CN100465650C - Probe card - Google Patents
Probe card Download PDFInfo
- Publication number
- CN100465650C CN100465650C CNB2005100045592A CN200510004559A CN100465650C CN 100465650 C CN100465650 C CN 100465650C CN B2005100045592 A CNB2005100045592 A CN B2005100045592A CN 200510004559 A CN200510004559 A CN 200510004559A CN 100465650 C CN100465650 C CN 100465650C
- Authority
- CN
- China
- Prior art keywords
- circuit board
- pilot hole
- probe
- distance piece
- jumper wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
Disclosed is a probe card which comprises: a circuit board, a spacer, at least one jumper board and a probe group; the circuit board is provided with a wiring exclusion area and a positioning hole, the spacer is installed on the positioning hole, each jumper board is provided with plural electrical connection points for being connected with circuit board, and each jumper board is joint between the hole wall of the positioning hole and the spacer, and the probe group is provided with plural probes which are placed on the spacer, one end of each probe is electronically connected with an object for testing, and the other end is electronically connected with one of the electrical connection pointes of the jumper board.
Description
Technical field
The present invention is relevant with probe, but particularly about the probe of a kind of elasticity adjustment wiring and connecting point position.
Background technology
Employed probe in semiconductor or the liquid crystal panel industry (Probe Card) structure includes a circuit board, a ring-type distance piece usually, and one has the pin group of some cantilevereds (CantileverType) probe; Circuit board has a distribution exclusion area, and a pilot hole that is positioned at distribution exclusion area central authorities, do not lay any lead or contact in the distribution exclusion area, and distance piece is engaged in the pilot hole, the pin group then fits in the bottom surface of distance piece, makes the connecting point position of the position of each probe corresponding to circuit board; Each probe outer end of pin group is to be welded in the corresponding circuit board contact in position, and then extend towards distance piece central authorities the inner, can in order to electrically connect a determinand (Device Under Test, DUT); Circuit board is to be installed in automatic checkout equipment (Automated Test Equipment, ATE), automatic checkout equipment can be sent test signal into determinand via circuit board and each probe, to carry out the attribute test of determinand, be convenient in manufacture process, detect in advance defective products, promote the product yield.
Yet, when the connecting point position of circuit board must change according to client's appointment, when can cooperate the test function of automatic checkout equipment, circuit board contact after the probe outer end can't corresponding be welded in the change position takes place in regular meeting, probe must be utilized again turn pin, connect pin, or use the mode of holocentric line wire jumper to be welded in circuit board, the test signal that could correctly allow automatic checkout equipment send is delivered to determinand via circuit board and probe; And the connected mode of above-mentioned probe and circuit board has not only increased the signal transmitting range, also can produce the interference of electric stray signal, cause the test signal distortion easily, can't increase test speed, and the shortcoming that can't carry out high-frequency test.
Summary of the invention
Therefore, fundamental purpose of the present invention is to be to provide a kind of probe, but its elasticity is adjusted wiring and connecting point position between each probe and the circuit board, to cooperate different automatic testing requirements, reduce when signal transmits being interfered, and manufacturing cost is lower.
Take off purpose for before reaching, a kind of probe of the present invention is characterized in that, includes:
One circuit board has a distribution exclusion area, and a pilot hole of being located at these circuit board central authorities;
One distance piece is located within this positioning holes on circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is engaged between the hole wall and this distance piece of this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin is mounted under this distance piece, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
Wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, and forms one between adjacent two these projections and is embedded the space, and this distance piece is connected to described projection, and respectively this jumper wire board is located at respectively then that respectively this is embedded within the space.
The quantity of described projection is four.
This pilot hole is rounded.
Wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board.
A kind of probe of the present invention is characterized in that, includes:
One circuit board has a pilot hole;
One distance piece is located within the pilot hole of this circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is engaged in this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin is mounted under this distance piece, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
Wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, and forms one between adjacent two these projections and is embedded the space, and this distance piece is connected to described projection, and respectively this jumper wire board is located at then that respectively this is embedded the space.
The quantity of wherein said projection is four.
Wherein this pilot hole is rounded.
Wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board.
A kind of probe of the present invention is characterized in that, includes:
One circuit board has a pilot hole;
One distance piece is located within the pilot hole of this circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is located in the hole wall and distance piece of this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin set of bond is in this distance piece bottom surface, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
Wherein this pilot hole is rounded.
Wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, and forms one between adjacent two these projections and is embedded the space, and this distance piece is connected to described projection, and respectively this jumper wire board is located at respectively then that respectively this is embedded within the space, and is arranged in this distance piece.
The quantity of wherein said projection is four.
Wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board.
Thus, the present invention can the elasticity adjustment respectively adopts wiring and the connecting point position between pin and the circuit board, and to cooperate different automatic testing requirements, reach to reduce when signal transmits and be interfered, and the lower purpose of manufacturing cost.
Description of drawings
Below, cooperate diagram to enumerate a preferred embodiment now, so that structure of the present invention and effect are elaborated, wherein used each illustrated brief description is as follows:
Fig. 1 is the schematic perspective view of a preferred embodiment of the present invention, wherein only shows the state of cross-section structure;
Fig. 2 is the perspective exploded view of a preferred embodiment of the present invention;
Fig. 3 is the three-dimensional combination figure of a preferred embodiment of the present invention; And
Fig. 4 is the cut-open view of a preferred embodiment of the present invention.
Embodiment
Seeing also Figure 1 and Figure 2, is the probe for a preferred embodiment of the present invention, includes a circuit board 10, a distance piece 20, four jumper wire boards 30, and a pin group 40; Wherein:
This circuit board 10 is rounded, central authorities have a distribution exclusion area 11,11 peripheries, distribution exclusion area have some leads 12 that distribute along the precalculated position, and some electrical communication are in the outer contact 13 and inner contact 19 of lead 12, do not lay any lead and contact in the distribution exclusion area 11, and distribution exclusion area 11 central authorities have a circular pilot hole 14, pilot hole 14 is to be formed by circuit board 10 reprocessing, all be of different sizes after each processing, the hole wall of pilot hole 14 has four and is the projection 15 that isogonism distributes, each projection 15 has a screw 16, form an arc between adjacent two projections 15 and be embedded space 17, the end face of circuit board 10 is provided with a metal reinforcement spare 18, stiffener 18 is to be fixed in projection 15 by four bolt (not shown), form stiffener 18 and be located at the end face of circuit board 10, and be covered in pilot hole 14 tops, in order to increase the flexural strength of circuit board 10.
This distance piece 20 is for the made circular plate body of metal material, and thickness is slightly less than the thickness of circuit board 10 approximately, and the center of distance piece 20 has a square perforation 22; Distance piece 20 is pilot holes 14 of being located at circuit board 10, and periphery is connected to each projection 15 of circuit board 10.
Respectively this jumper wire board 30 is curved, and shape is embedded space 17 corresponding to circuit board 10; Jumper wire board 30 has some conductive electric connection points 32; Each jumper wire board 30 is to be located at respectively respectively to be embedded in the space 17, the inside and outside perisporium of jumper wire board 30 utilizes the solid applying to be fixed in the periphery of the hole wall and the distance piece 20 of pilot hole 14 respectively, and each jumper wire board 30 and distance piece 20 are fixed in the pilot hole 14 of circuit board 10.
This pin group 40 has ceramic ring-type pedestal 42 and some probes 44, and probe 44 is to be glued at pedestal 42, and the outer end is positioned at the outside of pedestal 42, and is inner towards pedestal 42 inner extensions, and has one and be the needle tip 46 of vertical configuration towards pedestal 42 belows; The end face of pedestal 42 is the bottom surfaces that fit in distance piece 20, makes pin group 40 be positioned at the bottom surface central authorities of circuit board 10.
