CN100466880C - Electrode substrate of two-dimensional display - Google Patents
Electrode substrate of two-dimensional display Download PDFInfo
- Publication number
- CN100466880C CN100466880C CNB2005100965496A CN200510096549A CN100466880C CN 100466880 C CN100466880 C CN 100466880C CN B2005100965496 A CNB2005100965496 A CN B2005100965496A CN 200510096549 A CN200510096549 A CN 200510096549A CN 100466880 C CN100466880 C CN 100466880C
- Authority
- CN
- China
- Prior art keywords
- flat
- electrode
- panel screens
- layer
- base board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The invention relates to an electrode base plate of plate display, which comprises a base plate, an electrode layer, a wire layer and a protective layer. Wherein, the electrode layer and the wire layer are on the base plate; the protective layer is above the electrode layer and/or wire layer; the protective layer at least comprises copper (Cu), nickel (Ni), and zinc (Zn), while copper is 50-80mass%, nickel is 5-20mass%, and zinc is 15-30mass%, while the total mass percentage is 100%.
Description
Technical field
The invention relates to a kind of electrode base board of flat-panel screens; especially refer to a kind of electrode base board of using pack fong formation conduction pattern (lead, electrode or auxiliary electrode) and/or the protective layer on it in flat-panel screens; strengthen its non-oxidizability and adhesive force, to promote product yield and reliability.
Background technology
Flat-panel screens (LCD (Liquid Crystal Display for example, LCD), organic electro-luminescent display (Organic ElectroluminescentDisplay, OELD) etc.), therefore replace the focus that cathode-ray tube display becomes display gradually owing to have compact characteristic.
Organic electro-luminescent display is the technology that a kind of self luminous characteristic of utilizing organic functional material (organic functional materials) reaches display effect, (small molecule OELD is SM-OELD) with macromolecule organic electro-luminescent display (polymer OELD) two big classes can be divided into the micromolecule organic electro-luminescent display according to the molecular weight difference of organic functional material.
And various flat-panel screens (as LCD, OELD etc.) though composition structure or the technological means of its show image each is variant, but utilize in the various plane display device structure more tool conductive material (for example indium tin oxide (ITO) or aluminium zinc oxide (AZO)) on substrate as anode, cooperate the control structure of the negative electrode of low workfunction metal or alloy again as light emitting pixel.
Flat-panel screens is often used the material of chromium metal as lead, electrode or auxiliary electrode at present, but because the resistance height of chromium metal, and the power consumption height, be not the suitable material of lead or electrode.
Then often be accompanied by migration (migration) with aluminium or copper as the material of lead or auxiliary electrode, the problem of protrusion of surface (hillock) and corrosion is with the also non-suitable lead or the material of auxiliary electrode line.
Though existing have good electrical conductivity with silver or silver alloy as the lead of flat-panel screens or the material of electrode, yet because its non-oxidizability or adhesive force are not good, and not good to the resistance of atmosphere such as sulphur, ammonia, chlorine and oxygen, easily cause process rate on the low side.Therefore seek that non-oxidizability is good, the metal or alloy of strong adhesion is applied to the protective layer of flat-panel screens as lead or electrode, or lead and electrode itself, be to be important topic.
Therefore, the present invention urgently thinks a kind of " electrode base board of flat-panel screens " that can address the above problem, and several times research experiment is eventually to the invention of finishing this Jiahui common people.
Summary of the invention
One of the present invention purpose provides a kind of electrode base board of flat-panel screens; so that the protective layer of the good and high tack of non-oxidizability can be provided on lead, electrode or auxiliary electrode; avoid lead, electrode or auxiliary electrode in successive process, for example at oxygen plasma (O
2Plasma) cleaning or etch phase are damaged, to improve product yield and reliability.
A further object of the present invention provides a kind of electrode base board of flat-panel screens, it has, and non-oxidizability is good, resistance value is low, conductivity is good and the lead of high tack, electrode or auxiliary electrode, avoid lead, electrode or auxiliary electrode in successive process, for example be damaged, to improve product yield and reliability in oxygen plasma cleaning or etch phase.
