CN100432712C - ND filter, and IRIS device and optical apparatus having the same - Google Patents
ND filter, and IRIS device and optical apparatus having the same Download PDFInfo
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- CN100432712C CN100432712C CNB2006101266027A CN200610126602A CN100432712C CN 100432712 C CN100432712 C CN 100432712C CN B2006101266027 A CNB2006101266027 A CN B2006101266027A CN 200610126602 A CN200610126602 A CN 200610126602A CN 100432712 C CN100432712 C CN 100432712C
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Abstract
What is disclosed is an ND filter that enables relatively easy control of light quantity when used in an iris device and realizes excellent optical performance. The ND filter has a first region having an ND film with a uniform density, a second region having an ND film with a uniform density different from the density of the first region, and a density transition region provided between the first region and the second region. The density transition region has an ND film whose density changes continuously from the density of the first region to the density of the second region.
Description
Technical field
The iris wave-beam device (iris device) and the optical device that the present invention relates to ND optical filter (neutral density disk(-sc), neutral colour filter) and have the ND optical filter.
Background technology
Traditionally, in the image pick up equipment such such as video camera, ND (NeutralDensity, middle ash) optical filter has been used in its iris wave-beam device, to prevent that aperture (aperture) from becoming minimum for bright thing field, thereby avoid not expecting the phenomenon that occurs, for example hunting of light (hunting) and diffraction.
Specifically, the known iris wave-beam device that use ND optical filter is arranged.For example, a kind of iris wave-beam device is disclosed in Japanese Patent Application Publication No.2002-277612, it uses the step of the many gray scales ND film with step variation to change the ND optical filter, a kind of iris wave-beam device is disclosed in Jap.P. No.03621941, the gradual change ND optical filter that it uses gray scale to change in stepless mode in big grey scale change scope.
When in iris wave-beam device, using traditional ND optical filter, need quite complicated control.
Specifically, calculate the difference between the light value of the light quantity that sees through iris wave-beam device sometime and suitable transmission light quantity, based on this difference, operate aperture blades or ND optical filter according to predetermined algorithm, thereby can obtain suitable exposure then.In addition, in order to obtain optimum exposure or in order to carry out optimum exposure correction, can change control algolithm according to object brightness, perhaps in some equipment, the information of the information of the setting focal length of relevant zoom lens and the focusing position (length) of relevant camera lens also is used as controlled variable.
As described above, control procedure relate to very complicated controlling factor.
In addition, (density, when density) changing transmission light quantity, the diameter of aperture is all very little usually when the gray scale by mobile ND optical filter and change ND optical filter.Thereby the fine difference of ND optical filter gray scale all can cause the bigger variation of transmission light quantity.
Therefore, when particularly the gray scale ND optical filter that all continuously changes at an arbitrary position according to its operational ton when gray scale is used to control light quantity, be difficult to the relation between definite operational ton and the transmission light quantity.
On the other hand, change in the situation of ND optical filter, only consider that the position of gray scale change is just enough in step.In other words, only the ratio of the area of the area of the low gray scale part of consideration and high gray scale part is just enough.Therefore, because can be based on carrying out control procedure, so this control procedure is simple relatively with the similar principle of the situation of using traditional even gray scale ND optical filter.
Yet, change in the situation of ND optical filter in step, because light is regarded as ripple, differ so have the difference of the optical thickness of the ND film in each zone that light passes through to cause at optical filter, this can influence picture quality.Specifically, as disclosed in Japanese Patent Application Publication No.2004-253892 (referring to the 22nd page and Figure 24), the transmission Wavefront aberration influences picture quality.
This is because change in the ND optical filter in following this step, the thickness that has the ND film of identical constant refractive index by change changes gray scale, in this case, passing the phase place that has each regional light beam of different gray scales because of different ND film thicknesses becomes and differs from one another, caused the interference that light is weakened, thereby resolution is descended.When the area in the zone with different gray scales was equal to each other, it is maximum that deterioration of image reaches.If the difference or the transmission Wavefront aberration of the ND film thickness between these zones change under this state, then MTF (modulation transfer function) value (representing axial optical characteristics) will change along with cycle λ.
Mtf value changes in such a way.Mtf value is started from scratch increase along with differing between the zone and is descended, and mtf value is issued to extreme value and begins differing of 2 λ/4 and increases, be issued to extreme value and begin once more differing of 4 λ/4 subsequently and descend, be issued to extreme value and begin increase differing of 6 λ/4 then, under the differing of 8 λ/4, reach extreme value once more.
Compare with gradual change ND optical filter, step changes the ND optical filter will suffer decrease in image quality, and this is that the diffraction that takes place of the gray scale uncontinuity owing to the boundary between the zone of different gray scales is caused, particularly under the bigger situation of gray scale difference.
According to above-mentioned, step changes the ND optical filter and suffers the problem of diffraction and transmission Wavefront aberration, and the situation of using step to change the ND optical filter is compared with the situation of using gradual change ND optical filter, and picture quality is more weaker sometimes.
Yet the situation of using step to change the ND optical filter is compared with the situation of using gradual change ND optical filter, and the control of iris wave-beam device is more prone to, and can develop control program in the shorter time.
Summary of the invention
The present invention is in order to address the above problem, and purpose provides a kind of ND optical filter, uses its iris wave-beam device can control with comparalive ease as using step to change the ND optical filter.And can reduce the decline of optical property.
Typical N D optical filter according to the present invention be provided with the ND film with even gray scale first district, have the even gray scale different with the gray scale in first district the ND film second district and be located at first district and second district between density transition region.Density transition region has gray scale changes to the gray scale in second district from the continuous gray scale in first district ND film.
In conjunction with the accompanying drawings from following to knowing other features of the present invention the description of typical embodiments.
Description of drawings
Figure 1A, 1B and 1C illustrate the structure according to the ND optical filter of the present embodiment.
Fig. 2 A and 2B schematically illustrate the inside of the chamber of vacuum vapor deposition device.
Fig. 3 illustrates the substrate 12 in producing the process of density transition region and the layout of mask 17.
Fig. 4 is the curve map that the relation between grayscale transition width and the spacing distance is shown.
Fig. 5 is the cross-sectional view that the structure of ND optical filter is shown.
Fig. 6 illustrates the structure of iris wave-beam device.
Fig. 7 A, 7B and 7C illustrate the operation of the ND optical filter in the iris wave-beam device.
Fig. 8 schematically illustrates the relevant portion according to the optical device of an embodiment.
Embodiment
Below with reference to Figure 1A, 1B and 1C the ND optical filter that is used to regulate light quantity according to an embodiment is described.
In 1C, label 10 is represented transparent substrate at Figure 1A, and it all is the ND film of multilayer film that label 11a represents each respectively to 11d.ND optical filter according to this embodiment has density transition region, this zone of transition is located at first district of the ND film with even gray scale and has gray scale and is different between second district of ND film of even gray scale in first district, and this zone of transition has the ND film that continuous gray scale changes.Figure 1A illustrates and only form the situation that ND film 11a realizes said structure on a surface of transparent substrate 10.Figure 1B illustrates and form the situation that ND film 11b, 11c realize said structure on two surface of transparent substrate 10.Fig. 1 C illustrates the modification of the structure shown in Figure 1A, and in this scheme, density transition region is located at second district and one to have between the zone (that is, not forming the zone of ND film) of 100% transmissivity.
Should be noted that at Figure 1A in Fig. 1 C, illustrate the thickness of ND film and substrate large.
When layout has the ND film of different gray scales, allow the even gray area that provides three or more.Yet, consider the stress in substrate and ND film, evenly the upper limit of the quantity of gray area may be thought of as four or five.
Because each zone can be designed as the gray scale with any needs, so in the structure according to following embodiment, the gray scale D in first district is 1.0, film thickness is 500nm, and the gray scale D in second district is 0.5, and film thickness is 250nm.Here, gray scale D is represented as D=-log
10(transmissivity), that is, when transmissivity is 10%, D=1.0, when transmissivity is 32%, D=0.5.
According to above-mentioned, the gray scale D that the gray scale D in first district is set to 1.0, the second districts was set to 0.5 o'clock, and the transmission Wavefront aberration between first district and second district is approximately λ/2.
When referring to the transmission Wavefront aberration, relation on this gray scale is not needed, but from the gray scale design point of view, these gray-scale values adopt in traditional step variation ND optical filter, need this relation for the step variation ND optical filter of reality.
Utilizing twice of vapour deposition to form gray scale D is 0.5 even gray scale film, just can finish the lamination of ND film.As mentioned above, Figure 1A illustrates on a surface of transparent resin substrate 10, is laminated to the situation that mode on another layer forms two-layer such even gray scale ND film with one.Figure 1B illustrates and form even gray scale ND film on a surface of transparent substrate 10, forms the situation of the even gray scale ND film of another layer on another surface of transparent substrate 10.Fig. 1 C illustrates at the ND optical filter can be inserted optimal structure in the situation in the aperture by halfway.Situation by the structure shown in Fig. 1 C like that also changes gray scale continuously in the end parts of ending in second district, can suppress decrease in image quality.
In said structure, if be discontinuous, so because diffraction will take place big gray scale difference in the grayscale transition of the boundary of two different gray areas.In addition, depend on the ratio of the area in two districts, it is big that the influence of transmission Wavefront aberration becomes, and cause decrease in image quality (that is the reduction of resolution).
The relation of the film thickness in two districts is depended in the generation of transmission Wavefront aberration, though the boundary of gray scale in two districts be not discontinuous especially also be like this.Especially, when the ratio of the area of two gray areas was 50% respectively, decrease in image quality was the most remarkable.
In this embodiment, by providing one to have certain width and the zone of continuous gray scale change on this width between two gray areas, just can reduce the decrease in image quality that causes because of the transmission Wavefront aberration.For example, if the area ratio of two even gray areas is respectively 40%, it is 20% density transition region that a ratio then is provided.
As mentioned above, according to the ND optical filter of this embodiment, even under the bigger situation of the gray scale difference between two even gray areas, also can reduce diffractive effect.In addition,, that is to say, for example when the transmission Wavefront aberration is 2 λ/4 or 6 λ/4, also can reduce the decline of resolution even make under the situation that resolution descends in the value of transmission Wavefront aberration.In addition, by density transition region being designed to have the width that is no more than the predetermined upper limit, just can adopt with using traditional step to change the identical or similar control system of control system of the iris wave-beam device of ND optical filter, thereby can reduce the work of exploitation control system.
This means will developing to be equipped with under the situation of product that traditional step changes the ND optical filter and will to develop under the situation of outfit according to the product of ND optical filter of the present invention that the control circuit that is used for iris wave-beam device can be identical.Therefore, can save the work of exploitation and production control circuit.
The above-mentioned method with ND optical filter of density transition region of making will be described below.In this embodiment, use the vacuum vapor deposition method to make the ND optical filter.
Fig. 2 A and 2B are the synoptic diagram of inside that illustrates the chamber of vacuum vapor deposition device.In Fig. 2 A, label 12 expressions will form the substrate of film in the above, label 15 expression vapour deposition umbrellas (vapor deposition umbrella), label 16 expression vapor deposition sources, label 17 expression masks.Substrate 12 among Fig. 2 A comprises substrate clamp 14 and the substrate of establishing thereon 13 (that is, transparent substrate 10), is shown specifically as Fig. 2 B.
According to typical vaccum gas phase sedimentation method, shown in Fig. 2 A, the substrate 12 in the chamber is set on the vapour deposition umbrella 15, finishes the film forming process in together with substrate 12 rotation vapour deposition umbrellas 15.In this embodiment, mask shown in Fig. 3 17 and each substrate 12 are placed in vapor deposition source 16 1 sides of substrate 12 abreast, are placed on substrate 12 to be separated by on the position of one section desired distance.Utilize this layout, the deposited particles that deposit can be passed mask 17 sometimes and be arrived substrate 12, and masked sometimes 17 stop, can't arrive substrate 12, and this depends on the geometry site between vapor deposition source 16, substrate 12 and the mask 17.The ND film thickness that so just can obtain in the density transition region distributes, and in this density transition region, gray scale changes between two even gray areas continuously.
In above layout, if mask 17 is at tight contact substrate 12 of when deposition, then in the zone of deposition ND film with do not deposit between the zone of ND film and produce steep (that is, discontinuous) border.On the contrary, the distance between mask 17 and the substrate 12 is wide more, and the border is just fuzzy more.
Fig. 4 shows the relation between the space length (spacing distance) of 17 of the width (grayscale transition width) of density transition region and substrate 12 and masks.As can be seen from Figure 4, when as the present embodiment, will when 0.1mm changes gray scale to the width of 0.3mm, it is desirable to spacing distance is arranged on 0.2mm in the scope of 0.6mm.
We use said method production to have the ND optical filter of density transition region, this density transition region is located at has Figure 1A respectively in the boundary member between two gray areas (first gray area and second gray area) of the even gray scale shown in the 1C, and continuous gray scale ground changes in this density transition region.
Use vaccum gas phase sedimentation method film forming situation on substrate though above description relates to, ND optical filter according to the present invention not only can use vapour deposition process production, can also utilize sputter, inkjet printing and additive method to produce.These methods that form film are known, omit description of them here.
To be described in the different condition in the process of the ND optical filter of producing this embodiment below.
At first, resemble vapor deposition source one side that as shown in Figure 3 two masks are set at each substrate that will deposit, and in each layer shown in Figure 5, ground floor and all succeeding layers except that outermost layer form by vacuum vapor deposition all.Employed substrate 13 is that thickness is the PET substrate of 75 μ m.
Why adopt vaccum gas phase sedimentation method to be because utilize this method, controlling diaphragm thickness relatively easily, and have the advantage that in visible wavelength region, does not almost have diffraction with the ND optical filter of this method production.
The material of selected substrate is PET, and it has high thermotolerance (high glass transition point Tg), the high grade of transparency in visible wavelength region and low absorption coerfficient.Substrate can be made by polycarbonate or norbornene resin.
Then, from chamber, remove the mask that is located on each substrate, form outermost layer, to satisfy optical film thickness n * d (n: refractive index, d: mechanical membrane thickness) equal λ/4 (λ: condition 540nm).
Select outermost material, it is had in visible wavelength region be less than or equal to 1.5 refractive index n.Particularly, employed material is MgF
2With above-mentioned relevant, if ground floor all is to use the mask shown in Fig. 3 to all layers in the outermost layer, form with different film thickness, then can not satisfy the antireflection condition.As a result, reflectivity will improve, and produces the phenomenon that makes image quality decrease, for example " ghost (ghost image) " or " halation (flare) ".Consider this factor, we form outermost layer after removing mask, so that outermost film thickness is even on entire substrate.
The iris wave-beam device that uses the ND optical filter of producing like this will be described below.
Be equipped with the light receiving element of the image capturing device of this iris wave-beam device to be of a size of 1/2 inch, this is the typical sizes of the solid-state image pickup device of video camera.Diaphragm diameter under full open mode
Be assumed to 5mm.The iris wave-beam device of regulating light quantity by the diameter that changes the aperture of being made up of a plurality of aperture blades generally is used in the photographing optical system such as the such image capturing device of video camera.
In such image capturing device, use a kind of light amount control apparatus, this light amount control apparatus is used in combination aperture blades and is used for reducing the ND optical filter of the light quantity of passing aperture, becomes too small to prevent diaphragm diameter, as shown in Figure 6.In Fig. 6, label 4 is represented the ND optical filter, and label 5 and 6 is represented aperture blades.
