CN101017083A - High-density multi-channel testing device - Google Patents
High-density multi-channel testing device Download PDFInfo
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- CN101017083A CN101017083A CN 200610003075 CN200610003075A CN101017083A CN 101017083 A CN101017083 A CN 101017083A CN 200610003075 CN200610003075 CN 200610003075 CN 200610003075 A CN200610003075 A CN 200610003075A CN 101017083 A CN101017083 A CN 101017083A
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Abstract
This invention relates to one high intensity multi-channel test device to test sample, which comprises light power, calibration lens, split lens and high intensive multi-channel image device, wherein, the power is to emit light beam; calibration lens is set in the light path in light source to correct beam into parallel light; split lens is to reflect the beam from calibration lens into sample through the split lens; high intensity multi-channel image device is set on the split beam to receive for testing of sample.
Description
Technical field
The present invention relates to a kind of sample testing apparatus, and be particularly related to a kind of pick-up unit of high-density multi-channel.
Background technology
Film quality inspection survey technology comprises as optical constants such as thickness, light refractive index, extinction coefficients and measures, and no matter in semiconductor technology, LCD technology, all plays the part of role of the utmost importance.
Device is surveyed in present known film quality inspection, roughly has single-point type measured thin film device, filter image-type measured thin film device and multi-channel type measured thin film device etc. several.Fig. 1 is a U.S. Pat 4,676,647 disclosed single-point type measured thin film devices.The sample 2 of this device light beam irradiates that light source 5 is emitted to the microscope carrier 3, this sample comprises substrate or film on substrate, light beam incides focus grating (concave diffraction grating) 8 after being reflected by sample 2, by one dimension light emitting diode matrix detecting device (photodiode array) 16 receiving optical signals, obtain the reflectance spectrum of this sample again.Through after the computed in software, obtain the membranous information of single-point.Though the method is simple in structure, obtain the membranous information of whole determinand, necessary mobile probe or sample are with thin-film information combination everywhere on the sample, and therefore required Measuring Time is extremely long, thereby can't be used in online detection.
Fig. 2 is a U.S. Pat 5,555,474 disclosed filter image-type measured thin film devices.As shown in Figure 2, the structure of this device mainly comprises light source LS1, lens combination L1, L2, filter (filter) rotating disk 24, lens combination 27, spectroscope 26 or the like.At measuring process rotation filter rotating disk 24, lead to (bandpass) wavelength coverage because of each filter 20 all has different band, after having rotated all filters 20, can clap on the two-dimensional CCD 25 the image information of sample 23 resultant different wave length under different filters.After the software calculation, can obtain the membranous measurement of two dimension.But because the rotation filter needs spended time, add that the logical scope of use filter band is too wide and the filter number is limited, cause spectrally resolved rate variance, membranous measuring accuracy is restricted, and this two shortcoming limits this device simultaneously can't be used in online detection.
Fig. 3 is the disclosed multi-channel type measured thin film device of U.S. patent application case US20020030826.As shown in Figure 3, this device adopts the raster pattern image spectrum to measure (imagingspectrometer) structure.The directional light that reflects from sample through behind the lens 34 again by slit 35, reenter through lens 36 and to be mapped to grating 37, on sensor 38, produce a plurality of spectroscopic datas afterwards.Among Fig. 3, the vertical direction of sensor 38 is represented the resolution in space, and horizontal direction is represented spectral resolution.Utilize this kind device, can obtain the spectral information of hyperchannel (being the multiple spot spatial information) simultaneously, and reach the effect of the membranous measurement of multipoint mode film.General raster manipulation condition must be with directional light incident, but the structure of Fig. 3 adds lens before grating 37, the light beam that incides grating 37 is become be not directional light, and this can produce extra aberration and make spectral resolution very poor.But the measure spectrum scope only can be distinguished 32 five equilibriums, and spectral resolution is restricted, and influences the membranous measuring accuracy of film relatively, therefore also can't be applied to online detection.
Along with under the trend that the film sample area becomes big, process speed is accelerated, detect fast and accurately and become more and more important in recent years.And in existing film quality inspection survey technology, use film spot measurement method more, and though the method is accurate, obtain two-dimentional membranous image, necessary mobile probe or determinand, Measuring Time is too of a specified duration, can't do online detection.Though there was multichannel membranous method for quick to develop out afterwards, cause measurement accuracy low because of aberration is very big, also can't be applied in online detection.
Take a broad view of above method, there is no and to reach simultaneously that hyperchannel is measured fast, the membranous online film pick-up unit that accurately measures.Can reach the device that film is accurately measured and measured fast simultaneously so there is no so far, press for new measuring method.
Summary of the invention
Purpose of the present invention is providing a kind of high-density multi-channel testing device exactly, and it can solve and knownly can't reach simultaneously that hyperchannel is measured fast, the membranous problem that accurately measures, and sets up high spectral resolution, the simultaneously-measured on-line measuring device of hyperchannel.
In order to reach above-mentioned purpose, the present invention proposes a kind of high-density multi-channel testing device, in order to detect sample.This high-density multi-channel testing device comprises at least: light source, collimation lens, spectroscope and high-density multi-channel image device.Light source is in order to outgoing beam.Collimation lens is arranged on before the light source and on the light path of light beam, and light beam is modified to directional light.Spectroscope, and makes from the sample beam reflected and penetrates spectroscope to sample in order to beam reflection that collimation lens is penetrated.The high-density multi-channel image device is arranged on to receive and penetrates on the position of this spectroscopical light beam, and sample is detected.The high-density multi-channel image device has light collector and receives hyperchannel nucleus module from the light beam of light collector, and utilizes light collector, and making the light beam that incides the hyperchannel nucleus module is the optical axis that is parallel to the hyperchannel nucleus module.
According to an embodiment of the present invention, the present invention also proposes a kind of high-density multi-channel testing device, in order to detect transparent sample, improves membranous measuring accuracy.This high-density multi-channel testing device comprises at least: light source, collimation lens, branch are penetrated mirror and high-density multi-channel image device.Light source is in order to light beam to be provided.Collimation lens is arranged on before the light source and on the light path of light beam, and light beam is modified to directional light.Catoptron in order to beam reflection that collimation lens is penetrated to sample.The high-density multi-channel image device is arranged on to receive and penetrates on the position of sample beam, and sample is detected.The high-density multi-channel image device has light collector and receives hyperchannel nucleus module from the light beam of light collector, and utilizes light collector, and making the light beam that incides the hyperchannel nucleus module is the optical axis that is parallel to the hyperchannel nucleus module.
According to an embodiment of the present invention, in aforementioned high-density multi-channel testing device, the visual field of high-density multi-channel image device on sample is the linear visual field of one dimension.Light source can be wideband white light source, for example Halogen lamp LED.In addition, light collector can be the picture square telecentric mirror.
According to an embodiment of the present invention, in aforementioned high-density multi-channel testing device, the hyperchannel nucleus module also comprises optical slits, collimating mirror, diffraction grating, achromatism focus lamp, two-dimensional array sensor, is arranged in regular turn on the light path of light beam respectively.Collimating mirror can be non-sphere collimation mirror, and diffraction grating can be the penetration diffraction grating.In addition, the rotation of can tilting with respect to the optical axis of hyperchannel nucleus module of achromatism focus lamp and two-dimensional array sensor is to eliminate the aberration phenomenon of each wave band.
According to another embodiment of the present invention, the present invention also proposes a kind of high-density multi-channel testing device, in order to detect sample.High-density multi-channel testing device comprises: light source, first fibre bundle, a plurality of fibre-optical probe and high-density multi-channel image device.Light source is in order to outgoing beam.First fibre bundle has a plurality of bifurcation fiber bundles, in order to light beam is divided into a plurality of light beams.A plurality of fibre-optical probes have input end respectively, end and output terminal are gone in output, wherein each input end is connected respectively to each bifurcation fiber bundle of first fibre bundle in order to receive each light beam, output goes into to hold on the position of a plurality of tested points that are set to corresponding sample, and each light beam irradiates is also received each light beam that reflects from each tested point to each tested point.The high-density multi-channel image device has second fibre bundle and receives hyperchannel nucleus module from the light beam of second fibre bundle.Second fibre bundle has a plurality of bifurcation fiber bundles, be connected with each output terminal of above-mentioned these fibre-optical probes respectively, receiving each light beam that reflects from each tested point, and by second fibre bundle, making the light beam that incides the hyperchannel nucleus module is the optical axis that is parallel to the hyperchannel nucleus module.
According to another embodiment of the present invention, the present invention also proposes a kind of high-density multi-channel testing device, in order to detect transparent sample.High-density multi-channel testing device comprises light source, first fibre bundle, a plurality of first fibre-optical probe, a plurality of second fibre-optical probe and high-density multi-channel image device.Light source is in order to outgoing beam.First fibre bundle has a plurality of bifurcation fiber bundles, in order to light beam is divided into a plurality of light beams.A plurality of first fibre-optical probes have input end and output terminal respectively, wherein each input end be connected respectively to first fibre bundle each bifurcation fiber bundle in order to receive each light beam, output terminal is set on a plurality of tested points of corresponding sample, with each light beam irradiates to each tested point.A plurality of second fibre-optical probes have input end and output terminal respectively, and wherein each input end is set to respectively on the position of above-mentioned these tested points of corresponding sample, penetrate the light beam of each tested point in order to reception.The high-density multi-channel image device has second fibre bundle and the reception hyperchannel nucleus module from the light beam of this second fibre bundle.Second fibre bundle has a plurality of bifurcation fiber bundles, be connected with each output terminal of above-mentioned these second fibre-optical probes respectively, receiving respectively this light beam that penetrates from each tested point, and by second fibre bundle, making the light beam that incides the hyperchannel nucleus module is the optical axis that is parallel to the hyperchannel nucleus module.
In aforementioned high-density multi-channel testing device, light source can be wideband white light source.
In aforementioned high-density multi-channel testing device, the hyperchannel nucleus module can also comprise optical slits, collimating mirror, diffraction grating, achromatism focus lamp, two-dimensional array sensor, is arranged in regular turn on the light path of light beam respectively.Collimating mirror can be non-sphere collimation mirror, and diffraction grating can be the penetration diffraction grating.In addition, the rotation of can tilting with respect to the optical axis of hyperchannel nucleus module of achromatism focus lamp and two-dimensional array sensor is to eliminate the aberration phenomenon of each wave band.
By above-mentioned high-density multi-channel testing device, the present invention can make hyperchannel and high spectral resolution two characteristics exist simultaneously, and the spatial channel number also can reach tens of passages.Then can be distinguished into five equilibriums up to a hundred in spectral range to be measured, the spectral resolution height.Each measured passage film reflects or penetrates spectral information, can pass through software algorithm again, just can simultaneously and obtain in the linear visual field the continuous or discrete membranous information of multichannel film of one dimension accurately.In addition, if again through traveling probe or sample, can be combined into two-dimentional membranous information to the membranous information of the one dimension in the linear visual field at last.In addition, by the position that is provided with of high-density multi-channel image device, can detect transparent and opaque sample, its application can greatly improve.
State with other purpose, feature and advantage and can become apparent on the present invention for allowing, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Fig. 1 is known single-point type measured thin film device.
Fig. 2 is known filter image-type measured thin film device.
Fig. 3 is known multi-channel type measured thin film device.
Fig. 4 is the structural representation according to the high-density multi-channel testing device shown in the embodiment of the invention.
Fig. 5 is the structural representation of the high-density multi-channel spectrum picture device of present embodiment, in order to the description operation mode.
Fig. 6 is the visual field synoptic diagram of high-density multi-channel spectrum picture device on sample.
Fig. 7 is the planimetric map of two-dimensional array sensor and the measurement result synoptic diagram of each point position.
Fig. 8 is the structural representation according to nucleus module in the high-density multi-channel testing device shown in another embodiment of the present invention.
Fig. 9 is the structural representation according to the high-density multi-channel testing device shown in another embodiment of the present invention.
Figure 10 A is the distribution schematic diagram that the one-dimensional discrete multichannel optical fiber of the high-density multi-channel testing device of Fig. 9 is popped one's head in.
Figure 10 B is the distribution schematic diagram that the two-dimensional discrete multichannel optical fiber of the high-density multi-channel testing device of Fig. 9 is popped one's head in.
Figure 11 is the variation illustration intention of the high-density multi-channel testing device of Fig. 4.
Figure 12 is the variation illustration intention of the high-density multi-channel testing device of Fig. 9.
The main element description of symbols
2 films, 3 microscope carriers
5 light sources, 8 focus gratings
16 one dimension light emitting diode matrix sensors
20 filters, 23 samples
24 filter rotating disks, 25 two-dimensional CCDs
34,36 lens, 35 slits
37 gratings, 38 sensors
100 substrates, 102 samples
103,103 ' sample
The 103a sample visual field
200 high-density multi-channel testing devices
202 light sources, 204 collimation lenses
206 spectroscopes
210 high-density multi-channel spectrum picture devices
212 light collectors
214 hyperchannel nucleus modules
140 optical axises
150 from Axial Bundle
Go up light beam for 160
220 optical slits
222 collimating mirror groups
224 diffraction gratings
226 focus lamp groups
228 two-dimensional array sensor
230, the fibre bundle of stamen more than 240
230a, 230b, 230c fibre bundle
232 3 trouble fibre bundles
234 fibre-optical probes
236 collimating mirrors
238 pairs of trouble fibre bundles
242,244 fibre-optical probes
Embodiment
Fig. 4 is the structural representation according to the high-density multi-channel testing device shown in the embodiment of the invention.The structure of high-density multi-channel testing device 200 of the present invention comprises light source 202, collimation lens 204, spectroscope 206, high-density multi-channel spectrum picture device 210 at least, and wherein high-density multi-channel spectrum picture device 210 can also comprise light collector 212 and hyperchannel nucleus module (kernel module) 214.Light source is preferably and uses that each wavelength components is the wideband white light source of smoother distribution in the spectrum, for example can use Halogen lamp LED.
The light beam that light source 202 penetrates can be modified to linear approximate directional light earlier through collimation lens 204, reenters and is mapped to spectroscope 206.To the determinand film (sample) 102 on substrate 100, this determinand sample 103 to be measured can be the single or multiple lift film on glass substrate or silicon substrate to spectroscope 206 with beam reflection.From the interference light of sample reflection, collect by high-density multi-channel spectrum picture device 210 more at last, to analyze the membranous characteristic of determinand film 102.
Fig. 5 is the structural representation of the high-density multi-channel spectrum picture device 210 of present embodiment, in order to the description operation mode.High-density multi-channel spectrum picture device 210 comprises light collector 212 and hyperchannel nucleus module 214.In this embodiment, light collector 212 is by picture square telecentric mirror (image-side telecentric lens) 22, and perhaps general condenser lens constitutes.Hyperchannel nucleus module 214 is by optical slits 220, collimating mirror group (collimator lens) 222, diffraction grating (diffraction grating) 224, focus lamp group (chromatic lens) 226 and 228 formations of two-dimensional array sensor (array sensor).Collimating mirror group 222 can be aspheric surface or sphere collimating mirror group, and diffraction grating 224 can use penetration diffraction grating or reflective diffraction grating, and focus lamp group 226 can be used general focus lens group or achromatism focus lamp group.As shown in Figure 5, the linear visual field 103a on the object space (sample) 103 is gone up the chief ray that each point sends light as square telecentric mirror 212, all become parallel optical axis 140 after, reenter the optical slits of penetrating in the hyperchannel nucleus module 214 220.Light beam by optical slits 220 reenters and is mapped to collimating mirror group 222, accomplishes nearly collimated light.Then, the light beam of this collimated light reenters and is mapped to diffraction grating 224, arrives sensor 228 through focus lens group 226 more afterwards.
Because utilize as square telecentric mirror 212 chief ray that the last each point of object space (sample) 103 visual field 103a sends light all become parallel optical axis 140, and incident beam is accomplished nearly collimated light with collimating mirror group 222, just be collimated light so incide the light beam of grating 224, satisfy the operating conditions of grating.Therefore, can solve the known configurations shown in the image pattern 3, solve the problem that grating is not a parallel beam that incides.In addition, the present invention can also utilize achromat 226 and the combination that sensor 228 rotates, and adjusts the obliquity of aberration face, can also eliminate the aberration of each wave band.Pass through said structure, no matter axle is gone up (on-axis) 160 or from axle (off-axis) 150 light that sent in the linear visual field 103a of object space, very little aberration is all arranged on sensor 228,, reach the purpose of high-density multi-channel so spectral resolution can greatly improve.
Fig. 6 is at the visual field of sample end synoptic diagram.The visual field of high-density multi-channel spectrum picture device 210 on sample 103 ends is linear.That is the present invention is as measuring picture when detecting sample with the linear areas (lining up an array by a plurality of measurement points) on the sample 103.Fig. 7 is the planimetric map of two-dimensional array sensor 228 and the measurement result synoptic diagram of each point position.
Then, utilize Fig. 6 and Fig. 7 that the measuring operation of multi-channel spectral of the present invention is described.The planimetric map of two-dimensional array sensor 228 is represented on the left side of Fig. 7, and wherein the y direction of principal axis is represented each measurement point on the linear visual field, and the representative of x direction of principal axis is in the spectral analysis of each wavelength.With 3 a, c, a ' shown in the linear visual field of Fig. 6 is example, on some specific wavelength λ (x axle) on the two-dimensional array sensor 228, the check point of 3 a, c of corresponding diagram 6, the position of a ', can detect these three measurement point a, c, the testing result of a ' when corresponding wavelength λ, they are shown in three groups of spectral curves of right-hand part of Fig. 7.
That is as shown in Figure 7, one of the image that obtains is the spatial channel information in the corresponding linear visual field 12 on two-dimensional array sensor 228, the interference spectrum information of a then corresponding film sample 102.Because high-density multi-channel spectrum picture device 210 shown in Figure 5 utilizes as square telecentric mirror 212, and the rotation of use collimating mirror group 222, focus lamp group 226 and two-dimensional array sensor 228, no matter make the some c on the axle and the some a on axle in the linear visual field 103a of object space, the collected light of a ', all can on sensor shown in Figure 7 228, decompose (only illustrating) herein with triple channel.
Therefore, the present invention can make hyperchannel and high spectral resolution two characteristics exist simultaneously, and the spatial channel number also can reach tens of passages, and interchannel is that (continuous) closely arranges continuously.Then can be distinguished into five equilibriums up to a hundred in spectral range to be measured, the spectral resolution height.Each measured passage film interference spectral information can pass through software algorithm again, and (Librarymodel based) finds the solution as the data base theory module.This data base theory module is to produce according to Electromagnetic theory, distribute and the optical constant gap size by more given parameters of user such as optical constant scope afterwards, given parameter of substitution such as material refractive index, extinction coefficient, thicknesses of layers, incident angle, polarization state etc.. produce the above database of thousands of or tens thousand of pens, this database and do recently with the spectrum of actual measurement like contrast, then obtain recently like its parameter that comprises of theoretical spectral such as refractive index, extinction coefficient and thicknesses of layers then be the value that we measure.Just can simultaneously and obtain in the linear visual field the membranous information of the continuous multichannel film of one dimension accurately.In addition, if again through traveling probe or sample 103, can be combined into two-dimentional membranous information to the membranous information of one dimension in the linear visual field 103a at last.
In addition, above-mentioned is that the structure of above-mentioned Fig. 4 is made an amendment slightly and also can be used for detecting transparent sample with opaque film or substrate as an example.As shown in figure 11, it is the variation example of Fig. 4, and when detecting transparent sample, 210 belows that are arranged on sample 103 ' of aforesaid high-density multi-channel spectrum picture device penetrated the light beam of sample 103 ' with reception.The detection mode of transparent sample is roughly identical with aforementioned opaque sample, is not just stating at this more.In addition, penetrable because sample is a light, so spectroscope can be changed into general catoptron.
Fig. 8 is the structural representation according to nucleus module in the high-density multi-channel testing device shown in another embodiment of the present invention.High-density multi-channel testing device shown in Figure 4 is a kind of successional structure, and tested point is to distribute continuously in the linear visual field.Otherwise Fig. 8 is a kind of structure of discrete type, and tested point is not continuously and can arbitrarily distributes.
The discrepancy of the nucleus module of Fig. 8 and Fig. 5 is the part of light collector, and Fig. 8 is to use the light collector 212 of many stamens fibre bundle as Fig. 4.Many stamens fibre bundle 230 of Fig. 8 illustrates three fibre bundle 230a, 230b, 230c embodiment as an illustration, but actual number is done suitably increase and decrease can be according to actual measurement the time.Each fibre bundle 230a, 230b, 230c are placed near tested point, to receive the light beam that reflects or penetrate from this tested point.The light beam that fibre bundle 230a, 230b, 230c receive passes through optical slits 220, collimating mirror group 222, diffraction grating 224, focus lamp group 226 again, arrives two-dimensional array sensor 228 at last.Each the passage chief ray that receives from each fibre bundle 230a, 230b, 230c is with parallel optical axis 140 incident hyperchannel nucleus modules 214, so hyperchannel nucleus module 214 can make axle go up and from axle light very little aberration be arranged on sensor 228, and hyperchannel and high spectral resolution two characteristics are existed simultaneously.
Fig. 9 is the structural representation according to the high-density multi-channel testing device shown in another embodiment of the present invention.As shown in Figure 9, light source 202 can use for example Halogen lamp LED etc., this wideband white light source is divided into three passages by three trouble fibre bundle (trifurcated fiber bundle) 232 with light earlier, and (this sentences three passages is example, but unrestricted the scope of the present invention), by two trouble fibre bundles (bifurcated fiber bundle) 238 with photoconduction to collimating mirror 236, parallel being incident on the determinand 103.This determinand 103 can be the single or multiple lift film on glass substrate or silicon substrate.Two trouble fibre bundles 238 constitute fibre-optical probe 234 with collimating mirror 236.Fibre-optical probe 234 has input end (being positioned at two trouble fibre bundles 238) respectively, end (being positioned at collimating mirror 236) and output terminal (being positioned at two trouble fibre bundles 238) are gone in output, be equipped with input end and be connected respectively to each bifurcation fiber bundle of fibre bundle 232 in order to receive each light beam, output is gone into end and is set on should a plurality of tested points of sample, the spectrum that each light beam irradiates is reflected from each tested point to each tested point and reception.Shown in Figure 10 A, fibre-optical probe 234 can be arranged in one-dimensional discrete (discrete) hyperchannel form and arrange, and is responsible for emission light beam and receiving beam simultaneously.
Light beam is divided into three road light beams through three trouble fibre bundles 232 after penetrating from light source 202, and each road light beam passes to collimating mirror 236 through two trouble fibre bundles 238 of fibre-optical probe 234 again, by collimating mirror 236 light beam is mapped on the tested point of sample 102.Then, incide also fibre-optical probe 234 receptions thus of light reflecting thin film of tested point.Through collimating mirror 236, two trouble fibre bundle 238, folded light beam is incided many stamens fibre bundle 230, the hyperchannel signal is coupled on the nucleus module 214.Because each passage chief ray is with parallel optical axis 140 incident hyperchannel nucleus modules 214,, and hyperchannel and high spectral resolution two characteristics are existed simultaneously so hyperchannel nucleus module 214 can make axle upward and from axle light very little aberration be arranged on sensor 228.Each measured passage film interference spectral information is found the solution by software algorithm such as data base theory module, just available one-dimensional discrete hyperchannel form, simultaneously and obtain the membranous information of film accurately.
In addition, if moving fiber probe 234 or sample 102 again can be combined into the membranous information of two-dimensional discrete as the membranous information of the one dimension of Figure 10 A at last.In addition, also can be on film sample 103 to be measured with fibre-optical probe 234 array distribution, it is (this sentences nine passages is example, but right and wrong are in order to limit practical range of the present invention) shown in Figure 10 B.In this way, do not scan under the situation of (moving), can once record two-dimensional discrete hyperchannel thin-film information on the sample 103 at fibre-optical probe 234 and determinand 103.
At opaque sample, reflective structure shown in Figure 9 also can make the penetration structure in addition, to carry out the online detection of film penetration.Figure 12 is the synoptic diagram of penetration structure.Because be the penetration structure, the light beam that therefore incides sample 102 can not arrive hyperchannel nucleus module 214 along the path of Fig. 9.The fibre-optical probe 242 of Fig. 9 is made of fibre bundle 238 and collimating mirror 236.This fibre bundle 238 is unidirectional.Each fibre bundle of many stamens fibre bundle 240 of hyperchannel nucleus module 214 also possesses fibre-optical probe 244, is arranged on sample 102 belows and relative with fibre-optical probe 242, passes the light beam of sample 102 in order to reception.By the penetration structure of this variation, just can measure operation to transparent sample.
In addition, if sample itself has the characteristics of luminescence, the light that then can directly receive sample and sent, and do not need the light source that provides extra, the light source omission that this moment can be above-mentioned.
The multi-channel high-density method of said structure does not limit and can only be applied in film and detect.Other is any the detection technique that uses spectrometer, all can use the disclosed sharp method of the present invention, expands to the multi-channel measurement function from the measurement of script single channel.Directly use as flat-panel monitor (flat-panel display, FPD) colourity of panel (chromaticity) and the colourity (chromaticity) of briliancy (Luminance) measurement, the naked crystalline substance of semiconductor wafer light emitting diode (LED) (die) and photoluminescence (photoluminescence, PL) detection of light intensity (luminous intensity) measurement, semiconductor wafer such as silica-based formula (Si-based) or III-V family type (group III-V based) epitaxial layer (epi-layer).
