CN100418228C - 图像传感器及其制造方法 - Google Patents
图像传感器及其制造方法 Download PDFInfo
- Publication number
- CN100418228C CN100418228C CNB2004101036454A CN200410103645A CN100418228C CN 100418228 C CN100418228 C CN 100418228C CN B2004101036454 A CNB2004101036454 A CN B2004101036454A CN 200410103645 A CN200410103645 A CN 200410103645A CN 100418228 C CN100418228 C CN 100418228C
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- light
- array
- color filter
- lens
- microlens structure
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030101699A KR100595898B1 (ko) | 2003-12-31 | 2003-12-31 | 이미지 센서 및 그 제조방법 |
KR1020030101699 | 2003-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1638139A CN1638139A (zh) | 2005-07-13 |
CN100418228C true CN100418228C (zh) | 2008-09-10 |
Family
ID=34698897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004101036454A Expired - Fee Related CN100418228C (zh) | 2003-12-31 | 2004-12-29 | 图像传感器及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050139945A1 (zh) |
JP (1) | JP3936954B2 (zh) |
KR (1) | KR100595898B1 (zh) |
CN (1) | CN100418228C (zh) |
DE (1) | DE102004062926A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100685881B1 (ko) * | 2004-06-22 | 2007-02-23 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서 및 그 제조방법 |
KR100741875B1 (ko) * | 2004-09-06 | 2007-07-23 | 동부일렉트로닉스 주식회사 | Cmos 이미지 센서 및 그의 제조 방법 |
US8139130B2 (en) | 2005-07-28 | 2012-03-20 | Omnivision Technologies, Inc. | Image sensor with improved light sensitivity |
US8274715B2 (en) | 2005-07-28 | 2012-09-25 | Omnivision Technologies, Inc. | Processing color and panchromatic pixels |
KR100766244B1 (ko) * | 2005-12-28 | 2007-10-10 | 동부일렉트로닉스 주식회사 | 이미지 센서 |
US7916362B2 (en) | 2006-05-22 | 2011-03-29 | Eastman Kodak Company | Image sensor with improved light sensitivity |
US8031258B2 (en) | 2006-10-04 | 2011-10-04 | Omnivision Technologies, Inc. | Providing multiple video signals from single sensor |
CN101236978B (zh) * | 2007-02-01 | 2011-05-18 | 精材科技股份有限公司 | 感光式芯片封装构造及其制造方法 |
JP5164509B2 (ja) * | 2007-10-03 | 2013-03-21 | キヤノン株式会社 | 光電変換装置、可視光用光電変換装置及びそれらを用いた撮像システム |
US20100149396A1 (en) * | 2008-12-16 | 2010-06-17 | Summa Joseph R | Image sensor with inlaid color pixels in etched panchromatic array |
WO2011142065A1 (ja) * | 2010-05-14 | 2011-11-17 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
KR102056141B1 (ko) | 2013-02-25 | 2019-12-16 | 삼성전자주식회사 | 이미지 센서 및 이를 포함하는 컴퓨팅 시스템 |
JP5711323B2 (ja) * | 2013-08-29 | 2015-04-30 | ルネサスエレクトロニクス株式会社 | 固体撮像装置 |
KR102160237B1 (ko) * | 2014-03-19 | 2020-09-28 | 에스케이하이닉스 주식회사 | 마이크로 렌즈를 갖는 이미지 센서 |
KR102568789B1 (ko) | 2016-03-10 | 2023-08-21 | 삼성전자주식회사 | 무기 컬러 필터를 포함하는 컬러 필터 어레이, 상기 컬러 필터 어레이를 포함하는 이미지 센서 및 디스플레이 장치 |
KR102506837B1 (ko) * | 2017-11-20 | 2023-03-06 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5371397A (en) * | 1992-10-09 | 1994-12-06 | Mitsubishi Denki Kabushiki Kaisha | Solid-state imaging array including focusing elements |
US6211509B1 (en) * | 1998-03-31 | 2001-04-03 | Kabushiki Kaisha Toshiba | Solid-state image sensor |
US6221687B1 (en) * | 1999-12-23 | 2001-04-24 | Tower Semiconductor Ltd. | Color image sensor with embedded microlens array |
JP2003204050A (ja) * | 2002-01-08 | 2003-07-18 | Canon Inc | 固体撮像装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960000223B1 (ko) * | 1990-11-16 | 1996-01-03 | 가부시키가이샤 도시바 | 고체촬상장치 및 그 제조방법 |
US5316640A (en) * | 1991-06-19 | 1994-05-31 | Matsushita Electric Industrial Co., Ltd. | Fabricating method of micro lens |
WO1995008192A1 (en) * | 1993-09-17 | 1995-03-23 | Polaroid Corporation | Forming microlenses on solid state imager |
US5841126A (en) * | 1994-01-28 | 1998-11-24 | California Institute Of Technology | CMOS active pixel sensor type imaging system on a chip |
US6021172A (en) * | 1994-01-28 | 2000-02-01 | California Institute Of Technology | Active pixel sensor having intra-pixel charge transfer with analog-to-digital converter |
US5677200A (en) * | 1995-05-12 | 1997-10-14 | Lg Semicond Co., Ltd. | Color charge-coupled device and method of manufacturing the same |
US5990506A (en) * | 1996-03-20 | 1999-11-23 | California Institute Of Technology | Active pixel sensors with substantially planarized color filtering elements |
US5886659A (en) * | 1996-08-21 | 1999-03-23 | California Institute Of Technology | On-focal-plane analog-to-digital conversion for current-mode imaging devices |
US6005619A (en) * | 1997-10-06 | 1999-12-21 | Photobit Corporation | Quantum efficiency improvements in active pixel sensors |
KR100359768B1 (ko) * | 1999-03-18 | 2002-11-07 | 주식회사 하이닉스반도체 | 고체 촬상 소자 및 그 제조방법 |
US6091093A (en) * | 1999-06-01 | 2000-07-18 | Intel Corporation | Photodiode having transparent insulating film around gate islands above p-n junction |
US6362513B2 (en) * | 1999-07-08 | 2002-03-26 | Intel Corporation | Conformal color filter layer above microlens structures in an image sensor die |
US6171885B1 (en) * | 1999-10-12 | 2001-01-09 | Taiwan Semiconductor Manufacturing Company | High efficiency color filter process for semiconductor array imaging devices |
JP2002026366A (ja) * | 2000-07-11 | 2002-01-25 | Sony Corp | 半導体装置 |
KR20040060509A (ko) * | 2002-12-30 | 2004-07-06 | 동부전자 주식회사 | Cmos 이미지 센서 |
US6979588B2 (en) * | 2003-01-29 | 2005-12-27 | Hynix Semiconductor Inc. | Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity |
US7078260B2 (en) * | 2003-12-31 | 2006-07-18 | Dongbu Electronics Co., Ltd. | CMOS image sensors and methods for fabricating the same |
-
2003
- 2003-12-31 KR KR1020030101699A patent/KR100595898B1/ko not_active IP Right Cessation
-
2004
- 2004-12-21 JP JP2004369142A patent/JP3936954B2/ja not_active Expired - Fee Related
- 2004-12-28 DE DE102004062926A patent/DE102004062926A1/de not_active Withdrawn
- 2004-12-29 US US11/026,903 patent/US20050139945A1/en not_active Abandoned
- 2004-12-29 CN CNB2004101036454A patent/CN100418228C/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5371397A (en) * | 1992-10-09 | 1994-12-06 | Mitsubishi Denki Kabushiki Kaisha | Solid-state imaging array including focusing elements |
US6211509B1 (en) * | 1998-03-31 | 2001-04-03 | Kabushiki Kaisha Toshiba | Solid-state image sensor |
US6221687B1 (en) * | 1999-12-23 | 2001-04-24 | Tower Semiconductor Ltd. | Color image sensor with embedded microlens array |
JP2003204050A (ja) * | 2002-01-08 | 2003-07-18 | Canon Inc | 固体撮像装置 |
Also Published As
Publication number | Publication date |
---|---|
KR100595898B1 (ko) | 2006-07-03 |
JP3936954B2 (ja) | 2007-06-27 |
JP2005197680A (ja) | 2005-07-21 |
DE102004062926A1 (de) | 2005-08-04 |
KR20050069540A (ko) | 2005-07-05 |
CN1638139A (zh) | 2005-07-13 |
US20050139945A1 (en) | 2005-06-30 |
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SE01 | Entry into force of request for substantive examination | ||
CI01 | Publication of corrected invention patent application |
Correction item: Inventor Correct: Ren Jinhe False: Zuo Jinhe Number: 28 Page: 383 Volume: 21 |
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CI02 | Correction of invention patent application |
Correction item: Inventor Correct: Ren Jinhe False: Zuo Jinhe Number: 28 Page: The title page Volume: 21 |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZUO TO: REN |
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Granted publication date: 20080910 Termination date: 20121229 |