CN100595626C - Systems and methods for measuring color and contrast in specular reflective devices - Google Patents

Abstract

Disclosed herein are systems and methods for measuring color and contrast in specular reflective devices such as interferometric modulators. To make color and contrast determinations, light reflectedfrom a specular reflective device may be measured in-line with illumination of the device. The measurements may include measuring the spectra of light reflected from the device being tested as well asfrom specular bright and dark standards. The spectra may be used to determine a reflectance spectrum and color parameters for the specular reflective device.

Description

Be used for measuring the system and method for the color and the contrast of specular-reflection unit

Technical field

The field of the invention relate to MEMS (micro electro mechanical system) (microelectromechanical system, MEMS).

Background technology

MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, activator appliance and electronic component.Can use deposition, etching and/or other etching remove substrate and/or deposited material layer part or add layer and produced micromechanical component with a micro fabrication that forms electric installation and electromechanical assembly.One type MEMS device is called interferometric modulator.As used herein, term interferometric modulator or interferometric light modulator refer to a kind of use principle of optical interference and optionally absorb and/or catoptrical device.In certain embodiments, interferometric modulator can comprise the pair of conductive plate, and one of them or both may be transparent in whole or in part and/or be had reflectivity, and can carry out relative motion when applying suitable electric signal.In a particular embodiment, a plate can comprise the fixed bed that is deposited on the substrate, and another plate can comprise the metallic film that is separated with fixed bed by air gap.As described in more detail, plate can change the optical interference that is incident on the light on the interferometric modulator with respect to the position of another plate.These devices have the application of wide scope, and in this technology, utilize and/or revise these types of devices characteristic make its feature to be used to improve existing product and to create still undeveloped new product by excavation, will be useful.

Summary of the invention

System of the present invention, method and apparatus respectively have some aspects, and the attribute of its expectation all not only is responsible in wherein any single aspect.Under the situation that does not limit the scope of the invention, existing with its outstanding feature of brief discussion.Consider after this argumentation, and especially be entitled as after the part of " embodiment " how to provide the advantage that is better than other display device with understanding feature of the present invention in reading.

The embodiment that this paper discloses comprises a kind of color of specular-reflection unit or method of contrast measured, incident illumination that provides on described device substantially perpendicular to the reflecting surface of device is provided for it, only measure from described reflecting surface reflection substantially perpendicular to the spectrum of the light of described reflecting surface.

Another embodiment that this paper discloses comprises a kind of color of one or more sample interferometric modulators or method of contrast measured, it comprises the spectrum of measurement from the light of bright standard component reflection, measurement is from the spectrum of the light of described one or more sample interferometric modulator reflections with based on the reflectance spectrum of determining described sample interferometric modulator from the bright standard component and the spectrum of the light of one or more sample interferometric modulator reflections.

Another embodiment that this paper discloses comprises a kind of integrated reflection display element and testing standard wafer, it comprises a plurality of reflection display elements that are suitable for using, bright standard component in display, wherein said reflection display element and bright standard component are provided on the single wafer.

Another embodiment that this paper discloses comprises a kind of wafer, and described wafer comprises: a plurality of first members, and it is used for reflecting the light that is used for display; With second member, it is used for greater than coming reflected light from the first member intensity of light reflected, and wherein said first member and described second member are provided on the single wafer.

Another embodiment that this paper discloses comprises a kind of online illumination and measuring system (in-line lighting andmeasurement system), and described online illumination and measuring system comprise: light source, and it is suitable for the specular-reflection unit that throws light on; Detecting device, it is suitable for detecting the light from described specular-reflection unit reflection; With the bright standard component of direct reflection, it is suitable for the light microscopic face ground from light source is reflexed in the detecting device, is provided for the reflectance spectrum standard of the reflectance spectrum of definite specular-reflection unit by this.

Another embodiment that this paper discloses comprises a kind of online illumination and measuring system, and described online illumination and measuring system comprise: first member, and it is used to the specular-reflection unit that throws light on; Second member, it is used to detect the light from described specular-reflection unit reflection; With the 3rd member, it is used to be provided for determine the reflectance spectrum standard of the reflectance spectrum of specular-reflection unit.

Another embodiment that this paper discloses comprises a kind of online illumination and measuring system, and described online illumination and measuring system comprise: at least one detection fiber element, and it is suitable for receiving input light and being operatively coupled to detecting device at the other end from a termination; With a plurality of lighting fiber elements, it is positioned at described at least one detection fiber component ambient in the periphery, and described lighting fiber element is suitable for luminous and be operatively coupled to light source at the other end from an end.

Another embodiment that this paper discloses comprises a kind of online illumination and measuring system, and described online illumination and measuring system comprise: first member, and it is used for light is sent to detecting device from the position away from detecting device; With second member, it is used for being sent to light described away from the position from light source.

Another embodiment that this paper discloses comprises the method whether a kind of definite interferometric modulator array is suitable for use as display, and it is included in the color parameter of at least some interferometric modulators in definite described interferometric modulator under not driving condition, storer dark state (memory dark state), storer bright state (memorybright state) and the overdrive condition; With based on described determine described array is identified as be suitable for use as display.

Another embodiment that this paper discloses comprises a kind of integrated interferometric modulator and testing standard wafer of making by following technology, described technology comprises a plurality of material deposition steps, defines a plurality of patterning step in the zone that is used for the material removal, with a plurality of material removal steps, wherein use described patterning step to define a plurality of interferometric modulators and also define at least one the reflectivity standards part that is selected from the group that forms by bright standard component and dark standard component individually.

A kind of method of making interferometric modulator array, it is included in substantially and forms a plurality of interferometric modulators on the transparent substrates, with formation reflectivity standards part on substrate, wherein said reflectivity standards part is selected from the group that is made up of bright standard component and dark standard component.

A kind of method of measuring the color of interferometric modulator, it comprises the light of detection from the interferometric modulator reflection, the member that use is used to reflect the light of maximum determine first with reference to reflectivity and from the light and first that detected with reference to the color of determining interferometric modulator the reflectivity.

A kind of interferometric modulator display, it comprises by following steps be identified as a plurality of interferometric modulators that are suitable for using in display, described step is: the light that detects at least some the interferometric modulator reflections from described interferometric modulator, detection is from the light of bright standard component reflection and reflectance spectrum, one or more color parameters and/or the contrast ratio of definite interferometric modulator.

Description of drawings

Fig. 1 is the isometric view of a part of describing an embodiment of interferometric modulator display, and wherein the removable reflection horizon of first interferometric modulator is in slack position, and the removable reflection horizon of second interferometric modulator is in active position.

Fig. 2 is the system block diagram that an embodiment of the electronic installation that 3 * 3 interferometric modulator displays are arranged is incorporated in explanation into.

Fig. 3 is that the removable mirror position of an one exemplary embodiment of interferometric modulator of Fig. 1 is to the figure of applying voltage.

Fig. 4 is the explanation that can be used for driving one group of row and column voltage of interferometric modulator display.

Fig. 5 A and 5B explanation can be used for frame of display data is written to an exemplary sequential chart of the row and column signal in 3 * 3 interferometric modulator displays of Fig. 2.

Fig. 6 A and 6B are the system block diagrams that the embodiment of the visual display unit that comprises a plurality of interferometric modulators is described.

Fig. 7 A is the xsect of the device of Fig. 1.

Fig. 7 B is the xsect of the alternate embodiment of interferometric modulator.

Fig. 7 C is the xsect of another alternate embodiment of interferometric modulator.

Fig. 7 D is the xsect of the another alternate embodiment of interferometric modulator.

Fig. 7 E is the xsect of the extra alternate embodiment of interferometric modulator.

Fig. 8 describes to be used to provide online illumination and detection so that utilize the block scheme of the system of beam splitter test specular-reflection unit.

Fig. 9 describes to be used to provide online illumination and detection so that utilize the block scheme of the system of test optical fiber specular-reflection unit.

Figure 10 A is the cross-sectional view of an embodiment of the optical fiber described among Fig. 9.

Figure 10 B is the cross-sectional view of another embodiment of the optical fiber described among Fig. 9.

Figure 11 is the vertical view with wafer of integrated interferometric modulator array and bright and dark standard component.

Figure 12 A is the xsect of bright reflectivity standards part.

Figure 12 B is the xsect of dark reflectivity standards part.

Figure 13 is a process flow diagram of describing the method for a kind of reflectance spectrum of measuring specular-reflection unit and color parameter.

Figure 14 is a curve map of describing the hysteresis characteristic of interferometric modulator.

Figure 15 is the curve map that is depicted in the reflectance spectrum of interferometric modulator under the various drive schemes.

Figure 16 is a color space chart of describing the color parameter of three look interferometric modulator displays.

Embodiment

Below describe in detail at some specific embodiment of the present invention.Yet the present invention can implement by many different modes.Describe in the content referring to accompanying drawing at this, all same sections are represented with same numeral in the accompanying drawing.As will be understood from the following description, though described embodiment may be implemented in be configured to show motion (for example, video) still fixing (for example, rest image) no matter and literal or any device of the image of picture in.More particularly, expect that described embodiment may be implemented in the multiple electronic installation or related with multiple electronic installation, described multiple electronic installation is (but being not limited to) mobile phone for example, wireless device, personal digital assistant (PDA), portable or portable computer, gps receiver/omniselector, camera, the MP3 player, video camera, game console, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays (for example, mileometer display etc.), Cockpit Control Unit and/or display, the display of camera view (for example, the display of rear view camera in the vehicle), the electronics photograph, electronic bill-board or direction board, projector, building structure, packing and the aesthetic structures display of the image of a jewelry (for example, at).Have in the non-display application that MEMS device with the similar structure of describing herein of device also can be used for electronic switching device for example.

Many display technologies provide diffused light to the beholder inherently.On the contrary, the display based on interferometric modulator provides specular light inherently.Though may need diffuser film is incorporated in this kind display, the spectral quality of interferometric modulator is provided for measuring by the color of given display generation and the unique challenges and the chance of contrast.Therefore, in the various embodiment that this paper discloses, be provided for measuring the color in the specular-reflection unit of interferometric modulator for example and the system and method for contrast.In one embodiment, measure color and contrast by the spectrum of measuring the light that reflects from interferometric modulator minute surface ground.Can use online illumination system to come measure spectrum, described online illumination system provides and is parallel to the catoptrical incident illumination that is detected substantially.In certain embodiments, also measure from the spectrum of the light of the bright and dark standard component reflection of minute surface and with itself and spectrum and compare, so that obtain the reflectance spectrum and the color parameter of interferometric modulator from the light of interferometric modulator reflection.

Explanation comprises the embodiment of an interferometric modulator display of interfere type MEMS display element among Fig. 1.In these devices, pixel is in bright state or dark state.Under bright (" connection " or " unlatching ") state, display element reflexes to the user with the major part of incident visible light.When in dark (" disconnection " or " closing ") state following time, display element reflexes to the user with few incident visible light.Decide according to embodiment, can put upside down the light reflectance properties of " connection " and " disconnection " state.The MEMS pixel can be configured and mainly reflect at selected color place, thereby allows the colour except white and black displays to show.

Fig. 1 is an isometric view of describing two neighbors in a series of pixels of visual displays, and wherein each pixel comprises the MEMS interferometric modulator.In certain embodiments, interferometric modulator display comprises the delegation/column array of these interferometric modulators.Each interferometric modulator comprises a pair of reflection horizon, and it is positioned to have at least one variable-sized resonant optical mode chamber at a distance of variable and controllable distance with formation each other.In one embodiment, can move one of described reflection horizon between the two positions.In primary importance (being called slack position herein), removable reflection horizon is positioned to apart from the relatively large distance in fixed part reflection horizon.In the second place (being called active position herein), removable reflection horizon is positioned to more closely adjacent described partially reflecting layer.Decide position on removable reflection horizon, interferes longways or mutually mutually from the incident light of described two layers reflection with disappearing, thereby be each pixel generation total reflection state or non-reflective state.

Institute's drawing section branch of pel array comprises two adjacent interferometric modulator 12a and 12b among Fig. 1.In the interferometric modulator 12a of left side, illustrate that removable reflection horizon 14a is in the slack position at the Optical stack 16a preset distance place that comprises partially reflecting layer.In the interferometric modulator 12b of right side, illustrate that removable reflection horizon 14b is in the active position that is adjacent to Optical stack 16b.

Generally include some fused layers (fusedlayer) as Optical stack 16a and 16b (being referred to as Optical stack 16) that this paper quoted, described fused layers can comprise the electrode layer of tin indium oxide (ITO) for example, the partially reflecting layer and the transparent dielectric of for example chromium.Therefore, Optical stack 16 be conduction, partially transparent and partial reflection, and can above-mentioned layer one or more depositing on the transparent substrates 20 be made by (for example).In certain embodiments, described layer is patterned to become a plurality of parallel bands, and as hereinafter further describing, can form column electrode in display device. Removable reflection horizon 14a, 14b can form the series of parallel band (vertical with column electrode 16a, 16b) of depositing metal layers (one or more layers), and described layer metal deposition is at post 18 and be deposited on the top of the intervention expendable material between the post 18.When expendable material was removed in etching, removable reflection horizon 14a, 14b passed through the gap of being defined 19 and separate with Optical stack 16a, 16b.For example the material of the highly conductive of aluminium and reflection can be used for reflection horizon 14, and these bands can form the row electrode in display device.

Do not applying under the voltage condition, chamber 19 is retained between removable reflection horizon 14a and the Optical stack 16a, and wherein removable reflection horizon 14a is in the mechanical relaxation state, and is illustrated as pixel 12a among Fig. 1.Yet when potential difference (PD) was applied to selected row and column, the capacitor that is formed on the infall of the column electrode at respective pixel place and row electrode became charged, and electrostatic force is pulled in described electrode together.If voltage is enough high, so removable reflection horizon 14 is out of shape and is forced to against Optical stack 16.Dielectric layer (not shown in this figure) in the Optical stack 16 can prevent the separating distance between short circuit and key- course 14 and 16, and is illustrated as the pixel 12b on right side among Fig. 1.No matter the polarity of the potential difference (PD) that is applied how, show all identical.In this way, may command reflective pixel state is similar to employed row in conventional LCD and other display technique/row in many aspects and activates row/row activation of non-reflective pixel state.

The exemplary processes and the system of interferometric modulator array used in Fig. 2 to 5 explanation in display application.

Fig. 2 is the system block diagram that explanation can be incorporated an embodiment of the electronic installation that each side of the present invention is arranged into.In described one exemplary embodiment, described electronic installation comprises processor 21, and it can be any general purpose single-chip or multicore sheet microprocessor (for example ARM, Pentium , Pentium II

, Pentium III , Pentium IV

, Pentium

Pro, 8051, MIPS

, Power PC

, ALPHA

), or any special microprocessor (for example digital signal processor, microcontroller or programmable gate array).As way conventional in this technology, processor 21 can be configured to carry out one or more software modules.Except executive operating system, described processor can be configured to carry out one or more software applications, comprises web browser, telephony application, e-mail program or any other software application.

In one embodiment, processor 21 also is configured to be communicated with array driver 22.In one embodiment, described array driver 22 comprises row driver circuits 24 and the column driver circuit 26 that signal is provided to display array or panel 30.The xsect of in Fig. 2, showing array illustrated in fig. 1 with line 1-1.For the MEMS interferometric modulator, OK/the row activated protocol can utilize the hysteresis property of these devices illustrated in fig. 3.May need the potential difference (PD) of (for example) 10 volts to impel displaceable layers to be deformed into state of activation from relaxed state.Yet, when voltage when described value reduces, displaceable layers is kept its state when voltage drop is returned below 10 volts.In the one exemplary embodiment of Fig. 3, displaceable layers is just lax fully when voltage drops to below 2 volts.Therefore have about 3 to 7V voltage range in example illustrated in fig. 3, have the window of the voltage that applies in described scope, device all is stable in relaxed state or state of activation in described window.This window is referred to herein as " lag windwo " or " stability window ".For the display array of hysteresis characteristic with Fig. 3, can design row/row activated protocol and make and to be expert at during the gating, gating capable in pixel to be activated be exposed to about 10 volts voltage difference, and pixel to be relaxed is exposed to the voltage difference that lies prostrate near zero.After gating, described pixel is exposed to about 5 volts steady state voltage official post and gets it and keep the gating of being expert at and make in its residing any state.In this example, each pixel experiences the potential difference (PD) in " stability window " of 3-7 volt after being written into.This feature makes pixel design illustrated in fig. 1 activate or lax being pre-stored in all is stable under the state identical apply under the voltage conditions.Because each pixel of interferometric modulator (activating or relaxed state no matter be in) is the capacitor that is formed by fixed reflector and mobile reflection horizon in essence, so can keep this steady state (SS) and almost inactivity consumption under the voltage in lag windwo.In essence, if the voltage that is applied is fixed, there is not electric current to flow in the pixel so.

