CN115725948A - Full-automatic optical coating system - Google Patents
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- CN115725948A CN115725948A CN202211523380.8A CN202211523380A CN115725948A CN 115725948 A CN115725948 A CN 115725948A CN 202211523380 A CN202211523380 A CN 202211523380A CN 115725948 A CN115725948 A CN 115725948A
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Abstract
A full-automatic optical coating system relates to the technical field of optical coating, and is an improvement of an automatic control coating system for optical coating. The vacuum measuring device comprises a control host, a control mechanism, a connecting interface, a display device, a temperature control system and a vacuum measuring mechanism, wherein the control end of the control host is respectively connected with the control mechanism and the temperature control system; the control host controls the film coating process, the receiving and processing of monitoring signals of each part and the control of a film coating operation program; control mechanism passes through signal transmission line respectively with main control system and each operating device: the vacuum-pumping system, the workpiece disc rotating system and the resistance evaporation source are connected, and the control mechanism is used for programming and controlling the vacuum-pumping system, the workpiece disc rotating system and the resistance evaporation source to operate; the automatic coating machine can realize optical coating operation in a full-automatic manner, realizes all automatic operation, is stable and reliable in system, is accurate and stable in coating control, can greatly improve production efficiency, and reduces labor intensity of operators of an automatic coating control system.
Description
Technical Field
The invention relates to the technical field of optical coating, in particular to an improvement of an automatic control coating system for optical coating.
Background
The optical coating refers to a process of coating one (or more) layers of metal (or medium) films on the surface of an optical part, and the purpose of coating the film on the surface of the optical part is to meet the requirements of reducing or increasing light reflection, beam splitting, color separation, light filtering, polarization and the like. The commonly used plating methods are vacuum plating (one of physical plating) and chemical plating. In the coating process, because the kind of coating film is different, the article that needs the coating film is different, leads to the even inequality of thickness at the coating film in-process to lead to the whole quality and the pleasing to the eye degree of coating film, simultaneously, current check out test set can't detect the thickness homogeneity of coating film, leads to the system to judge the mistake, can't carry out data analysis according to the relevant influence factor when the coating film, and then carries out the analysis judgement of numerical value conversion to the coating film.
Vacuum coating is an important link in the production of optical devices, and particularly in the precision optical technical fields of modern shooting, projection and the like, the quality of the coating often determines the main performance and the use function of the optical devices. In the known technology, the production operation and process control of the optical coating are usually monitored by manual operation and simple instruments, and each link can be controlled only by experience. The production method has the advantages of low production efficiency, high labor intensity and unstable product quality, and the poor coating quality and scrapped workpieces can be caused by carelessness of operators, which wastes expensive optical materials and coating material resources and even causes the occurrence of coating equipment and even personal accidents.
Disclosure of Invention
The invention aims to provide a full-automatic optical coating system aiming at the defects and shortcomings of the prior art, which can realize the optical coating operation in a full-automatic manner, realize the full-automatic operation, is stable and reliable, has accurate and stable coating control, can greatly improve the production efficiency and reduce the labor intensity of operators of the coating automatic control system.
In order to achieve the purpose, the invention adopts the following technical scheme: the device comprises a control host 1, a control mechanism 2, a connecting interface 3, a display device 4, a temperature control system 5 and a vacuum measuring mechanism 6, wherein the control end of the control host 1 is respectively connected with the control mechanism 2 and the temperature control system 5, the output end of the control host 1 is connected with the connecting interface 3, and the display signal output end of the control host 1 is connected with the display device 4;
the control host 1 controls the film coating process, the receiving and processing of monitoring signals of each part and the control of a film coating operation program; the control mechanism 2 is respectively connected with the control host 1 and each operation mechanism through signal transmission lines: the vacuum pumping system, the workpiece disc rotating system and the resistance evaporation source are connected, and the control mechanism 2 is used for programming and controlling the vacuum pumping system, the workpiece disc rotating system and the resistance evaporation source to operate;
the connection interface 3 is connected with a control host machine and is respectively connected with a crystal control instrument, an electron gun, a temperature control instrument and a vacuum measuring mechanism 6 and is used for transmitting and connecting coating monitoring data and command signals of the control host machine; the display device 4 displays the instant display of parameters and states in the film coating process and the interface operation of a control program; the temperature control system 5 is connected with the control host 1 through a serial port line and is used for heating control of the vacuum chamber; the vacuum measuring mechanism 6 is connected with the control host through a serial port; programming to realize the acquisition of instrument data of the vacuum pumping system for measuring the vacuum degree of the vacuum chamber;
the control unit 1 is composed of a PLC and a group of programmable control modules, is respectively connected with peripheral equipment such as OPC, various valves, various pumps, a workpiece turntable, a resistance evaporation source, a correction plate, an ion source, a mass flowmeter, an automatic pressure meter and the like through signal transmission lines, receives and executes instructions of a control host through the OPC, and controls the operation of a vacuum pumping system and evaporation peripheral equipment.
The control unit 1 also comprises a fault safety processing and alarming function module which monitors, processes and alarms various faults in the coating operation process, so that any tiny abnormity can be monitored by the automatic control system to ensure the good operation of the coating process. When the system is abnormal, the fault part can be accurately judged, and an interface alarm is used for prompting an operator to stop the machine. Once the equipment fails in the coating operation process, the functional module can quickly and accurately perform safety processing, send a command, shut off all valves, close the electron gun, quit the coating process, and timely store relevant operation information when the coating operation is interrupted, and the coating operation which is stopped after the failure is eliminated can be continuously performed, so that the safety of the coating equipment is protected and serious accidents of the equipment in the operation process are avoided. When the system is abnormal, the fault part can be accurately judged, an alarm is given to remind an operator to stop the machine, once the equipment has a fault in the running process, safety processing can be quickly and accurately carried out, a command is sent out, all valves are turned off, the electron gun is closed, and the coating process is quitted. When the coating operation is interrupted, the relevant operation information is stored, and the suspended coating operation can be continued after the fault is eliminated.
The control unit 1 further comprises an interlocking function module, the interlocking function module controls safety interlocking after various devices and devices are started, and in the system operation process, when a certain link has a problem, related devices are automatically closed or stopped to be started, so that device and process operation accidents can be prevented, and disorder of operation programs or errors of operation programs can be avoided.
The control unit 1 further comprises a misoperation protection function module for identifying whether the operation program is correct or not according to the input coating process program file, and when misoperation occurs to operators, the function module automatically refuses execution to automatically protect the coating process.
The control unit 1 also comprises a coating data information automatic recording and storing function module, can automatically record and store the coating data information, and stores the coating data information as an EXCEL document, so that the coating process and the quality of a coated part can be conveniently tracked and analyzed.
The control method of the full-automatic optical coating system comprises the following steps: the control host 1 controls the process start, high voltage application, beam current and judgment stop of the coating process through the command of the control end, and simultaneously displays the parameters and the state in the coating process; setting, modifying and storing coating parameters; automatically recording and storing the film coating data information; during the coating process, monitoring signals of all detection devices in the whole process from vacuumizing, preheating to coating are received and processed, and according to a set program, vacuumizing, heating and inflating of a vacuum chamber, switching of a crucible, rotation of a workpiece disc, in-place of a comparison piece, premelting of a film material and operation of devices such as a crystal controller and an electron gun during the evaporation process are sent to action instructions to control the operation and start and stop of the devices.
The control flow of the full-automatic optical coating system comprises the following steps: starting a control host, starting each coating device and each monitoring device simultaneously, and preparing the running of a coating program; parameters such as a film layer, a film thickness, materials and the like are input into a control host computer by selecting parameters such as an operation process number, the film layer and the like; the fault alarm parameters are input into the control host, if alarm signals appear, the input point signals of the signals can be carefully checked whether to be normal or not; starting: the vacuumizing and preheating system starts to operate, meanwhile, monitoring data information is collected in real time, the monitoring data information is processed by the control host and is displayed in real time through the display, and an operator can immediately master the vacuum and temperature states and changes in the vacuum chamber through a display screen so as to implement effective monitoring; vacuumizing: after the system preparation work is finished, the processes of vacuumizing and heating the substrate can be started; when the vacuum degree and the temperature in the vacuum chamber meet the requirements of evaporation conditions, the control host automatically enters the operation of an evaporation program; in the coating process, the control host automatically analyzes and processes abnormal information of each part of equipment and an operation program, once a fault occurs, audible and visual alarm is carried out through a display screen to prompt an operator to carry out inspection processing, and meanwhile, safety protection processing is carried out by utilizing the safety interlocking function of the control host; when the film thickness on the workpiece substrate reaches the design requirement, the control host automatically and timely closes the baffle, stops evaporation, automatically cools, deflates, opens the vacuum chamber door, takes out the plated workpiece manually, and clicks the shutdown button if the film plating work is not performed any more, namely, enters an automatic shutdown program, is controlled by the control host, and sequentially and automatically shuts down all the devices.
The working implementation steps of the vacuum chamber are as follows: starting a control host to start the pump to run; after the pump is started for 2 minutes and normally operates, the front valve and the molecular pump are opened manually or automatically controlled by a PLC, and when the molecular pump reaches the working rotating speed, the vacuumizing equipment is started.
The invention realizes the automatic completion of the whole process from the air pumping and exhausting to the end of the evaporation process, and has the following functions: perfect fault feedback and misoperation interlocking protection function and self-diagnosis function of each system. The vacuum system is arranged in a programmable way for pumping and exhausting and is finished by the control host. The process gas pipeline valve and the air input can be set in a programmable way and are automatically controlled by the control host. The resistance wire heating system and the iodine tungsten lamp heating system can be programmed respectively and are controlled by the control host automatically. The control of each pump valve is automatically completed by the control host through the PLC node control. All the parameters of the electron gun can be set by programming and automatically controlled by the control host. The programmable setting of the shutdown of the equipment is automatically completed by the control host. All fault signals and protection signals are processed by the control host and automatically perform the correct actions. The automatic coating machine can realize optical coating operation in a full-automatic manner, realizes all automatic operation, is stable and reliable in system, is accurate and stable in coating control, can greatly improve production efficiency, and reduces labor intensity of operators of an automatic coating control system.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a block diagram showing the overall structure of the present invention.
Detailed Description
Referring to fig. 1, the technical solution adopted by the present embodiment is: the device comprises a control host 1, a control mechanism 2, a connecting interface 3, a display device 4, a temperature control system 5 and a vacuum measuring mechanism 6, wherein the control end of the control host 1 is respectively connected with the control mechanism 2 and the temperature control system 5, the output end of the control host 1 is connected with the connecting interface 3, and the display signal output end of the control host 1 is connected with the display device 4; the control host 1 controls the film coating process, the receiving and processing of monitoring signals of each part and the control of a film coating operation program; the control mechanism 2 is respectively connected with the control host 1 and each operation mechanism through signal transmission lines: the vacuum pumping system, the workpiece disc rotating system and the resistance evaporation source are connected, and the control mechanism 2 is used for programming and controlling the vacuum pumping system, the workpiece disc rotating system and the resistance evaporation source to operate; the control unit 1 is composed of a PLC and a group of programmable control modules, is respectively connected with peripheral equipment such as OPC (optical proximity correction) and various valves, various pumps, workpiece turntables, resistance evaporation sources, correction plates, ion sources, mass flowmeters, automatic pressure gauges and the like through signal transmission lines, receives and executes instructions of a control host through OPC (optical proximity correction), and controls the operation of a vacuum-pumping system and evaporation peripheral equipment.
The control unit 1 also comprises a fault safety processing and alarming function module which monitors, processes and alarms various faults in the coating operation process, so that any small abnormality is monitored by an automatic control system to ensure good operation of the coating process. When the system is abnormal, the fault part can be accurately judged, and the operator is prompted to stop the machine through interface alarm. Once the equipment fails in the coating operation process, the functional module can quickly and accurately perform safety processing, send a command, shut off all valves, close the electron gun, quit the coating process, and timely store relevant operation information when the coating operation is interrupted, and the coating operation which is stopped after the failure is eliminated can be continuously performed, so that the safety of the coating equipment is protected and serious accidents of the equipment in the operation process are avoided. When the system is abnormal, the fault part can be accurately judged, an alarm is given to remind an operator to stop the machine, once the equipment has a fault in the running process, safety processing can be quickly and accurately carried out, a command is sent out, all valves are turned off, the electron gun is closed, and the coating process is quitted. When the film coating operation is interrupted, the related operation information is stored, and the film coating operation which is interrupted after the fault is eliminated can be continued.
The control unit 1 further comprises an interlocking function module, the interlocking function module controls safety interlocking after various devices and devices are started, and in the system operation process, when a certain link has a problem, related devices are automatically closed or stopped to be started, so that device and process operation accidents can be prevented, and disorder of operation programs or errors of operation programs can be avoided. The control unit 1 further comprises a misoperation protection function module for identifying whether the operation program is correct or not according to the input coating process program file, and when misoperation occurs to operators, the function module automatically refuses execution to automatically protect the coating process. The control unit 1 also comprises a coating data information automatic recording and storing function module, can automatically record and store the coating data information, and stores the coating data information as an EXCEL document, so that the coating process and the quality of a coated part can be conveniently tracked and analyzed. The connection interface 3 is connected with a control host and is respectively connected with a crystal control instrument, an electron gun, a temperature control instrument and a vacuum measuring mechanism 6 and is used for transmitting and connecting coating monitoring data and command signals of the control host; the display device 4 displays the instant display of parameters and states in the film coating process and the interface operation of a control program; the temperature control system 5 is connected with the control host 1 through a serial port line and is used for heating control of the vacuum chamber; the vacuum measuring mechanism 6 is connected with the control host through a serial port; programming to realize the acquisition of instrument data of the vacuum pumping system for measuring the vacuum degree of the vacuum chamber;
the control method of the full-automatic optical coating system comprises the following steps: the control host 1 controls the process start, high voltage application, beam current and judgment stop of the coating process through the command of the control end, and simultaneously displays the parameters and the state in the coating process; setting, modifying and storing coating parameters; automatically recording and storing the film coating data information; during the coating process, monitoring signals of all detection devices in the whole process from vacuumizing, preheating to coating are received and processed, and according to a set program, vacuumizing, heating and inflating of a vacuum chamber, crucible switching, workpiece disc rotation and comparison sheet in-place, premelting of a coating material and operation of devices such as a crystal controller and an electron gun in the evaporation process are sent to action instructions to control operation and start and stop of the devices.
The control flow of the full-automatic optical coating system comprises the following steps: starting a control host, starting each coating device and each monitoring device simultaneously, and preparing the running of a coating program; parameters such as a film layer, a film thickness, materials and the like are input into a control host computer by selecting parameters such as an operation process number, the film layer and the like; the fault alarm parameters are input into the control host, if alarm signals appear, the input point signals of the signals can be carefully checked whether to be normal or not; starting: the vacuumizing and preheating system starts to operate, meanwhile, monitoring data information is collected in real time, the monitoring data information is processed by the control host and is displayed in real time through the display, and an operator can immediately master the vacuum and temperature states and changes in the vacuum chamber through a display screen so as to implement effective monitoring; vacuumizing: after the system preparation work is finished, the processes of vacuumizing and heating the substrate can be started; when the vacuum degree and the temperature in the vacuum chamber meet the requirements of evaporation conditions, the control host automatically enters the operation of an evaporation program; in the coating process, the control host automatically analyzes and processes abnormal information of each part of equipment and an operation program, once a fault occurs, audible and visual alarm is carried out through a display screen to prompt an operator to carry out inspection processing, and meanwhile, safety protection processing is carried out by utilizing the safety interlocking function of the control host; when the film thickness on the workpiece substrate reaches the design requirement, the control host automatically and timely closes the baffle, stops evaporation, automatically cools, deflates, opens the vacuum chamber door, takes out the plated workpiece manually, and clicks the shutdown button if the film plating work is not performed any more, namely, enters an automatic shutdown program, is controlled by the control host, and sequentially and automatically shuts down all the devices. The working implementation steps of the vacuum chamber are as follows: starting a control host to start the pump to run; after the pump is started for 2 minutes and normally operates, the front valve and the molecular pump are opened manually or automatically controlled by a PLC (programmable logic controller), and when the molecular pump reaches the working rotating speed, the vacuumizing equipment is started;
the invention realizes the automatic completion of the whole process from the air pumping and exhausting to the end of the evaporation process, and has the following functions: perfect fault feedback and misoperation interlocking protection function and self-diagnosis function of each system. The vacuum system is arranged in a programmable way for pumping and exhausting and is finished by the control host. The process gas pipeline valve and the air input can be set in a programmable way and are automatically controlled by the control host. The resistance wire heating system and the iodine tungsten lamp heating system can be programmed respectively and are controlled by the control host automatically. The control of each pump valve is automatically completed by the control host through the PLC node control. All the parameters of the electron gun can be set by programming and automatically controlled by the control host. The programmable setting of the shutdown of the equipment is automatically completed by the control host. All fault signals and protection signals are processed by the control host and automatically perform the correct actions. The automatic coating machine can realize optical coating operation in a full-automatic manner, realizes all automatic operation, is stable and reliable in system, is accurate and stable in coating control, can greatly improve production efficiency, and reduces labor intensity of operators of an automatic coating control system.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. Full-automatic optical coating system, its characterized in that: the device comprises a control host (1), a control mechanism (2), a connecting interface (3), a display device (4), a temperature control system (5) and a vacuum measurement mechanism (6), wherein the control end of the control host (1) is respectively connected with the control mechanism (2) and the temperature control system (5), the output end of the control host (1) is connected with the connecting interface (3), and the display signal output end of the control host (1) is connected with the display device (4); the control host (1) controls the film coating process, the receiving and processing of monitoring signals of each part and the control of a film coating operation program; the control mechanism (2) is respectively connected with the control host (1) and each operation mechanism through a signal transmission line: the vacuum-pumping system, the workpiece disc rotating system and the resistance evaporation source are connected, and the control mechanism (2) is used for programming and controlling the vacuum-pumping system, the workpiece disc rotating system and the resistance evaporation source to operate.
2. The fully automated optical coating system of claim 1, wherein: the connection interface (3) is connected with a control host machine and is respectively connected with a crystal control instrument, an electron gun, a temperature control instrument and a vacuum measuring mechanism (6) and is used for transmitting and connecting coating monitoring data and control host machine instruction signals; the display device (4) displays the parameters and the states in the film coating process in real time and controls the interface operation of the program; the temperature control system (5) is connected with the control host (1) through a serial port line and is used for heating control of the vacuum chamber; the vacuum measuring mechanism (6) is connected with the control host through a serial port; and programming to realize the acquisition of instrument data of the vacuum pumping system for measuring the vacuum degree of the vacuum chamber.
3. The fully automated optical coating system of claim 1, wherein: the control unit (1) is composed of a PLC and a group of programmable control modules, is respectively connected with peripheral equipment such as OPC, various valves, various pumps, a workpiece turntable, a resistance evaporation source, a correction plate, an ion source, a mass flowmeter, an automatic pressure meter and the like through signal transmission lines, receives and executes instructions of a control host through the OPC, and controls the operation of a vacuum pumping system and evaporation peripheral equipment.
4. The fully automated optical coating system of claim 1, wherein: the control unit () 1) also comprises a fault safety processing and alarming function module which monitors, processes and alarms various faults in the coating operation process, so that any tiny abnormity is monitored by an automatic control system to ensure the good operation of the coating process; when the system is abnormal, the fault part can be accurately judged, and an interface alarm is used for prompting an operator to stop the machine; once the equipment fails in the coating operation process, the functional module can quickly and accurately perform safety processing, send a command, turn off all valves, close an electron gun, quit the coating process, and timely store relevant operation information when the coating operation is interrupted, and the coating operation which is stopped after the failure is eliminated can be continuously performed, so that the safety of the coating equipment is protected and serious accidents of the equipment in the operation process are avoided; when the system is abnormal, the fault part can be accurately judged, an alarm is given to remind an operator to stop the machine, once the equipment has a fault in the running process, safety processing can be quickly and accurately carried out, a command is sent out, all valves are turned off, the electron gun is closed, and the coating process is quitted; when the film coating operation is interrupted, the related operation information is stored, and the film coating operation which is interrupted after the fault is eliminated can be continued.
5. The fully automated optical coating system of claim 1, wherein: the control unit (1) also comprises an interlocking function module which controls safety interlocking after various devices and devices are started, and in the running process of the system, when a certain link has a problem, the related devices are automatically closed or stopped to be started, so that the running accidents of the devices and the process can be prevented, and the disorder of running programs or the error of operating programs can be avoided.
6. The fully automated optical coating system of claim 1, wherein: the control unit (1) also comprises a misoperation protection function module which is used for identifying whether the operation program is correct or not according to the input coating process program file, and when misoperation occurs to operators, the function module automatically refuses to execute to automatically protect the coating process.
7. The fully automated optical coating system of claim 1, wherein: the control unit (1) also comprises a coating data information automatic recording and storing function module, which can automatically record and store the coating data information as an EXCEL document, thereby facilitating the tracking analysis of the coating process and the quality of the coated piece.
8. The fully automated optical coating system of claim 1, wherein: the control host (1) controls the process start, high voltage application, beam current and judgment stop of the coating process through the command of the control end, and simultaneously displays the parameters and the state in the coating process; setting, modifying and storing coating parameters; automatically recording and storing the film coating data information; during the coating process, monitoring signals of all detection devices in the whole process from vacuumizing, preheating to coating are received and processed, and according to a set program, vacuumizing, heating and inflating of a vacuum chamber, crucible switching, workpiece disc rotation and comparison sheet in-place, premelting of a coating material and operation of devices such as a crystal controller and an electron gun in the evaporation process are sent to action instructions to control operation and start and stop of the devices.
9. The fully automated optical coating system of claim 1, wherein: the specific working process is that the control host is started, and the coating equipment and the monitoring equipment are started at the same time, so that the coating program is prepared for running; parameters such as a film layer, a film thickness, materials and the like are input into a control host computer by selecting parameters such as an operation process number, the film layer and the like; the fault alarm parameters are input into the control host, if alarm signals appear, the input point signals of the signals can be carefully checked whether to be normal or not; starting: the vacuumizing and preheating system starts to operate, meanwhile, monitoring data information starts to be collected in real time, the monitoring data information is processed by the control host and is displayed in real time by the display, and an operator can immediately master the vacuum and temperature states and changes thereof in the vacuum chamber through a display screen so as to implement effective monitoring; vacuumizing: after the system preparation work is finished, the processes of vacuumizing and heating the substrate can be started; when the vacuum degree and the temperature in the vacuum chamber meet the requirements of evaporation conditions, the control host automatically enters the operation of an evaporation program; in the coating process, the control host automatically analyzes and processes abnormal information of each part of equipment and an operation program, once a fault occurs, audible and visual alarm is carried out through a display screen to prompt an operator to carry out inspection processing, and meanwhile, safety protection processing is carried out by utilizing the safety interlocking function of the control host; when the film thickness on the workpiece substrate reaches the design requirement, the control host automatically and timely closes the baffle, stops evaporation, automatically cools, deflates, opens the vacuum chamber door, takes out the plated workpiece manually, and clicks the shutdown button if the film plating work is not performed any more, namely, enters an automatic shutdown program, is controlled by the control host, and sequentially and automatically shuts down all the devices.
10. The fully automated optical coating system of claim 1, wherein: the specific implementation steps of the vacuum chamber are as follows: starting a control host to start the pump to run; after the pump is started for 2 minutes and normally operates, the front valve and the molecular pump are opened manually or automatically controlled by a PLC, and when the molecular pump reaches the working rotating speed, the vacuumizing equipment is started.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202211523380.8A CN115725948A (en) | 2022-12-01 | 2022-12-01 | Full-automatic optical coating system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211523380.8A CN115725948A (en) | 2022-12-01 | 2022-12-01 | Full-automatic optical coating system |
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| CN115725948A true CN115725948A (en) | 2023-03-03 |
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| CN202211523380.8A Pending CN115725948A (en) | 2022-12-01 | 2022-12-01 | Full-automatic optical coating system |
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