CN100465450C - Composite dry vacuum pump having roots rotor and screw rotor - Google Patents
Composite dry vacuum pump having roots rotor and screw rotor Download PDFInfo
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- CN100465450C CN100465450C CNB2005101082230A CN200510108223A CN100465450C CN 100465450 C CN100465450 C CN 100465450C CN B2005101082230 A CNB2005101082230 A CN B2005101082230A CN 200510108223 A CN200510108223 A CN 200510108223A CN 100465450 C CN100465450 C CN 100465450C
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Disclosed is a dry vacuum pump for evacuating a processing chamber in semiconductor or display manufacturing device, or for evacuating the gaseous substance and/or the byproducts generated in process chamber. The dry vacuum pump does not need a partition wall between a roots rotor and a screw rotor. In the dry vacuum pump, a space is formed on the connecting portion to roots rotor among through the under sides of the roots rotor and the screw rotor to stay the object substance thereon.
Description
Technical field
The present invention relates to a kind of processing house that is used for semiconductor-fabricating device and display manufacturing apparatus etc. and vacuumize or be used to discharge the gaseous matter that processing house produces and/or the composite dry vacuum pump of by-product.
Background technique
On the whole, composite dry vacuum pump has been used for the processing house of semiconductor-fabricating device and display manufacturing apparatus etc. is vacuumized or be used to discharge gaseous matter and/or the by-product that processing house produces.Roots rotor (roots rotor), helical rotor or its combination are used for above-mentioned dry vacuum pump.
At present, composite dry vacuum pump comprises at least one roots rotor with at least one blade and at least one helical rotor, so that keep the good degree of vacuum of processing house and reduce the power cost requirement.Roots rotor is used for sucking and compresses the by-product that is included in the gaseous matter that processing house produces, and helical rotor is used for gaseous matter and by-product that the roots rotor by the dry vacuum pump outside sucks are found time.These rotors are operated under sealing state to keep the processing house vacuum.
Usually, between roots rotor end and helical rotor end, dividing plate is set,, but smoothly moves to the helical rotor end from the roots rotor end so that by-product does not hinder the rotation of rotor.The exemplary embodiments of these structures is disclosed in and transfers Kashiyama industry Co., Ltd fully (Kashiyama Industry Co. is in the U.S. Patent No. 5,549,463 Ltd.) (after this with reference to Fig. 7).
According to this patent, as shown in Figure 7, dry vacuum pump comprises a pair of roots rotor 102,103 and a pair of helical rotor 105,106.A pair of roots rotor 102,103 and a pair of helical rotor 105,106 are by drive motor 104 rotations.More particularly, utilize three gears by the driving force that drive motor 104 produces, promptly driving gear 124, idle pulley 125 and driven gear 127 all are delivered to a pair of roots rotor 102,103 and a pair of helical rotor 105,106.Dividing plate is arranged between a pair of roots rotor 102,103 and a pair of helical rotor 105,106, so that be not directly delivered to a pair of helical rotor 105,106 from the by-product of processing house (not shown).In this traditional dry vacuum pump, the axle 114a, the 114b that are connected to from the side respectively in the middle of a pair of helical rotor 105,106 pass dividing plate 108, and axle pass part by a plurality of bearing 110a, 110b institutes that are used for smoothly rotating each 114a, 114b around.The relative part of each 114a, 114b also by a plurality of bearing 112a, 112b institutes that are used for same purpose around.This patent integral body is attached among the present invention.
Yet, in U.S. Patent No. 5,549, in 463 in the disclosed dry vacuum pump 100, when dividing plate 108 is formed between a pair of roots rotor 102,103 and a pair of helical rotor 105,106, the shell that comprises these elements is divided into several sections, and this causes energy and the cost of making dry vacuum pump 100 to increase.
In the dry vacuum pump that has used helical rotor, the spiral that has not had dividing plate although proposed to have variable pitch, also increase the volume of the by-product that can compress and extract out to reduce power consumption, but need can think and reduce efficient than using the bigger rotor of dividing plate and the shell of pump.
In addition, in above-mentioned U. S. Patent in the disclosed dry vacuum pump, be arranged on the inlet side that when operation, bears vacuum and ambient pressure repeatedly because support bearing 110a, the 110b of a pair of roots rotor 102,103 and a pair of helical rotor 105,106, so, because the grease of pressure official post lubricating bearings 110a, 110b leaks from bearing 110a, 110b, this will cause the fault of pump.And, in U.S. Patent No. 5,549, in 463 in the disclosed dry vacuum pump, because bearing 110a, 110b are arranged on inlet side, so, will increase owing to pressure difference, friction etc. makes the temperature on it, cause bearing 110a, the 110b lost of life.
Simultaneously, traditional dry vacuum pump comprises 4-5 roots rotor, is used for reducing the power consumption of operation, that is to say, is used for the by-product of more powerful ground compressed gaseous.The flow visualization of by-product is in Fig. 8 in the roots rotor.Although in Fig. 8, do not show the dividing plate between the roots rotor, it must be understood that in fact dividing plate is formed at therebetween.Yet because use the conventional dry vacuum pump of an above-mentioned 4-5 roots rotor must comprise rotor chamber, paired rotor, dividing plate etc., so it will increase the quantity and the assembly cost of element.In addition, because the by-product of suction gaseous state and the inner passage of its discharge is oversize and complicated also gathers by-product therein so cause the factor of gas leakage to increase.
Summary of the invention
Therefore, first purpose of the present invention is to provide a kind of improved dry vacuum pump, it can not use the dividing plate between roots rotor end and the helical rotor end, reduces power demand and is increased in produce in the processing house to be compressed and the volume of the by-product of finding time.
In addition, second purpose of the present invention is to provide a kind of improved dry vacuum pump, and it can utilize less roots rotor, reduces power demand and is increased in the volume that adds the to be compressed and by-product of finding time that produces in man-hour.
In order to reach first purpose, the dry vacuum pump according to first aspect present invention comprises:
(a) be formed with the suction port that is used to suck target substance in a side, and be formed with the barrel shrond of the relief opening that is used to discharge target substance at opposition side;
(b) roots rotor that comprises in the enclosure and be communicated with described suction port;
(c) comprise the helical rotor that also is provided with in the enclosure near roots rotor;
(d) middle part of passing between described roots rotor and the described helical rotor is fixed, and is rotatably fixed to the axle of shell with sealing state from the outside; And
(e) outside that is installed in shell makes it to be connected with described axle the drive motor of rotation to drive described roots rotor and described helical rotor,
Wherein, the space is formed in the part that is connected to by the described roots rotor among the downside of described roots rotor and described helical rotor, is used to keep target substance.
In order to reach second purpose of the present invention, the dry vacuum pump according to second aspect present invention comprises:
(a) be formed with the suction port that is used to suck target substance in a side, and be formed with the barrel shrond of the exhaust port that is used to discharge target substance at opposition side;
(b) comprise in the enclosure first roots rotor and second roots rotor, and at least one roots rotor in first roots rotor and second roots rotor is communicated with described suction port;
(c) comprise the helical rotor that also is provided with in the enclosure near at least one roots rotor in first roots rotor and second roots rotor;
(d) middle part of passing between described first and second roots rotors and the described helical rotor is fixed, and is rotatably fixed to the axle of shell with sealing state from the outside; And
(e) outside that is installed in shell makes it to be connected with described axle the drive motor of rotation to drive described first and second roots rotors and described helical rotor,
Wherein, downside at described first roots rotor is formed with first space that is used to keep target substance, and second space is formed on the part that is connected to by described second roots rotor among the downside of second roots rotor and described helical rotor, be used to keep target substance, and first space that is formed at the described first roots rotor downside is communicated with the upside of described second roots rotor by predetermined fluid passage.
Simultaneously, the term " target substance " that is used for this specification and claims can be understood as it and is included in gaseous substance and/or the by-product that produces in the processing house of semiconductor-fabricating device, display manufacturing apparatus etc.
In addition, term " first ", " second " in statement " first roots rotor ", " second roots rotor ", " first storagetank ", " second storagetank " can be understood as the order that illustrates that just target substance is arranged.Except other explanations, term " forward end " can be understood as in dry vacuum pump according to the present invention, and its expression is used to suck the suction oral-lateral of target substance, rather than is used to the discharge oral-lateral of the target substance of finding time to compress.Term " rear end side " can be understood as its expression and discharges oral-lateral, rather than sucks oral-lateral.
Description of drawings
Accompanying drawing help is understood the present invention and is incorporated and form the application's a part into, and embodiments of the present invention have been described, and is used from explanation principle of the present invention with specification one.In the accompanying drawings:
Fig. 1 is the schematic sectional view of demonstration according to the major component of the dry vacuum pump of first aspect present invention;
Fig. 2 is the partial view of the inner body in the dry vacuum pump in the displayed map 1;
Fig. 3 shows the view that is used for roots rotor operating principle of the present invention;
Fig. 4 is the view that shows according to the alternative embodiment in the dry vacuum pump of first aspect present invention, wherein on the both sides that are installed in the roots rotor on the suction port, and the coaxial roots rotor that is connected to of helical rotor;
Fig. 5 is the sectional view that shows according to the major component in the dry vacuum pump of second aspect present invention;
Fig. 6 is the sectional view that shows according to the dry vacuum pump of third aspect present invention;
Fig. 7 is the sectional view that shows the conventional dry vacuum pump; And
Fig. 8 is the view that shows the roots rotor operation that is used for the conventional dry vacuum pump, and the some of them roots rotor is included in the dry vacuum pump.
Embodiment
The mode of execution that below provides just is used to illustrate the present invention, rather than limits the scope of the invention.
Hereinafter, with reference to corresponding accompanying drawing preferred implementation of the present invention is elaborated.At this, when an element was connected on another element, an element not only can be directly connected on another element, and can receive another element in succession by another interelement.In addition, for the purpose of clear, omitted irrelevant element.In addition, same in the text label is represented same element.
Fig. 1 is the sectional view of demonstration according to the major component of the dry vacuum pump of first aspect present invention.
With reference to Fig. 1, be included in roots rotor 14, the drive motor 26 of forward end according to the dry vacuum pump 1 of first aspect present invention, preferably at the water-cooled drive motor and the helical rotor 18 between roots rotor 14 and drive motor 26 of rear end side.Helical rotor 18 is by means of the axle 24 coaxial roots rotors 14 that are connected to.In a kind of interchangeable mode of execution, helical rotor 18 can be by means of the axle 24 coaxial roots rotors 14 that are connected to.In another interchangeable mode of execution, roots rotor 14 and helical rotor 18 integral body are made or it are created the back respectively and are assembled together by welding.Except that above-mentioned, those of ordinary skills also can consider other interchangeable connecting means.
After the target substance in the rotation inspiration vacuum pump 1 that utilizes roots rotor 14 temporarily rests in the space 16 (after this being called " powder storagetank ") of a part of downside of the downside that is formed at roots rotor 14 and helical rotor 18, can utilize by roots rotor 14 applied pressures and guide helical rotor 18 into.Powder storagetank 16 shown in the figure is in occupation of most of space of roots rotor 14 downsides and a part of space of helical rotor 18 downsides.The powder storagetank 16 that is formed at roots rotor 14 downsides and helical rotor 18 downsides is communicated with, and therefore forms a space.This powder storagetank 16 can not need the dividing plate that always uses, be used for reducing the consumption of powder and increase target substance, particularly at the volume of traditional dry vacuum pump with the gaseous state compression and the target substance of discharging.In addition, powder storagetank 16 can keep external solid matter to rest in the space, can prevent that like this helical rotor 18 is damaged.
Be compressed from the target substance that described powder storagetank 16 enters helical rotor 18 by power, and discharge by the exhaust port 20 that is formed at vacuum pump 1 rear end side in the rotation of a direction with by the pressure of previous step transmission by helical rotor 18.
Pass the fixing described axle 24 of barrel shrond 10 by means of on the bearing 22a, the 22b that are provided with as shown in Figure 1, the front panel 28 and rear sidewall 30 that 22c is supported on vacuum pump respectively.The axle 24 on right side shown in the figure is connected to drive motor 26, is specially water-cooled machine 26, and rotates by the operation of motor.
In Fig. 2, illustrative the shell 10 in the dry vacuum pump 1 as shown in Figure 1.From then on can understand well among the figure, in dry vacuum pump according to first aspect present invention, powder storagetank 16 is formed at the downside of roots rotor 14 usually and is connected to a part of downside of the helical rotor 18 of roots rotor 14, and be used to allow the drive transmitting by roots rotor 14 temporarily rest on wherein to the target substance of roots rotor 14 downsides, and guide helical rotor 18 into, therefore, at this dividing plate that need in the conventional dry vacuum pump, not need.Though helical rotor 18 has been described in the drawings to be had same pitch, is used to increase the compression ratio of gaseous matter and/or by-product, but the helical rotor 18 with different pitches can be installed also, that is to say that wherein the length of pitch becomes shorter and shorter from the suction port to the exhaust port.
Fig. 3 shows the operating principle view of roots rotor according to the preferred embodiment of the present invention.
With reference to Fig. 3, the rotation by the roots rotor shown in the figure 14 is contained between blade 14a, 14b, the 14c according to the target substance in the dry vacuum pump 1 of first aspect present invention in inspiration, and is transported to predetermined open spaces or following processing space.In the present invention, target substance is transported to the powder storagetank 16 of a part of downside of the downside that is formed at roots rotor 14 usually and helical rotor 18, then, guides helical rotor 18 into by the powder storagetank 16 that is formed on the roots rotor 14.The operating principle of roots rotor itself is known for those of ordinary skills.
Fig. 4 is a kind of interchangeable embodiment who shows according to the dry vacuum pump of first aspect present invention.
In this interchangeable embodiment according to the dry vacuum pump of first aspect present invention, though and aforementioned according to the preferred embodiment of the present invention dry vacuum pump something in common is the space between the target substance of gaseous state and/or the blade that by-product is contained in roots rotor 14, and be transported to the powder storagetank 16 that is formed at roots rotor 14 downsides ', but its difference is helical rotor and is installed on the both sides of roots rotor 14, and described powder storagetank 16 ' be communicated with the part of helical rotor 18, therefore, the target substance of gaseous state and/or by-product are drawn towards opposite direction.In this interchangeable mode of execution,, that is to say that opposite direction is so the exhaust port (not shown) is formed at both sides because the target substance of gaseous state and/or by-product are drawn towards the helical rotor that is installed on roots rotor 14 both sides.In addition, the rotation that is installed in the helical rotor on roots rotor 14 both sides is undertaken by an axle 24, and the throughput direction of by-product depends on the position of exhaust port.That is to say that the helical rotor shown in the right side is installed as the right side of aiming at by-product in the drawings, and the helical rotor shown in the left side is installed as the left side of aiming at by-product in the drawings.Other the interchangeable parts or the element that are produced by above interchangeable structure are easy to expect to those skilled in the art.
Because do not comprise dividing plate between roots rotor 14 and the helical rotor 18 according to the dry vacuum pump 1 of first aspect present invention, so, can not produce owing to separate the increase of the number of elements that shell causes and can not cause damage helical rotor.
In Fig. 5, the major component according to the dry vacuum pump of second aspect present invention has been described.All identical according to the dry vacuum pump 21 of second aspect present invention with major component according to the dry vacuum pump 1 of first aspect present invention, its difference is to form at least two powder storagetanks 15,16, and fluid passage 8 is formed between first roots rotor 13 and second roots rotor 14 shown in Figure 5.Below, will mainly illustrate according to the structure of the dry vacuum pump 21 of second aspect present invention with according to the difference between the structure of the dry vacuum pump 1 of first aspect present invention.
