CN100497944C - Safe getter pump of large exhaust speed - Google Patents
Safe getter pump of large exhaust speed Download PDFInfo
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- CN100497944C CN100497944C CNB2006101140442A CN200610114044A CN100497944C CN 100497944 C CN100497944 C CN 100497944C CN B2006101140442 A CNB2006101140442 A CN B2006101140442A CN 200610114044 A CN200610114044 A CN 200610114044A CN 100497944 C CN100497944 C CN 100497944C
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- getter
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- string
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Abstract
The invention relates to a getter string and the usage of a safe high pumping speed getter pump. The getter string is formed by stringing a plurality of getter pieces on a supporting pole. The getter pump is formed by arraying a plurality of the getter strings evenly on the shell body of the getter pump, an opening is arranged on the shell body as a getter pump opening, and a firing heating device is arranged on the outside of the shell body. The getter pump adopts an external firing heating method to activate the getter in the pump body. The usage and the maintenance are convenient and safe. The internal structure of the pump body is rationally designed, is helpful for evenly heating the getter, can facilitate the gas to diffuse, and can increase the pumping speed.
Description
Technical field
The present invention relates to a kind of big pumping speed getter pump safe in utilization easy and simple to handle, belong to the vacuum technique field.Can be used in modern science technology such as vacuum exhaust, particle accelerator, surface analysis system, laboratory vacuum system, thin-film deposition, vacuum processing system, laser, plasma machine, neutron generator, portable instrument, nuclear fusion device, universe simulator and the industry, can improve the degree of vacuum of system, can make that systematic function is stable, good reliability, life-span be long.
Background technique
In the eighties, the Beijing Non-Ferrous Metal Research General Academy applied for patent " wide activating temperature range getter and intaking element ", and (patent No.: CN85102889), this getter adds LaNi in zirconium-graphite
5, getter can be activated in a wider temperature range.Intaking element is also disclosed in this patent, and the preparation method of getter and intaking element.Like this, use getter and intaking element to make getter pump, and getter pump is applied in the vacuum technique field.
It is static pump, getter pump cleaning nothing oil, compact structure, no high voltagehigh frequency that getter pump does not have moving element, can reuse by repeatedly regenerating, getter pump can be to H
2Reversible suction puts, big to the pumping speed of reactive gas, absorbing capacity is high, the life-span is long, no magnetic interference, low energy consumption, friction, maintenance cost are low.Main residual gas composition is H in the ultra-high vacuum system
2And CO, nonevaporable getter (NEG) but has good pumping property to these two kinds of gases.Fall to when minimum in other means speed of exhaust of bleeding, the NEG pump is the best follow-up means of bleeding, and has saved the time of bleeding, and has improved the efficient of system, can make limiting vacuum improve 1.5～2 orders of magnitude generally speaking.Getter pump also can cooperate use with sputter ion pump.Owing to having numerous advantages, getter pump enjoy people to pay close attention to.
Mostly existing getter pump is that on metallic nickel or nickel-clad iron base band rolling thickness reaches the ZrAl16 alloy band of 50～150 μ m, (the Ni band that 0.15mm is thick on base band, very soft after the annealing) the thick Zr-V-Fe particle of covering 150～200 μ m, the Zr-V-Fe particle size is 80～150 μ m before rolling), because the getter band is only used the skim getter, then the consumption of getter seldom, thereby the gas absorption capacity is just very little.As the main body of getter pump, in the pump housing central axis position heater is housed so that heating, because heater takies pump housing space, so the consumption of getter just still less.At the pump housing inwall of these pumps and getter near part, the negative dromotropism of gas, getter can not be activated fully, has reduced the speed of exhaust of pump.In addition,,, just may fall particle, cause serious consequence so the getter vibration and shock resistant performance in this pump is relatively poor because the existing used getter of getter pump all is to be fixed on the metal tape by rolling mode.
Summary of the invention
The purpose of this invention is to provide a kind of getter string, this getter string helps gaseous diffusion, can adopt the mode of outside baking heat activation.
Another object of the present invention provides the big pumping speed room temperature of a kind of low-temp activation safe in utilization getter pump.This pump adopts outside baking mode of heating activated degasser, has the channels designs that helps gaseous diffusion, improves the exhaust capacity of pump, and improve pump safety in utilization, cut down the consumption of energy.
For achieving the above object, the present invention takes following technological scheme:
A kind of big pumping speed getter pump safe in utilization, this getter pump is some getter strings of uniform arrangement in housing, this getter string is several pieces getter sheets of serial connection on a strut, being provided with an opening on housing is the getter pumping hole, and be provided with the baking heating equipment in outside, described housing is cylindric, the two ends of the strut of some getter strings are separately fixed on two positioning plates, two end faces with cylinder shell are relative respectively for two positioning plates, and be laid with several through holes respectively on two positioning plates, and the getter pumping hole on the housing is located on one of them end face of housing.
The present invention adopts outside baking mode of heating to activate getter in the pump housing, and pump housing internal structure is reasonable in design.Adopt outside baking mode of heating to activate getter in the pump housing, easy to use, safe and reliable, avoid inner heating unit to break down need opening pump housing place under repair or change the operation of heating unit.Do not establish heating unit in the pump housing, saved pump housing inner space, can place getter more, the ZrAl16 or the Zr-V-Fe getter band that have only 50～150 μ m than cladding thickness, can more effectively bring into play the pumping property of getter, improve gettering rate and gettering quantity, improve the pumping speed of pump.Getter pump housing internal structure design is more reasonable, and the getter sheet conspires to create ganged up metallic rod and be fixed on the positioning plate, helped the channels designs of gaseous diffusion, and heat-conducting mode more helps the getter heating, guarantees that each position getter all can effectively activate in the pump housing.Increase the getter surface long-pending (getter inside and outside ring surface and upper and lower surface are active surface) of getter, improve pumping speed.This suction pump uses the wafers getter, does not need getter particles rolling on nickel strap.
In big pumping speed getter pump safe in utilization of the present invention, described baking heating equipment is a resistance wire furnace,
In big pumping speed getter pump safe in utilization of the present invention, described baking heating equipment is a resistance wire furnace, and it is shaped as cylindric, is sleeved on outside the housing.
In big pumping speed getter pump safe in utilization of the present invention, described housing is a metal shell, and the strut of described getter string is a stainless steel, and described positioning plate is the stainless steel circular plate.
In big pumping speed getter pump safe in utilization of the present invention, two getter sheets are separated with the endless metal silk on the described getter string.
In big pumping speed getter pump safe in utilization of the present invention, the getter pumping hole place in described housing is provided with filter plate.
In big pumping speed room temperature getter pump safe in utilization of the present invention, described getter can adopt the getter in the CN85102889 patent, wherein, and Zr powder, plumbago C, LaNi
5The composition scope of powder is arranged in triangle a, b, c, and the composition of triangular apex (weight %) is:
a.93％Zr+5％LaNi
5+2％C
b.50％Zr+48％LaNi
5+2％C
c.70％Zr+15％LaNi
5+15％C。
Three kinds of powder are all by 200 order/inches or 400 orders/inch standard sieve.After three kinds of components fully mix, can be pressed on the preprepared various supporting element, also can make suspension and be coated on the ready made heater, reach in 10～30 minutes through 850 ℃～950 ℃ heating in a vacuum and partially sinter.Intaking element activates through 400 ℃～900 ℃ and handled 10～30 minutes.
Getter of the present invention adopts the getter in CN 85102889 patents, repressed, sintering process is made voluminous powder sintering body getter sheet, on intensity, improve a lot, the vibration and shock resistant performance improves a lot than ZrAl 16 alloy degasser bands, has improved its reliability in use.
Advantage of the present invention and effect are:
Getter pump of the present invention, be to adopt outside baking mode of heating to activate getter in the pump housing, in the time of can avoiding adopting inner heat activation getter if heating unit breaks down, need open the operation of pump housing place under repair or replacing heating unit, therefore, getter pump of the present invention uses safety easy to maintenance.Do not establish heating unit in the pump housing, saved pump housing inner space, can add getter more, more effectively bring into play the pumping property of getter, increase the gettering quantity of pump, improve the pumping speed of pump.Getter pump of the present invention uses safety easy to maintenance.
Pump housing internal structure is reasonable in design, helps even heated getter agent, helps the channels designs of gaseous diffusion.Getter adopts sintering process to make the porous getter sheet, improves a lot than ZrAl 16 or Zr-V-Fe alloy band on intensity and vibratory impulse performance.The porous getter sheet that sintering is made conspires to create ganged up metallic rod and was fixed on the positioning plate, separate and keep a suitable distance between getter sheet and the sheet, make getter expose more active surface area, getter was to the sticking probability of gas and the probability of collision of reactive gas and getter when thereby raising was bled, and then improved pumping speed.By in the air-breathing device by air-breathing to as if 10
-4The H of Pa
2, the getter pump pumping speed is greater than 100l/s.The activationary temperature of the getter in the getter pump of the present invention is 500 ℃, to the thermal load reduction of surrounding environment, room temperatur working.
Description of drawings
Fig. 1 is the structural representation of getter pump.
Wherein: 1-columnar metal shell, 2-getter string, the positioning plate of 3-getter string, 4-dust filter plate, the hole, 7 on 5-getter pumping hole, the 6-getter positioning plate-baking heating equipment.
Fig. 2 is getter positioning plate and getter string structure.Wherein, Fig. 2 (a) is the side view of getter positioning plate and getter string structure; Fig. 2 (b) is the A-A sectional drawing of Fig. 2 (a).
Embodiment
The present invention is further described below in conjunction with drawings and Examples.
As shown in Figure 1 and Figure 2, getter pump of the present invention comprises a columnar metal shell 1, in its cavity, be laid with 33 string getter strings 2, every string getter string 2 is to be connected in series several pieces getter sheets with stainless steel as supporter, every getter sheet sintering forms, the two ends of the stainless steel of getter string 2 are fixed on the positioning plate 3 of the getter string 2 of having beaten hole 6, the positioning plate 3 at getter string place is the circular metal positioning plate, separate with the endless metal silk between the getter sheet, to improve the specific surface area of getter.It is getter pumping hole 5 that columnar metal shell 1 one ends of getter pump have an opening, in cavity, have getter pumping hole 5 a side be provided with the dust filter plate 4 that can communicate with the space of forvacuum, enter vacuum cavity to avoid particulate matter.Be provided with baking heating equipment 7 in the outside of columnar metal shell 1.Baking heating equipment 7 is a resistance wire furnace, and the internal diameter of resistance wire furnace is slightly larger than the external diameter of metal shell 1, and is sleeved on outside the metal shell 1.
Shown in Fig. 2 (a), have some holes 6 on the getter positioning plate 3, the hole 6 that two getter positioning plates 3 are opened is symmetrical, be beneficial to passing through of air-flow, center on getter positioning plate 3 has Φ 12mm macropore, have 78 Φ 5mm holes, 33 Φ 6mm holes, 3 Φ 4.5mm holes around it.Shown in Fig. 2 (b), the distance of the center line in each hole parallel with getter string 1 is 12mm, and the diameter of the stainless steel of getter string 1 is Φ 1mm.
The parameter of other sign getter pump performance is as follows:
Getter chip size: internal diameter 6mm, external diameter 12mm, high 1.3mm;
Amount to 33 string getters, every string getter has 33 getters approximately, the about 0.35g of every tablet quality;
Getter pump boundary dimension:
90mm * 68mm, wall thickness 2mm, pumping hole diameter
50mm;
The about 2800cm of the effective air-breathing area of getter pump
2
Activate power 1800w;
The pumping speed of pump〉1001/s (10
-4The H of Pa
2);
About 2.5 kilograms of the weight of pump;
Operating temperature: room temperature.
Embodiment:
With 0.35gZr powder, C powder and LaN i
5The mixture of powder is pressed into sheet (internal diameter 6mm, external diameter 12mm, high 1.3mm) under compacting pressure 280MPa, afterwards at 900 ℃ of following sintering 10min, sintering is made the getter sheet, and the getter sheet is conspired to create getter string 2 with stainless steel as supporter, is contained on the positioning plate 3 of getter pump.Adopt the baking mode of heating activator metal housing 1 interior getter of outside baking heating equipment 7, insulation 30min activates under 500 ℃.With 0.35gZr powder, C powder and LaN i
5The mixture of powder is pressed into sheet under compacting pressure 280MPa.