For reaching above-mentioned purpose, the electrode base board of a kind of flat-panel screens of the present invention comprises a substrate, an electrode layer, a conductor layer and a protective layer, electrode layer and conductor layer are to be arranged on the substrate, protective layer is to be arranged on electrode layer and/or the conductor layer, and the material of protective layer comprises copper, nickel and zinc at least; Wherein copper content is 50 to 80 percentage by weights, and nickel content is 5 to 20 percentage by weights, and zinc content is 15 to 30 percentage by weights, and total weight percent is 100%.
The material of electrode layer and conductor layer be can be selected from respectively chromium, aluminium, copper, silver and alloy thereof at least one of them, or the material of electrode layer and conductor layer is the metal oxide that can comprise conduction, its be selected from indium tin oxide, aluminium zinc oxide, indium-zinc oxide and cadmium tin-oxide at least one of them.
For reaching above-mentioned purpose, the electrode base board of a kind of flat-panel screens of the present invention comprises a substrate, an electrode layer and a conductor layer, and electrode layer and conductor layer are to be arranged on the substrate, and the material of electrode layer and/or conductor layer comprises copper, nickel and zinc at least; Wherein copper content is 50 to 80 percentage by weights, and nickel content is 5 to 20 percentage by weights, and zinc content is 15 to 30 percentage by weights, and total weight percent is 100%.
The copper optimum content is 60 to 70 percentage by weights, and the nickel optimum content is 10 to 15 percentage by weights, and the zinc optimum content is 20 to 25 percentage by weights.
The material of the protective layer of the electrode base board of flat-panel screens of the present invention, electrode layer and/or conductor layer more can comprise noble metal and/or corrosion resistant metal; Noble metal be selected from platinum (Pt), gold (Au) and palladium (Pd) at least one of them, its content is 0.1 to 5.0 percentage by weight, optimum content is 0.5 to 1.0 percentage by weight; Corrosion resistant metal be selected from titanium, aluminium, cobalt, chromium and composition thereof at least one of them, its content is 0.01 to 1.0 percentage by weight, optimum content is 0.05 to 0.2 percentage by weight.
Electrode base board of the present invention is used the protective layer that pack fong forms the characteristics with the good and high tack of non-oxidizability; or have in order to formation that non-oxidizability is good, resistance value is low, conductivity is good and the lead of the characteristics of high tack, electrode or auxiliary electrode; be particularly useful for for example flat-panel screens of organic electro-luminescent display; can avoid being cleaned or the damage of etch phase, improve product yield and reliability.
Description of drawings
Fig. 1 is that the electrode base board of flat-panel screens of the present invention is used the schematic diagram that pack fong forms protective layer;
Fig. 2 is that the electrode base board of flat-panel screens of the present invention is used the schematic diagram that pack fong forms the conduction pattern.
[primary clustering symbol description]
10 substrates, 12 conduction patterns, 14 protective layers
20 substrates, 22 conduction patterns
Embodiment
The electrode base board of a kind of flat-panel screens of the present invention comprises a substrate, an electrode layer, a conductor layer and a protective layer; electrode layer and conductor layer are to be arranged on the substrate; protective layer is to be arranged on electrode layer and/or the conductor layer; and the material of protective layer comprises copper, nickel and zinc at least; wherein copper content is 50 to 80 percentage by weights; nickel content is 5 to 20 percentage by weights, and zinc content is 15 to 30 percentage by weights, and total weight percent is 100%.
The material of protective layer more can comprise noble metal and/or corrosion resistant metal, the noble metal preferably be selected from platinum, gold and palladium at least one of them, its preferable content is 0.1 to 5.0 percentage by weight, optimum content is 0.5 to 1.0 percentage by weight; Corrosion resistant metal preferably be selected from titanium, aluminium, cobalt, chromium and composition thereof at least one of them, its preferable content is 0.01 to 1.0 percentage by weight, optimum content is 0.05 to 0.2 percentage by weight.
For more understanding technology contents of the present invention, be described as follows especially exemplified by the electrode base board preferred embodiment of flat-panel screens:
Embodiment 1 pack fong sputter forms the protective layer of conduction pattern (electrode layer and conductor layer) in flat-panel screens
Consult Fig. 1, the pack fong target is inserted a sputtering chamber, and the substrate 10 of inserting a flat-panel screens is in sputtering chamber, be pre-formed lead pattern 12 on the substrate, feed the argon gas of flow 20sccm afterwards, with the dc electric power of 200W, sputtering chamber keeps under the 5mtorr vacuum degree sputter, and to form a thickness in 1.5 minutes on lead pattern 12 be 1300
Protective layer 14, protective layer 14 can obtain good non-oxidizability through oxygen plasma test, after the hot and humid experiment of 85 ℃/RH85%, carries out disbonded test (peeling test) with adhesive tape again, can obtain the checking of good tack.
Embodiment 2 pack fong sputters form conduction pattern (electrode layer and conductor layer) in flat-panel screens
Consult Fig. 2, the pack fong target is inserted a sputtering chamber, and the substrate 20 of inserting a flat-panel screens feeds the argon gas of flow 20sccm afterwards in sputtering chamber, with the dc electric power of 100W, sputtering chamber keeps under the 5mtorr vacuum degree sputter, and to form a thickness in 1 minute on substrate 20 be 1100
Lead pattern 22, lead pattern 22 can obtain good non-oxidizability through oxygen plasma test, after the hot and humid experiment of 85 ℃/RH85%, carries out disbonded test with adhesive tape again, can obtain the checking of good tack.
Electrode base board of the present invention is used the protective layer that pack fong forms the characteristics with the good and high tack of non-oxidizability; or have in order to formation that non-oxidizability is good, resistance value is low, conductivity is good and the lead of the characteristics of high tack, electrode or auxiliary electrode; be particularly useful for for example flat-panel screens of organic electro-luminescent display; can avoid being cleaned or the damage of etch phase, improve product yield and reliability.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (10)
1. the electrode base board of a flat-panel screens, it is characterized in that, comprise a substrate, an electrode layer, a conductor layer and a protective layer, electrode layer and conductor layer are to be arranged on the substrate, protective layer is to be arranged on electrode layer and/or the conductor layer, and the material of protective layer comprises copper, nickel and zinc at least;
Wherein copper content is 50 to 80 percentage by weights, and nickel content is 5 to 20 percentage by weights, and zinc content is 15 to 30 percentage by weights, and total weight percent is 100%.
2. the electrode base board of flat-panel screens as claimed in claim 1 is characterized in that, the material of described protective layer more comprises noble metal, its be selected from platinum, gold and palladium at least one of them.
3. the electrode base board of flat-panel screens as claimed in claim 2 is characterized in that, described bullion content is 0.1 to 5.0 percentage by weight.
4. the electrode base board of flat-panel screens as claimed in claim 1 is characterized in that, the material of described protective layer more comprises corrosion resistant metal, its be selected from titanium, aluminium, cobalt, chromium and composition thereof at least one of them.
5. the electrode base board of flat-panel screens as claimed in claim 4 is characterized in that, described corrosion resistant metal content is 0.01 to 1.0 percentage by weight.
6. the electrode base board of flat-panel screens as claimed in claim 1 is characterized in that, described flat-panel screens is to be organic electro-luminescent display.
7. the electrode base board of a flat-panel screens is characterized in that, comprises a substrate, an electrode layer and a conductor layer, and electrode layer and conductor layer are to be arranged on the substrate, and the material of electrode layer and/or conductor layer comprises copper, nickel and zinc at least;
Wherein copper content is 50 to 80 percentage by weights, and nickel content is 5 to 20 percentage by weights, and zinc content is 15 to 30 percentage by weights, and total weight percent is 100%.
8. the electrode base board of flat-panel screens as claimed in claim 7 is characterized in that, the material of described electrode layer and/or conductor layer more comprises noble metal, its be selected from platinum, gold and palladium at least one of them.
9. the electrode base board of flat-panel screens as claimed in claim 7 is characterized in that, the material of described electrode layer and/or conductor layer more comprises corrosion resistant metal, its be selected from titanium, aluminium, cobalt, chromium and composition thereof at least one of them.
10. the electrode base board of flat-panel screens as claimed in claim 7 is characterized in that, described flat-panel screens is to be organic electro-luminescent display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100965496A CN100466880C (en) | 2005-08-24 | 2005-08-24 | Electrode substrate of two-dimensional display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100965496A CN100466880C (en) | 2005-08-24 | 2005-08-24 | Electrode substrate of two-dimensional display |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1921729A CN1921729A (en) | 2007-02-28 |
| CN100466880C true CN100466880C (en) | 2009-03-04 |
Family
ID=37779240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100965496A Expired - Fee Related CN100466880C (en) | 2005-08-24 | 2005-08-24 | Electrode substrate of two-dimensional display |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100466880C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103135819A (en) * | 2011-11-29 | 2013-06-05 | 迎辉科技股份有限公司 | Conductive substrate with oxidation resistant metal layer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10186389A (en) * | 1996-12-24 | 1998-07-14 | Canon Inc | Wiring board, production of wiring board, and liquid crystal element using the wiring board |
| JP2003264193A (en) * | 2002-03-11 | 2003-09-19 | Sanyo Electric Co Ltd | Wiring structure, manufacturing method, and optical device |
| CN1591756A (en) * | 2003-09-01 | 2005-03-09 | 铼宝科技股份有限公司 | Electrode substrate for Z-D display |
| US20050093448A1 (en) * | 2003-10-31 | 2005-05-05 | Moon Cheol-Hee | Plasma display panel provided with an improved electrode |
-
2005
- 2005-08-24 CN CNB2005100965496A patent/CN100466880C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10186389A (en) * | 1996-12-24 | 1998-07-14 | Canon Inc | Wiring board, production of wiring board, and liquid crystal element using the wiring board |
| JP2003264193A (en) * | 2002-03-11 | 2003-09-19 | Sanyo Electric Co Ltd | Wiring structure, manufacturing method, and optical device |
| CN1591756A (en) * | 2003-09-01 | 2005-03-09 | 铼宝科技股份有限公司 | Electrode substrate for Z-D display |
| US20050093448A1 (en) * | 2003-10-31 | 2005-05-05 | Moon Cheol-Hee | Plasma display panel provided with an improved electrode |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1921729A (en) | 2007-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106676525B (en) | Silver etchant composition and display substrate using the same | |
| CN101546684B (en) | Anti-oxidation composite membrane electrode | |
| TWI537400B (en) | Cu alloy interconnection film for touch-panel sensor and method of manufacturing the interconnection film, touch-panel sensor, and sputtering target | |
| US7902670B2 (en) | Display panel structure and manufacture method thereof | |
| WO2008069214A1 (en) | Cu ALLOY WIRING FILM, FLAT PANEL DISPLAY TFT ELEMENT USING THE Cu ALLOY WIRING FILM, AND Cu ALLOY SPUTTERING TARGET FOR MANUFACTURING THE Cu ALLOY WIRING FILM | |
| CN103972246A (en) | Interconnection structure and display device including interconnection structure | |
| US20070228575A1 (en) | Wiring material and wiring board using the same | |
| JP6669566B2 (en) | Silver etchant composition and display substrate using the same | |
| JP4815194B2 (en) | Conductive thin film, alloy target material for protective layer thereof, and manufacturing method thereof | |
| CN106571173A (en) | High-temperature-resistant composite and transparent conductive film, preparation method thereof and application thereof | |
| CN100466880C (en) | Electrode substrate of two-dimensional display | |
| CN106252382B (en) | Display device and preparation method thereof | |
| CN105517335B (en) | A kind of touch screen wiring board | |
| KR101828085B1 (en) | NiCu ALLOY TARGET MATERIAL FOR Cu ELECTRODE PROTECTIVE FILM AND LAMINATED FILM | |
| JP2004095240A (en) | Transparent electrode | |
| CN205486019U (en) | Touch screen circuit board | |
| US20040057864A1 (en) | Alloy target used for producing flat panel displays | |
| CN101122008A (en) | Plasma sputtering target device and its manufacturing method | |
| CN110158088A (en) | Silverskin etchant, engraving method and metal pattern forming method with it | |
| CN1480554A (en) | Alloy target material for conduction film and its preparation method | |
| CN100451161C (en) | Conductive membrane or its protective layer used alloy target material and manufacture thereof | |
| US20130249571A1 (en) | Touch panel sensor | |
| CN108399030B (en) | Electrode structure and manufacturing method thereof | |
| CN111155092B (en) | Silver thin film etching solution composition, etching method and metal pattern forming method | |
| KR20180090081A (en) | Etching solution composition for silver-containing layer and manufacturing method for an array substrate for display device using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090304 Termination date: 20130824 |