CN100530057C - Acoustic touch sensor - Google Patents
Acoustic touch sensor Download PDFInfo
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- CN100530057C CN100530057C CNB2005800113297A CN200580011329A CN100530057C CN 100530057 C CN100530057 C CN 100530057C CN B2005800113297 A CNB2005800113297 A CN B2005800113297A CN 200580011329 A CN200580011329 A CN 200580011329A CN 100530057 C CN100530057 C CN 100530057C
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- substrate
- sound wave
- piezoelectric
- touch
- sidewall
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/043—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves
- G06F3/0436—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves in which generating transducers and detecting transducers are attached to a single acoustic waves transmission substrate
Abstract
A touch sensor comprises a substrate capable of propagating acoustic waves. The substrate includes a first surface having a touch sensitive region. In one embodiment, the substrate includes a first sidewall intersecting the first surface at a first edge. A transmitter is provided on the first sidewall of the substrate. The transmitter generates acoustic waves that propagate directly from the first sidewall through at least a portion of the touch sensitive region. In another embodiment, a transducer is formed on the substrate. The transducer comprises a piezoelectric element which is thermally cured after being formed on the substrate. The transducer is configured for at least one of generating acoustic waves and detecting acoustic waves. Alternatively, the transducer may include a strip comprising the piezoelectric element.
Description
The cross reference of related application
The title that the present invention relates to propose on April 14th, 2004 is that the U.S. Provisional Patent Application sequence number of " acoustic touch sensor " is 60/562, the title that on April 14th, 461 and 2004 proposed is 60/562 for the U.S. Provisional Patent Application sequence number of " acoustic touch sensor ", 455 application, its disclosure is hereby expressly incorporated by reference.
Background of invention
Invention field
The present invention relates to touch sensor, particularly have the acoustic touch sensor and the acoustic touchscreen of the touch sensitive region of narrow functional boundary and increase.
Invention is introduced
A kind of acoustic touch sensor has touch sensitive region, the influence of Jie Chu existence thereon and the transmission of location by contacting the sound wave that passes the touch sensor substrate and sensing.Acoustic touch sensor can use R wave (comprising accurate R wave), La Mu or shear wave, the combination of perhaps dissimilar sound waves.
Fig. 1 has illustrated the operation of traditional acoustic touch sensor, acoustic touchscreen 1.This touch-screen 1 has touch sensitive region 2, and portion determines 2 dimension contact coordinates within it.For example, touch sensitive region 2 can comprise the zone by dotted line 16 restrictions, the inner boundary of its expression window 10.First transmit that converter 3a is positioned in outside the touch sensitive region 2 and by acoustics be coupled in the surface of touch-screen 1.This converter 3a with the top that propagates into touch-screen 1 concurrently and usually the form of the sound wave 11a in the plane of touch-screen 1 send acoustical signal.That aim on the transfer path of sound wave 11a is the first linear array 13a of part acoustic reflection element 4, its each partly transmit acoustical signal and partly reflect their (with about 90 ° angles), (for example create sound wave that a plurality of vertical transmissions pass touch sensitive region 2,5a, 5b and 5c).The spacing of reflecting element 4 is variable decay that cause along with the increase to the first forwarder 3a distance with the compensation acoustical signal.Even what know equally is that reflecting element 4 has unified spacing, also can realize the signal homogenizing by the reflection strength that changes reflecting element 4.By the second linear array 13b sound wave 5a of part acoustic reflection element 4,5b and 5c be by the about 90 ° angle (referring to arrow 11b) of secondary reflection again, when arriving touch-screen 1 following towards the first receiving converter 6a.At receiving converter 6a, ripple is detected and be converted to the electric signal that is used for data processing.The similar configuration of reflecting element is by the left side and location, the right along touch-screen 1.Second transmits converter 3b produces sound wave 12a along the left side, and a plurality of flatly propagation of the trilinear array 13c of part acoustic reflection element 4 establishment passed the sound wave (for example, 7a, 7b and 7c) of touch sensitive region 2.By the 4th linear array 13d of part acoustic reflection element 4, sound wave 7a, 7b and 7c are redirected towards receiving converter 6b along 12b, and they are detected and be converted to the electric signal that is used for data processing there.
If for example point or stylus 8 touches touch sensitive region 2 in the position by object, the part energy of sound wave 5b and the 7a object that is touched absorbs.Detect resulting decay by receiving converter 6a and 6b as the disturbance in the acoustical signal.The time delay analysis of data allows to determine the coordinate of touch location 8 under the help of microprocessor (not shown).The equipment of Fig. 1 is equally as having only two touch-screens that use the converter of transmission/receiving converter design.
Related by the shell 9 that the dotted line among Fig. 1 is indicated with touch-screen 1.This shell can be used the material of any appropriate, for example molded polymer or sheet metal.This shell 9 comprises window 10, by dotted line 17 indications of the external edge of the dotted line 16 of internal edges of expression window 10 and the window 10 in the index map 1.Inner dotted line 16 shows the periphery that shell 9 has covered touch-screen 1, has hidden transmission and receiving converter, reflecting element and miscellaneous part, but has exposed touch sensitive region 2.This configuration can protect hiding parts to avoid polluting and/or destroying, and aesthetic appearance is provided and is the user definition touch sensitive region.
Touch-screen is included in the separation panel of the covering on the display board.Typically, this panel is made by glass, but can use other any suitable substrates.This display board can be cathode ray tube (CRT), LCD (LCD), the display of plasma, electroluminescence, Organic Light Emitting Diode (OLED) display or other any kinds.
As shown in Figure 1, touch sensitive region 2 by border area 15 around, reflecting element 4 and transmission and receiving converter 3a, 3b, 6a and 6b are positioned there.The width that reduces border area 15 has increased touch sensitive region 2.For the touch sensor application examples such as the touch-screen that use well-illuminated touch sensor, the width particular importance on limit.Touch sensor with narrow edge regions 15 can be integrated in the monitor, and this monitor self has the narrow limit around display image.When equipment when for example total market trend of monitor is near polishing and higher mechanical compact design this feature be desirable.Touch sensor with narrow edge regions 15 also is easier to seal and is lighter and can have the sensing region of increase.Among the touch screen technology of competition, (for example, sound, capacitive character, ohmic and ultrared) acoustic touchscreen is easy to have wideer limit.
Basically be used to transmit and the converter that receives sound wave is known in the top touch-sensing mounted on surface of the substrate of acoustic touch sensor.The transmitter detector channel can be used to sound wave and replace making up and be used for the reflective array that directed sound wave passes the touch sensitive region of touch sensor, but needs to use a large amount of converters.This converter is the wedge type converter that is placed on the touch-surface, has therefore occupied space, valuable limit.The converter of interdigital can be used to design the touch-screen that does not use reflective array, and as being disclosed in 6,756,973 patents at U.S. Patent number, its disclosure is hereby expressly incorporated by reference.Disclosed therein interdigital converter is positioned in and has therefore occupied space, valuable limit on the touch-surface of touch-screen.So far, use a small amount of converter and array has been positioned at substrate and the limit touch sensitive region similar face, therefore occupied the space, limit in conjunction with the touch sensor that reflective array is passed touch sensor with directed acoustic energy.
It is known that the converter that is used to transmit and receive sound wave is installed on the sidewall of the substrate of acoustic touch sensor.But in these two kinds of situations, reflective array must be placed on the touch-surface thereby occupy space, valuable limit.
As U.S. Patent number 6,636, disclosed in 201, be possible by use waveguide to assemble sound wave in edge regions with the size of the edge regions on the touch-surface that reduces touch-screen, its disclosure is hereby expressly incorporated by reference.But it is desirable need not providing the replacement solution of waveguide on the surface of touch sensor substrate.
Except reducing the edge regions of touch sensor, expect that the level land makes touch sensor as far as possible.Especially touch sensor and the integrated touch-screen of making of LCD plate there is advantage.If touch sensor is very flat and be parallel to the LCD plate, the two is combined into the compact systems that is easy to seal easily.If touch sensor has big window and edge regions, touch sensor will be very complicated to the sealing of LCD plate.
Because above-mentioned outline, expectation have the new acoustic touch sensor design of the edge regions that can provide very narrow.In addition, it is flat new acoustic touch sensor design that expectation has sensor wherein, allow it to be easy to integrated and with for example LCD monitor sealing of planar device.
Brief summary of the invention
In one embodiment, a kind of tactile sensor comprise can conduct acoustic waves substrate.This substrate comprises first surface with a touch sensitive region and at the first side wall of the cross-section first surface in first limit.On the first side wall of substrate, provide forwarder.This forwarder produces the sound wave of directly propagating from the first side wall by at least a portion of touch sensitive region.
In another embodiment, a kind of touch sensor system, comprise can conduct acoustic waves substrate, this substrate comprises the first surface with a touch sensitive region.The cross-section first surface of first and second sidewalls.Forwarder is provided on the first side wall of substrate.This forwarder produces the sound wave of directly propagating from the first side wall, and this sound wave passes at least a portion propagation of touch sensitive region.Detecting device is provided on second sidewall of substrate, is used to detect at least a portion sound wave afterwards that passes touch sensitive region.
Among another embodiment, a kind of method that detects the contact on the touch sensitive region of substrate that can conduct acoustic waves.This substrate comprises the first surface with touch sensitive region, and the cross-section first surface of first and second sidewalls.The first side wall that approaches substrate produces sound wave.The part of the first side wall by the substrate directed sound wave of at least a portion in the substrate and that pass touch sensitive region.Second sidewall that approaches substrate detects sound wave.
In another embodiment, touch sensor comprise can conduct acoustic waves substrate.This substrate comprises the first surface with contact sensing zone.On substrate, form converter.This converter is included in and is formed on the substrate afterwards by the piezoelectric element of heat curing.This converter configurations becomes to be used for to produce at least one of sound wave and detection sound wave.
In another embodiment, touch sensor comprise can conduct acoustic waves substrate.This substrate comprises the first surface with touch sensitive region.This converter configurations becomes to be used for to produce at least one of sound wave and reception sound wave.This converter comprises the band that contains piezoelectric.This band quilt is along with arriving substrate.
In another embodiment, provide a kind of method that is used on the touch sensor substrate, forming converter.This substrate comprises the first surface with contact sensing zone.One conductive layer is applied to this substrate, and piezoelectric layer is applied to substrate, and piezoelectric layer has covered at least a portion of first conductive layer.Piezoelectric layer is by heat curing after being applied to substrate.
Brief Description Of Drawings
When read in conjunction with the accompanying drawings, the following detailed description of aforesaid summary and specific embodiment of the present invention is with easier to understand.Be understandable that the present invention is not limited at configuration shown in the drawings and means.
Fig. 1 has illustrated the operation of traditional acoustic touch sensor, acoustic touchscreen.
Fig. 2 has illustrated the touch sensor substrate that has touch-surface, limit and sidewall according to one embodiment of present invention.
Fig. 3 has illustrated the touch sensor that has the mechanism that is used to produce or detect the sound wave that forms on sidewall according to one embodiment of present invention.
Fig. 4 has illustrated the mechanism that is used to produce or be received in the sound wave that forms on the sidewall according to one embodiment of present invention.
Fig. 5 has illustrated the transversal section of the layer on the substrate of Fig. 4 according to one embodiment of present invention.
Fig. 6 has illustrated the touch area on the touch-surface of substrate according to an embodiment of the invention.
Fig. 7 has illustrated that wherein connecting gear according to an embodiment of the invention is positioned on two sidewalls of substrate, and receiving mechanism is positioned in the geometry of the touch sensor in addition two sidewalls of substrate.
Fig. 8 has illustrated transmission or the receiving mechanism with interdigitated electrodes according to an embodiment of the invention.
Fig. 9 has illustrated the polymer film pressure pattern piezo strip that is used for producing and receiving diagonal line acoustic path " U " or " V " coordinate according to an embodiment of the invention.
Figure 10 has illustrated the side view that has the substrate of the piezo strip that is attached to second surface according to one embodiment of present invention.
Figure 11 has illustrated the grid that are formed on the touch-surface according to an embodiment of the invention.
Figure 12 has illustrated the replaceable polymer film piezo strip that is used to produce and receive sound wave according to an embodiment of the invention.
Figure 13 has illustrated the replaceable polymer film piezo strip that is used to produce and receive sound wave according to an embodiment of the invention.
Figure 14 has illustrated the polymer film piezoelectric transducer that is used to produce and receive sound wave according to an embodiment of the invention.
Figure 15 has illustrated the replaceable polymer film piezo strip that is used for producing and receiving from sidewall sound wave according to an embodiment of the invention.
Figure 16 has illustrated the geometry of touch sensor according to an embodiment of the invention.
Figure 17 has illustrated the transmission of Fig. 3 according to an embodiment of the invention or the side view of receiving mechanism.
Figure 18 has illustrated that the electrode of the U1 of being used for direction according to an embodiment of the invention (Fig. 6) refers to spacing or the distance between (Fig. 4).
Figure 19 illustrated according to an embodiment of the invention in the U1 zone sound wave and piezoelectric film (for example, pvdf membrane or burn till piezoceramics layer) for example piezoelectric the electric field induction expansion and shrink between coupling mechanism.
Figure 20 has illustrated the sound power density of the shear wave (ZOHPS or commercial sometimes be called " GAW ") of the zeroth order horizontal polarization in the substrate according to an embodiment of the invention.
Figure 21 has illustrated the transmission of more high-order Lamb wave according to an embodiment of the invention.
Figure 22 has illustrated the transmission of R wave according to an embodiment of the invention.
Figure 23 has illustrated the piezoelectric that is coupled to the mechanism of the R wave of formerly passing through " 33 " coupling according to an embodiment of the invention.
Figure 24 has illustrated the converter structure with periodic modulation layer according to an embodiment of the invention.
Figure 25 and 26 has illustrated that wherein piezoelectric device according to an embodiment of the invention comprises the example of first kind of situation of the piezoelectric layer with thinner than half-wavelength thickness far away.
Figure 27 and 28 has illustrated that wherein piezoelectric device according to an embodiment of the invention comprises that piezoelectric layer with thickness only thinner than half-wavelength and phase shift are used to realize the example of second kind of situation of modulating.
Figure 29 has illustrated phase place and the relationship of amplitude curve that is used to be coupled by the resonance at o according to an embodiment of the invention.
Figure 30 has illustrated the piezoelectric device that is designed to produce R wave according to an embodiment of the invention.
Figure 31 has illustrated that wherein substrate according to an embodiment of the invention can be by periodic variation to produce the example of modulation.
Figure 32 has illustrated the grating transducer that is formed on the substrate according to an embodiment of the invention.
Figure 33 has illustrated the pectination converter that is formed on the substrate according to an embodiment of the invention.
Figure 34 has illustrated the interdigital converter that is formed on the substrate according to an embodiment of the invention.
Figure 35 has illustrated the touch sensor with the converter that forms along the periphery of touch-surface according to an embodiment of the invention.
Figure 36 has illustrated the replaceable interdigital converter that is formed on the substrate according to an embodiment of the invention.
Figure 37 has illustrated the touch sensor with the converter that forms along the periphery of touch-surface according to an embodiment of the invention.
Figure 38 has illustrated the replaceable touch sensor that forms according to one embodiment of present invention.
Figure 39 has illustrated according to an embodiment of the invention being positioned to realize the waveguide of signal equalization.
Figure 40 has illustrated and has been formed according to one embodiment of present invention to realize the waveguide of signal equalization.
Figure 41 has illustrated another embodiment of touch sensor according to an embodiment of the invention.
Figure 42 has illustrated the touch sensor of combined belt according to an embodiment of the invention.
Figure 43 has illustrated the touch sensor with the converter on the sidewall that is formed on substrate according to an embodiment of the invention.
Detailed description of the Invention
At the width range of the traditional reflective array shown in Fig. 1 at about 5mm between the 15mm, it is corresponding to the long scope of about 9-26 sound wave (the about 5MHz of supposition legacy frequencies is corresponding to the wavelength of about 0.57mm).Reflective array with narrower width typically is used on the littler screen.
Fig. 2 has illustrated the touch sensor substrate 20 with touch-surface 24, limit 22 and sidewall 32 according to an embodiment of the invention.Corresponding to the plane of the second surface 28 of substrate 20 and corresponding to the infall between the plane of each sidewall 32, on substrate 20, form subtend limit 26.Any suitable material can be used to substrate 20, comprises glass, pottery and metal (for example, aluminium or steel).For some application, need low acoustic loss glass.For example, borosilicate glass has low-loss, and the received signal amplitude that increase can be provided, thereby can increase touch sensitive region conversely.
Adjoining the angle 42 and 44 that the position of touch-surface 24 forms at sidewall 32 is 90 °, perhaps between 20 ° to 90 °, make sidewall 32 perpendicular to or be basically perpendicular to touch-surface 24.Sidewall 32 forms does not have defective substantially, and like this so that any deviation on sidewall 32, for example fragment, striped, indenture, non-uniform areas etc. have longlyer for example than sound wave, and the size that the Rayleigh wavelength is littler preferably is less than 20% of Rayleigh wavelength.
Fig. 3 has illustrated according to embodiments of the invention to have the touch sensor 50 that is used to produce or detect the 52-58 of mechanism of the sound wave of formation on sidewall 32.For clear, sidewall 32 has been indicated as sidewall 34-40.This touch sensor 50 comprises the substrate 20 with touch-sensing surface 24.The 52-58 of mechanism that sidewall 34-40 is provided with respectively each, produce and/or detect sound wave.Therefore, there is no need on the touch-surface 24 of substrate 20, to form any mechanism, for example reflective array.Randomly, each of the 52-58 of mechanism has the joint 60-66 that extends beyond substrate 20, is used to be fabricated into electrical connection there.
