CN100573081C - Hartmann wave front sensor and detection method thereof with passive type alignment function - Google Patents
Hartmann wave front sensor and detection method thereof with passive type alignment function Download PDFInfo
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- CN100573081C CN100573081C CNB2006101650799A CN200610165079A CN100573081C CN 100573081 C CN100573081 C CN 100573081C CN B2006101650799 A CNB2006101650799 A CN B2006101650799A CN 200610165079 A CN200610165079 A CN 200610165079A CN 100573081 C CN100573081 C CN 100573081C
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Abstract
Hartmann wave front sensor and detection method thereof with passive type alignment function have been added two functions of coarse alignment and fine alignment in original system; Wherein coarse alignment partly comprises: imaging screen with holes, detection system, part of accurate alignment comprises: condenser lens, spectroscope, detection system.Incident beam can enter in the measurement visual field of microlens array efficiently and easily through after coarse alignment and two steps of fine alignment, and can with the strict same optical axis of system, thereby improved the measuring accuracy of Hartmann wave front sensor.Utilize this Hartmann wave front sensor can carry out positive lens easily, negative lens, convex lens, concave mirror, the detection of level crossing etc. simultaneously.The present invention can show the result who adjusts in real time, has directly perceived, understandable characteristic, thereby has reduced the requirement to the user of service, has reduced the adjusting time; And the present invention requires low, cheap to used device specification, buy easily.
Description
Technical field
The present invention relates to a kind of exact instrument-Hartmann wave front sensor that is used to measure wavefront shape, particularly a kind of incident beam of regulating simply, fast, accurately enters the Hartmann wave front sensor of measuring the visual field.
Background technology
Hartmann wave front sensor is a kind of instrument that can detect the corrugated shape, and it has obtained using widely in optical mirror plane detection, Medical Instruments and celestial body target imaging.In Hartmann wave front sensor in the past, include only measurement light source system, Beam matching system, microlens array, photodetector (being generally CCD) and data handling system usually.Hartmann wave front sensor is before using, and tested corrugated all must be adjusted in the measurement visual field of microlens array.All be to regulate by the facula position of observing in the sub-aperture in the past.With respect to input path, the measurement visual field of microlens array seems very little usually, and measured body changes very little angle, and big skew will take place the hot spot in the sub-aperture, so be difficult to the incident corrugated is transferred in the measurement visual field of microlens array.Thereby in the process of using Hartmann wave front sensor, too much energy flower is on the aligning of measured piece; And easily cause tested light beam and systematic optical axis to depart from, thereby cause the measuring error on corrugated to become big.
Summary of the invention
The problem that technology of the present invention solves is: a kind of Hartmann wave front sensor and detection method thereof with passive type alignment function is provided, this Hartmann's wavefront sensing utilizes coarse alignment and part of accurate alignment can make things convenient for, aim at accurately the optical axis of measured piece and system, thereby reduce measuring error, improved the measuring accuracy of Hartmann system; Utilize the detection method of this Hartmann wave front sensor to carry out positive lens easily simultaneously, negative lens, convex lens, concave mirror, the detection of level crossing etc., it is little to detect error.
Technical solution of the present invention: Hartmann wave front sensor with passive type alignment function, comprise: the measurement light source system, the Beam matching system, spectroscope, microlens array, photodetector, its characteristics are also to comprise: coarse alignment part and part of accurate alignment, coarse alignment partly comprises: imaging screen with holes, the coarse alignment detection system, wherein imaging screen is positioned on the focal plane of front lens group of Beam matching system, center pit on the screen is positioned on the focus, the light that is sent by the measurement light source system during work is by the hole outgoing of imaging screen, the front lens group of process Beam matching system is after return behind the testee, again focus on the imaging screen, by observing the aperture that obtains by the coarse alignment detection system and the relative position of focal beam spot, the position of regulating measured piece overlaps aperture and focal beam spot, through after the coarse alignment, guaranteed that light beam can enter in the scope of fine alignment; Part of accurate alignment comprises: the fine alignment spectroscope, condenser lens and fine alignment detection system, the fine alignment spectroscope is positioned at before the condenser lens, condenser lens is positioned at before the fine alignment detection system, the light that the measurement light source system sends successively passes through the coarse alignment spectroscope, behind the spectroscope, preceding mirror group outgoing by the Beam matching system, behind measured piece, return, priority is through the preceding mirror group of Beam matching system, the back mirror group of Beam matching system, spectroscope, behind the fine alignment spectroscope, the line focus lens imaging is on the fine alignment detection system again, obtain the position of focal beam spot by the centroid calculation formula, the position that it is systematic optical axis that the adjusting measured piece makes facula mass center and prior calibration point overlaps, so far the fine alignment process is finished, through behind the fine alignment, light beam has entered in the measurement visual field of microlens array, and can directly measure.
The present invention's beneficial effect compared with prior art: the present invention can adjust the position of measured piece quickly, allows tested light beam or autocollimation light beam enter in the measurement visual field of microlens array; And the adjusting direction of measured piece all is to get by the relativeness between focal beam spot and the reference point relatively, has intuitively, simply, characteristic accurately, user of service's requirement is reduced; In the coarse alignment process, if what laser source system produced is small-bore directional light, the aligning measured piece that the present invention can also be easy and the optical axis of Hartmann system are behind coarse alignment and fine alignment, avoid the situation of the hot spot generation overall offset in the sub-aperture, thereby improved measuring accuracy; Utilize detection method of the present invention to carry out positive lens easily simultaneously, negative lens, convex lens, concave mirror, the detection of level crossing etc., it is little to detect error; Low to the specification requirement of used element among the present invention, low price is bought easily.
Description of drawings
Fig. 1 is the structural representation of original Hartmann wave front sensor;
Fig. 2 is the structural representation with Hartmann wave front sensor of passive type alignment function;
Work synoptic diagram when Fig. 3 carries out coarse alignment for the Hartmann sensor with passive type alignment function among the present invention;
Work synoptic diagram when Fig. 4 carries out fine alignment for the Hartmann wave front sensor with passive type alignment function among the present invention;
Fig. 5 measures the fundamental diagram of positive lens face shape for the Hartmann wave front sensor with passive type alignment function among the present invention;
Fig. 6 measures the fundamental diagram of negative lens face shape for the Hartmann wave front sensor with passive type alignment function among the present invention;
Fig. 7 measures the fundamental diagram of convex surface minute surface shape for the Hartmann wave front sensor with passive type alignment function among the present invention;
Fig. 8 measures the fundamental diagram of concave surface minute surface shape for the Hartmann wave front sensor with passive type alignment function among the present invention;
Fig. 9 is the fundamental diagram of the Hartmann wave front sensor measurement plane minute surface shape with passive type alignment function among the present invention;
Figure 10 is the fundamental diagram of the Hartmann wave front sensor measuring laser beam quality with passive type alignment function among the present invention.
The preceding mirror group of 1. Beam matching systems among the figure (be called for short: preceding mirror group), 2. the back mirror group of Beam matching system (be called for short: back mirror group), 3. spectroscope, 4. microlens array, 5. photodetector, 6. measurement light source system, 7. standard flat mirror, 8. level crossing, 10. convex mirror, 11. concave mirrors, 12. positive lenss, 13. negative lens, 14. standard spherical mirror, 15. supplementary lenses, 16. laser instruments, 17. Beam matching system (preceding mirror group 1 and back mirror group 2 can be collectively referred to as the Beam matching system), 18, external laser instrument, C1. coarse alignment detection system, C2. imaging screen with holes, J1. fine alignment spectroscope, J2. condenser lens, J3. fine alignment detection system.
Embodiment
Hartmann wave front sensor needs the at first error of calibration system itself when work.
