by a sandwich transducer horn (1), end cover (2), the stud (3), the flange (4), the group of piezoelectric ceramic sheet (5), a thin copper sheet (6) consisting of; the stud (3) is provided with a flange on an intermediate position ( 4), the stud flange (4) of the left (3) and studs on the flange (4) on the right side of (3) are provided with piezoelectric ceramics group (5), the piezoelectric ceramic sheet group ( and a piezoelectric ceramic sheet set between 5) each of the piezoelectric ceramic sheet (5) with the end cap (respectively containing between 2) thin copper sheet (6), the piezoelectric ceramic sheet set (5) as an electrode and a thin copper sheet (6) by studs (3) with the end cap (2) is fastened integrally cover (2) and FM horn (1) the large end fixed to the piezoelectric ceramic sheet group (5 ) by the two longitudinal vibration of the piezoelectric ceramic plate (8) and two flexural vibration of the piezoelectric ceramic sheet (9), wherein; two flexural vibration of the piezoelectric ceramic sheet (9) is located in flexural vibration at a vibration mode antinode, two longitudinal piezoelectric ceramic sheet (8) and the flange (4) adjacent to the flexural vibration of each piezoelectric ceramic sheet (9) cut into symmetrical halves of the flexural vibration of the piezoelectric ceramic sheet (10) and a lower half piece flexural vibration of the piezoelectric ceramic sheet (11), bending each sheet 振压电陶瓷片(9)的上半片弯振压电陶瓷片(10)和下半片弯振压电陶瓷片(11)的极化方向相反,相邻两片上半片弯振压电陶瓷片(10)的极化方向相反,相邻两片下半片弯振压电陶瓷片(11)的极化方向相反,相邻两片纵振压电陶瓷片(8)的极化方向相反,所述调频变幅杆(1)的长度L为1/2纵振波长,所述驱动足(7)设置在离调频变幅杆(1)小端最近的弯振振型波腹处。 Instead Piezoelectric ceramic sheet (9) of the half piece flexural vibration of the piezoelectric ceramic sheet (10) and a lower half piece flexural vibration of the piezoelectric ceramic sheets (11) in the direction of polarization, the two halves of the adjacent bending vibration piezoelectric ceramics ( 10 opposite) direction of polarization, the two opposite halves of adjacent bending vibration piezoelectric ceramics (11) in the direction of polarization, two adjacent longitudinal vibration piezoelectric ceramic plate opposite to (8) in the direction of polarization, the FM horn (1) the length L is 1/2 wavelength of longitudinal vibration, the drive foot (7) disposed in a recent flexural vibration antinode (1) the small end of the horn from the FM modes.
2.根据权利要求1所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于所述法兰(4)的外圆柱面的纵弯振节点重合处钻有两个小圆锥孔(12)。 The dual drive foot according to claim 1 sandwich transducer Longitudinal Bending linear ultrasonic motor, characterized in that said flange (4) of the outer cylindrical surface of the buckling vibration node coincides drilled two small conical hole (12).
3.根据权利要求1所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于所述调频变幅杆(1)的横截面为矩形。 The dual drive foot according to claim 1 sandwich transducer Longitudinal Bending linear ultrasonic motor, wherein said cross-section FM horn (1) is rectangular.
4.根据权利要求1所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于所述调频变幅杆(1)、端盖(2)和驱动足(7)采用一整块金属材料切割加工而成。 The dual drive foot according to claim 1 sandwich transducer Longitudinal Bending linear ultrasonic motor, wherein said frequency modulated horn (1), cover (2) and a drive foot (7), used in the cutting from the bulk metal material.
5.根据权利要求1所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于它还包括硬质陶瓷摩擦片(13);所述硬质陶瓷摩擦片(13)与驱动足(7)的下端面粘接。 The dual drive foot according to claim 1 sandwich transducer Longitudinal Bending linear ultrasonic motor, characterized in that it comprises a hard ceramic friction plates (13); said hard ceramic friction plates (13) and the drive foot (7) of the lower end surface of the adhesive.
6.根据权利要求5所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于所述硬质陶瓷摩擦片(13)的材料是ZrO2、Si3N4、SiC或Al2O3。 The dual drive according to claim 5, wherein the foot sandwich transducer Longitudinal Bending linear ultrasonic motor, wherein said hard ceramic material of the friction plate (13) is ZrO2, Si3N4, SiC or Al2O3.
7.根据权利要求1所述的双驱动足夹心换能器式纵弯直线超声电机,其特征在于它还增加有薄壁绝缘套(14);所述薄壁绝缘套(14)分别装在法兰(4)左侧的螺柱(3)与压电陶瓷片组(5)和薄铜片(6)之间及法兰(4)右侧的螺柱(3)与压电陶瓷片组(5)和薄铜片(6)之间。 The dual drive foot according to claim 1 sandwich transducer Longitudinal Bending linear ultrasonic motor, characterized in that it increases the insulating thin-walled sleeve (14); the thin insulating sheath (14) respectively mounted in flange (4) between the left side of the stud (3) of the piezoelectric ceramic sheet group (5) and a thin copper sheet (6) and the flange (4) on the right side of the stud (3) and the piezoelectric ceramic plates group (5) and a thin copper sheet (6) between.
CN 200710071909 2007-03-20 2007-03-20 Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor CN101022257A (en)

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