(base vacuum is 2 * 10 to control the feeding vacuum cavity by the hydrogen discharging temperature of control hydrogen bearing alloy
-5Pa, about 0.5 liter of cavity volume) amounts of hydrogen in utilizes getter pump to keep vacuum.Be under 1000Pal/ days the condition, to have carried out bimestrial test in logical hydrogen speed, test result shows that the vacuum of vacuum cavity can maintain 2 * 10
-5Pa.Calculate, for 10
-4The H of Pa
2, the getter pump among the present invention is taken out scooter 100l/s.
Claims (5)
1, a kind of big pumping speed getter pump safe in utilization, it is characterized in that: this getter pump is some getter strings of uniform arrangement in housing, this getter string is several pieces getter sheets of serial connection on a strut, being provided with an opening on housing is the getter pumping hole, and be provided with the baking heating equipment in outside, described housing is cylindric, the two ends of the strut of some getter strings are separately fixed on two positioning plates, two end faces with cylinder shell are relative respectively for two positioning plates, and be laid with several through holes respectively on two positioning plates, and the getter pumping hole on the housing is located on one of them end face of housing.
2, big pumping speed getter pump safe in utilization according to claim 1, it is characterized in that: described baking heating equipment is a resistance wire furnace, and it is shaped as cylindric, is sleeved on outside the housing.
3, big pumping speed getter pump safe in utilization according to claim 2, it is characterized in that: described housing is a metal shell, and the strut of described getter string is a stainless steel, and described positioning plate is the stainless steel circular plate.
4, big pumping speed getter pump safe in utilization according to claim 3, it is characterized in that: two getter sheets are separated with the endless metal silk on the described getter string.
5, big pumping speed getter pump safe in utilization according to claim 4, it is characterized in that: the getter pumping hole place in described housing is provided with filter plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101140442A CN100497944C (en) | 2006-10-25 | 2006-10-25 | Safe getter pump of large exhaust speed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101140442A CN100497944C (en) | 2006-10-25 | 2006-10-25 | Safe getter pump of large exhaust speed |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101169112A CN101169112A (en) | 2008-04-30 |
| CN100497944C true CN100497944C (en) | 2009-06-10 |
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ID=39389847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101140442A Active CN100497944C (en) | 2006-10-25 | 2006-10-25 | Safe getter pump of large exhaust speed |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009149751A1 (en) * | 2008-06-11 | 2009-12-17 | R&B Energy Research Sarl | Evacuated solar panel with a non evaporable getter pump |
| CN104751902A (en) * | 2013-12-25 | 2015-07-01 | 核工业西南物理研究院 | Forceful inspiratory mixed wire for nuclear fusion vacuum system |
| CN109123534B (en) * | 2018-10-10 | 2023-09-05 | 广州酒家集团利口福食品有限公司 | Full-automatic variable-frequency vacuum rolling machine for vegetables |
| CN109681406B (en) * | 2018-12-18 | 2020-02-18 | 有研工程技术研究院有限公司 | Internal heating type getter pump |
| CN112569894B (en) * | 2019-09-30 | 2022-03-08 | 中国科学院大连化学物理研究所 | Device for activating large-volume getter and enhancing adsorption rate by radio frequency discharge plasma |
| CN112584596B (en) * | 2019-09-30 | 2022-03-08 | 中国科学院大连化学物理研究所 | Device for enhancing adsorption rate of radio frequency discharge plasma |
| CN112012908A (en) * | 2020-09-01 | 2020-12-01 | 宁波盾科新材料有限公司 | Getter pump and use removal storage tank of this getter pump |
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- 2006-10-25 CN CNB2006101140442A patent/CN100497944C/en active Active
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|---|---|
| CN101169112A (en) | 2008-04-30 |
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Effective date of registration: 20190626 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals |