CN101016191A - Heat treatment apparatus - Google Patents
Heat treatment apparatus Download PDFInfo
- Publication number
- CN101016191A CN101016191A CNA2006101106598A CN200610110659A CN101016191A CN 101016191 A CN101016191 A CN 101016191A CN A2006101106598 A CNA2006101106598 A CN A2006101106598A CN 200610110659 A CN200610110659 A CN 200610110659A CN 101016191 A CN101016191 A CN 101016191A
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- mentioned
- conveyance
- treated
- vibration
- inner member
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D11/00—Process control or regulation for heat treatments
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/40—Arrangements of controlling or monitoring devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Tunnel Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Control Of Conveyors (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Abstract
The invention provides a heat treatment device, which is to perform heat treatment in a setter-less system while actualizing inexpensive, early and accurate detection of the occurrence of cracking in a treated object in a furnace. Part of each of a plurality of heat resistant glasses 32 arranged under a carrying roller 2 along a carrying passage is exposed as an exposed part 5 to the outside of the furnace, and a vibration sensor 4 is arranged on the exposed part 5. In accordance with a detection signal from the vibration sensor 4, the fall of part of a carried object on the heat resistant glass 32 due to the occurrence of cracking is detected. At this time, the rotation of the carrying roller 2 is stopped.
Description
Technical field
The present invention relates to a kind of thermal treatment unit, electricity slurry is shown with tabular fragility object being treateds such as glass substrates, in the conveyance path of hollow, carry out heat treated, withdraw from a secret society or underworld gang and handle and thermal treatments such as cooling process.
Background technology
As the electricity slurry is shown the mode of heat-treating with tabular fragility object being treateds such as glass substrates, mounting (setter) mode is by generally being had now.In the thermal treatment of mounting mode, the object being treated mounting is used on the slab microscope carrier in the high strength heat resistant that is called mounting glass (setter glass), by the rotation of a plurality of conveyance rollers, with conveyance in its conveyance path in stove (reference, for example patent documentation 1).
For example, when object being treated is the glass substrate thermal treatment of width 1460mm, length 1030mm, thickness 2.8mm, generally use the mounting glass of width 1600mm, length 1200mm, thickness 5mm.
The mounting mode must heat and cooling heat volume ratio object being treated is also wanted big mounting glass, so consumed energy is big, and heating and cooling time are also elongated.
Therefore, existing requirement for the response saving energy and miniaturization, motion has the thermal treatment of the no mounting mode of not using mounting glass.In the thermal treatment of no mounting mode, because directly with the conveyance on the conveyance roller of object being treated mounting, thereby do not need to heat and cool off the mounting glass of big thermal capacity, consumed energy diminishes, and heating and cooled region are dwindled.
(patent documentation 1) Japanese Patent spy opens the 2004-293877 communique
Summary of the invention
The tabular object being treated that glass substrate etc. enbrittle, in thermal treatment sometimes in the stove implosion.In thermal treatment, when object being treated broke, in the thermal treatment of mounting mode, object being treated still rested on the mounting device, but in the thermal treatment of no mounting mode, a part of object being treated can be from falling to the below between a plurality of conveyance rollers.If a part of object being treated that is fallen also bigger to the distance of conveyance face than the internals from the bottom surface, might protrude in the top of conveyance face, and hinder the conveyance of follow-up object being treated between a plurality of conveyance rollers.
Therefore, be necessary to detect ahead of time object being treated breaking in stove, and stop the conveyance of object being treated, remove with a part of object being treated that will fall.But, when desire is carried out optical detection to falling of disruptive part object being treated, because of the lowering position of a part of object being treated of disruptive and size etc. fixing, so be necessary a plurality of transmitters of conveyance path configurations along object being treated, so make the cost rising.In addition, optical pickocff test example such as glass substrate etc. are really also arranged, the situation that the object being treated of tool light transmission falls.
