EP1636629A4 - Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge - Google Patents

Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Info

Publication number
EP1636629A4
EP1636629A4 EP04710687A EP04710687A EP1636629A4 EP 1636629 A4 EP1636629 A4 EP 1636629A4 EP 04710687 A EP04710687 A EP 04710687A EP 04710687 A EP04710687 A EP 04710687A EP 1636629 A4 EP1636629 A4 EP 1636629A4
Authority
EP
European Patent Office
Prior art keywords
fabrication
light modulator
spatial light
reflective spatial
high fill
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04710687A
Other languages
German (de)
French (fr)
Other versions
EP1636629A1 (en
Inventor
Shaoher X Pan
Xiao Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miradia Inc
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of EP1636629A1 publication Critical patent/EP1636629A1/en
Publication of EP1636629A4 publication Critical patent/EP1636629A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
EP04710687A 2003-06-02 2004-02-12 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge Withdrawn EP1636629A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61096703A 2003-06-30 2003-06-30
PCT/US2004/004357 WO2004109364A1 (en) 2003-06-02 2004-02-12 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Publications (2)

Publication Number Publication Date
EP1636629A1 EP1636629A1 (en) 2006-03-22
EP1636629A4 true EP1636629A4 (en) 2009-04-15

Family

ID=33514051

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04710687A Withdrawn EP1636629A4 (en) 2003-06-02 2004-02-12 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Country Status (5)

Country Link
EP (1) EP1636629A4 (en)
JP (1) JP2006526806A (en)
KR (1) KR20060016800A (en)
TW (1) TWI356912B (en)
WO (1) WO2004109364A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
EP1704424B1 (en) * 2003-10-27 2016-12-07 Spatial Photonics, Inc. High contrast spatial light modulator and method
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
JP5176387B2 (en) * 2007-05-18 2013-04-03 大日本印刷株式会社 Membrane structure manufacturing method
US7859971B2 (en) 2007-06-29 2010-12-28 International Business Machines Corporation Directory hologram forming an anchor location of a pattern of stored holograms
KR100888076B1 (en) * 2008-05-02 2009-03-11 이화여자대학교 산학협력단 A method for manufacturing a micro-mirror using a self-aligned electrode

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757197A1 (en) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US6204085B1 (en) * 1998-09-15 2001-03-20 Texas Instruments Incorporated Reduced deformation of micromechanical devices through thermal stabilization
US20020013054A1 (en) * 2000-05-12 2002-01-31 Farmer, Ii Kenneth R. Single crystal silicon micro-actuator/mirror and method therefor
EP1180848A1 (en) * 2000-08-09 2002-02-20 STMicroelectronics S.r.l. Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
US20020149294A1 (en) * 2001-04-13 2002-10-17 Olympus Optical Co., Ltd. Actuator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US6529310B1 (en) * 1998-09-24 2003-03-04 Reflectivity, Inc. Deflectable spatial light modulator having superimposed hinge and deflectable element
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757197A1 (en) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US6204085B1 (en) * 1998-09-15 2001-03-20 Texas Instruments Incorporated Reduced deformation of micromechanical devices through thermal stabilization
US20020013054A1 (en) * 2000-05-12 2002-01-31 Farmer, Ii Kenneth R. Single crystal silicon micro-actuator/mirror and method therefor
EP1180848A1 (en) * 2000-08-09 2002-02-20 STMicroelectronics S.r.l. Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
US20020149294A1 (en) * 2001-04-13 2002-10-17 Olympus Optical Co., Ltd. Actuator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004109364A1 *

Also Published As

Publication number Publication date
WO2004109364A1 (en) 2004-12-16
JP2006526806A (en) 2006-11-24
EP1636629A1 (en) 2006-03-22
KR20060016800A (en) 2006-02-22
TW200525272A (en) 2005-08-01
TWI356912B (en) 2012-01-21

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 20051222

AK Designated contracting states

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
RIN1 Information on inventor provided before grant (corrected)

Inventor name: YANG, XIAO

Inventor name: PAN, SHAOHER, X.

RIN1 Information on inventor provided before grant (corrected)

Inventor name: YANG, XIAO

Inventor name: PAN, SHAOHER, X.

A4 Supplementary search report drawn up and despatched

Effective date: 20090317

17Q First examination report despatched

Effective date: 20090619

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20091030