CN100567563C - 化学蒸镀装置 - Google Patents
化学蒸镀装置 Download PDFInfo
- Publication number
- CN100567563C CN100567563C CNB2005101233372A CN200510123337A CN100567563C CN 100567563 C CN100567563 C CN 100567563C CN B2005101233372 A CNB2005101233372 A CN B2005101233372A CN 200510123337 A CN200510123337 A CN 200510123337A CN 100567563 C CN100567563 C CN 100567563C
- Authority
- CN
- China
- Prior art keywords
- reactant gases
- nozzle
- reaction chamber
- operation thing
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050057623A KR100686724B1 (ko) | 2005-06-30 | 2005-06-30 | 화학기상증착장치 |
KR1020050057623 | 2005-06-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1891855A CN1891855A (zh) | 2007-01-10 |
CN100567563C true CN100567563C (zh) | 2009-12-09 |
Family
ID=37597045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101233372A Active CN100567563C (zh) | 2005-06-30 | 2005-11-23 | 化学蒸镀装置 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100686724B1 (ko) |
CN (1) | CN100567563C (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007026349A1 (de) * | 2007-06-06 | 2008-12-11 | Aixtron Ag | Aus einer Vielzahl diffusionsverschweißter Scheiben bestehender Gasverteiler |
JP2023509475A (ja) * | 2020-01-06 | 2023-03-08 | ラム リサーチ コーポレーション | 内部輪郭を有するフェースプレートを備えるシャワーヘッド |
CN111321463B (zh) * | 2020-03-06 | 2021-10-15 | 北京北方华创微电子装备有限公司 | 反应腔室 |
WO2023096817A1 (en) * | 2021-11-29 | 2023-06-01 | Lam Research Corporation | Showerhead faceplate configurations |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980022644U (ko) * | 1996-10-29 | 1998-07-25 | 문정환 | 화학기상증착장치의 가스 샤워 헤드 |
JP3341619B2 (ja) * | 1997-03-04 | 2002-11-05 | 東京エレクトロン株式会社 | 成膜装置 |
JP3595853B2 (ja) * | 1999-03-18 | 2004-12-02 | 日本エー・エス・エム株式会社 | プラズマcvd成膜装置 |
JP4327319B2 (ja) | 1999-12-24 | 2009-09-09 | 株式会社アルバック | 雛壇形シャワーヘッド、及びそのシャワーヘッドを用いた真空処理装置 |
JP2002069650A (ja) | 2000-08-31 | 2002-03-08 | Applied Materials Inc | 気相堆積方法及び装置並びに半導体装置の製造方法及び装置 |
-
2005
- 2005-06-30 KR KR1020050057623A patent/KR100686724B1/ko active IP Right Grant
- 2005-11-23 CN CNB2005101233372A patent/CN100567563C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR100686724B1 (ko) | 2007-02-26 |
CN1891855A (zh) | 2007-01-10 |
KR20070002218A (ko) | 2007-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102222947B1 (ko) | 화학 증착 장치 | |
US6884296B2 (en) | Reactors having gas distributors and methods for depositing materials onto micro-device workpieces | |
US5728223A (en) | Reactant gas ejector head and thin-film vapor deposition apparatus | |
US5624498A (en) | Showerhead for a gas supplying apparatus | |
CN100426463C (zh) | 成膜装置 | |
TW202012695A (zh) | 具有氣隙隔離充氣室的噴淋頭及高架式隔離氣體分配器 | |
KR20030007162A (ko) | 가스 전달 계측관 | |
CN111065760A (zh) | 紊流涡旋多区前体汽化器 | |
CN100567563C (zh) | 化学蒸镀装置 | |
KR102225261B1 (ko) | 박막 증착 장치를 위한 유체 분배 디바이스, 관련 장치 및 방법 | |
US20060185590A1 (en) | High temperature chemical vapor deposition apparatus | |
KR20180072551A (ko) | 가스 처리 장치 및 가스 처리 방법 | |
US9644264B2 (en) | Evaporation method and film deposition method | |
JP2009516077A (ja) | Ald反応容器 | |
US20080000424A1 (en) | Showerhead for a Gas Supply Apparatus | |
KR100630647B1 (ko) | 박막형성장치, 및 질화텅스텐 박막 제조방법 | |
KR20100004762A (ko) | 화학 기상 증착 장치 | |
KR100795487B1 (ko) | 층류유동제어장치 및 이를 구비한 화학기상증착반응기 | |
US10538843B2 (en) | Vaporizer and thin film deposition apparatus including the same | |
KR102132295B1 (ko) | 가스분배판, 반응챔버 및 이를 포함하는 기판처리장치 | |
KR101670494B1 (ko) | 화학기상증착장치 | |
EP2067877A1 (en) | Coating device and method of producing an electrode assembly | |
CN213624369U (zh) | 气体喷洒部件以及薄膜沉积装置 | |
KR102248048B1 (ko) | 가스 분배장치 | |
KR20180124338A (ko) | 기화기 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |