CN200958468Y - Safety degasser pump with fast suction-speed - Google Patents
Safety degasser pump with fast suction-speed Download PDFInfo
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- CN200958468Y CN200958468Y CN 200620134168 CN200620134168U CN200958468Y CN 200958468 Y CN200958468 Y CN 200958468Y CN 200620134168 CN200620134168 CN 200620134168 CN 200620134168 U CN200620134168 U CN 200620134168U CN 200958468 Y CN200958468 Y CN 200958468Y
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- getter
- housing
- pump
- pumping speed
- getter pump
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Abstract
A safe high-speed getter pump, of which a plurality of support bars are distributed in a casing of the getter pump, and each support bar is connected with a plurality of getter pieces in series, forming a getter string. An opening is arranged on the casing as a getter pumping hole, and a baking and heating device is arranged outside the casing. The casing is in cylinder shape, and the both ends of the plurality of support bars are fixed on two positioning boards respectively. The two positioning boards are provided with a plurality of through holes uniformly. The getter pump will activate the getter in the pump body by adopting an external baking and heating mode, and is convenient in operation; the internal structure of the pump body is reasonably designed, which is beneficial for uniform heating of getter and gaseous diffusion, so as to promote the pumping speed.
Description
Technical field
The utility model relates to a kind of big pumping speed getter pump safe in utilization easy and simple to handle, belongs to the vacuum technique field.Can be used in modern science technology such as vacuum exhaust, particle accelerator, surface analysis system, laboratory vacuum system, thin-film deposition, vacuum processing system, laser, plasma machine, neutron generator, portable instrument, nuclear fusion device, universe simulator and the industry, can improve the degree of vacuum of system, can make that systematic function is stable, good reliability, life-span be long.
Background technique
In the eighties, the Beijing Non-Ferrous Metal Research General Academy applied for patent " wide activating temperature range getter and intaking element ", and (patent No.: CN85102889), this getter adds LaNi in zirconium-graphite
5, getter can be activated in a wider temperature range.Intaking element is also disclosed in this patent, and the preparation method of getter and intaking element.Like this, use getter and intaking element to make getter pump, and getter pump is applied in the vacuum technique field.
It is static pump, getter pump cleaning nothing oil, compact structure, no high voltagehigh frequency that getter pump does not have moving element, can reuse by repeatedly regenerating, getter pump can be to H
2Reversible suction puts, big to the pumping speed of reactive gas, absorbing capacity is high, the life-span is long, no magnetic interference, low energy consumption, friction, maintenance cost are low.Main residual gas composition is H in the ultra-high vacuum system
2And CO, nonevaporable getter (NEG) but has good pumping property to these two kinds of gases.Fall to when minimum in other means speed of exhaust of bleeding, the NEG pump is the best follow-up means of bleeding, and has saved the time of bleeding, and has improved the efficient of system, can make limiting vacuum improve 1.5～2 orders of magnitude generally speaking.Getter pump also can cooperate use with sputter ion pump.Owing to having numerous advantages, getter pump enjoy people to pay close attention to.
Mostly existing getter pump is that on metallic nickel or nickel-clad iron base band rolling thickness reaches the ZrAl16 alloy band of 50～150 μ m, (the Ni band that 0.15mm is thick on base band, very soft after the annealing) the thick Zr-V-Fe particle of covering 150～200 μ m, the Zr-V-Fe particle size is 80～150 μ m before rolling), because the getter band is only used the skim getter, then the consumption of getter seldom, thereby the gas absorption capacity is just very little.As the main body of getter pump, in the pump housing central axis position heater is housed so that heating, because heater takies pump housing space, so the consumption of getter just still less.At the pump housing inwall of these pumps and getter near part, the negative dromotropism of gas, getter can not be activated fully, has reduced the speed of exhaust of pump.In addition,,, just may fall particle, cause serious consequence so the getter vibration and shock resistant performance in this pump is relatively poor because the existing used getter of getter pump all is to be fixed on the metal tape by rolling mode.
Summary of the invention
The purpose of this utility model is at the deficiency of existing getter pump, and a kind of big pumping speed getter pump safe in utilization is provided.This pump adopts outside baking mode of heating activated degasser, has the channels designs that helps gaseous diffusion, improves the exhaust capacity of pump, improve pump safety in utilization, cut down the consumption of energy.
For achieving the above object, the utility model is taked following technological scheme:
A kind of big pumping speed room temperature getter pump safe in utilization, this getter pump is some struts of uniform arrangement in housing, and every strut is connected in series several pieces getter sheets respectively, forms the getter string, being provided with an opening on housing is gas agent pumping hole, and is provided with the baking heating equipment in outside.
The utility model is to adopt outside baking mode of heating to activate getter in the pump housing, and pump housing internal structure is reasonable in design.Adopt outside baking mode of heating to activate getter in the pump housing, easy to use, safe and reliable, avoid inner heating unit to break down need opening pump housing place under repair or change the operation of heating unit.Do not establish heating unit in the pump housing, saved pump housing inner space, can place getter more, the ZrAl16 or the Zr-V-Fe getter band that have only 50～150 μ m than cladding thickness, can more effectively bring into play the pumping property of getter, improve gettering rate and gettering quantity, improve the pumping speed of pump.Getter pump housing internal structure design is more reasonable, and the getter sheet conspires to create ganged up metallic rod and be fixed on the positioning plate, helped the channels designs of gaseous diffusion, and heat-conducting mode more helps the getter heating, guarantees that each position getter all can effectively activate in the pump housing.Increase the getter surface long-pending (getter inside and outside ring surface and upper and lower surface are active surface) of getter, improve pumping speed.This suction pump uses the wafers getter, does not need getter particles rolling on nickel strap.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, described housing is cylindric, the two ends of some struts are separately fixed on two positioning plates, two end faces with cylinder shell are relative respectively for two positioning plates, and be laid with several through holes respectively on two positioning plates, and the gas agent pumping hole on the housing is located on one of them end face of housing.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, described baking heating equipment is a resistance wire furnace, and it is shaped as cylindric, and the internal diameter of resistance wire furnace is basically greater than the external diameter of housing, and is sleeved on outside the housing.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, described housing is a metal shell, and described strut is a stainless steel, and described positioning plate is the stainless steel circular plate.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, described string two getter sheets on metallic rod are separated with the endless metal silk.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, the gas agent pumping hole place in described housing is provided with filter plate.
In big pumping speed room temperature getter pump safe in utilization of the present utility model, described getter can adopt the getter in the CN85102889 patent, wherein, and Zr powder, plumbago C, LaNi
5The composition scope of powder is arranged in triangle a, b, c, and the composition of triangular apex (weight %) is:
a.93％Zr+5％LaNi
5+2％C
b.50％Zr+48％LaNi
5+2％C
c.70％Zr+15％LaNi
5+15％C。
Three kinds of powder are all by 200 order/inches or 400 orders/inch standard sieve.After three kinds of components fully mix, can be pressed on the preprepared various supporting element, also can make suspension and be coated on the ready made heater, reach in 10～30 minutes through 850 ℃～950 ℃ heating in a vacuum and partially sinter.Intaking element activates through 400 ℃～900 ℃ and handled 10～30 minutes.
Getter of the present utility model adopts the getter in CN 85102889 patents, repressed, sintering process is made voluminous powder sintering body getter sheet, on intensity, improve a lot, the vibration and shock resistant performance improves a lot than ZrAl16 alloy degasser band, has improved its reliability in use.
Advantage of the present utility model and effect are:
Getter pump of the present utility model, be to adopt outside baking mode of heating to activate getter in the pump housing, in the time of can avoiding adopting inner heat activation getter if heating unit breaks down, need open the operation of pump housing place under repair or replacing heating unit, therefore, getter pump of the present utility model uses safety easy to maintenance.Do not establish heating unit in the pump housing, saved pump housing inner space, can add getter more, more effectively bring into play the pumping property of getter, increase the gettering quantity of pump, improve the pumping speed of pump.The getter pump room temperatur working does not need thermal source.Getter pump of the present utility model uses safety easy to maintenance.
Pump housing internal structure is reasonable in design, helps even heated getter agent, helps the channels designs of gaseous diffusion.Getter adopts sintering process to make the porous getter sheet, improves a lot than ZrAl16 or Zr-V-Fe alloy band on intensity and vibratory impulse performance.The porous getter sheet that sintering is made conspires to create ganged up metallic rod and was fixed on the positioning plate, separate and keep a suitable distance between getter sheet and the sheet, make getter expose more active surface area, getter was to the sticking probability of gas and the probability of collision of reactive gas and getter when thereby raising was bled, and then improved pumping speed.By in the air-breathing device by air-breathing to as if 10
-4The H of Pa
2, the getter pump pumping speed is greater than 100l/s.The activationary temperature of the getter in the getter pump of the present invention is 500 ℃, to the thermal load reduction of surrounding environment, room temperatur working.
Description of drawings
Fig. 1 is the structural representation of getter pump.
Wherein: the columnar metal shell of 1-, 2-getter string, the positioning plate of 3-getter string, 4-dust filter plate, hole, 7-on 5-getter pumping hole, the 6-getter positioning plate toast heating equipment.
Fig. 2 is getter positioning plate and getter string structure.Wherein, Fig. 2 (a) is the side view of getter positioning plate and getter string structure; Fig. 2 (b) is the A-A sectional drawing of Fig. 2 (a).
Embodiment
Below in conjunction with drawings and Examples the utility model is further specified.
As shown in Figure 1 and Figure 2, getter pump of the present utility model comprises a columnar metal shell 1, in its cavity, be laid with 33 string getter strings 2, every string getter string 2 is to be connected in series several pieces getter sheets with stainless steel as supporter, every getter sheet sintering forms, the two ends of the stainless steel of getter string 2 are fixed on the positioning plate 3 of the getter string 2 of having beaten hole 6, the positioning plate 3 at getter string place is the circular metal positioning plate, separate with the endless metal silk between the getter sheet, to improve the specific surface area of getter.It is gas agent pumping hole 5 that columnar metal shell 1 one ends of getter pump have an opening, in cavity, have gas agent pumping hole 5 a side be provided with the dust filter plate 4 that can communicate with the space of forvacuum, enter vacuum cavity to avoid particulate matter.Be provided with baking heating equipment 7 in the outside of columnar metal shell 1.Baking heating equipment 7 is a resistance wire furnace, and the internal diameter of resistance wire furnace is slightly larger than the external diameter of metal shell 1, and is sleeved on outside the metal shell 1.
Shown in Fig. 2 (a), have some holes 6 on the getter positioning plate 3, the hole 6 that two getter positioning plates 3 are opened is symmetrical, be beneficial to passing through of air-flow, center on getter positioning plate 3 has Φ 12mm macropore, have 78 Φ 5mm holes, 33 Φ 6mm holes, 3 Φ 4.5mm holes around it.Shown in Fig. 2 (b), the distance of the center line in each hole parallel with getter string 1 is 12mm, and the diameter of the stainless steel of getter string 1 is Φ 1mm.
The parameter of other sign getter pump performance is as follows:
Getter chip size: internal diameter 6mm, external diameter 12mm, high 1.3mm;
Amount to 33 string getters, every string getter has 33 getters approximately, the about 0.35g of every tablet quality;
Getter pump boundary dimension: 90mm * 68mm, wall thickness 2mm, pumping hole diameter 50mm;
The about 2800cm of the effective air-breathing area of getter pump
2
Activate power 1800w;
Pumping speed＞the 100l/s (10 of pump
-4The H of Pa
2);
About 2.5 kilograms of the weight of pump;
Operating temperature: room temperature.