The object of the present invention is to provide a kind of thermal treatment unit that does not have the mounting mode, can do sth. in advance and positively detect the object being treated that in stove, takes place to break with cheap cost.
Thermal treatment unit of the present invention possesses outer wall member is arranged, a plurality of conveyance roller, a plurality of inner member, exposed division, vibration detection means and control device.Outer wall member cover the conveyance object being treated the conveyance path around.A plurality of conveyance rollers are along supporting to the state that can rotate freely respectively in a plurality of positions in conveyance path.A plurality of inner member are configured in the below of a plurality of conveyance rollers along the conveyance path.At least one from a plurality of inner member of exposed division connects outer wall member and exposes the outside.The vibration detection means are disposed at exposed division, and detect among the conveyance of conveyance path from exposed division, and the some of object being treated falls to inner member and the vibration that produces, and detection signal is exported.Control device is according to the rolling of detection signal control conveyance roller, in case the object being treated of the part of the object being treated under the falling stop and follow-up conveyance contacts with each other.
Constitute according to this, be positioned at along the inner member of the below of a plurality of conveyance rollers of conveyance path configurations, it is a part of to connect outer wall member and exposes the outside, and disposes the vibration detection means in this exposed division.Therefore, in stove object being treated break and the part of object being treated fall to the conveyance roller below the time, because of the vibration that produces in inner member with a part of butt of object being treated, the exposed division propagation to stove outside is also detected by the vibration detection means.According to the detection signal of the vibration detection means that detect vibration, the driving of control conveyance roller can prevent that the part of the object being treated that falls and the object being treated of follow-up conveyance from coming in contact.
In addition, possess heating region, annealing region and cooled region at least, among a plurality of inner member, can have exposed division on the inner member in being disposed at the annealing region at least along the conveyance path.
Constitute according to this, be configured in the vibration that inner member produced of annealing region at least, can detect by the vibration detection means by the exposed division outside stove.Therefore, can in the crackly annealing region of object being treated, detect the vibration of inner member.
Further, when control device detects vibration in the vibration detection means, among a plurality of conveyance rollers, make in the conveyance path, the conveyance roller that is configured in the scope of vibrative inner member upstream side stops to drive.
According to this formation, contraposition stops conveyance at the object being treated that the part because of the disruptive object being treated falls the upstream side of vibrative inner member, and can prevent the part of the object being treated that falls and its follow-up conveyance and between the object being treated that comes butt takes place, can prevent that the breakage of object being treated from enlarging.
In addition, when the vibration detection means detect vibration, control device is differentiated the size of the object being treated that falls according to detection signal, the upper face side that whether enough exposes the conveyance roller, only, stop driving to the conveyance roller judging the object being treated that falls for can give prominence to big or small above the conveyance face time.
Constitute according to this, only, when being enough to expose the upper face side of conveyance roller, stop driving the conveyance roller determining the part size of the object being treated that falls.Therefore, less in the part of the object being treated that falls, do not influence under the situation of object being treated of its follow-up conveyance, continue the conveyance object being treated.
According to thermal treatment unit of the present invention, can be in stove object being treated break and the part of object being treated fall to the conveyance roller below situation, by starting because of in the butt of the part of object being treated, on inner member, produce the vibration of then propagating, do sth. in advance and positively detect with cheap cost toward the outer exposed division of stove.In addition, according to the detection signal of the vibration detection means that detect vibration, control is to the driving of conveyance roller, can prevent the part of the object being treated that falls and between the object being treated of its follow-up conveyance butt take place.
Description of drawings
Fig. 1 (A), (B) are the side sectional view and the front section views of crucial portion of formation of the thermal treatment unit 10 of expression the invention process form.
Fig. 2 is an example of the thermal treatment content in the expression thermal treatment unit 10.
Fig. 3 is the functional diagram of an example of control part 6 formations in the expression thermal treatment unit 10.
Fig. 4 is the schema of an example of expression CPU61 treatment step.
