CN112780563A - Two-stage dry vacuum pump - Google Patents
Two-stage dry vacuum pump Download PDFInfo
- Publication number
- CN112780563A CN112780563A CN201911083544.8A CN201911083544A CN112780563A CN 112780563 A CN112780563 A CN 112780563A CN 201911083544 A CN201911083544 A CN 201911083544A CN 112780563 A CN112780563 A CN 112780563A
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- Prior art keywords
- pump
- pump shaft
- roots
- shaft
- driving
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005086 pumping Methods 0.000 claims abstract description 32
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 230000009977 dual effect Effects 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 5
- 239000012809 cooling fluid Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 10
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000003463 adsorbent Substances 0.000 description 4
- 230000008929 regeneration Effects 0.000 description 4
- 238000011069 regeneration method Methods 0.000 description 4
- 239000012855 volatile organic compound Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention discloses a double-stage dry vacuum pump, which comprises: a pump housing (1) having a single pumping chamber (107); a driving pump shaft (3) arranged to be driven by a motor and passing through the pumping chamber of the pump housing (1); the driven pump shaft (4) penetrates through a pumping chamber of the pump shell, and is parallel to the driving pump shaft and in transmission connection with the driving pump shaft; the Roots pump comprises a Roots rotor pair and a screw rotor pair, which are sequentially arranged in a pumping chamber along the axial direction, wherein each Roots rotor pair is respectively arranged on a driving pump shaft and a driven pump shaft, and each screw rotor pair is respectively arranged on the driving pump shaft and the driven pump shaft. The pump shell (1) is provided with a pump inlet (105) and a pump outlet (106) which are communicated with the pumping chamber, the pump inlet is close to the Roots rotor pair, and the pump outlet is close to the screw rotor pair. The technical scheme provided by the invention can obviously improve the pumping capacity of the pump, so that higher vacuum degree can be obtained at the inlet of the pump.
Description
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a two-stage dry vacuum pump.
Background
Adsorbents are often used in the field of Volatile Organic Compounds (VOCs) abatement, and the VOCs are separated from air or nitrogen by the adsorbents to achieve enrichment of VOCs gas.
The regeneration of the adsorbent can be performed by various methods such as pressure swing analysis and temperature swing analysis. However, pressure swing analysis is widely used because of the advantages of less public works, short regeneration time, and the like. The main equipment of pressure swing analysis is a vacuum pump, and the initial liquid ring vacuum pump is widely applied to the analysis process. However, the liquid ring vacuum pump has low efficiency, and the insufficient vacuum pumping capability is gradually replaced by a dry vacuum pump with high efficiency and strong air pumping capability. Dry twin-screw vacuum pumps are increasingly being used as a second generation vacuum desorption process.
The air exhaust capacity of the dry-type double-screw vacuum pump directly influences the regeneration effect of the adsorbent. The maximum vacuum degree of the existing dry-type double-screw vacuum pump in desorption operation reaches 2-6 KPa, and higher vacuum degree cannot be achieved, so that the regeneration effect is influenced. In addition, the air exhaust flow of the existing dry-type double-screw vacuum pump is rapidly reduced at the final stage of vacuum analysis, and the analysis requirement is often met by adopting a mode of connecting a plurality of vacuum pumps in parallel in the process, so that the investment cost and the energy consumption loss of enterprises are increased.
In addition, the dry-type double-screw vacuum pump is used as a backing pump of the roots vacuum pump, and the use effect of the device is influenced because the backing pump cannot be directly entered in the early stage of the pumping work of the roots vacuum pump due to the huge compression ratio difference between the roots pump and the screw pump.
Disclosure of Invention
The invention aims to solve the problems that the dry type double-screw vacuum pump in the prior art has insufficient air extraction capacity at the final stage of vacuum analysis and cannot achieve higher vacuum degree.
In order to achieve the above object, an aspect of the present invention provides a dual stage dry vacuum pump including:
a pump housing having a single pumping chamber;
a drive pump shaft configured to be driven by a motor and passing through the pumping chamber of the pump housing;
the driven pump shaft penetrates through the pumping chamber of the pump shell, and is parallel to the driving pump shaft and in transmission connection with the driving pump shaft so as to be driven to rotate by the rotation of the driving pump shaft;
the pump comprises a Roots rotor pair and a screw rotor pair, wherein the Roots rotor pair and the screw rotor pair are sequentially arranged in the pumping chamber along the axial direction, each Roots rotor pair is respectively arranged on the driving pump shaft and the driven pump shaft, and each screw rotor pair is respectively arranged on the driving pump shaft and the driven pump shaft.
The pump shell is provided with a pump inlet and a pump outlet which are communicated with the pumping chamber, the pump inlet is close to the Roots rotor pair, and the pump outlet is close to the screw rotor pair.
Preferably, each of the screw rotors in the pair of screw rotors has a pitch that gradually decreases in a direction away from the roots rotor.
Preferably, each of the screw rotors in the screw rotor pair includes at least two rotor sections of different pitch, the rotor section closer to the roots rotor having a greater pitch than the rotor section further from the roots rotor.
Preferably, the Roots rotor pair is provided with one stage; or, the Roots rotor pair is provided with multiple stages, and the blades of two adjacent Roots rotors on the same shaft are staggered.
Preferably, the roots rotor is a two-lobe rotor or a three-lobe rotor.
Preferably, the driving pump shaft and the driven pump shaft are in transmission connection through a bevel gear set.
Preferably, the dual stage dry vacuum pump further comprises a gear box fixed to the pump housing, the bevel gear set being disposed within the gear box.
Preferably, the driving pump shaft has a connection part protruding out of the gear box for connecting a motor, and the driving pump shaft is supported on the gear box by a bearing.
Preferably, a double-lip seal is arranged between one end of each of the driving pump shaft and the driven pump shaft and the pump shell, and a mechanical seal is arranged between the other end of each of the driving pump shaft and the driven pump shaft and the pump shell.
Preferably, a cooling flow passage for circulating cooling liquid is arranged in the pump shell.
According to the two-stage dry vacuum pump provided by the invention, after gas enters the pumping chamber from the pump inlet, the Roots rotor pair firstly performs suction and compression, and then the screw rotor pair performs suction and compression and then discharges, the suction capacity of the two-stage dry vacuum pump is obviously improved, a higher vacuum degree can be obtained at the pump inlet, and the industrial actual requirement is met.
Drawings
FIG. 1 is a schematic cross-sectional view of a dual stage dry vacuum pump according to one embodiment of the present invention;
fig. 2 is a sectional structure view of the dual-stage dry vacuum pump, which is sectioned from another angle.
Description of the reference numerals
1-a pump casing; 101-a pump housing body; 102-a first end cap; 103-a second end cap; 104-a cooling flow channel; 105-pump inlet; 106-pump outlet; 107-pumping chamber; 2-a gearbox; 3-driving pump shaft; 301-a connecting portion; 4-a driven pump shaft; 5-active roots rotor; 6-driven roots rotor; 7-a driving screw rotor; 8-a driven screw rotor; 9-a drive gear; 10-a driven gear; 11-double lip sealing; 12-mechanical sealing; 13-a first bearing; 14-a second bearing; 15-third bearing.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
In addition, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. The term "inside" and "outside" refer to the inside and the outside of the contour of each member itself.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" or "plural stages" means two (two stages) or more than two (two stages).
The present invention discloses a dual stage dry vacuum pump, as shown in fig. 1 and 2, comprising:
a pump housing 1, said pump housing 1 having a single pumping chamber 107;
a driving pump shaft 3, the driving pump shaft 3 being configured to be driven by a motor, and the driving pump shaft 3 passing through the pumping chamber 107 of the pump housing 1;
a driven pump shaft 4, wherein the driven pump shaft 4 penetrates through the pumping chamber 107 of the pump shell 1, and the driven pump shaft 4 is parallel to the driving pump shaft 3 and is in transmission connection with the driving pump shaft 3 so as to drive the driven pump shaft 4 to rotate by the rotation of the driving pump shaft 3;
and a roots rotor pair and a screw rotor pair sequentially arranged in the pumping chamber 107 along the axial direction, each pair of roots rotors being respectively disposed on the driving pump shaft 3 and the driven pump shaft 4, and each pair of screw rotors being respectively disposed on the driving pump shaft 3 and the driven pump shaft 4. As shown in fig. 1, a driving roots rotor 5 and a driving screw rotor 7 are sequentially arranged on a driving pump shaft 3, and a driven roots rotor 6 paired with the driving roots rotor 5 and a driven screw rotor 8 paired with the driving screw rotor 7 are sequentially arranged on a driven pump shaft 4;
the pump casing 1 is provided with a pump inlet 105 and a pump outlet 106 which are communicated with the pumping chamber 107, the pump inlet 105 is close to the Roots rotor pair, and the pump outlet 106 is close to the screw rotor pair.
According to the vacuum pump provided by the invention, after gas enters the pumping chamber from the pump inlet 105, the Roots rotor pair firstly performs suction and compression, and then the gas is discharged out of the pump outlet 106 after the screw rotor pair performs suction and compression.
The dual stage dry vacuum pump provided by the present invention is described below in terms of a specific embodiment.
In the present embodiment, as shown in fig. 1, the pump casing 1 includes a pump casing body 101, and a first end cover 102 and a second end cover 103 provided at both ends of the pump casing body 101, and one ends of the driving pump shaft 3 and the driven pump shaft 4 are supported on the first end cover 102 by a first bearing 13, respectively, and the other ends are supported on the second end cover 103 by a second bearing 14.
In order to realize sealing, one end of each of the driving pump shaft 3 and the driven pump shaft 4 is hermetically connected with the pump shell 1 through a double-lip seal 11, and the other end of each of the driving pump shaft and the driven pump shaft is hermetically connected with the pump shell 1 through a mechanical seal 12.
After the driving pump shaft 3 is driven to rotate by the motor, in order to enable the driving pump shaft 3 to drive the driven pump shaft 4 to rotate, preferably, the driving pump shaft 3 and the driven pump shaft 4 are in transmission connection through a bevel gear set. As shown in fig. 1, the driving pump shaft 3 is provided with a driving gear 9, and the driven pump shaft 4 is provided with a driven gear 10. In order to protect the gears, the double-stage dry vacuum pump further comprises a gear box 2 fixed on the pump shell 1, and the bevel gear set is arranged in the gear box 2. Of course, it should be understood that the driving gear 9 and the driven gear 10 may be spur gears.
In this embodiment, the active pump shaft 3 has a connection 301 extending out of the gear housing 2, and the connection 301 is used for connecting a motor. The driving pump shaft 3 is supported on the gearbox 2 by a third bearing 15.
A roots rotor pair (driving roots rotor 5 and driven roots rotor 6) and a screw rotor pair (driving screw rotor 7 and driven screw rotor 8) are provided in the pumping chamber 107 of the pump housing 1. According to the technical scheme provided by the invention, the Roots rotor pair and the screw rotor pair are arranged in the same pumping cavity, namely two different stages of rotors are arranged in the same pumping cavity, and gas can be directly pumped and compressed by the screw rotor pair after being pumped and compressed by the Roots rotor pair, so that the pumping efficiency is favorably improved.
Preferably, each of the screw rotors in the pair of screw rotors may be arranged to decrease in pitch in a direction away from the roots rotor, i.e. the driving screw rotor 7 and the driven screw rotor 8 decrease in pitch in a direction away from the roots rotor, correspondingly to each other. The gas is better compressed by the screw with a decreasing pitch as it is pushed through the screw rotor towards the pump outlet 106.
In another embodiment, it may also be provided that each screw rotor of the screw rotor pair comprises at least two rotor segments with different pitch, the rotor segment closer to the roots rotor having a larger pitch than the rotor segment farther from the roots rotor, i.e. the driving screw rotor 7 and the driven screw rotor 8 are provided with rotor segments with different pitch in correspondence with each other. In this way, the gas can also be compressed better by a change in the pitch.
In addition, the roots rotor pair may be provided with one stage or multiple stages, that is, the roots rotor pair may be provided with one pair or multiple pairs (each pair represents one stage, and when multiple roots pairs are provided, gas may be compressed by the roots rotor in multiple stages). When the Roots rotor pair is provided with multiple stages, the blades of the two adjacent stages of Roots rotors on the same shaft are staggered. Therefore, the Roots rotor pair at the upper stage pumps gas and compresses and then pushes the gas into the next stage, and the staggered Roots rotors continue pumping and compressing in the rotating process.
Wherein, the Roots rotor can be an 8-shaped two-lobe rotor or a three-lobe rotor.
Preferably, the Roots rotor pair and the screw rotor pair are set to have a compression ratio of 1: 1-2. This can be achieved by setting the number of stages of the Roots rotor pair, the pitch parameters of the screw rotors, etc.
In the present embodiment, a cooling flow passage 104 through which a coolant flows is provided in the pump housing 1. A cooling fluid may be circulated in the cooling flow passage 104 so that the pump may be cooled during operation of the pump.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Within the scope of the technical idea of the invention, numerous simple modifications can be made to the technical solution of the invention, including combinations of the individual specific technical features in any suitable way. The invention is not described in detail in order to avoid unnecessary repetition. Such simple modifications and combinations should be considered within the scope of the present disclosure as well.
Claims (10)
1. A dual stage dry vacuum pump, comprising:
a pump housing (1), the pump housing (1) having a single pumping chamber (107);
a driving pump shaft (3), the driving pump shaft (3) being arranged to be drivable by a motor, and the driving pump shaft (3) passing through the pumping chamber (107) of the pump housing (1);
the driven pump shaft (4) penetrates through the pumping chamber (107) of the pump shell (1), and the driven pump shaft (4) is parallel to the driving pump shaft (3) and is in transmission connection with the driving pump shaft (3) so as to be driven by the rotation of the driving pump shaft (3) to rotate;
the pump comprises a Roots rotor pair and a screw rotor pair, wherein the Roots rotor pair and the screw rotor pair are sequentially arranged in the pumping chamber (107) along the axial direction, each Roots rotor pair is respectively arranged on the driving pump shaft (3) and the driven pump shaft (4), and each screw rotor pair is respectively arranged on the driving pump shaft (3) and the driven pump shaft (4).
The pump shell (1) is provided with a pump inlet (105) and a pump outlet (106) which are communicated with the pumping chamber (107), the pump inlet (105) is close to the Roots rotor pair, and the pump outlet (106) is close to the screw rotor pair.
2. The dual stage dry vacuum pump as set forth in claim 1, wherein each of the screw rotors in the pair of screw rotors tapers in pitch in a direction away from the roots rotors.
3. The dual stage dry vacuum pump as claimed in claim 1, wherein each of the screw rotors in the screw rotor pair comprises at least two rotor sections of different pitch, the rotor section proximal to the roots rotor having a greater pitch than the rotor section distal from the roots rotor.
4. The two-stage dry vacuum pump as claimed in claim 1, wherein the roots rotor pair is provided with one stage; or, the Roots rotor pair is provided with multiple stages, and the blades of two adjacent Roots rotors on the same shaft are staggered.
5. The two-stage dry vacuum pump as claimed in claim 1, wherein the roots rotor is a two-lobe or three-lobe rotor.
6. The dual stage dry vacuum pump of claim 1, wherein the driving pump shaft (3) and the driven pump shaft (4) are drivingly connected by a set of bevel gears.
7. The dual stage dry vacuum pump as claimed in claim 6, further comprising a gear box (2) fixed to the pump housing (1), the bevel gear set being disposed within the gear box (2).
8. The dual stage dry vacuum pump according to claim 7, wherein the active pump shaft (3) has a connection (301) protruding from the gear box (2) for connecting an electric motor, and the active pump shaft (3) is supported on the gear box (2) by a bearing.
9. The dual stage dry vacuum pump according to any of claims 1-8, wherein a double lip seal (11) is provided between one end of the driving pump shaft (3) and the driven pump shaft (4) and the pump housing (1), and a mechanical seal (12) is provided between the other end and the pump housing (1).
10. The dual stage dry vacuum pump as claimed in any of claims 1 to 8, wherein a cooling channel (104) for circulating a cooling fluid is provided in the pump housing (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911083544.8A CN112780563A (en) | 2019-11-07 | 2019-11-07 | Two-stage dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911083544.8A CN112780563A (en) | 2019-11-07 | 2019-11-07 | Two-stage dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112780563A true CN112780563A (en) | 2021-05-11 |
Family
ID=75748089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911083544.8A Pending CN112780563A (en) | 2019-11-07 | 2019-11-07 | Two-stage dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112780563A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220145886A1 (en) * | 2019-03-14 | 2022-05-12 | Ateliers Busch Sa | Dry pump for gas and set of a plurality of dry pumps for gas |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0861466A (en) * | 1994-08-19 | 1996-03-08 | Dia Shinku Kk | Spiral angle variable type gear |
| JP2005195027A (en) * | 2005-02-14 | 2005-07-21 | Dia Shinku Kk | Screw fluid machine and screw gear |
| CN1755120A (en) * | 2004-10-01 | 2006-04-05 | LOTVacuum株式会社 | Composite dry vacuum pump having roots rotor and screw rotor |
| US20060083651A1 (en) * | 2004-10-01 | 2006-04-20 | Lim Moon G | Composite dry vacuum pump having roots rotor and screw rotor |
| KR100647012B1 (en) * | 2006-07-28 | 2006-11-23 | (주)엘오티베큠 | Composite dry vacuum pump having roots and screw rotor |
| US20080025858A1 (en) * | 2006-07-28 | 2008-01-31 | Lot Vacuum Co., Ltd. | Composite dry vacuum pump having roots and screw rotor |
| CN101985938A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Three-axis composite dry pump with screw and roots rotor |
| CN203926013U (en) * | 2014-05-30 | 2014-11-05 | 北京威鹏晟科技有限公司 | A kind of variable pitch dry screw vacuum pump |
| CN204984884U (en) * | 2015-05-29 | 2016-01-20 | 烟台沃尔姆真空技术有限公司 | Variable -pitch dry screw vacuum pump |
| CN106194734A (en) * | 2014-09-05 | 2016-12-07 | 大卫·金 | Twin-stage dry vacuum pump |
-
2019
- 2019-11-07 CN CN201911083544.8A patent/CN112780563A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0861466A (en) * | 1994-08-19 | 1996-03-08 | Dia Shinku Kk | Spiral angle variable type gear |
| CN1755120A (en) * | 2004-10-01 | 2006-04-05 | LOTVacuum株式会社 | Composite dry vacuum pump having roots rotor and screw rotor |
| US20060083651A1 (en) * | 2004-10-01 | 2006-04-20 | Lim Moon G | Composite dry vacuum pump having roots rotor and screw rotor |
| JP2005195027A (en) * | 2005-02-14 | 2005-07-21 | Dia Shinku Kk | Screw fluid machine and screw gear |
| KR100647012B1 (en) * | 2006-07-28 | 2006-11-23 | (주)엘오티베큠 | Composite dry vacuum pump having roots and screw rotor |
| US20080025858A1 (en) * | 2006-07-28 | 2008-01-31 | Lot Vacuum Co., Ltd. | Composite dry vacuum pump having roots and screw rotor |
| CN101158353A (en) * | 2006-07-28 | 2008-04-09 | Lot真空股份有限公司 | Composite dry vacuum pump having roots and screw rotor |
| CN101985938A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Three-axis composite dry pump with screw and roots rotor |
| CN203926013U (en) * | 2014-05-30 | 2014-11-05 | 北京威鹏晟科技有限公司 | A kind of variable pitch dry screw vacuum pump |
| CN106194734A (en) * | 2014-09-05 | 2016-12-07 | 大卫·金 | Twin-stage dry vacuum pump |
| CN204984884U (en) * | 2015-05-29 | 2016-01-20 | 烟台沃尔姆真空技术有限公司 | Variable -pitch dry screw vacuum pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220145886A1 (en) * | 2019-03-14 | 2022-05-12 | Ateliers Busch Sa | Dry pump for gas and set of a plurality of dry pumps for gas |
| US11920592B2 (en) * | 2019-03-14 | 2024-03-05 | Ateliers Busch Sa | Dry pump for gas and set of a plurality of dry pumps for gas |
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Application publication date: 20210511 |