CN100443869C - High stability and high spectral resolution interference imaging spectrometer imaging method and spectrometer - Google Patents

High stability and high spectral resolution interference imaging spectrometer imaging method and spectrometer Download PDF

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CN100443869C
CN100443869C CNB2005100961211A CN200510096121A CN100443869C CN 100443869 C CN100443869 C CN 100443869C CN B2005100961211 A CNB2005100961211 A CN B2005100961211A CN 200510096121 A CN200510096121 A CN 200510096121A CN 100443869 C CN100443869 C CN 100443869C
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beam splitter
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reflector
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苏丽娟
相里斌
袁艳
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

An imaging method of interference imaging spectrometer with high stability and high spectral resolution and a spectrometer for realizing the method are disclosed, which convert the target light into parallel beams, and divide the parallel beams into reflected beams and transmitted beams through a beam splitter. The reflected beam is reflected by the turning mirror and the corner reflector and then returns to the beam splitter, and is converged by the Fourier lens to form a first optical path. The transmitted light beam returns to the beam splitter after being reflected by the corner reflector and the plane reflector, and is converged by the Fourier lens to form a second light optical path, and an optical path difference is generated when the two light beams reach the detector. The corner reflector moves synchronously along a plane vertical to the beam splitter, the optical path difference range of the two beams of light changes, and after interference spectrograms corresponding to different optical path difference ranges are superposed, a target restoration image with high spectral resolution is obtained through Fourier transformation. The invention solves the technical problems that the background technology can only sample single pixel, or the system has complex structure and poor stability, etc., has good real-time performance and is particularly suitable for large-area scanning of large targets.

Description

高稳定度高光谱分辨率干涉成像光谱仪成像方法及光谱仪 High stability and high spectral resolution interference imaging spectrometer imaging method and spectrometer

技术领域 technical field

本发明涉及一种快速获得目标干涉光谱的动镜式干涉成像方法及实现该方法的光谱仪,具体涉及一种高稳定度、高光谱分辨率干涉成像光谱仪的成像方法及实现该方法的光谱仪。The invention relates to a moving-mirror interference imaging method for quickly obtaining target interference spectrum and a spectrometer for realizing the method, in particular to an imaging method for an interference imaging spectrometer with high stability and high spectral resolution and a spectrometer for realizing the method.

背景技术 Background technique

较早的成像光谱仪有法国太空空间与战略系统分部于1991年研制出的迈克尔逊干涉型时间调制空间成像傅里叶变换光谱仪【D Simenoni.New concept forhigh-compact imaging Fourier transform spectrometer(IFTS)[C].SPIE,1991,1479:127-138.】,美国罗伦斯利物摩尔实验室于1995年研制出的迈克尔逊干涉型时间调制空间成像傅里叶变换光谱仪【Michael R Carter,Charles LBennctt,DavidJ Fields,et al.Live more imaging Fourier transform spectrometer[C].SPIE,1995,2480:380-386.】。其采用线性往复扫描方式,每次扫描结束时必须转向,待稳定后再采集数据。所以,采集数据时必须通过一束参考激光提供相应的相干采样图谱。扫描速度通过伺服系统控制,并在转向时提供逆程扫描,随着扫描频率、速度的增加,往返时间成为总扫描时间的重要部分。为了得到精确的采样干涉图,伺服系统所需的带宽急剧增加。而随着扫描速度的增加,分辨率会受上述因素的制约。由于往返时间成为总扫描时间的重要部分,占空比会因伺服系统功率、扫描器件尺寸大小、扫描器件重量及系统稳定时间的制约而降低。例如,在360次/秒扫描、单次扫描时间为2.8毫秒的扫描频率下极难实现往复扫描。1-2毫秒的返程与稳定时间会将占空比降低至33-50%。在重复频率很高的情况下,将制约对分辨率有影响的扫描长度。因此,迈克尔逊干涉型时间调制空间成像傅里叶变换光谱仪稳定性差,工艺复杂,只适用于空间和光谱时间变化较慢的目标。The earlier imaging spectrometer is the Michelson interferometric time-modulated space imaging Fourier transform spectrometer [D Simenoni. New concept for high-compact imaging Fourier transform spectrometer (IFTS)[ C]. SPIE, 1991, 1479: 127-138.], the Michelson interferometric time-modulated spatial imaging Fourier transform spectrometer developed by the Lawrence Livermore Laboratory in the United States in 1995 [Michael R Carter, Charles LBennctt , DavidJ Fields, et al. Live more imaging Fourier transform spectrometer[C]. SPIE, 1995, 2480: 380-386.]. It adopts a linear reciprocating scanning method, and must turn at the end of each scanning, and collect data after stabilization. Therefore, a reference laser must be used to provide a corresponding coherent sample spectrum when collecting data. The scanning speed is controlled by the servo system, and reverse scanning is provided when turning. As the scanning frequency and speed increase, the round-trip time becomes an important part of the total scanning time. In order to obtain an accurate sampled interferogram, the bandwidth required by the servo system increases dramatically. As the scanning speed increases, the resolution will be restricted by the above factors. Since the round trip time becomes an important part of the total scan time, the duty cycle will be reduced due to the constraints of servo system power, scan device size, scan device weight, and system settling time. For example, it is extremely difficult to achieve reciprocating scanning at a scanning frequency of 360 scans per second and a single scanning time of 2.8 milliseconds. A return and settling time of 1-2 milliseconds reduces the duty cycle to 33-50%. In the case of a high repetition rate, the scan length which affects the resolution will be constrained. Therefore, the Michelson interferometric time-modulated spatial imaging Fourier transform spectrometer has poor stability and complicated process, and is only suitable for objects with slow spatial and spectral time changes.