With reference to Fig. 5, first and second roots rotors 13,14 and helical rotor 18 are included in the shell 10.In shell 10, be used for the suction port 12 that target substance sucks dry vacuum pump 1 is formed at the upside of figure roots rotor 13.Because the target substance in the processing house (not shown) of semiconductor or display manufacturing apparatus is by in the suction port 12 inspiration vacuum pumps 1, so suction port 12 directly is connected to the processing house (not shown) with sealing state.On the whole, comprise that the barrel shrond 10 of described suction port 12 is connected to the processing house of semiconductor or display manufacturing apparatus and keeps sealing state with sealing state, so that exterior materials can not enter.Equally, kept sealing state by axle 24 parts of passing with the external world.The target substance that sucks by suction port 12 is contained between the blade (replaceable blade 14a, the 14b of the roots rotor 14 among Fig. 2) that is formed on the roots rotor 13 by the rotation of first roots rotor 13, and shifts to the opposite side (with reference to Fig. 2 and 5) of suction port 12.
When arrive by means of the rotation of the target substance in first roots rotor, the 13 inspiration vacuum pumps 1 by roots rotor 13 predetermined space 15 (after this being called " the first powder storagetank ") and temporary transient stop therebetween after, by at the dividing plate 4 of open lower side be transported to the upside of second roots rotor 14 in the fluid passage of dividing plate 6 qualifications of last side opening.This fluid passage can replace a plurality of, for example 4-5 roots rotor and the dividing plate that uses betwixt in the conventional dry vacuum pump.
When the rotation of the target substance that is transported to second roots rotor, 14 upsides by second roots rotor 14 is contained between blade 14a, the 14b that is formed on second roots rotor 14, and when being transported to the opposite side (with reference to Fig. 2 and 5) of suction port 12, target substance is transported to the predetermined space 16 (after this being called " the second powder storagetank ") that is formed at second roots rotor 14 and helical rotor 18 downsides usually, utilizes second roots rotor, 14 applied pressures to guide helical rotor 18 into then.The second powder storagetank 16 occupies most of space of second roots rotor, 14 downsides and a part of space of helical rotor 18 downsides.The powder storagetank 16 that is formed at roots rotor 14 downsides and is formed on helical rotor 18 downsides is communicated with, and therefore forms a space.
Be compressed through the target substance that the second powder storagetank 16 enters in the helical rotor 18 by power, and discharge in the rotation of a direction with by the pressure that previous step is transmitted by helical rotor 18 by the exhaust port 20 that is formed at vacuum pump 1 rear end side.
Passing described axle that barrel shrond 10 installs 24 is supported on respectively on the front panel 28 and rear sidewall 30 of vacuum pump by means of gear mechanism 22a, 22b, 22c.Axle 24 among the figure shown in the right side is connected to drive motor 26, is specially water-cooled machine 26, and rotates by the operation of motor.
No matter be according to the target substance in the dry vacuum pump 21 of second aspect present invention by suction port 12 inspirations, still be transported to the target substance of second roots rotor 14 by means of above-mentioned first roots rotor 13, it all is contained between blade 14a, the 14b by the rotation of first or second roots rotor 13 or 14, and is transported to the space of predetermined space or following step.
In Fig. 6, the section part according to the dry vacuum pump of third aspect present invention has been described.Except being provided with of gear mechanism, much at one according to the dry vacuum pump of the dry vacuum pump of third aspect present invention and first and second aspects according to the present invention.Below, with mainly illustrate according to the dry vacuum pump structure of third aspect present invention and according to the present invention the difference between the dry vacuum pump structure of first and second aspects.
With reference to Fig. 6, except the indivedual or general element that the dry vacuum pump of first and second aspects according to the present invention comprises, dry vacuum pump 31 according to third aspect present invention also comprises revolving part 27, and an end that is used for being connected to the axle 24 of roots rotor 14 is rotatably fixed to shell 10 1 ends; And be assembled on the axle 24 and be arranged on discharge oral-lateral 20 and shell 10 relative distolateral with back shaft 24 and make axle 24 steadily gear mechanism 22d, the 22e of rotation.
Final end plate (finish wall) 29 also is formed at an end of the shell 10 of having fixed revolving part 27, is rotatably fixed under the situation on the shell by utilizing pin member at axle 24, and final end plate 29 plays and prevents that pin member 27 from separating and the more safely effects of back shaft 24.
A plurality of bearing 22d, 22e be arranged on the axle 24 on back shaft 24 and make the axle 24 steadily the rotation.
The 22d of clutch shaft bearing mechanism threaded shaft 24 is arranged on the part of helical rotor 18 1 ends and process shell 10 exhaust ports 20, helps the rotation of axle 24.The second gear mechanism 22e is arranged on axle 24 and is connected on the end of drive motor 26, helps the rotation of axle 24.
The second gear mechanism 22e is arranged on an end of the axle 24 that extends to shell 10 1 ends to prevent the obstruction from the second gear mechanism 22e of the axle 24 that is arranged on the suction port 12 that passes through shell 10.
Simultaneously, the dividing plate (not shown) can also be formed between helical rotor 18 and the roots rotor 14.Under the situation of using the dividing plate (not shown), the dividing plate (not shown) forms the helical rotor 18 of support except axle 24 and the remaining part of roots rotor 14.
In addition, in dry vacuum pump, be used to keep the space 16 (" powder storagetank ") of target substance to be formed at the part that is connected to roots rotor 14 according to third aspect present invention.The effect of powder storagetank 16 is identical with the dry vacuum pump of first and second aspects according to the present invention.
In said structure, in dry vacuum pump, can omit the bearing on the shell suction port according to third aspect present invention, it can make simple in structure and easy manufacturing, thereby increases manufacturing efficiency and prolong life-span of bearing.
Though the preferred implementation at the All aspects of according to the present invention has been described dry vacuum pump, will be understood that those of ordinary skills can make various improvement and change on basis of the present invention.Therefore, improvement of the present invention and the change that is provided in the scope of appended claims and equivalent thereof has been provided in the present invention.
Claims (8)
1. composite dry vacuum pump comprises:
Be formed with the suction port (12) that is used to suck target substance in a side, and be formed with the barrel shrond (10) of the exhaust port (20) that is used to discharge target substance at opposition side;
Be included in the shell (10) and the roots rotor (14) that is communicated with described suction port (12);
Comprise the helical rotor (18) of (10) also close roots rotor (14) setting in the enclosure;
The middle part of passing between described roots rotor (14) and the described helical rotor (18) is fixed, and from the outside with sealing state be rotatably fixed on the shell (10) the axle (24); And
The outside that is installed in shell (10) makes it to be connected with described axle (24) drive motor (26) of rotation to drive described roots rotor (14) and described helical rotor (18),
Wherein, space (16,16 ') be formed at be connected to by on the part of the described roots rotor (14) among the downside of described roots rotor (14) and described helical rotor (18) to keep target substance.
2. dry vacuum pump according to claim 1, the space (16,16 ') that wherein is formed at described roots rotor (14) downside is greater than the space that is formed at described helical rotor (18) downside (16,16 ').
3. dry vacuum pump according to claim 1, wherein said drive motor are the water-cooled drive motor.
4. dry vacuum pump according to claim 1, the pitch of wherein said helical rotor (18) becomes shorter and shorter from suction port (12) to exhaust port (20).
5. composite dry vacuum pump comprises:
Be formed with the suction port (12) that is used to suck target substance in a side, and be formed with the barrel shrond (10) of the exhaust port (20) that is used to discharge target substance at opposition side;
Be included in first roots rotor (13) and second roots rotor (14) in the shell (10), and at least one roots rotor in first roots rotor (13) and second roots rotor (14) is communicated with described suction port (12);
Be included in the helical rotor (18) of at least one roots rotor setting in the shell (10) and in close first roots rotor (13) and second roots rotor (14);
The middle part of passing between described first and second roots rotors (13,14) and the described helical rotor (18) is fixed, and is rotatably fixed to the axle (24) of shell (10) with sealing state from the outside; And, the outside that is installed in shell (10) is to drive described first and second roots rotors (13,14) make it with described helical rotor (18) to be connected the drive motor (26) that rotates with described axle (24), wherein, first space (15) is formed at the downside of described first roots rotor (13) to keep target substance, and second space (16) are formed on the part that is connected to by described second roots rotor (14) among the downside of second roots rotor (14) and described helical rotor (18), keeping target substance, and first space (15) that is formed at described first roots rotor (13) downside is communicated with the upside of described second roots rotor (14) by predetermined fluid passage (8).
6. dry vacuum pump according to claim 5, second space (16) that wherein is formed at described second roots rotor (14) downside is greater than second space (16) that is formed at described helical rotor (18) downside.
7. dry vacuum pump according to claim 5, wherein said drive motor are the water-cooled drive motor.
8. dry vacuum pump according to claim 5, the pitch of wherein said helical rotor (18) becomes shorter and shorter from suction port (12) to exhaust port (20).
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040078423 | 2004-10-01 | ||
| KR1020040078422A KR100497982B1 (en) | 2004-10-01 | 2004-10-01 | Composite dry vacuum pump having roots and screw rotor |
| KR1020040078422 | 2004-10-01 | ||
| KR1020040078431 | 2004-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1755120A CN1755120A (en) | 2006-04-05 |
| CN100465450C true CN100465450C (en) | 2009-03-04 |
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ID=36688596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101082230A Active CN100465450C (en) | 2004-10-01 | 2005-10-08 | Composite dry vacuum pump having roots rotor and screw rotor |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100497982B1 (en) |
| CN (1) | CN100465450C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102486169B (en) * | 2009-12-12 | 2015-06-03 | 赵明 | High-efficiency axial flow and screw combined pump for ship |
| KR101613161B1 (en) * | 2014-09-05 | 2016-04-18 | 주식회사 우성진공 | Two stages type's dry vacuum pump |
| KR101926658B1 (en) * | 2017-03-15 | 2018-12-07 | 이인철 | Vacuum Pump system for semiconductor chamber |
| CN108591028B (en) * | 2018-03-30 | 2024-06-21 | 嘉兴市华鼎保温科技有限公司 | Vacuumizing machine |
| FR3087504B1 (en) * | 2018-10-17 | 2020-10-30 | Pfeiffer Vacuum | PROCESS FOR CONTROLLING THE TEMPERATURE OF A VACUUM PUMP, VACUUM PUMP AND ASSOCIATED INSTALLATION |
| KR101999646B1 (en) | 2018-11-15 | 2019-07-12 | 이인철 | Vacuum Pump system for semiconductor chamber |
| KR102583846B1 (en) * | 2019-03-14 | 2023-09-27 | 아뜰리에 부쉬 에스.아. | Dry gas pump and set of multiple gas dry pumps |
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| CN113137369B (en) * | 2021-05-27 | 2024-05-31 | 威鹏晟(山东)真空技术有限公司 | Roots screw composite vacuum pump |
| CN113107850B (en) * | 2021-05-27 | 2021-12-07 | 威鹏晟(山东)真空技术有限公司 | Oblique roots screw composite vacuum pump |
| KR20240020695A (en) | 2022-08-08 | 2024-02-15 | 주식회사 플랜 | Screw rotor for vacuum pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0697523A2 (en) * | 1994-08-19 | 1996-02-21 | Diavac Limited | Screw fluid machine and screw gear used in the same |
| US5549463A (en) * | 1994-11-24 | 1996-08-27 | Kashiyama Industry Co., Ltd. | Composite dry vacuum pump having roots and screw rotors |
| JPH094579A (en) * | 1995-04-19 | 1997-01-07 | Ebara Corp | Multistage positive displacement vacuum pump |
-
2004
- 2004-10-01 KR KR1020040078422A patent/KR100497982B1/en active IP Right Grant
-
2005
- 2005-10-08 CN CNB2005101082230A patent/CN100465450C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0697523A2 (en) * | 1994-08-19 | 1996-02-21 | Diavac Limited | Screw fluid machine and screw gear used in the same |
| US5549463A (en) * | 1994-11-24 | 1996-08-27 | Kashiyama Industry Co., Ltd. | Composite dry vacuum pump having roots and screw rotors |
| JPH094579A (en) * | 1995-04-19 | 1997-01-07 | Ebara Corp | Multistage positive displacement vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100497982B1 (en) | 2005-07-01 |
| CN1755120A (en) | 2006-04-05 |
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