CN100514044C - 多重反射荧光探头 - Google Patents
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Abstract
本发明是关于一种多重反射荧光探头,是配合一样品表面的荧光材料检测,包括:一产生一激发光的光源,该激发光照射该样品上的荧光材料产生荧光;二共焦排列的离轴抛物面镜,用以收集并反射该入射至该样品的激发光与荧光;一影像检测器,以检测该样品上的荧光材料所发出的荧光;一滤光镜,位于该样品与该影像检测器之间,以滤除该反射的激发光;以及一光学显影镜组,位于该滤光镜与该影像检测器之间,以将该荧光聚焦于该影像检测器上。
Description
技术领域
本发明是关于一种多重反射荧光探头,特别是一种适用于印刷电路板或生物晶片的多重反射荧光探头。
背景技术
印刷电路板(Print Circuit Board,PCB)的自动光学检测有两种:一、利用白光(White Light)10照射在印刷电路板20上,再以光感应检测器30检索其金属导线的反射光信号,并经影像处理而成为反射影像,如图5所示。二、利用激光激发非金属导线部分的有机荧光基材,再以光感应检测器检索其激光诱发荧光(Laser Induced Fluorescencc,LIF)影像。
上述的自动光学检测法的最大的差异在于其光学照明系统,第一种采用白光照射印刷电路板,第二种方法则采用激光激发印刷电路板上的有机荧光材料。前者利用白光照射电路板,其是检索电路板上金属导线表面的反射光而成像,这些信号代表导线及其他电路板上金属导线的表面结构,后者采激光为照射光源,其影像则是检索电路板基材的激光诱发荧光信号,而此荧光信号所代表电路板上非金属基材的影像,亦即代表金属导线间的距离及断面间的距离,或是金属导线上的两个孔环(Annular Ring)间的距离。
一经过适当的设计的激光诱发荧光自动光学检测系统,将产生一完整且正确的电路板的表面影像信息,其中包含了细微电路的结构及非反射式的缺陷。另外,由于以荧光信号为基础的自动光学检测机对于电路板上的氧化的金属区域并不敏感,因此并不会因为金属氧化点而造成错误判断(False Calls),但是以反射式白光自动光学检测系统则无法区分此金属氧化部分,而导致错误的电路缺陷判断,且由于反射式白光自动光学检测系统虽然光强度较强但解析度不高,造成其使用上的限制,目前一般均以激光诱发荧光作检测。
目前光学检测仪器架构多使用单一或多重光源的荧光探头,经由光学镜组的组设,使其成像于影像检测器,如图6所示,即为一具有双光源70的光学检测仪器,其激发光经由反射镜组80的反射到达基板60,最后传送至影像检测器90,但在此仪器的架构下,光源所发射的光多数均发散,而未被送达影像检测器,造成光强度的不足。发明人本着积极发明的精神,提出一种可以提高光源再利用的“多重反射荧光探头”,几经研究实验终于完成此发明。
发明内容
本发明的主要目的是提供一种多重反射荧光探头,以便能简化荧光探头的光学架构,并能增加光源的再利用提高解析度,减少光源数目,加速检测时间,且应用于印刷电路板时,可达到高密度线路的检测。
为达成上述目的,本发明的多重反射荧光探头,其中一荧光材料是位于一样品的表面,并以一产生一激发光的光源照射该样品上的荧光材料产生荧光;该多重反射荧光探头包括:二共焦排列的离轴抛物面镜,其中该样品置放于该离轴抛物面镜的该焦点上,该光源产生的激发光是直接入射或间接反射至该离轴抛物面镜的该焦点位置,再反射至其中一该离轴抛物面镜,形成一平行光,再入射至另一该离轴抛物面镜,并再次聚焦于该焦点;一影像检测器,以检测该样品上的荧光材料所发出的荧光;一滤光镜,位于该样品与该影像检测器之间,以滤除该反射的激发光,使荧光穿透送达该影像检测器;以及一光学显影镜组,位于该滤光镜与该影像检测器之间,以将该荧光聚焦于该影像检测器上。
附图说明
图1是本发明多重反射荧光探头一较佳实施例的示意图;
图2(A)是本发明多重反射荧光探头的离轴抛物面镜的俯视图;
图2(B)是本发明多重反射荧光探头的离轴抛物面镜的后视图;
图2(C)是本发明多重反射荧光探头的离轴抛物面镜的侧视图;
图2(D)是本发明多重反射荧光探头的离轴抛物面镜的立体图;
图3是本发明多重反射荧光探头一较佳实施例的示意图;
图4是本发明多重反射荧光探头一较佳实施例的示意图;
图5是现有的反射式白光自动光学检测系统的示意图;
图6是现有的荧光探头的示意图。
具体实施方式
本发明的多重反射荧光探头可应用于印刷电路板的缺陷检测如:线宽、钻孔品质、残铜及残留基材等,亦可应用于生物晶片(如基因晶片、蛋白质晶片等)的检测。本发明的光源可诱发荧光物质发光,故其波长是依据荧光物质而定,一般使用激光,亦可使用发光二极管;光源形状较佳为一线型光源,以加速样品表面扫描的速度,但其亦可为一点光源。该多重反射荧光探头较佳更包含一检测平台,用以置放该样品,并可调整检测平台的垂直位置,使离轴抛物面镜的焦点落于该样品的表面,更佳为具有水平移动的功能,以对样品作区域性扫描。本发明的离轴抛物面镜的表面金属并无限制,其较佳为具有良好的反射率,故其可选自由铝、铜、银、金、铂、或镍等材料制成。
本发明的光源路径,可为直接入射该离轴抛物面镜的焦点位置,此时离轴抛物面镜具有一狭缝,以使该光源的激发光经由此预留的狭缝直接入射向离轴抛物面镜的焦点位置,该光源的激发光直接入射样品的入射角度介于10至80度之间,较佳为45度,以缩小整个荧光探头的体积;亦或是光源由反射后朝向该离轴抛物面镜的焦点位置,此时镜头可外加一分色镜,使光源的激发光经由分色镜的反射,朝向该离轴抛物面镜的焦点位置,或是离轴抛物面镜具有一狭缝,以使该光源的激发光穿越狭缝,经由该离轴抛物面镜的反射,朝向该离轴抛物面镜的焦点位置。
为能更了解本发明的技术内容,特举三较佳具体实施例说明如下。
具体实施方式
实施例1
在本实施例中的多重反射荧光探头,请参阅图1,是配合一印刷电路板110表面的缺陷检测,利用激光激发非金属导线部分的有机荧光材料,配合光学滤光片130将激发激光滤除,再以影像检测器140检索其激光诱发荧光(LaserInduced Fluorescence,LIF)影像。多重反射荧光探头包括共焦排列的二离轴抛物面镜120与121,其形状如图2(A)至2(D)所示,其中一离轴抛物面镜121具有一呈45度倾斜的线型狭缝122;一线型激光光源150,产生激光的激发光,并以45度角经由线型狭缝122直接入射离轴抛物面镜120与121的焦点123位置;一影像检测器140,以检测印刷电路板110上的荧光材料所诱发的荧光;一滤光镜130,位于印刷电路板110与影像检测器140之间,以滤除激光的激发光,使荧光穿透送达该影像检测器140;一水平移动的检测平台170,用以置放印刷电路板110,并使离轴抛物面镜120与121的焦点123落于印刷电路板110的表面;以及一光学显影镜组160,位于滤光镜130与影像检测器140之间,以将荧光聚焦于影像检测器140上。其中当激光的激发光与诱发的荧光,经印刷电路板110上的金属线表面反射,再由离轴抛物面镜120与121收集并以一平行光反射至另一离轴抛物面镜121与120,再将反射光再次聚焦于该焦点上,此重复的光反射,将透过滤光镜130滤除激光的激发光,并经光学影像镜组160将荧光聚焦于影像检测器140,可增加检测区的受光强度,而达到多重反射激发光的荧光检测,其中当离轴抛物面镜的表面金属为铝,印刷电路板的金属导线为铜材时,激光波长为400nm下光强度约可增加40%,激光波长为650nm下光强度约可增加73%;且此种荧光探头由于光源直接照射印刷电路板,并无利用离轴抛物面镜反射再聚焦,故离轴抛物面镜体积较小,整个探头所占体积亦变小。
实施例2
在本实施例中的多重反射荧光探头,请参阅图3,是配合一印刷电路板210表面的缺陷检测,利用激光激发非金属导线部分的有机荧光,配合光学滤光片230将激光滤除,再以影像检测器240检索其激光诱发荧光(Laser Induced Fluorescence,LIF)影像。反射荧光探头包括共焦排列的二离轴抛物面镜220与221,其中一离轴抛物面镜221具有一与印刷电路板210表面平行的线型狭缝222;一线型激光光源250,产生激光的激发光,并穿越线型狭缝222,到达离轴抛物面镜221上,随后反射至离轴抛物面镜的焦点223位置;一影像检测器240,以检测印刷电路板210上的荧光材料所诱发的荧光;一滤光镜230,位于印刷电路板210与影像检测器240之间,以滤除激光的激发光,使荧光穿透送达该影像检测器240;一水平移动的检测平台270,用以置放印刷电路板210,并使离轴抛物面镜220与221的焦点223落于印刷电路板210的表面;以及一光学显影镜组260,位于滤光镜230与影像检测器240之间,以将荧光聚焦于影像检测器240上。其中当激光激发的光与诱发的荧光,经印刷电路板210上的金属线表面反射,再由离轴抛物面镜220与221收集并以一平行光反射至另一离轴抛物面镜221与220,再将反射光聚焦于该焦点上,此重复之光反射行为将增加检测区的受光强度。且该激光的激发光先到达离轴抛物面镜再聚焦至印刷电路板,可使原发散的激光光源集中。
实施例3
在本实施例中的多重反射荧光探头,请参阅图4,是配合一布植有复数个荧光基团的核酸探针的生物晶片310,其利用激光激发,并配合分色镜330将激发激光滤除,再以影像检测器340检索其激光诱发荧光影像。该荧光探头包括共焦排列的二离轴抛物面镜320与321;一线型激光光源350,产生激光的激发光,并由分色镜330反射,到达离轴抛物面镜的焦点323位置;一影像检测器340,以检测荧光物质所在的位置;一分色镜330,位于生物晶片310与影像检测器340之间,以滤除激光的激发光,使荧光穿透送达该影像检测器340;一具水平垂直移动的检测平台370,用以置放生物晶片310;并使离轴抛物面镜320与321的焦点323落于生物晶片310的表面;以及一光学显影镜组360,位于分色镜330与影像检测器340之间,以将荧光聚焦于影像检测器340上。其中当激光的激发光由线型激光光源350间接照射至生物晶片310后,经由生物晶片310基板的反射,再由离轴抛物面镜320与321收集并以一平行光反射至另一离轴抛物面镜321与320,再将反射光聚焦于该焦点上,此种复之光反射行为将增加检测区的受光强度,增强荧光的信号,加速检测时间,且其架构简单,容易组装。
上述实施例仅是为了方便说明而举例。
Claims (11)
1.一种荧光材料检测的多重反射荧光探头,其中一荧光材料是位于一样品的表面,并以一产生一激发光的光源照射该样品上的荧光材料产生荧光;其特征在于,该多重反射荧光探头包括:
二共焦排列的离轴抛物面镜,其中一该离轴抛物面镜具有一狭缝,该样品置放于该离轴抛物面镜的该焦点上,该光源产生的激发光是经由该狭缝直接入射至该离轴抛物面镜的该焦点位置,再反射至其中一该离轴抛物面镜,形成一平行光,再入射至另一该离轴抛物面镜,并再次聚焦于该焦点;
一影像检测器,以检测该样品上的荧光材料所发出的荧光;
一滤光镜,位于该样品与该影像检测器之间,以滤除该反射的激发光,使荧光穿透送达该影像检测器;以及
一光学显影镜组,位于该滤光镜与该影像检测器之间,以将该荧光聚焦于该影像检测器上。
2.如权利要求1所述的多重反射荧光探头,其特征在于,所述光源为一激光光源或一发光二极管。
3.如权利要求1所述的多重反射荧光探头,其特征在于,所述光源为一线型光源或点光源。
4.如权利要求1所述的多重反射荧光探头,其特征在于,所述多重反射荧光探头更包含一检测平台,用以置放该样品,并使该离轴抛物面镜的该焦点落于该样品的表面。
5.如权利要求4所述的多重反射荧光探头,其特征在于,所述检测平台具有水平移动、垂直移动、或水平垂直移动功能。
6.如权利要求1所述的多重反射荧光探头,其特征在于,所述离轴抛物面镜的表面金属为铝、铜、银、金、铂、或镍。
7.如权利要求1所述的多重反射荧光探头,其特征在于,所述滤光镜以一分色镜取代,并使该光源的激发光经由该分色镜的反射,朝向该离轴抛物面镜的焦点位置。
8.如权利要求1所述的多重反射荧光探头,其特征在于,所述光源的激发光入射该样品的入射角度介于10至80度之间。
9.如权利要求1所述的多重反射荧光探头,其特征在于,所述多重反射荧光探头应用于印刷电路板的缺陷检测或生物晶片检测。
10.如权利要求1所述的多重反射荧光探头,其特征在于,所述光源的激发光入射该样品的入射角度为30度、45度、或60度。
11.如权利要求1所述的多重反射荧光探头,其特征在于,所述狭缝为一线型狭缝或一圆柱型狭缝。
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