CN100494878C - Multidimensional adjustable optical phase-shifting device - Google Patents
Multidimensional adjustable optical phase-shifting device Download PDFInfo
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- CN100494878C CN100494878C CNB2005100293785A CN200510029378A CN100494878C CN 100494878 C CN100494878 C CN 100494878C CN B2005100293785 A CNB2005100293785 A CN B2005100293785A CN 200510029378 A CN200510029378 A CN 200510029378A CN 100494878 C CN100494878 C CN 100494878C
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- 230000001105 regulatory effect Effects 0.000 claims description 23
- 230000010363 phase shift Effects 0.000 claims description 19
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 22
- 230000008859 change Effects 0.000 abstract description 9
- 230000033001 locomotion Effects 0.000 abstract description 5
- 230000004048 modification Effects 0.000 abstract 1
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- 238000005516 engineering process Methods 0.000 description 4
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
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Abstract
The invention relates to an optical phase-shifting device capable of realizing multi-dimensional adjustment by electromechanical control, which mainly comprises a base, a microscope base, a reference mirror arranged in the microscope base, a cantilever, a movable joint bearing, three same phase-shifting devices arranged on the base and the like. Each phase shifting device comprises a threaded area, a locking structure, piezoelectric ceramics and the like. The piezoelectric ceramic is fixed in the piezoelectric ceramic box, and one end of the piezoelectric ceramic is contacted with the V-shaped groove on the lens base through the steel ball. The piezoelectric ceramic box slides in the sliding groove of the transition block. The bolt polished rod area is provided with a locking structure which is fixed on the base. Two sides of each phase shifting device are provided with two extension springs which always keep a certain pretension force. The microscope base is hung on two bosses of the base through a left cantilever and a right cantilever, and a movable joint bearing is arranged in a lower end hole of the left cantilever and the right cantilever. The adjusting bolt is rotated during coarse adjustment, the piezoelectric ceramic is switched on during fine adjustment, and the phase shifting device pushes the lens base to rotate around the cantilever. The device has the characteristics of large adjusting range and high precision, can realize the front and back displacement change of the reference mirror, can realize the multi-degree-of-freedom adjustment of pitching, azimuth and the like, and can meet the use requirement of the large-caliber reference mirror. The whole device has compact structure and smooth movement, and can be used for adjusting a movable worktable with slight modification.
Description
Technical field
The present invention relates to optics position phase, is a kind of multidimensional adjustable optical image moving device, and particularly a kind of have a whole optical phase-shift device of multidimensional coarse regulation, accurate adjustment.
Background technology
Since the seventies in last century, the movable phase interfere technology has obtained significant progress, and is widely used in becoming the effective ways of high-accuracy optical metrology and measurement in the various modern interferometers with its good measuring accuracy.Phase shifting equipment is the critical piece in the phase-shifting interferometer, and by the change of its change in displacement realization Wave-front phase, wherein displacement adjustment error is one of principal element that influences interferometer corrugated recovery accuracy.Piezoelectric ceramics (electrostriction micromotion device) because its micrometric displacement precision height, highly sensitive, response is fast, easy advantage such as control and being widely used in the movable phase interfere device automatically.
At present, common way is as micro-displacement driver with piezoelectric ceramics, promote reference mirror and do linear moving, system controlled by computer photodetector and data collecting card are sampled and data storage to the interferogram light intensity of displacement simultaneously, utilize the General Principle of movable phase interfere at last, restore tested phase place.As Fig. 1 technology " electromechanical precompression optical phase-shift device " [patent No.: 200420025463] formerly, the connecting rod 05 that promotes on the clamping device 02 with the steel ball on the PZT element 01 (piezoelectric ceramics) 011 makes reference mirror 03 and clamping device 02 slide in the metallic cylinder 07 of column type body cavity 08, the other end of metallic cylinder 07 is fixed on the pedestal 09, PZT element 01 carries out precompressed by elastic thin-wall 06 and trip bolt 010, during 01 energising of PZT element, axial displacement changes, optics clamping device 02 slides in the accurate guide groove 04 of pedestal, thereby realizes the change of Wave-front phase.But the displacement that this technology realizes is limited, clamping device 02 slides to carry out one-dimensional linear in the groove of base 09 only simultaneously, can not carry out the more freedom adjustment, especially when the weight of reference mirror 03 is big, only depend on a piezoelectric ceramics 01 almost to be difficult to realize driving.The Mark type interferometer of and for example domestic widely used U.S. Zygo company utilizes two piezoelectric ceramics levels to promote reference mirror and realizes change in displacement.Equally, this instrument reference mirror displacement-adjustable is less, and degree of freedom is adjusted limited; In a single day if do not use burnt expanding system far away, but this instrument gaging hole footpath only is 4 inches (φ 102mm), and uses burnt expanding system far away, after the expansion of test aperture, measuring accuracy can reduce again.
So the major defect of above-mentioned prior art is that the removable amount of reference mirror is limited, carries out micrometric displacement only and accurately adjusts, the adjustable degree of freedom of reference mirror is single, and only at the lighter small-bore reference mirror design of weight.When the volume of reference mirror is big, usually need reference mirror partly and the interferometer assembly make the branch body structure.At this moment, the locus of multidimensional degree of freedom adjustment reference mirror just seems very important.Obviously, above-mentioned single adjustable degree of freedom design just can not be satisfied such request for utilization.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of multidimensional adjustable optical image moving device of Electromechanical Control is provided, this device should be adjusted the phase shifting equipment of the hyperspace position of heavy caliber reference mirror, especially can carry out coarse adjustment and accurate adjustment to the position of reference mirror as required, φ 500mm even higher can be brought up in the aperture of reference mirror.
The technical scheme that the present invention solves is:
A kind of multidimensional adjustable optical image moving device of Electromechanical Control, it is characterized in that comprising base and microscope base, between described base and microscope base, be provided with respect to base and be two cantilever designs that the identical phase shift regulating device of three structures of triangle distribution and left-right symmetric distribute, the reference mirror of in described microscope base, placing.
Described phase shift regulating device comprises bolt, bolt locking mechanism and piezoelectric ceramics, one end of this piezoelectric ceramics is fixed in the piezoelectric ceramics box by trip bolt, the steel ball of the other end places in the V-groove on the described microscope base, described piezoelectric ceramics box is placed on one and is fixed in the sliding tray of transition block of base, described bolt is by regulating wheel, polished rod district and threaded area one constitute, described threaded area one end is against an end of piezoelectric ceramics box, the polished rod district structure that is locked is fixed on the base, two extension springs split the both sides at described phase shifting equipment, the one end is fixed on the base, the other end is fixed on the microscope base, makes to form versatilely closely contact in the V-type groove of steel ball on microscope base on piezoelectric ceramics top.
Described cantilever design comprises left cantilever and right cantilever, microscope base is suspended on the left boss and right boss of base respectively by left cantilever and right cantilever, the two ends of left side cantilever and right cantilever all have the manhole perpendicular to described cantilever, the built-in straight pin of upper end manhole, the built-in turning joint bearing of lower end manhole, wear straight pin in this turning joint bearing, the straight pin of cantilever upper end is fixed in the round groove of left boss and right boss, and the straight pin of lower end is built in the perforate of microscope base.
Principle of work of the present invention is:
One of main body of the present invention is three phase shift regulating devices.Each phase shifting equipment is divided into three parts, piezoelectric ceramics district, threaded area and locking area.Piezoelectric ceramics is placed in the piezoelectric ceramics box, and an end is by being fixed on the piezoelectric ceramics box, and the other end is against in the V-type groove of microscope base, and whole piezoelectric ceramics box is placed in the sliding tray of base.Bolt is regulated in rotation, and threaded portion precession (going out) promotes the piezoelectric ceramics box and slides in sliding tray, and the steel ball of the piezoelectric ceramics other end promotes microscope base simultaneously, realizes the variation of microscope base displacement.After the bolt adjusting was finished, the polished rod district of locking mechanism clamping screw regulated bolt.Connect the control voltage of piezoelectric ceramics, its axis direction produces corresponding displacement, and when regulating bolt, the displacement of piezoelectric ceramics acts on the microscope base fully, promotes microscope base and realizes that micrometric displacement changes.Because piezoelectric ceramics is that ball contacts with microscope base,, microscope base changes so can carrying out multidimensional such as front and back, pitching, orientation around steel ball.In the both sides of each phase shift regulating device, all be placed with the spring of certain pretension, closely contact with microscope base to keep phase shifting equipment, improved the mechanical response speed of phase shifting equipment.
Two of main body of the present invention is cantilever designs.Microscope base and reference mirror by about two cantilever designs be suspended on the boss of base.The upper and lower side of cantilever all has circular port, wears straight pin in the upper end hole, is fixed on the boss, and cantilever can rotate around described straight pin; The built-in turning joint bearing of following stomidium is worn straight pin in the oscillating bearing, the straight pin two ends place microscope base on perforate in, straight pin can be realized multi-dimensional movement by the turning joint bearing.Three identical phase shift regulating devices are arranged on the base.When three phase shifting equipments promoted microscope base synchronously, microscope base rotated around straight pin by cantilever, and linear displacement changed before and after microscope base and reference mirror can be realized; When the asynchronous promotion microscope base of three phase shift regulating devices, microscope base and reference mirror can be realized multidimensional change in location such as pitching, orientation by the bulb of straight pin in the turning joint bearing of cantilever lower end and phase shifting equipment, have satisfied the difference of device and have used and regulate needs.
The present invention compares with prior art, and its significant major advantage is: not only can utilize piezoelectric ceramics to realize the micro-displacement adjustment, can also utilize adjusting screw(rod) to realize coarse regulation simultaneously, range of adjustment is big and precision is high.By the bulb and the turning joint bearing of phase shifting equipment, can realize the multiple degrees of freedom adjustment of reference mirror, satisfied the request for utilization of different occasions.Whole device for mechanical response speed is fast, motion smoothing.The phase shifting equipment of supported at three point is simple and compact for structure, can finish the adjusting of greater weight heavy caliber reference mirror.This device can also repack other multiple degrees of freedom device for precisely regulating into, as adjusting gear of optical bench etc.
Description of drawings
Fig. 1 is an electromechanical precompression optical phase-shift device synoptic diagram formerly
Fig. 2 is the optical phase-shift device structural representation of multidimensional adjustable optical image moving device of the present invention
Fig. 3 is the structural representation of multidimensional adjustable optical image moving device of the present invention
Embodiment
Below in conjunction with accompanying drawing structure of the present invention and principle of work are described further.
See also Fig. 2 and Fig. 3 earlier, Fig. 2 is the optical phase-shift device structural representation of multidimensional adjustable optical image moving device of the present invention, Fig. 3 is the structural representation of multidimensional adjustable optical image moving device of the present invention, as seen from the figure, multidimensional adjustable optical image moving device of the present invention, comprise base 10 and microscope base 4, between described base 10 and microscope base 4, be two cantilever designs that the identical phase shift regulating device 21,22,23 of three structures of triangle distribution and left-right symmetric distribute, the reference mirror 2 of placement described microscope base 4 in respect to base 10.
Described phase shift regulating device 21 comprises bolt 12, bolt locking mechanism 11 and piezoelectric ceramics 1 three parts, one end of this piezoelectric ceramics 1 is fixed in the piezoelectric ceramics box 6 by trip bolt 8, the steel ball 3 of the other end places in the V-groove on the described microscope base 4, described piezoelectric ceramics box 6 is placed on one and is fixed in the sliding tray of transition block 7 of base 10, described bolt 12 is by regulating wheel, polished rod district and threaded area one constitute, described threaded area one end is against an end of piezoelectric ceramics box 6, the polished rod district structure 11 that is locked is fixed on the base 10, two extension springs 9,5 split the both sides at described phase shifting equipment, the one end is fixed on the base 10, the other end is fixed on the microscope base 4, makes to form versatilely closely contact in the V-type groove of steel ball 3 on microscope base 4 on piezoelectric ceramics 1 top.
Described cantilever design comprises left cantilever 13 and right cantilever 14, microscope base 4 is suspended on the left boss 19 and right boss 20 of base 10 respectively by left cantilever 13 and right cantilever 14, the two ends of left side cantilever 13 and right cantilever 14 all have the manhole perpendicular to described cantilever, the built-in straight pin 15 of upper end manhole, 16, the built-in turning joint bearing 25 of lower end manhole, 18, this turning joint bearing 25, wear straight pin 24 in 18,17, the straight pin 15 of cantilever upper end, 16 are fixed in the round groove of left boss 19 and right boss 20 straight pin 24 of lower end, 17 are built in the perforate of microscope base 4.
Whole device both can utilize piezoelectric ceramics 1 to realize the micro-displacement adjustment, can utilize again to regulate bolt 12 and realize coarse regulation, and range of adjustment is big and precision is high (range of adjustment from tens millimeters to nanometer scale).By bulb 3 and turning joint bearing 18 and 25 of phase shifting equipment, can realize the multiple degrees of freedom adjustment of reference mirror 2, can satisfy different request for utilizations.The phase shifting equipment of supported at three point is simple and compact for structure, and mechanical response speed is fast, and motion smoothing can be finished the adjusting of greater weight heavy caliber reference mirror.This device can also repack other multiple degrees of freedom device for precisely regulating into, as adjusting gear of optical bench etc.
Claims (1)
1, a kind of multidimensional adjustable optical image moving device of Electromechanical Control, it is characterized in that comprising base (10) and microscope base (4), between described base (10) and microscope base (4), be equipped with respect to base (10) and be two cantilever designs that the identical phase shift regulating device (21,22,23) of three structures of triangle distribution and left-right symmetric distribute, placement reference mirror (2) described microscope base (4) in;
Described phase shift regulating device (21) comprises bolt (12), bolt locking mechanism (11) and piezoelectric ceramics (1), one end of this piezoelectric ceramics (1) is fixed in the piezoelectric ceramics box (6) by trip bolt (8), the steel ball of the other end (3) places in the V-groove on the described microscope base (4), described piezoelectric ceramics box (6) is placed on one and is fixed in the sliding tray of transition block (7) of base (10), described bolt (12) is by regulating wheel, polished rod district and threaded area one constitute, described threaded area one end is against an end of piezoelectric ceramics box (6), the polished rod district is fixed on the base (10) by bolt locking mechanism (11), two extension springs (9,5) split both sides at described phase shifting equipment, one end of these two extension springs is fixed on the base (10), the other end is fixed on the microscope base (4), makes to form versatilely closely contact in the V-type groove of steel ball (3) on microscope base (4) on piezoelectric ceramics (1) top;
Described cantilever design comprises left cantilever (13) and right cantilever (14), microscope base (4) is suspended on the left boss (19) and right boss (20) of base (10) respectively by left cantilever (13) and right cantilever (14), the two ends of left side cantilever (13) and right cantilever (14) all have the manhole perpendicular to described cantilever, the built-in straight pin (15 of upper end manhole, 16), the built-in turning joint bearing (25 of lower end manhole, 18), this turning joint bearing (25,18) wear straight pin (24 in, 17), the straight pin (15 of cantilever upper end, 16) be fixed in the round groove of left boss (19) and right boss (20) straight pin (24 of lower end, 17) be built in the perforate of microscope base (4).
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100293785A CN100494878C (en) | 2005-09-02 | 2005-09-02 | Multidimensional adjustable optical phase-shifting device |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100293785A CN100494878C (en) | 2005-09-02 | 2005-09-02 | Multidimensional adjustable optical phase-shifting device |
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| CN1737492A CN1737492A (en) | 2006-02-22 |
| CN100494878C true CN100494878C (en) | 2009-06-03 |
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Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100371772C (en) * | 2006-04-25 | 2008-02-27 | 中国科学院国家天文台南京天文光学技术研究所 | Three-dimensional adjusting mechanism |
| CN100424464C (en) * | 2006-09-12 | 2008-10-08 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Flexible optical phase-shifting device |
| CN101436436B (en) * | 2007-11-16 | 2011-05-25 | 同济大学 | Accurate one-dimensional rotary and two-dimensional tilting table |
| CN101387731B (en) * | 2008-10-22 | 2024-03-15 | 中国科学院长春光学精密机械与物理研究所 | Mirror inclination fine tuning mechanism |
| CN101859009B (en) * | 2010-05-28 | 2011-07-20 | 北京工业大学 | Optical tool regulator for excimer laser micromachining system |
| WO2012064656A1 (en) * | 2010-11-11 | 2012-05-18 | Thermo Electron Scientific Instruments Llc | Flexure mounted moving mirror to reduce vibration noise |
| US8947670B2 (en) | 2010-11-11 | 2015-02-03 | Thermo Electron Scientific Instruments Inc. | Flexure mounted moving mirror to reduce vibration noise |
| CN102751903B (en) * | 2012-07-16 | 2015-04-29 | 南京理工大学 | Phase shifter with high-elongation rigid straight springs |
| CN105093521B (en) * | 2015-09-07 | 2017-05-24 | 同济大学 | Crank-slider-driven swing mirror mechanism |
| CN105467581B (en) * | 2015-12-22 | 2017-07-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical phase-shift device of Piezoelectric Driving |
| CN107991253A (en) * | 2017-11-28 | 2018-05-04 | 北京凯尔科技发展有限公司 | A kind of gas-detecting device |
| CN110308551B (en) * | 2019-08-02 | 2021-03-02 | 南京邮电大学 | Electrically controlled liquid optical phase modulator |
| CN110926763B (en) * | 2019-12-09 | 2021-04-02 | 中国科学院长春光学精密机械与物理研究所 | High-precision positioning system and method for large-aperture reflector |
| CN113048875B (en) * | 2021-03-11 | 2022-06-24 | 西安电子科技大学 | Optical phase-shifting device |
| CN113189737B (en) * | 2021-04-27 | 2022-12-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
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|---|---|---|---|---|
| DE3540596A1 (en) * | 1984-12-27 | 1986-07-10 | Jenoptik Jena Gmbh, Ddr 6900 Jena | Coordinate measuring instrument having defined height adjustment of a scanning or measuring unit |
| US5477371A (en) * | 1993-12-13 | 1995-12-19 | Shafir Production Systems Ltd. | Three-dimensional, non-contact scanning apparatus and method |
| CN2679643Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | Electromechanical preperssuring optical phaser |
| CN2828741Y (en) * | 2005-09-02 | 2006-10-18 | 中国科学院上海光学精密机械研究所 | Multidimensional adjustable optical phase-shifting device |
-
2005
- 2005-09-02 CN CNB2005100293785A patent/CN100494878C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3540596A1 (en) * | 1984-12-27 | 1986-07-10 | Jenoptik Jena Gmbh, Ddr 6900 Jena | Coordinate measuring instrument having defined height adjustment of a scanning or measuring unit |
| US5477371A (en) * | 1993-12-13 | 1995-12-19 | Shafir Production Systems Ltd. | Three-dimensional, non-contact scanning apparatus and method |
| CN2679643Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | Electromechanical preperssuring optical phaser |
| CN2828741Y (en) * | 2005-09-02 | 2006-10-18 | 中国科学院上海光学精密机械研究所 | Multidimensional adjustable optical phase-shifting device |
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