Fig. 5 represents to detect by vibration transducer 4 example of the experimental result of vibrational state.
Nomenclature
2 conveyance rollers
4 vibration transducers (vibration detection means)
5 exposed divisions
6 control parts (control device)
10 thermal treatment units
11～14 outer wall members
20 object being treateds
31～34 thermal glasses (inner member)
Embodiment
It (B) is in the expression the invention process form that Fig. 1 (A) reaches, the side sectional view of the crucial portion of the formation of thermal treatment unit 10 and front section view.Thermal treatment unit 10 shows the thermal treatment of not having the mounting mode with glass substrate (object being treated 20) as an example to the electricity slurry.Thermal treatment unit 10 possesses outer wall member 11～14 is arranged, conveyance roller 2, thermal glass 31～34, vibration transducer 4, and conveyance motor 24.
Outer wall member 11～14 is made of lagging material, and covers top, the following and left and right side in the conveyance path of conveyance object being treated 20 respectively.Outer wall member 11 side at least within it is equipped with not graphic well heater.Each outer wall member 11～14 is divided into a plurality of zones along the conveyance path shown in the arrow X.
Thermal glass 31～34 as inner member of the present invention, is configured to be covered in the stove inner face side of outer wall member 11～14 respectively.Thermal glass 31～34 prevents to be attached on the object being treated 20 from the dust that outer wall member 11～14 breaks away from.Each thermal glass 31～34 is divided into a plurality of zones along the conveyance path.
Conveyance roller 2 is configured in along in each a plurality of position in conveyance path.Conveyance roller 2, its both ends connect outer wall member 13 and outer wall member 14 and thermal glass 33 and thermal glass 34, and support to the state that can rotate freely by bearing 21,22 outside the stove of left surface side and right flank side.Be fixed with sprocket wheel (sprocket) 23 on the end that expose at the place outside the stove of conveyance roller 2 right flanks.The rotation of conveyance motor 24 is conveyed to sprocket wheel 23 by chain 25.
A plurality of thermal glasses 32, be not that gluing is supported on the outer wall member 12, but except outside the bottom and mid-way of wall member 13,14, support in non-contacting mode, avoiding that other members are propagated vibration, and the vibration damping in the thermal glass 32 (inner member) is suppressed to be inferior limit.But when the decay of vibration does not become problem, but also gluing supports.
In the place, end of each left surface of a plurality of thermal glasses 32, extend and form outside left side wall member 13 and be exposed to exposed division 5 outside the stove.Vibration transducer 4 as the vibration detection means is installed on each exposed division 5.Vibration transducer 4 detects and occurs in after the thermal glass 32, toward the vibration of exposed division 5 propagation, and output detection signal.
Fig. 2 represents an example of thermal treatment content in the thermal treatment unit 10.Thermal treatment unit 10 with object being treated 20 from the end conveyance in conveyance path in the stove to the other end, during this time object being treated 20 is implemented the first equal thermal treatment, the second equal thermal treatment, anneal and cooling process.
The first equal thermal treatment for example is heated to 350 ℃ state with object being treated 20 and kept 20 minutes.The second equal thermal treatment for example is heated to 600 ℃ state with object being treated 20 and kept 30 minutes.Anneal makes object being treated 20 costs 1 hour and is cooled to 400 ℃.Cooling process makes object being treated 20 be cooled to normal temperature in about 50 minutes.
Fig. 3 is the functional diagram of the example that control part 6 constitutes in the expression thermal treatment unit 10., outside CPU (central processing unit) 61, still be connected with A/D converter 64, motor driver 65 etc. and constitute as the control part 6 of control device of the present invention with ROM (read-only storage) 62 and RAM (random access memory) 63.
The outfit quantity of A/D converter 64 equates with vibration transducer 4, and be connected with vibration transducer 4 respectively on a plurality of A/D converter 64.Each A/D converter 64 is converted to the detection signal of vibration transducer 4 numerical data and inputs to CPU61.
