CN100541756C - The method for repairing and mending of electrode for electrostatic attraction - Google Patents
The method for repairing and mending of electrode for electrostatic attraction Download PDFInfo
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- CN100541756C CN100541756C CNB2007101361933A CN200710136193A CN100541756C CN 100541756 C CN100541756 C CN 100541756C CN B2007101361933 A CNB2007101361933 A CN B2007101361933A CN 200710136193 A CN200710136193 A CN 200710136193A CN 100541756 C CN100541756 C CN 100541756C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
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- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
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Abstract
The invention provides a kind of method for repairing and mending, can simple and easy and suitably repair the damaged position of electrode for electrostatic attraction.It forms the recess (51) of taper to cutting around the crackle (100).Use coating apparatus (202) spraying plating insulant (60) then, thereby bury recess (51).Then the outstanding part of imbedding in the recess (51) of insulant (60) is cut, make flattening surface, repair overlay film (61) thereby form.
Description
Technical field
The present invention relates to the method for repairing and mending of electrode for electrostatic attraction.In particular in the manufacture process of for example flat-panel monitor (FPD:Flat Panel Display) etc., keep the method for repairing and mending of the electrode for electrostatic attraction that substrate such as glass substrate uses for absorption.
Background technology
In the manufacture process of FPD, can carry out dry ecthing (Dry Etching), sputtering method, CVD (Chemical Vapor Deposition: chemical vapour deposition (CVD)) etc. plasma treatment to glass substrate as handled object.For example: configuration pair of parallel plate electrode (upper electrode and lower electrode) in chamber, after being positioned in glass substrate on the pedestal (substrate-placing platform) that works as lower electrode, in chamber, import and handle gas, simultaneously apply High frequency power at least one electrode, between electrode, form high-frequency electric field, form the plasma of handling gas by this high-frequency electric field, glass substrate is implemented plasma treatment.At this moment, glass substrate is adsorbed fixing by the electrode for electrostatic attraction that is arranged on the pedestal.
As such electrode for electrostatic attraction, known have an electrode that for example has following structure: laminated insulation layer, electrode layer and insulating barrier successively on the base material that conductive materials such as utilizing aluminium forms.In this case, produce coulomb (coulomb) power, can adsorb the fixing glass substrate by apply voltage to this electrode layer.
The electrode for electrostatic attraction of above-mentioned this structure, owing to reasons such as falling of for example damage in insulation, utensil have produced crackle or disappearance etc. when damaged on the surface of electrode for electrostatic attraction or electrode layer, can cause adsorption capacity to reduce significantly in damage state based placement.Therefore, there had electrode layer with electrode for electrostatic attraction to be separated into to be a plurality of, even damage in insulation has taken place a part, also can guarantee the motion of absorption property, can only change the not motion of good part (for example patent documentation 1,2).
But in fact as described in the above-mentioned patent documentation 1,2, the electrode for electrostatic attraction of in advance electrode layer being cut apart formation almost is not practical.Therefore, when electrode for electrostatic attraction has taken place under the damaged situation, normally wholely replace electrode for electrostatic attraction, rather than carry out sectional repair.Its reason can exemplify as follows: carry out under the situation of part repairing, if the repairing at damaged position is improper, the functional rehabilitation of electrode for electrostatic attraction gets insufficient, not only can not obtain gratifying absorption and keep performance, and also might produce paradoxical discharge in the position of repairing.
In addition, also can enumerate: because there is multiple figure in the breakage of electrode for electrostatic attraction, for example: checking, the deep torn grain that arrives electrode layer, big crackle.A large amount of crackles in very large range etc. are difficult to adopt the repairing of a kind of method for repairing and mending realization at the breakage of all patterns.
For the above-mentioned reasons, at present,, also all be that the integral body of carrying out electrode for electrostatic attraction is replaced even only produced under the situation of little crackle etc., therefore cause the maintenance cost of the substrate board treatment of the Etaching device that disposes electrode for electrostatic attraction etc. to increase.
[patent documentation 1] Japanese patent laid-open 5-291562 communique (Fig. 1 etc.)
[patent documentation 2] Japan Patent spy opens 2005-51217 communique (Fig. 3 etc.)
Summary of the invention
In view of the foregoing, problem of the present invention is, provide a kind of can method for repairing and mending simple and easy and that suitably the damaged position of electrode for electrostatic attraction is repaired.
In order to solve above-mentioned problem, first viewpoint of the present invention provides a kind of method for repairing and mending of electrode for electrostatic attraction, this electrode for electrostatic attraction is formed with the overlay film on covering substrates surface, this overlay film comprises: electrode layer, at first insulating barrier of this electrode layer lower floor with at second insulating barrier of above-mentioned electrode layer, by applying voltage to above-mentioned electrode layer, absorption keeps substrate
This method for repairing and mending comprises: the cutting process that cuts and remove bad position and the overlay film around it; With
Form the overlay film step for regeneration of new repairing overlay film in the part that is removed by above-mentioned cutting.
In above-mentioned first viewpoint, can utilize insulating material to form above-mentioned repairing overlay film, perhaps, also can form by laminated insulation material and conductive material.Under these situations, can use the material different as above-mentioned insulating material with the material that constitutes above-mentioned first insulating barrier and above-mentioned second insulating barrier.
In addition, preferably in above-mentioned cutting process, described overlay film is cut and forms recess, in described overlay film step for regeneration,, form described repairing overlay film at described recess by spraying plating.In this case, in above-mentioned cutting process, preferably do not cut above-mentioned electrode layer and form above-mentioned recess, perhaps the mode that forms taper with integral body forms above-mentioned recess.
In addition, the electrode for electrostatic attraction that uses in the manufacturing of the preferred flat-panel monitor of electrode for electrostatic attraction.In this case, also can be the electrode that glass substrate is adsorbed maintenance.
According to method for repairing and mending of the present invention, can produce under the damaged situation at the overlay film of electrode for electrostatic attraction, adopt easy method to carry out sectional repair according to damaged degree.Therefore, do not need electrode for electrostatic attraction is carried out integral replacing, can reduce the cost of maintenance.Keep the electrode for electrostatic attraction of large-scale FPD substrate for absorption, do not need to carry out integral replacing and can carry out sectional repair, therefore the cost that can save becomes big, advantageous particularly.
Description of drawings
Fig. 1 is the sectional view that expression is provided with the plasma-etching apparatus of the electrostatic chuck that can be suitable for method for repairing and mending of the present invention.
Fig. 2 is used to illustrate the sectional view that produces the electrostatic chuck that utilizes the breakage that method for repairing and mending of the present invention can repair.
Fig. 3 is the schematic diagram of process flow of the method for repairing and mending of expression first embodiment of the invention.
Fig. 4 is the schematic diagram of process flow of the method for repairing and mending of expression second embodiment of the invention.
Fig. 5 is the enlarged drawing that is used to illustrate the protuberance that forms on the electrostatic chuck surface.
Fig. 6 is the schematic diagram of process flow of the method for repairing and mending of expression third embodiment of the invention.
Fig. 7 is the schematic diagram of process flow of the method for repairing and mending of expression four embodiment of the invention.
Fig. 8 is the schematic diagram of the repairing state of explanation sidepiece insulating barrier, (a) is the main position plane graph of the state behind the expression sectional repair, (b) is the plane graph of the state after the expression gamut is repaired.
Fig. 9 is the schematic diagram of process flow of the method for repairing and mending of expression fifth embodiment of the invention.
Symbol description
1 plasma-etching apparatus
2 chambers
3 insulation boards
4 pedestals
5 insulating parts
11 spray heads
20 exhaust apparatus
25 high frequency electric sources
40 electrostatic chucks
41 base materials
42 first insulating barriers
43 electrodes
44 second insulating barriers
45 sidepiece insulating barriers
50 substrates keep face
60,60a insulant
61,65,66,67,68,69,70,71 repair overlay film
100,100a, 101,102,103a, 103b, 104 crackles
Embodiment
Following with reference to accompanying drawing, the preferred embodiment of the present invention is described.Fig. 1 is the sectional view of expression as the plasma-etching apparatus of an example of the substrate board treatment with the electrode for electrostatic attraction that can be suitable for method for repairing and mending of the present invention.As shown in Figure 1, plasma-etching apparatus 1 constitutes capacitive coupling type parallel flat plasma-etching apparatus, and its FPD as handled object to rectangleization carries out etching with substrate G such as glass substrates.Herein, example illustrates following FPD: LCD (LCD), light-emitting diode (LED) display, electroluminescence (ElectroLuminescence; EL) display, fluorescent display tube (Vacuum Fluorescent Display; VFD) display, plasma display (PDP) etc.In addition, substrate board treatment of the present invention is not to only limit to plasma-etching apparatus.
This plasma Etaching device 1 has for example surperficial by the aluminium of being handled (anodized) by acidproof calorize chamber 2 that constitute, that be shaped to the angle barrel shape.Bottom in this chamber 2 is provided with the prism-shaped insulation board 3 that is made of insulating material, and this insulation board 3 is provided with the pedestal 4 that is used for mounting substrate G.As the pedestal 4 of substrate-placing platform, have pedestal base material 4a, be arranged on the electrostatic chuck 40 on the pedestal base material 4a as electrode for electrostatic attraction.And the periphery of pedestal base material 4a is insulated part 5 insulation coverings.
Above-mentioned insulation board 3 and pedestal base material 4a also comprise electrostatic chuck 40, are formed with the gas passage 9 that connects them.With heat-conducting gas, for example He gas etc. supplies to the back side as the substrate G of handled object by this gas passage 9.
Promptly, with heat-conducting gas supply gas path 9, the gas that forms by the border at the base material 41 of pedestal base material 4a and electrostatic chuck 40 holds groove 9a, temporarily after the horizontal direction diffusion, by being formed at the gas supply company through hole 9b in the electrostatic chuck 40, spray to the dorsal part of substrate G from the surface of electrostatic chuck 40.Thus, the cold and hot substrate G that passes to of pedestal 4, substrate G maintains the temperature of regulation.
Inside at pedestal base material 4a is provided with heat transfer medium chamber 10.In this heat transfer medium chamber 10, for example importing by heat transfer medium ingress pipe 10a, fluorine is heat transfer mediums such as liquid, and discharge by heat transfer medium drain 10b, by this circulation, for example make it cold and hotly be passed to substrate G from pedestal base material 4a by above-mentioned heat transfer medium.
Above said base 4, parallel relative with this pedestal 4, be provided with the spray head 11 that works as upper electrode.Spray head 11 is by the upper support of chamber 2, and inside has inner space 12, simultaneously is formed with the squit hole 13 that gases are handled in a plurality of ejections on the face relative with pedestal 4.These spray head 11 ground connection are with pedestal 4 parallel plate electrode that partners.
Be provided with gas introduction port 14 above the spray head 11, be connected with on this gas introduction port 14 and handle gas supply pipe 15, this handles gas supply pipe 15 by valve 16 and mass flow controller (mass flow controller) 17 connection processing gas supply sources 18.Be used for etched processing gas from handling 18 supplies of gas supply source.As handling gas, for example can use halogen is gas, O
2Gas, Ar gas etc., usually with the gas that uses in the art as handling gas.
The lower sidewall of above-mentioned chamber 2 is connected with blast pipe 19, and this blast pipe 19 is connected with exhaust apparatus 20.Exhaust apparatus 20 has turbomolecular pump (turbo-molecular pump) equal vacuum pump, can reach the reduced atmosphere of regulation to carrying out vacuum exhaust in the chamber 2 thus.In addition, on the sidewall of chamber 2, also be provided with substrate and move into and take out of mouthfuls 21 and open and close this substrate and move into and take out of mouthfuls 21 gate valve 22, under the state that this gate valve 22 is opened, can between the load locking room (not shown) of adjacency, carry out the conveyance of substrate G.
Be connected with the supply lines 23 that is used for supply high frequency electric power on the pedestal 4, be connected with adaptation 24 and high frequency electric source 25 on this supply lines 23.Supply with for example High frequency power of 13.56MHz of pedestal 4 from high frequency electric source 25.
Next, the work of treatment of the plasma-etching apparatus 1 of this structure is described.At first, after opening gate valve 22, move into by substrate and to take out of mouthful 21 never illustrated load locking rooms and will move in the chamber 2, be positioned on the electrostatic chuck 40 that is formed on the pedestal 4 as the substrate G of handled object.Under this situation, the handing-over of substrate G is by inserting the inside of logical pedestal 4, carrying out from the lifter pin (lift pin) (not shown) that pedestal 4 outstanding modes of submerging are provided with.Thereafter, closing gate valve 22 by carrying out vacuum exhaust in 20 pairs of chambers 2 of exhaust apparatus, reaches the specified vacuum degree.
Thereafter, open valve 16, by the flow of mass flow controller 17 adjustment from the processing gas of handling gas supply source 18, by handling the inner space 12 of gas supply pipe 15, gas introduction port 14 importing spray heads 11, spray uniformly to substrate G by squit hole 13, the pressure in the chamber 2 maintains setting again.
Under this state, apply High frequency power by adaptation 24 to pedestal 4 from high frequency electric source 25, between as the pedestal 4 of lower electrode and spray head 11, produce high-frequency electric field, handle gas, on substrate G, implement etch processes thus by the plasmaization of dissociating as upper electrode.At this moment, by from DC power supply 26, the electrode 43 of electrostatic chuck 40 is applied assigned voltage, by for example coulomb (coulomb) power, substrate G is adsorbed and remains on the electrostatic chuck 40.And, by heat-conducting gas being supplied to the rear side of substrate G, can carry out adjustment effectively thus by gas passage 9.