In the typical case uses, can be by confirming that according to required group activation pixel in first row described group of row electrode produces display frame.Then horizontal pulse is applied to row 1 electrode, thereby activates pixel corresponding to the alignment of being confirmed.Then change described group and confirmed that the row electrode is with corresponding to required group activation pixel in second row.Then pulse is applied to row 2 electrodes, thereby activates suitable pixel in the row 2 according to confirmed row electrode.Row 1 pixel is not influenced by row 2 pulses, and maintains in the state that its 1 impulse duration of being expert at is set.Can be in a continuous manner the row of whole series be repeated this process to produce frame.Usually, repeating this process continuously by the speed with a certain requisite number purpose of per second frame to refresh and/or upgrade described frame with new video data.The row and column electrode that is used to drive pel array also is well-known and can uses in conjunction with the present invention with the agreement of the broad variety that produces display frame.

The Figure 4 and 5 explanation is used for forming a possible activated protocol of display frame on 3 * 3 arrays of Fig. 2.One group of possible row of the hysteresis curve that Fig. 4 explanation can be used for making pixel show Fig. 3 and row voltage level.In Fig. 4 embodiment, activate pixel and relate to suitable row are set at-V _Bias, and will suitably go and be set at+Δ V, its respectively can corresponding to-5 volts with+5 volts.Relax pixels is to be set at+V by will suitably being listed as _Bias, and will suitably go and be set at identical+Δ V, realize thereby on pixel, produce zero volt potential difference (PD).The voltage of being expert at maintains in those row of zero volt, no matter row are in+V _BiasStill-V _Bias, all be stable in the pixel what initial residing state in office.Same as illustrated in fig. 4, will understand, can use the voltage that has with the opposite polarity polarity of above-mentioned voltage, for example, activate pixel and can relate to and being set at+V suitably being listed as _Bias, and will suitably go and be set at-Δ V.In this embodiment, discharging pixel is to be set at-V by will suitably being listed as _Bias, and will suitably go and be set at identical-Δ V, realize thereby on pixel, produce zero volt potential difference (PD).

Fig. 5 B is a sequential chart of showing a series of row and column signals of 3 * 3 arrays be applied to Fig. 2, the row and column signal of described series will produce the display layout that illustrates among Fig. 5 A, and the pixel that wherein is activated is non-reflection.Before the frame that illustrates in to Fig. 5 A write, pixel can be in any state, and in this example all the row all be in 0 volt, and all row all be in+5 volts.Under the voltage condition that these applied, all pixels all are stable in its existing activation or relaxed state.

In the frame of Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) are activated.In order to realize this purpose, during be expert at 1 " line time (line time) ", row 1 and 2 are set at-5 volts, and row 3 are set at+5 volts.Because all pixels all are retained in the stability window of 3-7 volt, so this does not change the state of any pixel.Then use from 0 and be raised to 5 volts and return zero pulse gate capable 1.This has activated (1,1) and (1, the 2) pixel and (1, the 3) pixel that relaxed.Other pixel is all unaffected in the array.In order optionally to set row 2, row 2 are set at-5 volts, and row 1 and 3 are set at+5 volts.The same strobe that is applied to row 2 then will activate pixel (2,2) and relax pixels (2,1) and (2,3).Equally, other pixel is all unaffected in the array.Set row 3 similarly by row 2 and 3 being set at-5 volts and row 1 are set at+5 volts.Row 3 strobe sets row 3 pixels are as shown in Fig. 5 A.After frame was write, the row current potential was zero, and the row current potential can maintain+5 or-5 volts, and to follow display be stable in the layout of Fig. 5 A.To understand, same program can be used for the array of tens of or hundreds of row and columns.Also will should be appreciated that, the sequential, sequence and the level that are used to carry out the voltage that row and column activates can extensively change in the General Principle of above being summarized, and example above only is exemplary, and any activation voltage method all can be used with system and method described herein.

Fig. 6 A and 6B are the system block diagrams of the embodiment of explanation display device 40.Display device 40 can be (for example) cellular phone or mobile phone.Yet the same components of display device 40 or its be also various types of display device of illustrative examples such as TV and portable electronic device of version a little.

Display device 40 comprises shell 41, display 30, antenna 43, loudspeaker 45, input media 48 and microphone 46.Shell 41 is formed by any one of the well-known multiple manufacturing process of those skilled in the art usually, and described technology comprises injection-molded and vacuum forming.In addition, shell 41 can be made by any one of multiple material, and described material is including (but not limited to) plastics, metal, glass, rubber and pottery, or its combination.In one embodiment, shell 41 comprises part that can be removed (not shown), and described part that can be removed can have different colours with other or contain the not part that can be removed exchange of isolabeling, picture or symbol.

As described in this article, the display 30 of exemplary display device 40 can be and comprises bistable display (bi-stabledisplay) in any one of interior multiple display.In other embodiments, well-known as the those skilled in the art, display 30 comprises the flat-panel monitor of for example aforesaid plasma, EL, OLED, STN LCD or TFT LCD, or the non-tablet display of CRT or other tube arrangements for example.Yet for the purpose of describing present embodiment, as described in this article, display 30 comprises interferometric modulator display.

The assembly of illustrative exemplary display device 40 embodiment among Fig. 6 B.Illustrated exemplary display device 40 comprises shell 41 and can comprise the partially enclosed at least additional assemblies in described shell 41.For instance, in one embodiment, exemplary display device 40 comprises network interface 27, and described network interface 27 comprises the antenna 43 that is coupled to transceiver 47.Transceiver 47 is connected to processor 21, and processor 21 is connected to regulates hardware 52.Regulate hardware 52 and can be configured to conditioning signal (for example, signal being carried out filtering).Regulate hardware 52 and be connected to loudspeaker 45 and microphone 46.Processor 21 also is connected to input media 48 and driver controller 29.Driver controller 29 is coupled to frame buffer 28 and is coupled to array driver 22, described array driver 22 and then be coupled to display array 30.According to particular exemplary display device 40 designing requirement, power supply 50 is provided to all component with power.

Network interface 27 comprise antenna 43 with transceiver 47 so that exemplary display device 40 can communicate by letter with one or more devices via network.In one embodiment, network interface 27 also can have some processing power to alleviate the requirement to processor 21.Antenna 43 is that any antenna with received signal is transmitted in known being used to of those skilled in the art.In one embodiment, described antenna transmits according to IEEE 802.11 standards (comprise IEEE 802.11 (a) and (b) or (g)) and receives the RF signal.In another embodiment, described antenna transmits according to the BLUETOOTH standard and receives the RF signal.Under the situation of cellular phone, described antenna is used for the known signal of communicating by letter through design to receive CDMA, GSM, AMPS or other in the wireless phone network.Transceiver 47 pre-service make processor 21 can receive described signal and also further described signal are handled from the signal that antenna 43 receives.Transceiver 47 is also handled the signal that receives from processor 21 and is made and can transmit described signal from exemplary display device 40 via antenna 43.

In an alternate embodiment, transceiver 47 can be replaced by receiver.In another alternate embodiment, network interface 27 can be replaced by the image source that can store or produce the view data that is sent to processor 21.For instance, described image source can be digital video disk (DVD) or contains the hard disk drive of view data, or produces the software module of view data.

Processor 21 is controlled whole operations of exemplary display device 40 substantially.Processor 21 for example receives the data from the compressing image data of network interface 27 or image source, and described data processing is become raw image data or is processed into the form that easily is processed into raw image data.The data that processor 21 then will have been handled send to driver controller 29 or send to frame buffer 28 for storage.Raw data typically refers to the information of the picture characteristics of each position in the recognition image.For instance, these picture characteristics can comprise color, saturation degree and gray level.

In one embodiment, processor 21 comprises the operation with control exemplary display device 40 of microcontroller, CPU or logical block.Regulate hardware 52 and comprise amplifier and wave filter usually, being used to transferring signals to loudspeaker 45, and be used for from microphone 46 received signals.Adjusting hardware 52 can be the discrete component in the exemplary display device 40, maybe can be incorporated in processor 21 or other assembly.

Driver controller 29 is directly obtained the raw image data that is produced by processor 21 from processor 21 or from frame buffer 28, and suitably the described raw image data of reformatting arrives array driver 22 for high-speed transfer.Specifically, driver controller 29 is reformatted as the data stream of the form with similar grating with raw image data, makes it have the chronological order that is suitable in display array 30 enterprising line scannings.Then, driver controller 29 sends to array driver 22 with formatted information.Although driver controller 29 (for example lcd controller) conduct independently integrated circuit (IC) is associated with system processor 21 usually, can be implemented in numerous ways these controllers.It can be used as in the hardware embedded processor 21, in software embedded processor 21, or is completely integrated in the hardware with array driver 22.

Usually, array driver 22 receives formatted information and video data is reformatted as one group of parallel waveform from driver controller 29, and described waveform is applied to hundreds of and thousands of sometimes lead-in wires from the x-y picture element matrix of display with per second speed repeatedly.

In one embodiment, driver controller 29, array driver 22 and display array 30 are applicable to the display of any type described herein.For instance, in one embodiment, driver controller 29 is conventional display controller or bistable display controller (for example, interferometric modulator controller).In another embodiment, array driver 22 is conventional driver or bi-stable display driver (for example, interferometric modulator display).In one embodiment, driver controller 29 is integrated with array driver 22.This embodiment is general in the height integrated system of for example cellular phone, wrist-watch and other small-area display.In another embodiment, display array 30 is typical display array or bi-stable display array (display that for example, comprises interferometric modulator array).

Input media 48 allows the user to control the operation of exemplary display device 40.In one embodiment, input media 48 comprises keypad, button, switch, touch sensitive screen, the pressure-sensitive or thermosensitive film of qwerty keyboard for example or telephone keypad.In one embodiment, microphone 46 is the input medias that are used for exemplary display device 40.When using microphone 46 to enter data into described device, the user can provide voice command so that the operation of control exemplary display device 40.

Power supply 50 can comprise well-known multiple energy storing device in this technology.For instance, in one embodiment, power supply 50 is rechargeable batteries of nickel-cadmium battery or lithium ion battery for example.In another embodiment, power supply 50 is regenerative resource, capacitor or solar cell, comprises plastic solar cell and solar cell coating.In another embodiment, power supply 50 is configured to from the wall socket received power.

In certain embodiments, as mentioned described in, control programmability reside in the driver controller, it can be arranged in some positions of electronic display system.In some cases, the control programmability resides in the array driver 22.Be understood by those skilled in the art that above-mentioned optimization may be implemented in the hardware of any number and/or the component software and can various configurations implement.

Details according to the structure of the interferometric modulator operated of principle of above statement can extensively change.For instance, Fig. 7 A-7E illustrates five different embodiment of removable reflection horizon 14 and supporting construction thereof.Fig. 7 A is the xsect of the embodiment of Fig. 1, and wherein strip of metal material 14 is deposited on the vertically extending support member 18.In Fig. 7 B, removable reflection horizon 14 only is attached to support member at the corner place on tethers (tether) 32.In Fig. 7 C, removable reflection horizon 14 is folded down from the deformable layer 34 that can comprise the flexible metal.Described deformable layer 34 is connected to directly or indirectly around the substrate 20 of the periphery of deformable layer 34.These connections are referred to herein as pillar.The embodiment that illustrates among Fig. 7 D has post plugs (support post plug) 42, and deformable layer 34 rests on the described post plugs 42.Shown in Fig. 7 A-7C, removable reflection horizon 14 keeps being suspended in the top, chamber, but deformable layer 34 does not form described pillar by the hole of filling between deformable layer 34 and the Optical stack 16.Exactly, pillar is formed by the smoothing material that is used to form post plugs 42.The embodiment that illustrates among Fig. 7 E is based on the embodiment that shows among Fig. 7 D, but also can be suitable for the embodiment that in Fig. 7 A-7C, illustrates and not shown extra embodiment any one play a role.In the embodiment shown in Fig. 7 E, used the additional layer of metal or other conductive material to form bus structure 44.This allows signal to carry out route along the back side of interferometric modulator, thereby eliminates the possible electrode that must be formed on the substrate 20 of many scripts.

In the embodiment of for example embodiment of those shown in Fig. 7, interferometric modulator serves as the direct viewing device, wherein watches image from the front side of transparent substrates 20, described side with above to be furnished with a side of modulator relative.In these embodiments, the part that reflection horizon 14 is covered interferometric modulator in the described side relative with substrate 20 in reflection horizon with optical mode, it comprises deformable layer 34.This permission is configured and operates shaded areas and can negatively not influence picture quality.This kind covers the bus structure 44 that allow among Fig. 7 E, its provide with the optical property of modulator and the electromechanical property of modulator (for example, addressing and produce owing to described addressing mobile) ability of separating.This separable modulator structure allows to select to be used for the structural design of the dynamo-electric aspect of modulator and optics aspect and material and makes it independently of one another and play a role.In addition, the embodiment shown in Fig. 7 C-7E has the additional benefit that the optical property that is derived from reflection horizon 14 and its engineering properties break away from, and described benefit is carried out by deformable layer 34.This structural design and material that allows to be used for reflection horizon 14 is optimized aspect optical property, and is used for the structural design of deformable layer 34 and material is being optimized aspect the engineering properties of expectation.

Measure color and contrast in the specular-reflection unit

Most of display technologies provide diffused light to the beholder inherently.For instance, in the radioactivity display of for example cathode-ray tube (CRT), radioactivity LCD and plasma display, pixel is transmitted light on a plurality of directions.Similarly, reflectivity LCD scatter incident light on a plurality of directions.On the contrary, the specular-reflection unit (for example, interferometric modulator display) that does not have a diffuser film reflects incident light in the minute surface mode.Therefore, in one embodiment, measure from color and contrast that the light of device reflection carries out specular-reflection unit by measuring with the angle of the angle that equals incident illumination.In one embodiment, the angle of incident illumination is substantially perpendicular to the plane of specular-reflection unit.In this embodiment, incident illumination is parallel substantially with reflected light.This configuration is referred to herein as " online " illumination.

In one embodiment, using the system that shows among Fig. 8 for example to be implemented in linear light shines.In this system, beam splitter 200 is provided, it will reflex on the device of just assessing from the light of light source 210.Described specular-reflection unit (for example, interferometric modulator array) can be positioned on to be surveyed on the bearing (probe mount) 240, surveys bearing 240 and can be coupled to X-Y platform (X-Y stage) 250.Survey bearing 240 and can comprise the assembly that is used to form the electrical connection that arrives specular-reflection unit.For instance, survey the pin that bearing 240 can comprise the loading spring that is connected with contact element on the specular-reflection unit.In one embodiment, specular-reflection unit is the interferometric modulator array on the wafer, and wherein said wafer comprises the electric contact piece that is used for the interferometric modulator on the control wafer.X-Y platform 250 can be used for mobile reflection unit so that a zone of selecting arrangement is used for illumination and measures.Detection module 220 is provided, and it is used for detecting discretely the light from the device reflection.In this way, incident light and the reflected light that detected all with the substrate quadrature.In certain embodiments, described system can additionally comprise micro objective 230, and it is used to assess the only sub-fraction of the whole active surf zone of specular-reflection unit.In certain embodiments, can come focusing microscope object lens 230 by measuring catoptrical intensity by the photodetector in the detection module 220 260.Can be by the maximal value indication optimum focusing of measured catoptrical intensity.Be understood by those skilled in the art that, lens can be placed on from light source to surveying bearing 240 and on surveying bearing 240 each position to the light path of detection module 240, so that only measure from the light of the selection area reflection of specular-reflection unit.

Detection module 220 can comprise one or more detecting devices, for example photodetector or spectroscope 260 and CCD camera 270.Can use one or more beam splitters 280 so that measure simultaneously by an above detecting device.Can select light source 210 so that the spectrum with expectation and the light of strength characteristics to be provided.For instance, may need to make the approximate characteristic that will be used to watch the light source of display usually of light source 210.In one embodiment, use standard D65 light source.In another embodiment, use the continuous spectrum light source, its spectrum with respect to D65 light source standard is known.

In certain embodiments, light source 210 can be coupled to the illumination control apparatus 290 of the device that for example has Ke Le Shi (Koehler) design.The aperture of scalable illumination control apparatus 290 is with the zone of being paid close attention on the specular-reflection unit that only throws light on.

In another embodiment, can shine by using the fiber optic component bundle to be provided at linear light.Fig. 9 describes a kind ofly to be used to use fiber optic component to be provided at the system of linear light photograph.Described system comprises fibre bundle 302, and it is positioned at specular-reflection unit to be measured 304 tops.One or more optical fiber 306 in the bundle 302 can be connected to light source 308.One or more other optical fiber 310 in the bundle 302 can be connected to detection module 312.In the embodiment that Fig. 9 describes, fibre bundle 302 can be positioned to and specular-reflection unit 304 quadratures.In this configuration, the incident light that provides by lighting fiber 306 will be parallel to the light that is received by detection fiber 310 substantially.In one embodiment, the end of fibre bundle 302 is positioned at apart from (for example, between the 3 and 4 μ m) between specular-reflection unit 304 surfaces about 2 and the about 5 μ m.In another embodiment, micro objective (for example, the micro objective among Fig. 8 230) can be positioned between the surface of the end of fibre bundle 302 and specular-reflection unit 304.