转镜干涉光谱成像是变形的时间调制型迈可尔逊干涉技术【J.Peter Dybward,et.al.“New Interferometer Design Concept”,STC Technical Report 2637,Science and Technology Corp,Hampton,VA,under contract#DAAA15-89-D-007,US Army CRDEC,APG,MD,8/92.】,该技术在扫描过程中有空扫。即转镜旋转时仅在一定角度内可获得干涉光谱图,而在其他角度为空扫。工作效率低,且只能对单象素取样,即只能对点目标扫描,只能应用于一个角度光线的扫描。Rotating mirror interferometer imaging is a deformed time-modulated Michelson interferometry [J.Peter Dybward, et.al. "New Interferometer Design Concept", STC Technical Report 2637, Science and Technology Corp, Hampton, VA, under contract #DAAA15-89-D-007, US Army CRDEC, APG, MD, 8/92.], the technology has an empty sweep during the scan. That is, when the rotating mirror rotates, the interference spectrum can only be obtained within a certain angle, and it is empty scan at other angles. The work efficiency is low, and it can only sample a single pixel, that is, it can only scan a point target, and can only be applied to the scanning of an angle of light.

一种超高速扫描傅立叶变化红外光谱测定法(Peter R.Griffiths,Blayne L.Hirsche,Christopher J.Manning.Ultra-rapid-scanningFourier transforminfared spectrometry.Vibrational Spectroscopy19(1999)165-176.),虽解决了转镜空扫的问题,但仍只能对单象素取样。如果要获得线目标或者面目标的干涉图谱,就必须在系统前部附加一个前置扫描系统,实现对目标每个点的逐个扫描,最后集合而获得整个目标的干涉图谱。存在的缺陷是系统结构复杂,体积较大,重量重。由于实时性差,不仅影响光谱图的质量,且扫描时间长,扫描速度低,分辨率低,适用的工作范围也较窄。A kind of ultra-high-speed scanning Fourier transforminfared spectrometry (Peter R.Griffiths, Blayne L.Hirsche, Christopher J.Manning.Ultra-rapid-scanningFourier transforminfared spectrometry.Vibrational Spectroscopy19(1999)165-176.), although solved The problem of mirror empty scanning, but still can only sample a single pixel. If you want to obtain the interferogram of a line target or a surface target, you must attach a pre-scanning system to the front of the system to scan each point of the target one by one, and finally gather to obtain the interferogram of the entire target. The existing defect is that the system structure is complex, the volume is large, and the weight is heavy. Due to the poor real-time performance, not only the quality of the spectrogram is affected, but also the scanning time is long, the scanning speed is low, the resolution is low, and the applicable working range is also narrow.

发明内容 Contents of the invention

本发明的目的在于提供一种高稳定度高光谱分辨率的干涉成像光谱仪的成像方法及实现该方法的光谱仪,其解决了背景技术中只能对单象素取样、工作效率低,或系统结构复杂、扫描速度低、稳定性差,光谱分辨率相对较低的技术问题。The object of the present invention is to provide an imaging method of an interference imaging spectrometer with high stability and high spectral resolution and a spectrometer for realizing the method, which solves the problems of single-pixel sampling, low work efficiency, or system structure in the background technology. Complexity, low scanning speed, poor stability, and relatively low spectral resolution technical problems.

本发明的技术解决方案是:Technical solution of the present invention is:

一种高稳定度高光谱分辨率干涉成像光谱仪的成像方法,其特殊之处在于:该方法包括以下步骤An imaging method for an interference imaging spectrometer with high stability and high spectral resolution, which is special in that the method includes the following steps

1)准直透镜1将来自目标的光束转换成平行光束;1) The collimating lens 1 converts the beam from the target into a parallel beam;

2)分束器2将平行光束分为反射光束IF和透射光束IT2) The beam splitter 2 divides the parallel light beam into reflected light beam I F and transmitted light beam IT ;

(i)被分束器2分出的反射光束IF经转镜3和A角反射器5多次反射,再回到分束器2,通过傅立叶透镜8会聚到探测器9,形成第一束光的光程;(i) The reflected light beam I F split by the beam splitter 2 is reflected multiple times by the rotating mirror 3 and the A-angle reflector 5, then returns to the beam splitter 2, and converges to the detector 9 through the Fourier lens 8 to form the first The optical path of the beam of light;

(ii)被分束器2分出的透射光束IT到达平面反射镜7,经平面反射镜7和B角反射器6多次反射,再回到分束器2,通过傅立叶透镜8会聚到探测器9,形成第二束光的光程;(ii) the transmitted light beam I T that is split by the beam splitter 2 arrives at the plane reflector 7, is repeatedly reflected by the plane reflector 7 and the B-angle reflector 6, then returns to the beam splitter 2, and is converged by the Fourier lens 8 to Detector 9, forming the optical path of the second beam of light;

3)第一束光与第二束光通过傅立叶透镜8到达探测器9时产生光程差,成为两束相干光,在探测器9上产生干涉光谱图;3) When the first beam of light and the second beam of light pass through the Fourier lens 8 and reach the detector 9, an optical path difference is generated to become two beams of coherent light, and an interference spectrum is generated on the detector 9;

4)沿垂直于分束器2平面的方向同步移动A角反射器5和B角反射器6,变化第一束光和第二束光通过傅立叶透镜8到达探测器9的光程差范围,在探测器9上产生与变化光程差范围所对应的干涉光谱图;4) synchronously move the A corner reflector 5 and the B corner reflector 6 along the direction perpendicular to the plane of the beam splitter 2, and change the optical path difference range of the first beam and the second beam of light passing through the Fourier lens 8 to the detector 9, Generate an interference spectrogram corresponding to the changing optical path difference range on the detector 9;

5)不同光程差范围所对应的干涉光谱图叠加后,经计算机处理系统12进行傅立叶变换,得到高光谱分辨率的目标复原图像。5) After the interferometric spectra corresponding to different optical path difference ranges are superimposed, Fourier transform is performed by the computer processing system 12 to obtain a target restoration image with high spectral resolution.

上述第一束光的光程可以是The optical path of the above-mentioned first beam of light can be

1)被分束器2分出的反射光束IF 1) The reflected light beam I F split by the beam splitter 2

(i)被转镜3反射到A角反射器5,A角反射器5把入射的光沿与入射方向平行的方向反射回转镜3;(i) is reflected to the A angle reflector 5 by the rotating mirror 3, and the A angle reflector 5 reflects the incident light along the direction parallel to the incident direction to the rotating mirror 3;

(ii)转镜3将光反射回分束器2;(ii) the rotating mirror 3 reflects the light back to the beam splitter 2;

(iii)反射回分束器2的光又被分为反射光束IFF和透射光束IFT(iii) The light reflected back to the beam splitter 2 is further divided into a reflected beam I FF and a transmitted beam I FT ;

2)透射光束IFT透过分束器(2),通过傅立叶透镜(8)会聚到探测器(9);2) The transmitted light beam I FT passes through the beam splitter (2), and converges to the detector (9) through the Fourier lens (8);

上述第二束光的光程可以是The optical path of the above-mentioned second beam of light can be

1)被分束器2分出的透射光束IT 1) The transmitted light beam IT split by the beam splitter 2

(i)被平面反射镜7反射到B角反射器6,B角反射器6把入射光沿与入射方向平行的方向反射回平面反射镜7;(i) is reflected to the B angle reflector 6 by the plane reflector 7, and the B angle reflector 6 reflects the incident light back to the plane reflector 7 along a direction parallel to the incident direction;

(ii)平面反射镜7将光反射回分束器2:(ii) Flat mirror 7 reflects light back to beam splitter 2:

(iii)反射回分束器2的光又被分为反射光束ITF和透射光束ITT(iii) The light reflected back to the beam splitter 2 is further divided into a reflected beam I TF and a transmitted beam I TT :

2)反射光束ITF,通过傅立叶透镜(8)会聚到探测器(9).2) The reflected light beam I TF converges to the detector (9) through the Fourier lens (8).

一种实现上述高稳定度高光谱分辨率干涉成像光谱仪成像方法的光谱仪,包括傅立叶透镜8,位于傅立叶透镜8焦面上的探测器9,与探测器9相连接的计算机处理系统12,设置于前置光学系统11主光轴上的准直透镜1,设置于准直透镜1轴线00′上的分束器2,其特殊之处在于:它还包括平面反射镜7,与电机4相连的转镜3,与驱动机构10相连、可沿垂直于分束器2平面的方向同步移动的A角反射器5和B角反射器6;所述平面反射镜7的位置应满足:当转镜3、A角反射器5与B角反射器6在某一位置定位时,A spectrometer for realizing the imaging method of the above-mentioned high-stability and high-spectral-resolution interference imaging spectrometer, comprising a Fourier lens 8, a detector 9 located on the focal plane of the Fourier lens 8, and a computer processing system 12 connected to the detector 9, arranged on The collimator lens 1 on the main optical axis of the front optical system 11, the beam splitter 2 arranged on the axis 00' of the collimator lens 1, its special feature is that it also includes a plane reflector 7, which is connected with the motor 4 The rotating mirror 3 is connected with the driving mechanism 10 and can move synchronously along the A angle reflector 5 and the B angle reflector 6 in the direction perpendicular to the plane of the beam splitter 2; the position of the plane reflecting mirror 7 should satisfy: 3. When the A corner reflector 5 and the B corner reflector 6 are positioned at a certain position,

1)主光轴上的光被分束器2第一次分出的反射光束IF为第一束光;第一束光经转镜3和A角反射器5多次反射,再回到分束器2,通过傅立叶透镜8会聚到探测器9形成的第一束光的光程:1) the light on the main optical axis is the first beam light by the reflected light beam I F that the beam splitter 2 splits for the first time; The beam splitter 2, the optical path of the first beam of light formed by the Fourier lens 8 and converged to the detector 9:

2)主光轴上的光被分束器2第一次分出的透射光束IT为第二束光;第二束光到达平面反射镜7,经平面反射镜7和B角反射器6多次反射,再回到分束器2,通过傅立叶透镜8会聚到探测器9形成的第二束光的光程;2) the light on the main optical axis is the second beam of light by the transmitted light beam IT that the beam splitter 2 splits for the first time; the second beam of light arrives at the plane mirror 7, through the plane mirror 7 and the B angle reflector 6 Multiple reflections, return to the beam splitter 2, and converge to the optical path of the second beam of light formed by the detector 9 through the Fourier lens 8;

3)第一束光再回到分束器2的交点与第二束光再回到分束器2的交点相重合:3) The intersection point where the first beam returns to the beam splitter 2 coincides with the intersection point where the second beam returns to the beam splitter 2:

4)第一束光被分束器2再次分出的透射光束IFT和第二束被分束器2再次分出的反射光束ITF光路重合;4) the optical path of the transmitted light beam I FT split by the beam splitter 2 again for the first beam of light overlaps with the second reflected light beam I TF split by the beam splitter 2 again;

5)第一束光的光程与第二束光的光程相等;所述分束器2的位置还应满足:5) The optical path of the first beam of light is equal to the optical path of the second beam of light; the position of the beam splitter 2 should also meet:

1)能接收到通过准直透镜1的初始入射光;1) Can receive the initial incident light passing through the collimating lens 1;

2)能接收到经转镜3和A角反射器5反射回的反射光;2) Can receive the reflected light reflected back by the rotating mirror 3 and the A angle reflector 5;

3)能接收到平面反射镜7和B角反射器6反射回的反射光;所述A角反射器5、B角反射器6的结构相同,两者背向固连为一体:所述傅立叶透镜8的光轴位于第一束光的透射光束IFT与第二束光的反射光束ITF相重合的光路上。3) Can receive the reflected light reflected back by the plane reflector 7 and the B angle reflector 6; the structure of the A angle reflector 5 and the B angle reflector 6 is the same, and the two are connected back to one another: the Fourier The optical axis of the lens 8 is located on the optical path where the transmitted light beam I FT of the first light beam coincides with the reflected light beam I TF of the second light beam.

上述探测器9以采用红外探测器为佳,具体可采用CCD红外探测器。The above-mentioned detector 9 is preferably an infrared detector, specifically a CCD infrared detector can be used.

上述转镜3以由圆柱体的斜端面构成为宜,其便于加工、安装。It is advisable for the above-mentioned rotating mirror 3 to be formed by an oblique end face of a cylinder, which is convenient for processing and installation.

本发明具有以下优点:The present invention has the following advantages:

1.可实现高频扫描,且稳定性好。采用转镜式动镜,系统运行连续,当扫描速度很高时,由于惯性的作用,旋转伺服系统仍能保持较好的稳定性。1. High-frequency scanning can be realized, and the stability is good. With the rotating mirror moving mirror, the system runs continuously. When the scanning speed is high, the rotation servo system can still maintain good stability due to the inertia.

2.抗干扰能力强。由于获得干涉图的时间极短,系统对振动敏感的程度低,机械振动频率一般对光谱图的质量无影响。2. Strong anti-interference ability. Due to the extremely short time to obtain the interferogram, the system is less sensitive to vibration, and the frequency of mechanical vibration generally has no effect on the quality of the spectrogram.

3.角反射器与转镜匹配形成的光路具有自补偿特性,从而使本发明具有较好的抗干扰性。3. The optical path formed by the matching of the corner reflector and the rotating mirror has self-compensation characteristics, so that the present invention has better anti-interference performance.

4.扫描效率高。转镜以一个圆柱体的具有一定倾斜度的端面作为反射面,在电机的带动下转动,无空扫现象,扫描效率高。4. High scanning efficiency. The rotating mirror uses the end surface of a cylinder with a certain inclination as the reflecting surface, and it rotates under the drive of the motor, so there is no idle scanning phenomenon and the scanning efficiency is high.

5.可实现线目标或面目标的直接扫描。采用角反射镜,不仅能扫描主光轴光线,还可扫描具有一定角度的光线,即可对线目标或面目标直接进行扫描,缩短了扫描时间,进一步提高了扫描效率和光谱图的质量。5. It can realize direct scanning of line target or surface target. The use of corner reflectors can not only scan the light of the main optical axis, but also scan the light with a certain angle, which can directly scan the line target or surface target, shorten the scanning time, and further improve the scanning efficiency and the quality of the spectrogram.

6.实时性好,分辨率更高,工作范围宽。尤适用于对较大目标的大面积扫描。6. Good real-time performance, higher resolution and wide working range. Especially suitable for large area scanning of larger objects.

7.功耗低,所需驱动功率小。7. Low power consumption and low driving power required.

8.结构简单,体积小,重量轻。8. Simple structure, small size and light weight.

9.结构相同的两个角反射器背向固连为一体,结构具有对称性,可以抵消加工产生的误差的影响,在装配时位置也容易确定。9. The two corner reflectors with the same structure are fixed back to one body, and the structure is symmetrical, which can offset the influence of processing errors, and the position is easy to determine during assembly.

10.A角反射器5、与B角反射器6绑定为一体,一起作水平方向移动时,两者受到水平位移的影响会相互抵消,具有自补偿的特性,提高了信噪比。10. The A corner reflector 5 and the B corner reflector 6 are bound together as a whole, and when they move together in the horizontal direction, the influence of the horizontal displacement on the two will cancel each other out, which has the characteristic of self-compensation and improves the signal-to-noise ratio.

11.采用B角反射器6和平面反射镜7结合的设计,大大缩小了仪器的整体结构,减轻了仪器的重量。11. The combination design of the B-angle reflector 6 and the plane reflector 7 greatly reduces the overall structure of the instrument and reduces the weight of the instrument.

12.光谱分辨率大大提高。A角反射器5与B角反射器6在驱动机构10的带动下同时做水平运动,获得不同光程差范围内的干涉光谱图,这些干涉光谱图以立方体数据方式叠加后。12. The spectral resolution is greatly improved. The corner A reflector 5 and the corner B reflector 6 move horizontally at the same time driven by the driving mechanism 10 to obtain interference spectrum diagrams in different optical path difference ranges, and these interference spectrum diagrams are superimposed in the form of cube data.

经计算机处理可以获得较A角反射器5、与B角反射器6位置固定时几倍甚至更高的光谱分辨率。Through computer processing, the spectral resolution can be several times or even higher than when the positions of the A-angle reflector 5 and B-angle reflector 6 are fixed.

附图说明 Description of drawings

图1为本发明的结构原理示意图;Fig. 1 is the structural principle schematic diagram of the present invention;

图2为本发明实施例的结构示意图。Fig. 2 is a schematic structural diagram of an embodiment of the present invention.

附图标号说明:1-准直透镜,2-分束器,3-转镜,4-电机,5-A角反射器,6-B角反射器,7-平面反射镜,8-傅立叶透镜,9-探测器,10-驱动机构,11-前置光学系统,12-计算机处理系统,13-被观测物。Description of reference numerals: 1-collimating lens, 2-beam splitter, 3-turning mirror, 4-motor, 5-A corner reflector, 6-B corner reflector, 7-plane reflector, 8-Fourier lens , 9-detector, 10-driving mechanism, 11-front optical system, 12-computer processing system, 13-observed object.

具体实施方式Detailed ways

参见图1,本发明的光学系统主要由准直透镜1、分束器2、转镜3、A角反射器5与B角反射器6、前置光学系统11和傅立叶透镜8构成;干涉系统主要由准直透镜1、分束器2、转镜3、A角反射器5与B角反射器6、平面反射镜7和傅立叶透镜8构成。探测系统主要由探测器9构成,信息处理系统主要由计算机处理系统12构成,见附图2。Referring to Fig. 1, the optical system of the present invention is mainly made of collimating lens 1, beam splitter 2, rotating mirror 3, A angle reflector 5 and B angle reflector 6, front optical system 11 and Fourier lens 8; Interference system It is mainly composed of a collimating lens 1, a beam splitter 2, a rotating mirror 3, an A-angle reflector 5 and a B-angle reflector 6, a plane mirror 7 and a Fourier lens 8. The detection system is mainly composed of a detector 9, and the information processing system is mainly composed of a computer processing system 12, see Figure 2.

本发明的工作原理:Working principle of the present invention:

1)在转镜3静止时,主光轴上的光束被分束器2分成两束光,该两束光的光程相等。1) When the rotating mirror 3 is stationary, the beam on the main optical axis is split into two beams by the beam splitter 2, and the optical paths of the two beams are equal.

2)当转镜3在电机4的带动下转动时,被分束器2第一次分出的反射光束IF,经转镜3与A角反射器5多次反射后,回到分束器2,再到达傅立叶透镜8的第一束光的光程会发生变化。而被分束器2第一次分出的透射光束IT,经过平面反射镜7与B角反射器6多次反射后,回到分束器2,被分束器2反射到达傅立叶透镜8的第二束光的光程不变化。两束光的光路不再重合,最后到达探测器9的光程不再相等,从而产生光程差,成为两束相干光,在探测器9上产生干涉图。随着转镜3的转动,两束光的光程差不断变化,由此获得一定光程差范围内的干涉光谱图。2) When the rotating mirror 3 rotates under the drive of the motor 4, the reflected light beam I F split by the beam splitter 2 for the first time returns to the beam splitting after being reflected by the rotating mirror 3 and the A-angle reflector 5 for many times 2, the optical path of the first beam of light reaching the Fourier lens 8 will change. The transmitted light beam I T split by the beam splitter 2 for the first time returns to the beam splitter 2 after being reflected by the plane reflector 7 and the B-angle reflector 6 multiple times, and is reflected by the beam splitter 2 to reach the Fourier lens 8 The optical path of the second beam of light does not change. The optical paths of the two beams of light no longer overlap, and the optical paths finally reaching the detector 9 are no longer equal, thereby generating an optical path difference, becoming two beams of coherent light, and producing an interference pattern on the detector 9 . As the rotating mirror 3 rotates, the optical path difference between the two beams of light changes continuously, thereby obtaining an interference spectrum within a certain range of optical path difference.

3)转镜3在电机4带动下转动的同时,A角反射器5与B角反射器6在驱动机构10的带动下沿垂直于分束器2平面的方向同步移动,使第一束光和第二束光通过傅立叶透镜8到达探测器9的光程差范围发生变化,在探测器9上产生不同光程差范围内的干涉光谱图。不同光程差范围所对应的干涉光谱图以立方体数据方式叠加,经计算机处理系统12进行傅立叶变换后,可得到较A角反射器5与B角反射器6位置固定时几倍甚至更高的高光谱分辨率的目标复原图像。3) While the rotating mirror 3 is rotating under the drive of the motor 4, the A-angle reflector 5 and the B-angle reflector 6 are driven by the driving mechanism 10 to move synchronously along the direction perpendicular to the plane of the beam splitter 2, so that the first beam of light The optical path difference range of the second beam of light passing through the Fourier lens 8 and reaching the detector 9 changes, and the interference spectrograms in different optical path difference ranges are generated on the detector 9 . The interference spectra corresponding to different optical path difference ranges are superimposed in the form of cube data, and after Fourier transformation by the computer processing system 12, it can be several times or even higher than when the positions of the A-angle reflector 5 and B-angle reflector 6 are fixed. Target restoration images with high spectral resolution.

例如:A角反射器5与B角反射器6在某位置时,光程差范围为[0,1];当A角反射器5与B角反射器6移动到下一位置时,光程差范围变为[1,2;A角反射器5与B角反射器6继续移动,在下一位置光程差范围又变为[2,3]…依次类推,在探测器9上产生与变化光程差范围所对应的干涉光谱图。这些不同光程差范围所对应的干涉光谱图叠加后,经过计算机处理系统12进行傅立叶变换,得到复原的目标图像。For example: when corner A reflector 5 and corner B reflector 6 are at a certain position, the optical path difference range is [0, 1]; when corner A reflector 5 and corner B reflector 6 move to the next position, the optical path difference The difference range becomes [1, 2; A corner reflector 5 and B corner reflector 6 continue to move, and the range of optical path difference becomes [2, 3] at the next position... and so on, and changes are generated on the detector 9 The interference spectrum corresponding to the optical path difference range. After the interferometric spectra corresponding to these different optical path difference ranges are superimposed, Fourier transform is performed by the computer processing system 12 to obtain the restored target image.

4)转镜3在电机4带动下高速转动,即可实现高速扫描。4) The rotating mirror 3 rotates at a high speed driven by the motor 4 to realize high-speed scanning.

参见图1,本发明准直透镜1的轴线00′位于前置光学系统11的主光轴上。分束器2的位置应确保既能接收到通过准直透镜1的初始入射光,又能接收到通过转镜3与A角反射器5、平面反射镜7与B角反射器6多次反射回的光。与电机4相连的转镜3的位置根据实际设计需要设置。A角反射器5、B角反射器6的结构相同,两者背向固连为一体,与驱动机构10相连,可沿垂直于分束器2平面的方向同步移动。平面反射镜7的位置应满足:当转镜3、A角反射器5与B角反射器6在某一位置定位时,Referring to FIG. 1 , the axis 00 ′ of the collimator lens 1 of the present invention is located on the main optical axis of the front optical system 11 . The position of the beam splitter 2 should ensure that it can not only receive the initial incident light passing through the collimator lens 1, but also receive multiple reflections from the rotating mirror 3 and the A corner reflector 5, the plane mirror 7 and the B corner reflector 6 Back to the light. The position of the rotating mirror 3 connected with the motor 4 is set according to actual design needs. The A corner reflector 5 and the B corner reflector 6 have the same structure, and they are fixedly connected with their backs as a whole, connected with the driving mechanism 10, and can move synchronously along the direction perpendicular to the plane of the beam splitter 2 . The position of the plane reflector 7 should satisfy: when the rotating mirror 3, the A corner reflector 5 and the B corner reflector 6 are positioned at a certain position,

1)主光轴上的光在分束器2上第一次被分出的反射光束IF为第一束光;其经转镜3和A角反射器5多次反射,再回到分束器2,被分束器2分为反射光束IFF和透射光束IFr,透射光束IFT通过傅立叶透镜8到达探测器9的光程形成第一束光的光程。1) The reflected light beam I F that the light on the main optical axis is separated on the beam splitter 2 for the first time is the first beam of light; The beam splitter 2 is divided into a reflected light beam I FF and a transmitted light beam I Fr by the beam splitter 2, and the light path of the transmitted light beam I FT passing through the Fourier lens 8 to the detector 9 forms the light path of the first light beam.

2)主光轴上的光在分束器2上第一次被分出的透射光束IT为第二束光;其经平面反射镜7和B角反射器6多次反射,再回到分束器2,被分束器2分为反射光束ITF和透射光束ITT,反射光束ITF通过傅立叶透镜8到达探测器9的光程形成第二束光的光程。2) the light on the main optical axis is split the transmitted light beam IT for the first time on the beam splitter 2 as the second beam of light; it is repeatedly reflected by the plane mirror 7 and the B angle reflector 6, and then returns The beam splitter 2 is divided into a reflected light beam I TF and a transmitted light beam I TT by the beam splitter 2 , and the light path of the reflected light beam I TF passing through the Fourier lens 8 to the detector 9 forms the light path of the second light beam.

3)第一束光再回到分束器2的交点与第二束光再回到分束器2的交点相重合。3) The intersection point where the first light beam returns to the beam splitter 2 coincides with the intersection point where the second beam light returns to the beam splitter 2 again.

4)第一束光被分束器2再次分出的透射光束IFT和第二束被分束器2再次分出的反射光束ITF光路重合。4) The optical paths of the first transmitted light beam I FT split by the beam splitter 2 and the second reflected light beam I TF split by the beam splitter 2 overlap.

5)第一束光的光程与第二束光的光程相等。傅立叶透镜8的光轴位于第一束光的透射光束IFT与第二束光的反射光束ITF相重合的光路上。探测器9位于傅立叶透镜8的焦面上。探测器9以采用红外CCD探测器为宜。图2所示的被观测物13是火箭,其是本发明用于观测火箭尾焰的示意图。5) The optical distance of the first beam of light is equal to the optical distance of the second beam of light. The optical axis of the Fourier lens 8 is located on the optical path where the transmitted light beam I FT of the first light beam coincides with the reflected light beam I TF of the second light beam. The detector 9 is located on the focal plane of the Fourier lens 8 . The detector 9 is preferably an infrared CCD detector. The observed object 13 shown in FIG. 2 is a rocket, which is a schematic diagram of the present invention for observing rocket exhaust.

本发明光的传输过程:The light transmission process of the present invention:

1.来自目标的光束经前置光学系统11到达准直透镜1,准直透镜1将目标光束转换成平行光束;平行光束投射到镀有半透半反膜的分束器2上。1. The light beam from the target reaches the collimating lens 1 through the front optical system 11, and the collimating lens 1 converts the target light beam into a parallel beam;

2.分束器2将光束分为反射光束IF和透射光束IT。其中,2. The beam splitter 2 splits the beam into a reflected beam IF and a transmitted beam IT . in,

1)被分束器2分出的反射光束IF 1) The reflected light beam I F split by the beam splitter 2

(1)经转镜3反射到A角反射器5,A角反射器5把入射的光沿与入射方向平行的方向反射回转镜3;(1) reflect to the A corner reflector 5 through the turning mirror 3, and the A corner reflector 5 reflects the incident light along the direction parallel to the incident direction to the turning mirror 3;

(2)转镜3将光反射回分束器2;(2) The rotating mirror 3 reflects the light back to the beam splitter 2;

(3)反射回分束器2的光再次被分为反射光束IFF和透射光束IFT。2)被分束器2分出的透射光束IT (3) The light reflected back to the beam splitter 2 is divided again into a reflected light beam I FF and a transmitted light beam I FT . 2) The transmitted light beam IT split by the beam splitter 2

(1)被平面反射镜7反射到B角反射器6,B角反射器6把入射的光沿与入射方向平行的方向反射回平面反射镜7;(1) is reflected to the B angle reflector 6 by the plane reflector 7, and the B angle reflector 6 reflects the incident light back to the plane reflector 7 along the direction parallel with the incident direction;

(2)平面反射镜7将光反射回分束器2;(2) Plane reflector 7 reflects light back to beam splitter 2;

(3)反射回分束器2的光再次被分为反射光束ITF和透射光束ITT(3) The light reflected back to the beam splitter 2 is divided again into a reflected light beam I TF and a transmitted light beam I TT .

3,被分束器2分出的反射光束IF,再次被分束器2分出的透射光束IFT,透过分束器2到达傅立叶透镜8,被位于傅立叶透镜8焦面上的探测器9接收。3. The reflected light beam I F split by the beam splitter 2, the transmitted light beam I FT split by the beam splitter 2 again, passes through the beam splitter 2 and reaches the Fourier lens 8, and is detected by the detector located on the focal plane of the Fourier lens 8 9 received.

4.被分束器2分出的透射光束IT,再次被分束器2分出的反射光束ITF,通过傅立叶透镜8,被位于傅立叶透镜8焦面上的探测器9接收。4. The transmitted beam I T split by the beam splitter 2 and the reflected beam I TF split by the beam splitter 2 again pass through the Fourier lens 8 and are received by the detector 9 located on the focal plane of the Fourier lens 8 .

5.分束器2第一次分出的反射光束IF,经转镜3和第一A角反射器5反射,再回到分束器2,通过傅立叶透镜8会聚到探测;分束器2第一次分出的透射光束IT,到达平面反射镜7,又经平面反射镜7和B角反射器6反射,再回到分束器2,通过傅立叶透镜8会聚到探测器9形成第二束光的光程;该两束光产生光程差,成为两束相干光,在探测器9上产生干涉光谱图。5. The reflected light beam I F split by the beam splitter 2 for the first time is reflected by the rotating mirror 3 and the first A-angle reflector 5, then returns to the beam splitter 2, and converges to the detection through the Fourier lens 8; the beam splitter 2 The transmitted light beam I T split for the first time reaches the plane reflector 7, is reflected by the plane reflector 7 and the B-angle reflector 6, returns to the beam splitter 2, and converges to the detector 9 through the Fourier lens 8 to form The optical path of the second beam of light; the two beams of light produce an optical path difference, become two beams of coherent light, and generate an interference spectrum on the detector 9 .

6.A角反射器5和B角反射器6在驱动机构10的带动下沿垂直于分束器2平面的方向同步移动,变化第一束光和第二束光通过傅立叶透镜8到达探测器9的光程差范围,可获得第一束光和第二束光在不同光程差范围内的干涉光谱图。6. The A corner reflector 5 and the B corner reflector 6 move synchronously along the direction perpendicular to the plane of the beam splitter 2 under the drive of the driving mechanism 10, and the first and second beams of light pass through the Fourier lens 8 to reach the detector 9 optical path difference range, the interference spectrum of the first beam and the second beam in different optical path difference ranges can be obtained.

7.不同光程差范围所对应的干涉光谱图叠加后,经计算机处理系统12进行傅立叶变换,得到高光谱分辨率的目标复原图像。7. After superimposing the interference spectrograms corresponding to different optical path difference ranges, Fourier transform is performed by the computer processing system 12 to obtain a target restoration image with high spectral resolution.

Claims (5)

1.一种高稳定度高光谱分辨率干涉成像光谱仪的成像方法,其特征在于:该方法包括以下步骤1. An imaging method of a high-stability high-spectral-resolution interference imaging spectrometer, characterized in that: the method comprises the following steps 1)准直透镜(1)将来自目标的光束转换成平行光束;1) The collimating lens (1) converts the beam from the target into a parallel beam; 2)分束器(2)将平行光束分为反射光束IF和透射光束IT2) The beam splitter (2) divides the parallel light beam into reflected light beam I F and transmitted light beam IT ; ①.被分束器(2)分出的反射光束IF经转镜(3)和A角反射器(5)多次反射,再回到分束器(2),通过傅立叶透镜(8)会聚到探测器(9),形成第一束光的光程:①. The reflected light beam I F split by the beam splitter (2) is reflected multiple times by the rotating mirror (3) and the A-angle reflector (5), then returns to the beam splitter (2), and passes through the Fourier lens (8) Converge to the detector (9) to form the optical path of the first beam of light: ②.被分束器(2)分出的透射光束IT到达平面反射镜(7),经平面反射镜(7)和B角反射器(6)多次反射,再回到分束器(2),通过傅立叶透镜(8)会聚到探测器(9),形成第二束光的光程;②. the transmitted light beam I T that is split by the beam splitter (2) arrives at the plane reflector (7), is repeatedly reflected through the plane reflector (7) and the B angle reflector (6), and then returns to the beam splitter ( 2), converging to the detector (9) through the Fourier lens (8) to form the optical path of the second beam of light; 3)第一束光与第二束光通过傅立叶透镜(8)到达探测器(9)时产生光程差,成为两束相干光,在探测器(9)上产生干涉光谱图;3) When the first beam of light and the second beam of light pass through the Fourier lens (8) and reach the detector (9), an optical path difference is generated, becoming two beams of coherent light, and an interference spectrum is generated on the detector (9); 4)干涉光谱图经计算机处理系统(12)进行傅立叶变换,得到复原的目标图像。4) The interference spectrogram is subjected to Fourier transform by the computer processing system (12) to obtain the restored target image. 2.根据权利要求1所述的高稳定度高光谱分辨率干涉成像光谱仪的成像方法,其特征在于:所述第一束光的光程是2. the imaging method of the high stability high spectral resolution interference imaging spectrometer according to claim 1, characterized in that: the optical path of the first beam of light is 1)被分束器(2)分出的反射光束IF 1) The reflected light beam I F split by the beam splitter (2) (i)被转镜(3)反射到A角反射器(5),A角反射器(5)把入射的光沿与入射方向平行的方向反射回转镜(3);(i) is reflected to the A angle reflector (5) by the rotating mirror (3), and the A angle reflector (5) reflects the rotating mirror (3) to the incident light along the direction parallel with the incident direction; (ii)转镜(3)将光反射回分束器(2);(ii) the rotating mirror (3) reflects the light back to the beam splitter (2); (iii)反射回分束器(2)的光又被分为反射光束IFF和透射光束IFT(iii) the light reflected back to the beam splitter (2) is split into a reflected beam I FF and a transmitted beam I FT ; 2)透射光束IFT透过分束器(2),通过傅立叶透镜(8)会聚到探测器(9);2) The transmitted light beam I FT passes through the beam splitter (2), and converges to the detector (9) through the Fourier lens (8); 所述第二束光的光程是The optical path of the second beam of light is 1)被分束器(2)分出的透射光束IT 1) The transmitted light beam IT split by the beam splitter (2) (i)被平面反射镜(7)反射到B角反射器(6),B角反射器(6)把入射光沿与入射方向平行的方向反射回平面反射镜(7);(i) is reflected to the B angle reflector (6) by the plane reflector (7), and the B angle reflector (6) reflects the incident light back to the plane reflector (7) along the direction parallel to the incident direction; (ii)平面反射镜(7)将光反射回分束器(2);(ii) a flat mirror (7) reflects the light back to the beam splitter (2); (iii)反射回分束器(2)的光又被分为反射光束ITF和透射光束ITT(iii) the light reflected back to the beam splitter (2) is split into a reflected beam I TF and a transmitted beam I TT ; 2)反射光束ITF,通过傅立叶透镜(8)会聚到探测器(9).2) The reflected light beam I TF converges to the detector (9) through the Fourier lens (8). 3.一种实现权利要求1所述的高稳定度高光谱分辨率干涉成像光谱仪成像方法的光谱仪,包括傅立叶透镜(8),位于傅立叶透镜(8)的焦面上的探测器(9),与探测器(9)相连接的计算机处理系统(12),设置于前置光学系统(11)主光轴上的准直透镜(1),设置于准直透镜(1)轴线00’上的分束器(2),其特征在于:它还包括A角反射器(5)与B角反射器(6)、平面反射镜(7)、与电机(4)相连的转镜(3);所述平面反射镜(7)的位置应满足:当转镜(3)、A角反射器(5)与B角反射器(6)、在某一位置定位时,3. a kind of spectrometer that realizes the described high stability high spectral resolution interference imaging spectrometer imaging method of claim 1, comprises Fourier lens (8), is positioned at the detector (9) on the focal plane of Fourier lens (8), The computer processing system (12) that is connected with the detector (9), the collimator lens (1) that is arranged on the main optical axis of the front optical system (11), the collimator lens (1) that is arranged on the axis 00' of the collimator lens (1) The beam splitter (2) is characterized in that: it also includes an A-angle reflector (5) and a B-angle reflector (6), a plane mirror (7), and a rotating mirror (3) connected to the motor (4); The position of the plane reflector (7) should meet: when the rotating mirror (3), the A angle reflector (5) and the B angle reflector (6) are positioned at a certain position, 1)主光轴上的光被分束器(2)第一次分出的反射光束IF为第一束光;第一束光经转镜(3)和A角反射器(5)多次反射,再回到分束器(2),通过傅立叶透镜(8)会聚到探测器(9)形成的第一束光的光程;1) the light on the principal optical axis is the first beam light by the first beam splitter (2) the reflected light beam IF that splits out for the first time; Second reflection, get back to the beam splitter (2) again, converge to the optical path of the first beam of light formed by the detector (9) by the Fourier lens (8); 2)主光轴上的光被分束器(2)第一次分出的透射光束IT为第二束光;第二束光到达平面反射镜(7),经平面反射镜(7)和B角反射器(6)多次反射,再回到分束器(2),通过傅立叶透镜(8)会聚到探测器(9)形成的第二束光的光程;2) the light on the main optical axis is the second beam IT that the light on the main optical axis is separated by the beam splitter (2) for the first time; Reflect repeatedly with the B angle reflector (6), get back to the beam splitter (2), and converge to the optical path of the second beam of light formed by the detector (9) by the Fourier lens (8); 3)第一束光再回到分束器(2)的交点与第二束光再回到分束器(2)的交点相重合;3) The intersection point where the first beam of light returns to the beam splitter (2) coincides with the intersection point at which the second beam of light returns to the beam splitter (2); 4)第一束光被分束器(2)再次分出的透射光束IFT和第二束被分束器(2)再次分出的反射光束ITF光路重合;4) the first beam splitter (2) splits the transmitted light beam I FT and the second beam splits the beam splitter (2) and the second beam splits the reflected light beam I TF again; 5)第一束光的光程与第二束光的光程相等;5) The optical path of the first beam of light is equal to the optical path of the second beam of light; 所述分束器(2)的位置还应满足:The position of the beam splitter (2) should also meet: 1)能接收到通过准直透镜(1)的初始入射光;1) Can receive the initial incident light passing through the collimating lens (1); 2)能接收到经转镜(3)和A角反射器(5)反射回的反射光;2) Can receive the reflected light reflected back by the rotating mirror (3) and the A-angle reflector (5); 3)能接收到平面反射镜(7)和B角反射器(6)反射回的反射光;所述A角反射器(5)、B角反射器(6)的结构相同,两者背向固连为一体;3) Can receive the reflected light that plane reflector (7) and B angle reflector (6) reflect back; The structure of described A angle reflector (5), B angle reflector (6) is identical, both backs solidified into one 所述傅立叶透镜(8)的光轴由位于第一束光的透射光束IFT与第二束光的反射光束ITF相重合的光路上。The optical axis of the Fourier lens (8) is located on the optical path where the transmitted light beam I FT of the first light beam coincides with the reflected light beam I TF of the second light beam. 4.根据权利要求3所述的高稳定度高光谱分辨率干涉成像光谱仪,其特征在于:所述的探测器(9)为红外探测器。4. The high stability and high spectral resolution interference imaging spectrometer according to claim 3, characterized in that: the detector (9) is an infrared detector. 5.根据权利要求3或4所述的高稳定度干涉成像光谱仪,其特征在于:所述转镜(3)由圆柱体的斜端面构成。5. The high-stability interference imaging spectrometer according to claim 3 or 4, characterized in that: the rotating mirror (3) is formed by an oblique end face of a cylinder.
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