CN100578408C - Automatic control system and control method of optical filming - Google Patents
Automatic control system and control method of optical filming Download PDFInfo
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- CN100578408C CN100578408C CN200810140824A CN200810140824A CN100578408C CN 100578408 C CN100578408 C CN 100578408C CN 200810140824 A CN200810140824 A CN 200810140824A CN 200810140824 A CN200810140824 A CN 200810140824A CN 100578408 C CN100578408 C CN 100578408C
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Abstract
The invention relates to an optical coating automatic control system which comprises an industrial control computer, a control unit, a serial port expansion card for connection, a display, a digital temperature controller and a compound vacuum gauge. The optical coating automatic control system comprises a coating operation signal processing and program control function module, OPC control system software, an interlocking function module, a misoperation protection function module, a failure safety processing and alarm function module, coating data information automatic record, a storage function module, a man machine operation interface and an abnormal alarm interface. The control system and the control method of the invention can realize automatic operation during the whole process of optical coating and the automatic monitoring and processing of abnormity happening and failure during the operation process of all equipment, and can carry out real-time display, record and storage to information parameters during the operation process of the coating system, thereby having the advantages of highly system reliability, stable coating quality, high efficiency, convenient operation and reducing production cost, etc.
Description
Technical field
The invention belongs to optical coating monitoring technique field, is a kind of optical coating automation control system and control method thereof.
Background technology
Vacuum coating is the important step in optical device is produced, and particularly in precision optics technical fields such as modern times shooting, projections, the quality of coating quality often determines the main performance and the functions of use thereof of optical device.And in technique known, operation manually and simple instrument and meter monitoring are adopted in optically coated production run and process control usually, and each link can only be controlled by rule of thumb.This production method not only production efficiency is low, labour intensity is big, unstable product quality, and operating personnel are careless slightly, then can cause coating quality poor, workpiece is scrapped in batch, bring the expensive optical material and the waste of coating materials resource, even cause the generation of filming equipment and even personal injury, and, the plated film debugging of coating machine is very complicated, spend a large amount of time of user or commissioning staff.At present, the coating technique that has adopts the control of analog form plated film, but owing to there is not the immediately monitoring processing capacity, stability and accuracy are very poor, are difficult to satisfy high precision and continuous coating requirement.Up to now, automaticity height, easy and simple to handle, coating quality is reliable and stable, production efficiency is high optical coating technology also do not appear.
Summary of the invention
The purpose of this invention is to provide a kind of can the realization from being evacuated down to vapor-deposited film, and fault diagnosis and information analysis handle whole robotizations, and system reliability is strong, plated film control accurately, stable, the production efficiency height, the optical coating automation control system that labour intensity is low.
Another object of the present invention provides a kind of optical coating automation control method of simple and direct-viewing operation.
Realize that the technical scheme that purpose of the present invention is taked is: this optical coating automation control system comprises:
An industrial computer is used for the control of reception, processing and the plated film working procedure of each monitor signal of coating process;
A control module is connected with pumped vacuum systems, workpiece plate rotary system and thermal resistance evaporation source with industrial computer respectively by signal transmssion line, is used for the operation in programming Control pumped vacuum systems, workpiece plate rotary system and thermal resistance evaporation source;
A serial port expanding module is connected with brilliant control instrument, electron gun, temperature controller and compound vacuum gauge with industrial computer respectively by signal transmssion line, and the transmission that is used for plated film Monitoring Data and industrial computer command signal connects;
A display is used for the instant playback of coating process parameter and state and the interface operation of control program;
One group of temperature controller is connected with industrial computer by the serial communication circuit, is used for the heat control that adds of vacuum chamber;
A compound vacuum gauge is connected with industrial computer by serial ports, and programming realizes the collection to the pumped vacuum systems instrumented data, is used for the measurement to vacuum degree in vacuum chamber;
A Control Software System, this system comprises:
Plated film run signal is handled and the programmed control functional module, is used to programme realize the automatic control of coating process;
An OLE for process control (hereinafter to be referred as OPC) control system software is used to control the operation in pumped vacuum systems and workpiece plate rotary system, thermal resistance evaporation source;
An interlock module is used for the safety interlocking after each device of coating process starts;
A fault-operation protection functional module is refused to carry out to operations staff's maloperation automatically, has the function that the coating process working procedure is protected automatically;
A failure safe is handled and the warning function module, is used for each running status of coating process is carried out the safe handling and the sound and light alarm of self diagnosis and operation troubles;
Plated film data message writes down automatically, memory function module, will write down automatically, store the plated film data message;
Also be provided with the picture control interface, comprising:
One vacuumizes the control man-machine interface, is used for the data presentation and the control operation of pumped vacuum systems operational factor;
A temperature control man-machine interface is used for the data presentation and the control operation of well heater operational factor;
Coating process setting and revise man-machine interface is used for the setting and the retouching operation of coating process;
The control man-machine interface of a coating process is used for the data presentation and the control operation of coating process operational factor;
Alarm indication is carried out to all kinds of faults that occur in the operational process in an abnormal alarm interface.
The autocontrol method of coating process of the present invention carries out according to the following steps:
1), beginning: open industrial computer and each monitoring equipment;
2), input technological parameter: with rete, thickness, material, operation process and rete parameter input industrial computer;
3), input fault alarm parameters: with the plated film operation troubles parameter input industrial computer of setting;
4), vacuumize, preheating: by industrial computer operation, bringing into operation vacuumizes and preheating program, until reaching the evaporation conditional request, image data information simultaneously, and carry out interface display;
5), evaporation operation: vacuumize finish with preheating program after, automatically send instruction by industrial computer, the collection of the evaporation process that brings into operation and plated film information, simultaneously the plated film information data is carried out real-time interface display, record and file, the abnormal information that occurs in the plated film operational process is handled automatically, judged,, then carry out safe handling automatically in case break down, and carry out sound and light alarm by display interfaces, alert is got rid of;
6), finish: after coating film thickness reaches the setting controlling value, industrial computer will move shutdown programm automatically, and close all devices successively according to setting program.
Optical coating automation control system of the present invention, utilize advanced electronic automatic control technology in the present age, by the OPC Control Software, adopt serial communication, the Control Software of utilization C language development, constructed coating machine robotization control platform, and adopted the vacuum monitoring, heat tracing, ion sputtering, film thickness monitoring, multinomial advanced person's such as abnormal alarm Monitoring and Controlling technology, make complicated optical coating technology realize whole robotization controls, thereby the operation of whole coating system is guaranteed reliably, production efficiency improves greatly, and coating quality is precise and stable, and the product grade promotes greatly.Simultaneously, the data message of whole plated film operational process is write down storage, can provide reliable foundation for the quality tracing analysis of product and coating process improve.Compared with prior art, this automatic control system has hardware and software aboundresources, man-machine interface close friend, easy and simple to handle, safe and reliable, and travelling speed is fast, can satisfy advantage such as requirements of mass production.
Description of drawings
Fig. 1 is control system figure of the present invention;
Fig. 2 is a control flow chart of the present invention;
Fig. 3 vacuumizes the prepare control procedure chart;
Fig. 4 vacuumizes control program figure;
Fig. 5 is that substrate adds thermal control program figure;
Fig. 6 is evaporation control program figure;
Fig. 7 is the control program figure that shuts down automatically.
Embodiment
Referring to Fig. 1, optical coating automation control system of the present invention is by the OPC technology, adopt serial communication, the Control Software that utilization C language development goes out, the control coating machine from be evacuated down to coating process comprise vacuumize, evaporation, inflation, workpiece plate rotation, crucible transposition and action such as sheet operation and Automatic Control automatically relatively, realize automatically being coated with the control ability of single or multiple lift thickness.This automatic control system comprises hardware system and software systems, the display of the band touch-screen that hardware system has industrial computer, connect with it and the crystalline substance control instrument that connects by serial communication, one group of temperature controller, compound vacuum gauge, electron gun and control module being made up of 4 pid number temperature controllers.Wherein:
The function that industrial computer passes through is to start, add high pressure, line, declare and stop, the demonstration of parameter and state in the coating process by the technology of writing order control coating process; The setting of run parameter, modification and preservation; The automatic record of plated film data message, storage, and save as the EXCEL document; In coating process to from vacuumizing, be preheating to the reception and the processing of each detection means monitor signal of plated film overall process, and according to program the vacuumizing of setting, heat, inflating to vacuum chamber, the switching of crucible, putting in place of workpiece plate rotation and comparison sheet, the operation of devices such as brilliant control instrument, electron gun sends action command in the fritting of coating materials and the evaporate process, controls its operation and start and stop.The Automatic Control mode that the present invention adopts electric executive component of touch screen combination formula industrial computer+PLC+ etc. to be combined into, can realize taking out, being vented to evaporation process and finish whole process and finish automatically, and possess following function:
(1) possesses perfect fault feedback and maloperation interlock protection function and each system autodiagnosis function.
(2) vacuum system take out, exhaust setting able to programme, finish by industrial computer.
(4) process gas pipe valve and air inflow setting able to programme is finished by the automatic control of industrial computer.
(5) resistance wire heating system and the iodine-tungsten lamp heating system setting of can programming respectively, by industrial computer automatically control finish.
(6) control of each pump valve is finished the PLC node control by OPC automatically by industrial computer.
(7) switch of baffle plate is controlled automatically by crystalline substance control instrument.
(8) monitoring relatively, sheet mechanism can be controlled automatically by industrial computer.
(9) all parameters setting able to programme of electron gun is controlled automatically by industrial computer.
(10) the equipment setting able to programme of shutting down is finished automatically by industrial computer.
(11) all fault-signal and guard signals are handled by industrial computer, and automatically perform correct action.
The display of band touch-screen is used for the instant playback of plated film operational process parameter and state and the man-machine interface operation of plated film Whole Process Control.
Control module is made up of PLC and one group of programmable control module, by signal transmssion line respectively with OPC and various valves, various pump, workpiece rotating disk, thermal resistance evaporation source, revision board, ion gun and mass flowmeter be connected from peripherals such as dynamic pressure instrument, and, control the operation of pumped vacuum systems and evaporation peripherals by the instruction that OPC accepted and carried out industrial computer.
System also comprises the optical thickness monitor instrument in the routine techniques, all is connected with industrial computer by serial communication with crystalline substance control instrument.Brilliant control instrument possesses the PLC communication interface, and can connect electron gun is that the process that is coated with realizes control automatically to whole film.And can discern evaporation source automatically, control that crucible transposition, evaporation rate, thicknesses of layers, baffle plate open and close automatically, the charging into etc. of working gas.The optical thickness monitor instrument is then monitored accurately to the evaporation thickness, controls the evaporation halt exactly, guarantees the main performance and the quality grade of coating film thickness and plated film product thus reliably.
In order effectively peripheral instrument or instrument to be connected with the interface of control system, realization is to the process control and the process management of whole filming equipment, adopt serial port expanding module that the serial ports of industrial computer is expanded in the control system, performance industrial control computer travelling speed is fast, hardware and software aboundresources, man-machine interface close friend's characteristics.
Be equipped with in industrial computer software: the plated film run signal is handled and programmed control functional module, OPC control system software, fault handling alarm module, interlock module, fault-operation protection functional module and the plated film data message writes down automatically, memory function module, wherein:
The plated film run signal is handled and the effect of programmed control functional module is the automatic control that programming realizes coating process; The PLC node is finished automatically the control of each pump valve by OPC; The switch of baffle plate is controlled automatically by crystalline substance control instrument instrument; The automatic control of monitoring piece mechanism; The programming setting of all parameters of electron gun and control automatically; And the programming setting and the control of equipment shutdown.
OPC control system software has industry standard interface, be connected with PLC by signal transmssion line, be used for the operation of programming Control pumped vacuum systems and workpiece plate rotary system, thermal resistance evaporation source, mass flowmeter etc., by the data acquisition of PLC programming realization to measuring instrument, by programmed control, carry out reading and writing to the PLC signal.
Failure safe is handled and the effect of warning function module is: various faults in the plated film operational process are monitored, handled and report to the police, make any small unusual all in the monitoring of automatic control system, to guarantee the good operation of coating process.Take place when unusual in system, failure judgement position accurately, and shut down processing by interface alarm operating personnel.Simultaneously; in a single day equipment break down in the plated film operational process; this functional module can be made safe handling rapidly and accurately, gives an order, and turn-offs all valves; close electron gun; withdraw from coating process, and when interrupting the plated film operation, relevant operation information is in time stored; pending fault is got rid of the plated film operation of having been ended the back and can be proceeded, and protects filming equipment safety thus and avoids equipment that major accident takes place in operational process.Take place when unusual in system, the operating personnel of failure judgement position, and warning reminding accurately shut down; in a single day equipment break down in the operational process, can make safe handling rapidly and accurately, gives an order; turn-off all valves, close electron gun, withdraw from coating process.When interrupting the plated film operation, relevant operation information will be stored, and pending fault is got rid of the plated film operation of having been ended the back and can be proceeded.
The interlock module, be used for the safety interlocking after various device, device start, in system's operational process, when some equipment, when link goes wrong, then Xiang Guan equipment will close or stop to start automatically, the generation of equipment and technology interruption of service be can prevent, the disorder of working procedure or the mistake of running program also can be avoided.
The effect of fault-operation protection functional module is can be according to the coating process program file of input, the correctness of identifying operation program, and when operations staff's maloperation occurring, this functional module will be refused to carry out automatically, and coating process is protected automatically.
The plated film data message writes down automatically, memory function module, can write down automatically, store the plated film data message, and save as the EXCEL document, is convenient to the follow-up analysis of coating process and plating quality.
Also be provided with the picture control interface in this automatic control system, make it to possess the instant playback and the man-machine conversation operation of significant data, make the operation of whole plated film operational process and monitor very convenient quick.Comprising:
Vacuumize the control man-machine interface, be used for the demonstration of vacuum Monitoring Data and the automatic control operation of operation;
Temperature control man-machine interface is used for the demonstration of heating process Monitoring Data and the control operation of operation;
Coating process is provided with and revises man-machine interface, is used for the setting and the retouching operation of coating process;
The control man-machine interface of coating process is used for the demonstration of coating process Monitoring Data and the control operation of operation;
The abnormal alarm interface has the abnormal alarm Presentation Function of 23 warning positions, device, and when coating process occurs when unusual, this interface can be ejected automatically, carries out the acoustic image alarm.
Referring to Fig. 2, the major control method of system of the present invention may further comprise the steps:
1, opens industrial computer, open monitoring equipment simultaneously, carry out the preparation of plated film program run;
2,, select parameter input industrial computers such as operation process number and rete with parameters such as rete, thickness, materials;
3, with fault alarm parameter input industrial computer, if alerting signal, but then whether the input point signal of these signals of scrutiny is normal;
4, start: vacuumize with pre-heating system and bring into operation, begin the real-time collection of Monitoring Data information simultaneously, and through the industrial computer processing, show in real time by display, operating personnel can grasp vacuum and state of temperature and variation thereof in the vacuum chamber immediately by indicator screen, to implement effective monitoring;
5, vacuumize: after system's preliminary work is finished, can enter and vacuumize and the substrate heating schedule;
When 6, vacuum tightness in vacuum chamber and temperature reach the conditional request of evaporation,, enter the operation of evaporation process automatically promptly by industrial computer control;
7, in coating process, industrial computer carries out the analyzing and processing of abnormal information to each equipment and working procedure automatically, in case break down, then carries out sound and light alarm by indicator screen, alert is checked processing, utilizes its safety interlocking function to carry out security protection simultaneously and handles;
8, when the thickness on the workpiece substrate reaches designing requirement, control by industrial computer, to in time close baffle plate automatically, stop evaporation, cool off, exit, open door for vacuum chamber automatically, by artificial taking-up workpiece to be plated, if no longer carry out plated film work, click the shutdown button, promptly enter automatic shutdown programm, by industrial computer control, automatically all devices is closed successively.
In whole plated film operational process, the conversion of per unit operation and program, all can by industrial computer automatically control finish, also can be by manually carrying out interface operation by touch-screen, both easy, can in time handle various situations again.
Referring to Fig. 3, the concrete implementation step that vacuum chamber vacuumizes is as follows:
(1) opening industrial computer, vacuumizing control man-machine interface click start button, pass through OPC by industrial computer---PLC sends order, makes unit contruction pump or mechanical pump begin to start operation;
(2) after unit contruction pump or mechanical pump start operation normally in 2 minutes, manually or by the automatic control of PLC open foreline valve and molecular pump, after molecular pump reached working speed, vaccum-pumping equipment started and finishes, and promptly finishes the preliminary work that vacuumizes;
Referring to Fig. 4, the concrete implementation step that vacuum chamber vacuumizes is as follows:
(1) vacuumize ready after, send by industrial computer and to vacuumize instruction, begin to vacuumize working procedure, unit contruction pump or mechanical pump continue operation;
(2) manually or by industrial computer passing through OPC---PLC control automatically opens the bypass valve of vacuum chamber, and beginning vacuumizes at a slow speed, opens simultaneously to take out timer slowly and take out timing slowly;
(3) reach the setting value of finding time slowly of setting after, pre-valve can be opened, start simultaneously and take out timer soon and take out timing soon;
(4) after vacuum chamber reaches the low vacuum of setting, automatically bypass valve and pre-valve are closed in control, open foreline valve, high valve simultaneously, mainly by molecular pump or diffusion pump to the vacuum chamber pumping high vacuum, reach the high vacuum setting value until the vacuum meter monitoring, promptly vacuumize and finish.
Referring to Fig. 5, the concrete implementation step of film plating substrate heating process is as follows:
A) when the evacuation end, after high vacuum condition reached, vacuum meter passed through OPC---PLC, with signal feedback to industrial computer, send instruction by industrial computer, start well heater film plating substrate is begun heating, start the real-time monitoring that the pid number temperature controller carries out the vacuum chamber temperature simultaneously;
B) when reaching the heating-up temperature value of setting, the pid number temperature controller is given industrial computer with this signal feedback, and send instruction by industrial computer, make the evaporation storehouse be in keeping warm mode in whole evaporate process, begin the operation of evaporation simultaneously, but in order to guarantee the normal operation of plated film evaporation, heating process must last till that evaporation is all over, after brilliant control instrument is issued industrial computer technology automatically and finished signal, can close heating system.
Referring to Fig. 6, be the control program figure of plated film evaporation, concrete implementation step is as follows:
A) vacuumize, the substrate heating schedule finishes, and finish the technology setting, when reaching the evaporation permissive condition, control system is carried out evaporation permission warning automatically, and carries out interface display, opens the evaporation interface automatically, and startup evaporation order, switch crucible according to the coating process documentation requirements of setting simultaneously and put in place, open electron gun, the beginning evaporation;
B) in the evaporate process, automatically control ionogenic unlatching and operation by industrial computer by the RS232 serial ports, and the thickness data message of the comparison sheet of quartz crystal film-thickness monitoring and connection thereof feedback handled, automatically control evaporation speed, according to optical thickness monitor instrument feedack control evaporation halt, simultaneously, carry out the processing of evaporation monitor signal, record, demonstration and the storage of plated film data message automatically by industrial computer, and save as the EXCEL document;
C) in the plated film operational process, the operational monitoring information after by fault handling warning function module coating system being started and the abnormal alarm parameter value of setting carry out real-time comparative analysis, when difference occurring, then illustrative system takes place unusual, promptly by this functional module failure judgement position accurately, and carry out the interface and report to the police, alert is handled, and makes any small unusual all in the monitoring of automatic control system.In a single day equipment break down in the operational process, then automatically enters render safe procedures by this functional module, gives an order, turn-off all valves, close electron gun, withdraw from coating process, and before interrupting the plated film operation, rapidly with relevant operational information recording, storage, after treating that operating personnel's fault is got rid of, then can operate coating system and restart, and according to hindering the operation information that stores when the termination plated film moves for some reason, breakdown loss is avoided in the operation that continues effectively.
D) when reaching evaporation control halt, promptly finish the evaporation of plated film;
E) evaporation finishes, and signals to industrial computer by crystalline substance control instrument, and industrial computer is received signal, closes electron gun, ion gun, brilliant control instrument and optical thickness monitor instrument automatically by the RS232 serial ports, stops evaporation; Close well heater, close high valve, begin to cool down;
F) cooling finishes, and when reaching the inflation permissible value of setting, vacuum chamber is inflated from the dynamic pressure instrument by industrial computer control;
G) after inflation finishes, open door for vacuum chamber automatically, can take out workpiece by industrial computer control.
Referring to Fig. 7, the plated film control method of shutdown automatically is:
If a) no longer carry out plated film work, manually click " shutdown " button in the industrial computer control interface, enter automatic shutdown programm, close door for vacuum chamber automatically by industrial computer control;
B) under the automatic control of industrial computer, at first the closure molecule pump is opened foreline valve, after the complete stall of equimolecular pump, foreline valve is closed, and opens pre-valve simultaneously and inflates, and makes vacuum chamber reach low vacuum state;
C) after vacuum chamber reaches low vacuum state, can close pre-valve, unit contruction pump or mechanical pump, powered-down is promptly realized shutdown.
Claims (2)
1, a kind of optical coating automation control system comprises hardware system and software systems: it is characterized in that: this optical coating automation control system comprises:
An industrial computer is used for the control of reception, processing and the plated film working procedure of each monitor signal of coating process;
A control module is connected with pumped vacuum systems, workpiece plate rotary system and thermal resistance evaporation source with industrial computer respectively by signal transmssion line, is used for the operation in programming Control pumped vacuum systems, workpiece plate rotary system and thermal resistance evaporation source;
A serial port expanding module is connected with brilliant control instrument, electron gun, temperature controller and compound vacuum gauge with industrial computer respectively by signal transmssion line, and the transmission that is used for plated film Monitoring Data and industrial computer command signal connects;
A display is used for the instant playback of coating process parameter and state and the interface operation of control program;
One group of temperature controller is connected with industrial computer by the serial communication circuit, is used for the heat control that adds of vacuum chamber;
A compound vacuum gauge is connected with industrial computer by serial ports, and programming realizes the collection to the pumped vacuum systems instrumented data, is used for the measurement to vacuum degree in vacuum chamber;
A Control Software System, comprising:
Plated film run signal is handled and the programmed control functional module, is used to programme realize the automatic control of coating process;
An OLE for process control control system software is used to control the operation in pumped vacuum systems and workpiece plate rotary system, thermal resistance evaporation source;
An interlock module is used for the safety interlocking after each device of coating process starts;
A fault-operation protection functional module is refused to carry out to operations staff's maloperation automatically, has the function that the coating process working procedure is protected automatically;
A failure safe is handled and the warning function module, is used for each running status of coating process is carried out the safe handling and the sound and light alarm of self diagnosis and operation troubles;
Plated film data message writes down automatically, memory function module, will write down automatically, store the plated film data message;
Also be provided with the picture control interface, comprising:
One vacuumizes the control man-machine interface, is used for the data presentation and the control operation of pumped vacuum systems operational factor;
A temperature control man-machine interface is used for the data presentation and the control operation of well heater operational factor;
Coating process setting and revise man-machine interface is used for the setting and the retouching operation of coating process;
The control man-machine interface of a coating process is used for the data presentation and the control operation of coating process operational factor;
Alarm indication is carried out to all kinds of faults that occur in the operational process in an abnormal alarm interface.