As shown in Figure 1, first by measurement light source system 6 emitted light beams when function of calibrating systematic error through spectroscope 3, pass through the Beam matching system again after, finally outgoing from system.In standard flat mirror 7 reflection back retrieval systems, through Beam matching system, spectroscope 3, behind the microlens array 4, image on the photodetector 5, the position of adjustment criteria level crossing 7, finally make the coincidence measurement requirement of arranging of hot spot on the photodetector 5, but the area of microlens array 4 is about 1cm
2, very little with respect to whole light path, cause standard flat mirror 7 adjustable scopes less, the adjusting difficulty is very big.Adopt after 7 demarcation of standard flat mirror, measured piece is placed in the system detects again.
As shown in Figure 2, compare among Hartmann wave front sensor of the present invention and Fig. 1, increased part that is used for coarse alignment and the part that is used for fine alignment.The coarse alignment part is by coarse alignment detection system C1 and imaging screen with holes C2, part of accurate alignment comprises: fine alignment spectroscope J1, condenser lens J2, fine alignment detection system J3, wherein imaging screen C2 is positioned on the focal plane of preceding mirror group 1, coarse alignment detection system C1 can be to whole imaging screen C2 imaging, fine alignment spectroscope J1 is positioned at before the condenser lens J2, and condenser lens J2 is positioned at before the fine alignment detection system J3; After incident light passes back mirror group 2, spectroscope 3, fine alignment spectroscope J1 during fine alignment, converge on the photodetection J3 behind the line focus lens J2.
As shown in Figure 3, during coarse alignment, incident beam focuses on the imaging screen C2 through after the preceding mirror group 1, and detection system C1 can observe whole imaging screen C2, and the result is presented on the monitor; By observing the relative position of focal beam spot and imaging screen C2 central small hole, the position of adjusting measured piece overlaps the two, and the size that imaging screen C2 goes up aperture has guaranteed can enter within the scope of accurate adjustment through light beam after the coarse adjustment.
As shown in Figure 4, when fine alignment, after the light that measurement light source system 6 sends successively passes through fine alignment spectroscope J1, spectroscope 3, by preceding mirror group 1 outgoing; Return behind measured piece, behind mirror group 1, back mirror group 2, spectroscope 3, the fine alignment spectroscope J1, line focus lens J2 images on the photodetector J3 again before successively passing through.By calculating the centroid position of launching spot, the relatively barycenter of launching spot and the relative position relation between the calibration point are in advance adjusted the measured piece position until 2 coincidences.Can guarantee that light beam ideally enters in the measurement visual field of microlens array 4 this moment, and with the strict same optical axis of system.
Utilize the Hartmann wave front sensor of the present invention system can be to measured piece, comprise that positive lens, negative lens, convex lens, concave mirror, level crossing carry out face shape and detect, but also can detect laser beam quality, its detection method is narrated in conjunction with Fig. 5-Figure 10.
As shown in Figure 5, the Beam matching system 17 among the figure is being collectively referred to as of preceding mirror group 1 and back mirror group 2; When utilizing the present invention that positive lens is carried out the detection of face shape, carry out the adjusting of following four steps:
(1) standard flat mirror 7 is placed on the front of Hartmann wave front sensor system, i.e. dotted line position among the figure, inclination according to the described adjustment criteria level crossing 7 of Fig. 3, Fig. 4, allow the luminous energy that sends by measurement light source system 6 be reflected on the fine alignment detection system J3, and allow focal beam spot overlap with prior calibration point, note the position of hot spot on photodetector 5 in each sub-aperture, as calibration point.
(2) remove standard flat mirror 7 after, laser instrument 18 is placed in front in the Hartmann system, i.e. dotted line position among the figure, the light pencil that laser instrument 18 sends is through after the preceding mirror group 1, focus on the imaging screen C2, according to the relative position on focal beam spot and the aperture, the position of adjusting laser instrument 18 overlaps the two, and light beam and systematic optical axis that this moment, laser instrument 18 sent roughly overlap; Then utilize part of accurate alignment shown in Figure 2, further regulate the position of laser instrument 18, make hot spot and calibration point coincidence in advance on the fine alignment detection system J3, this moment, laser beam and systematic optical axis were accurately aimed at.
(3) positive lens 12 is placed between external laser instrument 18 and the Hartmann sensor system, described according to step (2), precisely regulate the same optical axis of positive lens and system by the position of observing hot spot.
(4) remove external laser instrument 18, change standard spherical mirror 14, by the light of measurement light source system 6 outgoing by in the standard spherical mirror 14 reflected back Hartmann wave front sensor systems, adjustment criteria spherical mirror 14 described in (1) and Hartmann wave front sensor system are coaxial equally set by step, and adjust standard spherical mirror 14 and positive lens 12 same focuses according to the size of focal beam spot, note the position of hot spot on photodetector 5 in each sub-aperture, the calibration point that obtains in the joint step (1) restores the corrugated.
As shown in Figure 6, the Beam matching system 17 among the figure is being collectively referred to as of preceding mirror group 1 and back mirror group 2; When negative lens being carried out face shape and detects, need four steps among Fig. 5 equally, and align lens face shape and detect and compare, difference only is that a positive lens 12 has changed negative lens 13 into.
As shown in Figure 7, the Beam matching system 17 among the figure is being collectively referred to as of preceding mirror group 1 and back mirror group 2; When convex mirror being carried out the detection of face shape, must increase a supplementary lens 15 in the outside of Hartmann wave front sensor system, parallel beam by the outgoing of Hartmann wave front sensor system can become converging beam or divergent beams behind supplementary lens 15, so just need at first regulate the same optical axis of supplementary lens 15 and system.
(1) at first external laser instrument 18 is placed on the front of Hartmann system, according to the described control method of step among Fig. 5 (2), allow the luminous energy that sends by external laser instrument 18 converge on the fine alignment detection system J3, and focal beam spot and calibration point coincidence have in advance guaranteed the same optical axis of external laser instrument 18 and Hartmann system this moment.
(2) again supplementary lens 15 is placed between external laser instrument 18 and the Hartmann system, regulate the relative position of supplementary lens 15 and Hartmann system, the light pencil that is sent by external laser instrument 18 still can be converged on the fine alignment detection system J3, and focal beam spot and calibration point coincidence have in advance so just guaranteed the same optical axis of supplementary lens 15 and Hartmann system.
(3) take away external laser instrument 18, standard spherical mirror 14 is put into the detection light path, probe source system 6 starts working at this moment, successively according to by coarse alignment detection system C1 and the observed focal beam spot of fine alignment detection system J3 and aperture, the position relation between demarcating in advance, the same optical axis of adjustment criteria spherical mirror 14 and system, with supplementary lens 15 same focuses, adjustment criteria spherical mirror 14 and supplementary lens 15, the same optical axis of system, standard spherical mirror 14 and supplementary lens 15 same focuses, and note the position of each hot spot on the photodetector 5, as calibration point.
(4) use tested convex mirror 10 alternate standard spherical mirrors 14 at last, convex mirror 10 is regulated with the method for optical axis by adjustment criteria spherical mirror 14 and system equally, finally make convex mirror 10, supplementary lens 15 same focuses and the same optical axis of Hartmann system; After finishing with adjusted, the facula position and the calibration point that just can use photodetector 5 newly to record restore the corrugated.
As shown in Figure 8, the Beam matching system 17 among the figure is being collectively referred to as of preceding mirror group 1 and back mirror group 2; When concave mirror being carried out the detection of face shape, the step before measuring is the same with the described step of Fig. 7, just convex mirror 10 has been changed into concave mirror 11.
As shown in Figure 9, the present invention must carry out following two steps ground and regulate when level crossing being carried out the detection of face shape:
(1) at first allow probe source system 6 work, light beam is placed on standard flat mirror 7 reflections of Hartmann system front, the Dou that inclines of adjustment criteria level crossing 7, allow light beam at first pass through aperture on the imaging screen, finally converge on the fine alignment detection system J3, and focal beam spot overlaps with prior calibration point, notes the position of hot spot on photodetector 5 in each sub-aperture, as calibration point;
(2) replace standard flat mirror 7 with tested level crossing, equally by observing the focal beam spot that obtains by C of coarse alignment system 1 and fine alignment detection system J3 and aperture, the relativeness between demarcating in advance, regulate the position of level crossing, allow light beam at first pass through aperture on the imaging screen, converge to then on the fine alignment detection system J3, and focal beam spot overlaps with prior calibration point, note the position of hot spot on photodetector 5 in each sub-aperture, the combined calibrating point just can restore the corrugated.
As shown in figure 10, the Beam matching system 17 among the figure is being collectively referred to as of preceding mirror group 1 and back mirror group 2; When laser beam quality is detected, at first place standard flat mirror 7 in the front of Hartmann system, measurement light source system 6 starts working, same according to by coarse alignment detection system C1 and the observed focal beam spot of fine alignment detection system J3 and aperture, the position relation between demarcating in advance, standard flat mirror 7 is regulated, finally make on the fine alignment detection system J3 focal beam spot and in advance calibration point overlap, note facula position in this moment of each sub-aperture as calibration point; Utilize laser instrument 16 to replace standard flat mirror 7 then, measurement light source system 6 no longer works at this moment, regulate the position of laser instrument 16, allow light beam at first through small holes, focus at last on the fine alignment detection system J3, the facula position in this moment of each sub-aperture is noted in focal beam spot and calibration point coincidence in advance, and the combined calibrating point restores the corrugated.
Finish behind the locating tab assembly by Fig. 5～10 are described, restore the corrugated by following steps.At first adopt discrete centroid algorithm, calculate facula position (x by formula (1)
i, y
j),
In the formula, m=1～M, n=1～N are that sub-aperture is mapped to pixel region corresponding on the detector target surface, I
NmBe (n, the m) signal received of individual pixel-by-pixel basis, x on the detector target surface
Nm, y
NmBe respectively (n, m) the x coordinate of individual pixel and y coordinate.
Utilization can obtain the average gradient of wavefront on each sub-aperture at two groups of facula positions demarcating constantly and measure in the sub-aperture that constantly obtains:
In the formula, (x
0, y
0) for standard flat ripple timing signal, the spot center reference position that obtains on each sub-aperture utilizes the slope value on tested corrugated on each the sub-aperture that is calculated by following formula, and then restores wavefront by type method or field method.
Claims (6)
1, Hartmann wave front sensor with passive type alignment function, comprise: measurement light source system (6), the Beam matching system, spectroscope (3), microlens array (4), photodetector (5), it is characterized in that also comprising: coarse alignment part and part of accurate alignment, coarse alignment partly comprises: imaging screen with holes (C2), coarse alignment detection system (C1), wherein imaging screen with holes (C2) is positioned on the focal plane of front lens group (1) of Beam matching system, center pit on the screen is positioned on the focus, the light that is sent by measurement light source system (6) during work is by the hole outgoing of imaging screen with holes (C2), the front lens group (1) of process Beam matching system is after return behind the testee, again focus on the imaging screen with holes (C2), by observing the aperture that obtains by coarse alignment detection system (C1) and the relative position of focal beam spot, the position of regulating measured piece overlaps aperture and focal beam spot, through after the coarse alignment, guaranteed that light beam can enter in the scope of fine alignment; Part of accurate alignment comprises: fine alignment spectroscope (J1), condenser lens (J2) and fine alignment detection system (J3), fine alignment spectroscope (J1) is positioned at condenser lens (J2) before, condenser lens (J2) is positioned at fine alignment detection system (J3) before, the light that measurement light source system (6) sends successively passes through coarse alignment spectroscope (J1), behind the spectroscope (3), preceding mirror group (1) outgoing by the Beam matching system, behind measured piece, return, priority is through the preceding mirror group (1) of Beam matching system, the back mirror group (2) of Beam matching system, spectroscope (3), behind the fine alignment spectroscope (J1), line focus lens (J2) image on the fine alignment detection system (J3) again, obtain the position of focal beam spot by the centroid calculation formula, the position that it is systematic optical axis that the adjusting measured piece makes facula mass center and prior calibration point overlaps, so far the fine alignment process is finished, through behind the fine alignment, light beam has entered in the measurement visual field of microlens array (4), and can directly measure.
2, the Hartmann wave front sensor with passive type alignment function according to claim 1 is characterized in that: described coarse alignment detection system (C1) and fine alignment detection system (J3) are by photodetector, and image acquisition and display system composition.
3, adopt the described Hartmann wave front sensor of claim 1 that positive lens or negative lens are carried out the method that face shape is detected, it is characterized in that may further comprise the steps with passive type alignment function:
(1) standard flat mirror (7) is placed on the front of Hartmann wave front sensor, the inclination of adjustment criteria level crossing (7), allow the luminous energy that sends by measurement light source system (6) be reflected on the fine alignment detection system (J3), and allow focal beam spot overlap with prior calibration point, note the position of hot spot on photodetector (5) in each sub-aperture, as calibration point;
(2) remove standard flat mirror (7) after, place the front of laser instrument (18) at Hartmann wave front sensor, after the light pencil preceding mirror group of process (1) that laser instrument (18) sends, focus on the imaging screen (C2), according to the relative position on focal beam spot and the aperture, the position of adjusting laser instrument (18) overlaps focal beam spot and aperture, and light beam and systematic optical axis that laser instrument this moment (18) sends roughly overlap; Then utilize part of accurate alignment, further regulate the position of laser instrument (18), make hot spot and calibration point coincidence in advance on the fine alignment detection system (J3), this moment, laser beam and Hartmann wave front sensor optical axis were accurately aimed at;
(3) positive lens (12) or negative lens (13) are placed between external laser instrument (18) and the Hartmann sensor, described according to step (2), by the position of observing hot spot precisely regulate positive lens and and the same optical axis of Hartmann sensor;
(4) remove external laser instrument (18), change standard spherical mirror (14), by the light of measurement light source system (6) outgoing by in standard spherical mirror (14) the reflected back Hartmann wave front sensor system, adjustment criteria spherical mirror described in (1) (14) and system are coaxial equally set by step, and adjust standard spherical mirror (14) and positive lens (12) or the same focus of negative lens (13) according to the size of focal beam spot, note the position of hot spot on photodetector (5) in each sub-aperture, the calibration point that obtains in the joint step (1) restores the corrugated.
4, adopt the described Hartmann wave front sensor of claim 1 that convex mirror or concave mirror are carried out the method that face shape is detected, it is characterized in that may further comprise the steps with passive type alignment function:
(1) when convex mirror (10) or concave mirror (11) being carried out face shape and detect, outside at the described Hartmann wave front sensor of claim 1 increases a supplementary lens (15), parallel beam by this Hartmann wave front sensor outgoing can become converging beam or divergent beams behind supplementary lens (15), so just need at first regulate supplementary lens (15) and the same optical axis of Hartmann wave front sensor;
(2) external laser instrument (18) is placed on the front of Hartmann wave front sensor, successively according to by coarse alignment detection system (C1) and the observed focal beam spot of fine alignment detection system (J3) and aperture, the position between demarcating concerns in advance, regulate external laser instrument (18), allow the luminous energy that sends by external laser instrument (18) converge on the fine alignment detection system (J3), and focal beam spot and calibration point coincidence have in advance guaranteed the same optical axis of external laser instrument (18) and Hartmann wave front sensor this moment;
(3) again supplementary lens (15) is placed between external laser instrument (18) and the Hartmann wave front sensor, equally according to focal beam spot and aperture, the relation of the position between the calibration point in advance, regulate the position of supplementary lens, the light pencil that is sent by external laser instrument (18) still can be converged on the fine alignment detection system (J3), and focal beam spot and calibration point coincidence have in advance so just guaranteed supplementary lens (15) and the same optical axis of Hartmann wave front sensor;
(4) take away external laser instrument (18), standard spherical mirror (14) is placed on the front of supplementary lens (15), and probe source system this moment (6) starts working, still according to the position of focal beam spot, the same optical axis of adjustment criteria spherical mirror (14) and system, and the same focus of supplementary lens (15); And note the position that photodetector (5) is gone up each hot spot, as calibration point;
(5) use tested convex mirror (10) or concave mirror (11) alternate standard spherical mirror (14) at last, convex mirror (10) or concave mirror (11) are regulated with the method for optical axis by adjustment criteria spherical mirror (14) and system equally, finally make convex mirror (10) or concave mirror (11), same focus of supplementary lens (15) and the same optical axis of Hartmann wave front sensor; After finishing with adjusted, the facula position and the calibration point that just can use photodetector (5) newly to record restore the corrugated.
5, adopt the described Hartmann wave front sensor of claim 1 that level crossing is carried out the method that face shape is detected, it is characterized in that may further comprise the steps with passive type alignment function:
(1) at first allow probe source system (6) work, light beam is placed on standard flat mirror (7) reflection of Hartmann wave front sensor front, the inclination of adjustment criteria level crossing (7), allow light beam at first pass through aperture on the imaging screen, finally converge on the fine alignment detection system (J3), and focal beam spot overlaps with prior calibration point, notes the position of hot spot on photodetector (5) in each sub-aperture, as calibration point;
(2) replace standard flat mirror (7) with tested level crossing, same by observing the relativeness between the focal beam spot that obtains by coarse alignment system (C1) and fine alignment detection system (J3) and aperture, the prior demarcation, regulate the position of level crossing, allow light beam at first pass through aperture on the imaging screen, converge to then on the fine alignment detection system (J3), and focal beam spot overlaps with prior calibration point, note the position of hot spot on photodetector (5) in each sub-aperture, the combined calibrating point just can restore the corrugated.
6, the method that adopts the described Hartmann wave front sensor of claim 1 that laser beam quality is detected with passive type alignment function, it is characterized in that: the front that at first standard flat mirror (7) is placed on the described Hartmann wave front sensor of claim 1, measurement light source system (6) starts working, same basis is by coarse alignment detection system (C1) and observed focal beam spot of fine alignment detection system (J3) and aperture, position relation between demarcating in advance, standard flat mirror (7) is regulated, finally make on the fine alignment detection system (J3) focal beam spot and in advance calibration point overlap, note facula position in this moment of each sub-aperture as calibration point; Utilize laser instrument (16) to replace standard flat mirror (7) then, measurement light source system this moment (6) no longer works, regulate the position of laser instrument (16), allow light beam at first through small holes, focus at last on the fine alignment detection system (J3), the facula position in this moment of each sub-aperture is noted in focal beam spot and calibration point coincidence in advance, and the combined calibrating point restores the corrugated.
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| CN113639677B (en) * | 2021-07-30 | 2024-02-09 | 哈尔滨工业大学 | High-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1245904A (en) * | 1998-08-26 | 2000-03-01 | 中国科学院光电技术研究所 | Optical wave-front sensor |
| CN1465966A (en) * | 2002-06-24 | 2004-01-07 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for pulse light wavefront measurement |
| CN1601230A (en) * | 2003-09-28 | 2005-03-30 | 中国科学院光电技术研究所 | Hartmann wave front sensor in optical detection bade on microprism array |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1245904A (en) * | 1998-08-26 | 2000-03-01 | 中国科学院光电技术研究所 | Optical wave-front sensor |
| CN1465966A (en) * | 2002-06-24 | 2004-01-07 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for pulse light wavefront measurement |
| CN1601230A (en) * | 2003-09-28 | 2005-03-30 | 中国科学院光电技术研究所 | Hartmann wave front sensor in optical detection bade on microprism array |
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