CN101022257A - Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor - Google Patents
Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor Download PDFInfo
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- CN101022257A CN101022257A CN 200710071909 CN200710071909A CN101022257A CN 101022257 A CN101022257 A CN 101022257A CN 200710071909 CN200710071909 CN 200710071909 CN 200710071909 A CN200710071909 A CN 200710071909A CN 101022257 A CN101022257 A CN 101022257A
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Abstract
A linear ultrasonic motor of sandwich transducer type with double driving- foot is prepared as firm-connecting longitudinal-flexural vibration piezoelectric ceramic wafer and thin copper plate with big end of end cover and FM variable amplitude rod, arranging two flexural piezoelectric ceramic wafers at vibration wave loop of flexural vibration for setting polarization directions of flexural and longitudinal vibration piezoelectric ceramic wafers, setting length of FM variable-amplitude rod to be 1/2 of longitudinal vibration wavelength and setting said driving foot at flexural vibration wave loop most near to FM variable-amplitude rod.
Description
Technical field
The present invention relates to a kind of linear ultrasonic motor, belong to the piezoelectric ultrasonic motor technical field.
Background technology
Ultrasound electric machine is a kind of ultrasonic vibrational energy of utilizing, and produces the motor of actuating force by rubbing action.Advantages such as it has low speed high torque (thrust), need not gear, no electromagnetic interference, response speed is fast and cut off self-lock have very as a kind of piezoelectric actuator and to use widely.Calendar year 2001 Japan " Applied Physics " magazine (Jpn.J.Appl.Phys) the 40th phase p3773～3776 pages, name is called " A High Power Ultrasonic Motor Using a Longitudinal and BendingHybrid Bolt-Clamped Langevin Type Transducer " (a kind of large power supersonic motor that uses bolted sandwich longitudinal-bending composite transducer) and proposes a kind of linear ultrasonic motor, because two groups of curved potsherds that shake are positioned at curved two the antinode places that shake of second order, therefore can't install at this antinode place and drive foot, can only the sufficient end cap end that is installed in away from antinode will be driven, to cause two angles that drive curved the shake displacement component and the flat surface of foot like this is two complementary inclination angles, make two to drive a generation of foot actuating force, one produces braking force, thereby causes linear ultrasonic motor inefficiency (peak efficiency is 22%), noise is big, serious wear; Secondly, the vertical curved resonance frequency of degeneracy can only realize by the section radius size of adjusting transducer, so the type linear ultrasonic motor can only realize in the transducer of certain radius, can not form product seriation.
Summary of the invention
The purpose of this invention is to provide a kind of double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine, it can solve, and the vertical curved composite straight line ultrasound electric machine of existing sandwich exists that electric efficiency is low, noise big, serious wear, the problem of product seriation of can not forming.
The present invention includes sandwich converter and drive foot; Described sandwich converter is made up of frequency-modulating variable-amplitude rod, end cap, double-screw bolt, flange, piezoelectric ceramic piece group, scale copper; Centre position on the described double-screw bolt is provided with flange, on the double-screw bolt in flange left side and on the double-screw bolt on flange right side the piezoelectric ceramic piece group is housed respectively, scale copper as electrode is housed respectively between each piezoelectric ceramic piece of piezoelectric ceramic piece group and between piezoelectric ceramic piece group and the end cap, piezoelectric ceramic piece group and scale copper are tightened to one by double-screw bolt and end cap, the big end of end cap and frequency-modulating variable-amplitude rod is affixed, and described piezoelectric ceramic piece group is made up of two longitudinal vibration piezoelectric ceramic pieces and two curved piezoelectric ceramic pieces that shake; Two curved piezoelectric ceramic pieces that shake are positioned at curved vibration shape antinode place, two longitudinal vibration piezoelectric ceramic pieces are adjacent with flange, the every curved piezoelectric ceramic piece symmetry of shaking is cut into curved piezoelectric ceramic piece and the curved piezoelectric ceramic piece that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece that shakes curved shake piezoelectric ceramic piece and the curved piezoelectric ceramic piece that shakes of second sheet is opposite, the polarised direction of the curved piezoelectric ceramic piece that shakes of adjacent two first sheets is opposite, the polarised direction of the curved piezoelectric ceramic piece that shakes of adjacent two second sheets is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic pieces is opposite, the length L of described frequency-modulating variable-amplitude rod is 1/2 longitudinal vibration wavelength, and described driving foot is arranged on from the nearest curved vibration shape antinode place of frequency-modulating variable-amplitude rod small end.