CPU61 on one side with reference to the detection signal from A/D converter 64 inputs, exports driving data to motor driver 65 according to the ROM62 program stored on one side.
Be connected with conveyance motor 24 on the motor driver 65.Motor driver 65 drives conveyance motor 24 according to the driving data from CPU61 output.
Fig. 4 is the schema of the processing of expression CPU61.To object being treated 20 thermal treatments the time, CPU61 drives conveyance motor 24 (S1) by motor driver 65.Therefore, object being treated 20 in stove along the conveyance path by conveyance.
In carrying out thermal treatment, CPU61 differentiate a plurality of vibration transducers 4 any whether detect vibration (S2).When any of vibration transducer 4 detected vibration, CPU61 stopped to drive conveyance motor 24 (S3).
Indicate removing dropping begin once more to handle in, and any of a plurality of vibration transducers 4 be not when all detecting vibration, drives conveyance motor 24 and continue the conveyance of object being treateds 20, up to the indication that end treatment is arranged.(S4、S5)
Thermal treatment unit 10 makes object being treated 20 direct mountings in conveyance roller 2 and conveyance in stove under the state that does not use mounting glass.When the object being treated in the conveyance in stove 20 breaks and its some below conveyance roller 2 falls to the time, thermal glass 32 produces vibration because of the butt of the part of object being treated 20, and this vibration is transmitted to exposed division 5.Therefore, can judge at exposed division 5 and be equipped with in thermal glass 32 regions of the vibration transducer 4 that detects vibration, object being treated 20 take place break, its some falls from conveyance roller 2.
When the thing that falls from conveyance roller 2 was bigger, the part of dropping protruded in conveyance face top, and as if paying no attention to of putting, then the object being treated 20 with follow-up conveyance collides.When any of vibration transducer 4 detects vibration, promptly stop conveyance motor 24 and drive, stop object being treated 20 thus and in the conveyance path, move, collide with dropping and breakage takes place so can prevent the object being treated 20 of follow-up conveyance.
In addition, also can be equipped with the demonstration means in CPU61, the position display that the vibration transducer 4 that makes CPU61 will detect vibration is disposed is in the demonstration means.It is easy that operation is removed in position that can correct specific dropping and making.Also can near each vibration transducer 4, set demonstration means such as exhibited light respectively, show by the most approaching demonstration means that detect the vibration transducer 4 of vibration.
Fig. 5 represents to detect by vibration transducer 4 experimental result one example of vibrational state.Can obviously find out in the drawings, be disposed at the output voltage (detection signal) of vibration transducer 4 of the exposed division 5 of thermal glass 32, becoming with the fragmentation that falls to its thermal glass 32 increases greatly.In addition, when this output voltage and external force act on the vibration of thermal treatment unit 10 when whole, thermal treatment unit 10 itself, when fragmentation falls on the thermal glass of adjacency, the voltage that vibration transducer 4 is exported all has very big difference.
Therefore, from the output voltage of vibration transducer 4, can differentiate the fragmentation size of the thermal glass 32 that falls to the exposed division 5 that vibration transducer 4 is installed.
But, though the output voltage difference that causes because of treatment temp difference is little, but output voltage is according to all conditions of the size of the thermal glass 32 of the shape of object being treated 20 and thickness, bottom surface and differences such as holding state, height of fall and change, so should suitably set optimal threshold value.
At the fragmentation that falls from object being treated 20 very hour, fall to fully on the thermal glass 32, can not collide with the object being treated 20 of follow-up conveyance.When the fragmentation that falls from object being treated 20 was bigger, its some projected to the upside of conveyance roller 2, and therefore the object being treated 20 with follow-up conveyance collides.
Therefore, also can be only judging fragment from the output voltage of vibration transducer 4 when bigger, in S5, stop the driving of conveyance motor 24.Can be only the thermal treatment of follow-up object being treated 20 be brought when hindering and interrupt heat treatment operation, when the thermal treatment to follow-up object being treated 20 does not counteract, proceed heat treatment operation breaking of being produced of object being treated 20.
Further, from the output voltage of vibration transducer 4, can correctly detect fragmentation and fall on the thermal glass 32 that possesses the exposed division 5 that vibration transducer 4 is installed.
Therefore, to cutting apart a plurality of zones that the conveyance path forms, provide the rotation of each conveyance roller 2 that it comprised respectively simultaneously by conveyance motor 24, also can in S5 handles, only stop to be disposed at the rotation of conveyance roller 2 in upstream side zone in the zone of the vibration transducer 4 that detects vibration.Because of object being treated 20 is continuing toward the downstream side conveyance from the existing zone of dropping, so in stove among the object being treated in the conveyance 20, can be to can not suitably finishing thermal treatment with the object being treated 20 that dropping takes place to collide.
In addition, in above-mentioned example, be included in the same zone of a plurality of conveyance rollers 2 that drive under the same state, dividing with the zone that each vibration transducer 4 is disposed may not be consistent.The allocation position of conveyance roller 2 and the allocation position of vibration transducer 4 can be different mutually benchmark set.Under this situation, be predetermined the corresponding relation of the allocation position of the allocation position of conveyance roller 2 and vibration transducer 4, when any vibration transducer 4 detects vibration, can determine to answer the conveyance roller 2 of the upstream side that Be Controlled drives according to this corresponding relation.
Herein, the conveyance roller 2 of so-called upstream side, the part that the meaning conveyance might be subjected to object being treated 20 falls the conveyance roller 2 among other object being treated 20 of influence, means that not necessarily 4 of 2 pairs of vibration transducers of conveyance roller are at entity ground upstream side.Therefore, when the part of object being treated 20 falls,, also can stop its rotation to the allocation position entity status of the vibration transducer 4 that detects vibration conveyance roller 2 in the downstream side.
Claims (4)
1. thermal treatment unit is characterized in that possessing and has,
Outer wall member, its cover the conveyance object being treated the conveyance path around;
A plurality of conveyance rollers, it is along supporting to the state that can rotate freely respectively in a plurality of positions in above-mentioned conveyance path;
A plurality of inner member, it is configured in the below of above-mentioned a plurality of conveyance rollers along above-mentioned conveyance path;
Exposed division, its at least one from above-mentioned a plurality of inner member connects above-mentioned outer wall member and exposes the outside;
The vibration detection means, for being disposed at the vibration detection means of above-mentioned exposed division, it detects among above-mentioned conveyance path conveyance, and the some of object being treated falls to above-mentioned inner member and the vibration that produces, and detection signal is exported; And,
Control device, it controls the rolling of above-mentioned conveyance roller according to above-mentioned detection signal, in case the object being treated of the part of the object being treated under the falling stop and follow-up conveyance contacts with each other.
2. thermal treatment unit according to claim 1, wherein,
At least possessing along above-mentioned conveyance path has heating region, annealing region and cooled region;
Above-mentioned exposed division possesses the inner member that is disposed at least in above-mentioned annealing region among above-mentioned a plurality of inner member.
3. thermal treatment unit according to claim 1 and 2, wherein,
Above-mentioned control device, possess the formation that stops to handle is arranged, when above-mentioned vibration detection means detect vibration, among above-mentioned a plurality of conveyance rollers, to being configured in above-mentioned conveyance path, be positioned at produce above-mentioned vibration above-mentioned inner member more the conveyance roller of the scope of upstream side make it stop to drive.
