CN100520376C - Surface inspecting method and system for finding imperfection - Google Patents
Surface inspecting method and system for finding imperfection Download PDFInfo
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- CN100520376C CN100520376C CNB2004800310464A CN200480031046A CN100520376C CN 100520376 C CN100520376 C CN 100520376C CN B2004800310464 A CNB2004800310464 A CN B2004800310464A CN 200480031046 A CN200480031046 A CN 200480031046A CN 100520376 C CN100520376 C CN 100520376C
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Abstract
When an irradiation light in a specified pattern is applied onto a surface to be inspected to inspect the surface by a picked-up image of the surface to be inspected in an irradiated state, an irradiation light, that is distributed in a mesh form so as to provide an identical shape in each mesh and that has an irradiation area, on a plane vertical to the optical axis, smaller than a non-irradiation area, is applied from an irradiation surface, the surface to be inspected is inspected based on brightness information in the image area, corresponding to the non-irradiation area, of the surface to be inspected in the picked-up image, and an illuminated defect having an intermediate brightness occurring in a dark surface formed in a mesh is extracted as a defect candidate point.
Description
Technical field
The present invention relates to the irradiates light to the layout patterns that is examined face irradiation regulation, the surface imperfection inspection technology that the face that is examined of irradiates light is made a video recording and checked is understood in contrast.
Background technology
As the representation example that this surface imperfection is checked, can enumerate the technology of the inspection of the application face that is used for automobile body (being bumper specifically).In such surface imperfection was checked, being present in became it as the concavo-convex or wound on the application face that is examined face etc. and checks object.
As the inspection technology of using the irradiates light that on light-emitting area, becomes pattern, following technology is arranged: to the application face so-called strip that throws light on, promptly produce the irradiates light of the light and shade of striation, to being in the application face shooting of illumination condition, use the photographed images that obtains to carry out surface inspection by video camera.
The concrete formation of this check system of expression in Figure 17.
In the defect inspecting system shown in Figure 17, input person 204 takes out bumpers from there being the stock station 202 that becomes a plurality of bumpers of checking object at any time, is installed in to keep bumper 1 and carry out in the robot 22 of posture changing.
Robot 22 around turning axle 22d rotation shown in Figure 17, changes the posture of bumper 1 to keep the state of bumper 1.Corresponding to this posture changing, in system, possesses lighting device 220 with the band pattern illumination light of regulation.In illustrated embodiment, this device 220 carries out posture changing with wrap-around bumper 1 mobile space is set.The lighting pattern of irradiates light is the strip LO-pattern that is parallel to the turning axle 22d of bumper 1.
At the assigned position of lighting device 220, be provided with a plurality of video cameras 4, to take according to LO-pattern by these video cameras 4 to the irradiates light of bumper 1, image pickup result is delivered to the parsing side, and the evaluation of zero defect etc. is arranged.
Be positioned at the overlooker 201 in robot 22 downstreams, after the maintenance posture changing that the robot 22 that is through with carries out, take off bumper 1, deliver to the later operation of visual examination etc.
At this moment, overlooker 201 obtains the evaluation information from flaw evaluation mechanism, obtains the information of the position that should note in inspection, carries out operation rapidly reliably.
The ultimate principle that the surface imperfection of this formation of expression is checked in Figure 18.
As shown in the drawing, make under the application situation mobile towards prescribed direction (for example R direction), the image section of the defective that is called male and fomale(M﹠F) on the application face of being positioned at, do not change the coordinate of the direction vertical (for example about direction of the paper among Figure 18) with above-mentioned moving direction R, make a video recording while changing this direction coordinate (R coordinate) but utilize, can carry out the detection of defective.
That is, defect area is clapped secretlyer owing to utilize at bright striped position in photographed images, claps to such an extent that brightlyer come defect recognition at darker striped position, so can be used as the light of striped and find defective than the middle gray image of dark-part.Use the technology of same inspection principle to be documented in the patent documentation 1.
And then, in order to detect defective as concavo-convex being called " orange peel " of surface periodic, have from find out the spot (with reference to patent documentation 2) of application thickness as the fluctuation on the photographed images of the boundary line of the light and shade striped of irradiates light.
In this checks gimmick, do not need to move the face that is examined, but general, spreading all over the wider scope of application face produces the disorder generation of dislocation on the boundary line image of striped application face becomes detected object.
Patent documentation 1: the spy of Japan opens flat 8-145906 communique (Fig. 5, Fig. 9 and Figure 15)
Patent documentation 2: the spy of Japan opens flat 9-126744 communique (Figure 13)
Summary of the invention
In patent documentation 1 and 2 so existing surface imperfection are checked, the LO-pattern of striated because the Lighting Division that illumination is examined face throws light on application face, so be used for surface inspection irradiates light around going into, only with the direction generation of vertical (transversal) of the LO-pattern of striated.
As a result, be examined on the face, existing under the situation of defective, be difficult to find this defective at the stripe direction (the same direction of striped extending direction) of this candy strip.
And then, according to this technology, can only choose the convex defective in fact, about being shining into the position,, survey so occur flase drop easily because be to be difficult to obtain two of light and shade difference to be worth processing.Moreover, be difficult to find outward appearance line and near defective thereof.
And then, shown in Figure 17,18, because the lighting optical axis of the irradiates light that is used to check and the shooting optical axis intersection of video camera, so insufficient on this aspect of the light quantity that is taken into video camera, be still waiting to improve.
Moreover, in such check system, since the complexity of optics, the complexity so the processing of flaw evaluation side is also had to.Simultaneously, produce the accurate necessity of position relation that makes irradiation system, camera system.
The objective of the invention is to obtain a kind of surface imperfection inspection technology, the formation of irradiation system and camera system is the most reasonable and simple, can carry out the high inspection of reliability.
The application's surface defect inspection method, the irradiates light to the pattern form that is examined face irradiation regulation utilizes the above-mentioned photographed images that is examined face that is in illuminated state to check the above-mentioned face that is examined, it is characterized in that,
As above-mentioned irradiates light, shine following irradiates light from shadow surface: be the mesh-shape distribution so that the shape in each mesh is identical, and the irradiated area in the plane vertical with optical axis (area of luminous component) is less than non-irradiated area (becoming the area than the part of dark areas)
Based in the above-mentioned photographed images corresponding to the light and shade information of the image-region of the above-mentioned non-irradiation area that is examined face, check the above-mentioned face that is examined.
In the method, be mesh-shape from shadow surface irradiation light and distribute, in its light, have the irradiates light that becomes the closed region than dark-part (dark face).
If have the face that is examined of this irradiates light to make a video recording to irradiation with camera heads such as ccd video cameras, be the plane then at the face of being examined, do not having on this face under the situation of defective, the mesh-shape LO-pattern of irradiation side is injected with almost maintaining the original state.Relative therewith, exist under the situation of defective, under defective is positioned at than dark-part etc. under the situation,,, inject the zone (non-irradiation area) that should become originally than dark-part owing to defective makes the light path bending from the light of the light irradiation of irradiation side.
As a result, can form independent brightened dot than the substantial middle in the mesh of dark-part in conduct.In this application, utilize this phenomenon, can detect defective.In addition, identical by shape in the mesh, can detect the defective that may exist that is positioned at any mesh with roughly the same condition.
And then, this formation, by the corresponding irradiation of mesh portion, corresponding non-irradiation portion in the mesh, the non-irradiated area of bigger selection as the light that is presented as than dark-part, can make the probability that detects defective higher.
Moreover, in this application, because light forms mesh-shape, so can be from surrounding complete cycle than dark-part, this light of injecting, inject the assigned position pixel of camera head, can detect the defective of the shape that is difficult in the prior art to detect, size, the degree of depth with two-dimensional expansion.
In inventors' research, make the size of mesh, mean diameter (mesh being regarded as the diameter of round situation) for the situation about 25mm under, can discern to overlook with general ccd video camera and be roughly circle, radius 0.3mm, the defective about degree of depth 0.03mm.
Moreover, when checking,,, as clear and definite defect image, can carry out reliable detection in some meshes portion seizure defective so follow this to move on one side owing to make tested having a medical check-up usually with respect to the surface defect inspection apparatus inspection successively that relatively moves.
And then, because light and become nettedly than the boundary line of dark-part so when detecting defectives such as " orange peels ", can eliminate picture and have the detection that has striped in the type now, has certain party tropism's problem.
Surface defect inspection apparatus as using such surface defect inspection method possesses:
Irradiation means shines the irradiates light of predetermined pattern shape on the face of being examined; Image mechanism has the above-mentioned photographed images that is examined face of the illuminated state of above-mentioned irradiates light to make a video recording to being in irradiation; Flame Image Process mechanism carries out Flame Image Process to the photographed images that is obtained by above-mentioned image mechanism,
As above-mentioned irradiates light, above-mentioned irradiation means is from the following irradiates light of shadow surface irradiation: be that mesh-shape distributes so that the interior shape of each mesh is identical, and the irradiated area in the plane vertical with optical axis is less than non-irradiated area,
Above-mentioned Flame Image Process mechanism in above-mentioned Flame Image Process, constitutes the light and shade information that can handle corresponding to the image-region of the above-mentioned non-irradiation area that is examined face, thus can constituent apparatus.
Like this, in said method, be normal photographed images with the photographed images that above-mentioned irradiates light shone in the state that is examined face normally, be high brightness with the brightness of the irradiation area in the above-mentioned normal photographed images, the brightness of above-mentioned non-irradiation area is under the situation of low-light level
Be the zone that is present in the photographed images and be in the intermediate luminance between above-mentioned high brightness and the low-light level intermediate luminance zone as noticing that the zone checks preferably.
As mentioned above, in this application, owing to the main detection of carrying out defective of injecting that utilizes that existence by defective causes, so its defect image becomes as the high brightness of the brightness of illuminated portion with as the intermediate luminance between the low-light level of the brightness of non-illuminated portion from the light of the light of LO-pattern.
Therefore,, can choose defective easily and have the high zone of probability, can promptly choose the image-region that is thought of as the target defective with simple Flame Image Process by removing high brightness portion and low-light level portion.
Carry out the surface defect inspection apparatus of such processing, can realize with following formation: be normal photographed images with the photographed images that above-mentioned irradiates light shone under the state that is examined face normally, brightness with the irradiation area in the above-mentioned normal photographed images is high brightness, the brightness of above-mentioned non-irradiation area is under the situation of low-light level, above-mentioned Flame Image Process mechanism possesses the intermediate luminance zone and chooses mechanism, and choosing the zone that is present in the photographed images and is in the intermediate luminance between above-mentioned high brightness and the low-light level is the intermediate luminance zone.
Like this, the irradiates light that in the application's surface defect inspection method, uses, in its shadow surface, the light that is in emission side becomes mesh-shape, becomes than dark-part in its mesh.Therefore, this pattern is that not produce the situation of distortion and the face that is examined in plane and the shooting at mesh be to produce under the situation of distortion in curved surface and the shooting at mesh at the face of being examined, and all obtains embodying in photographed images.Therefore, in fact with the normal part of the defective mesh that it doesn't matter, in Flame Image Process, can get rid of from noting the zone as continuous light.
That is,, choose, and this continuous bright areas is got rid of from noting the zone, can easily choose zone corresponding to the image of defective as continuous bright areas by corresponding to the above-mentioned image-region that is examined the irradiation area of face.
In order to carry out such surface defect inspection method, can in above-mentioned Flame Image Process mechanism, possess:
Bright areas is chosen mechanism continuously, and choosing corresponding to the above-mentioned image-region that is examined the irradiation area of face is continuous bright areas; With eliminating mechanism, get rid of the above-mentioned continuous bright areas of choosing from noting the zone.
And then, in above-mentioned surface defect inspection method, be preferably in each sealing than choosing the image-region that is examined the non-irradiation area of face corresponding to above-mentioned in the dark areas, and under the above-mentioned situation that has bright areas independently in than dark areas, make above-mentioned independently bright areas for noting the zone.
In the method, notice that irradiates light becomes cancellous situation, the zone in this mesh be identified as base closed than dark areas, exist in than dark areas under the situation of bright areas independently at this, as the possibility that has unusual (defective) on non-check surface is arranged, become and note the zone.
This situation is being for example to be examined face to become curved surface, and basic shape of a mesh occurs under the situation of distortion by a relatively large margin, and also the shape facility that can utilize irradiates light to have is carried out effective defects detection.
Under the situation of the surface defect inspection apparatus that constitute to use this surface defect inspection method, Shuo Ming Flame Image Process mechanism at first possesses by constituting:
Sealing is chosen mechanism than dark areas, choose respectively as promptly seal corresponding to the image-region of the non-irradiation area that is examined face than dark areas;
Choose mechanism with independent bright areas, choose and be present in the sealing chosen, can carry out above-mentioned surface defect inspection method thus than the independently bright areas in the dark areas.
And then above-mentioned irradiates light preferably forms by being distributed as cancellous a plurality of light-emitting component in irradiation means.
In this case,, can reduce the possibility that the situation that adopts indirect irradiation means etc. follows the over sight (OS) etc. of the tiny flaw of luminance shortage to take place, guarantee to shine the abundant brightness of side, can carry out reliable and the high inspection of reliability by using light-emitting component.Moreover, by the distribution change of the light-emitting component on the blackboard for example, can obtain to have the irradiates light that any mesh-shape distributes.
And then, also as the back illustrates, in this application, make the focus of camera head and the consistent photographed images that obtains of shadow surface (light-emitting area) of irradiation side, but in this case, owing to the luminance difference of the illuminating part of light-emitting component and its background is obtained bigger,, the image position of the defective cause that becomes fuzzy, less image is easily showed so can make the image of the side of making a video recording more clear.
On the other hand, in irradiation means, irradiates light preferably sees through between the narrower slit of width that mesh-shape distributes and forms.In this case, in prior art, carry out, by before light source, disposing diffuser plate, be used to form and the consistent baffle of shape in the mesh in the place ahead assignment configuration more than dark-part, can obtain easily and irradiates light that the application's application target coincide.And then its boundary line also can be clear and definite.
And then, in the technology of explanation so far, preferably constitute the size that can regulate above-mentioned mesh.
As the application, utilizing under the situation of injecting light that produces by defective, if watch from the shooting side, then via the light path of the light of defect reflection, need to arrive the light that becomes mesh, whether the size (comprising aperture area, the degree of depth etc.) and the size of mesh injected with the defective of detected object have much relations.Therefore, by can regulating width of mesh, select the mesh of the size that the defective with respect to prescribed level can well detect, can detect well.
And then, preferably constitute and can regulate the above-mentioned luminance difference that is examined the irradiation area and the non-irradiation area of face.
For example, check to as if the situation of the application face of automobile body portion under, as its surface, have and regard the almost position on plane as, curved face part is also arranged.Therefore, there is inequality in the optical path distance in irradiation system, camera system, not necessarily can guarantees the light quantity that defects detection is required with good state all the time.
Yet, if above-mentioned luminance difference can be regulated, select easily to inject required light quantity according to the state of detected object, can carry out the high detection of reliability.
In the above description, the formation method that does not relate to irradiates light, but in existing technology, in order to form the irradiates light of the pattern that becomes the more complicated as the application, on manufacturing technology, the most real is to constitute to make a plurality of light-emitting components be distributed as the layout patterns of regulation.
Therefore, adopt in the situation of such formation and be used to reach the formation of the surface defect inspection apparatus of the application's purpose, as described below.
Surface defect inspection apparatus of the present invention possesses: a plurality of light-emitting components, with the layout patterns configuration of regulation; Video camera is made a video recording to the face that is examined that the irradiates light by above-mentioned light-emitting component throws light on; And efferent, export the shooting information of above-mentioned video camera, its feature constitutes and is,
Above-mentioned layout patterns makes above-mentioned light-emitting component be configured to the dark face of the residual regulation shape in the inboard continuously, and the above-mentioned video camera of configuration at least one above-mentioned dark face is to receive the irradiates light that is examined above-mentioned each light-emitting component of face reflection from above-mentioned.
In this surface defect inspection apparatus, check principle as it, also utilize injecting of irradiates light, but under the situation of utilizing this inspection principle, adopt the continuous layout patterns that is configured in the light-emitting component of Lighting Division in the mode of the dark face of residual regulation shape in the inboard.
Like this, at for example application face is the plane, the layout patterns of the light-emitting component in the Lighting Division is a hexagon, and the optical axis of irradiates light and the optical axis of video camera do not become hexagonal LO-pattern if having defective then make a video recording on application face under the situation of the normal direction of application face.Yet, under defective situation, because this defective on the dark face that is formed at hexagon inside, as shown in Figure 7, forms luminance area as isolated point.Therefore, the image that can cause this defective reliably with video camera is made a video recording.
And, by camera arrangement at dark face, can make the optical axis direction of the optical axis of irradiates light and video camera consistent, can carry out the so-called shooting inspection that falls to penetrating under the state.
In addition, if make the formation that possesses flaw evaluation portion in advance, this flaw evaluation portion estimates the output signal from above-mentioned efferent, thereby detects the above-mentioned defective that is examined in the face, then utilize the analytic technique of establishing, can automatically estimate, tell defective locations as image processing techniques.
So, above-mentioned layout patterns, the repetition layout patterns that preferably on prescribed direction, repeats.
By adopting such layout patterns, with the layout patterns position of for example light-emitting component be located at its inner dark face, can carry out Flame Image Process repeatedly with same benchmark at shooting as unit.Moreover, under the situation that the face that is examined is moving, can check the same facial position that is examined repeatedly, be examined the sufficient information that facial position can obtain to improve reliability about this.
And then, preferably possessing with respect to above-mentioned a plurality of light-emitting components and move the above-mentioned conveyer that is examined face relative to transporting with above-mentioned video camera, the repetition direction of above-mentioned layout patterns is above-mentioned relative carriage direction.
In this surface imperfection is checked, check under the state that the face that is examined moves automatically also that sometimes the repetition of the layout patterns by regulation is made a video recording repeatedly to the specific face that is examined successively, obtains shooting information, can carry out the high inspection of reliability thus.
And then the shooting face of light-emitting area of above-mentioned a plurality of light-emitting components (shadow surface) and above-mentioned video camera preferably is positioned at same plane.
In this inspection, the bright degree of the image in the photographed images, and then the position at its image position etc. all is subjected to the considerable influence of the face that is examined with respect to the position relation of light-emitting area and shooting face.From this point, by making light-emitting area and shooting face in the same plane, can easily construct their incorporate camera assemblies, only by regulating from this same plane to the distance that is examined face, the optics that just can limit in fact in the inspection constitutes, and also can establish the reliability of inspection from this point.
As described above, combination is a plurality of to be configured in the layout patterns that Lighting Division makes the dark face of residual regulation shape in the inboard continuously to light-emitting component if constitute, the luminous picture that then on the image of the face that is examined that obtains by video camera, has a plurality of light-emitting components, according to the conditions such as shape that at this moment are examined face, the luminous picture that produces continuous luminous element disposed is interrupted, with the worry of the nondescript problem of defective.
In order to solve this problem, surface defect inspection apparatus of the present invention comprises: Lighting Division constitutes a plurality of layout patterns that make light-emitting component be configured to the dark face of residual regulation shape in the inboard continuously of combination; Video camera is made a video recording to the face that is examined that the irradiates light that is produced by above-mentioned Lighting Division throws light on; With flaw evaluation mechanism, estimate the output signal of above-mentioned video camera, detect the above-mentioned defective that is examined in the face, above-mentioned flaw evaluation mechanism, possess: isolated point is chosen portion, and the above-mentioned outstanding luminance area that isolates in the shaded-image of face that is examined that generates according to above-mentioned output signal is judged to be the defective candidate; With defective candidate selection portion, the above-mentioned defective candidate in the zone that is included in the luminous picture of the light-emitting component of above-mentioned continuous setting in the above-mentioned shaded-image of expression is removed from the defective candidate.
According to this formation, in fact, inboard for the point of irradiation that is present in the light emitting device group that is configured to mesh (is representative with the ring) shape continuously, promptly in opposite directions in the defective of the face that is examined of dark face, contact a part of irradiates light from the complete cycle direction of its defective, the defective picture shows in darker dark face picture brightly, can be used as in the shaded-image isolated outstanding luminance area and detect and be the defective candidate, and the luminous picture with respect to continuous luminous element disposed is detected as the still isolated outstanding luminance area (being also referred to as isolated point) of interrupted part, remove the isolated point on the extended line of the continuous luminous picture be present in predetermined pattern from the defective candidate, reduce the defective flase drop thus and survey.
By the face of being examined is relatively moved with respect to video camera and Lighting Division, defective must be left the point of irradiation of light emitting device group and come and dark face position in opposite directions, so even the zone as the continuous luminous picture of the outstanding luminance area that detects with predetermined pattern is not hindered as determining defects object exterior domain yet.
Owing to use the Lighting Division that disposes a plurality of light-emitting components continuously, so catch be examined reflected light face on of its light-emitting component at irradiates light with video camera, from the image of video camera output, producing, but the situation that the brightness value of this luminous picture according to the inspection condition, particularly is examined face changes as luminous picture.
In the present invention, because the brightness value of this luminous picture becomes the important references of determining defects, so it is very suitable to possess the pre-treatment portion that carries out Flame Image Process that should compensate such change, so that when the output signal from video camera generates above-mentioned shaded-image, the luminance level in the continuous luminous picture zone of the luminance level of the luminous picture of the above-mentioned continuous luminous element disposed that obtains from the face that is examined normally that becomes benchmark during with actual inspection is consistent in fact.The photographed images that obtains is implemented the brightness adjustment, so that, realize that thus the precision of determining defects thereafter improves with consistent in the luminance level that becomes the luminous picture that being examined of benchmark obtain on the face in advance.
Compare in littler situation etc. in the shooting visual field that is examined face and video camera, being examined irradiated body (background etc.) beyond the face enters and obtains in the image, but the positional information in unwanted picture zone can be predicted in advance like this, perhaps can grasp with known background selection algorithm, so in the present invention, following scheme is also proposed: its neighboring area that comprises the outstanding luminance area of removing from above-mentioned defective candidate is increased unwanted picture zone such as background and the comprehensive zone that obtains as determining defects object exterior domain, the gained image is carried out mask process.
Other features and advantages of the present invention should be by using the following drawings the explanation of embodiment become clear.
For example on the application face of automobile body, can detect the defective of existing detection difficult reliably.
Description of drawings
Fig. 1 is the figure that the summary of the check system of expression employing surface defect inspection apparatus of the present invention constitutes.
Fig. 2 is the whole figure that constitutes of the summary of expression surface defect inspection apparatus of the present invention.
Fig. 3 is the whole figure that constitutes of the summary of expression surface defect inspection apparatus of the present invention.
Fig. 4 is the figure of the camera assembly of expression surface defect inspection apparatus of the present invention.
Fig. 5 is the figure of control information disposal system of the camera assembly of expression surface defect inspection apparatus of the present invention.
Fig. 6 is the FBD (function block diagram) that expression is installed in the formation of the flaw evaluation mechanism on the surface defect inspection apparatus.
The key diagram of input picture that Fig. 7 is explanation 2 values.
Fig. 8 is the key diagram that the isolated point of the breakpoint portion that is present in luminous picture is described.
Fig. 9 is the process flow diagram of order of the flaw evaluation of the face that is examined that carries out of expression flaw evaluation mechanism.
Figure 10 is other embodiments that are made of Lighting Division fluorescent tube and diffuser plate.
Figure 11 is the example of other formation of expression dark face.
Figure 12 is the example that constitutes Lighting Division with the configuration of other light-emitting component.
Figure 13 is the figure that the problem points under the configuring condition of light-emitting component shown in Figure 12 is adopted in expression.
Figure 14 is with respect to example shown in Figure 11, represents the figure of the configuration example of preferred light-emitting component.
Figure 15 is the key diagram that the situation that the defective under the situation that 3 values handle chooses is carried out in expression.
Figure 16 is examined the key diagram of configuration of preferred light-emitting component that face is the situation of curved surface.
Figure 17 is the figure of formation of the bumper check system of the existing type of expression.
Figure 18 is the key diagram of inspection principle of the irradiates light of expression striated.
Symbol description
3: Lighting Division
4: video camera
5: image process controller
6: flaw evaluation portion (mechanism)
30: light-emitting component (LED element)
31: dark face
60A: pre-treatment portion
60B: defective determination portion
61: brightness regulation portion
62:2 value handling part
63: defective candidate (isolated point) is chosen portion
64: defective candidate selection portion
65: the pattern mask generating unit
66: the sign configuration part
67: the area operational part
68: determining defects portion
Embodiment
Below describe about the application's surface defect inspection apparatus 100.
The application's surface defect inspection apparatus 100, be to be used for the shown in Figure 1 check system 200 corresponding with Figure 17, Fig. 1 represents that the integral body of check system 200 constitutes, the integral body of Fig. 2,3 presentation surface flaw detection apparatus 100 constitutes, the formation of the camera assembly 300 of Fig. 4 presentation surface flaw detection apparatus 100, Fig. 5 represents the formation of the evaluation system of the information of making a video recording.
Moreover also as previous DESCRIPTION OF THE PRIOR ART, for example the surface imperfection inspection with bumper 1 is a purpose to this check system 200.Surface defect inspection apparatus 100 in this system 200, is provided in the downstream at stock station 202, the upstream side at visual examination station 203, on this surface defect inspection apparatus 100, possesses and has the unique camera assembly 300 that constitutes of the application.
This camera assembly 300 is copied the shape of bumper 1 and is moved, and can check with the precision and the reliability that are significantly higher than prior art.
Below, describe in detail by the formation of check system 200, the order of the processing of copying formation, photographed images of camera assembly 300 in the surface defect inspection apparatus 100.
[check system]
As shown in Figure 1, in the application's check system 200, as the bumper 1 of checking object to transport the mobile route that robot 2 carries out be the straight line mobile route.
In Fig. 1, check the bumper 1 of object, the upper right side from figure is transported to the lower-left side.As shown in the figure, inspection is carried out a pair of bumper 1 as a unit.Therefore, along this carriage direction, be provided with stock station 202, surface defect inspection apparatus 100, visual examination station 203.
If the flow process along operation describes, then input person 204 takes out a pair of bumper 1 at any time from stock station 202, is installed on the bumper support 2a that transports robot 2.
In addition, utilize a plurality of video cameras 4 contrasts that possess on the camera assembly 300 to make a video recording to the LO-pattern of the irradiates light of bumper 1.Image pickup result is delivered to the flaw evaluation portion 6 that becomes the flaw evaluation mechanism that resolves side, and the evaluation of zero defect etc. is arranged.
Be positioned at the bumper 1 that overlooker's 201 visual examinations of transporting the downstream are sent here, but as shown in Figure 1, at this moment, overlooker 201 can utilize check result projector 15 from the evaluation information of flaw evaluation portion 6 as the positional information that should note in checking, can be that visual examination is carried out at the center with this position etc. especially.
[imitation of the camera assembly in the surface defect inspection apparatus constitutes]
A camera assembly 300
The vertical view (a), front view (b) of camera assembly 300, detailed (c) that overlooks in Fig. 4, have been represented.As shown in the drawing, camera assembly 300 constitutes to be possessed: component blocks 300a has roughly rectangular shape substantially; With the swinging mounting frame 300b of portion, extend along the vertical direction from component blocks 300a at the two ends of the longitudinally (the L1 direction among Fig. 4 (a)) of this component blocks 300a.
Again, as shown in the drawing, the upside end face of said modules frame 300a constitutes as said Lighting Division among the application 3, on this Lighting Division 3 to repeat layout, to dispose a plurality of light-emitting components 30 as unit with hexagon.
And then, in the Width central authorities of this Lighting Division 3, all uniformly-spaced have the camera lens face 4a (being image pickup part) of video camera 4 with regulation.In illustrated embodiment, represented to possess the example of 10 video cameras 4.Shown in Fig. 4 (b),, be provided with the DC power supply 300c of video camera 4 and light-emitting component 30 usefulness in the inside of component blocks 300a.
B imitates structure
Above-mentioned camera assembly 300 constitutes the pair of right and left bolster 300d bearing assembly 300 with the front end that is located at the above-mentioned swinging mounting frame 300b of portion.This bolster 300d constitutes, and can rotate around its axle center, and can descend direction and its fore-and-aft direction to move with respect to the device frame 100a of surface defect inspection apparatus 100 thereon.
Fig. 2 is the figure that watches said apparatus frame 100a from the frontal vertical with transporting the path, in the figure, transports robot 2 and is moved to the left from the right side.
Fig. 3 is the figure that observes said apparatus frame 100a from the approaching side that transports robot 2 (being the side).
As shown in Figure 2, device frame 100a constitutes, and its side-looking is a shape, and it is faced is square structure.
On this device frame 100a, have along the transportable frame 100b that advances of its left and right directions of facing (along the direction of carriage direction); With can move along the vertical direction move up and down frame 100c.
This lifting frame 100c constitutes and can move at above-below direction along the track rc that is located on the above-mentioned frame 100b that advances.The lift motor Mc that this above-below direction moves through the central part that is located at the frame 100b that advances carries out.
Above-mentioned carriage direction of advancing frame 100b moves through this advancing of frame 100b of advancing possible track rb and drive transmission device is carried out, and the travel motor Mb that this drive transmission device transmission possesses from device frame 100a is to the driving of advancing of the frame 100b that advances.
And then, as shown in Figure 3, on the pair of right and left bolster 300d of the front end that is located at the above-mentioned swinging mounting frame 300b of portion, possess rotation motor Md and make the rotational delay of this rotation motor Md and, constitute the adjustment that the rotation that utilizes rotation motor Md can be carried out the swinging position of camera assembly 300 its gear transmission device G that is passed to above-mentioned bolster.
Possess like this, now to be used for detecting and become the surface element bit position of the bumper 1 of checking object and the laser sensor 400 (with reference to Fig. 1) of inclination (inclination shown in Fig. 2) at video camera 300.
From the information of this laser sensor 400, deliver to the main frame 14 that also has as the function of imitation control device.
In this computing machine 14, based on the shape information of bumper 1, the transporting position information generation steering order of transporting robot 2, but by detection information Correction and Control information from above-mentioned laser sensor 400, above-mentioned lift motor Mc, travel motor Mb, each motor of rotation motor Md are delivered in control information, controlled camera assembly 300 automatically and make it suitable position relation be arranged with respect to being examined mask.
So-called this suitable position relation is meant, as shown in Figure 2, the optical axis of video camera 4 is the normal direction that is examined face, and illuminated area (light-emitting area 3a) is parallel to the face of being examined, illuminated area (light-emitting area 3a) and shooting face (being camera lens face 4a) all with the face that is examined at a distance of the relation of predetermined distance.In Fig. 2, represent that schematically camera assembly 300 is with respect to two different position and postures that are examined face.
[processing of photographed images]
In the application's surface defect inspection apparatus 100, shown in Fig. 4,5, the main system that shooting is checked as mentioned above, comprising: Lighting Division 3, and the application face that is examined the bumper 1 of face to conduct shines irradiates light; Video camera 4 is to the face that the is examined shooting by these Lighting Division 3 illuminations; With image process controller 5, use to be examined evaluation that the defective in the face exists and the output of estimating defective thereof from the output signal of this video camera 4.
Shown in Fig. 4,5, this controller 5 is positioned at as the position with respect to the next bit computer of above-mentioned main frame 14, possesses monitor 12 and printer 13 as output device on the efferent 10 that is connected this image process controller 5 self.
On image process controller 5, have the control of carrying out Lighting Division 3 illumination imaging control part 9, be taken into output signal and the image input part 7 that launches to storer 8 as Digital Image Data (being designated hereinafter simply as input picture) and use input picture to carry out the flaw evaluation portion 6 of flaw evaluation from video camera 4.
And then image process controller 5 is connected to via Department of Communication Force 11 and can transmits data to main frame 14.
In this main frame 14 storage download to as required becoming on the image process controller 5 check object bumper 1 information or as the action message of transporting robot 2 of conveyer, and then the defect information of the application face that generates at image process controller 5 also is uploaded to main frame 14 from image process controller 5, and is stored in this.
Moreover, be connected check result projector 15 that the terminal on the main frame 14 controls or printer etc. by network and be provided to the visual examination station, constitute the defect information of sending here via main frame 14 based on from image process controller 5, indicate defective locations etc. to the overlooker via check result projector 15.
Follow the aforesaid camera assembly 300 of control, so that camera lens face (the being equivalent to shooting face) 4a of the light-emitting area 3a of Lighting Division 3 and video camera 4, with by the face that is examined that transports the bumper 1 that robot 2 transports in opposite directions, its illuminated area 3a is consistent with the normal that is examined face with the normal of shooting face 4a, and then spacing distance is certain.
As shown in Figure 4, Lighting Division 3 has the layout patterns with the mesh-shape that leaves hexagonal space (ring-type), and repeat this hexagonal arrangement pattern and continuously (being close between the LED element 30 of adjacency) dispose a plurality of light-emitting components (in this embodiment owing to use the LED element, so be called the LED element later on) 30.Being called dark face 31 by being configured to the space that the cancellous LED element 30 of hexagon vacates at this, is black or dark-coloured plate face.
Utilization is configured to cancellous LED element 30 and a plurality of dark faces 31 occur, but the camera lens face 4a of video camera 4 is located at the impartial position that disperses on the central portion in the dark face 31, and a plurality of video cameras 4 constitute and are assembled into Lighting Division 3.In use, the focus of video camera 4, not consistent with application face but with the light-emitting area 3a unanimity of irradiation portion 3.
As shown in Figure 6, as the relevant especially function portion of the present invention, flaw evaluation portion 6 can be divided into: the 60A of pre-treatment portion, and mechanism plays a role as Flame Image Process, and will be transformed to the form that is suitable for defects detection to the input picture that storer 8 launches; With defective determination portion 60B, use the input picture of pre-treatment, find to be examined the defective on the face.
The 60A of pre-treatment portion comprises input picture is carried out the brightness regulation portion 61 of brightness adjustment and the input picture that brightness has been adjusted is carried out 2 value handling parts 62 that 2 values are handled.The brightness regulation portion 61 of this embodiment, constitute and not only carry out the gamma adjustment, also carry out the brightness adjustment of pixel area unit, so that the luminance level of the luminous picture that contains in the input picture reaches the luminance level of the luminous picture of the LED element that obtains from the face that is examined normally of the benchmark separately that becomes application look or application face.
Moreover 2 value handling parts 62 possess: 2 value threshold value determination portion 62a, determine 2 value threshold values with the statistics gimmick from the deep or light histogram of input picture; Choose the 62b of portion with characteristics of image, to act on edge such as Sobe1 wave filter in order abating the noise to input picture effect smoothing wave filter and for the profile of strengthening luminous picture or defective picture and to strengthen wave filter, the 2 value threshold values that use is determined by 2 value threshold value determination portion 62a are also chosen the input picture that the 62b of portion strengthens with characteristics of image and are become 2 value images.
In Fig. 7, represented to have been undertaken an example of the input picture of 2 values by 2 value handling parts 62.In this 2 value shaded-image, the high zone of brightness is represented with white, LED element group as the luminous picture that disposes continuously with the hexagonal arrangement pattern is represented as the white contours line that the hexagon that is paved with links to each other continuously, with dark face 31 application face zone in opposite directions as representing than dark areas, the according to circumstances different and painting defect that exists is as being represented at the white isolated area that shows than dark areas by the diffuse reflection that brings from the irradiates light around it.
Therefore, defects detection, in 2 value images, as long as find out the outstanding zone (being white portion in this embodiment) of brightness, with the continuous zone of pattern of regulation, promptly isolated point does not get final product.Can use searching not only to have the brightness value (concentration value) but also the continuous pixel of prescribed level, or seek the known method of image processing algorithm in isolated zone itself.
Yet, because the shape that is examined face (at this for application face) is to the change of irradiation reflection of light characteristic etc., shown in Fig. 8 amplification, breakpoint appears in the luminous picture of the LED element 30 that the line that linked to each other continuously originally in conduct shows halfway, and its breakpoint partly might be used as the survey of defective flase drop.Defective determination portion 60B constitutes with program in fact so that suitably avoid such flase drop to survey.
That is, this defective determination portion 60B, possess: the defective candidate is chosen portion 63, to become defective candidate with the discrete independent pixel area that interior number of picture elements constitutes as Outlier Detection by stated number; Defective candidate selection portion 64, (choosing this regional mechanism is that continuous bright areas is chosen mechanism the zone of the luminous picture of the LED element 30 of the continuous configuration of expression.) in the bowl spares after the defective of the defective candidate that comprises remove that (what carry out that this removals handles is eliminating mechanism.); Pattern mask generating unit 65, the isolated point of comprehensively removing from the defective candidate with this defective candidate selection portion 64 zone and background etc. do not need image-region as determining defects object exterior domain, carry out mask process; Sign configuration part 66 is in order to discern the identification process that is positioned at the outer a plurality of defective candidate areas of pattern mask and carries out distributing in different defective candidate areas different identification (sequence number); Area operational part 67, the area of each defective candidate areas that is identified of computing; With determining defects portion 68,, the defective candidate is judged to be genuine defective and writes the defective map based on area information from this area operational part 67.Like this, the result is that said sealing is chosen mechanism than dark areas and chosen mechanism with relative therewith independent bright areas among formation the application.
Defective candidate selection portion 64, in order to select to choose the defective candidate that portion 63 chooses with the defective candidate, possess: defective candidate time series detection unit 64a, by checking from the image that ships successively from video camera 4, whether to have chosen stipulated number defective candidate, prevent from the bright areas that produces is suddenly regarded as the defective candidate; With the 64b of discontinuous exploration portion of luminous picture, can understand well by Fig. 8, whether the defective candidate of choosing by inspection (isolated point) is positioned on the extended line of continuous luminous picture, prevents from the breakpoint portion of luminous picture is regarded as the defective candidate.
The exploration of this discontinuous portion of luminous picture, can use while groping the continuous luminous shape facility than dark areas of choosing the extended line zone that is positioned at its breakpoint end as pixel and choose algorithm etc. and carry out, the isolated point that is present in this breakpoint zone is removed from the defective candidate.
The step of the flaw evaluation of the application face that the flowchart text that below uses Fig. 9 is undertaken by the flaw evaluation mechanism 6 that constitutes like this.
At first, the frame diagram of sending here successively via image input part 7 from video camera 4 is looked like to be taken into storer 8 (#01).The input picture that is taken into is regulated brightness (concentration value) (#02) by brightness regulation portion 61.At this moment the characteristic quantity that needs input picture, but its characteristic quantity is preferably divided input picture with the number of partitions of regulation, distinguishes the maximal value of the concentration mean value of computing at each subregion.
Definite adjustment that also can be used for the camera lens opening degree of video camera 4 of the ensuing 2 value threshold values of this characteristic quantity.Determine 2 value threshold values (#03) in 2 value threshold value determination portion 62a, and choose smoothing and the reinforcement back, edge (#04) that the 62b of portion carries out image with characteristics of image, this input picture is become 2 value images (#05) by 2 values processing.
From 2 values input picture, choose portion 63 by the defective candidate, choose the isolated bright pixel area that constitutes with the number of picture elements of interior (predetermined) by stated number as defective candidate (#06) according to image resolution ratio etc.
The defective candidate that belongs to the isolated point of and local generation instantaneous in the defective candidate of choosing by the disorderly light in outside, 64a removes (#07) from the defective candidate by defective candidate time series detection unit, and then the defective candidate that belongs to the isolated point in the breakpoint zone that is arranged in luminous picture in the defective candidate of choosing is removed (#08) by the 64b of discontinuous exploration portion of luminous picture from the defective candidate.
Comprise its neighboring area by the breakpoint zone of the luminous luminous picture of finding out as discontinuous the 64b of exploration portion, as based on send from main frame 14 definite conduct is examined the background area beyond the application face of face and does not need pixel area as the shape information of the bumper 1 of checked property with by transporting transporting position information that robot 2 brings, carry out mask process (#09) by pattern mask generating unit 65.
In addition, in this embodiment, the transporting position information that obtains from main frame 14 may be different with physical location, so use laser sensor etc. are checked the dislocation of real-time bumper 1, revise its pattern mask position (#10).
After the selection of the defective that is through with like this candidate and the removal of background image, identify remaining defective candidate (isolated point) (#11), computing has distributed the area (#12) of the isolated point of each sign, only the isolated point that satisfies predefined area condition (whether the above area of threshold value is arranged) is judged to be genuine defective (#13), its coordinate position and size etc. are write defective map (#14).
[aftertreatment]
More than the step of flaw evaluation of the application face that undertaken by flaw evaluation mechanism 6 be through with, if but pass through the inspection that this step finishes application face, then in visual examination station 203, via main frame 14 from the defective map that image process controller 5 is sent here, the defective map of the ID consistent with the ID of the bumper that is transported into visual examination station 203 is given in use, carries out defective and checks.
At this moment, become easily in order to make the operation of being undertaken by the overlooker of checking, very suitable is: make check result projector 15 action so that based on this defective map position that points out deficiencies.Certainly, can be by printer 13 paper on the efferent 10 that is connected surface defect inspection apparatus 100 output defect information based on such defective map, and this output paper is attached on the bumper 1.
In the above-described embodiment, constitute Lighting Division 3 with being configured to hexagonal cancellous LED element group continuously, but its mesh-shape form also can adopt hexagon shape in addition, also can adopt LED element element in addition as light-emitting component 30.
[other embodiments]
Below, other embodiments of the application are described.
1. in the above-described embodiment, represented to carry out the example of inspection of the application face of automobile body (particularly bumper), but, can be object with the face that is examined with arbitrary surfaces defective as checking object.As this example, the surface inspection of compacting formation product etc. is arranged.
2. in the above-described embodiment, in the application's surface defect inspection apparatus in order to constitute its Lighting Division,
Dispose a plurality of light-emitting components and form dark face in inside, but also can not adopt this structure, but constitute the light at random that makes from rear side by forming cancellous slit.
In Figure 10, represented this configuration example.In the example shown in this figure, be equipped with the lighting case 112 of a plurality of fluorescent tubes 111 with respect to inside, at its position, front diffuser plate 113 is set, and set the slit plate 114 of the dark face that is used to form slit and inside thereof in the place ahead of this diffuser plate 113, constitute the Lighting Division that conforms with the application's purpose.
3. in the example of explanation so far, dark face all is circular, but can constitute various as shown in figure 11.(a) being that to make dark face be foursquare example, (b) is that to make dark face be the oval example of growing crosswise, and (c) with respect to the example of (a) record, dark face is configured to staggered.On the other hand (d) to make dark face be the triangle of smaller area.
(a) structure shown in is preferably in fact the situation about injecting in left and right directions and above-below direction generation defective.On the other hand, (b) structure shown in, being preferably in the face of being examined is curved surface, adopts under the situation of the dark face that the formation of shooting side is extended along the vertical direction.(c) structure shown in, effectively, some with interconnected 2 grades of square dark faces up and down can detect the continuous defective of above-below direction under the situation that is tending towards forming continuously along the vertical direction in the formation of defective.And then situation (d) detects smaller defective easily.
4. in the embodiment shown in formerly, represented, but from guarantee the purpose of impartial light quantity at the dark face center, preferably near the layout patterns of circle, example shown in Figure 12 is an octagon with the layout patterns of hexagonal layout patterns as light-emitting component.
Moreover, in this embodiment, as shown in figure 13,, shown in s, there is the overlapping configuration portion of light-emitting component as the left and right directions that is examined the moving direction of face, if adopt this formation, then in path A, on defects detection, with path B problem takes place more sometimes.Therefore, this situation as shown in figure 14, some position s1, the s2 of the layout patterns of light-emitting component be with respect to the moving direction that is examined face (path C, D), preferably do not have the position that overlaps.
5. in the above-described embodiment, carried out defective via 2 values processing and chosen, carry out but also can handle based on 3 values.
Flame Image Process state in Figure 15 in expression 3 values.
Image (c) after Figure 15 represents the image (b) after original image (a), 3 values are handled respectively and gets rid of processing, in (a), white portion represents to have portion C 1, the C3 of brightness, has the dark rejected region of portion C 2 expressions of shade.In (b), represent the part of middle gray in (a) with shadow part, in (c), C3 represents lime light with shadow part.
These images are illustrated in the situation that there is defective in the application position that is positioned at the dark face correspondence of several the 2nd row the 2nd row from upper left end.Normal condition is represented at other positions.
In photographed images, shown in (a), by setting up corresponding to the portion C 1 of the high brightness K1 of the light of illumination side with corresponding to portion C 2 than the low-light level K2 of dark-part.
In addition, if get the part of brightness K3 in the middle of it, then as figure (b) shown in, can choose the portion C 3 of the intermediate luminance K3 of the portion C 4 of intermediate luminance K3 of ring-type and defective generation.
In addition, implement the expansion shrink process by being directed to this, can eliminate the ring-type intermediate luminance zone (shown in the c) as in fact narrow zone, the result can only remain the position corresponding to defective.
6. in the above-described embodiment, the face that is examined is illustrated as the plane, but under the situation of curved surface, preferably carries out pattern arrangement makes becomes regulation in shooting side dark face shape the shape that is suitable for detecting.Figure 16 has represented this example.
Such as previously described, be that mesh is in phenomenons such as specific direction deform under the situation of curved surface at the face of being examined.Figure 16 (b) is illustrated in the irradiates light of irradiation ring-type, and the face that is examined laterally has under the situation of central shaft at paper, is formed with the glasses shape ring of the ellipse that shortens at the image above-below direction.
The generation of this distortion becomes to make form independently bright areas in the bright areas of ring-type, and it is picked out obstacle in the application's method that obtains defect image.
Therefore, be examined under the situation that face is a curved surface above-mentioned, the mesh-shape of preferably setting corresponding to the irradiates light in the above-mentioned shadow surface of the above-mentioned curve form that is examined face distributes, and makes the shape of the above-mentioned mesh in the above-mentioned photographed images become the shape of a mesh of circle or regular polygon.
For example, shown in Figure 16 (c), the curved surface that produces in the contraction with the image above-below direction is under the situation of object, pre-estimates this contraction, makes mesh be distributed as elongate shape.
If prepare like this, then in photographed images, can guarantee the position be familiar with as continuous light and be more than the regulation area corresponding to the area of the dark portion of mesh inside, under the situation in the zone that in mesh, forms intermediate luminance owing to the influence of defective existence, its formation also can become isolated area, be suitable for the application's gimmick, can detect well.
In the above-described embodiment, represented in order to constitute check system 200, press the example of arranged in order at stock station 202, the application's surface defect inspection apparatus 100, visual examination station 203, but make this system for the situation of manufacturing check system with the surface working (application, press forming etc.) of regulation under, become each operation portion of arranged in order by stock station, the processing handling part of carrying out application etc., surface defect inspection apparatus, visual examination station.
In the above-described embodiment, make the shooting face of the light-emitting area of light-emitting component and video camera in the same plane, but the two sides also can be positioned at the different position of distance of leaving the face of being examined.
Industrial applicibility
Can obtain to detect reliably the surface defect inspection apparatus of small painting defect.
Claims (18)
1. a surface defect inspection method to being examined the irradiates light that face shines the pattern form of regulation, utilizes the above-mentioned photographed images that is examined face that is in illuminated state to check the above-mentioned face that is examined, it is characterized in that,
As above-mentioned irradiates light, from the following irradiates light of shadow surface irradiation: be that mesh-shape distributes so that the interior shape of each mesh is identical, and the irradiated area in the plane vertical with optical axis is less than non-irradiated area,
Based in the above-mentioned photographed images corresponding to the light and shade information of the image-region of the above-mentioned non-irradiation area that is examined face, check the above-mentioned face that is examined.
2. surface defect inspection method as claimed in claim 1, it is characterized in that, be made as normal photographed images in the photographed images that above-mentioned irradiates light is shone in the state that is examined face normally, the brightness of the irradiation area in the above-mentioned normal photographed images is made as high brightness, when the brightness of non-irradiation area is made as low-light level
Is the zone that is present in the photographed images and be in the intermediate luminance between above-mentioned high brightness and the low-light level that the intermediate luminance zone is regional as noting.
3. surface defect inspection method as claimed in claim 2 is characterized in that, choosing as continuous bright areas corresponding to the above-mentioned image-region that is examined the irradiation area of face, and above-mentioned continuous bright areas is got rid of from noting the zone.
4. surface defect inspection method as claimed in claim 1, it is characterized in that, corresponding to the image-region of the above-mentioned non-irradiation area that is examined face as sealing choose than dark areas and above-mentioned sealing than dark areas in exist under the situation of bright areas independently, make above-mentioned independently bright areas for noting the zone.
5. as each the described surface defect inspection method among the claim 1-4, it is characterized in that, be examined under the situation that face is a curved surface above-mentioned, setting distributes corresponding to the mesh-shape of the irradiates light in the above-mentioned shadow surface of the above-mentioned curve form that is examined face, makes the shape of the above-mentioned mesh in the above-mentioned photographed images become the shape of a mesh of circle or regular polygon.
6. surface defect inspection apparatus, possess: irradiation means shines the irradiates light of predetermined pattern shape on the face of being examined; Image mechanism has the above-mentioned face that is examined of the illuminated state of above-mentioned irradiates light to make a video recording to being in irradiation; Flame Image Process mechanism carries out Flame Image Process to the photographed images that is obtained by above-mentioned image mechanism, it is characterized in that,
As above-mentioned irradiates light, above-mentioned irradiation means is from the following irradiates light of shadow surface irradiation: be that mesh-shape distributes so that the interior shape of each mesh is identical, and the irradiated area in the plane vertical with optical axis is less than non-irradiated area,
Above-mentioned Flame Image Process mechanism constitutes, and in above-mentioned Flame Image Process, can handle and the above-mentioned light and shade information that is examined the corresponding image-region of non-irradiation area of face.
7. surface defect inspection apparatus as claimed in claim 6 is characterized in that, above-mentioned Flame Image Process mechanism possesses the intermediate luminance zone and chooses mechanism,
Be made as normal photographed images in the photographed images that above-mentioned irradiates light is shone in the state that is examined face normally, the brightness of the irradiation area in the above-mentioned normal photographed images is made as high brightness, when the brightness of non-irradiation area is made as low-light level,
Is the zone that is present in the photographed images and be in the intermediate luminance between above-mentioned high brightness and the low-light level that the intermediate luminance zone is chosen.
8. surface defect inspection apparatus as claimed in claim 6 is characterized in that, in above-mentioned irradiation means, above-mentioned irradiates light is formed by a plurality of light-emitting components that are the mesh-shape distribution.
9. surface defect inspection apparatus as claimed in claim 6 is characterized in that, in above-mentioned irradiation means, above-mentioned irradiates light sees through and to be between the slit in a narrow margin that mesh-shape distributes and to form.
10. as each the described surface defect inspection apparatus among the claim 6-9, it is characterized in that, in above-mentioned irradiation means,
Corresponding to the above-mentioned curve form that is examined face, the mesh-shape of setting the irradiates light in the above-mentioned shadow surface distributes, and makes the shape of the above-mentioned mesh in the above-mentioned photographed images become the shape of a mesh of circle or regular polygon.
11. a surface defect inspection apparatus possesses: a plurality of light-emitting components, the layout patterns that distributes with the mesh-shape of stipulating disposes; Video camera is made a video recording to the face that is examined that the irradiates light that utilizes above-mentioned light-emitting component throws light on; And efferent, export the shooting information of above-mentioned video camera, it is characterized in that,
Above-mentioned layout patterns makes above-mentioned light-emitting component be configured to the dark face of the residual regulation shape in the inboard continuously, and the above-mentioned video camera of configuration at least one above-mentioned dark face is to receive the irradiates light that is examined above-mentioned each light-emitting component of face reflection from above-mentioned.
12. surface defect inspection apparatus as claimed in claim 11 is characterized in that, possesses flaw evaluation portion, estimates the output signal from above-mentioned efferent, thereby detects the above-mentioned defective that is examined in the face.
13., it is characterized in that the repetition layout patterns of above-mentioned layout patterns as claim 11 or 12 described surface defect inspection apparatus on prescribed direction, repeating.
14., it is characterized in that possessing with respect to above-mentioned a plurality of light-emitting components and move the above-mentioned conveyer that is examined face relative to transporting as claim 11 or 12 described surface defect inspection apparatus with above-mentioned video camera,
The repetition direction of above-mentioned layout patterns is above-mentioned relative carriage direction.
15., it is characterized in that the light-emitting area of above-mentioned a plurality of light-emitting components and the shooting face of above-mentioned video camera are positioned at same plane as claim 11 or 12 described surface defect inspection apparatus.
16. surface defect inspection apparatus as claimed in claim 11 is characterized in that, comprises flaw evaluation mechanism, the output signal of estimating above-mentioned video camera detects the above-mentioned defective that is examined in the face,
Above-mentioned flaw evaluation mechanism, possess: isolated point is chosen portion, and isolated outstanding luminance area in the above-mentioned shaded-image that is examined face that generates according to above-mentioned output signal is judged to be the defective candidate; With defective candidate selection portion, in the zone of luminous picture that is included in the light-emitting component of above-mentioned continuous setting in the above-mentioned shaded-image of expression, above-mentioned defective candidate removes from the defective candidate.
17. surface defect inspection apparatus as claimed in claim 16, it is characterized in that, possesses the pre-treatment portion that carries out Flame Image Process, so that when above-mentioned output signal generates above-mentioned shaded-image, the luminance level in the continuous luminous picture zone of the luminance level of the luminous picture of the above-mentioned continuous luminous element disposed that obtains from the face that is examined normally that becomes benchmark during with actual inspection is consistent.
18. surface defect inspection apparatus as claimed in claim 17, it is characterized in that, comprehensively comprise its neighboring area of the above-mentioned outstanding luminance area of removing from the defective candidate and background etc. and do not need image-region, carry out mask process as determining defects object exterior domain.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
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| JP360584/2003 | 2003-10-21 | ||
| JP2003360584 | 2003-10-21 | ||
| JP105451/2004 | 2004-03-31 | ||
| JP105452/2004 | 2004-03-31 | ||
| JP105450/2004 | 2004-03-31 |
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| CN1871506A CN1871506A (en) | 2006-11-29 |
| CN100520376C true CN100520376C (en) | 2009-07-29 |
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| CNB2004800310464A Expired - Fee Related CN100520376C (en) | 2003-10-21 | 2004-10-20 | Surface inspecting method and system for finding imperfection |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507761A (en) * | 2018-03-12 | 2018-09-07 | 广东欧珀移动通信有限公司 | Laser projection module and its detection method and device, depth camera and electronic device |
| US11563930B2 (en) | 2018-03-12 | 2023-01-24 | Guangdong Oppo Mobile Telecommunications Corp., Ltd. | Laser projection component, detection method thereof, and electronic device |
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| CN101419176B (en) * | 2007-10-26 | 2012-03-28 | 比亚迪股份有限公司 | Surface flaw detecting method and device |
| JP4873100B2 (en) * | 2010-03-11 | 2012-02-08 | Ｊｆｅスチール株式会社 | Surface inspection device |
| CN102854193A (en) * | 2012-08-30 | 2013-01-02 | 苏州天准精密技术有限公司 | Detection method and detection system used for image defect detection |
| CN104101614B (en) * | 2014-05-26 | 2016-08-31 | 京东方科技集团股份有限公司 | A kind of detection method and device |
| CN104101611A (en) * | 2014-06-06 | 2014-10-15 | 华南理工大学 | Mirror-like object surface optical imaging device and imaging method thereof |
| KR101998081B1 (en) * | 2015-06-11 | 2019-07-09 | 동우 화인켐 주식회사 | Method for discriminating defect of composite film |
| DE102015008409A1 (en) * | 2015-07-02 | 2017-01-05 | Eisenmann Se | Installation for optical inspection of surface areas of objects |
| JP6474756B2 (en) * | 2016-06-09 | 2019-02-27 | 本田技研工業株式会社 | Defect inspection method and apparatus |
| JP7083695B2 (en) * | 2018-05-11 | 2022-06-13 | 株式会社荏原製作所 | Bump height inspection device, substrate processing device, bump height inspection method, storage medium |
| CN109030495A (en) * | 2018-06-26 | 2018-12-18 | 大连鉴影光学科技有限公司 | A kind of optical element defect inspection method based on machine vision technique |
| KR102112053B1 (en) * | 2018-08-01 | 2020-05-18 | 주식회사 뷰온 | An Apparatus and Method for Inspecting Surface Defect using Image Sensor |
| DE102021211376A1 (en) * | 2020-10-09 | 2022-04-14 | Virtek Vision International, Inc. | METHOD AND SYSTEM FOR CHECKING REPAIR OR ASSEMBLY OPERATIONS |
| CN114723701B (en) * | 2022-03-31 | 2023-04-18 | 厦门力和行自动化有限公司 | Gear defect detection method and system based on computer vision |
| CN116597127B (en) * | 2023-07-12 | 2024-01-12 | 山东辰欣佛都药业股份有限公司 | Sterile eye cream packaging integrity image recognition system |
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2004
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108507761A (en) * | 2018-03-12 | 2018-09-07 | 广东欧珀移动通信有限公司 | Laser projection module and its detection method and device, depth camera and electronic device |
| US11563930B2 (en) | 2018-03-12 | 2023-01-24 | Guangdong Oppo Mobile Telecommunications Corp., Ltd. | Laser projection component, detection method thereof, and electronic device |
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