The present invention has following beneficial effect: the present invention utilizes the extensional vibration of piezoelectric ceramic piece group to swash in sandwich converter extensional vibration and flexural vibrations, the two is superimposed upon and drives foot position generation elliptical vibration track and thrust, realizes the linear reciprocating motion of motor.Longitudinal vibration resonance frequency when the longitudinal vibration resonance frequency of the frequency-modulating variable-amplitude rod at sandwich converter two ends does not add frequency-modulating variable-amplitude rod with existing vertical curved transducer is identical, after adding frequency-modulating variable-amplitude rod, the longitudinal vibration resonance frequency of linear ultrasonic motor is constant, luffing by adjusting frequency-modulating variable-amplitude rod is than the ratio of sectional area (length with), when not changing linear ultrasonic motor longitudinal vibration resonance frequency, adjust the curved resonance frequency of shaking of motor, realize vertical curved frequency degeneracy.Simultaneously, frequency-modulating variable-amplitude rod also can reduce the loss of vibrational energy in end cap, assembles vibrational energy, thereby has improved amplitude and the vibration velocity that drives the foot position greatly, makes that linear ultrasonic motor is most effective to reach 38%.Therefore the present invention has that but efficient height, noise are little, the advantage of light abrasion producing in serial form.
Description of drawings
Fig. 1 is an overall structure outline drawing of the present invention, Fig. 2 is the sectional side elevation of Fig. 1, Fig. 3 is the polarised direction schematic diagram of longitudinal vibration piezoelectric ceramic piece 8 and the curved piezoelectric ceramic piece 9 that shakes, Fig. 4 is that the vibration shape of linear ultrasonic motor of the present invention in a complete vibration period changes and the drive principle schematic diagram, and Fig. 5 is that linear ultrasonic motor of the present invention is applied to the structural representation on the experiment porch.
Embodiment
Embodiment one: in conjunction with Fig. 1～Fig. 3 present embodiment is described, present embodiment is made up of sandwich converter and driving foot 7; Described sandwich converter is made up of frequency-modulating variable-amplitude rod 1, end cap 2, double-screw bolt 3, flange 4, piezoelectric ceramic piece group 5, scale copper 6; Centre position on the described double-screw bolt 3 is provided with the flange 4 of making one with double-screw bolt 3, on the double-screw bolt 3 on the double-screw bolt 3 in flange 4 left sides and flange 4 right sides piezoelectric ceramic piece group 5 is housed respectively, scale copper 6 as electrode is housed respectively between each piezoelectric ceramic piece of piezoelectric ceramic piece group 5 and between piezoelectric ceramic piece group 5 and the end cap 2, piezoelectric ceramic piece group 5 and scale copper 6 are tightened to one by double-screw bolt 3 and end cap 2, end cap 2 is affixed with the big end of frequency-modulating variable-amplitude rod 1, and described piezoelectric ceramic piece group 5 is made up of two longitudinal vibration piezoelectric ceramic pieces 8 and two curved piezoelectric ceramic pieces 9 that shake; Two curved piezoelectric ceramic pieces 9 that shake are positioned at curved vibration shape antinode place, two longitudinal vibration piezoelectric ceramic pieces 8 are adjacent with flange 4, every curved piezoelectric ceramic piece 9 symmetries of shaking are cut into curved piezoelectric ceramic piece 10 and the curved piezoelectric ceramic piece 11 that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece 9 that shakes curved shake piezoelectric ceramic piece 10 and the curved piezoelectric ceramic piece 11 that shakes of second sheet is opposite, the polarised direction of the curved piezoelectric ceramic piece 10 that shakes of adjacent two first sheets is opposite, the polarised direction of the curved piezoelectric ceramic piece 11 that shakes of adjacent two second sheets is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic pieces 8 is opposite, each piezoelectric ceramic piece of piezoelectric ceramic piece group 5 polarizes along thickness direction, with "+" "-" expression electricdomain is polarised direction, the length L of described frequency-modulating variable-amplitude rod 1 is 1/2 longitudinal vibration wavelength, described driving foot 7 is arranged on from the nearest curved vibration shape antinode place of frequency-modulating variable-amplitude rod 1 small end, the cross section of described frequency-modulating variable-amplitude rod 1 is a rectangle, double-screw bolt 3 and flange 4 adopt a block of metal materials processing to form, frequency-modulating variable-amplitude rod 1, end cap 2 and driving foot 7 adopt a block of metal material cutting processing to form, can simplify processing and assembling, reduce energy loss.Other composition and annexation are identical with embodiment one.
Operation principle: apply vertical resonance frequency voltage at A electrode (referring to Fig. 2), the longitudinal vibration piezoelectric ceramic piece of every pair of reverse polarization expands synchronously or shrinks, and excites extensional vibration; Apply the crooked syntony voltage to frequency at the B electrode, when a pair of curved piezoelectric ceramic piece that shakes of upside expanded, a pair of curved piezoelectric ceramic piece that shakes of downside shrank, and vice versa, excites flexural vibrations.Longitudinal vibration resonance frequency when the longitudinal vibration resonance frequency of the frequency-modulating variable-amplitude rod at sandwich converter two ends does not add frequency-modulating variable-amplitude rod with existing vertical curved transducer is identical, add that the longitudinal vibration resonance frequency of linear ultrasonic motor is constant behind the frequency-modulating variable-amplitude rod, luffing by adjusting frequency-modulating variable-amplitude rod is than the ratio of sectional area (length with), when not changing the longitudinal vibration resonance frequency of linear ultrasonic motor, adjust the curved resonance frequency of shaking of linear ultrasonic motor, realize vertical curved frequency degeneracy.Frequency-modulating variable-amplitude rod can reduce the loss of vibrational energy in end cap, plays the effect of assembling vibrational energy, improves the amplitude and the vibration velocity that drive the foot position, and the performance of linear ultrasonic motor is increased substantially.The curved displacement component of shaking that drives sufficient drive end is superposed to two ellipses that all produce actuating force with longitudinal vibration and drives tracks perpendicular to guide rail, and the longitudinal vibration speed at this place is all curved vibration shape antinode place maximums.In a vibration period, the phase difference of vertical curved two-way voltage accumulation signal is+90 °, and I and III are driving stage (referring to Fig. 4), and the driving foot promotion track that is positioned on the frequency-modulating variable-amplitude rod moves linear ultrasonic motor, at this moment, longitudinal vibration vibration velocity and the curved displacement of shaking reach maximum; II and IV are suspension stages, and linear ultrasonic motor is because inertia suspends in orbit, and at this moment, curved vibration velocity and longitudinal vibration displacement reach maximum.As adjust the excitation signals phase difference and be-90 °, can realize the counter motion of linear ultrasonic motor.
Embodiment two: present embodiment is described in conjunction with Fig. 1 and Fig. 2, vertical curved node coincidence place of shaking of the external cylindrical surface of the flange 4 of present embodiment is drilled with two roundlet taper holes 12, as the bite of linear ultrasonic motor pretightning force mechanism, be used for applying pretightning force and produce driving frictional force.Be chosen in this position and bore two roundlet taper holes 12, prevent resonance frequency drift and vibration shape distortion, can reduce energy loss.Other composition and annexation are identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 and Fig. 2 present embodiment is described, the difference of present embodiment and embodiment one is: present embodiment also increases hard ceramic friction plate 13; Described hard ceramic friction plate 13 is bonding with the lower surface that drives foot 7.So be provided with, can prevent to drive foot 7 wearing and tearing, prolong the useful life that drives foot 7.
Embodiment four: in conjunction with Fig. 1 and Fig. 2 present embodiment is described, the difference of present embodiment and embodiment three is: the material of the hard ceramic friction plate 13 of present embodiment is ZrO
2, Si
3N
4, SiC or Al
2O
3Adopt the stable friction factor of above-mentioned material to be in proper order: ZrO
2＞Si
3N
4＞SiC＞Al
2O
3Mar proof: ZrO
2Mar proof the strongest, secondly be Si
3N
4And SiC, the poorest is Al
2O
3Price: ZrO
2The highest, secondly be Si
3N
4And SiC, Al
2O
3The most cheap, under the not high prerequisite of linear ultrasonic motor performance requirement, select Al
2O
3Cost performance is higher.
Embodiment five: in conjunction with Fig. 2 present embodiment is described, the difference of present embodiment and embodiment one is: present embodiment also increases thinwalled insulation cover 14; Reach between the double-screw bolt 3 and piezoelectric ceramic piece group 5 and scale copper 6 on flange 4 right sides between the double-screw bolt 3 that described thinwalled insulation cover 14 is contained in flange 4 left sides respectively and piezoelectric ceramic piece group 5 and the scale copper 6.So be provided with, can prevent that piezoelectric ceramic piece group 5, scale copper 6 from connecting with double-screw bolt 3.
Embodiment six: present embodiment is described in conjunction with Fig. 5, present embodiment is one linear ultrasonic motor of the present invention is applied to a embodiment on the experiment porch, the guiderail base 106 of described experiment porch is via two support plates, 107 supporting guides 102, cone centre on two grip blocks 103 withstands in the roundlet taper hole 12 of flange 4, like this can minimum degree influences the natural resonance frequency of linear ultrasonic motor 101; Wheel shaft 108 rolls along the lower plane of guide rail 102, bearing pedestal 109 and rolling bearing 110 are equipped with in two ends on the wheel shaft 108, bolt 111 is fixed on the bearing pedestal 109 and passes circular hole on the grip block 103, bolt 111 compresses linear ultrasonic motor 101 on guide rail 102 by nut 112 and preloading spring 113, and the size of scalable pretightning force; The fine rule 114 of mechanical load by pulley load maintainer 104 hangs and adds counterweight and realize, photoelectric code disk support 115 is fixed on the bearing pedestal 109, wheel shaft 108 and photoelectric code disk 105 connect by shaft coupling 116, the wheel shaft 108 that drives guide rail 102 belows during linear ultrasonic motor 101 work rolls, by the rotating speed of photoelectric code disk 105 wheel axle 108, and then can extrapolate the space rate of linear ultrasonic motor 101.The maximum speed that records linear ultrasonic motor 101 in the experiment can reach more than the 800mm/s, can produce the above thrust output of 50N, has good speed stability.
Claims (7)
1, a kind of double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine, it comprises sandwich converter and drives foot (7); It is characterized in that described sandwich converter is made up of frequency-modulating variable-amplitude rod (1), end cap (2), double-screw bolt (3), flange (4), piezoelectric ceramic piece group (5), scale copper (6); Centre position on the described double-screw bolt (3) is provided with flange (4), the double-screw bolt (3) in flange (4) left side upward and on the double-screw bolt (3) on flange (4) right side is equipped with piezoelectric ceramic piece group (5) respectively, scale copper (6) as electrode is housed respectively between each piezoelectric ceramic piece of piezoelectric ceramic piece group (5) and between piezoelectric ceramic piece group (5) and the end cap (2), piezoelectric ceramic piece group (5) and scale copper (6) are tightened to one by double-screw bolt (3) and end cap (2), end cap (2) is affixed with the big end of frequency-modulating variable-amplitude rod (1), and described piezoelectric ceramic piece group (5) is made up of two longitudinal vibration piezoelectric ceramic pieces (8) and two curved piezoelectric ceramic pieces (9) that shake; Two curved piezoelectric ceramic pieces (9) that shake are positioned at curved vibration shape antinode place, two longitudinal vibration piezoelectric ceramic pieces (8) are adjacent with flange (4), every curved piezoelectric ceramic piece (9) symmetry of shaking is cut into curved piezoelectric ceramic piece (10) and the curved piezoelectric ceramic piece (11) that shakes of second sheet of shaking of first sheet, the polarised direction of first sheet of the every curved piezoelectric ceramic piece (9) that shakes curved shake piezoelectric ceramic piece (10) and the curved piezoelectric ceramic piece (11) that shakes of second sheet is opposite, the polarised direction of the curved piezoelectric ceramic piece (10) that shakes of adjacent two first sheets is opposite, the polarised direction of the curved piezoelectric ceramic piece (11) that shakes of adjacent two second sheets is opposite, the polarised direction of adjacent two longitudinal vibration piezoelectric ceramic pieces (8) is opposite, the length L of described frequency-modulating variable-amplitude rod (1) is 1/2 longitudinal vibration wavelength, and described driving foot (7) is arranged on from the nearest curved vibration shape antinode place of frequency-modulating variable-amplitude rod (1) small end.
2, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 1 is characterized in that vertical curved node coincidence place of shaking of the external cylindrical surface of described flange (4) is drilled with two roundlet taper holes (12).
3, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 1, the cross section that it is characterized in that described frequency-modulating variable-amplitude rod (1) is a rectangle.
4, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 1 is characterized in that described frequency-modulating variable-amplitude rod (1), end cap (2) and drives foot (7) adopting a block of metal material cutting processing to form.
5, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 1 is characterized in that it also comprises hard ceramic friction plate (13); Described hard ceramic friction plate (13) is bonding with the lower surface that drives foot (7).
6, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 5 is characterized in that the material of described hard ceramic friction plate (13) is ZrO
2, Si
3N
4, SiC or Al
2O
3
7, double-driving foot sandwich converter type longitudinal and bending linear ultrasound electric machine according to claim 1 is characterized in that it also increases thinwalled insulation cover (14) is arranged; Reach between the double-screw bolt (3) and piezoelectric ceramic piece group (5) and scale copper (6) on flange (4) right side between the double-screw bolt (3) that described thinwalled insulation cover (14) is contained in flange (4) left side respectively and piezoelectric ceramic piece group (5) and the scale copper (6).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710071909 CN101022257A (en) | 2007-03-20 | 2007-03-20 | Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710071909 CN101022257A (en) | 2007-03-20 | 2007-03-20 | Double-driving foot sandwich converter type longitudinal and bending linear ultrasonic motor |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101626204B (en) * | 2009-08-25 | 2011-06-01 | 哈尔滨工业大学 | U-type double-pin linear ultrasonic motor vibrator |
| CN102324867A (en) * | 2011-09-22 | 2012-01-18 | 哈尔滨工业大学 | Linear platform using compound bending vibration type biped linear ultrasonic vibrator |
| CN102882423A (en) * | 2012-10-18 | 2013-01-16 | 哈尔滨工业大学 | Double-leg rotating ultrasonic motor oscillator of combined torsional oscillation |
| CN102931870A (en) * | 2012-11-02 | 2013-02-13 | 南京航空航天大学 | Standing wave linear ultrasonic motor |
| CN103023372A (en) * | 2012-11-23 | 2013-04-03 | 上海交通大学 | Single-phase-driven SMD (Surface-Mounted Device) longitudinal-torsional ultrasonic micromotor |
| CN103036472A (en) * | 2012-11-28 | 2013-04-10 | 上海交通大学 | Threaded linear ultrasonic motor |
| CN104518704A (en) * | 2015-01-09 | 2015-04-15 | 哈尔滨工业大学 | Cross-shaped symmetric beam type patch single-foot ultrasonic motor vibrator |
| CN104539189A (en) * | 2015-01-09 | 2015-04-22 | 哈尔滨工业大学 | Cross-shaped section beam type paster double-foot ultrasonic motor vibrator |
| CN105406759A (en) * | 2016-01-08 | 2016-03-16 | 哈尔滨工业大学 | Partition exciting longitudinal and bending composite ultrasonic motor vibrator |
| CN106217851A (en) * | 2016-07-11 | 2016-12-14 | 杨林 | Novel ultrasonic welder |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN107552368A (en) * | 2017-10-31 | 2018-01-09 | 哈尔滨工业大学 | A kind of sandwich elliptical ultrasonic vibration system based on symmetrical structure |
| CN112713801A (en) * | 2021-01-26 | 2021-04-27 | 金陵科技学院 | High-precision linear driving type piezoelectric actuator |
| CN113595436A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Circular double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
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2007
- 2007-03-20 CN CN 200710071909 patent/CN101022257A/en active Pending
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101626204B (en) * | 2009-08-25 | 2011-06-01 | 哈尔滨工业大学 | U-type double-pin linear ultrasonic motor vibrator |
| CN102324867A (en) * | 2011-09-22 | 2012-01-18 | 哈尔滨工业大学 | Linear platform using compound bending vibration type biped linear ultrasonic vibrator |
| CN102324867B (en) * | 2011-09-22 | 2013-10-09 | 哈尔滨工业大学 | Linear platform using compound bending vibration type biped linear ultrasonic vibrator |
| CN102882423A (en) * | 2012-10-18 | 2013-01-16 | 哈尔滨工业大学 | Double-leg rotating ultrasonic motor oscillator of combined torsional oscillation |
| CN102882423B (en) * | 2012-10-18 | 2016-01-20 | 哈尔滨工业大学 | Composite bending vibration biped rotary ultrasonic motor oscillator |
| CN102931870A (en) * | 2012-11-02 | 2013-02-13 | 南京航空航天大学 | Standing wave linear ultrasonic motor |
| CN102931870B (en) * | 2012-11-02 | 2016-08-17 | 南京航空航天大学 | A kind of standing wave type linear ultrasonic motor |
| CN103023372B (en) * | 2012-11-23 | 2015-09-09 | 上海交通大学 | The chip longitudinal-torsional ultrasound micro-motor of singlephase drive |
| CN103023372A (en) * | 2012-11-23 | 2013-04-03 | 上海交通大学 | Single-phase-driven SMD (Surface-Mounted Device) longitudinal-torsional ultrasonic micromotor |
| CN103036472A (en) * | 2012-11-28 | 2013-04-10 | 上海交通大学 | Threaded linear ultrasonic motor |
| CN103036472B (en) * | 2012-11-28 | 2016-06-01 | 上海交通大学 | Screw-type linear ultrasonic motor |
| CN104539189A (en) * | 2015-01-09 | 2015-04-22 | 哈尔滨工业大学 | Cross-shaped section beam type paster double-foot ultrasonic motor vibrator |
| CN104518704A (en) * | 2015-01-09 | 2015-04-15 | 哈尔滨工业大学 | Cross-shaped symmetric beam type patch single-foot ultrasonic motor vibrator |
| CN104539189B (en) * | 2015-01-09 | 2017-01-11 | 哈尔滨工业大学 | Cross-shaped section beam type paster double-foot ultrasonic motor vibrator |
| CN105406759A (en) * | 2016-01-08 | 2016-03-16 | 哈尔滨工业大学 | Partition exciting longitudinal and bending composite ultrasonic motor vibrator |
| CN106217851A (en) * | 2016-07-11 | 2016-12-14 | 杨林 | Novel ultrasonic welder |
| CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
| CN106953539B (en) * | 2017-04-14 | 2019-04-12 | 哈尔滨工业大学 | Vertical-curved compound creeping motion type precision piezoelectric actuator and its motivational techniques |
| CN107552368A (en) * | 2017-10-31 | 2018-01-09 | 哈尔滨工业大学 | A kind of sandwich elliptical ultrasonic vibration system based on symmetrical structure |
| CN113595436A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Circular double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN113595436B (en) * | 2020-04-30 | 2024-06-07 | 华侨大学 | Circular double longitudinal vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN112713801A (en) * | 2021-01-26 | 2021-04-27 | 金陵科技学院 | High-precision linear driving type piezoelectric actuator |
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Open date: 20070822 |