Via said structure, as Fig. 1, Fig. 3 and shown in Figure 4, part probe 44 outer ends of probe are to be directly welded in corresponding circuit board 10 inner contacts 19 in position, make the position corresponding to outer contact 13 electrical communication of described inner contact 19 in described probe 44; And the outer contact 13 of working as circuit board 10 must be provided with according to the specified position of client, and make outer contact 13 can't with the position of probe 44 mutually at once, probe 44 outer ends can be welded in the electric connection point 32 of jumper wire board 30 earlier, and then utilize a coaxial cable 50 1 ends to be welded in the electric connection point 32 of this jumper wire board 30, the other end then extends and is welded in circuit board 10 inner contacts 19 that change behind the position, probe 44 can be connected in the corresponding mutually circuit board 10 outer contacts 13 in position; The needle tip 46 of each probe 44 is in order to touch the contact of a determinand, and circuit board 10 is to be located at an ATE (automatic test equipment) (not shown), outer contact 13 electrical communication that make circuit board 10 are in this ATE (automatic test equipment), ATE (automatic test equipment) can send a signal to determinand via the outer contact 13 and the probe 44 of circuit board 10, and analyze the signal that determinand returned, to carry out the attribute test of determinand.
Thus, the present invention utilizes the set jumper wire board in distribution exclusion area of circuit board, increased the electric connection point that the probe welding can be provided, but make elasticity adjustment wiring and connecting point position between each probe and the circuit board, to cooperate various testing requirement, reach and reduce signal transmission distance, avoid signal to be interfered; And circuit board can also be made by public plate gauge lattice, reaches the purpose of saving production cost.
In addition, because aforementioned each jumper wire board is can be for the electric connection point of probe welding in order to increase, therefore being provided with between the pilot hole hole wall and distance piece that the position is not limited to circuit board of jumper wire board can change each jumper wire board is located at circuit board or distance piece separately, the purpose of same attainable cost invention; And the shape of aforementioned pilot hole and distance piece can also non-circularly replace.
Claims (15)
1. a probe is characterized in that, includes:
One circuit board has a distribution exclusion area, and a pilot hole of being located at these circuit board central authorities;
One distance piece is located within this positioning holes on circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is engaged between the hole wall and this distance piece of this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin is mounted under this distance piece, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
2. according to the described probe of claim 1, it is characterized in that wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, form one between adjacent two these projections and be embedded the space, this distance piece is connected to described projection, and respectively this jumper wire board is located at respectively then that respectively this is embedded within the space.
3. according to the described probe of claim 2, it is characterized in that the quantity of described projection is four.
4. according to the described probe of claim 1, it is characterized in that this pilot hole is rounded.
5. according to the described probe of claim 1, it is characterized in that wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board.
6. a probe is characterized in that, includes:
One circuit board has a pilot hole;
One distance piece is located within the pilot hole of this circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is engaged in this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin is mounted under this distance piece, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
7. according to the described probe of claim 6, it is characterized in that wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, form one between adjacent two these projections and be embedded the space, this distance piece is connected to described projection, and respectively this jumper wire board is located at then that respectively this is embedded the space.
8. according to the described probe of claim 7, it is characterized in that the quantity of wherein said projection is four.
9. according to the described probe of claim 6, it is characterized in that wherein this pilot hole is rounded.
10. according to the described probe of claim 6, it is characterized in that wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board.
11. a probe is characterized in that, includes:
One circuit board has a pilot hole;
One distance piece is located within the pilot hole of this circuit board;
At least one jumper wire board has some electric connection points; Respectively this jumper wire board is located in the hole wall and distance piece of this pilot hole; Respectively this electric connection point is in order to be electrically connected at this circuit board; And
One pin group has some probes; This pin set of bond is in this distance piece bottom surface, and respectively an end of this probe is in order to be electrically connected at a determinand, and the other end then can be electrically connected at wherein this electric connection point of this jumper wire board.
12., it is characterized in that wherein this pilot hole is rounded according to the described probe of claim 11.
13. according to the described probe of claim 11, it is characterized in that, wherein the hole wall of this pilot hole has some projections that isogonism distributes that are, form one between adjacent two these projections and be embedded the space, this distance piece is connected to described projection, respectively this jumper wire board is located at respectively then that respectively this is embedded within the space, and is arranged in this distance piece.
14., it is characterized in that the quantity of wherein said projection is four according to the described probe of claim 13.
15., it is characterized in that wherein also include a stiffener, this stiffener is located at a side of this circuit board, and covers in this pilot hole, in order to increase the flexural strength of this circuit board according to the described probe of claim 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100045592A CN100465650C (en) | 2005-01-18 | 2005-01-18 | Probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100045592A CN100465650C (en) | 2005-01-18 | 2005-01-18 | Probe card |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1808128A CN1808128A (en) | 2006-07-26 |
| CN100465650C true CN100465650C (en) | 2009-03-04 |
Family
ID=36840136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100045592A Expired - Fee Related CN100465650C (en) | 2005-01-18 | 2005-01-18 | Probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100465650C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101453825B (en) * | 2007-12-04 | 2011-06-15 | 旺矽科技股份有限公司 | Low loss multilayered circuit board |
| CN101452011B (en) * | 2007-12-06 | 2010-12-29 | 南亚科技股份有限公司 | Probe card and circuit board |
| CN101487853B (en) * | 2008-01-16 | 2011-11-09 | 旺矽科技股份有限公司 | High-speed test device |
| TWI498565B (en) * | 2013-12-11 | 2015-09-01 | Mpi Corp | Probe system, probe height adjusting method, and probe position sensing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5949244A (en) * | 1996-01-03 | 1999-09-07 | Miley; David M. | Low tolerance probe card and probe ring systems |
| JP2000065860A (en) * | 1998-08-20 | 2000-03-03 | Mitsubishi Materials Corp | Probe device and its assembling method |
| JP2003258044A (en) * | 2002-02-27 | 2003-09-12 | Seiko Epson Corp | Probe card, probe unit, method for testing probe and probe needle |
| JP2004125548A (en) * | 2002-10-01 | 2004-04-22 | Micronics Japan Co Ltd | Probe card |
| US6734691B2 (en) * | 2001-09-27 | 2004-05-11 | Oki Electric Industry Co., Ltd. | Substrate for a probe card having conductive layers for supplying power to IC devices |
-
2005
- 2005-01-18 CN CNB2005100045592A patent/CN100465650C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5949244A (en) * | 1996-01-03 | 1999-09-07 | Miley; David M. | Low tolerance probe card and probe ring systems |
| JP2000065860A (en) * | 1998-08-20 | 2000-03-03 | Mitsubishi Materials Corp | Probe device and its assembling method |
| US6734691B2 (en) * | 2001-09-27 | 2004-05-11 | Oki Electric Industry Co., Ltd. | Substrate for a probe card having conductive layers for supplying power to IC devices |
| JP2003258044A (en) * | 2002-02-27 | 2003-09-12 | Seiko Epson Corp | Probe card, probe unit, method for testing probe and probe needle |
| JP2004125548A (en) * | 2002-10-01 | 2004-04-22 | Micronics Japan Co Ltd | Probe card |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1808128A (en) | 2006-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101266262B (en) | High speed test card | |
| US7888957B2 (en) | Probing apparatus with impedance optimized interface | |
| US9429638B2 (en) | Method of replacing an existing contact of a wafer probing assembly | |
| CN103477237A (en) | Apparatus for the automated testing and validation of electronic components | |
| CN100465650C (en) | Probe card | |
| TW201504631A (en) | High frequency probe card for probing photoelectric device | |
| CN1449498A (en) | Test systems for wireless-communications devices | |
| CN102159959A (en) | Test adapter configuration | |
| CN102667499B (en) | Signal sensing device and circuit board | |
| CN104682145B (en) | Coaxial adaptor connector and L SMP socket test devices | |
| US20150185253A1 (en) | Probe module | |
| CN108732393B (en) | Probe module and probe card | |
| CN106841986A (en) | PCBA board test device and system | |
| CN101487874B (en) | High-speed test device | |
| CN205210459U (en) | LCD screen test fixture keysets | |
| CN102859371B (en) | Probe sheet for LCD panel inspection, a probe unit comprising the probe sheet, and a method of manufacturing the probe sheet for LCD panel inspection | |
| CN204536382U (en) | Modular probe card device | |
| CN103887618A (en) | High bandwidth differential lead with device connection | |
| KR20100057258A (en) | Micro coaxial cable type probe card | |
| CN101487853B (en) | High-speed test device | |
| CN108680797A (en) | A kind of antenna test method and antenna measurement equipment | |
| CN108680800A (en) | A kind of ESD test devices | |
| CN104714055B (en) | Detection jig | |
| US20100330830A1 (en) | Vertical probe intrface system | |
| TW201843461A (en) | Probe card system, probe loader device and manufacturing method of the probe loader device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090304 Termination date: 20100219 |