In addition, be designed to may be used on the spectral detection of biomedical pharmacy (pharmaceutics) or textile (textile) as if detection wave band as near infrared (NIR) wave band with two-dimensional array sensor.If in conjunction with OCT (optical coherence tomography) technology, may be used on the skin inner layer three-dimensional shape measurement.If in conjunction with polarization light technology, may be used in ellipse (spectroscopyellipsometry) parameter measurement partially of spectrum of birefringence (bifrigence) Characteristics Detection, film sample of FPD Polarizer.Any many stamens fibre bundle or picture square telecentric mirror of using is the multi-channel spectral detection technique of gatherer, all in the protection domain of this patent.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; any person of ordinary skill in the field; without departing from the spirit and scope of the invention; when can doing a little change and improvement, so the present invention's protection domain is as the criterion when looking the claim person of defining.
Claims (26)
1. high-density multi-channel testing device in order to detect sample, is characterized in that this high-density multi-channel testing device comprises at least:
Light source is in order to outgoing beam;
Collimation lens set is arranged on before this light source and on the light path of this light beam, this light beam is modified to directional light, and shines this sample; And
High-density multi-channel spectrum picture device, be arranged on reception from the position of this sample beam reflected, this sample is detected, wherein this high-density multi-channel image device has light collector and receives hyperchannel nucleus module from the light beam of this light collector, and utilize this light collector, making the light beam that incides this hyperchannel nucleus module is the optical axis that is parallel to this hyperchannel nucleus module.
2. high-density multi-channel testing device according to claim 1 is characterized in that this high-density multi-channel image device visual field on this sample is the linear visual field of one dimension.
3. high-density multi-channel testing device according to claim 1 is characterized in that this light source is a wideband white light source.
4. high-density multi-channel testing device according to claim 1 is characterized in that also comprising spectroscope,, and makes from this sample beam reflected and penetrates this spectroscope to this sample in order to beam reflection that this collimation lens is penetrated.
5. high-density multi-channel testing device according to claim 1 is characterized in that this hyperchannel nucleus module also comprises optical slits, collimating mirror group, diffraction grating, focus lamp group, two-dimensional array sensor, is arranged on the light path of light beam respectively in regular turn.
6. high-density multi-channel testing device according to claim 5, it is characterized in that this collimating mirror group is non-sphere collimation mirror group or sphere collimating mirror group, this diffraction grating is penetration diffraction grating or reflective diffraction grating, and this focus lens group is general focus lens group or achromatism focus lens group.
7. high-density multi-channel testing device according to claim 5 is characterized in that the rotation of can tilting with respect to the optical axis of this hyperchannel nucleus module of this achromatism focus lamp group and this two-dimensional array sensor.
8. high-density multi-channel testing device according to claim 1 is characterized in that this light collector is picture square telecentric mirror group.
9. high-density multi-channel testing device in order to detect sample, is characterized in that this high-density multi-channel testing device comprises at least:
Light source is in order to outgoing beam;
Collimation lens set is arranged on before this light source and on the light path of this light beam, this light beam is modified to directional light, and shines this sample; And
High-density multi-channel spectrum picture device, be arranged on the position that receives the light beam that penetrates this sample, this sample is detected, wherein this high-density multi-channel image device has light collector and receives hyperchannel nucleus module from the light beam of this light collector, and utilize this light collector, making the light beam that incides this hyperchannel nucleus module is the optical axis that is parallel to this hyperchannel nucleus module.
10. high-density multi-channel testing device according to claim 9 is characterized in that this high-density multi-channel image device visual field on this sample is the linear visual field of one dimension.
11. high-density multi-channel testing device according to claim 9 is characterized in that this light source is a wideband white light source.
12. high-density multi-channel testing device according to claim 9 is characterized in that also comprising catoptron, in order to beam reflection that this collimation lens is penetrated to this sample.
13. high-density multi-channel testing device according to claim 9 is characterized in that this hyperchannel nucleus module also comprises optical slits, collimating mirror group, diffraction grating, focus lamp group, two-dimensional array sensor, is arranged on the light path of light beam respectively in regular turn.
14. high-density multi-channel testing device according to claim 13, it is characterized in that this collimating mirror group is non-sphere collimation mirror group or sphere collimating mirror group, this diffraction grating is penetration diffraction grating or reflective diffraction grating, and this focus lens group is general focus lens group or achromatism focus lens group.
15. high-density multi-channel testing device according to claim 13 is characterized in that the rotation of can tilting with respect to the optical axis of this hyperchannel nucleus module of this achromatism focus lamp group and this two-dimensional array sensor.
16. high-density multi-channel testing device according to claim 9 is characterized in that this light collector is picture square telecentric mirror group.
17. a high-density multi-channel testing device in order to detect sample, is characterized in that this high-density multi-channel testing device comprises at least:
Light source is in order to outgoing beam;
First fibre bundle has a plurality of bifurcation fiber bundles, in order to this light beam is divided into a plurality of light beams;
A plurality of fibre-optical probes, have input end respectively, export end and output terminal, respectively this input end is connected respectively to each bifurcation fiber bundle of this first fibre bundle in order to receive respectively this light beam, this is exported end and is set on the position to a plurality of tested points that should sample, with this light beam irradiates respectively to this tested point respectively and receive the spectrum that reflects from this tested point respectively; And
High-density multi-channel spectrum picture device, has second fibre bundle and reception hyperchannel nucleus module from the light beam of this second fibre bundle, this second fibre bundle has a plurality of bifurcation fiber bundles, be connected with respectively this output terminal of above-mentioned these fibre-optical probes respectively, to receive respectively this light beam that reflects from this tested point respectively, and by this second fibre bundle, making the light beam that incides this hyperchannel nucleus module is the optical axis that is parallel to this hyperchannel nucleus module.
18. high-density multi-channel testing device according to claim 17 is characterized in that this light source is a wideband white light source.
19. high-density multi-channel testing device according to claim 17 is characterized in that this hyperchannel nucleus module also comprises optical slits, collimating mirror group, diffraction grating, focus lamp group, two-dimensional array sensor, is arranged on the light path of light beam respectively in regular turn.
20. high-density multi-channel testing device according to claim 19, it is characterized in that this collimating mirror group is non-sphere collimation mirror group or sphere collimating mirror group, this diffraction grating is penetration diffraction grating or reflective diffraction grating, and this focus lens group is general focus lens group or achromatism focus lens group.
21. high-density multi-channel testing device according to claim 19 is characterized in that the rotation of can tilting with respect to the optical axis of this hyperchannel nucleus module of this achromatism focus lamp group and this two-dimensional array sensor.
22. a high-density multi-channel testing device in order to detect sample, is characterized in that this high-density multi-channel testing device comprises at least:
Light source is in order to outgoing beam;
First fibre bundle has a plurality of bifurcation fiber bundles, in order to this light beam is divided into a plurality of light beams;
A plurality of first fibre-optical probes, have input end and output terminal respectively, respectively this input end each bifurcation fiber bundle of being connected respectively to this first fibre bundle is in order to receiving respectively this light beam, and this output terminal is set on should a plurality of tested points of sample, and respectively this light beam irradiates is to this tested point respectively;
A plurality of second fibre-optical probes have input end and output terminal respectively, and respectively this input end is set to respectively on the position to above-mentioned these tested points that should sample, penetrates the respectively spectrum of this tested point in order to reception; And
High-density multi-channel spectrum picture device, has second fibre bundle and reception hyperchannel nucleus module from the light beam of this second fibre bundle, this second fibre bundle has a plurality of bifurcation fiber bundles, be connected with respectively this output terminal of above-mentioned these second fibre-optical probes respectively, to receive respectively this light beam that penetrates from this tested point respectively, and by this second fibre bundle, making the light beam that incides this hyperchannel nucleus module is the optical axis that is parallel to this hyperchannel nucleus module.
23. high-density multi-channel testing device according to claim 22 is characterized in that this light source is a wideband white light source.
24. high-density multi-channel testing device according to claim 22 is characterized in that this hyperchannel nucleus module also comprises optical slits, collimating mirror group, diffraction grating, focus lamp group, two-dimensional array sensor, is arranged on the light path of light beam respectively in regular turn.
25. high-density multi-channel testing device according to claim 24, it is characterized in that this collimating mirror group is non-sphere collimation mirror group or sphere collimating mirror group, this diffraction grating is penetration diffraction grating or reflective diffraction grating, and this focus lens group is general focus lens group or achromatism focus lens group.
26. high-density multi-channel testing device according to claim 24 is characterized in that the rotation of can tilting with respect to the optical axis of this hyperchannel nucleus module of this achromatism focus lamp group and this two-dimensional array sensor.
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