CN100414599C - 反射式空间光调节器的结构 - Google Patents
反射式空间光调节器的结构 Download PDFInfo
- Publication number
- CN100414599C CN100414599C CNB038017458A CN03801745A CN100414599C CN 100414599 C CN100414599 C CN 100414599C CN B038017458 A CNB038017458 A CN B038017458A CN 03801745 A CN03801745 A CN 03801745A CN 100414599 C CN100414599 C CN 100414599C
- Authority
- CN
- China
- Prior art keywords
- micro
- control circuit
- substrate
- spatial light
- light modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims abstract description 158
- 238000004519 manufacturing process Methods 0.000 claims description 50
- 125000006850 spacer group Chemical group 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 31
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 18
- 239000000872 buffer Substances 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000002161 passivation Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 2
- 238000003491 array Methods 0.000 abstract description 10
- 238000002955 isolation Methods 0.000 abstract description 5
- 239000012536 storage buffer Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 14
- 230000033001 locomotion Effects 0.000 description 13
- 238000012856 packing Methods 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000003466 welding Methods 0.000 description 8
- 239000004411 aluminium Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000013461 design Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 238000005498 polishing Methods 0.000 description 7
- 238000002310 reflectometry Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000012780 transparent material Substances 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000003760 hair shine Effects 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- -1 silicon nitrides Chemical class 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
Description
Claims (20)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US39038902P | 2002-06-19 | 2002-06-19 | |
US60/390,389 | 2002-06-19 | ||
US10/378,058 US20040004753A1 (en) | 2002-06-19 | 2003-02-27 | Architecture of a reflective spatial light modulator |
US10/378,058 | 2003-02-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1732506A CN1732506A (zh) | 2006-02-08 |
CN100414599C true CN100414599C (zh) | 2008-08-27 |
Family
ID=30003022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038017458A Expired - Fee Related CN100414599C (zh) | 2002-06-19 | 2003-05-30 | 反射式空间光调节器的结构 |
Country Status (9)
Country | Link |
---|---|
US (2) | US20040004753A1 (zh) |
EP (1) | EP1514256A4 (zh) |
JP (1) | JP2005529377A (zh) |
KR (1) | KR100652857B1 (zh) |
CN (1) | CN100414599C (zh) |
AU (1) | AU2003245382A1 (zh) |
CA (1) | CA2472350C (zh) |
RU (1) | RU2277265C2 (zh) |
WO (1) | WO2004001717A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103296069A (zh) * | 2012-02-28 | 2013-09-11 | 台湾积体电路制造股份有限公司 | FinFET及其制造方法 |
CN107771294A (zh) * | 2015-06-19 | 2018-03-06 | 康宁股份有限公司 | 具有光漫射纤维的纤维发光系统和操作具有光漫射纤维的纤维发光系统的方法 |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7019376B2 (en) * | 2000-08-11 | 2006-03-28 | Reflectivity, Inc | Micromirror array device with a small pitch size |
US6965468B2 (en) * | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
US20030234994A1 (en) * | 2002-06-19 | 2003-12-25 | Pan Shaoher X. | Reflective spatial light modulator |
US7034984B2 (en) * | 2002-06-19 | 2006-04-25 | Miradia Inc. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
US7206110B2 (en) * | 2002-06-19 | 2007-04-17 | Miradia Inc. | Memory cell dual protection |
US20040004753A1 (en) * | 2002-06-19 | 2004-01-08 | Pan Shaoher X. | Architecture of a reflective spatial light modulator |
US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
US6992810B2 (en) | 2002-06-19 | 2006-01-31 | Miradia Inc. | High fill ratio reflective spatial light modulator with hidden hinge |
US7187484B2 (en) * | 2002-12-30 | 2007-03-06 | Texas Instruments Incorporated | Digital micromirror device with simplified drive electronics for use as temporal light modulator |
US7483198B2 (en) * | 2003-02-12 | 2009-01-27 | Texas Instruments Incorporated | Micromirror device and method for making the same |
US6885494B2 (en) * | 2003-02-12 | 2005-04-26 | Reflectivity, Inc. | High angle micro-mirrors and processes |
WO2004104790A2 (en) * | 2003-05-20 | 2004-12-02 | Kagutech Ltd. | Digital backplane |
WO2004109363A1 (en) * | 2003-06-02 | 2004-12-16 | Miradia Inc. | High fill ratio reflective spatial light modulator with hidden hinge |
EP1636629A4 (en) * | 2003-06-02 | 2009-04-15 | Miradia Inc | PREPARATION OF A REFLECTIVE ROOM LIGHT MODULATOR HIGH FILLING RATIO WITH HORIZONTAL SWITCHING MEMBER |
US6980347B2 (en) * | 2003-07-03 | 2005-12-27 | Reflectivity, Inc | Micromirror having reduced space between hinge and mirror plate of the micromirror |
US7026695B2 (en) * | 2003-11-19 | 2006-04-11 | Miradia Inc. | Method and apparatus to reduce parasitic forces in electro-mechanical systems |
US7449284B2 (en) | 2004-05-11 | 2008-11-11 | Miradia Inc. | Method and structure for fabricating mechanical mirror structures using backside alignment techniques |
US20050255666A1 (en) * | 2004-05-11 | 2005-11-17 | Miradia Inc. | Method and structure for aligning mechanical based device to integrated circuits |
US7042619B1 (en) | 2004-06-18 | 2006-05-09 | Miradia Inc. | Mirror structure with single crystal silicon cross-member |
US7113322B2 (en) * | 2004-06-23 | 2006-09-26 | Reflectivity, Inc | Micromirror having offset addressing electrode |
US7068417B2 (en) * | 2004-07-28 | 2006-06-27 | Miradia Inc. | Method and apparatus for a reflective spatial light modulator with a flexible pedestal |
US6980349B1 (en) | 2004-08-25 | 2005-12-27 | Reflectivity, Inc | Micromirrors with novel mirror plates |
US7019880B1 (en) * | 2004-08-25 | 2006-03-28 | Reflectivity, Inc | Micromirrors and hinge structures for micromirror arrays in projection displays |
US7436572B2 (en) * | 2004-08-25 | 2008-10-14 | Texas Instruments Incorporated | Micromirrors and hinge structures for micromirror arrays in projection displays |
US7215459B2 (en) * | 2004-08-25 | 2007-05-08 | Reflectivity, Inc. | Micromirror devices with in-plane deformable hinge |
US7119944B2 (en) * | 2004-08-25 | 2006-10-10 | Reflectivity, Inc. | Micromirror device and method for making the same |
KR100815343B1 (ko) * | 2004-11-04 | 2008-03-19 | 삼성전기주식회사 | 회절형 박막 압전 마이크로 미러 및 그 제조 방법 |
US7172921B2 (en) | 2005-01-03 | 2007-02-06 | Miradia Inc. | Method and structure for forming an integrated spatial light modulator |
US8207004B2 (en) | 2005-01-03 | 2012-06-26 | Miradia Inc. | Method and structure for forming a gyroscope and accelerometer |
US7199918B2 (en) * | 2005-01-07 | 2007-04-03 | Miradia Inc. | Electrical contact method and structure for deflection devices formed in an array configuration |
US7142349B2 (en) * | 2005-01-07 | 2006-11-28 | Miradia Inc. | Method and structure for reducing parasitic influences of deflection devices on spatial light modulators |
US7202989B2 (en) | 2005-06-01 | 2007-04-10 | Miradia Inc. | Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate |
US7298539B2 (en) * | 2005-06-01 | 2007-11-20 | Miradia Inc. | Co-planar surface and torsion device mirror structure and method of manufacture for optical displays |
US7184195B2 (en) | 2005-06-15 | 2007-02-27 | Miradia Inc. | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator |
US7190508B2 (en) | 2005-06-15 | 2007-03-13 | Miradia Inc. | Method and structure of patterning landing pad structures for spatial light modulators |
TWI326067B (en) * | 2005-06-29 | 2010-06-11 | Mstar Semiconductor Inc | Flat display device, controller, and method for displaying images |
US8674968B2 (en) * | 2005-06-29 | 2014-03-18 | Mstar Semiconductor, Inc. | Touch sensing method and associated circuit |
US7355781B2 (en) * | 2005-07-25 | 2008-04-08 | Gehode Corporation | Spatial light modulator with perforated hinge |
US7374962B2 (en) * | 2005-09-29 | 2008-05-20 | Miradia Inc. | Method of fabricating reflective spatial light modulator having high contrast ratio |
US7502158B2 (en) | 2005-10-13 | 2009-03-10 | Miradia Inc. | Method and structure for high fill factor spatial light modulator with integrated spacer layer |
US7675670B2 (en) | 2005-10-28 | 2010-03-09 | Miradia Inc. | Fabrication of a high fill ratio silicon spatial light modulator |
US7522330B2 (en) * | 2005-10-28 | 2009-04-21 | Miradia Inc. | High fill ratio silicon spatial light modulator |
US7760197B2 (en) * | 2005-10-31 | 2010-07-20 | Hewlett-Packard Development Company, L.P. | Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field |
US7666319B1 (en) * | 2005-11-01 | 2010-02-23 | Miradia Inc. | Semiconductor etching process to release single crystal silicon mirrors |
US7471439B2 (en) * | 2005-11-23 | 2008-12-30 | Miradia, Inc. | Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant |
US7580174B2 (en) | 2005-11-23 | 2009-08-25 | Miradia, Inc. | Anti-stiction gas-phase lubricant for micromechanical systems |
US7723812B2 (en) * | 2005-11-23 | 2010-05-25 | Miradia, Inc. | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
US7463404B2 (en) * | 2005-11-23 | 2008-12-09 | Miradia, Inc. | Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
US7616370B2 (en) * | 2005-11-23 | 2009-11-10 | Miradia, Inc. | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
US7978388B2 (en) * | 2006-01-12 | 2011-07-12 | Nippon Telegraph And Telephone Corporation | Mirror device and mirror device manufacturing method incorporating a collision preventive structure |
EP2024271B1 (de) * | 2006-06-03 | 2013-09-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung von elektroden zu beweglichen mikromechanischen elementen |
US8096665B2 (en) * | 2006-10-11 | 2012-01-17 | Miradia, Inc. | Spatially offset multi-imager-panel architecture for projecting an image |
US7898561B2 (en) * | 2007-01-26 | 2011-03-01 | Miradia Inc. | MEMS mirror system for laser printing applications |
US7884021B2 (en) * | 2007-02-27 | 2011-02-08 | Spartial Photonics, Inc. | Planarization of a layer over a cavity |
CN101604092B (zh) * | 2008-06-11 | 2012-02-15 | 季中 | 显示面板及其制造方法、显示装置及其色彩还原方法和电子设备 |
US20110148837A1 (en) * | 2009-12-18 | 2011-06-23 | Qualcomm Mems Technologies, Inc. | Charge control techniques for selectively activating an array of devices |
JP6888103B2 (ja) * | 2017-01-20 | 2021-06-16 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 非ブレーズドdmdを伴う解像度強化型のデジタルリソグラフィ |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2167388Y (zh) * | 1993-07-27 | 1994-06-01 | 四川大学 | 薄膜型铁电集成空间光调制器 |
US5452024A (en) * | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
CN1126923A (zh) * | 1993-12-03 | 1996-07-17 | 德克萨斯仪器股份有限公司 | 提高横向分辨率的数字微镜器件结构 |
US5646772A (en) * | 1996-05-10 | 1997-07-08 | Lucent Technologies Inc. | Methods and apparatus for a multi-electrode micromechanical optical modulator |
US20020071166A1 (en) * | 2000-12-07 | 2002-06-13 | Sungho Jin | Magnetically packaged optical MEMs device and method for making the same |
JP2002258174A (ja) * | 2001-03-02 | 2002-09-11 | Seiko Epson Corp | 光変調装置及びそれを有する電子機器 |
US20020131679A1 (en) * | 2001-02-07 | 2002-09-19 | Nasiri Steven S. | Microelectromechanical mirror and mirror array |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
US4317611A (en) * | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
US4566935A (en) * | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) * | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US5446479A (en) * | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
KR100202246B1 (ko) * | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | 디지탈화 비디오 시스템을 위한 장치 및 방법 |
US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5311360A (en) * | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
US5285196A (en) * | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
US5489952A (en) * | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
US5488504A (en) * | 1993-08-20 | 1996-01-30 | Martin Marietta Corp. | Hybridized asymmetric fabry-perot quantum well light modulator |
US5583688A (en) * | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
US5448314A (en) * | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
US5504614A (en) * | 1995-01-31 | 1996-04-02 | Texas Instruments Incorporated | Method for fabricating a DMD spatial light modulator with a hardened hinge |
US5663749A (en) * | 1995-03-21 | 1997-09-02 | Texas Instruments Incorporated | Single-buffer data formatter for spatial light modulator |
US5535047A (en) * | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
US5835256A (en) * | 1995-06-19 | 1998-11-10 | Reflectivity, Inc. | Reflective spatial light modulator with encapsulated micro-mechanical elements |
US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US6046840A (en) * | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
US5757536A (en) * | 1995-08-30 | 1998-05-26 | Sandia Corporation | Electrically-programmable diffraction grating |
US5661591A (en) * | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
US6201521B1 (en) * | 1995-09-29 | 2001-03-13 | Texas Instruments Incorporated | Divided reset for addressing spatial light modulator |
US5742419A (en) * | 1995-11-07 | 1998-04-21 | The Board Of Trustees Of The Leland Stanford Junior Universtiy | Miniature scanning confocal microscope |
US5999306A (en) * | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
DE69806846T2 (de) * | 1997-05-08 | 2002-12-12 | Texas Instruments Inc | Verbesserungen für räumliche Lichtmodulatoren |
US6323982B1 (en) * | 1998-05-22 | 2001-11-27 | Texas Instruments Incorporated | Yield superstructure for digital micromirror device |
US6529310B1 (en) * | 1998-09-24 | 2003-03-04 | Reflectivity, Inc. | Deflectable spatial light modulator having superimposed hinge and deflectable element |
US6252277B1 (en) * | 1999-09-09 | 2001-06-26 | Chartered Semiconductor Manufacturing Ltd. | Embedded polysilicon gate MOSFET |
US6396619B1 (en) * | 2000-01-28 | 2002-05-28 | Reflectivity, Inc. | Deflectable spatial light modulator having stopping mechanisms |
US20010040675A1 (en) * | 2000-01-28 | 2001-11-15 | True Randall J. | Method for forming a micromechanical device |
US20020071169A1 (en) * | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
US6388661B1 (en) * | 2000-05-03 | 2002-05-14 | Reflectivity, Inc. | Monochrome and color digital display systems and methods |
US6337760B1 (en) * | 2000-07-17 | 2002-01-08 | Reflectivity, Inc. | Encapsulated multi-directional light beam steering device |
US6867897B2 (en) * | 2003-01-29 | 2005-03-15 | Reflectivity, Inc | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays |
US6873450B2 (en) * | 2000-08-11 | 2005-03-29 | Reflectivity, Inc | Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields |
US6431714B1 (en) * | 2000-10-10 | 2002-08-13 | Nippon Telegraph And Telephone Corporation | Micro-mirror apparatus and production method therefor |
US6543286B2 (en) * | 2001-01-26 | 2003-04-08 | Movaz Networks, Inc. | High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array |
US6429033B1 (en) * | 2001-02-20 | 2002-08-06 | Nayna Networks, Inc. | Process for manufacturing mirror devices using semiconductor technology |
EP1237032A3 (en) * | 2001-02-26 | 2003-08-20 | Texas Instruments Incorporated | Optical micromirror assembly on a wireless network printed circuit board having in-package mirror position feedback |
US6542653B2 (en) * | 2001-03-12 | 2003-04-01 | Integrated Micromachines, Inc. | Latching mechanism for optical switches |
US6856446B2 (en) * | 2001-12-12 | 2005-02-15 | Texas Instruments Incorporated | Digital micromirror device having mirror-attached spring tips |
US20040004753A1 (en) * | 2002-06-19 | 2004-01-08 | Pan Shaoher X. | Architecture of a reflective spatial light modulator |
US7009745B2 (en) * | 2002-10-31 | 2006-03-07 | Texas Instruments Incorporated | Coating for optical MEMS devices |
US6900922B2 (en) * | 2003-02-24 | 2005-05-31 | Exajoule, Llc | Multi-tilt micromirror systems with concealed hinge structures |
TW591778B (en) * | 2003-03-18 | 2004-06-11 | Advanced Semiconductor Eng | Package structure for a microsystem |
-
2003
- 2003-02-27 US US10/378,058 patent/US20040004753A1/en not_active Abandoned
- 2003-05-30 JP JP2004515727A patent/JP2005529377A/ja active Pending
- 2003-05-30 CN CNB038017458A patent/CN100414599C/zh not_active Expired - Fee Related
- 2003-05-30 RU RU2004118060/09A patent/RU2277265C2/ru not_active IP Right Cessation
- 2003-05-30 WO PCT/US2003/017342 patent/WO2004001717A1/en active Application Filing
- 2003-05-30 EP EP03739021A patent/EP1514256A4/en not_active Withdrawn
- 2003-05-30 KR KR1020047006930A patent/KR100652857B1/ko not_active IP Right Cessation
- 2003-05-30 AU AU2003245382A patent/AU2003245382A1/en not_active Abandoned
- 2003-05-30 CA CA2472350A patent/CA2472350C/en not_active Expired - Fee Related
-
2004
- 2004-01-13 US US10/756,972 patent/US7092140B2/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2167388Y (zh) * | 1993-07-27 | 1994-06-01 | 四川大学 | 薄膜型铁电集成空间光调制器 |
US5452024A (en) * | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
CN1126923A (zh) * | 1993-12-03 | 1996-07-17 | 德克萨斯仪器股份有限公司 | 提高横向分辨率的数字微镜器件结构 |
US5646772A (en) * | 1996-05-10 | 1997-07-08 | Lucent Technologies Inc. | Methods and apparatus for a multi-electrode micromechanical optical modulator |
US20020071166A1 (en) * | 2000-12-07 | 2002-06-13 | Sungho Jin | Magnetically packaged optical MEMs device and method for making the same |
US20020131679A1 (en) * | 2001-02-07 | 2002-09-19 | Nasiri Steven S. | Microelectromechanical mirror and mirror array |
JP2002258174A (ja) * | 2001-03-02 | 2002-09-11 | Seiko Epson Corp | 光変調装置及びそれを有する電子機器 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103296069A (zh) * | 2012-02-28 | 2013-09-11 | 台湾积体电路制造股份有限公司 | FinFET及其制造方法 |
CN103296069B (zh) * | 2012-02-28 | 2016-03-09 | 台湾积体电路制造股份有限公司 | FinFET及其制造方法 |
CN107771294A (zh) * | 2015-06-19 | 2018-03-06 | 康宁股份有限公司 | 具有光漫射纤维的纤维发光系统和操作具有光漫射纤维的纤维发光系统的方法 |
CN107771294B (zh) * | 2015-06-19 | 2019-12-03 | 康宁股份有限公司 | 具有光漫射纤维的纤维发光系统和操作具有光漫射纤维的纤维发光系统的方法 |
Also Published As
Publication number | Publication date |
---|---|
US20040004753A1 (en) | 2004-01-08 |
RU2004118060A (ru) | 2005-11-10 |
US7092140B2 (en) | 2006-08-15 |
JP2005529377A (ja) | 2005-09-29 |
EP1514256A1 (en) | 2005-03-16 |
CA2472350A1 (en) | 2003-12-31 |
AU2003245382A1 (en) | 2004-01-06 |
US20040145795A1 (en) | 2004-07-29 |
RU2277265C2 (ru) | 2006-05-27 |
KR20040111336A (ko) | 2004-12-31 |
CN1732506A (zh) | 2006-02-08 |
CA2472350C (en) | 2010-10-19 |
EP1514256A4 (en) | 2009-11-11 |
KR100652857B1 (ko) | 2006-12-01 |
WO2004001717A1 (en) | 2003-12-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100414599C (zh) | 反射式空间光调节器的结构 | |
CN1329284C (zh) | 反射式空间光调节器的制造 | |
US7118234B2 (en) | Reflective spatial light modulator | |
US7477440B1 (en) | Reflective spatial light modulator having dual layer electrodes and method of fabricating same | |
US7428094B2 (en) | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge | |
JP3851679B2 (ja) | 空間光変調器 | |
US6046840A (en) | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements | |
CN100380165C (zh) | 空间光调制器、其制造方法以及投影系统 | |
US7585747B1 (en) | Low temperature hermetic bonding at water level and method of bonding for micro display application | |
CN101316790B (zh) | 制造反射像素的方法及反射结构 | |
CN101093282B (zh) | 反射式空间光调节器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
CI01 | Publication of corrected invention patent application |
Correction item: Priority Correct: [32]2003.02.27[33]US[31]10/378,058 Number: 06 Page: 650 Volume: 22 |
|
CI02 | Correction of invention patent application |
Correction item: Priority Correct: [32]2003.02.27[33]US[31]10/378,058 Number: 06 Page: The title page Volume: 22 |
|
COR | Change of bibliographic data |
Free format text: CORRECT: PRIORITY TO: ¢32!2003.2.27¢33!US ¢31!10/378,058 |
|
ERR | Gazette correction |
Free format text: CORRECT: PRIORITY; ¢32!2003.2.27¢33!US ¢31!10/378,058 |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CI01 | Publication of corrected invention patent application |
Correction item: Priority Correct: 2002.06.19 US 60/390,389|2003.02.27 US 10/378,058 Number: 6 Page: 650 Volume: 22 |
|
CI02 | Correction of invention patent application |
Correction item: Priority Correct: 2002.06.19 US 60/390,389|2003.02.27 US 10/378,058 Number: 6 Page: The title page Volume: 22 |
|
COR | Change of bibliographic data |
Free format text: CORRECT: PRIORITY TO: 2002.6.19 US 60/390,389¬2003.2.27 US 10/378,058 |
|
ERR | Gazette correction |
Free format text: CORRECT: PRIORITY; 2002.6.19 US 60/390,389¬2003.2.27 US 10/378,058 |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080827 Termination date: 20190530 |