4. thermal treatment unit according to claim 3, wherein,
Above-mentioned control device possesses following formation: carry out juggling when above-mentioned vibration detection means detect vibration, it differentiates any the size of a part of object being treated that falls to above-mentioned a plurality of inner member according to above-mentioned detection signal, whether be enough to expose the upper face side of above-mentioned a plurality of conveyance rollers; Only in above-mentioned judgment processing, judge the size of the part of the object being treated that falls, when being enough to expose the upper face side of above-mentioned a plurality of conveyance rollers, carrying out above-mentioned stopping and handling.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006032884 | 2006-02-09 | ||
| JP2006032884A JP5044125B2 (en) | 2006-02-09 | 2006-02-09 | Heat treatment equipment |
| JP2006-032884 | 2006-02-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101016191A true CN101016191A (en) | 2007-08-15 |
| CN101016191B CN101016191B (en) | 2011-06-08 |
Family
ID=38490663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101106598A Expired - Fee Related CN101016191B (en) | 2006-02-09 | 2006-08-07 | Heat treatment apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5044125B2 (en) |
| KR (1) | KR101394635B1 (en) |
| CN (1) | CN101016191B (en) |
| TW (1) | TWI387717B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439431A (en) * | 2015-12-16 | 2016-03-30 | 重庆嘉威特节能玻璃有限公司 | Full-automatic glass annealing and cooling device |
| CN106007351A (en) * | 2016-05-27 | 2016-10-12 | 昆山国显光电有限公司 | Glass loading device, rapid thermal processing equipment and method for calibrating support pins of rapid thermal processing equipment |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101926520B1 (en) * | 2011-12-29 | 2018-12-11 | 엘지디스플레이 주식회사 | Apparatus for conveying substrate |
| KR102127518B1 (en) * | 2018-03-02 | 2020-06-29 | 주식회사 엘지화학 | Method for diagnosing the abnormality of the plate glass transferring apparatus |
| KR102551053B1 (en) * | 2021-05-12 | 2023-07-05 | 주식회사 한국제이텍트써모시스템 | Heater unit of heat treatment oven |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03284523A (en) * | 1990-03-30 | 1991-12-16 | Taiyo Yuden Co Ltd | Furnace device with fall detecting mechanism of electronic circuit board and elimination method of fallen board |
| JPH06198424A (en) * | 1992-12-02 | 1994-07-19 | Matsushita Electric Ind Co Ltd | Reflow soldering device |
| JP4067671B2 (en) * | 1998-12-25 | 2008-03-26 | 日本電気硝子株式会社 | Heat treatment furnace |
| CN1490585A (en) * | 2002-10-16 | 2004-04-21 | 光洋热系统株式会社 | Continuous heating treating furnaces |
| JP3938554B2 (en) * | 2003-03-26 | 2007-06-27 | 光洋サーモシステム株式会社 | Heat treatment furnace |
-
2006
- 2006-02-09 JP JP2006032884A patent/JP5044125B2/en not_active Expired - Fee Related
- 2006-04-14 TW TW095113361A patent/TWI387717B/en not_active IP Right Cessation
- 2006-07-04 KR KR1020060062650A patent/KR101394635B1/en not_active IP Right Cessation
- 2006-08-07 CN CN2006101106598A patent/CN101016191B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439431A (en) * | 2015-12-16 | 2016-03-30 | 重庆嘉威特节能玻璃有限公司 | Full-automatic glass annealing and cooling device |
| CN106007351A (en) * | 2016-05-27 | 2016-10-12 | 昆山国显光电有限公司 | Glass loading device, rapid thermal processing equipment and method for calibrating support pins of rapid thermal processing equipment |
| CN106007351B (en) * | 2016-05-27 | 2018-09-11 | 昆山国显光电有限公司 | The calibration method of glass loading attachment, fast heat treatment device and its supporting pin |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200730421A (en) | 2007-08-16 |
| JP2007212052A (en) | 2007-08-23 |
| KR20070081071A (en) | 2007-08-14 |
| CN101016191B (en) | 2011-06-08 |
| TWI387717B (en) | 2013-03-01 |
| JP5044125B2 (en) | 2012-10-10 |
| KR101394635B1 (en) | 2014-05-14 |
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