As above-mentioned implemented etch processes after, stop to apply High frequency power from high frequency electric source 25, after stopping gas and importing, the hypotensions in the chamber 2 are to the pressure of regulation.Then, open gate valve 22, move into by substrate and take out of mouthfuls 21 substrate G taken out of not shown load locking room from chamber 2, the etch processes of substrate G finishes thus.Like this, by electrostatic chuck 40 Electrostatic Absorption substrate G, while can carry out the etch processes that adjustment is carried out substrate G simultaneously.
Next, with reference to Fig. 2～Fig. 8 method for repairing and mending of the present invention is elaborated.
(first execution mode)
Damage state based in the expression electrostatic chuck 40 of Fig. 2 signal.Among Fig. 2, the position that symbol A surrounds is illustrated in the state of the near surface generation checking 100 of second insulating barrier 44.And the position that symbol B surrounds represents that the border up to second insulating barrier 44 and electrode 43 cracks the state of 100a.Thus, take place also can carry out slight repairing under the situation of more slight breakage till in second insulating barrier 44.Below, illustrate the example of the repairing of carrying out crackle 100.
The process flow of Fig. 3 (a)～(e) expression mended crack 100.The part that the symbol A of displayed map 2 is amplified in Fig. 3 (a) expression, the i.e. figure of crackle 100.Crackle 100 keeps face 50 to form towards the thickness direction of second insulating barrier 44 of base material 41 at the substrate from electrostatic chuck 40 surfaces, and no show electrode 43 stops in the way of second insulating barrier 44.When carrying out this breakage (crackle 100) and repair, shown in Fig. 3 (b), at first use cutting unit 201 cutting crackles 100 such as door type cutter for example around, form recess 51.This recess 51 is preferably formed and is taper (mortar shape), and does not reach electrode 43.
Then, shown in Fig. 3 (c), use coating apparatus 202 spraying plating insulants 60, to bury recess 51.This insulant 60 is preferred to adopt the insulating material identical with second insulating barrier 44, for example aluminium oxide (Al
2O
3) wait pottery, but the synthetic resin that for example epoxy (epoxy) is, organosilicon (si1icone) is etc. etc. also can be used and second insulating barrier, 44 different types of insulating material.
In addition, can in recess 51, fill insulant 60 by for example manual operation.Synthetic resin such as under this situation, preferred use possesses the insulating material of insulating properties and adhesiveness two aspect characteristics, and for example preferred epoxy (epoxy) is, organosilicon (si1icone) is.By in recess 51, filling insulants such as having fusible synthetic resin; emergency processing is carried out at the use scene that can be implemented in plasma-etching apparatus 1, cuts down significantly because the shutdown phenomenon (down time) of the bad plasma-etching apparatus that causes 1 of electrostatic chuck 40.In recess 51, imbed the method for repairing and mending of insulant 60 like this, the emergency processing of carrying out at the use scene of plasma-etching apparatus 1 has very high value, except emergency processing, can also be applicable to the situation the when area of for example repairing the position is smaller.
Then, shown in Fig. 3 (d), after burying recess 51, adopt cutting unit 201 etc., make the flattening surface of the ledge of the insulant 60 that forms by the spraying plating mode.Thus, shown in Fig. 3 (e), form and the roughly consistent repairing overlay film 61 in the surface of second insulating barrier 44, the repairing at damaged position is finished.Wherein, as long as the surface of repairing overlay film 61 is more outstanding unlike the surface of second insulating barrier 44.
According to present embodiment,, can finish the sectional repair of electrostatic chuck 40 by the so easy method of the formation of removing and repairing tunicle 61 of utilizing the bad position cutting to finish.Thereby, no longer need because local bad problem and integral replacing electrostatic chuck 40 can reduce maintenance cost significantly.
In addition, the method for repairing and mending by utilizing present embodiment should acute repairing as the use scene of plasma-etching apparatus 1, can cut down the shutdown phenomenon (down time) of the substrate board treatment of the Etaching device that is equipped with electrostatic chuck 40 etc. significantly.
In addition, situation for the crackle 101a (the symbol B of Fig. 2) that repairs the border that arrives second insulating barrier 44 and electrode 43, as long as cut up to the bottom of the recess 51 in Fig. 3 (b) and expose electrode 43, the wall out of plumb of the preferred cutting tip of shape (recess 51) of this moment, and elongated from the distance of the surface process of electrode 43 to second insulating barriers 44, cut to can fully guaranteeing the shape of insulation property.Beyond above-mentioned, can repair to the step of (e) according to Fig. 3 (b).
(second execution mode)
Fig. 4 (a) is the enlarged drawing of the scope that comprised of the symbol C among Fig. 2, and expression produces the surface from second insulating barrier 44, arrives the state of crackle 101 of the degree of depth of first insulating barrier 42 by electrode 43.And, take place under the not withstand voltage situation also identical in first insulating barrier 42.
Under the situation of the crackle 101 of the degree of depth of generation through electrode 43 arrival first insulating barrier 42, shown in Fig. 4 (b), use cutting unit 201, begin second insulating barrier 44, electrode 43, first insulating barrier 42 are cut, form recess 52 thus from the surface.Recess 51 in the method for repairing and mending of these recess 52 to the first execution modes is darker, and diameter is bigger.In addition, darker for the crackle 101 that forms, run through the situation that the full depth direction of first insulating barrier 42 forms, cut and expose base material 41 up to the bottom of recess 52 and get final product.
When utilizing cut to form recess 52, preferred recess 52 forms: enlarge to the surface of second insulating barrier 44 side from its bottom beginning, integral body forms taper (mortar shape).That is, the sidewall 52a of recess 52 is not from the bottom vertical of recess 52 upwards, is the predetermined angular θ that surpass 90 degree and be formed inclinedly.This angle θ is different and different according to the degree of depth of recess 52, and preference is 135 degree according to appointment.Tilt by the sidewall 52a that makes recess 52 like this, can obtain the distance (that is, length) of sufficient sidewall 52a, can improve the insulation patience of repairing the position thus from electrode 43 1 sides to the surface of electrostatic chuck 40.And recess 52 can be unitary tapered shape, also can begin to have cutting and be horizontal part from the way of for example angled side walls 52a.
Then, shown in Fig. 4 (c), use coating apparatus 202 spraying plating insulant 62, conductive film 63, insulant 64 successively, stacked formation sputtered films of bismuth buries recess 52.At this moment, insulant 62,64 can use and first insulating barrier 42 and second insulating barrier, 44 identical materials, for example aluminium oxide (A1
2O
3) waiting pottery, also can use and first insulating barrier 42 or second insulating barrier, 44 different types of insulating material, for example zirconia (ZrO
2), forsterite (M2S; 2MgOSiO
2), yttrium fluoride (YF
3) etc.In addition, can use with electrode 43 identical materials for example tungsten (W), molybdenum (Mo) etc. as conductive film 63.
In addition, can not form conductive film 63, and only in recess 52, fill insulant by for example manual operation.In this case, the preferred insulating material with insulating properties and adhesiveness two specific characters that uses for example preferably uses synthetic resin such as epoxy (epoxy) is, organosilicon (si1icone) is.Like this only imbed the method for repairing and mending of insulant, the emergency processing as at the use scene of plasma-etching apparatus 1 has very high value, can also be applicable to the situation the when area of for example repairing the position is smaller except emergency processing.
Then, after recess 52 is buried, shown in Fig. 4 (d), adopt cutting unit 201, contrast the insulant of giving prominence to above second insulating barrier 44 64 and cut, make flattening surface.Thus, shown in Fig. 4 (e), form and the roughly consistent repairing overlay film 65 in the surface of second insulating barrier 44, the repairing at damaged position is finished.Wherein, as long as the surface of repairing overlay film 65 is more outstanding unlike the surface of second insulating barrier 44.
Also identical in the present embodiment with first execution mode, by the so easy method of the formation of removing and repairing overlay film of utilizing the bad position cutting to finish, can carry out the sectional repair of electrostatic chuck 40, therefore, the local bad problem that produces no longer needs integral replacing electrostatic chuck 40, can reduce maintenance cost significantly.In addition,, can carry out the emergency processing at the use scene of plasma-etching apparatus 1, can cut down significantly because the shutdown phenomenon (downtime) of the bad plasma-etching apparatus that causes 1 of electrostatic chuck 40 by filling insulant to recess 52.
And, in above-mentioned first execution mode and second execution mode, if forming a large amount of protuberances (kick) 53 on the substrate maintenance face 50 (surface of second insulating barrier 44) of electrostatic chuck 40 is used for below the supporting substrate G, in this case, as shown in Figure 5, the height h of the protuberance 54 of the preferred new repairing overlay film 61 (perhaps repairing overlay film 65) that forms
1Height h than the original protuberance 53 that forms on the surface of second insulating barrier 44
0Low.This be because: if by repairing the height h of the new protuberance 54 that forms
1The height h of the protuberance 53 that forms in the zone that does not have to repair than periphery
0Height causes the bearing height below the substrate G inhomogeneous, may cause the inhomogeneous of contents processings such as etching.
(the 3rd execution mode)
Fig. 6 (a) is other examples about the breakage of electrostatic chuck 40, is illustrated in the wide region interior (with the position of representing with symbol D among the figure) of the near surface of second insulating barrier 44, produces the state of a large amount of checkings 102.Under these circumstances, shown in Fig. 6 (b), carry out the integral body cutting since the surface of second insulating barrier 44, thickness is according to the rules removed the superficial layer of second insulating barrier 44 that is formed with crackle 102.
Then, shown in Fig. 6 (c), spraying plating is carried out on the surface of using 202 pairs of coating apparatus to remove behind the superficial layer of second insulating barrier 44, forms new repairing overlay film 66 on the surface of second insulating barrier 44, finishes repairing thus.The depositing materials of this moment preferably uses the insulating material with second insulating barrier, 44 identical materials, for example aluminium oxide (Al
2O
3) wait pottery.In addition, also can use and second insulating barrier, 44 different types of insulating material, for example zirconia (ZrO
2), forsterite (M2S; 2MgOSiO
2), yttrium fluoride (YF
3) wait as depositing materials.
In the present embodiment, the cutting of the superficial layer by utilizing second insulating barrier 44 is finished removes and utilizes the so easy method of formation of the repairing overlay film that spraying plating finishes, can carry out the sectional repair of electrostatic chuck 40, therefore, no longer need integral replacing electrostatic chuck 40, can reduce maintenance cost significantly.
(the 4th execution mode)
Fig. 7 (a) is other damage state based examples of electrostatic chuck 40, is illustrated in the state that has produced crackle 103a, 103b on the sidepiece insulating barrier 45 of the sidepiece (with the position of representing with symbol E, symbol F among the figure) that covers electrostatic chuck 40.Cracking on the sidepiece insulating barrier 45 under the situation of 103a, 103b, shown in Fig. 7 (b), use cutting unit 201, the entire circumference of counter-lateral quadrents insulating barrier 45 is cut, and the sidepiece overlay film integral body that will comprise the electrostatic chuck 40 at the position that is formed with crackle 103a, 103b is removed.
Then, shown in Fig. 7 (c), use coating apparatus 202, the electrostatic chuck 40 of removing sidepiece insulating barrier 45 is carried out spraying plating, form new sidepiece insulating barrier 67, finish repairing thus.Depositing materials preferably adopts the insulating material with original sidepiece insulating barrier 45 identical materials, for example aluminium oxide (Al when forming this sidepiece insulating barrier 67
2O
3) wait pottery (ceramics).In addition, also can use and original sidepiece insulating barrier 45 different types of insulating material, for example zirconia (ZrO
2), forsterite (M2S; 2MgOSiO
2), yttrium fluoride (YF
3) wait as depositing materials.
Herein, remove the entire circumference of sidepiece insulating barrier 45, forming the reasons are as follows of sidepiece insulating barrier 67: Fig. 8 (a) is to schematically show the sectional repair methods such as landfill that adopt local spraying plating and insulant, has repaired the plane graph at the main position of state after the later repairing of crackle 103a, the 103b at the represented position of symbol E and symbol F among Fig. 7 (a).Shown in this Fig. 8 (a), crackle 103a, the 103b in counter-lateral quadrents insulating barrier 45 carried out under the situation of sectional repair, forms border L between insulant 60a and its sidepiece insulating barrier of repairing 45 on every side.If form the border L that extends from the outside of electrode 43 1 side direction electrostatic chucks 40 like this, produce electric leakage along this border L easily.Therefore, preferred employing can not form the method for repairing and mending of such border L, therefore, in the present embodiment, do not carry out sectional repair at sidepiece insulating barrier 45, after temporarily peeling off the entire circumference of sidepiece insulating barrier 45, shown in the net-like pattern among Fig. 8 (b), directly form new sidepiece insulating barrier 67.
In the present embodiment, by the so easy method of formation of removing and utilize the new sidepiece insulating barrier 67 that spraying plating finishes of utilizing that sidepiece insulating barrier 45 cutting finishes, can carry out the sectional repair of electrostatic chuck 40, therefore, no longer need integral replacing electrostatic chuck 40, can reduce maintenance cost significantly.
(the 5th execution mode)
Fig. 9 (a) is other examples of the breakage of electrostatic chuck 40, is illustrated in the whole cover layer of electrostatic chuck 40, that is, the integral body that spreads all over first insulating barrier 42, electrode 43, second insulating barrier 44 and sidepiece insulating barrier 45 produces the state of a large amount of crackles 104.So, in the whole tectal vast scope of electrostatic chuck 40, produced under the situation of a large amount of crackles, shown in Fig. 9 (b), adopted 201 pairs of cover layers of cutting unit to cut,, cover layer has been removed fully up to exposing base material 41.
Then, shown in Fig. 9 (c), use coating apparatus 202, carry out spraying plating, form new cover layer on the surface of base material 41 to having removed tectal base material 41 fully.That is, respectively successively spraying plating and on base material 41 new first insulating barrier 68, electrode 69, second insulating barrier 70 of stacked formation, form sidepiece insulating barrier 71 again, finish repairing thus.And in the new electrode 69 that forms, set supply lines 27 from DC power supply 26.At this moment, employed depositing materials when forming first insulating barrier 68, second insulating barrier 70, sidepiece insulating barrier 71, the preferred insulating material that adopts with the identical material of original each insulating barrier, for example aluminium oxide (Al
2O
3) wait pottery.In addition, also can use the insulating material of other kinds, for example zirconia (ZrO
2), forsterite (M2S; 2MgOSiO
2), yttrium fluoride (YF
3) wait as depositing materials.
In the present embodiment,, no longer need integral replacing electrostatic chuck 40,,, can reduce maintenance cost so compare with the situation of integral replacing because base material 41 can utilize again by carrying out tectal regeneration according to above-mentioned flow process.
The present invention will be described more than to have enumerated several execution modes, but the present invention is not subjected to the restriction of above-mentioned execution mode, can carry out various distortion.For example: for processing unit of the present invention, capacitive coupling type parallel flat plasma-etching apparatus with the RIE type that lower electrode applied High frequency power is that example is illustrated, but can also be type to upper electrode supply high frequency electric power, perhaps being not limited to the capacitive coupling type, also can be the inductance coupling high type.In addition, be not limited to Etaching device, the plasma processing apparatus that for example carries out other kinds such as ashing, CVD film forming also can be suitable for.
In addition, processed substrate is not limited to the FPD glass substrate, also can be semiconductor wafer.
Claims (5)
1. the method for repairing and mending of an electrode for electrostatic attraction, this electrode for electrostatic attraction is formed with the overlay film on covering substrates surface, this overlay film comprises: electrode layer, at first insulating barrier of this electrode layer lower floor with at second insulating barrier of described electrode layer, by applying voltage to described electrode layer, absorption keeps substrate
This method for repairing and mending comprises: the cutting process that cuts and remove a part that comprises bad position and the described overlay film around it; With
On the part that is removed overlay film by described cutting, form the overlay film step for regeneration of new repairing overlay film.
2. the method for repairing and mending of electrode for electrostatic attraction according to claim 1 is characterized in that:
The part of the described overlay film that is removed by described cutting process is the lamination that comprises described electrode layer, and described repairing overlay film is only formed by insulating material.
3. the method for repairing and mending of electrode for electrostatic attraction according to claim 1 is characterized in that:
The part of the described overlay film that is removed by described cutting process is the lamination that comprises described electrode layer, adopts stacked insulating material of spraying plating and conductive material and forms described repairing overlay film.
4. the method for repairing and mending of electrode for electrostatic attraction according to claim 1 is characterized in that:
The part of the described overlay film that is removed by described cutting process is the superficial layer of described second insulating barrier, forms described repairing overlay film by spraying plating by insulating material.
5. the method for repairing and mending of electrode for electrostatic attraction according to claim 1 is characterized in that:
The part of the described overlay film that is removed by described cutting process is the sidepiece insulating barrier that covers the sidepiece of described electrode for electrostatic attraction, forms described repairing overlay film by spraying plating by insulating material.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006197557 | 2006-07-20 | ||
| JP2006197557A JP5019811B2 (en) | 2006-07-20 | 2006-07-20 | Repair method of electrostatic adsorption electrode |
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| CN200910151468XA Division CN101625954B (en) | 2006-07-20 | 2007-07-20 | Repairing method of electrostatic sucking electrode |
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| CN101110384A CN101110384A (en) | 2008-01-23 |
| CN100541756C true CN100541756C (en) | 2009-09-16 |
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| CNB2007101361933A Active CN100541756C (en) | 2006-07-20 | 2007-07-20 | The method for repairing and mending of electrode for electrostatic attraction |
| CN200910151468XA Active CN101625954B (en) | 2006-07-20 | 2007-07-20 | Repairing method of electrostatic sucking electrode |
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| JP (1) | JP5019811B2 (en) |
| KR (1) | KR100943360B1 (en) |
| CN (2) | CN100541756C (en) |
| TW (2) | TW200811990A (en) |
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| US20090031955A1 (en) * | 2007-07-30 | 2009-02-05 | Applied Materials, Inc. | Vacuum chucking heater of axisymmetrical and uniform thermal profile |
| KR100908227B1 (en) * | 2008-01-28 | 2009-07-20 | (주)코리아스타텍 | Electrostatic chuck reproducing method of tft fabrication equipment |
| JP5201527B2 (en) * | 2008-03-28 | 2013-06-05 | 東京エレクトロン株式会社 | Electrostatic chuck and manufacturing method thereof |
| US8291565B2 (en) * | 2008-10-10 | 2012-10-23 | Lam Research Corporation | Method of refurbishing bipolar electrostatic chuck |
| JP5193886B2 (en) | 2009-01-14 | 2013-05-08 | 株式会社巴川製紙所 | Electrostatic chuck device repair method and repair device, and electrostatic chuck device |
| KR101123968B1 (en) * | 2009-12-16 | 2012-03-23 | 아이원스 주식회사 | Recycle method of electrostatic chuck |
| CN103493194B (en) * | 2011-06-02 | 2016-05-18 | 应用材料公司 | The aluminium nitride dielectric of electrostatic chuck is repaired |
| KR101300779B1 (en) * | 2011-11-08 | 2013-08-29 | (주) 인광 | Electrode reparing method of cvd device for refining polysilicon and repared electrode using the same |
| CN104272190A (en) | 2012-02-03 | 2015-01-07 | Asml荷兰有限公司 | Substrate holder and lithographic apparatus |
| JP5441019B1 (en) * | 2012-08-29 | 2014-03-12 | Ｔｏｔｏ株式会社 | Electrostatic chuck |
| CN107680918B (en) * | 2012-09-19 | 2021-02-23 | 应用材料公司 | Method for bonding substrates |
| TWI497589B (en) * | 2012-12-17 | 2015-08-21 | Global Material Science Co Ltd | Upper electrode of dry etcing chamber and method for manufacturing the same |
| KR101506991B1 (en) * | 2013-03-22 | 2015-04-07 | (주)티티에스 | Method of processing support unit |
| KR101328492B1 (en) * | 2013-04-02 | 2013-11-13 | 주식회사 템네스트 | Regeneration method of electrostatic chuck using aerosol coating |
| KR101591455B1 (en) * | 2013-12-24 | 2016-02-03 | (주)엘케이솔루션 | Electostatic chuck and method for reparing the same |
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| JP6435247B2 (en) * | 2015-09-03 | 2018-12-05 | 新光電気工業株式会社 | Electrostatic chuck device and method of manufacturing electrostatic chuck device |
| CN108476006B (en) | 2015-11-02 | 2022-04-15 | 沃特洛电气制造公司 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of manufacturing the same |
| JP6650313B2 (en) * | 2016-03-25 | 2020-02-19 | 日本特殊陶業株式会社 | Repair method of substrate support member |
| KR101904275B1 (en) * | 2016-06-09 | 2018-10-05 | (주)티티에스 | Processing method of substrate supporting apparatus |
| JP6796531B2 (en) * | 2017-03-31 | 2020-12-09 | 日本特殊陶業株式会社 | How to repair the board holding device |
| JP7260272B2 (en) * | 2018-09-21 | 2023-04-18 | 旭化成株式会社 | Electrode manufacturing method |
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| KR102184705B1 (en) * | 2020-06-22 | 2020-12-01 | 주식회사 동탄이엔지 | Method of repairing of electrostatic chuck |
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| EP1591561A1 (en) * | 2004-04-28 | 2005-11-02 | ALSTOM (Switzerland) Ltd | Method for applying a protective coating over a high temperature component |
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Also Published As
| Publication number | Publication date |
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| CN101625954B (en) | 2011-05-11 |
| KR20080009028A (en) | 2008-01-24 |
| TW200811990A (en) | 2008-03-01 |
| CN101625954A (en) | 2010-01-13 |
| JP2008028052A (en) | 2008-02-07 |
| CN101110384A (en) | 2008-01-23 |
| KR100943360B1 (en) | 2010-02-18 |
| TW201044496A (en) | 2010-12-16 |
| JP5019811B2 (en) | 2012-09-05 |
| TWI343618B (en) | 2011-06-11 |
| TWI351072B (en) | 2011-10-21 |
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