CN106989390B - A kind of Bunsen burner formula low temperature plasma assisted combustion device - Google Patents
A kind of Bunsen burner formula low temperature plasma assisted combustion device Download PDFInfo
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- CN106989390B CN106989390B CN201710225278.2A CN201710225278A CN106989390B CN 106989390 B CN106989390 B CN 106989390B CN 201710225278 A CN201710225278 A CN 201710225278A CN 106989390 B CN106989390 B CN 106989390B
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- mounting flange
- glass tube
- quartz glass
- low temperature
- temperature plasma
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/02—Premix gas burners, i.e. in which gaseous fuel is mixed with combustion air upstream of the combustion zone
- F23D14/04—Premix gas burners, i.e. in which gaseous fuel is mixed with combustion air upstream of the combustion zone induction type, e.g. Bunsen burner
- F23D14/08—Premix gas burners, i.e. in which gaseous fuel is mixed with combustion air upstream of the combustion zone induction type, e.g. Bunsen burner with axial outlets at the burner head
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
Abstract
A kind of Bunsen burner formula low temperature plasma assisted combustion device, including pedestal, gas buffer unit and plasma reaction unit；Gas buffer unit includes mounting flange, hold-down bars etc.；Plasma reaction unit includes external electrode, interior electrode and quartz glass tube；The bottom of mounting flange is fixed at bottom plate center, the center offers the gas collection chamber and stepped hole being connected from bottom to top, the air inlet being connected with gas collection chamber is offered on the side wall of mounting flange, the bottom of quartz glass tube is fixed at stepped hole, top is extend out to outside mounting flange, the bottom of hold-down bars is fixed at bottom plate center, flanged cap is sleeved on quartz glass tube, and it is connected at the top of mounting flange, the bottom of interior electrode is fixed on the top of hold-down bars, and external electrode is sleeved on the quartz glass tube opposite with interior electrode.The removable replacement of the present invention, easy to use and later maintenance.The low temperature plasma that electric discharge generates is rich in various active particles, has apparent reinforcing effect to burning.
Description
Technical field:
The invention belongs to low temperature plasma application technical field, a kind of particularly Bunsen burner formula low temperature plasma
Assisted combustion device.
Background technique:
In recent years, with the development of lower temperature plasma technology, the combustion supporting technology based on low temperature plasma causes state
The concern of inside and outside scholar.Cold state plasma has a large amount of active particle, is reducing firing delay, is improving in efficiency of combustion
It plays an important role, low temperature plasma combustion supporting technology also has become one of the hot issue of scholars' research.
However, people are still indefinite to the understanding of the combustion-supporting mechanism of low temperature plasma at present, thermal nonequilibrium state plasma
Influence to combustion characteristics is an extremely complex physical and chemical processes, is related to electricity, chemical kinetics, thermodynamics and fluid
Multiple ambits such as mechanics lead to there is no the technology that plasma carries out control accurate to burning that effectively utilizes at present.State
It mainly include design, the combustion-supporting efficiency of Plasma Assisted Combustion device for the research of nonthermal plasma auxiliary combustion on border
And mechanism study etc..
According to different application and Research Requirements, researcher devises different low temperature plasma assisted combustion devices,
Chintala such as India et al. uses plating media barrier discharge electrode structure, produces radio frequency plasma.Russia
Scholar A.Yu.Starikovskii et al. devises dielectric barrier discharge generating device at nozzle, utilizes nanosecond pulse discharge
Plasma improves flame transmission speed.The emphasis of Plasma Assisted Combustion device design at present is also that bottleneck is: (1) power supply
With the matching of the electrode structure of efficient, stable plasma.The plasma area very little that general device generates, energy are higher
Plasma often face the excessively high problem of temperature, therefore, easily occur arc discharge under hyperbaric environment, and the dress of forefront
Microwave source or the nanosecond pulse source for setting needs are again expensive；(2) matching of plasma reactor and burner structure.It is convenient for
The center electrode structure that the plate electrode structures of diagnosis are difficult to use as burner, and be widely used be faced with central electrode without
Method is fixed well, the drawbacks such as complex manufacturing technology.
Summary of the invention:
The purpose of the present invention is to provide a kind of Bunsen burner formula low temperature plasma assisted combustion devices, can produce laminar flow
Premixed flame and diffusion flame, and by high efficiency, the action of plasma of low temperature in burning, hence it is evident that the burning for improving fuel is special
Property.
In order to achieve the above objectives, the present invention is to be achieved through the following technical solutions:
A kind of Bunsen burner formula low temperature plasma assisted combustion device, including pedestal, gas buffer unit and plasma
Reaction member；Wherein,
Pedestal includes bottom plate and the earth terminal that is arranged on bottom plate；
Gas buffer unit includes mounting flange, flanged cap and hold-down bars；
Plasma reaction unit includes external electrode, interior electrode and quartz glass tube；
The bottom of mounting flange is fixed at bottom plate center, and the center offers the gas collection chamber being connected from bottom to top
And stepped hole, the air inlet being connected with gas collection chamber is offered on the side wall of mounting flange, and the bottom of quartz glass tube is fixed
At stepped hole, top is extend out to outside mounting flange, and the bottom of hold-down bars is fixed at bottom plate center, and top is no more than fixation
Blue gas collection chamber, flanged cap are sleeved on quartz glass tube, and are connected at the top of mounting flange, and the bottom of interior electrode is fixed on
The top of hold-down bars, top are no more than at the top of quartz glass tube, and external electrode is sleeved on the quartz glass tube opposite with interior electrode.
A further improvement of the present invention lies in that mounting flange include be threaded togather and from bottom to top it is first fixed
Flange and the second mounting flange, and the gas collection chamber and stepped hole being connected are offered at the center of the first mounting flange.
A further improvement of the present invention lies in that interior electrode uses columnar electrode made of stainless steel, and interior electrode discharge portion
Separately it is equipped with the fine thread of 50mm long.
A further improvement of the present invention lies in that being further sleeved with multiple concentric blocks on interior electrode, and each block with one heart and quartz
The inner wall of glass tube is bonded.
A further improvement of the present invention lies in that concentric block is made of metal agglomeration filter core.
A further improvement of the present invention lies in that dispatch from foreign news agency extremely stainless (steel) wire, is wrapped on the outer wall of quartz glass tube,
Upper and lower ends pass through fixed aluminium block respectively and fix.
A further improvement of the present invention lies in that the height of stainless (steel) wire is 50mm, the outer diameter of quartz glass tube is 12mm, interior
Diameter is 8mm, and the diameter of interior electrode is 2mm, and discharge portion surface is tapped with 50mm fine thread, plasma in quartz glass tube
Reaction length is 50mm, and unilateral discharging gap is 3mm.
A further improvement of the present invention lies in that be connected with 8 tracheae of Φ soft for air inlet outer end, fuel gas or premixed gas by
This is passed through the gas collection chamber inside mounting flange, guarantees that being finally reached nozzle is laminar gas after being sufficiently mixed.
A further improvement of the present invention lies in that one end of high voltage power supply is connected on external electrode when work, another termination
Ground, earth terminal pass through resistance RmGround connection.
A further improvement of the present invention lies in that further including oscillograph, high-voltage probe, high voltage power supply and resistance Rm, wherein it is high
Pressure probe is connect with oscillograph, and high-voltage probe and earth terminal pass through resistance RmGround connection, one end of high-voltage probe and high pressure
One end of power supply is connected on external electrode, the other end of high-voltage probe and the other end ground connection of high voltage power supply, and high-voltage probe includes
Concatenated resistance R1With resistance R2And concatenated capacitor C1With capacitor C2, concatenated resistance R1With resistance R2With concatenated capacitor C1
With capacitor C2It is arranged in parallel.
Compared with prior art, the present invention has technical effect below:
Bunsen burner formula low temperature plasma assisted combustion device provided by the invention, core are by electrode in stainless steel, no
The discharge cell of rust steel mesh external electrode and quartz glass tube block media composition.Structure based on central electrode, in stainless (steel) wire
Upper installation is fixed and uniformly uses aluminium block, and sintering metal is configured inside quartz ampoule, ensure that interior electrode is located at center；Flange
The buffer distance and air collecting chamber laminar flow of internal gas abundance guarantee that reaching nozzle is uniformly mixed laminar gas, improves burning
Stability；Device materials are reliability and durability based on stainless steel, easy to carry, and consider that quartz ampoule may go out when experimental implementation
It is now crushed, filthy situation, the quartz ampoule and stainless steel electrode are all replaceable.
Bunsen burner formula low temperature plasma assisted combustion device provided by the invention, works at normal temperatures and pressures, does not need
Expensive vacuum equipment, plasma source select high-frequency ac source；Discharge cell can generate high efficiency, uniformly and be rich in
The low temperature plasma of active ingredient, the active particle of generation can participate in aflame chain reaction process, to promote to fire
It burns.
Further, the present invention is suitable for fuel gas or the premixed gas such as simple methane, correspond respectively to diffusion combustion and
Appropriate inert gas, such as argon gas, helium gas can also be added in premixed combustion, increase the type of plasma active particle,
And then generate new reaction path.
Further, low temperature that Bunsen burner formula low temperature plasma assisted combustion device provided by the invention electric discharge generates etc. from
Effect is remarkably reinforced to flame combustion in daughter, can improve flame propagation velocity and flame temperature.Especially in lean burn item
Under part, low temperature plasma effect can generate more oxygen-content active particles and promote burning, and combustion-supporting effect is more significant.
Further, it in order to solve the problems, such as that central electrode can not be fixed very well, is installed between interior electrode and quartz glass tube
There are two pieces of concentric blocks, concentric block is made of metal agglomeration filter core, plays the role of centering and anti-backfire.
Further, in order to generate intensive, uniform filament-like discharges, electrode in stainless steel discharge portion offers 50mm's long
Fine thread.
It further, is the plasma for obtaining high efficiency, low temperature, the height of stainless (steel) wire is 50mm, in stainless steel selvage
Edge is mounted with two fixed aluminium blocks, not only secures stainless (steel) wire, also functions to the effect of uniform electric field；Quartz glass pipe outside diameter is
12mm, internal diameter 8mm, electrode in stainless steel diameter are 2mm, and discharge portion surface is tapped with 50mm fine thread, intensive with generation,
Uniform filament-like discharges.
Further, using the structure of central electrode convenient for burning, in order to solve the problems, such as that central electrode can not be fixed very well,
Two pieces of concentric blocks are housed between electrode in stainless steel and quartz ampoule.Electrode in stainless steel can adjust downwards 0~10mm, quartz glass
Pipe nozzle can be adjusted at a distance from interior electrode between 30~40mm, not only guarantee that region of discharge is not interfere with each other with combustion zone, but also be guaranteed
Active particle in plasma can promote aflame chain reaction process.
Detailed description of the invention:
Fig. 1 a is the structural schematic diagram of Bunsen burner formula low temperature plasma assisted combustion device of the present invention；Fig. 1 b is Fig. 1 a's
Sectional view along A-A；Fig. 1 c is the top view of Fig. 1 a；Fig. 1 d is partial view at the B of Fig. 1 b.
Fig. 2 is the wiring diagram of Bunsen burner formula low temperature plasma assisted combustion device of the present invention.
In figure: 1- bottom plate, 2- earth terminal, 3- mounting flange, the first mounting flange of 301-, the second fixation of 302-
Orchid, 4- flanged cap, 5- hold-down bars, 6- quartz glass tube, 7- air inlet, electrode in 8-, the concentric block of 9-, the fixed aluminium block of 10-, 11-
Oscillograph, 12- high-voltage probe, 13- high voltage power supply.
Specific embodiment:
Below with reference to specific embodiment, the present invention is described in further detail, function to better understand the invention
Energy, feature.
Such as Fig. 1 a to Fig. 1 d, a kind of Bunsen burner formula low temperature plasma assisted combustion device provided by the invention, including bottom
Seat, gas buffer unit and plasma reaction unit；Wherein, pedestal includes that bottom plate 1 and the ground wire being arranged on bottom plate connect
Terminal 2；Gas buffer unit includes mounting flange 3, flanged cap 4 and hold-down bars 5；Plasma reaction unit include external electrode,
Interior electrode 8 and quartz glass tube 6；The bottom of mounting flange 3 is fixed at 1 center of bottom plate, and the center offers from bottom to top
The gas collection chamber and stepped hole being connected offer the air inlet 7 being connected with gas collection chamber, stone on the side wall of mounting flange 3
The bottom of English glass tube 6 is fixed at stepped hole, and top is extend out to outside mounting flange 3, and the bottom of hold-down bars 5 is fixed on bottom plate 1
At center, top is no more than the gas collection chamber of mounting flange 3, and flanged cap 4 is sleeved on quartz glass tube 6, and is connected to fixation
3 top of flange, the bottom of interior electrode 8 are fixed on the top of hold-down bars 5, and top is no more than 6 top of quartz glass tube, external electrode set
On the quartz glass tube 6 opposite with interior electrode 8.Quartz glass tube 6 is used as insulation barrier medium.
Wherein, mounting flange 3 includes being threaded togather and the first mounting flange 301 from bottom to top and second fixed
Flange 302, and the gas collection chamber and stepped hole being connected are offered at the center of the first mounting flange 301.Interior electrode 8 is not using
Become rusty columnar electrode made of steel.
In order to guarantee the air-tightness of device, the first mounting flange 301 and 302 joining place of the second mounting flange and second solid
Determine flange 302 and 4 joining place of flanged cap is provided with sealing ring.
In order to solve the problems, such as that central electrode can not be fixed very well, two pieces are equipped between interior electrode 8 and quartz glass tube 6
Concentric block 9, concentric block 9 are made of metal agglomeration filter core, play the role of centering and anti-backfire, to guarantee interior electrode 8 in stone
6 center of English glass tube.In order to generate intensive, uniform filament-like discharges, electrode in stainless steel discharge portion offers 50mm's long
Fine thread.Interior electrode 8 is connected with the hold-down bars 5 in gas buffer unit with screw thread, and interior electrode 8 can adjust downwards 0~10mm,
It needs to take down quartz glass tube 6 before adjusting, wherein the diameter of hold-down bars 5 is 5mm.Quartz glass tube 6 is higher by 30 than interior electrode 8~
40mm。
Preferably, dispatch from foreign news agency extremely stainless (steel) wire is wrapped on the outer wall of quartz glass tube 6, and upper and lower ends are led to respectively
It is fixed to cross fixed aluminium block 10.Wherein, the height of stainless (steel) wire is 50mm, and the outer diameter of quartz glass tube 6 is 12mm, internal diameter 8mm,
The diameter of interior electrode 8 is 2mm, and discharge portion surface is tapped with 50mm fine thread, and the reaction of plasma is long in quartz glass tube 6
Degree is 50mm, and unilateral discharging gap is 3mm.
Preferably, 7 outer end of air inlet is connected with that 8 tracheae of Φ is soft, thus fuel gas or premixed gas are passed through mounting flange 3
Internal gas collection chamber guarantees that being finally reached nozzle is laminar gas after being sufficiently mixed.
In addition, the invention also includes oscillograph 11, high-voltage probe 12, high voltage power supply 13 and resistance Rm, wherein high-voltage probe
12 connect with oscillograph, and high-voltage probe 12 and earth terminal 2 pass through resistance RmGround connection, one end of high-voltage probe 12 and high pressure
One end of power supply 13 is connected on external electrode, and the other end of high-voltage probe 12 and the other end ground connection of high voltage power supply 13, high pressure are visited
First 12 include concatenated resistance R1With resistance R2And concatenated capacitor C1With capacitor C2, concatenated resistance R1With resistance R2With connect
Capacitor C1With capacitor C2It is arranged in parallel.
Reactor material of the present invention is detachable between each component based on stainless steel, convenient for safeguarding and replacement.Experimental implementation
When the part in addition to pedestal can be removed, first adjusting electrode in stainless steel 8, the two is linked with screw thread, can be adjusted downwards
10mm.In determining after 8 height of electrode, the first mounting flange 301, the second mounting flange 302 are successively installed, then place quartzy glass
After glass pipe 6, then mounting flange cap 4 is fixed.At this point, the nozzle of electrode in stainless steel and quartz glass tube 6 distance is 30~40mm,
Guarantee that high temperature will not destroy the stability of electric discharge when burning, and the active particle in plasma is unlikely to quench, Neng Goucan
With burn and promote chain reaction rate.
The circuit connection diagram of Bunsen burner formula low temperature plasma assisted combustion device provided by the invention as shown in Fig. 2, into
Port is flexible coupling with 8 tracheae of Φ, thus the fuel gas such as pure methane or premixed gas are passed through the air collecting chamber inside mounting flange 3
Room guarantees that being finally reached nozzle is laminar gas after being sufficiently mixed.Power supply is the high voltagehigh frequency for generating low temperature plasma
AC power source, it is 50mm that plasma, which results from length, and unilateral discharging gap is the circular cylindrical region of 3mm.When electric discharge, not
Two fixed aluminium blocks at rust steel mesh edge are equivalent to two grading rings, have the function of uniform electric field；Electrode in stainless steel electric discharge
Part of the surface is tapped with 50mm fine thread, to generate intensive, uniform filament-like discharges.The present invention and concatenated high-voltage probe 12 and
Ground resistance RmParallel connection, 12 lead-out wire of high-voltage probe, which connects oscillograph 11, can be obtained discharge voltage current waveform.
Filiform channel gradually generates when electric discharge starts, and with the raising of voltage, plasma is evenly distributed on entire annular
Cylindrical region；Gas flow rate is improved, stable Glow-like discharge is advantageously formed.It according to actual needs, can be by adjusting air-flow
Speed, the active particle composition in regulating power source voltage size and frequency different adjustment plasma, obtain electric discharge it is uniform and stable,
Efficient low temperature plasma.
Bunsen burner formula low temperature plasma assisted combustion device provided by the invention mainly uses stainless steel material, with can
The design concept of dismounting, easy to use and later maintenance.Working environment is normal temperature and pressure, does not need expensive vacuum and sets
It is standby, it is suitable for fuel gas or the premixed gas such as simple methane, corresponds respectively to diffusion combustion and premixed combustion.What electric discharge generated
Effect is remarkably reinforced to burning in low temperature plasma, can improve flame propagation velocity and flame temperature.Especially in thin combustion
Under the conditions of burning, low temperature plasma effect can generate more oxygen-content active particles and promote burning, and combustion-supporting effect is more significant.
The above, case study on implementation only of the invention, but protection of the invention is not limited solely to this, and it is any to be familiar with sheet
Those skilled in the art within the technical scope of the present disclosure, in particular by the dielectric barrier discharge knot of central electrode
Structure, according to the technique and scheme of the present invention and inventive concept is transplanted or is changed, and should all cover in protection scope of the present invention
It is interior.
Claims (8)
1. a kind of Bunsen burner formula low temperature plasma assisted combustion device, which is characterized in that including pedestal, gas buffer unit and
Plasma reaction unit；Wherein,
Pedestal includes bottom plate (1) and the earth terminal (2) being arranged on bottom plate；
Gas buffer unit includes mounting flange (3), flanged cap (4) and hold-down bars (5)；
Plasma reaction unit includes external electrode, interior electrode (8) and quartz glass tube (6)；
The bottom of mounting flange (3) is fixed at bottom plate (1) center, and the center offers the air collecting chamber being connected from bottom to top
Room and stepped hole offer the air inlet (7) being connected with gas collection chamber, quartz glass tube (6) on the side wall of mounting flange (3)
Bottom be fixed at stepped hole, top extend out to mounting flange (3) outside, and the bottom of hold-down bars (5) is fixed on bottom plate (1) center
Place, top are no more than the gas collection chamber of mounting flange (3), and flanged cap (4) is sleeved on quartz glass tube (6), and are connected to solid
Determine at the top of flange (3), the bottom of interior electrode (8) is fixed on the top of hold-down bars (5), and top is pushed up no more than quartz glass tube (6)
Portion, external electrode are sleeved on the quartz glass tube (6) opposite with interior electrode (8)；
Mounting flange (3) includes being threaded togather and the first mounting flange (301) and the second mounting flange from bottom to top
(302), the gas collection chamber and stepped hole being connected and are offered at the center of the first mounting flange (301)；
Air inlet (7) outer end is connected with that 8 tracheae of Φ is soft, and thus fuel gas or premixed gas are passed through mounting flange (3) internal
Gas collection chamber guarantees that being finally reached nozzle is laminar gas after being sufficiently mixed.
2. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 1, which is characterized in that interior electricity
Pole (8) is using columnar electrode made of stainless steel, and interior electrode (8) discharge portion offers the fine thread of 50mm long.
3. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 1 or 2, which is characterized in that
Multiple concentric blocks (9) are further sleeved on interior electrode (8), and each block (9) with one heart is bonded with the inner wall of quartz glass tube (6).
4. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 3, which is characterized in that with one heart
Block (9) is made of metal agglomeration filter core.
5. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 1, which is characterized in that dispatch from foreign news agency
Extremely stainless (steel) wire is wrapped on the outer wall of quartz glass tube (6), and it is solid that upper and lower ends pass through fixed aluminium block (10) respectively
It is fixed.
6. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 5, which is characterized in that stainless
The height of steel mesh is 50mm, and the outer diameter of quartz glass tube (6) is 12mm, and the diameter of internal diameter 8mm, interior electrode (8) are 2mm, are put
Electric part of the surface is tapped with 50mm fine thread, and the reaction length of quartz glass tube (6) interior plasma is 50mm, between unilateral electric discharge
Gap is 3mm.
7. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 1, which is characterized in that work
When, one end of high voltage power supply is connected on external electrode, and other end ground connection, earth terminal (2) passes through resistance RmGround connection.
8. a kind of Bunsen burner formula low temperature plasma assisted combustion device according to claim 7, which is characterized in that also wrap
Include oscillograph (11), high-voltage probe (12), high voltage power supply (13) and resistance Rm, wherein high-voltage probe (12) is connect with oscillograph,
And high-voltage probe (12) and earth terminal (2) pass through resistance RmGround connection, one end of high-voltage probe (12) and high voltage power supply (13)
One end be connected on external electrode, the other end ground connection of the other end of high-voltage probe (12) and high voltage power supply (13), high-voltage probe
It (12) include concatenated resistance R1With resistance R2And concatenated capacitor C1With capacitor C2, concatenated resistance R1With resistance R2With connect
Capacitor C1With capacitor C2It is arranged in parallel.
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| CN201710225278.2A CN106989390B (en) | 2017-04-07 | 2017-04-07 | A kind of Bunsen burner formula low temperature plasma assisted combustion device |
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| CN201710225278.2A CN106989390B (en) | 2017-04-07 | 2017-04-07 | A kind of Bunsen burner formula low temperature plasma assisted combustion device |
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| CN106989390B true CN106989390B (en) | 2019-05-24 |
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| CN108825378B (en) * | 2018-06-13 | 2019-12-20 | 中国人民解放军国防科技大学 | Underwater thermoelectric hybrid power system based on water vapor plasma |
| WO2020086139A2 (en) * | 2018-08-09 | 2020-04-30 | Thrivaltech, Llc | Intake plasma generator systems and methods |
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| CN101848595A (en) * | 2010-04-01 | 2010-09-29 | 西安交通大学 | Method and device for generating monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure |
| CN104661423A (en) * | 2015-02-09 | 2015-05-27 | 清华大学 | Large-atmosphere low-temperature plasma fluidic generator |
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| CN106488638A (en) * | 2015-08-27 | 2017-03-08 | 上海至纯洁净系统科技股份有限公司 | A kind of plasma apparatus |
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| JP3871055B2 (en) * | 2003-08-01 | 2007-01-24 | 株式会社ハイデン研究所 | Plasma generation method and plasma generation apparatus |
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| CN101848595A (en) * | 2010-04-01 | 2010-09-29 | 西安交通大学 | Method and device for generating monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure |
| CN104661423A (en) * | 2015-02-09 | 2015-05-27 | 清华大学 | Large-atmosphere low-temperature plasma fluidic generator |
| CN205017675U (en) * | 2015-03-06 | 2016-02-03 | 苏州大学 | Plasma jet device and subassembly |
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