Embodiment
With 0.35gZr powder, C powder and MmNi
5The mixture of powder is pressed into sheet (internal diameter 6mm, external diameter 12mm, high 1.3mm) under compacting pressure 280MPa, afterwards at 900 ℃ of following sintering 10min, sintering is made the getter sheet, and the getter sheet is conspired to create getter string 2 with stainless steel as supporter, is contained on the positioning plate 3 of getter pump.Adopt the baking mode of heating activator metal housing 1 interior getter of outside baking heating equipment 7, insulation 30min activates under 500 ℃.
(base vacuum is 2 * 10 to control the feeding vacuum cavity by the hydrogen discharging temperature of control hydrogen bearing alloy
-5Pa, about 0.5 liter of cavity volume) amounts of hydrogen in utilizes getter pump to keep vacuum.Be under 1000Pal/ days the condition, to have carried out bimestrial test in logical hydrogen speed, test result shows that the vacuum of vacuum cavity can maintain 2 * 10
-5Pa.Calculate, for 10
-4The H of Pa
2, the getter pump in the utility model is taken out scooter 100l/s.
Claims (6)
1, a kind of big pumping speed getter pump safe in utilization, it is characterized in that: this getter pump is some struts of uniform arrangement in housing, every strut is connected in series several pieces getter sheets respectively, form the getter string, being provided with an opening on housing is gas agent pumping hole, and is provided with the baking heating equipment in outside.
2, big pumping speed getter pump safe in utilization according to claim 1, it is characterized in that: described housing is cylindric, the two ends of some struts are separately fixed on two positioning plates, two end faces with cylinder shell are relative respectively for two positioning plates, and be laid with several through holes respectively on two positioning plates, and the gas agent pumping hole on the housing is located on one of them end face of housing.
3, big pumping speed getter pump safe in utilization according to claim 2, it is characterized in that: described baking heating equipment is a resistance wire furnace, and it is shaped as cylindric, the internal diameter of resistance wire furnace is basically greater than the external diameter of housing, and is sleeved on outside the housing.
4, big pumping speed getter pump safe in utilization according to claim 3, it is characterized in that: described housing is a metal shell, and described strut is a stainless steel, and described positioning plate is the stainless steel circular plate.
5, big pumping speed getter pump safe in utilization according to claim 4 is characterized in that: described string two getter sheets on metallic rod are separated with the endless metal silk.
6, big pumping speed getter pump safe in utilization according to claim 5 is characterized in that: the gas agent pumping hole place in described housing is provided with filter plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620134168 CN200958468Y (en) | 2006-10-25 | 2006-10-25 | Safety degasser pump with fast suction-speed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620134168 CN200958468Y (en) | 2006-10-25 | 2006-10-25 | Safety degasser pump with fast suction-speed |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200958468Y true CN200958468Y (en) | 2007-10-10 |
Family
ID=38785347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620134168 Expired - Lifetime CN200958468Y (en) | 2006-10-25 | 2006-10-25 | Safety degasser pump with fast suction-speed |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200958468Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107076133A (en) * | 2014-06-26 | 2017-08-18 | 工程吸气公司 | Getter pumping system |
| CN115185169A (en) * | 2022-09-07 | 2022-10-14 | 上海晶维材料科技有限公司 | Adsorption pump with anti-pulverization capability for space hydrogen atomic clock |
-
2006
- 2006-10-25 CN CN 200620134168 patent/CN200958468Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107076133A (en) * | 2014-06-26 | 2017-08-18 | 工程吸气公司 | Getter pumping system |
| CN107076133B (en) * | 2014-06-26 | 2019-06-18 | 工程吸气公司 | Getter pumping system |
| CN115185169A (en) * | 2022-09-07 | 2022-10-14 | 上海晶维材料科技有限公司 | Adsorption pump with anti-pulverization capability for space hydrogen atomic clock |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20090610 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |