CN208330655U - getter pump with shape memory alloy spring - Google Patents
getter pump with shape memory alloy spring Download PDFInfo
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- CN208330655U CN208330655U CN201820743366.1U CN201820743366U CN208330655U CN 208330655 U CN208330655 U CN 208330655U CN 201820743366 U CN201820743366 U CN 201820743366U CN 208330655 U CN208330655 U CN 208330655U
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- shape memory
- memory alloy
- alloy spring
- getter pump
- heating
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Abstract
The utility model relates to a kind of getter pumps with shape memory alloy spring, including heating and fixation kit, metal gasket, porous gettering material with holes, pedestal, shape memory alloy spring；Wherein, multiple porous gettering materials with holes are separated by metal gasket, are gone here and there in heating and fixation kit, are fixed by shape memory alloy spring and nut, and heating and fixation kit are fixed on the base.Advantage: 1) spring outgassing rate made of marmem is significantly less than the outgassing rate of conventional springs steel, is conducive to getter pump and obtains higher ultimate vacuum.2) the phenomenon that avoiding conventional springs steel from following the string in the activation of getter pump repeated regeneration because of annealing.3) porous gettering material with holes is directly used, the procedure of processing of porous gettering material is simplified.
Description
Technical field
The utility model is a kind of getter pump with marmem, belongs to Attained Vacuum Technique field.
Background technique
In the prior art, the scientific research apparatus or system of many such as electron microscopes, needs the ability under UHV condition
It works normally.To reach ultrahigh vacuum, need using sliding vane rotary pump, vortex dry pump, turbomolecular pump, getter pump, sputtering from
It is applied in combination after one or more of sub- pump, titanium sublimation pump, cryo pump serial or parallel connection.
Getter pump is generally made of the porous gettering material of non-evaporable and heating structure.The porous gettering material of non-evaporable
Generally by selected in the metals such as titanium, zirconium, hafnium, tantalum, yttrium, niobium, molybdenum, vanadium, manganese, iron, nickel, cobalt, aluminium, rare earth it is one or more or they
Alloy be made.To expand the surface area that gettering material is contacted with gas as far as possible, generally by these getter metals or alloy
Powder is made, is then used by compacting or sinter molding.After these material air, surface is immediately by the oxygen in air
Passivation forms fine and close passivation layer, and active gases is prevented to continue to react with gettering material.These porous gettering materials are in a vacuum
When being heated by external or built-in structure, as the temperature rises, the oxygen in getter alloy particle surface passivation layer is gradually
It is spread inside to particle, exposes active surface.Active gases molecular collision is chemisorbed to active metal surface.If there is
The gas of enough temperature, chemisorption will be dissociated and spread to getter metals internal volume.It after a period of work, can be with
It heats again in a vacuum, carries out the regeneration of getter pump so that the hydrogen of absorbed inside is discharged and expands the impurity on surface internally
It dissipates.
The porous gettering material of getter pump is usually the thin slice as made of getter alloy powders compacting sintering, then will be more
Plate sheet is fixed together with the assembly of suitable fastening force.Fastening force cannot be too small, the rubs mutually to prevent the movement of these thin slices
Generate discrete particles.Since these thin slices are porous sintered bodies, limited strength, therefore when assembling fastening can not using compared with
Big fastening force, to prevent these thin slice fragmentations.In addition, getter pump needed to heat repeatedly during the service life, getter pump center
The porous gettering material of fastening part is easy to brokenly under the action of caused fatigue stress when multiple expanded by heating cools down again
It is broken, or generate discrete particles.These discrete particles needs avoid, and are also extremely harmful in certain applications.
For the fastening problems for solving porous gettering material, disclose a kind of method in Chinese patent 95197522, be exactly
Inlay the axle sleeve of a compact metal in the center of porous gettering material.When fastening these thin slices in this way, porous gettering material not by
Power is so as to avoiding these defects.But the porous gettering material complex process of this method manufacture, it is raw to be unfavorable for batch
It produces.And the step of axle sleeve part will cause the inconsistent wind to generate stress cracking of compression ratio when the compacting of air-breathing powder
Danger.
And spring made of common spring steel can not also apply getter pump.On the one hand, these spring steel need heat
Processing could have good elasticity, and be heat-treated and will cause the contamination of spring and make it in a vacuum and become deflation source, thus shadow
Ringing getter pump can be obtained ultimate vacuum.On the other hand, getter pump activation or when regeneration, needs 500 DEG C, even
900 DEG C of high temperature.At these temperatures, common spring steel can anneal and follow the string.
Utility model content
The utility model proposes a kind of getter pumps with marmem, and its object is to solve getter
The fastening of pump is difficult, avoids the generation when multiple expanded by heating cools down again of the porous gettering material of getter pump center fastener part
The phenomenon that discrete particles.
The technical solution of the utility model:
Getter pump with shape memory alloy spring, including heating and fixation kit 1, metal gasket 2, with holes more
Hole gettering material 3, pedestal 4, shape memory alloy spring 5；Wherein, multiple porous gettering materials 3 with holes pass through metal gasket 2
It separates, goes here and there in heating and fixation kit 1, fixed by shape memory alloy spring 5 and nut, heating and fixation kit 1
It is fixed on pedestal 4.
The utility model has the beneficial effects that
1) spring outgassing rate made of marmem is significantly less than the outgassing rate of conventional springs steel, is conducive to inhale
Gas agent pump obtains higher ultimate vacuum.
2) the phenomenon that avoiding conventional springs steel from following the string in the activation of getter pump repeated regeneration because of annealing.
3) porous gettering material with holes is directly used, the procedure of processing of porous gettering material is simplified.
Detailed description of the invention
Attached drawing 1 is the structural schematic diagram of the getter pump with marmem.
1 it is heating and fixation kit in attached drawing, 2 be metal gasket, 3 be porous gettering material, 4 be pedestal, 5 is shape note
Recall alloy spring.
Specific embodiment
Getter pump with shape memory alloy spring, including heating and fixation kit 1, metal gasket 2, with holes more
Hole gettering material 3, pedestal 4, shape memory alloy spring 5；Wherein, multiple porous gettering materials 3 with holes pass through metal gasket 2
It separates, goes here and there in heating and fixation kit 1, fixed by shape memory alloy spring 5 and nut, heating and fixation kit 1
It is fixed on pedestal 4.
The heating and fixation kit 1 include hollow metallic rod and the heater strip coated with insulating materials, heater strip position
Inside metallic rod.
The porous gettering material 3 be by the zirconium powder of 40% weight, 60% weight zirconium vanadium iron alloyed powder after mixing, use
The internal diameter that mold is pressed into is 6mm, outer diameter 25mm, is highly the disk of 1.5mm, disk obtained is sintered jail in a vacuum furnace
Gu.
The shape memory alloy spring 5 can be any shape memorial alloy, preferably high-temperature shape memory alloy,
Such as zirconium copper.
The gasket (2) is metal gasket.
The shape memory alloy spring (5) is spiral shape or dish.
As needed, the heater strip coated with insulating materials can be fitted into hollow metallic rod to be put into vacuum system
It is heated, or above-mentioned apparatus is welded or is connected on a vacuum pipe by dismountable flange, then by vacuum tube
Road heating, to be pumped by the agent of radiant heat heated getter.Marmem is heated, and temperature is begun to more than after transformation temperature
Deformation, to lose the fastening force to porous gettering material, porous gettering material can expand.When heating terminates cooling, when
Temperature is lower than transformation temperature, and marmem restores elasticity again, re-secures porous gettering material.Made by marmem
Spring, preferably zirconium copper high-temperature shape memory alloy to avoid rising because of environment temperature caused by malfunction, shape
It can be spiral shape, dish or other any shapes.
Technical solutions of the utility model are described further with reference to the accompanying drawing.
Compare attached drawing 1, the getter pump with marmem, the spring made of marmem, porous suction
Gas material and necessary fixed structure piece composition.The thin slice string of multiple porous gettering materials in a hollow metallic rod,
It is separated each other with metal gasket, then the spring made of a marmem and nut are fastened.
Embodiment 1
3 be porous gettering material in Fig. 1, by the zirconium powder of 40% weight, 60% weight zirconium vanadium iron alloyed powder after mixing,
Being pressed into internal diameter with mold is 6mm, outer diameter 25mm, is highly the disk of 1.5mm.These disks are sintered jail in a vacuum furnace
Gu.The heating that these gettering materials and metal gasket (2 in figure) are made up of metal parts and fixation kit (1 in figure), one
A spring made of zirconium copper high-temperature shape memory alloy (5 in figure) is fixed on the pedestal (4 in figure) of " several " font.This
A getter pump can be directly installed on inside vacuum system or be mounted on electrode flange and use.
From embodiment 1 it can be seen that the present invention can directly use porous gettering material with holes, do not have to porous air-breathing
Material is sintered on axle sleeve, simplifies the procedure of processing of porous gettering material, avoid the porous gettering material with axle sleeve due to
Compression ratio inconsistent and the crackle being easy to appear, improve the reliability of getter pump.Simultaneously also solve common spring by
The problem of annealing is followed the string is easy when, getter pump activation big in outgassing rate or regeneration.
Claims (6)
1. the getter pump of shape memory alloy spring is had, it is characterized in that including heating and fixation kit (1), gasket (2), band
Porous gettering material (3), pedestal (4), the shape memory alloy spring (5) in hole；Wherein, multiple porous gettering materials with holes
(3) it is separated, is gone here and there in heating and fixation kit (1) by gasket (2), it is solid by shape memory alloy spring (5) and nut
Fixed, heating and fixation kit (1) are fixed on pedestal (4).
2. the getter pump according to claim 1 with shape memory alloy spring, it is characterized in that described heat and consolidate
Determining component (1) includes hollow metallic rod and the heater strip coated with insulating materials, and heater strip is located inside metallic rod.
3. the getter pump according to claim 1 with shape memory alloy spring, it is characterized in that the porous air-breathing
Material (3) be by the zirconium powder of 40% weight, 60% weight zirconium vanadium iron alloyed powder after mixing, be with the internal diameter that mold is pressed into
6mm, outer diameter 25mm are highly the disk of 1.5mm, and disk obtained is sintered securely in a vacuum furnace.
4. the getter pump according to claim 1 with shape memory alloy spring, it is characterized in that the shape memory
Alloy spring (5) is zirconium copper marmem.
5. the getter pump according to claim 1 with shape memory alloy spring, it is characterized in that the shape memory
Alloy spring (5) is spiral shape or dish.
6. the getter pump according to claim 1 with shape memory alloy spring, it is characterized in that the gasket (2) is
Metal or ceramic gasket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820743366.1U CN208330655U (en) | 2018-05-18 | 2018-05-18 | getter pump with shape memory alloy spring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820743366.1U CN208330655U (en) | 2018-05-18 | 2018-05-18 | getter pump with shape memory alloy spring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208330655U true CN208330655U (en) | 2019-01-04 |
Family
ID=64774273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820743366.1U Active CN208330655U (en) | 2018-05-18 | 2018-05-18 | getter pump with shape memory alloy spring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208330655U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111140463A (en) * | 2019-11-22 | 2020-05-12 | 有研工程技术研究院有限公司 | Getter pump with sheet-shaped stacking structure |
| CN114318233A (en) * | 2021-12-10 | 2022-04-12 | 兰州空间技术物理研究所 | Getter with thin film coating and preparation method and application thereof |
| US11578707B1 (en) | 2022-04-28 | 2023-02-14 | Honeywell International Inc. | Shape memory alloy enclosure for non-evaporable getters |
-
2018
- 2018-05-18 CN CN201820743366.1U patent/CN208330655U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111140463A (en) * | 2019-11-22 | 2020-05-12 | 有研工程技术研究院有限公司 | Getter pump with sheet-shaped stacking structure |
| CN111140463B (en) * | 2019-11-22 | 2021-06-15 | 有研工程技术研究院有限公司 | Getter pump with sheet-shaped stacking structure |
| CN114318233A (en) * | 2021-12-10 | 2022-04-12 | 兰州空间技术物理研究所 | Getter with thin film coating and preparation method and application thereof |
| US11578707B1 (en) | 2022-04-28 | 2023-02-14 | Honeywell International Inc. | Shape memory alloy enclosure for non-evaporable getters |
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