CN1465966A - Hartmann wavefront sensor for pulse light wavefront measurement - Google Patents
Hartmann wavefront sensor for pulse light wavefront measurement Download PDFInfo
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- CN1465966A CN1465966A CNA021237549A CN02123754A CN1465966A CN 1465966 A CN1465966 A CN 1465966A CN A021237549 A CNA021237549 A CN A021237549A CN 02123754 A CN02123754 A CN 02123754A CN 1465966 A CN1465966 A CN 1465966A
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- ccd detector
- external trigger
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Abstract
The invention is a pulse light-wave forth measuring Hartmann wave-forth sensor, including optical matching system, wave surface division sampling array component, CCD detector, data collection circuit, external burst interface circuit and computer, the data collection circuit collecting CCD exposure information, the external burst interface circuit receiving pulse optical synchro electric signal, and producing the external burst signal of CCD exposure collection, during the exposure collection, the pulse light emits the laser to make the CCD detector collect the laser wave-forth information. It can measure not only the image difference of pulse-light optical system, but also that of continual-light optical system.
Description
Technical field
The present invention relates to a kind of optical wave-front sensor, relate in particular to a kind of Hartmann wave front sensor that is used for pulse light wavefront measurement.
Background technology
Hartmann wave front sensor is the dynamic wavefront detecting instrument of a kind of optics.Hartmann wave front sensor adopts aperture segmentation element and concentrating element that incident wavefront is divided into sub-aperture, again it is focused on the ccd detector photosensitive target surface, form spot array, by computing machine the hot spot signal that ccd detector receives is handled, obtained the corrugated error signal of incident wavefront.
Existing Hartmann wave front sensor adopts the structure of microlens array and ccd detector coupling usually.The disclosed a kind of Hartmann wave front sensor of Chinese patent application prospectus (application number 98112210.8, publication number CN1245904A) promptly adopts this structure, and being coupled by mechanical mechanism by microlens array and ccd detector constitutes.But this sensor is in optical element detection, aeromerric moasurenont etc. are used, because what light source sent is continuous light, therefore select for use common imaging CCD design to finish, do not relate to Hartmann sensor and be used for the wavefront measurement process of light-pulse generator optical system, the synchronous collection of data acquisition and pulsed light is measured.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art and a kind of Hartmann sensor that has outer synchronous triggering function, can be used for the wavefront measurement of light-pulse generator optical system is provided.
Technical solution of the present invention is: a kind of Hartmann wave front sensor of pulse light wavefront measurement, comprise the optical match system, the sampling array element is cut apart on the corrugated, ccd detector, its characteristics are: also comprise data acquisition circuit and external trigger interface circuit, data acquisition circuit is used to gather the exposure information of ccd detector output, external trigger interface circuit received pulse phototiming electric signal, and the external trigger signal of generation CCD exposure collection, the exposure of control ccd detector is gathered, during exposure is gathered, the pulsed light emission bright dipping makes ccd detector collect the laser wavefront information.
Ccd detector is elected the device that internal clock, external clock mode of operation can be provided with as, or external synchronization signal triggers exposure device.The external trigger interface circuit can be made the independently external trigger interface circuit system integration in sensor, also can make in integrated data acquisition circuit, CCD power driving circuit or the CCD Circuits System in the present invention of circuit.
When the present invention works, at first set the time-delay sequential of the light signal electric signal synchronous of pulsed light with it, make synchronous electric signal before pulsed light emission, trigger ccd detector and be in exposure collection waiting status, and in the time shutter, the pulsed light emission bright dipping makes ccd detector collect light signal, after the wavefront information of pulsed light is cut apart sampling array element cut apart sampling by the corrugated like this, transfer to computing machine, calculate the wave front data of pulsed light through the ccd detector sampling.
The present invention compared with prior art has following advantage: because the ccd detector spare that adopts the external trigger interface circuit and have the external trigger exposure function, realize synchronized sampling with pulsed light emission, like this with one have outer synchronizing function Hartmann sensor, both can measure the aberration of continuous light optical system again by the aberration of external trigger signal measurement pulsed light optical system.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention is formed synoptic diagram;
Fig. 2 is for CCD exposure sampling among the present invention and pulsed light is synchronous, the sequential chart of bright dipping;
Fig. 3 is data acquisition circuit and synchronous triggering interface circuit electrical schematic diagram among the present invention.
Embodiment
As shown in Figure 1, the embodiment of the invention comprises that optical match system 1, corrugated cut apart sampling array 2, ccd detector 3, data collecting card 4, external trigger interface circuit 5, computing machine 6, the focal plane that the array 2 of taking a sample is cut apart on the corrugated overlaps with the photosensitive target surface of ccd detector 3, sampling array element 2 is cut apart on the corrugated can adopt binary micro fresnel lens array, or continuous surface microlens array, or graded index microlens array, or binary Fresnel microprism array, continuous surface microprism array, or the microprism array of graded index.Touch the synchronous electric signal of mouthful circuit 5 received pulse light outward, and produce CCD exposure collection external trigger signal, 3 exposures of control ccd detector are gathered, data collecting card 4, and the data of its collection are input to computing machine 6.
As shown in Figure 2, pulsed light Hartmann's sampled measurements sequential chart, the synchronous electric signal of pulsed light receives through synchronous triggering interface circuit 5, and send signal controlling ccd detector 3 and expose, just launch in 3 time shutter at ccd detector through the pulsed optical signals that time-delay is provided with, ccd detector 3 is sampled measurements pulsed light wave front data synchronously, according to the wave front aberration of the calculations of offset measurand of facula mass center in each sub-aperture.
As shown in Figure 3, this figure is data acquisition circuit 4 and synchronous triggering interface circuit 5 schematic diagrams, the data bus of numeral CCD (D0～D7), clock signal (XLK), line frequency signal (LDV), rate signals (FDV) inserts data collecting card by plug J3, these signals are to adopt the differential driving mode to improve antijamming capability, U2～U4 (26LS32) is converted into one-channel signal, through interface circuit the view data of ccd detector 3 collections is write incoming frame and deposit body (CY7C1049), after one frame image data storage finished, computing machine read frame by ISA (J1) bus and deposits the image of body and do the wavefront reconstruction processing.Ccd detector 3 data write address generator, the write data sequential logic control circuit of interface circuit, and the computing machine 6 read data sequential logic control circuits and the bus converting circuit that reads and writes data are finished by the XC95288XL of Xilinx company.U7 (R1117) is the power module circuitry of XC95288XL, and plug J2 is that the program of XC95288XL is downloaded jtag interface.
External trigger interface circuit 5 is received by U6 (6N137) photoisolator, and its effect is with the isolated from power of the synchronous electric signal of pulsed laser with capture card, ccd detector 3, avoids laser oscillator to produce interference to gathering to measure.The external trigger signal imports computing machine 6 into by XC95288XL, by the time-delay sequential of computing machine 6 control CCD exposure control signals, again through XC95288XL, plug J3 control ccd detector 3 (VINIT) exposure acquisition pulse light signal.
Claims (5)
1, a kind of Hartmann wave front sensor of pulse light wavefront measurement, comprise that optical match system, corrugated cut apart sampling array element, ccd detector, it is characterized in that: also comprise data acquisition circuit, external trigger interface circuit, data acquisition circuit is used to gather the exposure information of ccd detector output, external trigger interface circuit received pulse phototiming electric signal, and the external trigger signal of generation CCD exposure collection, the exposure of control ccd detector is gathered, during exposure is gathered, the pulsed light emission bright dipping makes ccd detector collect the laser wavefront information.
2, according to the Hartmann wave front sensor of the described a kind of pulse light wavefront measurement of claim 1, it is characterized in that: described ccd detector is the device with external trigger exposure sampling control function, can control the exposure sampling sequential of CCD by external trigger pulse.
3, a kind of pulse light wavefront measurement according to claim 1 Hartmann wave front sensor, it is characterized in that: the relative light signal of described pulsed light electric signal sends in advance, receive by the external trigger interface circuit, the control ccd detector is in the exposure waiting status, the pulsed light light signal makes CCD can collect the pulsed light wavefront information in the emission of CCD exposure waiting time.
4, a kind of pulse light wavefront measurement according to claim 1 Hartmann wave front sensor, it is characterized in that: described external trigger interface circuit is made of Circuits System independently, or is integrated in ccd detector, data acquisition circuit, CCD power driving circuit or the CCD Circuits System.
5, Hartmann wave front sensor according to claim 1, it is characterized in that: sampling array element employing binary micro fresnel lens array is cut apart on described corrugated, or continuous surface microlens array, or graded index microlens array, or binary Fresnel microprism array, continuous surface microprism array, or the microprism array of graded index.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021237549A CN1207547C (en) | 2002-06-24 | 2002-06-24 | Hartmann wavefront sensor for pulse light wavefront measurement |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB021237549A CN1207547C (en) | 2002-06-24 | 2002-06-24 | Hartmann wavefront sensor for pulse light wavefront measurement |
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| CN1465966A true CN1465966A (en) | 2004-01-07 |
| CN1207547C CN1207547C (en) | 2005-06-22 |
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| CNB021237549A Expired - Fee Related CN1207547C (en) | 2002-06-24 | 2002-06-24 | Hartmann wavefront sensor for pulse light wavefront measurement |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100393105C (en) * | 2005-12-05 | 2008-06-04 | 中国科学院武汉物理与数学研究所 | Apparatus for synchronizing camera with supershort pulse laser lighting |
| CN100573081C (en) * | 2006-12-13 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wave front sensor and detection method thereof with passive type alignment function |
| CN1955701B (en) * | 2006-09-30 | 2010-10-06 | 中国科学院光电技术研究所 | Shark-Hartmann pre-sensor based on Fourier spectral filter module |
| CN1804711B (en) * | 2006-01-16 | 2011-02-09 | 中国科学院光电技术研究所 | Apparatus for improving light beam quality of solid laser by using in-chamber adaptive optical technology |
| CN101464522B (en) * | 2009-01-08 | 2011-06-29 | 西安电子科技大学 | Subaqueous target wake detection system and method based on laser wave front change |
| CN102142892A (en) * | 2010-06-30 | 2011-08-03 | 华为技术有限公司 | Method for producing probe pulse and coherent light time-domain reflector |
| CN104335021A (en) * | 2012-05-30 | 2015-02-04 | 株式会社尼康 | Method and device for measuring wavefront, and exposure method and device |
| CN105699056A (en) * | 2016-02-22 | 2016-06-22 | 中国科学院上海光学精密机械研究所 | Device and method for detection of color glass filter intensity and phase transmission distribution |
| CN109581294A (en) * | 2018-11-29 | 2019-04-05 | 中国船舶工业系统工程研究院 | A kind of positioning device and method based on pulse laser |
-
2002
- 2002-06-24 CN CNB021237549A patent/CN1207547C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100393105C (en) * | 2005-12-05 | 2008-06-04 | 中国科学院武汉物理与数学研究所 | Apparatus for synchronizing camera with supershort pulse laser lighting |
| CN1804711B (en) * | 2006-01-16 | 2011-02-09 | 中国科学院光电技术研究所 | Apparatus for improving light beam quality of solid laser by using in-chamber adaptive optical technology |
| CN1955701B (en) * | 2006-09-30 | 2010-10-06 | 中国科学院光电技术研究所 | Shark-Hartmann pre-sensor based on Fourier spectral filter module |
| CN100573081C (en) * | 2006-12-13 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wave front sensor and detection method thereof with passive type alignment function |
| CN101464522B (en) * | 2009-01-08 | 2011-06-29 | 西安电子科技大学 | Subaqueous target wake detection system and method based on laser wave front change |
| US8831422B2 (en) | 2010-06-30 | 2014-09-09 | Huawei Technologies Co., Ltd. | Method for generating a probe pulse and coherent optical time domain reflectometer |
| CN102142892A (en) * | 2010-06-30 | 2011-08-03 | 华为技术有限公司 | Method for producing probe pulse and coherent light time-domain reflector |
| CN102142892B (en) * | 2010-06-30 | 2014-12-17 | 华为技术有限公司 | Method for producing probe pulse and coherent light time-domain reflector |
| CN104335021A (en) * | 2012-05-30 | 2015-02-04 | 株式会社尼康 | Method and device for measuring wavefront, and exposure method and device |
| CN104335021B (en) * | 2012-05-30 | 2020-04-07 | 株式会社尼康 | Wavefront measuring method and apparatus, and exposure method and apparatus |
| CN105699056A (en) * | 2016-02-22 | 2016-06-22 | 中国科学院上海光学精密机械研究所 | Device and method for detection of color glass filter intensity and phase transmission distribution |
| CN105699056B (en) * | 2016-02-22 | 2019-10-18 | 中国科学院上海光学精密机械研究所 | Colour glass filter intensity and phase penetrate distribution detecting device and method |
| CN109581294A (en) * | 2018-11-29 | 2019-04-05 | 中国船舶工业系统工程研究院 | A kind of positioning device and method based on pulse laser |
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| CN1207547C (en) | 2005-06-22 |
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