2, a kind of control method that is used for the described optical coating automation control system of claim 1 is characterized in that: this method is to carry out according to the following steps:
1), beginning: open industrial computer and each monitoring equipment;
2), input technological parameter: with the operation process of rete, thickness, material, selection number and rete parameter input industrial computer;
3), input fault alarm parameters: with the plated film operation troubles parameter input industrial computer of setting;
4), vacuumize, preheating: by industrial computer operation, bringing into operation vacuumizes and preheating program, until reaching the evaporation conditional request, image data information simultaneously, and carry out interface display;
5), evaporation operation: vacuumize finish with preheating program after, automatically send instruction by industrial computer, the collection of the evaporation process that brings into operation and plated film information, simultaneously the plated film information data is carried out real-time interface display, record and file, the abnormal information that occurs in the plated film operational process is handled automatically, judged,, then carry out safe handling automatically in case break down, and carry out sound and light alarm by display interfaces, alert is got rid of;
6), finish: after coating film thickness reaches the setting controlling value, industrial computer will move shutdown programm automatically, and close all devices successively according to setting program.
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| CN200810140824A CN100578408C (en) | 2008-07-28 | 2008-07-28 | Automatic control system and control method of optical filming |
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| CN200810140824A CN100578408C (en) | 2008-07-28 | 2008-07-28 | Automatic control system and control method of optical filming |
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| CN101592926B (en) * | 2009-06-25 | 2011-09-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and system for controlling film coating process |
| CN103199036B (en) * | 2012-01-06 | 2015-09-09 | 沈阳新松机器人自动化股份有限公司 | The EFEM of Integrated dispatching system and dispatching method thereof |
| CN103366497B (en) * | 2013-08-05 | 2015-09-16 | 北京天普太阳能工业有限公司 | Coating machine accident warning device |
| CN103451629B (en) * | 2013-09-10 | 2016-07-06 | 冠铨（山东）光电科技有限公司 | Mocvd automatic controller |
| CN107807618B (en) * | 2017-09-25 | 2020-09-15 | 共享智能装备有限公司 | Bottom layer integrated framework of industrial control system of digital casting factory |
| CN109903526A (en) * | 2019-02-26 | 2019-06-18 | 佛山市佛欣真空技术有限公司 | Internet of Things alarm and intelligent fault processing system and method based on technique for vacuum coating |
| CN111678870A (en) * | 2020-06-01 | 2020-09-18 | 肇庆宏旺金属实业有限公司 | Online detection method and system for continuous vacuum coating of stainless steel coil |
| CN112126908B (en) * | 2020-08-31 | 2023-02-03 | 佛山市博顿光电科技有限公司 | Coating control system and coating equipment |
| CN112885677A (en) * | 2021-01-18 | 2021-06-01 | 安徽理工大学 | Automatic control method of automatic cathode preparation device |
| CN112802725A (en) * | 2021-01-18 | 2021-05-14 | 安徽理工大学 | Display control system of automatic cathode preparation device |
| CN113897587B (en) * | 2021-09-29 | 2024-03-01 | 佛山市博顿光电科技有限公司 | Equipment monitoring method and device of coating machine and coating machine |
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