In one embodiment, detection module 312 can comprise one or more beam splitters (beam splitter of for example describing among Fig. 8 280), makes to use a plurality of detecting devices.In alternate embodiment, but beam splitter guiding incident and the reflected light and the specular-reflection unit quadrature of the beam splitter 200 among aligned bundle 302 feasible for example Fig. 8.This configuration allows to use simultaneously the additional detections device (for example CCD camera) in the detection module 220 to detect the reflected light that is not received by detection fiber 310.

Figure 10 A describes an embodiment of the xsect of fibre bundle 302.In this embodiment, lighting fiber 306 is along the location, periphery of bundle 302, and detection fiber 310 is positioned at the center of bundle 302.This configuration allows the part to be detected of specular-reflection unit is carried out the homogeneous illumination.In one embodiment, lighting fiber 306 is spaced apart by sept 320 and lighting fiber 306.In one embodiment, sept 320 is providing about 5 μ m gap to about 5mm (for example, about 20 and about 500 μ m between) between detection fiber 310 and the lighting fiber 306.In one embodiment, optical fiber 306 and 310 have about 100 μ m to about 600 μ m (for example, about 300 and about 500 μ m between) diameter.In one embodiment, optical fiber has the diameter of about 400 μ m.In another embodiment, the optical fiber in the fibre bundle 302 for example uses epoxy resin glued together, and does not use sept 320.Among another embodiment that describes in Figure 10 B, two detection fiber 321 are positioned at the center of bundle 302.The single detection fiber of describing among described two detection fiber, 321 comparable Figure 10 A 310 has littler diameter.For instance, in one embodiment, each has the diameter of 200 μ m detection fiber 321.

(for example measure when using above-mentioned online illumination system from specular-reflection unit, interferometric modulator array) Fan She light time, can use lens and the system in aperture or the size that other aperture-lens combination is controlled the zone of illumination and detection in Ke Le Shi device 290 that for example has lens 230.Can and/or control light before reflecting afterwards from specular-reflection unit.In one embodiment, can control the field of illumination of specular-reflection unit by the distance between adjusting optical fiber 302 and the device 304.The size in employed zone can be any suitable size.In one embodiment, when measuring display, throwing light on and detecting enough pixels makes reach average effect on pixel.In one embodiment, measure have about 10 and about 20 pixels between the zone of diameter.In addition, may need to measure the homogeneity that a plurality of zones on the display surface respond with inspection.In one embodiment, only measure the zone that is in the display center place.In other embodiments, be suitable standard, measure many zones at diverse location place according to approval in the display industry.For instance, can measure 5,9 or 13 zoness of different.

Being understood by those skilled in the art that provides from the online illumination of the light of the specular-reflection unit of for example interferometric modulator display reflection and other method of detection.

The standard that color and contrast are measured

In certain embodiments, color and the contrast of using online illumination system for example mentioned above to make in the interferometric modulator display determined to measure.In certain embodiments, making color and contrast before being encapsulated into interferometric modulator array in the display device determines.Therefore, unsatisfactory if color and contrast are determined, can before encapsulation, abandon described array so, reduce by this and abandon defectiveness or the related cost of not satisfied display.Therefore, in one embodiment, carry out the color and the contrast of interferometric modulator display in " wafer " level (that is, after on substrate, making interferometric modulator array as mentioned above) and measure.

In certain embodiments, can help carry out color and contrast measurement by before measuring interferometric modulator array, measuring from the reflection of dark and bright standard component generation.In one embodiment, select dark standard component, it expresses possibility from the minimum strength of the reflection of interferometric modulator generation, and selects bright standard component, and it expresses possibility from the maximum intensity of the reflection of interferometric modulator generation.In one embodiment, before each interferometric modulator array is tested, measure from the reflection of dark standard component and the generation of bright standard component.In another embodiment, measure from the reflection of single dark standard component and the generation of bright standard component and used as the reference of testing a plurality of interferometric modulator arrays.

In one embodiment, on the same wafer of making one or more interferometric modulator arrays, provide dark standard component and bright standard component.Figure 11 describes this embodiment.Among Figure 11, wafer 350 comprises interferometric modulator array 352, bright standard component 354 and dark standard component 356.Before color of carrying out interferometric modulator array 352 and/or contrast measurement, can measure the reflection that takes place from bright standard component 354 and dark standard component 356, and these can be measured as carrying out the comparison that color on the interferometric modulator array 352 and/or contrast are measured.After the measurement, but cut crystal 350 and can be incorporated into interferometric modulator array 352 in the device encapsulation of expectation so that remove bright 354 and dark 356 standard components.

In another embodiment, can provide bright and/or dark standard component a part as measuring system.For instance, in the system that Fig. 8 describes, standard component can be fixed on the X-Y platform 250.Before measuring on each new wafer or between a series of wafer, can locate X-Y platform 250 system that makes and survey described standard component to obtain calibration accurately.In this way, need on each wafer, not make new standard component.

Figure 12 A describes an embodiment of bright standard component 354.This bright standard component 354 comprises the reflecting material 370 that deposits on the transparent substrates 372 substantially.In one embodiment, reflecting material 370 comprises and the material identical materials that is used for the removable mirror of interferometric modulator construction (for example being depicted as element 14 at Fig. 1 and 7A in 7C).For instance, reflecting material 370 can comprise aluminium.In one embodiment, with 352 whiles of manufacturing interferometric modulator, on the same wafer 350 of making interferometric modulator 352, make the bright standard component of describing among Figure 11 and the 12A 354.For instance, can on entire wafer 350, use identical deposition and removal step; Yet the patterning of bright standard component 354 can make that when the removable mirror of deposition, other layer of all in the zone of bright standard component 354 will be removed, make removable mirror material 370 directly be deposited on the substrate 372.The bright standard component of describing among Figure 12 A 354 will be represented from the maximum reflectivity of interferometric modulator 352 generations, because the reflection fully that the removable mirror of its expression from interferometric modulator 352 takes place, any interference that not have reflection owing to the generation of the partially reflecting layer from interferometric modulator 352 to cause.

Figure 12 B describes an embodiment of dark standard component 356.This dark standard component 356 comprises the hierarchy that is deposited on the transparent substrates 372 substantially.Described hierarchy comprises partially reflecting mirror 380, transparent dielectric material 382 and reflecting material 370 substantially.This structure is served as etalon, because will interfere the light that repeatedly reflects from the light of partially reflecting mirror 380 reflections between partially reflecting mirror 380 and reflecting material 370.In one embodiment, partially reflecting mirror 380 comprises and the material identical materials that is used for interferometric modulator construction partial reflection device (for example being depicted as element 16 at Fig. 1 and 7A in 7C).In one embodiment, reflecting material 370 comprises and the material identical materials that is used for the removable mirror of interferometric modulator construction (for example being depicted as element 14 at Fig. 1 and 7A in 7C).In one embodiment, dielectric 382 comprises and the material identical materials that is used as the dielectric layer in the interferometric modulator.In one embodiment, with 352 whiles of manufacturing interferometric modulator, on making interferometric modulator 352 same wafers 350, make the dark standard component of describing among Figure 11 and the 12B 356.For instance, can on entire wafer 350, use identical deposition and removal step; Yet the patterning of dark standard component 356 can make that only partial reflection device 380, dielectric 382 and removable mirror material 370 are retained on the substrate.The dark standard component of describing among Figure 12 B 356 will be represented from the maximum reflectivity of interferometric modulator 352 generations, because structurally being similar to, it is in state of activation (promptly, describe as Fig. 1, when removable mirror layer is forced to against fixed bed) interferometric modulator 352.In other words, the dark standard component of describing among Figure 12 B 356 structurally is similar to the interferometric modulator 352 that does not have air gap (for example, the air gap among Fig. 1 19).

In alternate embodiment, be not to use dark standard component structure 356, but dark reference point can be chosen as zero reflectivity arbitrarily, or be chosen as when light source and be cut off the reflectivity that uses measuring system to measure maybe may use suitable dimmer to stop light source the time.Perhaps, can use dimmer to stop that light enters in the detecting device.

Be understood by those skilled in the art that can be used as and become clear with dark reference spectra so that make the color of interferometric modulator and other reflectivity structure or model that contrast is determined.

The method of testing of monochrome display

In certain embodiments, the interferometric modulator for the treatment of measured color and/or contrast will be monochrome display.This display can comprise the interferometric modulator (for example, Fig. 7 A describe in the 7C type) of a plurality of single types that can exist with one in the two states.Each interferometric modulator will have bright state and dark state, wherein will determine bright state by the interferometric modulator that is in unactivated state, and will determine dark state by the interferometric modulator that is in state of activation.

Figure 13 is a process flow diagram of describing an a kind of embodiment of the method for measuring color in the interferometric modulator display and contrast.Decide on specific embodiment, can in those steps that Figure 13 describes, add step and maybe can remove some steps.In addition, decide to rearrange the order of step by application.At first, at square frame 400 places, provide incident illumination so that lighting criteria part and sample interferometric modulator display.Described illumination can be provided a part as above-mentioned online illuminator.In certain embodiments, only provide described illumination to the part of display or standard component.Proceed to square frame 402, measure from the spectrum of the light of bright standard component reflection.In one embodiment, bright standard component is a structure as indicated above.Can measure described spectrum by spectroscope as the part of above-mentioned online illumination system.Move to square frame 404, measure from the spectrum of the light of dark standard component reflection.In one embodiment, dark standard component is a structure as indicated above.In certain embodiments, obtain dark reference by other method except that using dark standard component (for example, by cut-out or stop light source).

Then, at square frame 406 places, measure the spectrum of the light of the sample interferometric modulator reflection from display.Can bright at being in individually (un-activation) state and the interferometric modulator of dark (activation) state measure the spectrum of incident light.In addition, can under multiple drive scheme, measure bright and dark state.In one embodiment, under four kinds of different driving schemes, measure from the spectrum of the light of sample interferometric modulator reflection.Figure 14 is provided by the hysteresis performance of the interferometric modulator that provides among previous Fig. 3.In a kind of drive scheme, on interferometric modulator, do not apply voltage, make interferometric modulator not be driven.Therefore, interferometric modulator is in and does not drive bright state, as among Figure 14 by the point 450 as illustrated in.In another drive scheme, apply voltage, described voltage is enough high so that no matter how the original state of interferometric modulator can both force interferometric modulator to enter the activation dark state.This dark state of overdriving is by Figure 14 mid point 452 illustrations.In the 3rd drive scheme, apply contact potential series interferometric modulator is placed the dark state in the lag windwo.This storer dark state is by Figure 14 mid point 454 illustrations.In last drive scheme, apply contact potential series interferometric modulator is placed the bright state in the lag windwo.This storer bright state is by Figure 14 mid point 456 illustrations.Being understood by those skilled in the art that, also is possible substituting the reflectivity of measuring from the sample interferometric modulator under the drive scheme.

Return the process flow diagram among Figure 13,, determine the reflectance spectrum of sample interferometric modulator under the drive scheme of each expectation at square frame 408 places.The difference of described reflectance spectrum and catoptrical measured spectrum is, measured spectrum comprises the effect that produces owing to the spectrum from the incident light of light source.For instance, catoptrical measured spectrum expression formula is:

I(λ)＝S(λ)R(λ)

Wherein I (λ) is catoptrical intensity, and S (λ) is the light intensity that the light source of illumination sends, and R (λ) is a reflectance spectrum.Therefore, reflectance spectrum is represented the intrinsic light spectral property of reflecting material, and irrelevant with light source.In one embodiment, based on the reflectance spectrum of relatively coming to determine the sample interferometric modulator at bright and the determined standard reflection spectrum of dark standard component.In one embodiment, bright standard component comprises commercially available high reflectance minute surface reflectance standards part of having determined its reflectance spectrum through calibrating.In one embodiment, this standard component can trace back to NIST basic standard spare.In another embodiment, the reflectance spectrum of the standard component that becomes clear (for example reflectance spectrum of the above-mentioned bright standard component of making simultaneously with interferometric modulator) can be calibrated to commercially available standard component individually, this carries out when being operated in each measurement standard spare or as long as any change does not take place manufacturing process, then carries out once at a plurality of standard components.In one embodiment, dark standard component also comprises commercially available dark standard component, for example antiradar reflectivity direct reflection standard component.Perhaps, the reflectance spectrum of supposing dark standard component is zero.

In one embodiment, process flow diagram as Figure 13 is described, the reflectance spectrum of determining the sample interferometric modulator is included in the reflectance spectrum that square frame 410 places determine the relative reflectance of the sample interferometric modulator of comparing with bright and dark standard component and the result be multiply by the standard component that becomes clear at square frame 412 places.The method supposes that the reflectivity of dark standard component is zero.Describedly determine on mathematics, to can be expressed as:

$R\left(\mathrm{\λ}\right)=\frac{M\left(\mathrm{\γ}\right)-D\left(\mathrm{\λ}\right)}{B\left(\mathrm{\λ}\right)-D\left(\mathrm{\λ}\right)}{R}_B\left(\mathrm{\λ}\right)$

Wherein R (λ) is the reflectance spectrum of sample interferometric modulator, M (λ) is the measured intensity from the light of sample interferometric modulator reflection, D (λ) is the measured intensity from the light of dark standard component reflection, and B (λ) is the measured intensity from the light of bright standard component reflection, and R _B(λ) be the reflectance spectrum of bright standard component.In alternate embodiment, also come the reflectance spectrum of calibration samples based on the reflectivity of dark standard component.In this embodiment, the reflectivity of not supposing dark standard component is zero.

Figure 15 is depicted under above-mentioned four kinds of drive schemes at interferometric modulator and the curve map of definite typical reflectance spectrum.These reflectance spectrums can be used for determining whether the interferometric modulator of being tested is suitable for using or whether existing during manufacture any problem in display.Ideal situation is that bright state has the reflectance spectrum of the big peak value in the visible spectrum with indication, and dark state will be indicated the antiradar reflectivity in the visible spectrum.In addition, two bright state are compared to each other and two dark states are compared to each other information about the sample interferometric modulator can be provided.The bright reflectance spectrum of storer is transformed to shorter wavelength with respect to not driving reflectance spectrum.This result is because apply voltage on interferometric modulator under the storer bright state, thereby impels removable mirror towards the bending of partial reflection device.Ideal situation is, the reflectance spectrum of storer bright state will be not can be with respect to driving condition not and conversion is too many.If described conversion is more remarkable, may have the too flexible indication of removable mirror so, and the bright state of display will not provide consistent color and reflectivity.Similarly, storer dark and overdrive condition will have similar reflectance spectrum ideally.If reflectance spectrum is significantly different, may there be the indication that removable mirror still significantly moves when applying the high voltage of overdrive condition so.This result can represent that removable mirror is crooked easily inadequately, thereby causes inconsistent dark state.To understand, the reflectance spectrum among Figure 15 also can provide the indication about the problem in the manufacture process.

Return Figure 13 once more, in one embodiment,, the reflectance spectrum of sample interferometric modulator randomly can be converted to for example color parameter of CIE standard tristimulus value(s) at square frame 414 places.In one embodiment, use following relation to determine CIE tristimulus value(s) X, Y and Z:

$X=\frac{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{x}\left(\mathrm{\λ}\right)R\left(\mathrm{\λ}\right)\mathrm{d\λ}}{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{y}\left(\mathrm{\λ}\right)\mathrm{d\λ}}$

$Y=\frac{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{y}\left(\mathrm{\λ}\right)R\left(\mathrm{\λ}\right)\mathrm{d\λ}}{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{y}\left(\mathrm{\λ}\right)\mathrm{d\λ}}$

$Z=\frac{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{z}\left(\mathrm{\λ}\right)R\left(\mathrm{\λ}\right)\mathrm{d\λ}}{{\∫}_{380}^{780}S\left(\mathrm{\λ}\right)\stackrel{\‾}{y}\left(\mathrm{\λ}\right)\mathrm{d\λ}}$

Wherein S (λ) is the spectral intensity of light source, and R (λ) is a reflectance spectrum, and x (λ), y (λ) and z (λ) are the CIE color matching functionss.In certain embodiments, tristimulus value(s) is converted to Y, x, y or Y, u ', v ' equivalence value, wherein change as follows:

$x=\frac{x}{x+y+z};$

$y=\frac{y}{x+y+z};$

$z=\frac{z}{x+y+z}=1-x-y;$

$u^{\′}=\frac{4x}{x+15y+3z};$

$v^{\′}=\frac{9y}{x+15y+3z}.$

CIE tristimulus value(s) and color matching functions are well-known in this technology.Can determine color parameter at the sample interferometric modulator of experience each in the above-mentioned drive scheme.For instance, table 1 is enumerated the color parameter of a particular interferometric modulator that obtains at four kinds of drive schemes.

The color parameter of table 1. interferometric modulator

Color parameter	Do not drive bright	Storer is bright	The storer dark	The dark of overdriving
					x	0.44	0.42	0.29	0.29
y	0.38	0.40	0.30	0.30
					z	0.18	0.18	0.42	0.41
u’	0.27	0.27	0.19	0.20
					v’	0.51	0.52	0.45	0.45
Y	0.33	0.44	0.13	0.11

Human beholder is perceived as the Y color parameter brightness of indication color.Therefore, in certain embodiments, the contrast of interferometric modulator display may be defined as the Y color parameter under the storer bright state and the ratio of the Y color parameter under the storer dark state.For instance, the contrast ratio of interferometric modulator with color parameter of table 1 will be 3.5.

The value of color parameter can be used for determining whether the sample interferometric modulator is suitable for using in display.For instance, color parameter value and particular display can be used needed value compares.

The method of testing of multicolor display

In certain embodiments, test polychrome interferometric modulator array.For instance, can come construction color interferometric modulators display, wherein every type of air gap (for example, the air gap among Fig. 1 19) that is characterised in that different sizes by the pixel that contains three kinds of dissimilar interferometric modulators is provided.Therefore the bright state of every type interferometric modulator has reflection the light of different colours.Perhaps, can come construction polychrome interferometric modulator display by applying the interferometric modulator that various voltages are adjusted to intermediateness by making air gap.Therefore, this kind interferometric modulator can have some bright state, and each reflects different colours.

For multicolor display, can be as mentioned at monochrome display describing among described and Figure 13 determine the reflectance spectrum of every kind of various combination of colored bright state.Can determine the dark state of this display by all pixels that are in dark state.In addition, for the multicolor display of forming by the three primary colors bright state, can bright state measure white bright state reflectance spectrum when measuring all colours.Therefore, in an example, for interferometric modulator display, as eight reflectance spectrums of indicated measurement in the table 2 with redness, green and blue subpixels.

The reflectance spectrum that table 2. is measured in the color interferometric modulators display.

Reflectance spectrum	Red sub-pixel	Green sub-pixels	Blue subpixels
				Red	Bright	Dark	Dark
Green	Dark	Bright	Dark
				Blue	Dark	Dark	Bright
Cyan	Dark	Bright	Bright
				Yellow	Bright	Bright	Dark
Pinkish red	Bright	Dark	Bright
				Black	Dark	Dark	Dark
White	Bright	Bright	Bright

In addition, each bright and dark state can be the bright and dark state of storer, does not drive bright state, many degree drive dark state, or its any combination.Therefore, can determine a large amount of possible reflectance spectrum of multicolor display.

Whether satisfactory for the dark state of the specific color interferometric modulators of indication by the non-primary colors (for example, cyan, yellow and magenta) of the combination results of bright state is useful.For instance, if red sub-pixel is dark inadequately, the reflectance spectrum of determining at cyan will be different from desired reflectance spectrum so.

In certain embodiments, can determine above-mentioned color parameter at each measured reflectance spectrum.In the case, may in the color space chart, depict described color parameter.Figure 16 describes wherein to have determined and described this kind color space chart of the color parameter of redness 500, green 502, blueness 506 and white 508 reflectance spectrums.The zone of being described by triangle 510 provides the indication of the colour gamut that display can use.Therefore, this expression can be used for designing the colour gamut characteristic with expectation and the display of white point.In addition, a plurality of color parameters can be used for determining whether the sample interferometric modulator is suitable for using in display.For instance, may need particular display to use and have the colour gamut of appointment.Can use above-described color parameter to determine to determine whether the sample interferometric modulator has reached the colour gamut of appointment.

The contrast ratio of multicolor display can be defined as the ratio of the Y color parameter of white and black state.Perhaps, can determine contrast ratio independently at each color sub-pixel.For instance, the ratio of the Y color parameter of the Y color parameter of red reflex spectrum and black reflection spectrum provides red contrast ratio in the table 2.

Though can use single bright standard component to carry out all measurements in the above-mentioned multicolor display, but in certain embodiments, use a plurality of bright standard components, each bright standard component has maximum reflectivity approaching at the observed peaked wavelength of each color sub-pixel place.

Although with reference to embodiment and case description the present invention, should be appreciated that, can under the situation that does not break away from spirit of the present invention, make many various modifications.Therefore, the present invention is only limited by appended claims.

Claims (63)

1. measure the color of one or more sample interferometric modulators or the method for contrast for one kind, it comprises:

Measurement is from a spectrum of the light that is positioned at the bright standard component reflection of one on the substrate;

Measurement is from a spectrum of the light that is positioned at described one or more sample interferometric modulators reflection on the described substrate equally; With

Based on a reflectance spectrum of determining described sample interferometric modulator from the described bright standard component and the described spectrum of the light of one or more sample interferometric modulator reflections.

2. method according to claim 1, it further comprises the spectrum of measurement from the light of a dark standard component reflection.

3. method according to claim 2, wherein said dark standard component comprises at least one etalon.

4. method according to claim 1 wherein comprises the light from described bright standard component and sample interferometric modulator direct reflection from a light source from the described light of described bright standard component and sample interferometric modulator reflection.

5. method according to claim 4, wherein the light from described bright standard component and the reflection of sample interferometric modulator comprises the light that reflects perpendicular to the reflecting surface of described standard component and sample interferometric modulator substantially.

6. method according to claim 1 is wherein measured from the spectrum of the light of described one or more sample interferometric modulators reflections at described sample interferometric modulator that is in a bright state and the described sample interferometric modulator that is in a dark state.

7. method according to claim 1, wherein at be in one not the described sample interferometric modulator of driving condition, an overdrive condition, a storer dark state and a storer bright state measure from the spectrum of the light of described one or more sample interferometric modulators reflections.

8. method according to claim 1, wherein said sample interferometric modulator comprises one first group of interferometric modulator of the light that is suitable for reflecting one first color and is suitable for reflecting one second group of interferometric modulator of the light of one second color, wherein said first color is different from described second color, wherein measures from the spectrum of the light of described one or more sample interferometric modulator reflections at described first group of interferometric modulator and described second group of interferometric modulator individually.

9. method according to claim 1, wherein said bright standard component comprises a direct reflection standard component.

10. method according to claim 2 determines that wherein a reflectance spectrum of described sample interferometric modulator comprises the relative spectral reflectivity of comparing with described spectral reflectivity bright and dark standard component of determining described sample interferometric modulator.

11. method according to claim 10 determines that wherein a reflectance spectrum of described sample interferometric modulator comprises the described spectral reflectivity that described relative spectral reflectivity be multiply by described bright standard component.

12. method according to claim 1, it further comprises determines color parameter from described reflectance spectrum.

13. method according to claim 12, its further comprise by will be at the described sample interferometric modulator that is in a bright state and a definite color parameter with at the described sample interferometric modulator that is in a dark state and definite color parameter compares to determine the contrast of described sample interferometric modulator.

14. integrated reflection display element and testing standard wafer, it comprises:

Be suitable for a plurality of reflection display elements of in a display, using; With

One bright standard component, wherein said reflection display element and described bright standard component are provided on the same substrate.

15. wafer according to claim 14, wherein said reflection display element is an interferometric modulator.

16. wafer according to claim 14, it further comprises a dark standard component, and wherein said reflection display element, described bright standard component and described dark standard component are provided on the same substrate.

17. wafer according to claim 14, wherein said bright standard component comprises a reflecting material that is deposited on the transparent substrates.

18. wafer according to claim 17, wherein said dark standard component comprises at least one etalon.

19. a wafer, it comprises:

A plurality of first members, it is used for reflecting the light that is used for a display; With

Second member, it is used to reflect the light of configurable intensity that its intensity is essentially the maximum of described first member,

Wherein said first member and described second member are provided on the same substrate.

20. wafer according to claim 19, wherein said first member comprises interferometric modulator.

21. according to claim 19 or 20 described wafers, wherein said second member comprises a bright standard component.

22. online illumination and measuring system, it comprises:

One light source, its specular-reflection unit that is suitable for throwing light on;

One detecting device, it is suitable for detecting the light from described specular-reflection unit reflection;

The one direct reflection standard component that becomes clear, its be suitable for from the light microscopic face of described light source reflex in the described detecting device, be provided for determining a reflectance spectrum standard of a reflectance spectrum of described specular-reflection unit by this; With

The dark standard component of one direct reflection, it comprises an etalon, described etalon is suitable for the light microscopic face ground from described light source is reflexed in the described detecting device, is provided for one second reflectance spectrum standard of the reflectance spectrum of definite described specular-reflection unit by this.

23. system according to claim 22, it further comprises a dimmer, and described dimmer is suitable for stopping that the light from described light source arrives described detecting device.

24. system according to claim 22, wherein said detecting device comprises a spectroscope.

25. online illumination and measuring system, it comprises:

First member, its specular-reflection unit that is used to throw light on;

Second member, it is used to detect the light from described specular-reflection unit reflection;

Bright standard component, it is used to be provided for when described specular-reflection unit has maximum intensity reflection, determines a reflectance spectrum standard of a reflectance spectrum of described specular-reflection unit; With

Dark standard component, it is used to be provided for when described specular-reflection unit has minimum intensity reflection, determines a reflectance spectrum standard of a reflectance spectrum of described specular-reflection unit.

26. system according to claim 25, wherein said first member is a light source.

27. according to claim 25 or 26 described systems, wherein said second member is a detecting device.

28. whether a definite interferometric modulator array is suitable for the method in the display, it comprises:

At a color parameter of not determining at least some interferometric modulators in the described interferometric modulator under driving condition, a storer dark state, a storer bright state and the overdrive condition; With

Be suitable for use as a display based on described definite described array is identified as.

29. method according to claim 28, wherein said array comprises one first group of interferometric modulator of the light that is suitable for reflecting one first color and is suitable for reflecting one second group of interferometric modulator of the light of one second color, wherein said first color is different from described second color, wherein determines color parameter at described first group of interferometric modulator and described second group of interferometric modulator.

30. method according to claim 29, wherein said identification is based on the colour gamut by described color parameter indication.

31. method according to claim 28, wherein said identification is based on a contrast ratio of a ratio of one in the described color parameter that is defined as measuring under two kinds of different conditions.

32. an integrated interferometric modulator and a testing standard wafer of making by following technology, described technology comprises: a plurality of material deposition steps;

Define a plurality of patterning step of material removal area; With

A plurality of material removal steps are wherein used described patterning step to define a plurality of interferometric modulators and are also defined at least one the reflectivity standards part that is selected from the group that is made up of a bright standard component and a dark standard component individually.

33. wafer according to claim 32, wherein said at least one reflectivity standards part comprise a zone of wherein having removed all highly reflective materials except that one or more highly reflective materials of described wafer.

34. wafer according to claim 32, wherein said at least one reflectivity standards part comprises a zone that wherein forms a static criteria tool of described wafer.

35. a method of making interferometric modulator array, it comprises:

Form a plurality of interferometric modulators on the transparent substrates substantially one;

Form a reflectivity standards part on described substrate, wherein said reflectivity standards part is selected from the group that is made up of a bright standard component and a dark standard component.

36. method according to claim 35, wherein material deposition and the removal step by same train forms described reflectivity standards part and interferometric modulator, wherein makes described interferometric modulator stand different patternings with the reflectivity standards part.

37. interferometric modulator array that produces by method according to claim 35.

38. a method of measuring the color of the interferometric modulator on the substrate, it comprises:

Detection is from the light of described interferometric modulator reflection;

Use and to be positioned at the member that being used on the described substrate reflect maximum amount equally and to determine one first with reference to reflectivity; With

The light and first the color from described detection with reference to definite described interferometric modulator the reflectivity.

39. according to the described method of claim 38, it comprises that further a member that is used to reflect minimum amount of light determines one second with reference to reflectivity, and the color of wherein determining described interferometric modulator comprises light and described first and second from described detection with reference to determining described color the reflectivity.

40. according to the described method of claim 38, the step of wherein said definite described color comprises a reflectance spectrum of determining described interferometric modulator.

41. according to the described method of claim 38, the step of wherein said definite described color comprises one or more color parameters of determining described interferometric modulator.

42. being identified as by the method that may further comprise the steps, an equipment that comprises a plurality of interferometric modulators, described a plurality of interferometric modulators is suitable in described equipment, using:

The light of at least some the interferometric modulator reflections of detection from described interferometric modulator, wherein said interferometric modulator is positioned on the substrate;

Detection is from being positioned at the light of the bright standard component reflection of one on the described substrate equally; With

Determine a reflectance spectrum, one or more color parameters and/or a contrast ratio of described interferometric modulator.

43., wherein described interferometric modulator is identified as to be suitable in described equipment using and further comprises the light of detection from a dark standard component reflection according to the described equipment of claim 42.

44. according to the described equipment of claim 43, wherein said dark standard component comprises at least one etalon.

45. according to the described equipment of claim 42, it further comprises:

One processor, itself and described interferometric modulator electric connection, described processor is configured to image data processing;

With

One memory storage, itself and described processor electric connection.

46. according to the described equipment of claim 45, it further comprises a drive circuit, described drive circuit is configured at least one signal is sent to described interferometric modulator.

47. according to the described equipment of claim 46, it further comprises a controller, described controller is configured at least a portion of described view data is sent to described drive circuit.

48. according to the described equipment of claim 45, it further comprises an image source module, described image source module is configured to described image data transmission to described processor.

49. according to the described equipment of claim 48, wherein said image source module comprises at least one in a receiver, transceiver and the transmitter.

50. according to the described equipment of claim 45, it further comprises an input media, described input media is configured to receive the input data and described input data is sent to described processor.

51. measure the color of one or more sample interferometric modulators or the method for contrast for one kind, it comprises:

Measurement is from a spectrum of the light of the dark standard component reflection that comprises at least one etalon;

Measurement is from a spectrum of the light of described one or more sample interferometric modulator reflections; With

Based on a reflectance spectrum of determining described sample interferometric modulator from the described dark standard component and the described spectrum of the light of one or more sample interferometric modulator reflections.

52., wherein measure from the spectrum of the light of described one or more sample interferometric modulators reflections at described sample interferometric modulator that is in a bright state and the described sample interferometric modulator that is in a dark state according to the described method of claim 51.

53. according to the described method of claim 51, wherein at be in one not the described sample interferometric modulator of driving condition, an overdrive condition, a storer dark state and a storer bright state measure from the spectrum of the light of described one or more sample interferometric modulators reflections.

54. according to the described method of claim 51, wherein said sample interferometric modulator comprises one first group of interferometric modulator of the light that is suitable for reflecting one first color and is suitable for reflecting one second group of interferometric modulator of the light of one second color, wherein said first color is different from described second color, wherein measures from the spectrum of the light of described one or more sample interferometric modulator reflections at described first group of interferometric modulator and described second group of interferometric modulator individually.

55. according to the described method of claim 51, it further comprises determines color parameter from described reflectance spectrum.

56. according to the described method of claim 55, its further comprise by will be at the described sample interferometric modulator that is in a bright state and a definite color parameter with at the described sample interferometric modulator that is in a dark state and a definite color parameter compares to determine the contrast of described sample interferometric modulator.

57. being identified as by the method that may further comprise the steps, an equipment that comprises a plurality of interferometric modulators, described a plurality of interferometric modulators is suitable in described equipment, using:

The light of at least some the interferometric modulator reflections of detection from described interferometric modulator;

The light that detection is reflected from a dark standard component that comprises at least one etalon; With

Determine a reflectance spectrum, one or more color parameters and/or a contrast ratio of described interferometric modulator.

58. an equipment, when described device coupled during to computing machine described equipment be used for controlling described machine based on the instruction that is included in described equipment, described equipment comprises:

Be used to control the member that described machine drives the interferometric modulator that is in a storer dark state, a storer bright state and an overdrive condition; With

Being used to control described machine determines during each driving condition to determine by this from the color of the described interferometric modulator reflection that is in various states from the member of the color parameter of the light of described interferometric modulator reflection.

59. an equipment, when described device coupled during to a computing machine described equipment be used for controlling described machine based on the instruction that is included in described equipment, described equipment comprises:

Be used to control the member of described machine measurement from a spectrum of the light of one or more sample interferometric modulators reflections; With

Be used to control described machine based on from the spectrum of the light of described sample interferometric modulator reflection and based on the member of determining a reflectance spectrum of described sample interferometric modulator from the spectrum of the light of a bright standard component reflection, determine the spectrum of the light that reflects from described interferometric modulator by this.

60. according to the described equipment of claim 59, it comprises and is used to control the member that described machine is determined the relative spectral reflectivity of comparing with spectral reflectivity described bright standard component described sample interferometric modulator.

61. according to the described equipment of claim 60, it comprises and is used to control the member that described machine multiply by described relative spectral reflectivity the described spectral reflectivity of described bright standard component.

62. according to the described equipment of claim 59, it comprises and is used for controlling described machine is determined color parameter from described reflectance spectrum member.

63. according to the described equipment of claim 62, it comprise be used to control described machine by will be at the described sample interferometric modulator that is in a bright state and a definite color parameter with at the described sample interferometric modulator that is in a dark state and a definite color parameter compares to determine the member of the contrast of described sample interferometric modulator.

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