CN100565094C - 基于改变频率的干涉测量法 - Google Patents

基于改变频率的干涉测量法 Download PDF

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Publication number
CN100565094C
CN100565094C CNB038025809A CN03802580A CN100565094C CN 100565094 C CN100565094 C CN 100565094C CN B038025809 A CNB038025809 A CN B038025809A CN 03802580 A CN03802580 A CN 03802580A CN 100565094 C CN100565094 C CN 100565094C
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CN
China
Prior art keywords
interferogram
sampling
frequency
wavelength
phase shift
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Expired - Lifetime
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CNB038025809A
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English (en)
Chinese (zh)
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CN1692268A (zh
Inventor
M·J·梅特
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COHERIX CORP
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COHERIX CORP
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Publication of CN1692268A publication Critical patent/CN1692268A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
CNB038025809A 2002-01-25 2003-01-23 基于改变频率的干涉测量法 Expired - Lifetime CN100565094C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35173002P 2002-01-25 2002-01-25
US60/351,730 2002-01-25

Publications (2)

Publication Number Publication Date
CN1692268A CN1692268A (zh) 2005-11-02
CN100565094C true CN100565094C (zh) 2009-12-02

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ID=27663019

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038025809A Expired - Lifetime CN100565094C (zh) 2002-01-25 2003-01-23 基于改变频率的干涉测量法

Country Status (6)

Country Link
US (2) US7317541B2 (enExample)
EP (1) EP1470387A1 (enExample)
JP (1) JP2005516205A (enExample)
KR (1) KR20040103913A (enExample)
CN (1) CN100565094C (enExample)
WO (1) WO2003064967A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
US7359065B2 (en) * 2005-07-14 2008-04-15 Coherix, Inc. Method of combining holograms
US7456976B2 (en) * 2005-07-29 2008-11-25 Coherix, Inc. Statistical method of generating a synthetic hologram from measured data
US7440114B2 (en) * 2005-12-12 2008-10-21 Coherix, Inc. Off-axis paraboloid interferometric mirror with off focus illumination
US20070133008A1 (en) * 2005-12-12 2007-06-14 Coherix, Inc. Optical fiber delivered reference beam for interferometric imaging
CN100460857C (zh) * 2006-04-13 2009-02-11 中山大学 一种基于动态稳定扫描技术的傅里叶光谱仪
US20130250383A1 (en) * 2012-03-21 2013-09-26 Coherix, Inc. Apparatus for multi-wavelength holographic imaging
KR102386350B1 (ko) 2022-01-28 2022-04-14 동양특수콘크리트 (주) 세로형 수로관

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1055820A (zh) * 1991-06-05 1991-10-30 清华大学 外差干涉仪信号处理——相位和相位整数测量法
CN1147627A (zh) * 1995-04-06 1997-04-16 载歌公司 利用大的等效波长测量物体表面轮廓的方法及系统
US5706085A (en) * 1995-08-03 1998-01-06 Blossey; Stefan G. Method for the non-contact rapid and accurate acquisition of the surface topology of objects

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639877A (ja) * 1986-06-30 1988-01-16 Nec Corp ３次元計測方法
US5926277A (en) * 1987-09-08 1999-07-20 Erim International, Inc. Method and apparatus for three-dimensional imaging using laser illumination interferometry
US5777742A (en) * 1993-03-11 1998-07-07 Environmental Research Institute Of Michigan System and method for holographic imaging with discernible image of an object
JP3441508B2 (ja) * 1994-05-12 2003-09-02 ペンタックス株式会社 半導体レーザ位相シフト干渉計における位相検出方法
US5880841A (en) * 1997-09-08 1999-03-09 Erim International, Inc. Method and apparatus for three-dimensional imaging using laser illumination interferometry
US5907404A (en) * 1997-09-08 1999-05-25 Erim International, Inc. Multiple wavelength image plane interferometry
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
JP4607311B2 (ja) * 2000-11-22 2011-01-05 富士フイルム株式会社 開口合成による大型被観察体の波面形状測定方法および測定波面形状補正方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1055820A (zh) * 1991-06-05 1991-10-30 清华大学 外差干涉仪信号处理——相位和相位整数测量法
CN1147627A (zh) * 1995-04-06 1997-04-16 载歌公司 利用大的等效波长测量物体表面轮廓的方法及系统
US5706085A (en) * 1995-08-03 1998-01-06 Blossey; Stefan G. Method for the non-contact rapid and accurate acquisition of the surface topology of objects

Also Published As

Publication number Publication date
US20030142317A1 (en) 2003-07-31
CN1692268A (zh) 2005-11-02
JP2005516205A (ja) 2005-06-02
WO2003064967A1 (en) 2003-08-07
US7317541B2 (en) 2008-01-08
KR20040103913A (ko) 2004-12-09
EP1470387A1 (en) 2004-10-27
US20050002041A1 (en) 2005-01-06

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