When using aperture blades 5,6 shown in Fig. 6 and ND optical filter 4 to regulate light quantity, being used to be equipped with for example Hall element and testing circuit near the motor (not shown) that drives the motor (not shown) of aperture blades and be used for driving N D optical filter, be used to control driving to described motor.In doing so, obtain the relation corresponding to the position of the output voltage of the rotation of the rotor in each motor and aperture blades or ND optical filter of Hall element in advance, and in the output voltage that monitors Hall element, drive and the control motor.
The step that use has a discontinuous gray scale border changes the situation of ND optical filter and uses comparison shows that of carrying out between the situation of gradual filter: on some ND optical filter position, on position identical under two kinds of situations, it is poor greater than the light quantity of 0.5EV to exist at the output voltage of Hall element.This be because: as the front in conjunction with as described in the prior art problems, the Continuous Gray Scale because of gradual change ND optical filter change the variation of the transmission light quantity that causes and change because of step transmission light quantity that the ND optical filter causes exist between changing intrinsic poor.
On the other hand, use the step that the gray scale boundary has a discontinuous grey scale change change the situation of ND optical filter and use according to the present embodiment, have comparison shows that width carries out between the situation of the ND optical filter of the density transition region of 0.2mm in the 0.3mm scope: light quantity difference maximum is about 0.09EV, and this can not produce a very large impact.This be because: even because of the position of density transition region or the change of other factors produce the poor of transmission light quantity, because that its area is compared with the aperture area is less, so this difference is not small enough to produce what materially affect yet.
In the control system of in above test, using, when the F number from full aperture (F/2.0) when becoming F/3.0, aperture blades makes diaphragm diameter diminish (Fig. 7 A).When the F number becomes F/10 when (being represented by the equivalent F number corresponding to the light quantity reduction) from F/3.0, aperture blades remains on the fixing position (promptly, aperture blades is on the position that reaches F/3.0), and insert by the ND optical filter that will have two gray areas that (Fig. 7 B) reduces light quantity in the aperture.At about F/10 place, density transition region leaves the aperture zone, and higher gray area has covered overall optical collar region (Fig. 7 C).After this, it is static that the ND optical filter keeps, and has only aperture blades to be driven (such drive system for example is disclosed among the Japanese Patent Application Publication No.2000-106649).
About F/3.0 place of the test of the relation between the operation of carrying out relevant ND optical filter and light quantity, the area of the aperture that is formed by aperture blades is 7.1mm
2, the catercorner length of square aperture is 3.77mm.
Under this state, the moving direction of ND optical filter is arranged essentially parallel to diagonal line.Gray scale boundary member (perhaps density transition region) has along the shade of gray of the moving direction of ND optical filter, and does not have grey scale change along the direction vertical with moving direction.
If the width of density transition region is 0.1mm, then the ratio between the area of this zone of transition and the aperture area is 5.26%, if the width of this zone of transition is 0.2mm, then area ratio is 10.4%, if the width of this zone of transition is 0.3mm, then area ratio is 15.5%.
When density transition region moved with respect to aperture, the area of the part that density transition region and aperture are overlapping and this area all changed with respect to the ratio of aperture area.The area of density transition region is the value of measuring when influence that density transition region roughly is in the transmission Wavefront aberration occupies the center of leading position with respect to the aforementioned proportion of said aperture area.
The width of the density transition region that changes when continuous gray scale is less than 0.1mm, and when density transition region is positioned near the bight of square aperture, similar shape when an aperture blades and high uniform gray level gray area form and be in little aperture state with aperture, similarly, when the gray scale boundary was discontinuous, they formed and the similar shape of aperture in grey scale change.Like this, under the influence of diffraction and transmission Wavefront aberration, it is apparent in view that decrease in image quality just becomes.For fear of described influence, the density transition region that width is at least 0.1mm is essential.
About the upper limit, width is that the density transition region of 0.4mm reduces transmission Wavefront aberration and diffractive effect.Yet, because its similar is in gradual change ND optical filter, so will suffer significant exposure error under above-mentioned same test condition.
Here represent poor (that is exposure error EV) with following formula because of the amount of the difference transmitted light of caused light amount control apparatus under identical controlled condition between enough big aperture area and the actual aperture area:
Log (S2/S1)/Log2=exposure error EV
S2: actual aperture area
S1: enough big (or target) aperture area
This formula has been expressed such fact: when the aperture area doubled or reduces by half, transmission light quantity (exposure) changed 1EV.
Usually say, in using video camera such as solid-state image pickup devices such as CCD, digital camera etc., but and the permissible error between enough large apertures (deviation) be to the maximum ± 0.15EV, preferably error is ± 0.1EV or littler.
The right side that replaces following formula with ± 0.15EV:
Log(S2/S1)/Log2＝±0.15EV，
We find the following value of S2/S1:
S2/S1＝1.11，0.90。
This means to allow actual aperture area to become a big lateral deviation from correct aperture position nearly 11% that a lateral deviation that diminishes at diaphragm diameter is from nearly 10% at diaphragm diameter.
These admissible exposure error values applicable to iris only by part with have the situation that the part of 100% transmissivity is formed with 0% transmissivity, the situation of forming by common aperture blades just as iris.If on these portion boundaries, be provided with the zone that continuous gray scale changes, consider admissible 11% growth of exposure, should the admissible maximum area in zone be 22% so.Yet, consider admissible 10% minimizing of exposure, the admissible maximum area in this zone is 20%.
In the middle of the reality, iris is equipped with the ND optical filter, and this ND optical filter can not stop light fully.Yet, as previously mentioned, in common light amount control apparatus, using and dropped in about scope of 10% to 30% by the transmissivity of the high gray scale ND optical filter of the problems referred to above, the result who derives from following formula is applicable to them approx.On the other hand, the ND optical filter owing to low relatively gray scale unlikely causes such as the such problem of diffraction, so the present invention is optional.
In addition, in theory, the center arrangement by zone that continuous gray scale is changed is the center that reaches aperture, just exposure error can be reduced to zero.Yet, consider the method in the zone that the production continuous gray scale changes, this is difficult to technically, and in order to prevent that exposal control method from becoming difficult, preferably the width limitations in the zone that continuous gray scale is changed is in above-mentioned scope, for worst case is prepared.
When in aperture, when the area of adjacent even gray area was equal to each other basically, the existence of density transition region became maximum to the influence of exposure.Therefore, the area in the zone (density transition region) of continuous gray scale change should be retained as less than 20% of aperture area this moment.In other words, if the width of density transition region is designed to be present in the area of the density transition region in the aperture less than 20% of aperture area, so the error of exposure can remain on ± 0.15EV in.Therefore, can utilize with controlling and comprise traditional step and change the identical control circuit of the iris wave-beam device of ND optical filter and control the iris wave-beam device that comprises optical filter satisfactorily with such density transition region.
Relevant with the iris wave-beam device that comprises optical filter with above-mentioned such density transition region, when admissible exposure error is 0.09EV in this embodiment, but by the permissible error that calculates the area that does not have the ND optical filter that obtains is 6.44%, promptly, in this embodiment of ND optical filter, the allowed maximum area in the zone that continuous gray scale changes is 12.9% of an aperture area, and its admissible breadth extreme is about 0.25mm.This is consistent with above result calculated basically.Therefore, when admissible exposure error was 0.15EV in this embodiment, the allowed maximum area in the zone that continuous gray scale changes was 20% of an aperture area, and its admissible breadth extreme is about 0.4mm.
According to above-mentioned, the allowed width in the zone that continuous gray scale changes on the gray scale border is 0.1mm or wideer, and when the area of the adjacent even gray area in aperture roughly was equal to each other, the allowed maximum area of density transition region was 20% of an aperture area.More preferably, the area of density transition region the aperture area 15% in.
Though above description discussion to embodiment is the ND optical filter with two kinds of gray scales, the above ND optical filter that is equally applicable to have three kinds or more kinds of gray scales of describing.
Describe another embodiment below with reference to Fig. 8, in this embodiment, the iris wave-beam device that has according to ND optical filter of the present invention is applied to an optical device (video camera).
In Fig. 8, label 1 refers to and comprises the photographing optical system of lens unit 1A to 1D.Label 2 is represented solid-state image pickup device, CCD for example, and its receives the optical imagery that is formed by photographing optical system 1, and converts it to electric signal.Label 3 is represented low pass filter.Photographing optical system 1 has the ND optical filter 4 that comprises shown in Fig. 6 and the iris wave-beam device of aperture blades 5,6.
According to embodiment with above structure, the ND optical filter that can provide a kind of expectation can improve resolution.In addition, when the iris wave-beam device that uses this ND optical filter is used to have the optical device of solid-state image pickup device and photographing optical system, the work that can save exploitation and produce its control circuit.
More particularly,, comprise being equipped with traditional step to change the product of ND optical filter and when being equipped with product according to ND optical filter of the present invention that the control circuit of shared iris wave-beam device can be used in two types the product at a series of products of exploitation.This has made things convenient for the exploitation and the production of control circuit.
Though described the present invention in conjunction with typical embodiments, be to be understood that to the invention is not restricted to disclosed typical embodiments.The scope of claims should be endowed the wideest explanation, so that all modifications and equivalent structure and function are included.
The application requires the right of priority of the Japanese patent application No.2005-248717 that submitted on August 30th, 2005, and the full content with this application comprises to come in by reference.
Claims (5)
1. neutral density disk(-sc) comprises:
First district with ND film of even gray scale;
Second district with ND film of the even gray scale different with the gray scale in first district; With
Be located at the density transition region between first district and second district, this density transition region has gray scale and changes to the ND film of the gray scale in second district from the continuous gray scale in first district,
Wherein, the width of described density transition region is equal to or greater than 0.1mm, and is equal to or less than 0.4mm.
2. according to the neutral density disk(-sc) of claim 1, wherein, the described ND film that described ND film that described first district has and described second district have is formed on the same surface of substrate.
3. according to the neutral density disk(-sc) of claim 1, wherein, at least one in the described ND film that described ND film that described first district has and described second district have is formed on two surfaces of substrate.
4. iris wave-beam device comprises:
Form the aperture blades of aperture; With
Be used to reduce the neutral density disk(-sc) of the light quantity of passing described aperture,
Described neutral density disk(-sc) comprises:
First district with ND film of even gray scale;
Second district with ND film of the even gray scale different with the gray scale in first district; With
Be located at the density transition region between first district and second district, this density transition region has gray scale and changes to the ND film of the gray scale in second district from the continuous gray scale in first district,
Wherein, the width of described density transition region is equal to or greater than 0.1mm, and is equal to or less than 0.4mm.
5. optical device comprises:
Comprise optical system according to the iris wave-beam device of claim 4; With
The solid-state image pickup device of the image that reception is formed by described optical system.
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| JP2006216462 | 2006-08-09 |
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| JP2010101967A (en) * | 2008-10-21 | 2010-05-06 | Nisca Corp | Neutral density filter, light quantity adjusting device, imaging device, method for manufacturing neutral density filter, die cut forming device for neutral density filter |
| DE102013212445A1 (en) * | 2013-06-27 | 2014-12-31 | Robert Bosch Gmbh | Partly tinted optical element and method of making the same |
| CN107523789B (en) * | 2017-09-18 | 2019-04-19 | 江门市卡色光学有限公司 | A kind of gradual change ash filter is coated with device and its plating method |
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| US20040135921A1 (en) * | 2002-12-26 | 2004-07-15 | Yasunori Murata | Light amount adjusting device, and optical device using the light amount adjusting device |
| JP2004253892A (en) * | 2003-02-18 | 2004-09-09 | Canon Inc | Light quantity adjuster |
| JP2005017986A (en) * | 2003-06-30 | 2005-01-20 | Canon Electronics Inc | Nd filter, method for manufacturing nd filter and light quantity attenuation device and camera having such nd filter |
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| Publication number | Publication date |
|---|---|
| CN1924623A (en) | 2007-03-07 |
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