Just to for example, two mechanisms 52 and 56 can produce sound wave and sound wave can detect in two mechanisms 54 and 58.This mechanism 52 and 56 is to be in substantially parallel relationship to direction emission sound wave, for example the body shear wave of one of diagonal line by the indicated rectangular substrate 20 of arrow 71.
Fig. 4 has illustrated the mechanism 52 that is used to produce or be received in the sound wave that forms on the sidewall 32 according to one embodiment of present invention.First conductive layer, perhaps first electrode 84 is disposed on the sidewall 32.Form first electrode 84 to cover all, perhaps near the surface of whole sidewalls 32.On first electrode 84, applied a layer of piezo-electric material 83 (for example, piezoelectric polymer film or fire piezoceramic material).The part 85 of first electrode 84 can exceed the scope of piezoelectric layer 83 extends to allow making electrical connection, and for example joint 60.Have foundation 81 and, arranged by the sidewall on piezoelectric layer 83 32 from the periodic structure of its extension second electrode 80 of finger 82 for example.Second electrode 80 can be formed by the material of for example copper.Finger 82 is as coherently produce or receive the forwarder of sound wave or the phased array of receiver on the direction of hope.Replacedly, the mechanism 52 in Fig. 4 can form the piezo strip that separates from substrate 20, is similar to the piezo strip of discussing below with reference to Fig. 9 and 12-14.
Fig. 5 has illustrated the xsect 74 and 76 of the layer on the substrate 20 of Fig. 4 according to an embodiment of the invention.Xsect 74 has illustrated the part of the finger 82 that comprises second electrode 80.Xsect 76 has illustrated the part between finger 82, and wherein second electrode 80 has occupied foundation 81.
Fig. 6 has illustrated according to the touch area 102-108 of embodiments of the invention on the touch-surface 24 of substrate 20.In order to know that sidewall 34-40 is by shown in Fig. 3.Descartes " X " and " Y " coordinate that each of touch area 102-108 is relevant rather than traditional with diagonal line acoustic path " U " or " V ".Arrow 122-128 indication from a side of substrate 20 to direction in abutting connection with the representative acoustic path of a side.Just to giving an example, the signal that is produced by the mechanism along sidewall 38 will produce the U1 (touch area 102) and the V1 (touch area 106) that will be received by the mechanism along sidewall 36 and 40 respectively on the direction of arrow 122 and 126.The two-dimensional touch coordinate can be rebuild from 4 diagonal line signal U1, U2, V1 and V2.
Fig. 7 has illustrated the geometry of touch sensor 100 according to an embodiment of the invention, wherein connecting gear 52 and 56 is positioned at respectively on the sidewall 34 and 38 of substrate 20, and receiving mechanism 54 and 58 is positioned at respectively on the sidewall 36 and 40 of substrate 20.Just to giving an example, if substrate 20 has high 116 and wide 118 rectangular shape, so that ratio is 3: 4 (height: wide), the spacing 136 of the electrode finger 82 on connecting gear 52 and 56 is 5 λ/4, and the spacing 138 of the electrode finger 82 on receiving mechanism 54 and 58 is 5 λ/3.The determining deviation of the electrode finger 82 by making connecting gear 52 and 56 is greater than 1 wavelength, and the relevant coupling on desired orientation is implemented.
Fig. 8 has illustrated transmission or the receiving mechanism 52 with interdigitated electrodes according to an embodiment of the invention.Piezoelectric 83 can be applied to (not shown) on the ground-electrode.Each of first electrode 88 and second electrode 90 forms the series of periodic structure, for example has electrode respectively and refers to 92 and 94 interdigitated electrodes, is formed on the piezoelectric 83.Finger 92 separates each other regularly, and finger 94 separated each other regularly, and as formerly describes at interval in Fig. 4 and be determined.For example, finger 92 is spaced apart (Fig. 4) with distance 72, and wherein the distance between finger 92 and the adjacent finger 94 is 1/2nd of a distance 72.
Set transmission and receiving mechanism 52-58 are possible skeleton before being arranged on the sidewall 32.For example, can use the band of polymer film sensor.The special subset of polymkeric substance (material with long-chain carbon skeleton) is a piezoelectricity, has to expand and shrinkage character when suffering electric field.Piezopolymer is the continuous film of insulation.These bands comprise piezoelectric polymer layer (for example, the multipolymer of polyvinyladine floride (PVDF) or difluoroethylene, the multipolymer of difluoroethylene and trifluoro-ethylene for example, p (VDF-TrFE)).This piezoelectric 83 is sandwiched between the array of ground-electrode and interdigitated electrodes 88 and 90, and it can be formed by copper track or metallized aluminium.This piezoelectric 83 or polymkeric substance are with the thinner size (for example, 30 microns) of width of finger 92 and 94.Band can be disposed on the sidewall 32 by any suitable method, preferably by using the layer of the shear strain between polymer piezo parts and the substrate 20 (for example, glass) that is coupled effectively, for example by using thin rigidity tack coat.The slave controller (not shown) is made by flexible cable to the electrical connection of band, and randomly by also as the continuous making of the same polymer film substrate of the piezoelectric of converter or the 52-58 of mechanism.
The ground-electrode (not shown) is encouraged by reverse polarity with finger 92 and 94 with being connected to.Mechanism 52 can transmit and/or receive sound wave, and finger 92 and 180 ° of transmission of 94 out-phase.When first and second electrodes 88 and 90 utilize the inverted phases excitation, polymer piezo, perhaps piezoelectric 83, expand in the plane of arrow 98 indications and contraction being easy to.For example, when negative voltage was applied to finger 94, piezoelectric 83 shrank.The little measurement that this finger 92 and 94 also experiences expansion and shrinks, but prior, corresponding stress is applied to the sidewall 32 of substrate 20.
Fig. 9 has illustrated the polymer film pressure pattern piezo strip 250 that is used for producing and receiving diagonal line sound travel " U " or " V " coordinate according to embodiments of the invention.Piezo strip 250 is formed by first electrode 252 of first side 258 that is applied to polymer piezo film 254.Second electrode 256 is used to second side 260 of polymer piezo film 254.Piezo strip 250 can be flexible, relatively allows to be relatively easy to assembling and interconnection with rigidity and/or frangible material.The first 262 of piezo strip 250 can be bonded or adheres to second surface 28 near the substrate 20 on limit 22.The second portion 264 of piezo strip 250 can surpass substrate 20 and extend to allow the electrical connection (not shown) easily to be attached to first and second electrodes 252 and 256.
Figure 10 has illustrated the side view of the substrate 20 that has the piezo strip 250 that is attached to second surface 28 according to an embodiment of the invention.Grid 266 are formed on the touch-surface 24 near limit 22, and facing to piezo strip 250.Choose wantonly, solid material 268 can be formed on the piezo strip 250 or be attached to piezo strip 250, and the inertial mass that is provided for piezo strip 250 improves coupling efficiency with pushing.
Figure 11 has illustrated the grid 266 that are formed on according to one embodiment of present invention on the touch-surface 24.These piezo strip 250 (not shown) have corresponding to the effective coverage of the first 262 of piezo strip 250 and the zone that covered by grating transducer 266.When first and second electrodes 252 and 256 are energized, on the direction of arrow 244, produce sound wave.
Figure 12 has illustrated the replaceable polymer film piezo strip 270 that is used to produce and receive sound wave according to one embodiment of present invention.This piezo strip 270 is formed by first electrode 272 of first side 278 that is applied to polymer piezo film 274.Second electrode 276 is applied to second side 280 of polymer piezo film 274.Second electrode 276 has finger electrode 282.The first 284 of piezo strip 270 is fixed to the touch-surface 24 near the substrate 20 on limit 22.The second portion 286 of piezo strip 270 can extend beyond substrate 20 and be attached to first and second electrodes 272 and 276 to allow to be electrically connected.
Figure 13 has illustrated the replaceable polymer film piezo strip 290 that is used to produce and receive sound wave according to one embodiment of present invention.This piezo strip 290 is formed by the ground-electrode 292 of first side 300 that is applied to polymer piezo film 294.First and second electrodes 296 and 298 have interdigital finger 308 and 310 and be applied to second side 302 of polymer piezo film 294.The first 304 of piezo strip 290 is fixed on the touch-surface 24 of substrate 20.The second portion 306 of piezo strip 290 can extend beyond substrate 20 and be attached to ground-electrode 292 and first and second electrodes 296 and 298 to allow to be electrically connected.
