CN116263147A - Internal heating type filling structure non-evaporable getter pump - Google Patents

Internal heating type filling structure non-evaporable getter pump Download PDF

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Publication number
CN116263147A
CN116263147A CN202111530612.8A CN202111530612A CN116263147A CN 116263147 A CN116263147 A CN 116263147A CN 202111530612 A CN202111530612 A CN 202111530612A CN 116263147 A CN116263147 A CN 116263147A
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CN
China
Prior art keywords
cylinder
shell
flange
getter
getter pump
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Pending
Application number
CN202111530612.8A
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Chinese (zh)
Inventor
关亚风
丁坤
施海涛
宁海静
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Dalian Institute of Chemical Physics of CAS
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Dalian Institute of Chemical Physics of CAS
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Priority to CN202111530612.8A priority Critical patent/CN116263147A/en
Publication of CN116263147A publication Critical patent/CN116263147A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F04B37/04—Selection of specific absorption or adsorption materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121—Casings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention discloses a non-evaporable getter pump with an internal heating type filling structure, and belongs to the technical field of vacuum pumps. Mainly comprises a flange, a vacuum heating electrode pair, a shell, a getter material, a heating wire, a heat insulation material and an interlayer cylinder; the shell is a concave cylinder, the flange is connected to the open end of the shell, a gas channel is arranged in the center of the flange, a vacuum heating electrode pair is welded on the flange, the interlayer cylinder is arranged in the shell and comprises an inner layer cylinder and an outer layer cylinder, and a suction material is filled in an interlayer cavity between the inner layer cylinder and the outer layer cylinder; a heating wire is wound on the outer wall of the outer cylinder, and the outgoing line of the heating wire is welded with a vacuum heating electrode on the flange; the gap between the outer cylinder and the shell is filled with heat insulation materials. The getter pump can efficiently and reliably absorb a large amount of active gases such as hydrogen, oxygen, carbon dioxide, water vapor and the like, is convenient to install and safe to use, and is suitable for inhaling in normal pressure and low vacuum systems.

Description

Internal heating type filling structure non-evaporable getter pump
Technical Field
The invention belongs to the technical field of vacuum pumps, and particularly relates to a non-evaporable getter pump with an internal heating type filling structure.
Background
The getter pump is a vacuum adsorption pump, and active gases in a vacuum system can be effectively adsorbed by heating and activating active alloy materials constituting the getter material, so that the vacuum environment of the system is obtained and maintained. Different from the traditional vacuum pump, the suction pump has no movable parts inside, and has the advantages of cleanness, no oil, no high pressure, high frequency, vibration resistance, repeated use and the like. In addition, once heated, the getter pump can realize long-term passive operation, and is an effective means for maintaining a high vacuum or ultra-high vacuum environment.
The existing getter pump mainly presses the getter material into a sheet-shaped circular ring with a certain thickness (usually 1-2 mm), then distributes the sheet-shaped circular ring on a positioning shaft according to a certain arrangement mode, and activates the sheet-shaped circular ring by adopting a heating rod center heating mode, but the temperature of the core part of the getter sheet is easily higher than that of the edge getter material, and the sheet-shaped circular ring has uneven heating.
In order to uniformly heat the getter elements, part of getter pumps adopt an external baking heating mode, and the whole getter pump is arranged in a heating device, but the mode has the problems of high energy consumption, low heating efficiency, long activation process and the like, and the temperature which can be reached by the getter elements in the pump is limited because the whole pump body needs to be heated integrally; or the getter material and the heating element are injection molded into an integral element, but the method has complex process and is not easy to replace the getter element.
Disclosure of Invention
Aiming at the problems of the prior getter pump, the invention provides a non-evaporable getter pump with an internal heating type filling structure. The getter pump activates the getter through direct contact with heat radiation heating, and has the advantages of high heating efficiency and uniform activation; the air suction material is filled in the interlayer of the stainless steel mesh screen and the stainless steel sheet, so that the powder dropping problem is solved, the contact area between the air suction material and the gas is increased, and the air suction rate is greatly improved; the getter material in the getter element is easy to replace, so that the cost is saved. Meanwhile, the whole suction pump is convenient to install and use, once the suction pump is heated and activated, long-term passive work can be realized, and the suction pump is an effective means for maintaining a high-vacuum or ultrahigh-vacuum environment.
The technical scheme of the invention is as follows:
the internal heating type filling structure non-evaporable getter pump mainly comprises a flange, a vacuum heating electrode pair, a shell, getter materials, heating wires, heat insulation materials and an interlayer cylinder;
the shell is a concave cylinder, the round table is open, the bottom is closed, the flange is connected to the open end of the shell, a gas channel is arranged in the center of the flange, and a vacuum heating electrode pair is welded on the flange; the interlayer cylinder is arranged in the shell, one end of the interlayer cylinder is sealed with the bottom end of the shell, the other end of the interlayer cylinder is sealed with the flange, the interlayer cylinder comprises an inner layer cylinder and an outer layer cylinder, the inner layer cylinder is a stainless steel net-shaped cylinder or a sintered stainless steel cylinder, the outer layer cylinder is a stainless steel cylinder, the inner layer cylinder, the outer layer cylinder and the shell are coaxial, and a interlayer cavity between the inner layer cylinder and the outer layer cylinder is filled with a getter material; the outer wall of the outer cylinder is wound with a heating wire for heating and activating the getter material, and the outgoing line of the heating wire is welded with a vacuum heating electrode on the flange; the gap between the outer cylinder and the shell is filled with heat insulation materials.
Further, the heating wire is an outer-layer insulated metal heating wire, and the heating wire is made of iron-chromium-aluminum alloy and nickel-chromium electrothermal alloy.
Further, the getter material is a non-evaporable getter, comprising one or more than two combination materials of ZrVFe, zrVMnCe, zr, tiZrV, tiCo, ti, ni, zrV, zrFe, tiMo, tiZrVAl, and the particle size of the getter is 5-80 meshes.
Further, the inner diameter of the inner cylinder is the same as the inner diameter of the gas passage in the center of the flange.
Further, the pores of the stainless steel mesh cylinder are 2-7 μm.
Further, the heat insulation material is one or the combination of more than two of aluminum silicate fiber, glass fiber, quartz fiber or aerogel.
Further, the flange is a stainless steel flange, the shell and the flange are sealed through an O ring or a red copper ring, and the flange and the shell are fixed through bolts and gaskets.
Further, the shell is a stainless steel shell, the inner diameter of the shell is 80-100mm, the outer diameter of the shell is 120-160mm, and the height of the shell is 100-150mm.
Further, the diameter of the inner layer cylinder is 20-40mm, and the diameter of the outer layer cylinder is 45-60mm.
Compared with the prior art, the getter pump has the following advantages:
1. the getter pump of the invention fills the getter material in the interlayer of the stainless steel mesh screen and the stainless steel cylinder, thereby being convenient for replacing the getter material, saving the cost, solving the powder falling problem in the using process of the getter, increasing the contact area of the getter alloy and the gas and greatly improving the getter rate.
2. The getter pump adopts the heating wire to directly heat the inside of the getter pump, activates the getter by directly contacting with heat radiation heating, and then fills the heat insulation material outside for heat insulation, thereby having the advantages of high heating efficiency and uniform activation.
3. The getter pump can efficiently and reliably absorb a large amount of active gases such as hydrogen, oxygen, carbon dioxide, water vapor and the like, is convenient to install and safe to use, and is suitable for inhaling in normal pressure and low vacuum systems.
Drawings
In order to more clearly illustrate the embodiments of the present invention, the drawings to which the embodiments relate will be briefly described.
FIG. 1 is a schematic structural view of a getter pump of the invention;
FIG. 2 is a top view of the interior of the getter pump of the invention;
in the figure: 1-flange, 2-vacuum heating electrode pair, 3-stainless steel shell, 4-getter material, 5-heater wire, 6-heat preservation material, 7-inner layer cylinder, 8-outer layer cylinder.
Detailed Description
The following detailed description of the invention is provided in connection with examples, but the implementation of the invention is not limited thereto, and it is obvious that the examples described below are only some examples of the invention, and that it is within the scope of protection of the invention to those skilled in the art to obtain other similar examples without inventive faculty.
Example 1
An internal heating type filling structure non-evaporable getter pump comprises a flange 1, a vacuum heating electrode pair 2, a stainless steel shell 3, a getter material 4, a heating wire 5, a heat insulation material 6, an inner layer cylinder 7 and an outer layer cylinder 8;
the stainless steel shell 3 is a concave cylinder with the inner diameter of 80mm and the height of 120mm, the outer diameter of the round table is 120mm, the round table is open, the bottom is closed, the flange 1 is connected to the open end of the shell 3, a gas channel is arranged in the center of the flange 1, and a vacuum heating electrode pair 2 is welded on the flange 1;
the stainless steel shell 3 is internally provided with a concentric interlayer cylinder which is sealed with the lower end of the stainless steel shell 3 of the getter pump, the interlayer cylinder comprises an inner layer cylinder 7 and an outer layer cylinder 8, wherein the inner layer cylinder 7 is a stainless steel net-shaped cylinder with 5 mu m pores, the outer layer cylinder 8 is a stainless steel cylinder, the diameter of the inner layer cylinder 7 is 30mm, the diameter of the outer layer cylinder 8 is 45mm, the inner layer cylinder 7 and the outer layer cylinder 8 are coaxial with the shell 3, an interlayer cavity between the inner layer cylinder 7 and the outer layer cylinder 8 is filled with 40g ZrVFe getter particles (8-20 meshes), and the inner diameter of the inner layer cylinder 7 is the same as the inner diameter of a gas channel of a flange;
the outer wall of the outer cylinder 8 is wound with a plurality of circles of iron-chromium-aluminum alloy heating wires 5 for heating and activating the getter, and the outgoing wires of the heating wires 5 are welded with the vacuum heating electrode pairs 2 on the flange 1;
the gap between the heating wire 5 and the shell 3 is filled with an aluminum silicate heat insulation material 6;
the flange 1 is a stainless steel flange, an O-shaped ring is used for sealing between the stainless steel shell 3 and the flange 1, and the flange 1 and the stainless steel shell 3 are fixed through bolts and gaskets;
with the getter pump described above, activation is performed at 100W, activation conditions: 500 ℃, activation time: 30min, getter pump pumping speed: > 100L/s (test pressure 4X 10) -4 Pa, test gas H 2 ) Operating temperature: at room temperature, the getter pump works normally.
Example 2
The specific structure is the same as that of example 1, except that the getter is ZrVFeTi getter and the thermal insulation material is glass wool.
Example 3
The specific structure is the same as that of example 1, except that the getter is a ZrFe getter and the metal heating wire is a nickel-chromium electrothermal alloy.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.

Claims (9)

1. An internally heated filled structure non-evaporable getter pump, characterized by: the vacuum heating device mainly comprises a flange (1), a vacuum heating electrode pair (2), a shell (3), a getter material (4), a heating wire (5), a heat insulation material (6) and an interlayer cylinder;
the shell (3) is a concave cylinder, the flange (1) is connected to the opening end of the shell (3), a gas channel is arranged in the center of the flange (1), and a vacuum heating electrode pair (2) is welded on the flange (1); the interlayer cylinder is arranged in the shell (3), one end of the interlayer cylinder is sealed with the bottom end of the shell (3), the other end of the interlayer cylinder is sealed with the flange (1), the interlayer cylinder comprises an inner layer cylinder (7) and an outer layer cylinder (8), the inner layer cylinder (7) is a stainless steel net-shaped cylinder or a sintered stainless steel cylinder, the outer layer cylinder (8) is a stainless steel cylinder, the inner layer cylinder (7) and the outer layer cylinder (8) are coaxial with the shell (3), and a interlayer cavity between the inner layer cylinder (7) and the outer layer cylinder (8) is filled with a getter material (4); the outer wall of the outer cylinder (8) is wound with a heating wire (5), and the outgoing line of the heating wire (5) is connected with a vacuum heating electrode pair (2) on the flange (1); the gap between the outer cylinder (8) and the shell (3) is filled with a heat insulation material (6).
2. The getter pump according to claim 1, wherein: the heating wire (5) is an outer-layer insulated metal heating wire, and the heating wire (5) is made of iron-chromium-aluminum alloy and nickel-chromium electrothermal alloy.
3. The getter pump according to claim 1, wherein: the getter material (4) is a non-evaporable getter, comprising one or more than two combination materials of ZrVFe, zrVMnCe, zr, tiZrV, tiCo, ti, ni, zrV, zrFe, tiMo, tiZrVAl, and the particle size of the getter is 5-80 meshes.
4. The getter pump according to claim 1, wherein: the inner diameter of the inner cylinder (7) is the same as the inner diameter of the gas channel in the center of the flange (1).
5. The getter pump according to claim 1, wherein: the pore of the stainless steel net-shaped cylinder is 2-7 mu m.
6. The getter pump according to claim 1, wherein: the heat insulation material (6) is one or the combination of more than two of aluminum silicate fiber, glass fiber, quartz fiber or aerogel.
7. The getter pump according to claim 1, wherein: the flange (1) is a stainless steel flange, the shell (3) and the flange (1) are sealed through an O ring or a red copper ring, and the flange (1) and the shell (3) are fixed through bolts and gaskets.
8. The getter pump according to claim 1, wherein: the shell (3) is a stainless steel shell, the inner diameter of the shell (3) is 80-100mm, the outer diameter of the shell is 120-160mm, and the height of the shell is 100-150mm.
9. The getter pump according to claim 1, wherein: the diameter of the inner layer cylinder (7) is 20-40mm, and the diameter of the outer layer cylinder (8) is 45-60mm.
CN202111530612.8A 2021-12-14 2021-12-14 Internal heating type filling structure non-evaporable getter pump Pending CN116263147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111530612.8A CN116263147A (en) 2021-12-14 2021-12-14 Internal heating type filling structure non-evaporable getter pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111530612.8A CN116263147A (en) 2021-12-14 2021-12-14 Internal heating type filling structure non-evaporable getter pump

Publications (1)

Publication Number Publication Date
CN116263147A true CN116263147A (en) 2023-06-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111530612.8A Pending CN116263147A (en) 2021-12-14 2021-12-14 Internal heating type filling structure non-evaporable getter pump

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CN (1) CN116263147A (en)

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