Figure 14 has illustrated the polymer film piezoelectric transducer 320 that is used to produce and receive sound wave according to an embodiment of the invention.This piezoelectric transducer 320 is formed by the ground-electrode 322 of first side 330 that is applied to polymer piezo film 324.First and second electrodes 326 and 328 have interdigital finger 372 and 374, and are applied to second side 332 of polymer piezo film 324.The first 334 of piezoelectric transducer 320 is fixed to the touch-surface 34 of the substrate 20 at two of approaching substrate 20 or more a plurality of turnings.The second portion 336 of piezoelectric transducer 330 can surpass substrate 20 and extend to allow electrical connection to be attached to ground-electrode 322 and first and second electrodes 326 and 328.In order to form touch-screen, piezoelectric transducer 320 can make up with the reflective array that forms along the touch-surface 24 that approaches limit 22, for example the linear array 13a-13d of the Fig. 1 that formerly discusses.
Figure 15 has illustrated the replaceable polymer film piezo strip 350 that is used for producing and receiving from sidewall 32 sound wave according to an embodiment of the invention.Piezo strip 350 is formed by the ground-electrode 352 of first side 360 that is applied to polymer piezo film 354.First and second electrodes 356 and 358 have interdigital finger 368 and 370 and be applied to second side 362 of polymer piezo film 354.The first 364 of piezo strip 350 is fixed to the sidewall 32 of substrate 20.The second portion 366 of piezo strip 350 can surpass substrate 20 and extend to allow electrical connection to be attached to ground-electrode 352 and first and second electrodes 356 and 358.The piezo strip 350 that is attached to sidewall 32 is selections of the mechanism 52 of Fig. 3.
Figure 16 has illustrated the geometry of touch sensor 340 according to an embodiment of the invention.Touch sensor 340 comprises the substrate 20 with touch-surface 24.Piezo strip 342-348 is attached, and for example utilizes cementing agent, to the periphery 338 of touch-surface 24.Just to giving an example, piezo strip 342-348 can form one of them as the piezo strip of explanation in Figure 12 and 13.Band 342-348 can produce and receive sound wave on arrow 376 indicated directions.Be understandable that in order to know that piezo strip 342-348 is drawn and not drawn in proportion with respect to touch sensor 340.
Figure 17 has illustrated the transmission of Fig. 3 according to an embodiment of the invention or the side view of receiving mechanism 52.Mechanism 52 is formed has first electrode 84, piezoelectric layer 83 and outer electrode 86, for example as first and second electrodes 88 of the interdigital among Fig. 8 and 90 or Fig. 4 in second electrode 80.First electrode, the 84 usefulness tack coats 85 of mechanism 52 for example epoxy resin in conjunction with sidewall 32.Choose wantonly, one or two of plane that mechanism 52 can surpass the opposite side 28 of the plane of touch-surface 24 and substrate 20 extend to allow to be electrically connected and are attached to electrode 84 and 86.
Figure 18 has illustrated that the electrode of the U1 of being used for direction according to an embodiment of the invention (Fig. 6) refers to spacing or the distance between 82 (Fig. 4).The electrode of formerly discussing in Fig. 4 refers to that 82 spacing (distance 72) can adjust the shear wave (ZOHPS) that transmits and receive the zeroth order horizontal polarization with desired angle, is also referred to as GAW, so that U and V sound travel as shown in Figure 6 to be provided.Substrate 20 has height 116 and width 118.Solid line 110 and dotted line 111 are represented maximal value and the minimum value (having the maximum negative amplitude onesize with maximal value) the sound wave that produces from horizontal side 113 respectively.Be illustrated as S along the spacing between the maximal value of the transverse axis of horizontal side 113 design
WThen propagate into the vertical side 114 of indicating by arrow 112 from horizontal side 113 emitting sound wave.Be illustrated as S along the spacing between the maximal value (and minimum value) of vertical side 114 designs
HGive output S by following equation
WAnd S
H:
S
W＝λ(H
2+W
2)
1/2/W
S
H＝λ(H
2+W
2)
1/2/H
Wavelength X determines with sensing touch and operating frequency f, to have the λ of relation=V/f by the phase velocity V of the sound pattern of using in touch sensor.Use is at the S of last statement
WAnd S
HElectrode is set refers to that the spacing between 82 will cause being parallel to the diagonal line on rectangular touch plane 20 and being supported in U1, U2, V1 and the V2 signal path that the measurement of 2 dimension coordinates is finished in the touch area to the relevant coupling of sound wave.
Figure 19 illustrated according to an embodiment of the invention in the U1 zone sound wave and piezoelectric film (for example, pvdf membrane or burn till piezoelectric layer) for example the electric field induction zone of piezoelectric 83 expand and shrink between coupling mechanism.Fill the action of arrow 120 expression shear sound waves.Hollow arrow 121 expression is owing to the connecting gear shown in Fig. 8 52, and interdigitated electrodes 88 and 90 and piezoelectric 83 for example is along the power of horizontal side 113.There is similarly reception structure 52 along vertical side 114.Expansion area 140 is designated as puts in marks and constriction zone 142 is designated as minus symbol.
If piezoelectric 83 is to burn till for example PVDF of piezoelectricity coating or polymeric layer, utilize electric field pole to connect to bring out dipole moment, so that the behavior of proof piezoelectricity.Referring to Figure 17, utilize applicable electrode structure piezoelectric 83 to be easy to the utmost point and connect, in other words, on direction 144 perpendicular to sidewall 32.The utilization piezoelectric that the utmost point connects on direction 144 83, apply voltage and will bring out on direction 144 usually to first electrode 84 and outer electrode 86 and expand or shrink, this direction is parallel to the electric field (being called " 33 " coupling here) that applies and perpendicular to electric field and be parallel to expansion or contraction (being called " 31 " coupling here) on the direction 146 of sidewall 32.The natural characteristic that depends on piezoelectric 83 will be because the direction 146 of contraction or expansion of " 31 " coupling will be parallel to or perpendicular to the touch-surface 24 of (or both) substrates 20.All this piezoelectricity of 3 types coupling, " 31 " coupling of " 33 " coupling just and two types can be used to provide coupling to produce and to receive the sound wave that needs.
Referring to Figure 19, the coupling mechanism between the horizontally polarized shear of for example shear of zeroth order horizontal polarization (ZOHPS) ripple is illustrated.Fill the power of action hollow arrow 121 expressions simultaneously of arrow 120 expression shear sound waves owing to " 31 " coupling of piezoelectric 83, there, direction 146 is in the plane of touch-surface 24.Do not illustrate simultaneously, can be used to produce sound wave by component " 33 " coupling in piezoelectric 83 that encourages shear wave action (by filling arrow 120 indications) perpendicular to sidewall 32.Because it is related with the material action along all three axles at sidewall 32 that R wave is propagated on diagonal line ground, the dual-polarization that is somebody's turn to do " 33 " coupling and " 31 " coupling can be used to encourage R wave and Lamb wave.
Just to for example, expectation touch sensor 50 or 100 design make to use with the minimum coupling to unwanted parasitic sound pattern and the most effective generation are provided and receive the coupling of needed sound pattern.In addition, the design of this converter, for example mechanism 52 and other are formerly discussed, and depend in part on the depth section of required mode.For example, shear wave can pass substrate 20 all or most degree of depth, near the only coupling touch-surface 24 of substrate 20 of R wave simultaneously.
Figure 20 has illustrated the sound power density of the shear wave (ZOHPS or commercial sometimes be called " GAW ") of the zeroth order horizontal polarization in the substrate 20 according to an embodiment of the invention.ZOHPS or GAW have the unified sound power density that runs through substrate 20 bodies, shown in arrow 152-156.In order to encourage and detect this sound wave, transmitting and receiving structure 52 (it can comprise piezoelectric material layer 83) preferable is evenly to be coupled in the degree of depth 158 along sidewall 32.
Figure 21 has illustrated according to an embodiment of the invention the more transmission of high-order Lamb wave.Mechanism 52 has first and second piezoelectric elements 164 and 166 of reverse polarity.First and second piezoelectric elements 164 and 166 are formed on the sidewall 32 of top (touch-surface 24) near substrate 20 and bottom (second surface 28) to transmit by near the arrow 168 of touch-surface 24 and 170 and near the arrow 172 of second surface 28 and 174 indicated more higher order horizontally polarized shears (perhaps another more high-order Lamb wave).
Figure 22 has illustrated the transmission of R wave according to an embodiment of the invention.The acoustical power of R wave concentrates near the touch-surface 24, shown in arrow 192 and 194.For " 31 " coupling perpendicular to touch-surface 24 of direction 146 there, the useful area of piezoelectric 83 that needs limiting mechanism 52 is in the scope of a roughly Rayleigh wavelength X 176 of the touch-surface 24 of substrate 20.Be illustrated as only Rayleigh wavelength X 176 although be understandable that mechanism 52 in the degree of depth 158, limit the useful area of piezoelectric 83 in the areal extent of a roughly Rayleigh wavelength X 176 of touch-surface 24 simultaneously still mechanism 52 can have bigger size along the degree of depth 158.
Figure 23 has illustrated and according to an embodiment of the inventionly mainly has been coupled to the piezoelectric 83 of the mechanism 52 of R wave by " 33 ".The phase place of the lengthwise movement of R wave, indicated as arrow 196 and 198, with the degree of depth 158 reversed polarity symbols.Therefore, utilize effective piezoelectric of the opposed polarity mechanism 52 of different depth to be energized for 83 layers.Usually, the combination of modeling effort and experimental study will be used to determine the piezoelectric property of the piezoelectric layer that the structure of layer of effective piezoelectric 83 of mechanism 52 connects as the function and the utmost point of required sound pattern.
Figure 24 has illustrated the converter structure 134 with periodic modulation layer according to an embodiment of the invention.Can use substrate 20 shown in figure 2.As mentioned above, substrate 20 can make any suitable material, comprises glass, pottery and metal for example aluminium or steel.For some application, need low acoustic loss glass.As mentioned above, the sidewall 32 of substrate cleans.
First conductive layer 130 is provided for each sidewall 32 of (or being applied to) substrate 20 and the effect that will play first electrode that is used for piezoelectric transducer.Can use any suitable conductive material, for example silver corrosion (silver fret) but, copper track or serigraphy conduction printing ink.Just to for example, but first conductive layer 130 can be at the high temperature serigraphy ink of 450 ℃ of oven dry for example after being applied to sidewall 32.
Then on the sidewall 32 on first conductive layer 130, apply piezoelectric material layer 131.The examples of material that can be used for piezoelectric layer 131 includes but are not limited to, polymer piezo material and burn till piezoceramic material.Choose wantonly, near the turning, will stay area exposed 132 to allow to be fabricated into the electrical connection of first conductive layer 130.
Then, provide second electrode of second conductive layer 133 as piezoelectric transducer.Typically, first conductive layer 130 will play the magnetic susceptibility of the work of ground-electrode in order to minimum electromagnetic interference, and second conductive layer 133 will play the effect of the signal electrode of exciting electrode or reception.Second conductive layer 133 can be by making with the similar or same material of first conductive layer 130.Compare with the electrode 80 shown in Fig. 4 plants, second conductive layer 133 is the lasting coating on piezoelectric layer 131, and the electrode structure that does not therefore have the interdigital finger.Alternative, periodic modulation layer 134 is added on second conductive layer 133.
The periodic modulation layer 134 of converter 141 is used for the sound wave that the modulation of ground, space is transmitted or detected by converter 141.In the place that has periodic modulation layer 134, the transmission feature of piezoelectric layer 131 is modulated.Between first and second electrodes 130 and 133, use oscillating voltage respectively, will cause the mechanical excitation of piezoelectric layer 131.The pressure that piezoelectricity " 33 " coupling causes piezoelectric layer 131 to expand and shrink and therefore caused being applied to the vertical surface of sidewall 32 perpendicular to sidewall 32.Two orientations of piezoelectricity " 31 " coupling cause being parallel to sidewall 32 the plane expansion and contraction and cause shearforce in two orientations of the vertical surface that is applied to sidewall 32.One or more in the coupling of the piezoelectricity of these types are useful for producing and receiving required acoustic wave mode.For example,, in Figure 18, discuss, can modulate piezoelectric transducer by maximal value and the interval between the minimum value of adjusting sound wave as preceding in order coherently to be coupled to sound wave to form sound travel U1, U2, V1, V2.If there is not periodic modulating layer 134, the relevant generation of sound wave only occurs over just on the direction perpendicular to sidewall 32.But if periodic modulation layer 134 is used to coherently be coupled to the diagonal line conduct acoustic waves, even piezoelectricity " 33 " coupling can be used to excitation and detection level polarization shear wave (for example, ZOHPS).Because it is insensitive that shear wave water pollutes, therefore also need the touch sensor 50 and 100 of usage level polarization shear wave in some applications.
Figure 25 and 26 has illustrated that wherein piezoelectric device 206 according to an embodiment of the invention comprises the example of first kind of situation of the piezoelectric layer 131 of the thickness 200 with the half-wavelength of being far smaller than.In case piezoelectric layer 131 is fabricated on (firing) substrate 20, it is a rigidity with the polymer film piezo strip comparison of formerly discussing.The part of the piezoelectric device 206 that illustrates in Figure 25 is not used periodic modulation layer 134, and has the resonance frequency of the operating frequency that is higher than touch sensor 50 far away.The expansion of piezoelectric layer 131 and contraction can not be coupled to generation or the detection that is used for sound wave in the substrate 20 effectively.The part that piezoelectric device 206 has periodic modulation layer 134 illustrates in Figure 26.For more effective, periodic modulation layer 134 can be selected so that have the operating frequency resonance of the piezoelectric device 206 of periodic modulation layer 134 with touch sensor 50 (Fig. 3), for example 5MHz.Material with low acoustic attenuation, frit for example can be used to form and adjust the resonance of piezoelectric device 206.Interchangeable, when thickness 200 was set to half-wavelength, periodic modulation layer 134 can be used to separate regulating mechanism 206.
Figure 27 and 28 has illustrated that wherein piezoelectric device 208 according to an embodiment of the invention comprises having than only thin a little the piezoelectric layer 131 of thickness 200 and the phase shift example that is used to realize second kind of situation of modulating of half-wavelength.The piezoelectric device 208 that illustrates in Figure 27 does not have modulating layer 134 and is designed to have the resonance frequency higher slightly than the operating frequency of touch sensor 50.Piezoelectric device 208 in Figure 28 comprises modulating layer 134, and can be designed to have the resonance frequency a little less than the operating frequency of touch sensor 50.
Figure 29 has illustrated according to an embodiment of the invention being used for by at ω
oThe phase place and the relationship of amplitude curve of resonance coupling.The normalized resonance amplitude A of solid line 150 expression (axle) in the left side of figure.The degree of dotted line 151 expression phase places (axle) on the right side of figure.From Figure 29, as can be seen as the relative ω of phase place quilt with respect to resonance
oDisplacement for example ± 45 ° or ± suitably keep 60 ° the time high amplitude (greater than about peak swing 2/3), and the scope that therefore can realize still keeps a large amount of resonance amplitudes simultaneously 90 ° to 120 ° whole phase place adjustment.Material with low acoustic attenuation can be used to form phase shift modulated layer 134.
For the third situation (not shown in FIG.), modulating layer 134 is as absorber.There is not the converter 141 of modulating layer 134 to be designed to be used to be strongly coupled to substrate 20 with operating frequency resonance.Absorbing the position that modulating layer 134 is used, the big high attenuation of acoustic resonance.Can be metal (for example, tungsten) and other ultrasound wave absorbing materials that epoxy resin is housed as the examples of material that absorbs modulating layer.
Figure 30 has illustrated the piezoelectric device 210 that is designed to be used for producing R wave according to an embodiment of the invention.The limit converter that is used for R wave, the mechanism 52 among Fig. 4 and 8 for example, if more effectively and mechanism 52, the mechanism in Figure 13 and 14 52 for example, the degree of depth that is limited to coupling R wave depth section then produces spur signal a small amount of.Therefore, the effective coverage of the piezoelectric layer in Figure 30 131 is limited to the degree of depth 212 with coupling R wave depth section.This can pass through piezoelectric layer 131, second electrode 133, modulating layer 134, conductive layer 130 or their various combination restriction to the degree of depth 212.In some cases, be desirably on the bottom (or second surface 28) of substrate 20 one deck (not shown) is provided, its can damping all sound pattern is except R wave.The example of such damping layer is included in the rigid optical combination of the epoxy layer between substrate 20 and the device (for example, display).
Although can provide periodic modulation layer 134 on conductive layer 133 by for example deposition, the periodic modulation layer also can obtain by additive method.For example, piezoelectric layer 131 self can be selected the zone by annealing in periodic mode so that those zone invalid modulation (for example, by spot heating piezoelectric on phase transition, for example Curie point of stupalith).
Figure 31 has illustrated that wherein substrate 20 according to an embodiment of the invention can periodically change to produce the example of modulation.For example, substrate 20 can use for example laser beam and by mark 135 periodically, to form periodic structure of the local energy.If substrate 20 is a glass, the triple Nd:YAG that operate with 355nm can be used in the trickle broken glass of the interior zone of substrate 20.The relevant coupling that this trickle broken glass can have the sound characteristics (for example, the damping of increase or scattering) of modification and be used for sound wave provides periodic modulation.In other words, the optical diffraction gratings with a plurality of rule marks 135 at interval is formed in the substrate 20.Usually, the alternate manner of the acoustic behavior by the converter 141 on any modulation sidewall 32 can be eliminated the demand to periodic modulation layer 134.Just to giving an example, piezoelectric layer 131 can be a pressure pattern piezoelectricity.
Turn back to Figure 24, make in converter 141 processing of successive layers (first conductive layer 130, piezoelectric layer 131, second conductive layer 133) " being fired (fired-on) " therein.That is to say, with the form applied layer 130,131 of uncured material and 133 and heat curing then.Modulating layer 134 also can be fired.Ceramic known being used for the silver of packing into of low relatively sintering temperature (silver-colored imitation frosted glass) makes conductive traces and can be used on the serigraphy form on glass substrate.Just to giving an example, silver-colored imitation frosted glass can be used for the making of conductive layer 130 and 133.For the modulating layer 134 shown in Figure 16 B and the 17B, can use any rigid material with low acoustic loss, comprise the same material that is used for layer 130 and 133 for convenience of making.Replacedly, if modulating layer 134 is used as damping layer, modulating layer 134 can be made by the tungsten polymkeric substance of heat curing.
The embodiment of the structure of being fired for example its middle level as shown in Figure 24, the suitable example of the piezoelectric of layer 131 is collosol and gel based piezoelectric ceramic materials, for example is dispersed in Al respectively
2O
3With PZT and the LiTaO in the PZT sol gel solution
3Particle.Film with 50-100 μ m thickness can be fired generation by such sol gel solution.Can use other piezoceramic material, for example admixture the potassium-sodium niobate of strontium, perhaps leadless piezoelectric ceramics for example contains the piezoelectric ceramics of bismuth.Such piezoelectric can apply by the method for any appropriate, comprises serigraphy or spraying.After applying with uncured attitude, the material of such layer 134 can application of heat and solidify.The material of noting layer 130,131,133 and 134 can sequentially be applied and be solidified, and applies in identical heating cycle and solidifies the perhaps combination between them.
If piezoceramics layer 131 is piezoceramic materials of firing, need the utmost point to connect so that as piezoelectric ceramics.Can realize that the utmost point connects by between conductive layer 130 and 133, applying big voltage, thereby in the material of piezoelectric layer 131, produce highfield.Must carry out this utmost point behind any treatment step that will take place in the temperature of the ferroelectrie Curie temperature that surpasses piezoelectric connects.
If piezoelectric 131 is piezoceramic materials of firing, backing material must selectedly can withstand sintering temperature and any subsequent annealing temperature of firing piezoceramic material.For example, can use Coming 1737, be 975 ℃ because its annealing point is the softening point of 721 ℃ and it, and the two has all surpassed the Al that is included in of foregoing description
2O
3With the PZT and the LiTaO that disperse respectively in the PZT sol gel solution
3Sintering temperature of the sol-gel recipe of particle (450 ℃) and annealing temperature (650 ℃).
Figure 32 has illustrated the grating transducer 400 that is formed on according to one embodiment of present invention on the substrate 20.First track 406 is formed on the second surface 28.First track 406 comprises for example silver-colored imitation frosted glass of conductive material.First track 406 can use serigraphy, impression or other deposition techniques and be applied in.First side 410 of pressure mode piezoelectric element 408 is applied on the part of first track 406 and interconnection with it.Second track 414 be formed on the second surface 28 and be applied to side surface 418 and second side 412 of piezoelectric element 408 on and with it the interconnection.As discussed further below, the electrical connection of excitation piezoelectric element 408 and each interconnection of first and second tracks 406 and 414.
Figure 33 has illustrated the pectination converter 420 that is formed on the substrate 20 according to an embodiment of the invention.As at Figure 32, grid element 432 is formed on the touch-surface 24.First track 422 is formed on the touch-surface 24 and on grid element 432.First side 424 of thickness mode piezoelectric element 426 is applied on the part of first track 422 and interconnection with it.Second track 430 be formed on the touch-surface 24 and be applied to side surface 434 and second side 428 of piezoelectric element 426 on and with it the interconnection.
Figure 34 illustrates the interdigital converter 440 that is formed on the substrate 20 according to an embodiment of the invention.First track 442 and second track 444 are formed on the touch-surface 24 of substrate 20.It is the finger (not shown) of interdigital each other that first and second tracks 442 and 444 have, for example first and second electrodes 88 and 90 of Fig. 8.Piezoelectric element 448 is applied to the top of first and second tracks 442 and 444 and interconnection with it.
Figure 35 has illustrated the touch sensor 450 with the converter 452-458 that forms along the periphery 486 of touch-surface 24 according to an embodiment of the invention.Reflecting element 460 forms reflective array with respect to limit 462-468 formation at 45 and in periphery 486.
Converter 452-458 can comprise in the converter 400,420 or 440 of Figure 32-34.The first and second track 470-484 are printed on the touch-surface 24 near limit 466 and 468, and with illustrated suitable converter 452-458 interconnection.This interconnection is determined by the type of the converter that uses.The first and second track 470-484 are for example by welding and cable 488 interconnection.
Figure 36 has illustrated the replaceable converter 490 that is formed on according to one embodiment of present invention on the substrate 20.First and second tracks 492 and 494 are applied on the touch-surface 24.Single track has been shown in the view of Figure 36.As discussing in Figure 34, first and second tracks 492 and 494 can be used for interdigitated electrodes.First side 550 of piezoelectric element 498 is applied on first and second tracks 492 and 494.Ground-electrode 548 is applied on the touch-surface 24 and second side 552 and the side surface 554 that arrive piezoelectric element 498.
Figure 37 has illustrated the touch sensor 500 with the converter 502-508 that forms along the periphery 544 of touch-surface 24 according to an embodiment of the invention.Reflecting element 510 forms reflective array about limit 512-518 formation at 45 and in periphery 544.
Converter 502-508 can comprise the converter 490 of Figure 36.Ground connection, the first and second track 520-542 be printed on the touch-surface 24 and with suitable converter 502-508 interconnection.By welding ground connection, the first and second track 520-542 and cable 546 interconnection.
Referring to Figure 35 and 37, the controller (not shown) provides electric signal to converter and if necessary provide electric signal to ground by ground-electrode by first and second electrodes.It is effective once having only a converter.In illustrated configuration, used 4 converters, and therefore two converters can be used as receiving converter as transmitting converter and two converters.Be understandable that can form other be configured to from have as or transmit or receive, perhaps transmit and receive the two, perhaps cover the touch sensor received signal of two or three converters of the different piece of touch-surface 24 or area.
Figure 38 has illustrated the replaceable touch sensor 214 that forms according to one embodiment of present invention.Sidewall 32 and limit 22 are cleaned, as previously mentioned.Substrate 20 has converter 160, waveguide 161 and the reflective array 162 that is arranged on the sidewall 32.Reflective array 162 can intersect near limit 22 formation or with limit 22.On each sidewall 32, converter 160, waveguide 161 and reflective array 162 can be called as mechanism 171.Randomly, additional waveguide and associated array can be formed on the touch-surface 24 of substrate 20.As shown in Figure 38, can be on sidewall 32 aligning wave guides 161 and reflective array 162 with further minimizing be used to produce, directed and detect the required edge regions 216 of touch sensor mechanism 171 of sound wave.Reflective array 162 and waveguide 161 can be formed by groove in the substrate 20 or the outstanding of material that is deposited on the sidewall 32 of substrate 20.Converter 160 produces and is coupled to the sound wave of waveguide 161, thereby focuses on acoustic energy in the core of waveguide 161.This acoustic energy then relies on array 162 to be coupled to substrate 20 as surface acoustic wave.The mechanism 171 that comprises converter 160, waveguide 161 and array 162 can operate and produce sound wave and their orientations are passed the touch area 24 of touch sensor 214, perhaps detects the sound wave of the touch area 24 of having passed touch sensor 214.
Because sound wave is broadcast along the long pass of waveguide 161, energy will be lost.In some tactile sensors 214 were used, the length of travel path was not depended in expectation strongly by the acoustic energy of the detecting device reception of for example mechanism 171.Therefore, can be in conjunction with various acoustical signal force equalization mechanism, for example various reflective arrays that are designed to equalize signal amplitude as the function of path.These designs are included in the change on reflecting element high or wide of compensatory reflex array, the perhaps change in the density of reflecting element.
Figure 39 has illustrated the waveguide 161 that is positioned and realizes signal equalization according to an embodiment of the invention.Converter 160, waveguide 161 and reflective array 162 are illustrated as being arranged on the sidewall 32 of touch sensor substrate 20.Formation has crooked waveguide 161 along the length 218 of sidewall 32, and near first end 220 of waveguide 161 converter 160 further located from array 162 when the highest with the acoustic energy of box lunch in waveguide 161.At second end 222 away from converter 160, that waveguide 161 is located in is more close, intersect and/or on the top of array 162 when the acoustic energy in waveguide 161 is minimum.By curved waveguide 161 by this way, can realize signal equalization.
Figure 40 has illustrated the waveguide 161 that realizes signal equalization that is formed according to an embodiment of the invention.Because the distance to converter 160 increases, perhaps waveguide 161 moves to second end 222 from first end 220, and the core of waveguide 161 has been weakened core effectively by constriction.Because core width is reduced, sound wave becomes and still less is subject to waveguide 161 and expansion, and sound wave has increased overlapping with reflective array 162.In this case, the interval between the element 163 of reflective array 162 also change with the explanation convergent waveguide core to any influence on the wave velocity in the core.Be understandable that can be applied to wherein waveguide 161 by the signal equalization that provides as Figure 39 and 40 illustrated waveguides 161 that be formed and/or the location is arranged to situation on the touch-surface 24 with being equal to.
Figure 41 has illustrated another embodiment of touch sensor 224 according to an embodiment of the invention.Substrate 20 (referring to Fig. 2) with cleaning sidewall 32 is provided.Provide can along it the axle conduct acoustic waves be with 180.This is with 180 to be waveguides, has the function of the waveguide 161 that is similar to Figure 38-40.Along the sound waves with 180 propagation can be the sound wave of rarefaction wave, flexural wave or other types.Be disposed on the sidewall 32 of glass substrate 20 with 180.This comprises that with 180 usefulness the bonding coat 186 of attaching components 187 is attached to sidewall 32.Assembled pressure mode piezoelectric element 183 on an end 181 of 180 and, randomly provide energy dump area 184 with 180 relatively on terminal 182.This energy dump area 184 can be applied to an end of 180 with inhibitory reflex.This energy dump area 184 can comprise any suitable material, for example, adds the epoxy resin of tungsten, and it can be adjusted the acoustic impedance with coupling substrate 20.At the sound wave that is coupled to 180 sound waves that produce in the substrate 20, this sound wave is very sensitive to the touch on substrate surface 24.
With 180 can comprise can conduct acoustic waves any material, for example metal or glass.Preferably, the thermal expansivity of carrying material (CTE) approaches the thermal expansivity of substrate 20.In some applications, the thickness that is approximately equal to glass substrate with 180 height (measuring along the height of sidewall 32) is good.The thickness in preferred area 180 (measuring perpendicular to its height) is little so that it can not extend big distance from substrate 20, therefore keeps in touch the minimized in size of the external edge of formula sensor 224.The metal tape that comprises glass bar and have a CTE that approaches glass with operable examples of material is (for example, as Invar
TMNickel alloy or associated materials).The example of the suitable xsect of carrying material is the rectangle of 3mm * 1mm and the square of 1/2mm * 1/2mm.
For example, the example of the electric excitation of piezoelectric element 183 causes the compressional wave propagated along with 180 length.Because with the boundary condition that 180 xsect is forced, the ripple in 180 is not pure pressure wave, draws the nurse symmetrical wave but be described as rarefaction wave, dialational ripple or lowest-order better.Propagate owing to have the longitudinal component ripple, the material in 180 has the component motion of the direction of wave travel of being parallel to (just, along with 180 length).
Bonding coat 186 provides the interval of the bonding part 187 of mechanical bond and periodic intervals to determine from the ripple that produces with 180 to the scattering angle that is transmitted into the sound wave in the substrate 20.This attaching components 187 is formed as the periodic structure that is similar to reflective array.If for example touch sensor 224 is rectangles, and need scatter to sidewall 32 with 90 °, then the interval of bonding part 187 should equal the wavelength with the sound wave in 180.In Figure 41, indicate with 90 ° of scatterings with arrow 188.As an example of coupling mechanism, attaching components 187 can transmit vertically moving of shearing force thereby ripple that will be in 180 and be coupled in Figure 41 laterally moving by the shear wave in substrate 20 of arrow 189 indications.The compression strenght of attaching components 187 also can be with the longitudinal component (this coupled mode is not shown in the drawings) that moves that laterally moves the touch-sensing ripple (for example, R wave) that is coupled in substrate 20 of band ripple.Be with 180 also can be used for receiving sound wave from substrate 20.
Figure 42 has illustrated the touch sensor 226 of combined belt 180 according to an embodiment of the invention.Be with 180 to be designated as and to be with 228 and 230 for clear.Have first of piezoelectric element 232 and arrange along the first side wall 234 of substrate 20, and have second of piezoelectric element 236 and arrange in abutting connection with sidewall 238 along second of substrate 20 with 230 with 228.Shown in arrow 190, produce and by can be away from sidewall 240 reflections and by being with 228 to be orientated by piezoelectric element 232 and to detect with 228 shear waves that are directed in the substrate 20 by piezoelectric element 232.Shown in arrow 191, produce and by can be away from sidewall 242 reflections and by being with 230 to be orientated by element 236 and to detect with 230 shear waves that are directed in the substrate 20 by piezoelectric element 236.The electronic equipment (not shown) that is connected to piezoelectric element 232 and 236 can be used to time-multiplexed signal so that adjust between transmission and receiving mode.
Interchangeable, touch sensor can comprise the band (not shown) that is installed on all sidewalls 32.For example,, use 4 and be with 180, wherein operate in transfer mode and operate in receiving mode with 180 two with two in 180 for rectangular substrate 20.
If be installed to substrate 20 sidewall 32 be with 180 to be designed in substrate 20, encourage R wave, attaching components 187 can be bonded on the sidewall 32, in the scope of about Rayleigh wavelength of touch-surface 20 so that be coupled to R wave effectively, shown in Figure 22 and 23.Depth dimensions with 180 may mate the depth dimensions of the attaching components 187 that maybe may not match.
With 180 and substrate 20 between stiffness of coupling be subjected to one or more influence in rigidity, thickness or the bond area of attaching components 187.Preferably, the amplitude that is coupled to the sound wave in the substrate 20 is not subjected to a little the influence of being coupled into along sidewall 32.Any influence with 180 and substrate 20 between the parameter of coupling can be used as along the balanced acoustical signal amplitude of function of the distance of the length of substrate 20.
Figure 41 has illustrated the situation that bonding coat 186 replaces between the existence of jointing material (bonding part 187) and jointing material do not exist.This provide with 180 and substrate 20 between the spatial modulation of stiffness of coupling.Exist over-over mode to provide coupling required spatial modulation, for example do not have the bonding coat of air gap, but the mechanical property of jointing material (for example hardness) is modulated.Be understandable that and be with 181 can from substrate 20, separate with attaching components 187 and to form and then to be attached as assembly.
Figure 43 shows the touch sensor 560 with the converter 562 on the sidewall 32 that is formed on substrate 20 according to an embodiment of the invention.When being energized, converter 562 produces along the limit 22 and propagates and pass the side wave that touch-surface 24 is reflected by reflective array 564.Such touch sensor is described in the U.S. Provisional Patent Application sequence number 60/562,461, acts on behalf of number of documents ELG064-US1, and it is hereby expressly incorporated by reference.Converter 562 can comprise that screen printing technique that utilization is formerly described and other technologies are printed on the piezoelectric on the sidewall 32.Replacedly, converter 562 can comprise independent formation and be adhered to the piezoelectric of sidewall 32.
For any embodiment of the touch sensor of here describing, touch sensor can be connected to controller by electrical interconnection.Can be with any suitable interconnection, for example, optical harness.Replacedly, this touch sensor can directly be integrated in the touch sensor system, and for example, touch sensor can be integrated in the display to make touch-screen.Randomly, realize serigraphy on the surface of the substrate that can in vacuum fluorescent display, use, for example panel board.For example, substrate can form the exterior layer of display device, for example vacuum fluorescent display.
The configuration that is understandable that above-mentioned device only be principle of the present invention application explanation and a lot of other embodiment and changes can be arranged under the situation of the spirit and scope that do not break away from claim.
Claims (8)
1, a kind of touch sensor comprises:
Substrate can conduct acoustic waves, and this substrate comprises the first surface with a touch sensitive region and is included in first limit and the first side wall that first surface intersects; And
Forwarder, be provided on the first side wall of substrate, be used to produce the sound wave of directly propagating by at least a portion of touch sensitive region from the first side wall, described sound wave (i) comprises shear wave and (ii) forms acute angle with the first side wall, described forwarder comprises (i) piezoelectric transducer and (ii) periodic modulation layer, this piezoelectric transducer comprises first conductive layer that is provided on the first side wall, second conductive layer that is applied to the piezoelectric on first conductive layer and provides as the lasting coating on the piezoelectric, described piezoelectric be the process heat curing after imposing on first conductive layer.
2, touch sensor as claimed in claim 1, wherein first surface and the first side wall on first limit with about 90 ° angle of intersection.
3, touch sensor as claimed in claim 1 further comprises the detecting device on second sidewall that is provided at substrate, and this detecting device detects the sound wave after at least a portion of passing touch sensitive region, and described second sidewall and described the first side wall intersect vertically.
4, touch sensor as claimed in claim 1, wherein said piezoelectric transducer is first converter, described forwarder further comprises second converter, first and second converters are provided at respectively on the first and the 3rd relative sidewall of substrate, and first and second converters produce along acutangulating first and second sound waves of propagating on the direction of orientation with relative the first and the 3rd sidewall.
5, touch sensor as claimed in claim 1, wherein modulating layer is formed with the decay sound wave, modulates sound wave with respect to the mode of one of phase place of resonant frequency tuning reconciliation voicing ripple and mobile sound wave.
6, a kind of method that detects the contact on the touch sensitive region of substrate that can conduct acoustic waves, this substrate comprises the first surface with touch sensitive region, this substrate has first and second sidewalls that intersect with first surface, described second sidewall and described the first side wall intersect vertically, and this method comprises:
Produce sound wave by forwarder at the first side wall that approaches substrate, described sound wave (i) comprises shear wave and (ii) forms acute angle with the first side wall, described forwarder comprises (i) piezoelectric transducer and (ii) periodic modulation layer, first conductive layer that is provided on the first side wall, second conductive layer that is applied to the piezoelectric on first conductive layer and provides as the lasting coating on the piezoelectric are provided this piezoelectric transducer, and described piezoelectric is the process heat curing after imposing on first conductive layer;
At least a portion that the part of the first side wall by substrate is directed to sound wave in the substrate and passes touch sensitive region; And
Second sidewall that approaches substrate detects sound wave.
7, method as claimed in claim 6 wherein detects the interference that further comprises in the detection sound wave, and this interference is the indication of contact event location.
8, method as claimed in claim 6, wherein orientation further comprises along the directed sound wave of linear direction, this linear direction directly extends by at least a portion of touch sensitive region from the source of locating along the length of the first side wall, and wherein sound wave is finished signal path and is not reflected.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US56245504P | 2004-04-14 | 2004-04-14 | |
| US60/562,455 | 2004-04-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101609327A Division CN101387933B (en) | 2004-04-14 | 2005-04-13 | Acoustic touch sensor |
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| Publication Number | Publication Date |
|---|---|
| CN1977236A CN1977236A (en) | 2007-06-06 |
| CN100530057C true CN100530057C (en) | 2009-08-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101609327A Expired - Fee Related CN101387933B (en) | 2004-04-14 | 2005-04-13 | Acoustic touch sensor |
| CNB2005800113297A Expired - Fee Related CN100530057C (en) | 2004-04-14 | 2005-04-13 | Acoustic touch sensor |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101609327A Expired - Fee Related CN101387933B (en) | 2004-04-14 | 2005-04-13 | Acoustic touch sensor |
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| JP (3) | JP4989461B2 (en) |
| CN (2) | CN101387933B (en) |
| AU (1) | AU2005236440A1 (en) |
| GB (3) | GB2428092B (en) |
| WO (1) | WO2005103872A2 (en) |
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| JP4772460B2 (en) * | 2005-11-10 | 2011-09-14 | 宸鴻光電科技股▲分▼有限公司 | Contact control panel wiring structure |
| EP2017703A1 (en) * | 2007-07-09 | 2009-01-21 | Sensitive Object | Touch control system and method for localising an excitation |
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| CN102339175A (en) * | 2010-07-15 | 2012-02-01 | 汉王科技股份有限公司 | Touch sensitive locating device and method |
| KR101815006B1 (en) * | 2013-05-13 | 2018-01-09 | 삼성전자주식회사 | Apparatus and method for sensing bending and touch using optical waveguide |
| US20150102994A1 (en) * | 2013-10-10 | 2015-04-16 | Qualcomm Incorporated | System and method for multi-touch gesture detection using ultrasound beamforming |
| US20150220214A1 (en) * | 2014-01-31 | 2015-08-06 | Samsung Display Co., Ltd. | Multi-touch acoustic beam sensing apparatus and driving method thereof |
| KR20160008359A (en) * | 2014-07-14 | 2016-01-22 | 주식회사 코아로직 | Pressure sensor for touch panel |
| US9952095B1 (en) | 2014-09-29 | 2018-04-24 | Apple Inc. | Methods and systems for modulation and demodulation of optical signals |
| US9939974B2 (en) | 2014-12-29 | 2018-04-10 | Lg Display Co., Ltd. | Contact sensitive display device with thin profile and low external light reflectivity |
| US11048902B2 (en) | 2015-08-20 | 2021-06-29 | Appple Inc. | Acoustic imaging system architecture |
| US11036318B2 (en) | 2015-09-30 | 2021-06-15 | Apple Inc. | Capacitive touch or proximity detection for crown |
| US10671222B2 (en) | 2015-09-30 | 2020-06-02 | Apple Inc. | Touch sensor pattern for edge input detection |
| WO2018023080A2 (en) | 2016-07-29 | 2018-02-01 | Apple Inc. | Methodology and application of acoustic touch detection |
| JP6795816B2 (en) * | 2017-02-24 | 2020-12-02 | ベステル エレクトロニク サナイー ベ ティカレト エー．エス． | Acoustic-optical transducers, arrays and methods |
| US11157115B2 (en) | 2017-03-31 | 2021-10-26 | Apple Inc. | Composite cover material for sensitivity improvement of ultrasonic touch screens |
| US10606418B2 (en) | 2017-03-31 | 2020-03-31 | Apple Inc. | Ultrasonic touch detection on stylus |
| US11144158B2 (en) | 2017-05-24 | 2021-10-12 | Apple Inc. | Differential acoustic touch and force sensing |
| US11334196B2 (en) | 2017-05-24 | 2022-05-17 | Apple Inc. | System and method for acoustic touch and force sensing |
| CN208722170U (en) | 2017-05-24 | 2019-04-09 | 苹果公司 | It touches and power sensitive device, electronic equipment and wearable audio frequency apparatus |
| CN109427975B (en) * | 2017-08-23 | 2021-01-22 | 京东方科技集团股份有限公司 | Flexible substrate, preparation method thereof, bending detection method and flexible display device |
| US10949030B2 (en) | 2017-09-26 | 2021-03-16 | Apple Inc. | Shear-poled curved piezoelectric material |
| US10802651B2 (en) | 2018-01-30 | 2020-10-13 | Apple Inc. | Ultrasonic touch detection through display |
| US11366552B2 (en) | 2018-02-06 | 2022-06-21 | Apple, Inc. | Ultrasonic polarizer |
| EP3803690B1 (en) * | 2018-06-04 | 2023-08-09 | Fingerprint Cards Anacatum IP AB | Acoustic biometric imaging system with acoustic impedance matched opaque masking layer, and manufacturing method |
| US10725573B2 (en) | 2018-08-06 | 2020-07-28 | Apple Inc. | Annular piezoelectric structure for ultrasonic touch sensing |
| US11950512B2 (en) | 2020-03-23 | 2024-04-02 | Apple Inc. | Thin-film acoustic imaging system for imaging through an exterior surface of an electronic device housing |
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| WO1984000427A1 (en) * | 1982-07-10 | 1984-02-02 | Syrinx Precision Instr | Data input device |
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| JPS6266689A (en) * | 1985-09-19 | 1987-03-26 | Sumitomo Bakelite Co Ltd | Manufacture of composite sheet with piezoelectric or pyroelectric property |
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-
2005
- 2005-04-13 CN CN2008101609327A patent/CN101387933B/en not_active Expired - Fee Related
- 2005-04-13 GB GB0622184A patent/GB2428092B/en not_active Expired - Fee Related
- 2005-04-13 JP JP2007508575A patent/JP4989461B2/en not_active Expired - Fee Related
- 2005-04-13 GB GB0816653A patent/GB2449809A/en not_active Withdrawn
- 2005-04-13 CN CNB2005800113297A patent/CN100530057C/en not_active Expired - Fee Related
- 2005-04-13 GB GB0723396A patent/GB2443744B/en not_active Expired - Fee Related
- 2005-04-13 WO PCT/US2005/012891 patent/WO2005103872A2/en active Application Filing
- 2005-04-13 AU AU2005236440A patent/AU2005236440A1/en not_active Abandoned
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2010
- 2010-03-31 JP JP2010080377A patent/JP2010232664A/en active Pending
- 2010-12-28 JP JP2010292087A patent/JP2011123904A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN1977236A (en) | 2007-06-06 |
| AU2005236440A1 (en) | 2005-11-03 |
| CN101387933A (en) | 2009-03-18 |
| GB2428092A (en) | 2007-01-17 |
| JP2011123904A (en) | 2011-06-23 |
| CN101387933B (en) | 2011-05-18 |
| GB0723396D0 (en) | 2008-01-09 |
| GB0622184D0 (en) | 2006-12-20 |
| WO2005103872A2 (en) | 2005-11-03 |
| GB0816653D0 (en) | 2008-10-22 |
| JP2007533039A (en) | 2007-11-15 |
| GB2443744A (en) | 2008-05-14 |
| JP2010232664A (en) | 2010-10-14 |
| WO2005103872A3 (en) | 2006-04-06 |
| GB2449809A (en) | 2008-12-03 |
| GB2443744B (en) | 2008-10-29 |
| JP4989461B2 (en) | 2012-08-01 |
| GB2428092B (en) | 2008-04-16 |
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